CN111230689A - Double-gantry dicing saw with symmetrical YZ plane - Google Patents
Double-gantry dicing saw with symmetrical YZ plane Download PDFInfo
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- CN111230689A CN111230689A CN202010053497.9A CN202010053497A CN111230689A CN 111230689 A CN111230689 A CN 111230689A CN 202010053497 A CN202010053497 A CN 202010053497A CN 111230689 A CN111230689 A CN 111230689A
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B27/00—Other grinding machines or devices
- B24B27/06—Grinders for cutting-off
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B27/00—Other grinding machines or devices
- B24B27/06—Grinders for cutting-off
- B24B27/0683—Accessories therefor
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B41/00—Component parts such as frames, beds, carriages, headstocks
- B24B41/007—Weight compensation; Temperature compensation; Vibration damping
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B41/00—Component parts such as frames, beds, carriages, headstocks
- B24B41/02—Frames; Beds; Carriages
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B41/00—Component parts such as frames, beds, carriages, headstocks
- B24B41/04—Headstocks; Working-spindles; Features relating thereto
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B41/00—Component parts such as frames, beds, carriages, headstocks
- B24B41/06—Work supports, e.g. adjustable steadies
- B24B41/068—Table-like supports for panels, sheets or the like
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B47/00—Drives or gearings; Equipment therefor
- B24B47/02—Drives or gearings; Equipment therefor for performing a reciprocating movement of carriages or work- tables
- B24B47/04—Drives or gearings; Equipment therefor for performing a reciprocating movement of carriages or work- tables by mechanical gearing only
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Dicing (AREA)
Abstract
The invention relates to a double-gantry dicing saw with a symmetrical YZ plane, which comprises a base, wherein an X-axis linear motion module is arranged on the base along an X axis, an Rz-axis rotary module is arranged on the X-axis linear motion module, two portal frames are arranged on the base at two sides of the X-axis linear motion module at intervals in parallel along the X axis, a Y-axis linear motion module is arranged at the top between the two portal frames along the Y axis, a Z-axis linear motion module is arranged on the Y-axis linear motion module along the Z axis, and a main shaft module arranged above the Rz-axis rotary module is arranged at the bottom of the Z-axis linear motion module. The two portal frames, the Y-axis linear motion module, the Z-axis linear motion module and the main shaft module are integrally and symmetrically arranged about a YZ plane. Compared with the single gantry structure in the prior art, the single gantry structure can reduce the influence of factors such as heat, dead weight, motion inertia force, vibration and the like, and improve the processing precision of the dicing saw.
Description
Technical Field
The invention relates to the technical field of gantry scribing machine devices, in particular to a scribing machine with a double gantry structure and symmetry about a YZ plane.
Background
The abrasive wheel scribing machine is a precise numerical control machining device for scribing and dividing sheet or block materials by using an extremely thin abrasive wheel blade rotating at a high speed. The processing object is very wide, and examples thereof include a silicon wafer, a semiconductor compound wafer, an oxide wafer, a chip LED substrate, a semiconductor package substrate, an electronic component, an optical element, ceramics, glass, crystal, sapphire, a composite material, and the like. Many applications, such as silicon wafer dicing, place extremely high precision requirements on abrasive wheel scribers, such as requiring a positioning precision of 2 microns over a 300 mm usable stroke. This level of accuracy is required to be already substantially close to the limits of existing mechanical structures and motion control systems. Especially for mechanical structures, besides geometric errors, static deformation, thermal deformation, vibration and the like are important factors influencing the precision.
The basic structure of the abrasive wheel scribing machine is composed of X, Y, Z three mutually orthogonal linear motion axes, a rotary motion axis q and a spindle rotating at high speed. The workpiece is clamped on the Rz-axis rotary table in a horizontal state, and the rotary table rotates to correct and change the angle of the workpiece in the horizontal plane; the rotary table is mounted on an X-axis linear motion sliding table, and the X-axis reciprocates to complete the cutting feed motion of the workpiece relative to the blade and the return stroke without cutting. The main shaft provided with the blade is fixed on the Z-axis sliding table, and the cutting depth of the blade can be adjusted by the up-and-down movement of the Z axis; the Z axis is fixed on the Y axis sliding table, and the Y axis moves to adjust the position and the distance of the cutting line.
The structural form of the existing abrasive wheel scribing machine is divided into two different designs of a cantilever type and a gantry type. The equipment for processing small-sized workpieces such as 4-6 inches of wafers is mostly cantilever type, and the main shaft of the equipment is suspended above the turntable; and the equipment of processing jumbo size work piece more than 8 cun is mostly the planer-type, and its Y axle strides on the X axle through fixed portal frame, has avoided the main shaft to hang the condition on the revolving stage, therefore has higher rigidity and structural stability than the cantilever type. However, in the conventional gantry structure, only one gantry is provided, and a pair of linear guide rails of the Y axis are laterally arranged on the front surface of the gantry beam from top to bottom, so that the deformation of the axes of the main shaft and the Y Z of the two linear motion pairs deviating from the symmetrical plane is easily caused by the dead weight or the motion inertia force.
Disclosure of Invention
The applicant aims at the defects in the prior art and provides a reasonable-structure double-gantry dicing saw symmetric about a YZ plane, and the symmetric structure about the YZ plane greatly reduces and inhibits the deformation of a main shaft axis and Y Z linear motion secondary axes on the symmetric plane from deviating from the symmetric plane due to self weight or motion inertia force.
The technical scheme adopted by the invention is as follows:
a double-gantry dicing saw with a symmetrical YZ plane comprises a base, wherein an X-axis linear motion module is arranged on the base along an X axis, an Rz-axis rotary module is arranged on the X-axis linear motion module, two portal frames are arranged on the base on two sides of the X-axis linear motion module at intervals in parallel along the X axis, a Y-axis linear motion module is arranged at the top between the two portal frames along the Y axis, a Z-axis linear motion module is arranged on the Y-axis linear motion module along the Z axis, and a main shaft module arranged above the Rz-axis rotary module is arranged at the bottom of the Z-axis linear motion module;
the two portal frames, the Y-axis linear motion module, the Z-axis linear motion module and the main shaft module are integrally and symmetrically arranged about a YZ plane.
As a further improvement of the above technical solution:
the structure of the X-axis linear motion module is as follows: the X-axis sliding table comprises a first base, wherein two X-axis linear guide rails which are arranged in parallel at intervals are arranged on the first base, and an X-direction sliding table is arranged on the two X-axis linear guide rails in a sliding mode through a sliding block assembly; x is to fixed mounting on the slip table Rz axle gyration module, its structure is: the device comprises a second base, wherein an Rz-axis direct-drive rotary motor is arranged on the second base, and an output shaft of the second base is connected with a porous ceramic vacuum chuck for adsorbing and fixing a processed workpiece.
An X-axis ball screw is arranged on the first base between the two X-axis linear guide rails through a support frame, one end of the X-axis ball screw is connected with an output shaft of the first servo motor, the other end of the X-axis ball screw is fixed through a first bearing support, and the X-axis ball screw is in transmission connection with the X-direction sliding table through a ball nut screwed on the X-axis ball screw.
The structure of the Y-axis linear motion module is as follows: the device comprises two Y-axis linear guide rails which are arranged on the top surfaces of cross beams at the tops of two portal frames respectively and are arranged in parallel, and Y-direction sliding tables are slidably mounted on the two Y-axis linear guide rails.
The structure of the Z-axis linear motion module is as follows: including locating Y to the Z axle base of slip table bottom, Z axle base is located the interval department between two portal frames to extend to Rz axle gyration module along the Z axle.
Two Z-axis linear guide rails which are arranged in parallel at intervals are arranged on one side face of the Z-axis base, Z-direction sliding tables are arranged on the two Z-axis linear guide rails in a sliding mode through sliding block assemblies, a main shaft is arranged at the lower ends of the Z-direction sliding tables through a main shaft mounting support, and a blade is arranged at one end of each Z-direction sliding table through a clamping flange device.
A Z-axis ball screw in transmission connection with the stepping motor or a third servo motor is arranged at the interval between the two Z-axis linear guide rails, and a third bearing support is arranged at the free end of the Z-axis ball screw; and the Z-axis ball screw is connected with the Z-direction sliding table through a nut screwed on the Z-axis ball screw.
The bottom of the Y-direction sliding table is in transmission connection with a Y-axis screw rod through a sliding block assembly, one end of the Y-axis screw rod is installed and is in transmission connection with an output shaft of a second servo motor, and the other end of the Y-axis screw rod is fixed through a second bearing support.
The invention has the following beneficial effects:
the double-gantry-based scribing machine is compact and reasonable in structure, and based on the double-gantry-based structure, compared with a single gantry structure in the prior art, the influence of factors such as heat, dead weight, motion inertia force and vibration can be reduced, and the processing precision of the scribing machine is improved.
Virtual YZ symmetry is added in the basic structure of the dicing saw, and the double gantry, the Y-axis module, the Z-axis module and the spindle module are completely symmetrical about a YZ plane, so that compared with a single gantry structure without a YZ symmetrical plane used in the prior art, the dicing saw device provided by the invention has the following advantages:
the structure symmetrical about the YZ plane can greatly reduce and inhibit the deformation of the main shaft axis and the YZ two linear motion secondary axes on the symmetrical plane, which deviate from the symmetrical plane due to the self-weight or the motion inertia force.
In addition to structural symmetry, the main heat sources (motor, lead screw and nut, guide rail and slider) of the Y, Z axis linear module are also symmetric about the YZ plane, so the YZ plane is the natural thermal symmetry plane of the two modules, and the deviation of the main shaft axis and the axis of the two YZ linear motion pairs from the symmetry plane due to thermal deformation can be further greatly reduced and inhibited.
The double gantry of the invention has higher rigidity and more stable structure, and is beneficial to reducing the cutting quality problem caused by vibration.
Drawings
Fig. 1 is a schematic perspective view of the present invention.
Fig. 2 is a rear view of the X-axis of fig. 1.
Fig. 3 is a schematic structural diagram of an X-axis linear motion module according to the present invention.
Fig. 4 is a schematic structural diagram of the Y-axis linear motion module according to the present invention.
Fig. 5 is a schematic structural diagram of a Z-axis linear motion module according to the present invention.
FIG. 6 is a schematic view of an installation structure of the spindle module of the present invention.
Wherein: 1. a base; 2. a gantry; 3. an X-axis linear motion module; 4. an Rz axis rotation module; 5. a Y-axis linear motion module; 6. a Z-axis linear motion module; 7. a spindle module; 301. a first base; 302. an X-axis linear guide rail; 303. an X-axis ball screw; 304. a support frame; 305. a first bearing support; 308. a first servo motor; 309. an X-direction sliding table; 401. a second base; 402. a rotary motor; 403. a vacuum chuck; 601. a Z-axis base; 602. a Z-axis linear guide rail; 603. a Z-axis ball screw; 604. a third bearing support; 607. a third servo motor; 608. a Z-direction sliding table; 701. a main shaft mounting bracket; 702. a main shaft; 703. a blade; 501. a Y-axis linear guide rail; 502. a Y-axis lead screw; 504. a second bearing support; 506. a second servo motor; 509. and a Y-direction sliding table.
Detailed Description
The following describes embodiments of the present invention with reference to the drawings.
As shown in fig. 1 and fig. 2, the double-gantry dicing saw with a symmetrical YZ plane of this embodiment includes a base 1, an X-axis linear motion module 3 is disposed on the base 1 along an X-axis, an Rz-axis rotation module 4 is mounted on the base 1, two gantries 2 are disposed on the base 1 at two sides of the X-axis linear motion module 3 at intervals along the X-axis, a Y-axis linear motion module 5 is mounted at the top between the two gantries 2 along the Y-axis, a Z-axis linear motion module 6 is mounted on the top along the Z-axis, and a spindle module 7 is mounted at the bottom of the Z-axis linear motion module 6 and above the Rz-axis rotation module 4.
The two portal frames 2, the Y-axis linear motion module 5, the Z-axis linear motion module 6 and the spindle module 7 are symmetrically arranged about a YZ plane on the whole.
As shown in fig. 3, the X-axis linear motion module 3 has the following structure: the X-axis sliding table comprises a first base 301, wherein two X-axis linear guide rails 302 which are arranged in parallel at intervals are arranged on the first base 301, and an X-direction sliding table 309 is arranged on the two X-axis linear guide rails 302 in a sliding mode through a sliding block assembly; x is to fixed mounting Rz axle gyration module 4 on slip table 309, and its structure is: comprises a second base 401, on which an Rz-axis direct-drive rotary motor 402 is mounted, and an output shaft thereof is connected with a porous ceramic vacuum chuck 403 for adsorbing and fixing a processed workpiece.
An X-axis ball screw 303 is arranged on a first base 301 between two X-axis linear guide rails 302 through a support frame 304, one end of the X-axis ball screw 303 is connected with an output shaft of a first servo motor 308, the other end of the X-axis ball screw is fixed through a first bearing support 305, and the X-axis ball screw 303 is in transmission connection with an X-direction sliding table 309 through a ball nut screwed on the X-axis ball screw.
As shown in fig. 4, the structure of the Y-axis linear motion module 5 is: the device comprises two Y-axis linear guide rails 501 which are arranged on the top surfaces of top beams of two portal frames 2 in parallel, and Y-direction sliding tables 509 are arranged on the two Y-axis linear guide rails 501 in a sliding mode.
The bottom of the Y-direction sliding table 509 is in transmission connection with a Y-axis screw rod 502 through a sliding block assembly, one end of the Y-axis screw rod 502 is installed and in transmission connection with an output shaft of a second servo motor 506, and the other end of the Y-axis screw rod is fixed through a second bearing support 504.
As shown in fig. 5, the structure of the Z-axis linear motion module 6 is: including locating the Z axle base 601 to the slip table 509 bottom of Y, Z axle base 601 is located the interval department between two portal frames 2 to extend to Rz axle gyration module 4 along the Z axle.
As shown in fig. 6, two Z-axis linear guide rails 602 arranged in parallel at intervals are mounted on one side surface of a Z-axis base 601, Z-direction sliding tables 608 are slidably mounted on the two Z-axis linear guide rails 602 through slider assemblies, a main shaft 702 is mounted at the lower ends of the Z-direction sliding tables 608 through a main shaft mounting bracket 701, and a blade 703 is mounted at one end of the Z-direction sliding tables 608 through a clamping flange device.
A Z-axis ball screw 603 in transmission connection with a stepping motor or a third servo motor 607 is arranged at the interval between the two Z-axis linear guide rails 602, and a third bearing support 604 is arranged at the free end of the Z-axis ball screw; the Z-axis ball screw 603 is connected to the Z-slide 608 by a nut screwed thereon.
In the dicing saw of the embodiment, the double gantry 2, the Y-axis module 5, the Z-axis module 6, and the spindle module 7 are completely symmetrical about a YZ plane formed by the axes of the Y-axis and the Z-axis; theoretically, the axis of the main shaft 702, the linear motion pairs of the Y axis and the Z axis and the screw rod driving pair are all superposed with the symmetrical plane of the double gantry.
In the implementation process, a workpiece to be scribed is placed on the vacuum chuck 403 and fixed through vacuum suction, the rotating motor 402 rotates around the Rz axis (parallel to the Z axis) through the Rz axis rotating module 4, and the blade 703 performs scribing operation on the workpiece through the X axis linear motion module, the Y axis linear motion module, the Z axis linear motion module 6 and the position adjustment.
The above description is intended to be illustrative and not restrictive, and the scope of the invention is defined by the appended claims, which may be modified in any manner within the scope of the invention.
Claims (8)
1. The utility model provides a two gantry structure scribers about YZ plane symmetry which characterized in that: the X-axis linear motion module (3) is arranged on the base (1) along an X axis, an Rz-axis rotary module (4) is arranged on the X-axis linear motion module (3), two portal frames (2) are arranged on the base (1) on two sides of the X-axis linear motion module (3) in parallel at intervals along the X axis, a Y-axis linear motion module (5) is arranged at the top between the two portal frames (2) along the Y axis, a Z-axis linear motion module (6) is arranged on the Y-axis linear motion module along the Z axis, and a main shaft module (7) arranged above the Rz-axis rotary module (4) is arranged at the bottom of the Z-axis linear motion module (6);
the two portal frames (2), the Y-axis linear motion module (5), the Z-axis linear motion module (6) and the main shaft module (7) are symmetrically arranged on the whole about a YZ plane.
2. The dual gantry dicing saw of claim 1 symmetric about the YZ plane, wherein: the structure of the X-axis linear motion module (3) is as follows: the X-axis linear guide rail mechanism comprises a first base (301), wherein two X-axis linear guide rails (302) which are arranged in parallel at intervals are arranged on the first base, and an X-direction sliding table (309) is arranged on the two X-axis linear guide rails (302) in a sliding mode through a sliding block assembly; x is to fixed mounting on slip table (309) Rz axle gyration module (4), its structure is: the device comprises a second base (401), wherein an Rz-axis direct-drive rotary motor (402) is arranged on the second base, and an output shaft of the second base is connected with a porous ceramic vacuum chuck (403) for adsorbing and fixing a workpiece to be processed.
3. A double gantry dicing saw symmetric about a YZ plane according to claim 2, wherein: an X-axis ball screw (303) is arranged on a first base (301) between two X-axis linear guide rails (302) through a support frame (304), one end of the X-axis ball screw is connected with an output shaft of a first servo motor (308), the other end of the X-axis ball screw is fixed through a first bearing support (305), and the X-axis ball screw (303) is in transmission connection with an X-direction sliding table (309) through a ball nut screwed on the X-axis ball screw.
4. The dual gantry dicing saw of claim 1 symmetric about the YZ plane, wherein: the structure of the Y-axis linear motion module (5) is as follows: the device comprises two Y-axis linear guide rails (501) which are arranged on the top surfaces of top beams of two portal frames (2) in parallel, and Y-direction sliding tables (509) are arranged on the two Y-axis linear guide rails (501) in a sliding mode.
5. The dual gantry dicing saw of claim 4 symmetric about the YZ plane, wherein: the structure of the Z-axis linear motion module (6) is as follows: including locating Z axle base (601) of Y to slip table (509) bottom, Z axle base (601) are located interval department between two portal frames (2) to along Z axle extension to Rz axle gyration module (4).
6. The dual gantry dicing saw of claim 5, symmetric about the YZ plane, wherein: two Z-axis linear guide rails (602) which are arranged in parallel at intervals are arranged on one side face of a Z-axis base (601), a Z-direction sliding table (608) is arranged on the two Z-axis linear guide rails (602) in a sliding mode through a sliding block assembly, a main shaft (702) is arranged at the lower end of the Z-direction sliding table (608) through a main shaft mounting support (701), and a blade (703) is arranged at one end of the main shaft mounting support through a clamping flange device.
7. The dual gantry dicing saw of claim 6, symmetrical about the YZ plane, wherein: a Z-axis ball screw (603) in transmission connection with a stepping motor or a third servo motor (607) is arranged at the interval between the two Z-axis linear guide rails (602), and a third bearing support (604) is arranged at the free end of the Z-axis ball screw; and the Z-axis ball screw (603) is connected with the Z-direction sliding table (608) through a nut screwed on the Z-axis ball screw.
8. The dual gantry dicing saw of claim 4 symmetric about the YZ plane, wherein: the bottom of the Y-direction sliding table (509) is in transmission connection with a Y-axis screw rod (502) through a sliding block assembly, one end of the Y-axis screw rod (502) is installed and in transmission connection with an output shaft of a second servo motor (506), and the other end of the Y-axis screw rod is fixed through a second bearing support (504).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010053497.9A CN111230689A (en) | 2020-01-17 | 2020-01-17 | Double-gantry dicing saw with symmetrical YZ plane |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010053497.9A CN111230689A (en) | 2020-01-17 | 2020-01-17 | Double-gantry dicing saw with symmetrical YZ plane |
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| Publication Number | Publication Date |
|---|---|
| CN111230689A true CN111230689A (en) | 2020-06-05 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202010053497.9A Pending CN111230689A (en) | 2020-01-17 | 2020-01-17 | Double-gantry dicing saw with symmetrical YZ plane |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112223501A (en) * | 2020-10-13 | 2021-01-15 | 沈阳汉为科技有限公司 | Novel honeycomb ceramic mould fluting device |
| CN113199369A (en) * | 2021-05-13 | 2021-08-03 | 沈阳和研科技有限公司 | Be applicable to semi-automatic scribing machine telecontrol equipment |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0642868A1 (en) * | 1993-09-10 | 1995-03-15 | Charmilles Technologies S.A. | Electroerosion machine with novel frame structure |
| CN201415278Y (en) * | 2009-03-28 | 2010-03-03 | 广州市敏嘉制造技术有限公司 | Double-beam planer type milling machine |
| CN103350351A (en) * | 2013-07-16 | 2013-10-16 | 山东理工大学 | Desktop three-axis gantry type micro machining machine tool |
| CN105047555A (en) * | 2014-04-23 | 2015-11-11 | 株式会社迪思科 | Cutting apparatus |
| CN108115452A (en) * | 2017-12-30 | 2018-06-05 | 东莞市巨冈机械工业有限公司 | A kind of rigid and the good overhead viaduct type gantry processor bed of stability |
-
2020
- 2020-01-17 CN CN202010053497.9A patent/CN111230689A/en active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0642868A1 (en) * | 1993-09-10 | 1995-03-15 | Charmilles Technologies S.A. | Electroerosion machine with novel frame structure |
| CN201415278Y (en) * | 2009-03-28 | 2010-03-03 | 广州市敏嘉制造技术有限公司 | Double-beam planer type milling machine |
| CN103350351A (en) * | 2013-07-16 | 2013-10-16 | 山东理工大学 | Desktop three-axis gantry type micro machining machine tool |
| CN105047555A (en) * | 2014-04-23 | 2015-11-11 | 株式会社迪思科 | Cutting apparatus |
| CN108115452A (en) * | 2017-12-30 | 2018-06-05 | 东莞市巨冈机械工业有限公司 | A kind of rigid and the good overhead viaduct type gantry processor bed of stability |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112223501A (en) * | 2020-10-13 | 2021-01-15 | 沈阳汉为科技有限公司 | Novel honeycomb ceramic mould fluting device |
| CN113199369A (en) * | 2021-05-13 | 2021-08-03 | 沈阳和研科技有限公司 | Be applicable to semi-automatic scribing machine telecontrol equipment |
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