CN110412689B - Chirped spectrum type cavity-free optical fiber Fabry-Perot filter and manufacturing method thereof - Google Patents
Chirped spectrum type cavity-free optical fiber Fabry-Perot filter and manufacturing method thereof Download PDFInfo
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- CN110412689B CN110412689B CN201910670859.6A CN201910670859A CN110412689B CN 110412689 B CN110412689 B CN 110412689B CN 201910670859 A CN201910670859 A CN 201910670859A CN 110412689 B CN110412689 B CN 110412689B
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/28—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals
- G02B6/293—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means
- G02B6/29304—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means operating by diffraction, e.g. grating
- G02B6/29316—Light guides comprising a diffractive element, e.g. grating in or on the light guide such that diffracted light is confined in the light guide
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/28—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals
- G02B6/293—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means
- G02B6/29346—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means operating by wave or beam interference
- G02B6/29358—Multiple beam interferometer external to a light guide, e.g. Fabry-Pérot, etalon, VIPA plate, OTDL plate, continuous interferometer, parallel plate resonator
- G02B6/29359—Cavity formed by light guide ends, e.g. fibre Fabry Pérot [FFP]
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Abstract
The invention discloses a chirped spectrum type cavity-free fiber Fabry-Perot filter which is characterized by comprising a multimode micro-nano fiber cladding, a multimode micro-nano fiber core and a Bragg grating; the multimode micro-nano fiber cladding is an outermost layer, and the multimode micro-nano fiber cladding is transited from a uniform area with constant radius to a micro-nano area with gradually changed radius along the section of the axis and then to the uniform area with constant radius; the multimode micro-nano optical fiber core is an inner layer and covered by a multimode micro-nano optical fiber cladding, the multimode micro-nano optical fiber core is transited from a uniform region with constant radius to a micro-nano region with gradually changed radius along the section of an axis and then to the uniform region with constant radius, and the Bragg grating is a Bragg grating which is continuously inscribed in an equal period and covers the micro-nano region of the whole multimode micro-nano optical fiber core; the cavity-free Fabry-Perot optical filter provided by the invention can realize the chirp spectrum type with free spectral range change in a larger wavelength range, has larger chirp change rate, and has compact structure and easy manufacture.
Description
Technical Field
The invention relates to the research field of optical devices, in particular to a chirped spectrum type cavity-free optical fiber Fabry-Perot filter and a manufacturing method thereof.
Background
The chirp spectrum type multi-wavelength filter is a non-uniform wavelength interval multi-wavelength device, and is often used in the fields of chirp signal generation, for example, in the pulse compression technology, a frequency-time mapping technology and a spectrum shaping technology of a chirp spectrum type optical filter are used to obtain a swept-frequency microwave pulse signal.
In order to realize the chirped spectrum type optical fiber shaping and filtering device, a feasible scheme is to cascade optical fiber Bragg gratings with different bandwidths and an interference type optical fiber device with a special phase design. For cascading fiber Bragg gratings with different bandwidths, the grating period and the modulation depth are changed, so the inscribing difficulty is very high. For an interference type optical fiber device with a special phase design, a common method is to form a mach-zehnder interferometer by using two optical fiber couplers, and add a section of chirped fiber grating to one arm of the mach-zehnder interferometer through a circulator, so that the chirped spectrum type mach-zehnder interferometer is realized. Therefore, there is a need for a chirp spectrum type optical fiber filter having a simple structure, a large free spectral range, and high stability. Unlike mach-zehnder interferometer type structures, fabry-perot interferometers have a relatively compact structure. The optical fiber Fabry-Perot interferometer is a common multi-wavelength spectral filter device and is widely applied to the fields of sensing measurement, biomedical imaging, ultrasonic detection, optical fiber lasers and the like. However, the conventional fiber fabry-perot interferometer has a fixed cavity length, so that the free spectral range is uniform, and the chirp spectrum type characteristic cannot be realized.
The micro-nano optical fiber is a novel optical fiber device, and various optical fiber devices such as micro-nano fiber Bragg gratings, micro-nano fiber interferometers, micro-nano long-period fiber gratings and the like can be realized by utilizing the micro-nano optical fiber. The micro-nano optical fiber has many unique properties, wherein an important characteristic is that the effective refractive index of the micro-nano optical fiber changes along with the change of the diameter of the optical fiber, and when the diameter of the micro-nano optical fiber is less than 5 micrometers, the effective refractive index is sharply reduced. If a Bragg grating is inscribed on the micro-nano optical fiber by using a phase template with a uniform period, the central wavelength of the obtained grating is different from that of a common grating; if a Bragg grating is inscribed on a section of conical region by using a phase template with a uniform period, a section of wide-spectrum chirped grating can be obtained. If two sections of gratings are respectively engraved on the left and right sections of the micro-nano optical fiber, the chirped gratings of the two sections of cone regions can be reflected back and forth, so that a multi-beam interference process can be generated, and an optical fiber Fabry-Perot interferometer with a certain cavity length can be formed. For the Fabry-Perot interferometer formed by the micro-nano fiber grating, because different wavelengths correspond to different positions of the cone region, the cavity lengths of the different wavelengths are changed, so that the free spectral range can be changed to a certain extent, and the Fabry-Perot interferometer has a certain chirp spectrum type.
But two problems result from the presence of the cavity region. First, the chirp rate of the interference spectrum is not very high because the effective refractive index does not vary much with diameter in the two tapered regions. In addition, because the chirped gratings written in the two tapered regions cannot guarantee complete symmetry, the wavelength ranges of the chirped gratings cannot be completely matched, and thus, for the chirped interference spectrum, a certain phase mismatch occurs in a short-wave region, which destroys the chirping characteristic of the interference spectrum, so that a non-interference region or a region with the inverse chirping characteristic occurs, which affects the application effect of the chirped interference spectrum.
Disclosure of Invention
The invention mainly aims to overcome the defects in the prior art and provide a chirped spectrum type cavity-free fiber Fabry-Perot filter.
The invention also aims to provide a method for manufacturing the chirped spectrum cavity-free fiber Fabry-Perot filter.
The main purpose of the invention is realized by the following technical scheme:
a chirp spectrum type cavity-free fiber Fabry-Perot filter is characterized by comprising a multimode micro-nano fiber cladding, a multimode micro-nano fiber core and a Bragg grating; the multimode micro-nano fiber cladding is an outermost layer, and the multimode micro-nano fiber cladding is transited from a uniform area with constant radius to a micro-nano area with gradually changed radius along the section of the axis and then to the uniform area with constant radius; the multimode micro-nano optical fiber core is an inner layer and covered by a multimode micro-nano optical fiber cladding, the multimode micro-nano optical fiber core is transited from a uniform area with constant radius to a micro-nano area with gradually changed radius along the section of an axis, and then to the uniform area with constant radius, and the Bragg grating is a Bragg grating which is continuously engraved with equal periods and covers the micro-nano area of the whole multimode micro-nano optical fiber core.
Furthermore, the multimode micro-nano optical fiber core is manufactured by melting and tapering and is symmetrical about an axis.
Furthermore, the multimode micro-nano optical fiber core is made of quartz doped with germanium.
Furthermore, the multimode micro-nano fiber cladding is made of quartz.
Further, the bragg grating is a refractive index modulation type grating.
Furthermore, the modulation depth of a grating area of the Bragg grating is adjusted along with the change of the outer diameter of the fiber core of the multimode micro-nano optical fiber, and the modulation depth of an area with gentle curve change of the outer diameter of the fiber core of the multimode micro-nano optical fiber is properly weakened; and for the area with severe change of the multimode micro-nano optical fiber core outer diameter curve, the modulation depth is properly enhanced.
A method for manufacturing a chirped spectrum type cavity-free fiber Fabry-Perot filter is characterized by comprising the following steps:
carrying out melting tapering on the micro-nano optical fiber, and stretching the micro-nano optical fiber after being melted for a certain time;
performing engraving, placing a phase mask plate at a proper position of the micro-nano optical fiber, outputting through an ultraviolet pulse laser, and simultaneously controlling an engraving electric control displacement platform to drive a lens group to move;
scanning is carried out, the output of an ultraviolet pulse laser passes through a lens group, a focusing light spot is scanned along the horizontal direction and is incident on a phase mask plate, and a first-order diffraction stripe of a diffraction light spot scans the micro-nano optical fiber and applies periodic refractive index modulation, so that a grating is formed; when the diffraction stripe is scanned to the finest position of the micro-nano optical fiber, a left reflecting grating area is formed, and the spectrum shape is a flat broadband band-pass spectrum type; when the diffraction fringes continue to scan beyond the finest position of the micro-nano fiber, the grating in the right area starts to be formed, and a multi-beam reflection light path is formed in front of the left reflection grating area, so that interference is formed, and the spectrum shows that an interference spectrum type appears in a short wave area and a flat spectrum type appears in a long wave area; and continuously scanning the diffraction fringes, gradually changing the long-wave region displayed on the spectrum from flat to an interference spectrum type, and finally forming the interference fringes in all the reflection regions to obtain the chirped spectrum type cavity-free fiber Fabry-Perot filter.
Further, the stretching is a variable speed movement.
Further, the scanning is a variable speed horizontal movement.
Furthermore, in the process of writing, scanning is carried out according to a set speed, and the scanning speed is accelerated for an area with smooth diameter change; the scanning speed is slowed down for areas where the diameter changes drastically.
Compared with the prior art, the invention has the following advantages and beneficial effects:
1. the invention can realize the chirp spectrum type with free spectral range change in a larger wavelength range and has larger chirp change rate.
2. The cavity-free optical fiber Fabry-Perot interferometer provided by the invention has no phase mismatch condition at a short wave boundary.
Drawings
Fig. 1 is a structural diagram of a chirped-spectrum cavity-free fiber fabry-perot filter according to the present invention;
FIG. 2 is a diagram showing a structure of an apparatus for manufacturing a filter according to the embodiment of the present invention;
fig. 3 is a reflection spectrum of a filter in the embodiment of the present invention.
In the figure, 1-multimode micro-nano optical fiber cladding, 2-multimode micro-nano optical fiber core, 3-Bragg grating, 4-flame ejector, 5-left clamp, 6-right clamp, 7-left cone-drawing electric control displacement platform, 8-right cone-drawing electric control displacement platform, 9-ultraviolet pulse laser, 10-lens group, 11-writing electric control displacement platform and 12-phase mask plate.
Detailed Description
The present invention will be described in further detail with reference to examples and drawings, but the present invention is not limited thereto.
Example (b):
a chirped spectrum type cavity-free fiber Fabry-Perot filter comprises a fused tapered multimode micro-nano fiber cladding 1, a multimode micro-nano fiber core 2 and a continuously-inscribed Bragg grating 3 with equal period. After a long grating is continuously scanned and written on the micro-nano transition region, although the formed structure has no cavity length, the fiber micro-nano region can be regarded as a left part and a right part by taking the thinnest position as the center, the grating written on the fiber micro-nano region can also be regarded as the left part and the right part, a micro grating segment with the same diameter is arranged on the right side of a micro grating segment with a certain diameter on the left side of the grating, the reflection wavelengths of the micro grating segment and the micro grating segment are consistent, and the light frequency component in accordance with the wavelength range can be reflected back and forth between the two micro grating segments to finally form multi-beam interference. In the same way, the multi-beam interference is also formed in the micro grating segment area at the inner side of the micro grating segment; multiple-beam interference is formed in the micro grating section area outside the micro grating sections, and finally, multiple-beam interference is formed in the whole grating area, the interference intensity is determined by the phase, the phase relation is equal to the distance between the symmetrical micro grating sections divided by the coupling light wavelength of the micro grating sections, and the distance of the micro grating sections conforms to the functional relation with the outer diameter of the micro grating sections. It can be calculated that the wavelength-phase relationship generated by the method is nonlinear, and finally the interference period chirp changes.
Compared with a fiber Fabry-Perot interferometer with a cavity, the fiber Fabry-Perot interferometer without the cavity has no phase mismatch condition on a short wave boundary, because the wavelength of the short wave boundary is always at the position of a micro-nano midpoint, because the effective refractive index is the minimum here, the wavelength of a written grating is also the minimum, the midpoint position is used as a connection point of a left micro-nano grating area and a right micro-nano grating area, the wavelength of the middle point is shared by the left micro-nano transition area and the right micro-nano transition area, and therefore the wavelength ranges are completely matched. In addition, due to the existence of half-wave loss, the phase at a short wave position (positioned at the midpoint of the micro-nano optical fiber) is pi, so that the condition of coherent cancellation is realized, and the characteristic of gentle roll-off of the chirp filter is met. And the chirp of the interference spectrum is better because the effective refractive index near the midpoint has obvious change along with the diameter.
As shown in fig. 1, a chirped spectrum type cavity-free fiber fabry-perot filter, as shown in fig. 1, includes:
the multimode micro-nano optical fiber cladding 1 is characterized in that the section shape of the multimode micro-nano optical fiber cladding along the axis is transited from a uniform area with constant radius to a micro-nano area with gradually changed radius and then to a uniform area with constant radius;
the multimode micro-nano optical fiber core 2 is in a transition from a uniform area with constant radius to a micro-nano area with gradually changed radius along the section shape of the axis and then to the uniform area with constant radius;
the continuous writing area of the Bragg grating 3 with the same period covers all multimode micro-nano optical fiber core micro-nano areas.
The multimode micro-nano optical fiber cladding 1 is mainly made of quartz, and parameters such as refractive index and the like of the multimode micro-nano optical fiber cladding accord with cladding parameters of common commercial communication multimode optical fibers; the micro-nano area is realized by a melting tapering method, the relation of the inner diameter and the outer diameter of the micro-nano area changing along with the axis is automatically realized by the melting tapering process, and the specific parameters of the inner diameter curve and the outer diameter curve of the micro-nano area can be influenced by controlling the tapering speed.
The multimode micro-nano optical fiber core 2 is mainly made of quartz doped with germanium, and the parameters such as the refractive index and the like of the multimode micro-nano optical fiber core accord with the core parameters of common commercial communication multimode optical fibers; the micro-nano area and the micro-nano area of the optical fiber cladding are formed simultaneously, the relation that the outer diameter changes along with the axis is automatically realized by the melting and tapering process, and the specific curve parameters can be influenced by controlling the tapering speed.
The Bragg grating 3 with the same period and continuous writing is a refractive index modulation type grating, the grating writing area needs to cover all micro-nano areas, and a common micro-nano optical fiber area without periodic refractive index modulation cannot exist in the midway, namely, a cavity area contained in the traditional optical fiber Fabry-Perot interferometer does not exist; the modulation depth of the grating area needs to be adjusted along with the change curve of the outer diameter of the fiber core, the modulation depth of the area with gentle change of the outer diameter curve of the fiber core is properly weakened, and the modulation depth of the area with severe change of the outer diameter curve of the fiber core is properly strengthened.
A method for manufacturing a chirped spectrum type cavity-free optical fiber Fabry-Perot filter comprises the following steps:
fixing a commercial multimode optical fiber through a clamp, and melting the multimode micro-nano optical fiber by using a flame ejector;
controlling an electric control displacement platform where the clamp is located, driving the clamp to displace, enabling the optical fiber to be tapered under the action of the clamp, and adjusting flame flow and the speed of a stepping motor in the tapering process to control inner and outer diameter curves of a micro-nano optical fiber cladding;
starting an ultraviolet pulse laser for changing the refractive index of the optical fiber;
inputting ultraviolet pulse light into a lens group, changing the direction of a light path, and focusing light;
light output by the lens group is incident on a phase mask with a uniform period to generate diffraction fringes;
and controlling an electric control displacement platform where the lens group is located to drive the lens group to displace, so that the diffraction facula of the ultraviolet laser passing through the phase template performs variable-speed scanning along the axial direction of the optical fiber.
The method comprises the following specific steps:
the manufacturing method of the embodiment of the invention, the manufacturing device and the material of which are shown in figure 2, comprises the following steps: the device comprises a multimode micro-nano optical fiber cladding 1, a multimode micro-nano optical fiber core 2, a Bragg grating 3 (in the middle of the writing) with the same period for continuous writing, a flame ejector 4 for melting multimode optical fibers, a left clamp 5, a right clamp 6, a left-pull-cone electric control displacement platform 7, a right-pull-cone electric control displacement platform 8, an ultraviolet pulse laser 9, a lens group 10, a writing electric control displacement platform 11 and a phase mask plate 12.
Firstly, a micro-nano optical fiber melting and tapering step, namely fixing a commercial multimode optical fiber by using left and right clamps 5 and 6, and opening a flame ejector 4 to melt the optical fiber; after the micro-nano optical fiber is melted for a certain time, the left and right clamps 5 and 6 are respectively driven by the left drawing cone electric control displacement platforms 7 and 8 to stretch towards the left and right directions, the electric control displacement platforms 7 and 8 move in a variable speed mode, and different micro-nano optical fiber shapes can be realized by controlling a speed configuration file; and when the thinnest diameter of the micro-nano optical fiber meets the requirement, the flame is closed, and the electric control displacement platforms 7 and 8 stop moving.
And then, a step of writing, namely placing a phase mask plate 12 at a proper position behind the optical fiber, turning on an ultraviolet pulse laser 9, and simultaneously controlling a writing electric control displacement platform 11 to drive a lens group 10 to horizontally move in a variable speed manner, wherein a focusing light spot output by the pulse laser 9 after passing through the lens group 10 is scanned along the horizontal direction and is incident on the phase mask plate 12, and a first-order diffraction stripe of the diffraction light spot can scan the micro-nano optical fiber and apply periodic refractive index modulation, so that a grating is formed. When the diffraction stripe is scanned to the finest position of the optical fiber, a left reflecting grating area is formed, and the spectrum shape is a flat broadband band-pass spectrum type; when the diffraction fringes continue to scan beyond the finest position of the optical fiber, the grating in the right area starts to be formed, and a multi-beam reflection optical path is formed in front of the grating area on the left side, so that interference is formed, the spectrum shows that an interference spectrum type appears in the short wave area on the spectrum, and the long wave area is still a flat spectrum type; and continuously scanning the diffraction fringes, gradually changing the long-wave region displayed on the spectrum from flat to an interference spectrum type, finally forming the interference fringes in all the reflection regions, and finishing the manufacture of the cavity-free fiber Fabry-Perot filter of the chirp spectrum type.
In the embodiment, the thinnest diameter of the multimode micro-nano optical fiber is 4.2 mu m; the wavelength of the ultraviolet pulse laser 3 is 193 nanometers, and the repetition frequency is 200Hz, and the peak power is 3 mJ; the period of phase mask 12 is 1067 nm. In the process of writing, scanning is carried out according to a set speed, the scanning speed is accelerated for an area with smooth diameter change, the modulation depth is properly weakened, and the reflectivity is not too high; the scanning speed is reduced for the area with violent diameter change, the modulation depth is properly strengthened to prevent the reflectivity from being too low, the reflectivity of the wavelength in the grating is kept flat, and the final effect is to enable the reflectivity of each interference peak of the filter to be approximately equal.
Fig. 3 is a reflection spectrum of the chirped-spectrum cavity-free fiber fabry-perot filter obtained in this embodiment, and it can be found that the wavelength range is greater than 25nm, and 63 peaks exist in the wavelength range; the chirp characteristic of the spectrum is good, the cross of the FSR of short wave can be obviously seen, and the FSR of long wave is smaller; the reflectance of the interference peak fluctuates very little except for a loss envelope at 1557.5 nm.
It should be noted that the thinnest diameter parameter of the multimode micro-nano fiber in the invention is not limited to 4.2 μm in example 1, and multimode micro-nano fibers with other diameters can be used as carriers of filters; the ultraviolet laser in the present invention is not limited to the specific repetition frequency of 200Hz and peak power of 3mJ in example 1; the period of the phase mask in the present invention is not limited to 1067 nm.
The above embodiments are preferred embodiments of the present invention, but the present invention is not limited to the above embodiments, and any other changes, modifications, substitutions, combinations, and simplifications which do not depart from the spirit and principle of the present invention should be construed as equivalents thereof, and all such changes, modifications, substitutions, combinations, and simplifications are intended to be included in the scope of the present invention.
Claims (8)
1. A chirp spectrum type cavity-free fiber Fabry-Perot filter is characterized by comprising a multimode micro-nano fiber cladding, a multimode micro-nano fiber core and a Bragg grating; the multimode micro-nano fiber cladding is an outermost layer, and the multimode micro-nano fiber cladding is transited from a uniform area with constant radius to a micro-nano area with gradually changed radius along the section of the axis and then to the uniform area with constant radius; the multimode micro-nano optical fiber core is an inner layer and covered by a multimode micro-nano optical fiber cladding, the multimode micro-nano optical fiber core is transited from a uniform region with constant radius to a micro-nano region with gradually changed radius along the section of an axis and then to the uniform region with constant radius, and the Bragg grating is a Bragg grating which is continuously inscribed in an equal period and covers the micro-nano region of the whole multimode micro-nano optical fiber core; the Bragg grating is a refractive index modulation type grating; the modulation depth of the grating area of the Bragg grating is adjusted along with the change of the outer diameter of the fiber core of the multimode micro-nano optical fiber, and the modulation depth of the area with gentle curve change of the outer diameter of the fiber core of the multimode micro-nano optical fiber is properly weakened; and for the area with severe change of the multimode micro-nano optical fiber core outer diameter curve, the modulation depth is properly enhanced.
2. The chirped-spectrum cavity-free fiber fabry-perot filter according to claim 1, wherein the multimode micro-nano fiber core is made by fused biconical tapering and is symmetrical about an axis.
3. The chirped spectrum cavity-free optical fiber Fabry-Perot filter according to claim 1, wherein a multimode micro-nano optical fiber core is made of quartz doped with germanium.
4. The chirped spectrum cavity-free fiber Fabry-Perot filter according to claim 1, wherein the multimode micro-nano fiber cladding is made of quartz.
5. A method for manufacturing a chirped spectrum type cavity-free fiber fabry-perot filter, which is used for realizing the chirped spectrum type cavity-free fiber fabry-perot filter as claimed in claim 1, and comprises the following steps:
carrying out melting tapering on the micro-nano optical fiber, and stretching the micro-nano optical fiber after being melted for a certain time;
performing engraving, placing a phase mask plate at a proper position of the micro-nano optical fiber, outputting through an ultraviolet pulse laser, and simultaneously controlling an engraving electric control displacement platform to drive a lens group to move;
scanning is carried out, the output of an ultraviolet pulse laser passes through a lens group, a focusing light spot is scanned along the horizontal direction and is incident on a phase mask plate, and a first-order diffraction stripe of a diffraction light spot scans the micro-nano optical fiber and applies periodic refractive index modulation, so that a grating is formed; when the diffraction stripe is scanned to the finest position of the micro-nano optical fiber, a left reflecting grating area is formed, and the spectrum shape is a flat broadband band-pass spectrum type; when the diffraction fringes continue to scan beyond the finest position of the micro-nano fiber, the grating in the right area starts to be formed, and a multi-beam reflection light path is formed between the diffraction fringes and the left reflection grating area, so that interference is formed, and the spectrum shows that an interference spectrum type appears in a short wave area and a flat spectrum type still appears in a long wave area; and continuously scanning the diffraction fringes, gradually changing the long-wave region displayed on the spectrum from flat to an interference spectrum type, and finally forming the interference fringes in all the reflection regions to obtain the chirped spectrum type cavity-free fiber Fabry-Perot filter.
6. The method as claimed in claim 5, wherein the stretching is a variable speed movement.
7. The method as claimed in claim 5, wherein the scanning is a variable speed horizontal movement.
8. The method of claim 5, wherein during the writing process, scanning is performed at a predetermined speed, and the scanning speed is increased for a region with a smooth diameter change; the scanning speed is slowed down for areas where the diameter changes drastically.
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