CN114308907A - Plasma cleaning device for precision analysis instrument - Google Patents
Plasma cleaning device for precision analysis instrument Download PDFInfo
- Publication number
- CN114308907A CN114308907A CN202210166245.6A CN202210166245A CN114308907A CN 114308907 A CN114308907 A CN 114308907A CN 202210166245 A CN202210166245 A CN 202210166245A CN 114308907 A CN114308907 A CN 114308907A
- Authority
- CN
- China
- Prior art keywords
- fixedly connected
- disc
- adjusting
- box body
- rotating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000004140 cleaning Methods 0.000 title claims abstract description 41
- 238000001179 sorption measurement Methods 0.000 claims abstract description 35
- 230000017525 heat dissipation Effects 0.000 claims description 23
- 238000004804 winding Methods 0.000 claims description 18
- 230000005540 biological transmission Effects 0.000 claims description 10
- 238000007789 sealing Methods 0.000 claims description 8
- 238000001914 filtration Methods 0.000 claims description 5
- 230000006835 compression Effects 0.000 claims description 4
- 238000007906 compression Methods 0.000 claims description 4
- 238000000034 method Methods 0.000 abstract description 10
- 238000005096 rolling process Methods 0.000 description 7
- 238000001816 cooling Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- 230000001105 regulatory effect Effects 0.000 description 3
- 230000033228 biological regulation Effects 0.000 description 2
- 150000002500 ions Chemical class 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 238000005406 washing Methods 0.000 description 1
Images
Landscapes
- Cleaning In General (AREA)
Abstract
The invention discloses a plasma cleaning device for a precision analysis instrument, which relates to the field of plasma cleaning and comprises a box body, wherein the left side of the box body is fixedly connected with a limiting rod, the middle part of the box body is rotatably connected with a screw rod, the upper part of the box body is fixedly connected with a lifting motor, an output shaft of the lifting motor is fixedly connected with the screw rod, the limiting rod and the side wall of the screw rod are sleeved with a movable disc, and the movable disc is in threaded connection with the screw rod; the centrifugal disc can be driven to rotate through the matching among the screw rod, the gear, the fluted disc, the second rotating wheel and the third rotating wheel, and the centrifugal disc is matched with the arrangement of the counterweight ball piston plate guide pipe and the adsorption disc, so that the adsorption force is generated in the sealed bin by utilizing the centrifugal force generated when the centrifugal disc rotates, and is transmitted to the adsorption disc, the adsorption force is generated on the instrument, the instrument is adsorbed and fixed, and the stability of the instrument in the cleaning process is improved.
Description
Technical Field
The invention relates to the technical field of plasma cleaning, in particular to a plasma cleaning device for a precision analysis instrument.
Background
Plasma cleaning is a brand-new high-tech technology, and plasma is used to achieve effects that cannot be achieved by conventional cleaning methods. Plasma is a state of matter, also called the fourth state of matter, and is not common solid, liquid, and gas states. Sufficient energy is applied to the gas to ionize it into a plasma state. The "active" components of the plasma include: ions, electrons, atoms, reactive groups, excited species, photons, and the like. The plasma cleaning machine is used for treating the surface of a sample by utilizing the properties of active components, so as to achieve the purposes of cleaning, coating and the like.
Meanwhile, when the plasma cleaning device works, a lot of heat is generated, and the generated heat can raise the internal temperature of the device on one hand, thereby influencing the work of internal elements of the device and even damaging the equipment; and the existing ion cleaning device can not adjust the rotating inner diameter, thereby greatly reducing the application range.
Disclosure of Invention
The invention aims to solve the defects that an instrument to be cleaned cannot be cleaned uniformly, the rotating inner diameter cannot be adjusted and the inside of the device cannot be effectively radiated in the prior art, and provides a plasma cleaning device for a precision analysis instrument.
In order to achieve the purpose, the invention adopts the following technical scheme:
a plasma cleaning apparatus for a precision analysis instrument, comprising:
the left side of the box body is fixedly connected with a limiting rod, the middle of the box body is rotatably connected with a lead screw, the upper part of the box body is fixedly connected with a lifting motor, an output shaft of the lifting motor is fixedly connected with the lead screw, the limiting rod and the side wall of the lead screw are sleeved with a movable disc, and the movable disc is in threaded connection with the lead screw;
the rotating assembly is rotatably connected with the movable disc and is used for cleaning the instrument in an omnibearing manner;
the adjusting assembly is fixedly connected with the bottom of the rotating assembly and is used for adjusting the inner diameter of the cleaning part;
the adsorption component is fixedly connected with the bottom of the box body and is used for adsorbing and fixing the instrument;
and the heat dissipation assembly is rotatably connected with the bottom of the box body and is used for reducing the temperature inside the box body when the instrument is cleaned.
Preferably, the rotating assembly comprises a rotary table, a sliding groove is formed in the bottom of the movable table, a sliding rod is connected to the inside of the sliding groove in a sliding mode, the bottom end of the sliding rod is fixedly connected with the upper surface of the rotary table, a rotating motor is fixedly connected to the upper surface of the movable table, and an output shaft of the rotating motor is fixedly connected with the upper surface of the rotary table.
Preferably, the adjusting assembly comprises an adjusting box, the adjusting box is fixedly connected with the bottom of the rotary table, an adjusting rod is slidably connected inside the adjusting box, and a plasma generator is fixedly connected to the bottom of the adjusting rod.
Preferably, adjust the box middle part and rotate and be connected with the regulating spindle, regulating spindle lateral wall fixedly connected with rolling wheel, fixedly connected with rolling rope between regulation pole and the rolling wheel, and both sides rolling rope tie point sets up for the symmetry, and adjusts fixedly connected with reset spring between pole and the regulation box lateral wall.
Preferably, the box inner chamber is provided with the cavity, adsorption component includes the centrifugal disc, the centrifugal disc rotates with cavity inner chamber bottom to be connected, is located the first runner of lead screw lateral wall difference fixedly connected with and the second runner in the cavity, the cavity middle part rotates and is connected with the third runner, third runner upper portion fixedly connected with gear, centrifugal disc lateral wall fixedly connected with fluted disc, and the gear is connected with the fluted disc meshing, and the second runner is connected with the transmission of third runner.
Preferably, the inside annular of centrifugal tray is provided with the sealed storehouse, sealed storehouse inner wall sealing sliding connection has the piston dish, and fixedly connected with compression spring between piston dish and the sealed storehouse, piston dish lateral wall fixedly connected with counter weight ball, and counter weight ball and sealed storehouse lateral wall sliding connection.
Preferably, the middle part of the upper surface of the bottom of the box body is fixedly connected with an adsorption disc, the bottom of the adsorption disc is fixedly connected with a bearing ring, the periphery of the bottom of the bearing ring is rotatably connected with a guide pipe, and the guide pipe is communicated with the sealed bin.
Preferably, radiator unit includes the cooling shaft, the cooling shaft rotates with sealed storehouse bottom to be connected, is located the inside cooling shaft lateral wall fixedly connected with fourth runner of sealed storehouse, and fourth runner and third runner transmission are connected, cooling shaft lateral wall annular is provided with the drive leaf, the radiating groove has been seted up to the box lateral wall, box left side upper portion fixedly connected with intake pipe, intake pipe upper end fixedly connected with filters the ball valve, and intake pipe lower extreme and box left side inner chamber intercommunication.
Compared with the prior art, the invention has the beneficial effects that:
1. according to the invention, the plasma generators can move up and down and rotate by virtue of the arrangement of the movable disc and the rotary disc, so that instruments in the box body can be cleaned in all directions, the cleaning effect on the instruments is improved, the distance between the plasma generators on two sides can be adjusted by matching the adjusting shaft, the winding wheel and the winding rope, instruments with different outer diameters can be used, and the application range of the device is enlarged.
2. The centrifugal disc can be driven to rotate through the matching among the screw rod, the gear, the fluted disc, the second rotating wheel and the third rotating wheel, and the centrifugal disc is matched with the arrangement of the counterweight ball piston plate guide pipe and the adsorption disc, so that the adsorption force is generated in the sealed bin by utilizing the centrifugal force generated when the centrifugal disc rotates, and is transmitted to the adsorption disc, the adsorption force is generated on the instrument, the instrument is adsorbed and fixed, and the stability of the instrument in the cleaning process is improved.
Drawings
FIG. 1 is a schematic front view of a plasma cleaning apparatus for a precision analyzer according to the present invention;
FIG. 2 is a schematic diagram of a half-sectional structure of a plasma cleaning apparatus for a precision analyzer according to the present invention;
FIG. 3 is an enlarged schematic view of the area A in FIG. 2 of a plasma cleaning apparatus for a precision analyzer according to the present invention;
FIG. 4 is an enlarged schematic structural view of a region B in FIG. 2 of a plasma cleaning apparatus for a precision analyzer according to the present invention;
FIG. 5 is an enlarged view of the area C in FIG. 2 illustrating a plasma cleaning apparatus for a precision analyzer according to the present invention;
fig. 6 is a schematic structural view of a bottom of a chamber of a plasma cleaning apparatus for a precision analysis instrument according to the present invention.
In the figure: 1. a box body; 101. a limiting rod; 102. a screw rod; 103. a movable tray; 2. a rotating assembly; 21. a turntable; 22. a slide bar; 3. an adjustment assembly; 31. an adjustment box; 32. adjusting a rod; 33. an adjustment shaft; 34. a winding wheel; 341. winding the rope; 35. a return spring; 4. an adsorption component; 41. a centrifugal pan; 411. sealing the bin; 412. a piston plate; 413. a compression spring; 414. a counterweight ball; 42. a first runner; 421. a second runner; 43. a third rotating wheel; 44. a gear; 45. a fluted disc; 46. an adsorption tray; 47. a bearing ring; 48. a conduit; 5. a heat dissipating component; 51. a heat-dissipating shaft; 52. a fourth rotating wheel; 53. driving the blades; 54. an air inlet pipe; 55. and (4) filtering the ball valve.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments.
Referring to fig. 1 to 6, a plasma cleaning apparatus for a precision analysis instrument, comprising:
the left side of the box body 1 is fixedly connected with a limiting rod 101, the middle of the box body 1 is rotatably connected with a screw rod 102, the upper part of the box body 1 is fixedly connected with a lifting motor, an output shaft of the lifting motor is fixedly connected with the screw rod 102, the side walls of the limiting rod 101 and the screw rod 102 are sleeved with a movable disc 103, and the movable disc 103 is in threaded connection with the screw rod 102;
the rotating assembly 2 is rotatably connected with the movable disc 103, and the rotating assembly 2 is used for cleaning the instrument in an omnibearing manner;
the adjusting component 3 is fixedly connected with the bottom of the rotating component 2, and the adjusting component 3 is used for adjusting the inner diameter of the cleaning;
the adsorption component 4 is fixedly connected with the bottom of the box body 1, and the adsorption component 4 is used for adsorbing and fixing the instrument;
and the heat dissipation assembly 5 is rotatably connected with the bottom of the box body 1, and the heat dissipation assembly 5 is used for reducing the temperature inside the box body 1 when the instrument is cleaned.
Referring to fig. 1 and 5, the rotating assembly 2 includes a rotating disc 21, a sliding groove is formed in the bottom of the movable disc 103, a sliding rod 22 is slidably connected inside the sliding groove, the bottom end of the sliding rod 22 is fixedly connected with the upper surface of the rotating disc 21, a rotating motor is fixedly connected with the upper surface of the movable disc 103, and an output shaft of the rotating motor is fixedly connected with the upper surface of the rotating disc 21;
referring to fig. 2 and 3, the adjusting assembly 3 includes an adjusting box 31, the adjusting box 31 is fixedly connected with the bottom of the turntable 21, an adjusting rod 32 is slidably connected inside the adjusting box 31, and a plasma generator is fixedly connected with the bottom of the adjusting rod 32;
through the setting of above-mentioned structure, elevator motor will drive carousel 21 and reciprocate, and rotate the motor and will drive carousel 21 and rotate to can make plasma generator carry out the omnidirectional washing to the instrument of placing in 1 insides of box, with this cleaning performance to the instrument has been improved.
Referring to fig. 3, an adjusting shaft 33 is rotatably connected to the middle of the adjusting box 31, a winding wheel 34 is fixedly connected to the side wall of the adjusting shaft 33, winding ropes 341 are fixedly connected between the adjusting shaft 32 and the winding wheel 34, the connection points of the winding ropes 341 on the two sides are symmetrically arranged, and a return spring 35 is fixedly connected between the adjusting shaft 32 and the side wall of the adjusting box 31;
through the setting of above-mentioned structure, rotate regulating spindle 33 for the rolling wheel 34 takes place to rotate, because the both sides winding rope 341 tie point sets up for the symmetry this moment, consequently rolling wheel 34 will carry out the rolling to winding rope 341 simultaneously, thereby can make and adjust pole 32 and remove to adjusting box 31 middle part, adjust the interval between the plasma generator of both sides with this, can use the instrument of different external diameters, thereby improved the device's application scope.
Referring to fig. 4 and 6, a cavity is formed in an inner cavity of the box body 1, the adsorption assembly 4 includes a centrifugal disc 41, the centrifugal disc 41 is rotatably connected to the bottom of the inner cavity of the cavity, a first rotating wheel 42 and a second rotating wheel 421 are respectively and fixedly connected to the side wall of the screw rod 102 located in the cavity, a third rotating wheel 43 is rotatably connected to the middle of the cavity, a gear 44 is fixedly connected to the upper portion of the third rotating wheel 43, a fluted disc 45 is fixedly connected to the side wall of the centrifugal disc 41, the gear 44 is meshed with the fluted disc 45, and the second rotating wheel 421 is in transmission connection with the third rotating wheel 43;
referring to fig. 4 and 6, a sealed bin 411 is annularly arranged inside the centrifugal disc 41, a piston plate 412 is connected to the inner wall of the sealed bin 411 in a sealing and sliding manner, a compression spring 413 is fixedly connected between the piston plate 412 and the sealed bin 411, a counterweight ball 414 is fixedly connected to the side wall of the piston plate 412, and the counterweight ball 414 is connected to the side wall of the sealed bin 411 in a sliding manner;
referring to fig. 4 and 6, an adsorption disc 46 is fixedly connected to the middle of the upper surface of the bottom of the box body 1, a bearing ring 47 is fixedly connected to the bottom of the adsorption disc 46, conduits 48 are rotatably connected to the periphery of the bottom of the bearing ring 47, and the conduits 48 are communicated with a sealed bin 411;
through the arrangement of the structure, in the process of rotating the screw rod 102, the gear 44 is engaged with the fluted disc 45, the second rotating wheel 421 is in transmission connection with the third rotating wheel 43, the centrifugal disc 41 can be driven to rotate at the same time, in the rotating process of the centrifugal disc 41, the centrifugal force generated by the rotation of the centrifugal disc is utilized, the counterweight ball 414 drives the piston plate 412 to slide towards the outer end of the sealed cabin 411, so that the adsorption force is generated in the sealed cabin 411, at the moment, the adsorption force is generated in the adsorption disc 46 due to the fact that the adsorption disc 46 is communicated with the sealed cabin 411 through the guide pipe 48, so that the adsorption force is generated on the instrument, the adsorption fixation on the instrument is realized, and the stability in the cleaning process of the instrument is improved.
Referring to fig. 1 and 2, the heat dissipation assembly 5 includes a heat dissipation shaft 51, the heat dissipation shaft 51 is rotatably connected with the bottom of the sealed bin 411, a fourth runner 52 is fixedly connected to a side wall of the heat dissipation shaft 51 inside the sealed bin 411, the fourth runner 52 is in transmission connection with the third runner 43, a driving blade 53 is annularly arranged on the side wall of the heat dissipation shaft 51, a heat dissipation groove is formed in the side wall of the box body 1, an air inlet pipe 54 is fixedly connected to the upper portion of the left side of the box body 1, a filtering ball valve 55 is fixedly connected to the upper end of the air inlet pipe 54, and the lower end of the air inlet pipe 54 is communicated with an inner cavity of the left side of the box body 1;
through the setting of above-mentioned structure, carry out the pivoted in-process at lead screw 102, utilize the transmission between fourth runner 52 and the third runner 43 to be connected, still will drive heat dissipation shaft 51 simultaneously and rotate, thereby produce the air current driving force on box 1 right side, accelerate the inside gas flow of box 1 with this, and discharge the air current in box 1 from radiating groove department, and outside fresh air current will finally get into inside box 1 through filtering ball valve 55 at this moment, and the air current that produces when heat dissipation shaft 51 rotates will still blow intake pipe 54, thereby can reduce and make the inside temperature of intake pipe 54 reduce, thereby the radiating effect of the device has been improved.
Referring to fig. 1-6, in the invention, firstly, an instrument to be cleaned is placed in a box body 1, and then an adjusting shaft 33 is rotated, so that a winding wheel 34 rotates, and at the moment, because the connection points of winding ropes 341 on two sides are symmetrically arranged, the winding wheel 34 winds the winding ropes 341 at the same time, so that an adjusting rod 32 can move towards the middle part of an adjusting box 31, and the distance between plasma generators on two sides can be adjusted, and the instrument with different outer diameters can be used;
then, the lifting motor will drive the turntable 21 to move up and down, and the rotating motor will drive the turntable 21 to rotate, so that the plasma generator can perform omnibearing cleaning on the instrument placed in the box body 1; in the process of rotation of the screw rod 102, the centrifugal disc 41 can be driven to rotate simultaneously by the meshing connection of the gear 44 and the fluted disc 45 and the transmission connection between the second rotating wheel 421 and the third rotating wheel 43, and in the process of rotation of the centrifugal disc 41, the centrifugal force generated by the rotation of the centrifugal disc 41 can be used to drive the piston plate 412 to slide towards the outer end of the sealed bin 411, so that an adsorption force is generated in the sealed bin 411, and at the moment, the adsorption force is generated in the adsorption disc 46 due to the communication between the adsorption disc 46 and the sealed bin 411 through the conduit 48, so that the instrument can be adsorbed and fixed;
in the process of rotating the screw rod 102, the fourth rotating wheel 52 and the third rotating wheel 43 are connected in a transmission manner, so that the heat dissipation shaft 51 can be driven to rotate at the same time, an airflow driving force is generated on the right side of the box body 1, the air flow inside the box body 1 is accelerated, the airflow inside the box body 1 is discharged from the heat dissipation groove, the external fresh airflow at the moment can finally enter the box body 1 through the filtering ball valve 55, and the airflow generated when the heat dissipation shaft 51 rotates can blow the air inlet pipe 54, so that the temperature inside the air inlet pipe 54 can be reduced.
The above description is only for the preferred embodiment of the present invention, but the scope of the present invention is not limited thereto, and any person skilled in the art should be considered to be within the technical scope of the present invention, and the technical solutions and the inventive concepts thereof according to the present invention should be equivalent or changed within the scope of the present invention.
Claims (8)
1. A plasma cleaning apparatus for a precision analysis instrument, comprising:
the device comprises a box body (1), wherein a limiting rod (101) is fixedly connected to the left side of the box body (1), a lead screw (102) is rotatably connected to the middle of the box body (1), a lifting motor is fixedly connected to the upper part of the box body (1), an output shaft of the lifting motor is fixedly connected with the lead screw (102), a moving disc (103) is sleeved on the side walls of the limiting rod (101) and the lead screw (102), and the moving disc (103) is in threaded connection with the lead screw (102);
the rotating assembly (2), the rotating assembly (2) is rotatably connected with the movable disc (103), and the rotating assembly (2) is used for cleaning an instrument in an all-dimensional manner;
the adjusting assembly (3), the adjusting assembly (3) is fixedly connected with the bottom of the rotating assembly (2), and the adjusting assembly (3) is used for adjusting the inner diameter of the cleaning;
the adsorption component (4), the adsorption component (4) is fixedly connected with the bottom of the box body (1), and the adsorption component (4) is used for adsorbing and fixing the instrument;
the heat dissipation assembly (5), heat dissipation assembly (5) and box (1) bottom are rotated and are connected, and heat dissipation assembly (5) are used for reducing the inside temperature of box (1) when the instrument washs.
2. The plasma cleaning device for the precision analysis instrument according to claim 1, wherein the rotating assembly (2) comprises a rotating disc (21), a sliding groove is formed in the bottom of the moving disc (103), a sliding rod (22) is slidably connected inside the sliding groove, the bottom end of the sliding rod (22) is fixedly connected with the upper surface of the rotating disc (21), a rotating motor is fixedly connected with the upper surface of the moving disc (103), and an output shaft of the rotating motor is fixedly connected with the upper surface of the rotating disc (21).
3. The plasma cleaning device for the precision analysis instrument is characterized in that the adjusting assembly (3) comprises an adjusting box (31), the adjusting box (31) is fixedly connected with the bottom of the rotating disc (21), an adjusting rod (32) is slidably connected inside the adjusting box (31), and a plasma generator is fixedly connected with the bottom of the adjusting rod (32).
4. The plasma cleaning device for the precision analysis instrument is characterized in that the middle of the adjusting box (31) is rotatably connected with an adjusting shaft (33), the side wall of the adjusting shaft (33) is fixedly connected with a winding wheel (34), winding ropes (341) are fixedly connected between the adjusting shaft (32) and the winding wheel (34), the connection points of the winding ropes (341) on the two sides are symmetrically arranged, and a return spring (35) is fixedly connected between the adjusting shaft (32) and the side wall of the adjusting box (31).
5. The plasma cleaning device for the precision analysis instrument is characterized in that a cavity is formed in the inner cavity of the box body (1), the adsorption assembly (4) comprises a centrifugal disc (41), the centrifugal disc (41) is rotatably connected with the bottom of the inner cavity of the cavity, the side wall of the screw rod (102) in the cavity is fixedly connected with a first rotating wheel (42) and a second rotating wheel (421), the middle of the cavity is rotatably connected with a third rotating wheel (43), the upper part of the third rotating wheel (43) is fixedly connected with a gear (44), the side wall of the centrifugal disc (41) is fixedly connected with a fluted disc (45), the gear (44) is meshed with the fluted disc (45), and the second rotating wheel (421) is in transmission connection with the third rotating wheel (43).
6. The plasma cleaning device for the precision analysis instrument is characterized in that a sealing bin (411) is annularly arranged inside the centrifugal disc (41), a piston plate (412) is connected to the inner wall of the sealing bin (411) in a sealing and sliding mode, a compression spring (413) is fixedly connected between the piston plate (412) and the sealing bin (411), a counterweight ball (414) is fixedly connected to the side wall of the piston plate (412), and the counterweight ball (414) is connected with the side wall of the sealing bin (411) in a sliding mode.
7. The plasma cleaning device for the precision analysis instrument is characterized in that an adsorption disc (46) is fixedly connected to the middle of the upper surface of the bottom of the box body (1), a bearing ring (47) is fixedly connected to the bottom of the adsorption disc (46), guide pipes (48) are rotatably connected to the periphery of the bottom of the bearing ring (47), and the guide pipes (48) are communicated with the sealed cabin (411).
8. The plasma cleaning device for the precision analysis instrument is characterized in that the heat dissipation assembly (5) comprises a heat dissipation shaft (51), the heat dissipation shaft (51) is rotatably connected with the bottom of the sealed bin (411), a fourth rotating wheel (52) is fixedly connected to the side wall of the heat dissipation shaft (51) inside the sealed bin (411), the fourth rotating wheel (52) is in transmission connection with the third rotating wheel (43), a driving blade (53) is annularly arranged on the side wall of the heat dissipation shaft (51), a heat dissipation groove is formed in the side wall of the box body (1), an air inlet pipe (54) is fixedly connected to the upper portion of the left side of the box body (1), a filtering ball valve (55) is fixedly connected to the upper end of the air inlet pipe (54), and the lower end of the air inlet pipe (54) is communicated with the inner cavity of the left side of the box body (1).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210166245.6A CN114308907B (en) | 2022-02-23 | 2022-02-23 | Plasma cleaning device for precise analysis instrument |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210166245.6A CN114308907B (en) | 2022-02-23 | 2022-02-23 | Plasma cleaning device for precise analysis instrument |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN114308907A true CN114308907A (en) | 2022-04-12 |
| CN114308907B CN114308907B (en) | 2023-11-28 |
Family
ID=81030819
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202210166245.6A Active CN114308907B (en) | 2022-02-23 | 2022-02-23 | Plasma cleaning device for precise analysis instrument |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN114308907B (en) |
Citations (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB961455A (en) * | 1961-02-15 | 1964-06-24 | Schoettle Kg Electrostar | Vacuum cleaner with beating action for cleaning carpets |
| US3487586A (en) * | 1964-12-24 | 1970-01-06 | Int Standard Electric Corp | Automatic processing apparatus |
| JP2008117982A (en) * | 2006-11-06 | 2008-05-22 | Tokyo Electron Ltd | Mounting device, plasma processing device, and plasma processing method |
| JP3142185U (en) * | 2008-03-25 | 2008-06-05 | 沛▲きん▼科技有限公司 | Press mold washer |
| JP2010056113A (en) * | 2008-08-26 | 2010-03-11 | Hitachi High-Technologies Corp | Cleaning apparatus and cleaning method |
| CN110076141A (en) * | 2019-04-30 | 2019-08-02 | 河南先途智能科技有限公司 | A kind of plasma washing equipment |
| CN211125603U (en) * | 2020-02-26 | 2020-07-28 | 青岛天仁微纳科技有限责任公司 | Rotary silicon wafer cleaning and drying equipment |
| JP2020195988A (en) * | 2019-06-04 | 2020-12-10 | 張偉萍 | Energy conservation type steam washing equipment |
| CN212895668U (en) * | 2020-07-15 | 2021-04-06 | 无锡市康佰液压气动机械有限公司 | Control valve cabinet for pressing part of paper machine |
| CN112827901A (en) * | 2020-12-23 | 2021-05-25 | 蚌埠兴科玻璃有限公司 | Glass coating belt cleaning device for line |
| CN213887438U (en) * | 2020-12-09 | 2021-08-06 | 阳明量子科技(深圳)有限公司 | Plasma cleaning device |
| CN214184399U (en) * | 2020-11-03 | 2021-09-14 | 上海繁枫真空科技有限公司 | Plasma cleaning equipment |
| CN113546256A (en) * | 2021-08-05 | 2021-10-26 | 溧阳市人民医院 | Throat anesthesia quantitative spraying device for anesthesia department |
| WO2022000908A1 (en) * | 2020-07-02 | 2022-01-06 | 昆山市新腾胜精密模具有限公司 | Injection mold cleaning device |
-
2022
- 2022-02-23 CN CN202210166245.6A patent/CN114308907B/en active Active
Patent Citations (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB961455A (en) * | 1961-02-15 | 1964-06-24 | Schoettle Kg Electrostar | Vacuum cleaner with beating action for cleaning carpets |
| US3487586A (en) * | 1964-12-24 | 1970-01-06 | Int Standard Electric Corp | Automatic processing apparatus |
| JP2008117982A (en) * | 2006-11-06 | 2008-05-22 | Tokyo Electron Ltd | Mounting device, plasma processing device, and plasma processing method |
| JP3142185U (en) * | 2008-03-25 | 2008-06-05 | 沛▲きん▼科技有限公司 | Press mold washer |
| JP2010056113A (en) * | 2008-08-26 | 2010-03-11 | Hitachi High-Technologies Corp | Cleaning apparatus and cleaning method |
| CN110076141A (en) * | 2019-04-30 | 2019-08-02 | 河南先途智能科技有限公司 | A kind of plasma washing equipment |
| JP2020195988A (en) * | 2019-06-04 | 2020-12-10 | 張偉萍 | Energy conservation type steam washing equipment |
| CN211125603U (en) * | 2020-02-26 | 2020-07-28 | 青岛天仁微纳科技有限责任公司 | Rotary silicon wafer cleaning and drying equipment |
| WO2022000908A1 (en) * | 2020-07-02 | 2022-01-06 | 昆山市新腾胜精密模具有限公司 | Injection mold cleaning device |
| CN212895668U (en) * | 2020-07-15 | 2021-04-06 | 无锡市康佰液压气动机械有限公司 | Control valve cabinet for pressing part of paper machine |
| CN214184399U (en) * | 2020-11-03 | 2021-09-14 | 上海繁枫真空科技有限公司 | Plasma cleaning equipment |
| CN213887438U (en) * | 2020-12-09 | 2021-08-06 | 阳明量子科技(深圳)有限公司 | Plasma cleaning device |
| CN112827901A (en) * | 2020-12-23 | 2021-05-25 | 蚌埠兴科玻璃有限公司 | Glass coating belt cleaning device for line |
| CN113546256A (en) * | 2021-08-05 | 2021-10-26 | 溧阳市人民医院 | Throat anesthesia quantitative spraying device for anesthesia department |
Also Published As
| Publication number | Publication date |
|---|---|
| CN114308907B (en) | 2023-11-28 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN110480445A (en) | A kind of deburring equipment for the steering motor shell for preventing from scratching | |
| CN111531458A (en) | A polishing equipment for aluminum alloy wheel hub processing | |
| CN110682009A (en) | A high-efficient type laser cutting equipment for processing industry | |
| CN114308907A (en) | Plasma cleaning device for precision analysis instrument | |
| CN209717309U (en) | A kind of multistation burnishing device | |
| CN113732843B (en) | Brake disc grinding device | |
| CN109048562A (en) | A kind of magnetic element centerless grinding machine | |
| CN211051653U (en) | Novel a crushing apparatus for silica gel processing | |
| CN210085568U (en) | Novel vacuum magnetron sputtering coating machine | |
| CN107036271A (en) | A kind of rotatable air-conditioning | |
| CN108942646A (en) | Planetary gear type magnetic coupling fluid polishing device | |
| CN213715030U (en) | Optical analysis equipment with turn to structure | |
| CN215659517U (en) | Precision temperature control device for silicon carbide single crystal | |
| CN208374960U (en) | A kind of high efficiency sand milling mechanism processing outer ceramic surface | |
| CN208712424U (en) | A kind of plasma cleaner of automatic opening and closing door | |
| CN213401114U (en) | Push-pull ball rod type adjustable cavity door device of wafer photoresist remover | |
| CN221020441U (en) | Polishing device for coated piece | |
| CN214891600U (en) | Humidification cooling air cooler for desert area | |
| TWM591894U (en) | Small rotary plasma cleaner spray gun | |
| CN213542924U (en) | Air cooling circulation improvement device of medical refrigerator | |
| CN108493109B (en) | Production method of semiconductor diode | |
| CN220982437U (en) | Fan operation noise detection device | |
| CN219465793U (en) | Grinding device capable of avoiding flying scraps | |
| CN220852501U (en) | Differential pressure control device of clean room | |
| CN219945592U (en) | Linear carrier stretching mechanism on capillary central hole fillet processing equipment |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| TA01 | Transfer of patent application right | ||
| TA01 | Transfer of patent application right |
Effective date of registration: 20231030 Address after: Building 208, Building A, Baitong Technology Innovation Industrial Park, Houting Community, Shajing Street, Bao'an District, Shenzhen City, Guangdong Province, 518104 Applicant after: Shenzhen Zhenhua plasma Intelligent Manufacturing Co.,Ltd. Address before: 250000 building 3, entrepreneurship incubation base, No. 253, nanxinzhuang West Road, Shizhong District, Jinan City, Shandong Province Applicant before: Xi Xiaobing |
|
| GR01 | Patent grant | ||
| GR01 | Patent grant |