CN114406393A - Aluminum pipe target welding base auxiliary device and using method thereof - Google Patents
Aluminum pipe target welding base auxiliary device and using method thereof Download PDFInfo
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- CN114406393A CN114406393A CN202210078535.5A CN202210078535A CN114406393A CN 114406393 A CN114406393 A CN 114406393A CN 202210078535 A CN202210078535 A CN 202210078535A CN 114406393 A CN114406393 A CN 114406393A
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- Prior art keywords
- tube
- target
- aluminum
- base
- aluminum tube
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K3/00—Tools, devices, or special appurtenances for soldering, e.g. brazing, or unsoldering, not specially adapted for particular methods
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K3/00—Tools, devices, or special appurtenances for soldering, e.g. brazing, or unsoldering, not specially adapted for particular methods
- B23K3/08—Auxiliary devices therefor
Abstract
The invention provides an auxiliary device for an aluminum tube target welding base and a using method thereof. The auxiliary device enables the bottom edges of the inner pipe and the outer pipe to be completely sealed in the welding process, and the welding flux at the gap is not lost, so that the purposes of ensuring the thickness of a welding layer and improving the qualified rate of brazing are achieved.
Description
Technical Field
The invention belongs to the field of metal targets, and relates to an aluminum pipe target welding base auxiliary device and a using method thereof.
Background
The aluminum tube target for the semiconductor is divided into two parts due to the special structure, the inner lining tube is made of stainless steel, and the outer tube is made of high-purity aluminum. The inner pipe and the outer pipe are combined by brazing and welding, and can be normally used on a client sputtering machine. However, when the aluminum tube target is welded, the inner tube and the outer tube have gaps, so that the solder cannot be retained easily, and the welding needs to be kept in a vertical state, so that how to design and manufacture the welding base is an unavoidable practical problem and difficulty when the aluminum tube target is welded.
When the aluminum tube target is welded, the welding surfaces of the inner wall of the outer tube and the outer wall of the inner tube need to be respectively soaked, so that the adhesiveness between the welding flux and the welding surfaces is high, and the outer tube and the inner tube need to be sleeved after the soaking is finished. Sufficient indium solder is poured into the gap between the inner pipe and the outer pipe after the sleeve joint, the edges of the inner pipe and the outer pipe of the base are completely sealed in the pouring process to ensure that the indium solder cannot leak, and the pipe body is vertical to the ground. At present, no corresponding auxiliary device and reasonable method exist for welding the high-purity aluminum pipe target, and solder at the gap between the inner pipe and the outer pipe is reserved, so that the solder permeates out in the process, and the two parts of pipe bodies cannot be ensured to be vertical to the ground.
CN108546921A discloses a method for controlling gap in tube target bonding, which includes a back tube and a tube target material bonded to each other, the back tube is made of titanium or stainless steel, the tube target material is made of metal or ceramic, an adjusting ring is arranged on the outer side of the tube target material, the adjusting ring is coated on the tube target material and the back tube, the adjusting ring includes an inner ring, an outer ring and sealing flanges arranged on two end faces, wherein an adjusting part is arranged on the sealing flange at one end, the adjusting part is used for adjusting the same radial distance from the inner ring to the outer ring, the inner side face of the inner ring is bonded to the tube target material, when in use, the inner ring is adjusted to the position where the tube target material is bonded through the adjusting part, the adjusting part is locked, and then heating is performed. This method of controlling the inner diameter requires an adjustment assembly between the inner tube and the outer tube of the tube target, which is disadvantageous for welding the inner tube and the outer tube.
Disclosure of Invention
Aiming at the technical problems in the prior art, the invention provides an auxiliary device for an aluminum pipe target welding base and a use method thereof.
In order to achieve the purpose, the invention adopts the following technical scheme:
the invention aims to provide an auxiliary device for a pipe target welding base, which comprises a base, wherein the base is provided with a groove for accommodating an inner pipe of an aluminum pipe target, and the edge of the top end of the groove is provided with a sealing groove.
In a preferred embodiment of the present invention, the inner diameter of the groove is the same as the outer diameter of the inner tube of the aluminum tube target.
In the present invention, the shape of the groove may be set according to the shape of the aluminum tube target, and thus the shape and depth of the groove are not particularly limited in the present invention. Preferably, the cross-section of the groove is circular, and the bottom of the groove is parallel to the bottom surface of the base.
As a preferred technical solution of the present invention, the sealing groove is used for accommodating a sealing ring.
In a preferred embodiment of the present invention, an outer diameter of the seal groove is not smaller than an inner diameter of the aluminum tube target outer tube.
In the invention, the inner diameter of the sealing groove is the same as the outer diameter of the sealing ring, but when the sealing ring is preferably a high-temperature-resistant rubber sealing ring in the application, the outer diameter of the sealing groove can be slightly smaller than the outer diameter of the sealing ring because the sealing ring has certain elasticity.
As a preferable technical scheme of the invention, the bottom of the base is provided with a fixing hole.
In a preferred embodiment of the present invention, the number of the fixing holes is 2 to 8, such as 3, 4, 5, 6, or 7.
Another object of the present invention is to provide a method for using the tube target welding base auxiliary device, the method comprising:
and fixing the base on a welding base, placing the aluminum tube target inner tube into the groove, arranging a sealing ring sleeve outside the aluminum tube target inner tube, moving the aluminum tube target inner tube to the sealing groove, arranging the aluminum tube target outer tube sleeve outside the aluminum tube target inner tube, pressing the aluminum tube target outer tube on the sealing ring, pouring solder into a gap between the aluminum tube target inner tube and the aluminum tube target outer tube, and separating the aluminum tube target from the base after the solder is solidified.
In the invention, the solder is poured from the gap between the inner pipe and the outer pipe, and the rubber sealing ring bears the weight of the solder and the weight of the outer pipe at the same time, so that the sealing ring is tightly combined with the sealing groove, and the solder cannot leak.
As a preferable technical scheme of the invention, the welding base is provided with a fixing bolt.
As a preferable technical solution of the present invention, the position of the fixing bolt corresponds to the position of the fixing hole at the bottom of the base, and the number of the fixing bolts is not greater than the number of the fixing holes.
In a preferred embodiment of the present invention, the solder includes indium solder.
Compared with the prior art, the invention at least has the following beneficial effects:
(1) the application provides an auxiliary device for an aluminum pipe target welding base and a using method thereof, wherein the auxiliary device enables the bottom edges of an inner pipe and an outer pipe to be completely sealed in the welding process, and welding flux at gaps is not lost, so that the purposes of ensuring the thickness of a welding layer and improving the qualified rate of brazing are achieved;
(2) the application provides an auxiliary device for an aluminum pipe target welding base and a using method thereof, wherein the auxiliary device can be tightly combined with a horizontal base through a back fixing hole, so that an inner pipe and an outer pipe are kept in a state of being vertical to the ground in the welding process;
(3) the application provides an aluminum pipe target welding base auxiliary device and a using method thereof, the bonding strength of an inner pipe and an outer pipe of an aluminum target pipe welded by the auxiliary device is high, and the bonding strength can reach 8-10 MPa.
Drawings
FIG. 1 is a top plan view, a sectional view and a bottom plan view of an aluminum pipe target welding pedestal auxiliary device provided in example 1 of the present invention;
FIG. 2 is a top plan view, a sectional view and a bottom plan view of an auxiliary apparatus for target welding a base of an aluminum pipe provided in example 2 of the present invention;
FIG. 3 is a top plan view, a sectional view and a bottom plan view of an auxiliary apparatus for target welding a base of an aluminum pipe provided in example 3 of the present invention;
in the figure: 1-base, 2-groove, 3-sealing groove and 4-fixing hole.
The present invention is described in further detail below. The following examples are merely illustrative of the present invention and do not represent or limit the scope of the claims, which are defined by the claims.
Detailed Description
The technical scheme of the invention is further explained by the specific implementation mode in combination with the attached drawings.
To better illustrate the invention and to facilitate the understanding of the technical solutions thereof, typical but non-limiting examples of the invention are as follows:
example 1
The embodiment provides an auxiliary device for an aluminum tube target welding base, and the structure of the auxiliary device is shown in fig. 1, the device comprises a base 1, the base 1 is cubic, the base 1 is provided with a groove 2 for accommodating an inner tube of an aluminum tube target, the cross section of the groove 2 is circular, and the ground of the groove 2 is parallel to the bottom surface of the base 1. The top end edge of the groove 2 is provided with a sealing groove 3. The inner diameter of the groove 2 is the same as the outer diameter of the inner tube of the aluminum tube target. The sealing groove 3 is used for accommodating a sealing ring. The outer diameter of the sealing groove 3 is not less than the inner diameter of the aluminum tube target outer tube. The bottom of the base 1 is provided with 8 fixing holes 4.
Wherein, the height of base is 60mm, and the degree of depth of recess is 40mm, and the internal diameter is 140mm, and the internal diameter of seal groove is 135 mm.
Example 2
The embodiment provides an aluminum pipe target welding base auxiliary device, the device includes base 1, base 1 is cylindrical, base 1 is provided with the recess 2 that holds the aluminum pipe target inner tube, the cross-section of recess 2 is circular, the ground of recess 2 with the bottom surface of base 1 is parallel. The top end edge of the groove 2 is provided with a sealing groove 3. The inner diameter of the groove 2 is the same as the outer diameter of the inner tube of the aluminum tube target. The sealing groove 3 is used for accommodating a sealing ring. The outer diameter of the sealing groove 3 is not less than the inner diameter of the aluminum tube target outer tube. The bottom of the base 1 is provided with 6 fixing holes 4.
Wherein, the height of base is 60mm, and the degree of depth of recess is 40mm, and the internal diameter is 140mm, and the internal diameter of seal groove is 135 mm.
Example 3
This embodiment provides an aluminum pipe target welding base auxiliary device, the device includes base 1, base 1 is the triangular prism shape, base 1 is provided with the recess 2 that holds the aluminum pipe target inner tube, the cross-section of recess 2 is circular, the ground of recess 2 with base 1's bottom surface is parallel. The top end edge of the groove 2 is provided with a sealing groove 3. The inner diameter of the groove 2 is the same as the outer diameter of the inner tube of the aluminum tube target. The sealing groove 3 is used for accommodating a sealing ring. The outer diameter of the sealing groove 3 is not less than the inner diameter of the aluminum tube target outer tube. The bottom of the base 1 is provided with 3 fixing holes 4.
Wherein, the height of base is 60mm, and the degree of depth of recess is 40mm, and the internal diameter is 140mm, and the internal diameter of seal groove is 135 mm.
Example 4
This example provides a method of using the tube target welding backing aid of examples 1-3, the method comprising:
and fixing the base on a welding base, placing the aluminum tube target inner tube into the groove, arranging a sealing ring sleeve outside the aluminum tube target inner tube, moving the aluminum tube target inner tube to the sealing groove, arranging the aluminum tube target outer tube sleeve outside the aluminum tube target inner tube, pressing the aluminum tube target outer tube on the sealing ring, pouring solder into a gap between the aluminum tube target inner tube and the aluminum tube target outer tube, and separating the aluminum tube target from the base after the solder is solidified.
The welding base is provided with fixing bolts, the positions of the fixing bolts correspond to the positions of the fixing holes in the bottom of the base, and the number of the fixing bolts is not larger than that of the fixing holes. The solder comprises indium solder.
The bonding strength of the inner tube and the outer tube of the aluminum tube targets welded in examples 1 to 3 was measured, and the results are shown in table 1.
TABLE 1
| Bonding strength/MPa | |
| Example 1 | 11 |
| Example 2 | 10 |
| Example 3 | 8 |
The applicant declares that the present invention illustrates the detailed structural features of the present invention through the above embodiments, but the present invention is not limited to the above detailed structural features, that is, it does not mean that the present invention must be implemented depending on the above detailed structural features. It should be understood by those skilled in the art that any modifications of the present invention, equivalent substitutions of selected components of the present invention, additions of auxiliary components, selection of specific modes, etc., are within the scope and disclosure of the present invention.
The preferred embodiments of the present invention have been described in detail, however, the present invention is not limited to the specific details of the above embodiments, and various simple modifications may be made to the technical solution of the present invention within the technical idea of the present invention, and these simple modifications are within the protective scope of the present invention.
It should be noted that the various technical features described in the above embodiments can be combined in any suitable manner without contradiction, and the invention is not described in any way for the possible combinations in order to avoid unnecessary repetition.
In addition, any combination of the various embodiments of the present invention is also possible, and the same should be considered as the disclosure of the present invention as long as it does not depart from the spirit of the present invention.
Claims (10)
1. The utility model provides an aluminum pipe target welding base auxiliary device which characterized in that, the device includes the base, the base is provided with the recess that holds aluminum pipe target inner tube, recess top edge is provided with the seal groove.
2. The aluminum tube target welding pedestal auxiliary apparatus as recited in claim 1, wherein the groove inner diameter is the same as the outer diameter of the aluminum tube target inner tube.
3. The aluminum tube target weld base station aid as recited in claim 1, wherein the seal groove is adapted to receive a seal ring.
4. The aluminum tube target welding pedestal auxiliary apparatus as recited in claim 3, wherein an outer diameter of the seal groove is not less than an inner diameter of the aluminum tube target outer tube.
5. The aluminum tube target welding pedestal auxiliary device as recited in claim 1, wherein the base bottom is provided with a fixing hole.
6. The aluminum pipe target welding base auxiliary device as recited in claim 5, wherein the number of the fixing holes is 2 to 8.
7. A method of using the aluminum pipe target welding pedestal auxiliary device as recited in any one of claims 1 to 6, wherein the method of using comprises:
and fixing the base on a welding base, placing the aluminum tube target inner tube into the groove, arranging a sealing ring sleeve outside the aluminum tube target inner tube, moving the aluminum tube target inner tube to the sealing groove, arranging the aluminum tube target outer tube sleeve outside the aluminum tube target inner tube, pressing the aluminum tube target outer tube on the sealing ring, pouring solder into a gap between the aluminum tube target inner tube and the aluminum tube target outer tube, and separating the aluminum tube target from the base after the solder is solidified.
8. Use according to claim 7, characterized in that the welding base is provided with fixing bolts.
9. The use method according to claim 8, wherein the position of the fixing bolt corresponds to the position of the fixing hole at the bottom of the base, and the number of the fixing bolts is not more than the number of the fixing holes.
10. Use according to claim 7, wherein the solder comprises indium solder.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210078535.5A CN114406393A (en) | 2022-01-24 | 2022-01-24 | Aluminum pipe target welding base auxiliary device and using method thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210078535.5A CN114406393A (en) | 2022-01-24 | 2022-01-24 | Aluminum pipe target welding base auxiliary device and using method thereof |
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| Publication Number | Publication Date |
|---|---|
| CN114406393A true CN114406393A (en) | 2022-04-29 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202210078535.5A Pending CN114406393A (en) | 2022-01-24 | 2022-01-24 | Aluminum pipe target welding base auxiliary device and using method thereof |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115464543A (en) * | 2022-10-21 | 2022-12-13 | 宁波江丰电子材料股份有限公司 | Polishing method of spliced high-purity aluminum tube target |
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| JP2002239724A (en) * | 2001-02-09 | 2002-08-28 | Mitsubishi Heavy Ind Ltd | Method for welding joint of different material |
| JP2006212678A (en) * | 2005-02-04 | 2006-08-17 | Toyota Motor Corp | Tool and method for coating thread solder |
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| CN111515484A (en) * | 2020-05-11 | 2020-08-11 | 宁波江丰电子材料股份有限公司 | Welding method of high-purity aluminum target |
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2022
- 2022-01-24 CN CN202210078535.5A patent/CN114406393A/en active Pending
Patent Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
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| JP2002239724A (en) * | 2001-02-09 | 2002-08-28 | Mitsubishi Heavy Ind Ltd | Method for welding joint of different material |
| JP2006212678A (en) * | 2005-02-04 | 2006-08-17 | Toyota Motor Corp | Tool and method for coating thread solder |
| JP2010247180A (en) * | 2009-04-15 | 2010-11-04 | Mitsubishi Electric Corp | Brazing apparatus and brazing method using the same |
| CN104588810A (en) * | 2013-10-30 | 2015-05-06 | 宁波江丰电子材料股份有限公司 | Welding method of aluminum target assembly |
| CN205347565U (en) * | 2016-01-21 | 2016-06-29 | 昆山全亚冠环保科技有限公司 | Pipe target is sputtered to welding formula |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN115464543A (en) * | 2022-10-21 | 2022-12-13 | 宁波江丰电子材料股份有限公司 | Polishing method of spliced high-purity aluminum tube target |
| CN115464543B (en) * | 2022-10-21 | 2024-03-22 | 宁波江丰电子材料股份有限公司 | Polishing method for spliced high-purity aluminum pipe target |
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