CN114355503B - Manufacturing method and system of optical fiber sensor - Google Patents
Manufacturing method and system of optical fiber sensor Download PDFInfo
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- CN114355503B CN114355503B CN202011092770.5A CN202011092770A CN114355503B CN 114355503 B CN114355503 B CN 114355503B CN 202011092770 A CN202011092770 A CN 202011092770A CN 114355503 B CN114355503 B CN 114355503B
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- Optical Fibers, Optical Fiber Cores, And Optical Fiber Bundles (AREA)
- Laser Beam Processing (AREA)
Abstract
The embodiment of the invention provides a manufacturing method and a system of an optical fiber sensor, comprising the following steps: triggering a working light source to output a laser beam, and adjusting the focal point of the laser beam to be positioned at a certain distance of an optical fiber; placing a phase mask plate between the working light source and the optical fiber for trial writing; moving the optical fiber or adjusting the focal position of the laser beam, and detecting the reflected wave generated by the optical fiber; when the reflected wave is detected to meet the preset condition, the working light source is controlled to write the optical fiber to form a grating, so that the optical fiber sensor is manufactured. The manufacturing method and the system of the optical fiber sensor provided by the embodiment of the invention avoid the problem that the grating is easy to erase at high temperature when the traditional optical fiber sensor is manufactured, and the excimer laser is not used for writing, so that the coating layer is not required to be removed for processing, and the complexity of the process is reduced.
Description
Technical Field
The invention relates to the technical field of photoelectric component manufacturing, in particular to a manufacturing method and a system of an optical fiber sensor.
Background
The method for manufacturing the conventional optical fiber sensor, such as FBG (Fiber Bragg Grating ), is mainly an excimer laser phase mask plate engraving method. The method has certain defects, including that the optical fiber inscribed by the method is required to be made of photosensitive materials or subjected to hydrogen loading treatment, the optical fiber grating inscribed by the method is easy to erase at high temperature, and the excimer laser inscription is required to remove the coating layer for processing, so that the complexity of the process is increased.
Disclosure of Invention
In view of the above, the embodiments of the present invention provide a method and a system for manufacturing an optical fiber sensor, which are used for solving the problem that the grating is easy to erase at high temperature during the manufacturing of the existing optical fiber sensor.
The embodiment of the invention solves the technical problems through the following technical scheme:
a method of manufacturing an optical fiber sensor, comprising:
Triggering a working light source to output a laser beam, and adjusting the focal point of the laser beam to be positioned at a certain distance of an optical fiber;
Placing a phase mask plate between the working light source and the optical fiber for trial writing;
Moving the optical fiber or adjusting the focal position of the laser beam, and detecting the reflected wave generated by the optical fiber;
when the reflected wave is detected to meet the preset condition, the working light source is controlled to write the optical fiber to form a grating, so that the optical fiber sensor is manufactured.
Further, the optical fiber is provided with an inner core and a cladding surrounding the inner core, and when the reflected wave is detected to meet a preset condition, the control of the working light source to write the optical fiber to form a grating comprises the following steps of;
when the reflection wave is detected to be one and the reflectivity meets the preset value, the working light source is controlled to write the optical fiber to form a grating.
Further, the moving the optical fiber or adjusting the focal position of the laser beam, and detecting the reflected wave generated by the optical fiber includes:
When two reflected waves are detected, the optical fiber is moved or the focal position of the laser beam is adjusted so that the optical fiber is far away from the focal position of the laser beam.
Further, the moving the optical fiber or adjusting the focal position of the laser beam, and detecting the reflected wave generated by the optical fiber includes:
when the reflectivity of the reflected wave is detected to be lower than a preset value, the optical fiber is moved or the focal position of the laser beam is adjusted so that the optical fiber is positioned at the focal position of the laser beam;
And continuing to move the optical fiber or adjusting the focal position of the laser beam until the number of the reflected waves is two.
Further, the working light source is a femto-second infrared laser, triggering the working light source to output a laser beam, and adjusting the focal point of the laser beam to be located at a certain distance of the optical fiber comprises:
Controlling the femtosecond infrared laser to emit a femtosecond light beam with specific wavelength and pulse energy;
The femtosecond light beam is expanded into parallel expanded light with a diffusion angle of 0;
Compressing the parallel expanded beam light and diffracting the parallel expanded beam light through the phase mask plate to form a focal position of the laser beam.
Further, the optical fiber sensor includes an m-order optical fiber grating, and the moving the optical fiber or adjusting the focal position of the laser beam, and detecting the reflected wave generated by the optical fiber includes:
And controlling the optical fiber to move at a speed v and adjusting the repetition frequency of the femtosecond infrared laser to be f, wherein mλB=2neff v/f, λB is the reflection period of the grating, and neff is the refractive index of the cladding.
Further, when the reflected wave is detected to meet a preset condition, the method further includes the steps of:
Pushing or stretching the two ends of the optical fiber writing position through an optical fiber welding machine so as to enable part of the inner core to be coupled with the cladding to form a conical structure, thereby enlarging the cladding.
In order to achieve the above object, an embodiment of the present invention further provides a manufacturing system of an optical fiber sensor, including:
The light source module is used for controlling the triggering working light source to output a laser beam, and adjusting the focal point of the laser beam to be positioned at a certain distance of the optical fiber;
The optical fiber moving module is used for moving the optical fiber;
the detection module is used for detecting the reflected wave generated by the optical fiber;
A phase mask;
The working light source and the optical fiber;
The optical fiber sensor comprises a working light source, an optical fiber moving module, a light source module, a working light source, a phase mask plate, an optical fiber moving module and a light source module, wherein the light source module controls the working light source to output a laser beam, the working light source is adjusted to enable a focus of the laser beam to be located at a certain distance of an optical fiber, the phase mask plate is placed between the working light source and the optical fiber for trial writing, the optical fiber moving module moves the optical fiber or the light source module to adjust the focus position of the laser beam, and when the detecting module detects that reflected waves meet preset conditions, the light source module controls the working light source to write the optical fiber to form a grating so as to manufacture the optical fiber sensor.
Further, the optical fiber is provided with an inner core and a cladding surrounding the inner core, and when the detection module detects that the reflection wave is one and the reflectivity meets a preset value, the light source module controls the working light source to write the optical fiber to form a grating.
Further, when the detection module detects that the number of the reflected waves is two, the optical fiber moving module moves the optical fiber or the light source module adjusts the focal position of the laser beam so that the optical fiber is far away from the focal position of the laser beam.
Further, when the detection module detects that the reflectivity of the reflected wave is lower than a preset value, the optical fiber moving module moves the optical fiber or the light source module adjusts the focal position of the laser beam to enable the optical fiber to be located at the focal position of the laser beam, and then the optical fiber moving module continues to move the optical fiber or adjusts the focal position of the laser beam to enable the reflected wave to be detected to be two.
Further, the working light source is a femtosecond infrared laser, and the system further comprises:
The light shaping module is used for expanding the femtosecond light beam into parallel expanded light with the diffusion angle of 0;
A cylindrical lens for compressing the parallel expanded beam light and diffracting the parallel expanded beam light through the phase mask to form a focal position of the laser beam;
wherein, the light source module controls the femtosecond infrared laser to emit a femtosecond light beam with specific wavelength and pulse energy.
Further, the optical fiber sensor includes an m-order optical fiber grating, the optical fiber moving module controls the optical fiber to move at a speed v, and the light source module adjusts the repetition frequency of the femtosecond infrared laser to be f, where mλb=2neff×v/f, λb is a reflection period of the optical fiber grating, and neff is the cladding refractive index.
Further, the detection module comprises a Charge-coupled Device (CCD) and a reflection spectrum system, wherein the reflection spectrum system comprises a spectrometer, a coupler and a broadband light source, is connected with the grating writing area and is used for monitoring the writing area, the writing state is confirmed through the CCD and the spectrometer, the focal position of the laser beam is detected through the CCD, and reflected waves are displayed through the spectrometer.
Further, the optical fiber moving module comprises a three-dimensional displacement table and an optical fiber clamp; the light shaping module comprises a beam expander, a diaphragm and a beam equalizer; the system further comprises:
and the reflector is used for reflecting the parallel beam expansion light output by the light shaping module to the cylindrical lens.
Further, both ends of the optical fiber writing position are provided with conical structures, and part of the inner cores are coupled to the cladding layers in the conical structures.
According to the manufacturing method and the system of the optical fiber sensor, the working light source is triggered to output the laser beam, the focus of the laser beam is adjusted to be located at the proper position of the optical fiber through trial writing, then the optical fiber is moved or the focus position of the laser beam is adjusted, and the reflection wave generated by the optical fiber is detected, so that laser writes the grating meeting the requirements on the cladding of the optical fiber only, the problem that the grating is easy to erase at high temperature during manufacturing of the conventional optical fiber sensor is avoided, and the coating processing is not required to be removed because excimer laser writing is not adopted, so that the complexity of the process is reduced.
The invention will now be described in more detail with reference to the drawings and specific examples, which are not intended to limit the invention thereto.
Drawings
FIG. 1 is a flow chart showing the steps of a method for manufacturing an optical fiber sensor according to an embodiment of the present invention;
FIG. 2 is a schematic diagram of a system for manufacturing a fiber optic sensor according to an embodiment of the present invention;
FIG. 3 is a schematic cross-sectional view of the fiber sensor fiber of FIG. 2;
FIG. 4 is a schematic view of the fiber taper structure of the fiber optic sensor of FIG. 2;
FIG. 5 is a flowchart illustrating steps of the method of FIG. 1 for adjusting the focus of the laser beam to be located at a distance from the optical fiber;
FIG. 6 is a flowchart of the method steps for moving the optical fiber or adjusting the focal position of the laser beam to detect the reflected wave generated by the optical fiber in FIG. 1.
Detailed Description
The present invention will be described in further detail with reference to the drawings and examples, in order to make the objects, technical solutions and advantages of the present invention more apparent. It should be understood that the specific embodiments described herein are for purposes of illustration only and are not intended to limit the scope of the invention. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.
The technical solutions between the embodiments may be combined with each other, but it is necessary to base the implementation on the basis of those skilled in the art that when the combination of technical solutions contradicts or cannot be implemented, it should be considered that the combination of technical solutions does not exist and is not within the scope of protection claimed by the present invention.
Referring to fig. 1, a flow chart of a manufacturing method of an optical fiber sensor according to an embodiment of the invention is shown, including:
Step S100: triggering the working light source to output a laser beam, and adjusting the focal point of the laser beam to be positioned at a certain distance of the optical fiber.
Step S200: and placing a phase mask plate between the working light source and the optical fiber for test writing.
Step S300: and moving the optical fiber or adjusting the focal position of the laser beam, and detecting the reflected wave generated by the optical fiber.
Step S400: when the reflected wave is detected to meet the preset condition, the working light source is controlled to write the optical fiber to form a grating, so that the optical fiber sensor is manufactured.
Specifically, as shown in fig. 2 and 3, in this embodiment, the working light source 500 is a femtosecond infrared laser, the optical fiber 600 has an inner core 610 and a cladding 620 surrounding the inner core 610, the femtosecond laser inscribing the fiber grating can solve the defect of the excimer laser phase mask inscribing method, the action mechanism of the femtosecond laser for fabricating the FBG is different from that of the excimer laser, and the FBG of the excimer laser changes the refractive index by using the absorption band of the germanosilicon glass defect. Femtosecond laser is mainly written by damaging the optical fiber 600 with high-power pulse laser.
Fiber gratings fabricated by femtosecond lasers primarily cause refractive index modulation in periodic regions by direct laser light at the core 610.
In this embodiment, the combination of the infrared femtosecond fiber grating and the cladding grating uses the method of writing the femtosecond laser with the phase mask to write the fiber grating to the cladding 620 of the fiber 600. Compared with the common excimer fiber grating, the femtosecond fiber grating has the advantages of high temperature stability and writing of coating layers which are not absorbed by infrared light in penetration, and the temperature detection range and the mechanical strength of the sensor are enhanced.
Compared with a common excimer fiber grating, the cladding grating can avoid the loss of the fiber core 610 during writing, enhance the wavelength division multiplexing property and reduce the loss of signals.
Specifically, the femtosecond laser exposes the position of the cladding 620 of the single mode SMF28 fiber 600 with laser light with 1040nm pulse energy of 420uJ emitted from 1040nm Yb doped laser. The femtosecond fiber grating has high temperature stability and can be inscribed without stripping a coating layer.
Wherein the fiber grating in the cladding 620 not only reflects signals of corresponding periodic wavelengths, but also avoids transmission loss to the core 610.
Since the refractive index of the fiber core 610 is similar to the refractive index of the cladding 620, if the processing region includes the fiber core 610 and the cladding 620, the fiber grating will reflect wavelengths in both bands. The inscription phenomenon can be used for manufacturing the optical fiber bending sensor to judge the bending direction.
Correspondingly, referring to fig. 5, step S100 of triggering the working light source to output a laser beam, adjusting the focal point of the laser beam to be located at a certain distance from the optical fiber includes:
Step S110, controlling the femtosecond infrared laser to emit a femtosecond light beam with specific wavelength and pulse energy;
Step S120, the femtosecond light beam is expanded into parallel beam expanding light with a diffusion angle of 0;
And step S130, compressing the parallel beam expander and diffracting the parallel beam expander through the phase mask plate to form the focal position of the laser beam.
Specifically, in the present embodiment, please refer to fig. 2, a femtosecond infrared laser is used as the working light source 500 to emit a femtosecond light beam with a wavelength of 1040nm and 420uJ pulse energy.
The light shaping module 700 comprises a beam expander, a diaphragm and a beam equalizer. For expanding the laser beam and diffusing the parallel light with an angle of 0.
The mirror 900 controls the laser irradiation direction. The cylindrical lens 800 is used to compress 1040nm light. The phase mask diffracts the beam of light by + -1 st order diffraction, and inscribes the cladding 620 of the SMF single mode fiber 600 at the focal point.
The spectrometer 321, the coupler 322 and the broadband light source 323 are connected with the grating inscription area to form a reflection spectrum system for monitoring the inscription area.
The cylindrical lens 800 compresses the IR laser light into a horizontal line, fixes the SMF single mode fiber 600 on the focal plane by using a three-dimensional displacement stage, and controls the translation speed v to selectively write the fiber grating of the corresponding wavelength λb.
Specifically, in this embodiment, the optical fiber sensor includes an m-order fiber bragg grating, and the moving the optical fiber 600 or adjusting the focal position of the laser beam, detecting the reflected wave generated by the optical fiber 600 includes:
The fiber 600 is controlled to move at a speed v and the repetition rate of the femtosecond infrared laser is adjusted to f, wherein mλb=2neff v/f.
Wherein m is the order of the fiber grating, λb is the reflection period of the fiber grating, neff is the refractive index, Λ is the grating period, f is the repetition frequency of the laser, v is the translation speed of the three-dimensional displacement stage, and the limiting conditions in the formula mλb=2neff v/f are satisfied.
Referring to fig. 6, specifically, in this embodiment, step S300: the moving the optical fiber or adjusting the focal position of the laser beam, and detecting the reflected wave generated by the optical fiber includes:
Step S310: when two reflected waves are detected, the optical fiber is moved or the focal position of the laser beam is adjusted so that the optical fiber is far away from the focal position of the laser beam.
At this time, it is explained that the focal position of the laser beam passes through the cladding 620 to reach the position of the inner core 610, and gratings are formed on both the cladding 620 and the inner core 610, thus generating two reflected waves, and thus it is necessary to move the optical fiber 600 or adjust the focal position of the laser beam so that the optical fiber 600 is away from the focal position of the laser beam, thereby separating the focal position of the laser beam from the position of the inner core 610.
Specifically, in the present embodiment, step S300: the moving the optical fiber 600 or adjusting the focal position of the laser beam, detecting the reflected wave generated by the optical fiber 600 further includes:
Step S320: when the reflectivity of the reflected wave is detected to be lower than a preset value, the optical fiber is moved or the focal position of the laser beam is adjusted to enable the optical fiber to be located at the focal position of the laser beam, and then the optical fiber is continuously moved or the focal position of the laser beam is adjusted to enable the reflected wave to be detected to be two.
At this time, it is explained that the focal position of the laser beam is located at the position of the cladding 620 and does not reach the position of the inner core 610, and a grating is formed only at the cladding 620, but does not completely pass through the cladding 620, and the grating written on the cladding 620 is incomplete, so that a reflected wave having a reflectivity lower than a predetermined value is generated, and thus it is necessary to move the optical fiber 600 or adjust the focal position of the laser beam so that the optical fiber 600 is located at the focal position of the laser beam.
The fiber 600 is then moved or the focal position of the laser beam is adjusted until the reflected wave is detected as two, at which point the focal position of the laser beam passes completely through the cladding 620 just to the core 610 position, thereby writing a complete grating on the cladding 620.
In this embodiment, step S400: when the reflected wave is detected to meet the preset condition, controlling the working light source 500 to inscribe the optical fiber 600 to form a grating comprises;
Step S410: when the reflection wave is detected to be one and the reflectivity meets the preset value, the working light source is controlled to write the optical fiber to form a grating.
At this time, it is explained that the focal position of the laser beam is located at the position of the cladding 620 and does not reach the position of the core 610, and only the grating is formed at the cladding 620, and the grating required for the symbol is formed. At this time, the optical fiber 600 is directly inscribed at this position to form a grating.
Specifically, the writing condition is confirmed by the CCD 310 (charge coupled device, the charge coupler 322) and the spectrometer 321, the CCD 310 observes the laser action position, the phase mask is dismounted, the laser is triggered, the midpoint of a written light spot is searched as a laser focus, the laser focus is adjusted to 30um above the fiber core 610, the phase mask is mounted for trial writing, and the reflection wavelength of the spectrometer 321 is observed. If two reflection wavelengths appear, the three-dimensional translation stage adjusting optical fiber 600 descends, and the laser action position is improved; if the reflectivity is too weak, the position of the fiber 600 is adjusted back before, confirming that the fiber 600 is at the focal plane of the laser, however, moving the lasing position down increases the refractive index modulation until two reflected wavelengths occur.
In this embodiment, step S400: when the reflected wave is detected to meet the preset condition, the working light source is controlled to write the optical fiber to form a grating, and the method further comprises the following steps of:
Pushing or stretching the two ends of the optical fiber writing position through an optical fiber welding machine so as to enable part of the inner core to be coupled with the cladding to form a conical structure, thereby enlarging the cladding.
Referring to fig. 4, in this embodiment, the optical fiber writing position has tapered structures 630 at both ends, and a portion of the inner core 610 of the tapered structures 630 is coupled to the cladding 620.
The taper structure is formed by utilizing a fusion tapering process and using an optical fiber fusion splicer to push or stretch two ends of the optical fiber in the process of discharging the optical fiber processing position. The tapered structure may allow a portion of the core mode to couple to the cladding mode, thereby increasing the cladding mode.
A tapered structure is fabricated in front of the cladding FBG, coupling the core mode to the cladding mode.
Specifically, the ends of two single-mode fibers are stripped of coating layers by using a fusion splicer, cut flat by using a cutter, and placed in two fiber grooves of the fusion splicer.
And then the optical fiber fusion splicer is adjusted to a manual fusion splicing mode, and the optical fibers at the two ends are stopped waiting for writing after being aligned.
Finally, the Z-direction advancing parameters of the welding machine, such as 20, the discharge period and the current intensity, such as 30, are set. And pressing a discharge button to discharge the arc, and welding the end faces of the two optical fibers together to form a cone structure after the discharge is finished. And (5) protecting the steel wire by using a hot melt pipe after straightening.
According to the manufacturing method of the optical fiber sensor, the working light source 500 is triggered to output the laser beam, the focus of the laser beam is adjusted to be located at the proper position of the optical fiber 600 through trial writing, then the optical fiber 600 is moved or the focus position of the laser beam is adjusted, and reflected waves generated by the optical fiber 600 are detected, so that laser writes a grating meeting requirements on the cladding 620 of the optical fiber 600 only, the problem that the grating is easy to erase at high temperature during manufacturing of the conventional optical fiber sensor is avoided, and the coating processing is not required to be removed because excimer laser writing is not adopted, so that the complexity of the process is reduced.
In addition, the position of the laser and the fiber 600 is controlled such that the laser writes only the desired grating on the cladding 620 of the fiber 600, and the loss of the fiber core 610 by the femtosecond laser is avoided.
Correspondingly, referring to fig. 2, an embodiment of the present invention further provides a manufacturing system of an optical fiber sensor, including:
The light source module 100 is used for controlling the trigger working light source 500 to output a laser beam, and adjusting the focal point of the laser beam to be positioned at a certain distance from the optical fiber 600;
an optical fiber moving module 200 for moving the optical fiber 600;
A detection module 300 for detecting the reflected wave generated by the optical fiber 600;
A phase mask 400;
and the working light source 500 and the optical fiber 600;
After the light source module 100 controls the working light source 500 to output a laser beam and adjusts the focal point of the laser light speed to be located at a certain distance of the optical fiber 600, the phase mask 400 is placed between the working light source 500 and the optical fiber 600 for trial writing, the optical fiber 600 or the light source module 100 is moved by the optical fiber moving module 200 to adjust the focal point position of the laser light speed, and when the detection module 300 detects that the reflected wave meets the preset condition, the light source module 100 controls the working light source 500 to write the optical fiber 600 to form a grating so as to manufacture the optical fiber sensor.
Specifically, referring to fig. 3, in the present embodiment, the optical fiber 600 has an inner core 610 and a cladding 620 surrounding the inner core 610, and when the detection module 300 detects that the reflected wave is one and the reflectivity satisfies a preset value, the light source module 100 controls the working light source 500 to write the optical fiber 600 to form a grating.
Specifically, in the present embodiment, when the detection module 300 detects that the reflected waves are two, the optical fiber moving module 200 moves the optical fiber 600 or the light source module 100 to adjust the focal position of the laser light velocity so that the optical fiber 600 is away from the focal position of the laser light velocity.
Specifically, in this embodiment, when the detection module 300 detects that the reflectance of the reflected wave is lower than the preset value, the optical fiber moving module 200 moves the optical fiber 600 or the light source module 100 to adjust the focal position of the laser light speed so that the optical fiber 600 is located at the focal position of the laser light speed, and then the optical fiber moving module 200 continues to move the optical fiber 600 or adjusts the focal position of the laser light speed until the reflected wave is detected to be two.
Specifically, in this embodiment, the working light source 500 is a femto-second infrared laser, and the system further includes:
The light shaping module 700 is configured to expand the femtosecond light beam into parallel expanded light with a diffusion angle of 0;
A cylindrical lens 800 for compressing the parallel beam-expanded light and diffracting the parallel beam-expanded light through the phase mask 400 to form a focal position of the laser light velocity;
wherein the light source module 100 controls the femtosecond infrared laser to emit a femtosecond light beam of a specific wavelength and pulse energy.
Specifically, in this embodiment, the optical fiber sensor includes an m-order optical fiber 600 grating, the optical fiber moving module 200 controls the optical fiber 600 to move at a speed v, and the light source module 100 adjusts the repetition frequency of the femto-second infrared laser to be f, where mλb=2neff×v/f, λb is the reflection period of the grating, and neff is the refractive index of the cladding 620.
Specifically, in this embodiment, the detection module 300 includes a CCD (Charge-coupled Device) 310 and a reflection spectrum system 320, where the reflection spectrum system includes a spectrometer 321, a coupler 322, and a broadband light source 323, and is connected to the grating writing area, and is used to monitor the writing area, where the writing state is confirmed by the CCD and the spectrometer 321, the focal position of the laser light speed is detected by the CCD, and the reflected wave is displayed by the spectrometer 321.
Specifically, in this embodiment, the optical fiber moving module 200 includes a three-dimensional displacement stage and an optical fiber fixture, the optical shaping module 700 includes a beam expander, a diaphragm, and a beam homogenizer, and the system (not shown) further includes:
and a reflecting mirror 900 for reflecting the parallel expanded beam light outputted from the light shaping module 700 to the lenticular lens 800.
Referring to fig. 4, in this embodiment, the optical fiber writing position has tapered structures 630 at both ends, and a portion of the inner core 610 in the tapered structures 630 is coupled to the cladding 620. According to the manufacturing method of the optical fiber sensor, the working light source 500 is triggered to output the laser beam, the focus of the laser light speed is adjusted to be located at the proper position of the optical fiber 600 through trial writing, then the optical fiber 600 is moved or the focus position of the laser light speed is adjusted, and the reflected wave generated by the optical fiber 600 is detected, so that the laser writes the grating meeting the requirements on the cladding 620 of the optical fiber 600 only, the problem that the grating is easy to erase at high temperature during the manufacturing of the conventional optical fiber sensor is avoided, and the excimer laser writing is not adopted, so that the coating layer processing is not required to be removed, and the complexity of the process is reduced.
Finally, it should be noted that: the above is only a preferred embodiment of the present invention, and the present invention is not limited thereto, but it is to be understood that the present invention is described in detail with reference to the foregoing embodiments, and modifications and equivalents of some of the technical features described in the foregoing embodiments may be made by those skilled in the art. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present invention should be included in the protection scope of the present invention.
Claims (12)
1. A method of manufacturing an optical fiber sensor, comprising:
Triggering a working light source to output a laser beam, and adjusting the focal point of the laser beam to be positioned at a certain distance of an optical fiber;
Placing a phase mask plate between the working light source and the optical fiber for trial writing;
Moving the optical fiber or adjusting the focal position of the laser beam, and detecting the reflected wave generated by the optical fiber;
When the reflected wave is detected to meet the preset condition, controlling the working light source to write the optical fiber to form a grating so as to manufacture the optical fiber sensor;
the optical fiber is provided with an inner core and a cladding surrounding the inner core, and when the reflected wave is detected to meet the preset condition, the working light source is controlled to write the optical fiber to form a grating, wherein the grating comprises; when the reflection wave is detected to be one and the reflectivity meets a preset value, controlling the working light source to inscribe the optical fiber to form a grating;
The moving the optical fiber or adjusting the focal position of the laser beam, and detecting the reflected wave generated by the optical fiber includes: when two reflected waves are detected, the optical fiber is moved or the focal position of the laser beam is adjusted so that the optical fiber is far away from the focal position of the laser beam.
2. The method of manufacturing an optical fiber sensor according to claim 1, wherein the moving the optical fiber or adjusting a focal position of the laser beam, detecting the reflected wave generated by the optical fiber, includes:
when the reflectivity of the reflected wave is detected to be lower than a preset value, the optical fiber is moved or the focal position of the laser beam is adjusted so that the optical fiber is positioned at the focal position of the laser beam;
And continuing to move the optical fiber or adjusting the focal position of the laser beam until two reflected waves are detected.
3. The method of manufacturing an optical fiber sensor according to claim 2, wherein the working light source is a femtosecond infrared laser, the triggering the working light source to output a laser beam, and adjusting a focal point of the laser beam to be located at a distance from an optical fiber comprises:
Controlling the femtosecond infrared laser to emit a femtosecond light beam with specific wavelength and pulse energy;
The femtosecond light beam is expanded into parallel expanded light with a diffusion angle of 0;
Compressing the parallel expanded beam light and diffracting the parallel expanded beam light through the phase mask plate to form a focal position of the laser beam.
4. A method of manufacturing a fiber optic sensor according to claim 3, wherein the fiber optic sensor includes an m-order fiber grating, and the moving the fiber or adjusting the focal position of the laser beam, detecting the reflected wave generated by the fiber, includes:
And controlling the optical fiber to move at a speed v and adjusting the repetition frequency of the femtosecond infrared laser to be f, wherein mlambda B=2neff*v/f,λB is the central wavelength of the grating reflection, and neff is the refractive index of the cladding.
5. The method according to claim 4, wherein when the reflected wave is detected to satisfy a preset condition, controlling the working light source to write the optical fiber to form a grating, and further comprising, after manufacturing the optical fiber sensor:
Pushing or stretching the two ends of the optical fiber writing position through an optical fiber welding machine so as to enable part of the inner core to be coupled with the cladding to form a conical structure, thereby enlarging the cladding.
6. A manufacturing system for an optical fiber sensor, comprising:
The light source module is used for controlling the triggering working light source to output a laser beam, and adjusting the focal point of the laser beam to be positioned at a certain distance of the optical fiber;
The optical fiber moving module is used for moving the optical fiber;
the detection module is used for detecting the reflected wave generated by the optical fiber;
A phase mask;
The working light source and the optical fiber;
The optical fiber sensor comprises a working light source, an optical fiber moving module, a light source module, a working light source, a phase mask plate, a light source module and a light source module, wherein the light source module controls the working light source to output a laser beam, the focal point of the laser beam is adjusted to be located at a certain distance of an optical fiber, then the phase mask plate is placed between the working light source and the optical fiber for trial writing, the optical fiber moving module moves the optical fiber or the light source module to adjust the focal point position of the laser beam, and when the detection module detects that reflected waves meet preset conditions, the light source module controls the working light source to write the optical fiber to form a grating so as to manufacture the optical fiber sensor; the optical fiber is provided with an inner core and a cladding surrounding the inner core, and when the detection module detects that the reflection wave is one and the reflectivity meets a preset value, the light source module controls the working light source to write the optical fiber to form a grating; when the detection module detects that the number of the reflected waves is two, the optical fiber moving module moves the optical fiber or the light source module adjusts the focal position of the laser beam so that the optical fiber is far away from the focal position of the laser beam.
7. The system according to claim 6, wherein when the detection module detects that the reflectance of the reflected wave is lower than a preset value, the optical fiber moving module moves the optical fiber or the light source module adjusts the focal position of the laser beam so that the optical fiber is located at the focal position of the laser beam, and then the optical fiber moving module continues to move the optical fiber or adjusts the focal position of the laser beam so that the reflected wave is detected as two.
8. The fiber optic sensor manufacturing system of claim 7, wherein the working light source is a femtosecond infrared laser, the system further comprising:
The light shaping module is used for expanding the femtosecond light beam into parallel expanded light with the diffusion angle of 0;
A cylindrical lens for compressing the parallel expanded beam light and diffracting the parallel expanded beam light through the phase mask to form a focal position of the laser beam;
wherein, the light source module controls the femtosecond infrared laser to emit a femtosecond light beam with specific wavelength and pulse energy.
9. The fiber optic sensor manufacturing system of claim 8, wherein the fiber optic sensor includes an m-order fiber grating, the fiber movement module controls the fiber to move at a speed v and the light source module adjusts the repetition rate of the femtosecond infrared laser to f, wherein mλ B=2neff*v/f,λB is the center wavelength of the grating reflection, and neff is the cladding refractive index.
10. The manufacturing system of the optical fiber sensor according to claim 9, wherein the detection module includes a CCD (Charge-coupled Device) and a reflection spectrum system including a spectrometer, a coupler, a broadband light source connected to the grating writing area for monitoring the writing area, wherein a writing state is confirmed by the CCD and the spectrometer, a focal position of the laser beam is detected by the CCD, and a reflected wave is displayed by the spectrometer.
11. The fiber optic sensor manufacturing system of claim 10, wherein the fiber optic movement module comprises a three-dimensional displacement table and a fiber optic clamp; the light shaping module comprises a beam expander, a diaphragm and a beam equalizer; the system further comprises:
and the reflector is used for reflecting the parallel beam expansion light output by the light shaping module to the cylindrical lens.
12. The system of claim 11, wherein the optical fiber writing location has a tapered structure at both ends, a portion of the inner core being coupled to the cladding.
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