CN114268294B - SAW device including hybrid weighting type reflection grating and hybrid weighting type reflection grating - Google Patents
SAW device including hybrid weighting type reflection grating and hybrid weighting type reflection grating Download PDFInfo
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Abstract
The invention relates to a SAW device containing a hybrid weighting type reflection grating and the hybrid weighting type reflection grating, belonging to the technical field of radio frequency filtering. Therefore, the hybrid weighting type reflection grating is provided with the plurality of reflection gate electrodes distributed at equal intervals, the lengths and the widths of the plurality of reflection gate electrodes are decreased gradually in the direction away from the interdigital transducer, so that a hybrid weighting structure combining the width gradient weighting and the apodization weighting is formed, transverse clutter generated in the SAW device can be suppressed under a more compact structure, the clutter suppression performance is improved, the frequency response characteristic of the SAW device is improved, and the Q value of the SAW device is further improved.
Description
Technical Field
The present invention relates to the field of rf filtering technologies, and in particular, to an SAW device including a hybrid weighting type reflection grating and a hybrid weighting type reflection grating.
Background
As shown in fig. 1, a conventional SAW (surface acoustic wave) device with a reflection structure has a reflection grating for reflecting acoustic energy to a central area, thereby improving energy utilization. However, increasing the reflection grating increases the surface area of the entire device, which is not advantageous for miniaturization of the device, and when an electrical signal is input to an IDT (interdigital transducer), in addition to exciting a surface acoustic wave having the same input frequency, noise other than a small portion of the input signal frequency is generated, which deteriorates the frequency response characteristics of the SAW device.
Disclosure of Invention
Accordingly, the present invention provides a SAW device including a hybrid weighted reflection grating and a hybrid weighted reflection grating, so as to reduce a surface area of the reflection grating, make the device more compact, reduce generation of noise in a signal transmission process in the SAW device, and improve a frequency response characteristic of the SAW device.
In order to achieve the purpose, the invention provides the following scheme:
a SAW device comprising a hybrid weighted reflection grating comprises a piezoelectric substrate, an interdigital transducer and two hybrid weighted reflection gratings, wherein the interdigital transducer and the two hybrid weighted reflection gratings are arranged on the piezoelectric substrate, and the two hybrid weighted reflection gratings are symmetrically arranged relative to the interdigital transducer;
the hybrid weighting type reflection grating comprises a plurality of reflection gate electrodes distributed at equal intervals, the lengths and the widths of the plurality of reflection gate electrodes are decreased progressively in a preset direction, and the preset direction is a direction far away from the interdigital transducer.
Optionally, the distribution function of the lengths of the reflective gate electrodes in the hybrid weighted reflective gate is as follows:
；
wherein the content of the first and second substances,l i indicates the length of the ith reflection gate electrode in a preset direction,Aindicates the length of the 1 st reflective gate electrode in a preset direction,arepresenting a first preset parameter.
Alternatively to this, the first and second parts may,Ais a first predetermined parameter, the distance between two busbars in the interdigital transduceraIs 0.1.
Optionally, a distribution function of widths of the reflective gate electrodes in the hybrid weighted reflective gate is as follows:
；
wherein the content of the first and second substances,w i indicates the width of the ith reflection gate electrode in a preset direction,fwhich represents a second preset parameter that is set by the user,ba third preset parameter is indicated which is,crepresenting a fourth preset parameter.
Optionally, a second predetermined parameterfThe value of (1) is the design wavelength of the SAW device containing the hybrid weighting type reflection grating; third preset parameterbIs 4, a fourth preset parametercIs 2.
Alternatively, the distribution interval of the reflection gate electrodes in the hybrid weighting type reflection gate is 1/4 times of the design wavelength of the SAW device including the hybrid weighting type reflection gate.
Optionally, the interdigital transducer comprises two interdigital electrode units;
the interdigital electrode unit comprises a bus bar and a plurality of interdigital electrodes connected with the bus bar;
interdigital electrodes in the two interdigital electrode units are arranged in a crossed manner;
the distance d between the bus bars in the two interdigital electrode units is larger than the length of the interdigital electrode.
Optionally, the difference between the distance d and the length of the interdigital electrode is 0.05 times the distance d.
A hybrid weighting type reflecting gate comprises a plurality of reflecting gate electrodes distributed at equal intervals, and the lengths and the widths of the plurality of reflecting gate electrodes are gradually reduced in a preset direction.
Optionally, the distribution function of the lengths of the reflective gate electrodes in the hybrid weighted reflective gate is as follows:
；
wherein the content of the first and second substances,l i indicates the length of the ith reflection gate electrode in a preset direction,Aindicates the length of the 1 st reflective gate electrode in a preset direction,arepresenting a first preset parameter;
the distribution function of the widths of the reflecting gate electrodes in the mixed weighting type reflecting gate is as follows:
；
wherein the content of the first and second substances,w i indicates the width of the ith reflective gate electrode in a preset direction,fwhich represents a second preset parameter that is set by the user,ba third preset parameter is indicated which is,crepresenting a fourth preset parameter.
According to the specific embodiment provided by the invention, the invention discloses the following technical effects:
the SAW device comprising the mixed weighting type reflecting gratings disclosed by the embodiment of the invention comprises a piezoelectric substrate, an interdigital transducer and two mixed weighting type reflecting gratings, wherein the interdigital transducer and the two mixed weighting type reflecting gratings are arranged on the piezoelectric substrate, and the two mixed weighting type reflecting gratings are symmetrically arranged relative to the interdigital transducer; the hybrid weighting type reflection grating comprises a plurality of reflection gate electrodes distributed at equal intervals, the lengths and the widths of the plurality of reflection gate electrodes are decreased progressively in a preset direction, and the preset direction is a direction far away from the interdigital transducer. Therefore, in the embodiment of the invention, the hybrid weighting type reflection grating is arranged into the plurality of reflection gate electrodes distributed at equal intervals, and the lengths and the widths of the plurality of reflection gate electrodes are decreased progressively in the direction away from the interdigital transducer, so that a hybrid weighting structure combining the width gradual weighting and the apodization weighting is formed, transverse clutter generated in the SAW device can be suppressed under a more compact structure, the clutter suppression performance is improved, the frequency response characteristic of the SAW device is improved, and the Q value of the SAW device is further improved.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings needed to be used in the embodiments will be briefly described below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and it is obvious for those skilled in the art to obtain other drawings without inventive exercise.
Fig. 1 is a schematic structural diagram of a SAW device with a conventional reflective grating structure according to an embodiment of the present invention;
FIG. 2 is a schematic structural diagram of a SAW device including a hybrid weighting type reflective grating according to an embodiment of the present invention;
FIG. 3 is a schematic structural diagram of a weighted grating with gradually changing widths according to an embodiment of the present invention;
FIG. 4 is a schematic diagram of an apodized weighted reflecting grating according to an embodiment of the invention;
fig. 5 is a schematic diagram illustrating an operation of a SAW device including a hybrid weighting type reflection grating according to an embodiment of the present invention.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be obtained by a person skilled in the art without making any creative effort based on the embodiments in the present invention, belong to the protection scope of the present invention.
The invention aims to provide a SAW device comprising a hybrid weighting type reflecting grating and the hybrid weighting type reflecting grating, so that the surface area of the reflecting grating is reduced, the device is more compact, the generation of noise in the signal transmission process in the SAW device is reduced, and the frequency response characteristic of the SAW device is improved. A description of a SAW device including a hybrid-weighted reflective grating will be given first, followed by a description of a hybrid-weighted reflective grating.
Example 1
As shown in fig. 2, the present invention provides a SAW device including a hybrid weighting type reflection grating, including a piezoelectric substrate 1, and an interdigital transducer 2 and two hybrid weighting type reflection gratings 3 disposed on the piezoelectric substrate 1, the two hybrid weighting type reflection gratings 3 being symmetrically disposed with respect to the interdigital transducer.
In one example. As shown in fig. 2, the two hybrid weighting-type reflection gratings 3 are symmetrically disposed at both ends of the interdigital transducer 2 in the wave transmission direction, and reflect the wave excited by the interdigital transducer 2.
If the surface acoustic wave excited by the interdigital transducer 2 has a plurality of wave transmission directions, two hybrid weighting type reflection gratings 3 may be symmetrically disposed at both ends of each wave transmission direction.
As shown in fig. 2, each hybrid weighting type reflection gate 3 includes a plurality of reflection gate electrodes distributed at equal intervals, and the lengths and widths of the plurality of reflection gate electrodes are decreased in a predetermined direction, which is a direction away from the interdigital transducer.
In addition, in other embodiments of the present invention, the thicknesses of the plurality of reflective gate electrodes may decrease along the predetermined direction, and of course, may also remain unchanged.
In one example, the two hybrid weighting type reflection gratings 3 are identical in structure. Specifically, the decreasing manner of the structures of the two hybrid weighting type reflection gates 3, the intervals between the reflection gate electrodes, and the number of the reflection gate electrodes are all the same. It should be noted that the same here means the same theory, but the error caused by the processing should be allowed.
In other examples, the two hybrid weighting type reflection gratings 3 may be configured differently as required by those skilled in the art. Specifically, the two hybrid weighting type reflective gates 3 are different in at least one of the length decreasing manner, the width decreasing manner, the interval of the reflective gate electrodes, and the number of the reflective gate electrodes.
The manner of decrementing is described below.
Taking the decreasing length as an example, the lengths of the plurality of reflection gate electrodes in the hybrid weighting-type reflection gate 3 may decrease at random values along a predetermined direction, or may decrease according to a certain distribution rule.
The distribution function may be used to represent the distribution law. The distribution function of the lengths of the reflective gate electrodes in the hybrid weighted reflective gate is exemplified by:
(ii) a Wherein the content of the first and second substances,l i indicates the length of the ith reflection gate electrode in a preset direction,Aindicates the length of the 1 st reflective gate electrode in a preset direction,arepresenting a first preset parameter.
AIs exemplarily the distance between two bus bars 21 in the interdigital transducer, a first predetermined parameteraThe value of (d) is illustratively 0.1.
It will be appreciated that those skilled in the art may have flexibility in designingAAndathe value of (a). For example, in the case of a liquid,Athe value of (a) can also be other values determined in a simulation optimization mode to enable the performance of the SAW device comprising the hybrid weighting type reflection grating to be better (or consistent); as another example, in addition to 0.1,athe value of (b) may be other values (e.g., 0.15, 0.2, 0.08, etc.), which are related to the number of the reflective gate electrodes in the hybrid weighting type reflective gate, and the range is (0, 1/n), where n is the number of the reflective gate electrodes in the hybrid weighting type reflective gate 3.
The distribution function of the lengths of the reflective gate electrodes in the hybrid weighting type reflective gate may also be in other forms (for example, the distribution function is a fixed value) as long as it is satisfied that the lengths decrease in the preset direction.
Taking the width decreasing as an example, the widths of the plurality of reflective gate electrodes in the hybrid weighted reflective gate 3 may decrease with random values along a predetermined direction, or may decrease according to a certain distribution rule.
The distribution function can be used to express its distribution rule. The distribution function of the width of the reflective gate electrode in the hybrid weighted reflective gate is exemplified by:
(ii) a Wherein the content of the first and second substances,w i indicates the width of the ith reflection gate electrode in a preset direction,fwhich represents a second preset parameter that is set by the user,ba third preset parameter is indicated which is,crepresenting a fourth preset parameter.
Second preset parameterfExemplary values of (a) are the design wavelength of a SAW device containing a hybrid weighted reflective grating; third preset parameterbExemplary values of (a) are 4, a fourth preset parametercThe value of (d) is illustratively 2.
It will be appreciated that those skilled in the art may have flexibility in designingλ（λFor the design wavelength of a SAW device containing a hybrid weighted reflective grating),bandcthe value of (a) is, for example,λ、bandcthe value of (a) may also be determined in a simulation optimization manner, and the determined value may be: other values that make the performance of SAW devices incorporating hybrid weighted reflective gratings more optimal (or consistent).
Of course, the distribution function of the widths of the reflective gate electrodes in the hybrid weighting-type reflective gate may be in other forms (for example, the distribution function is a fixed value) as long as it is satisfied that the widths are decreased in the predetermined direction.
The distribution intervals are described below. The distribution interval of the reflection gate electrodes in any of the hybrid weighting type reflection gates 3 described above is illustratively 1/4 times the design wavelength of the SAW device including the hybrid weighting type reflection gate. The distribution intervals can be designed flexibly, for example, the distribution intervals can also be determined in a simulation optimization manner, and other values can be used for enabling the performance of the SAW device comprising the hybrid weighting type reflection grating to be better (or consistent).
Illustratively, as shown in fig. 2, the interdigital transducer 2 includes two interdigital electrode units; the interdigital electrode unit includes a bus bar 21, and a plurality of interdigital electrodes 22 connected to the bus bar 21; the interdigital electrodes 22 in the two interdigital electrode units are arranged in a crossed manner;
in the present embodiment, the distance d between the bus bars 21 is larger than the length of the interdigital electrode 22. If the lengths of the interdigital electrodes 22 are different, the d is larger than the length of the interdigital electrode 22 having the largest length.
Illustratively, the difference between the distance d and the length of the interdigitated electrodes 22 is 0.05 times the distance d. The structure of the interdigital transducer 2 in fig. 2 is only an example, and the entire structure of the interdigital transducer 2 may have other shapes such as a circular shape, and the structures of the bus bars 21 and the interdigital electrodes 22 may have other shapes such as a wavy shape. That is, the overall shape of the interdigital transducer 2, the shape of the bus bar 21, the number of the interdigital electrodes 22, and the shape may be determined according to actual requirements, and are not limited herein.
Example 2
As shown in fig. 2, an embodiment of the present invention provides a SAW device including a hybrid weighting type reflection gate, in which the hybrid weighting type reflection gate 3 includes a plurality of reflection gate electrodes distributed at equal intervals, and lengths and widths of the plurality of reflection gate electrodes decrease in a preset direction, so as to form a hybrid weighting structure of a width-gradient weighting and an apodization weighting.
The structure of the width-gradient weighted reflecting grating is shown in fig. 3, the materials of electrodes can be reduced, the device is made to be more compact, the structure of the apodization weighted reflecting grating is shown in fig. 4, transverse clutter can be inhibited, the Q value of the SAW device is increased, the two structures of fig. 3 and fig. 4 are combined, the advantages of the two structures are fused, the SAW device containing the mixed weighted reflecting grating with the gradient weighted width and the apodization weighted shown in fig. 2 can be obtained, meanwhile, the effect of inhibiting the transverse clutter of the device is achieved, the Q value is improved, the size of the electrode is smaller, and the SAW device with the more compact structure is obtained.
In the present embodiment, the material of the piezoelectric substrate 1 is a piezoelectric material, which includes but is not limited toNot limited to LiNbO3、LiTaO3AlN, ZnO or PZT (lead zirconate titanate-based piezoelectric ceramic).
The material of the electrodes (the material of the interdigital transducer 2 and the two hybrid weighting type reflection gratings 3) is a conductive material such as Al or Mo.
The interdigital transducer 2 and the hybrid weighting type reflection grating 3 may be made of the same conductive material, or may be made of different conductive materials.
The interdigital transducer 2 comprises two interdigital electrode units; the interdigital electrode unit includes a bus bar 21, and a plurality of interdigital electrodes 22 connected to the bus bar 21; the interdigital electrodes 22 in the two interdigital electrode units are arranged crosswise.
Illustratively, in an interdigital electrode unit, the width and the interval of each interdigital electrode 22 are 1/4 times the design wavelength of the SAW device, and the distance between the interdigital electrode 22 and the bus bar 21 in the opposite lateral direction is 0.05 times a.
In this embodiment, the two-sided hybrid weighting type reflection grating has a symmetrical structure, the length of the reflection gate electrode closest to the interdigital transducer is a, the width is 1/4 λ, and the lengths of the subsequent reflection gate electrodes decrease in sequence along the direction away from the interdigital transducer 2, which are respectively: 0.9A, 0.8A, 0.7A and 0.6A, the widths of which are also decreasing in order, respectively, (1/6) λ, (1/8) λ, (1/10) λ and (1/12) λ.
Fig. 5 is a schematic diagram of the operation of a SAW device including a hybrid-weighted reflection grating, wherein a piezoelectric substrate generates a surface acoustic wave with a wavelength λ due to the inverse piezoelectric effect when a voltage is applied to an interdigital transducer. The reflection gate electrode of the mixed weighting type reflection grating can reflect the surface acoustic wave energy transmitted from the interdigital transducer area back to the interdigital transducer area, so that the leakage of the acoustic wave to two sides is reduced, and the energy utilization rate is improved. The SAW device comprising the hybrid weighted reflection grating can suppress unnecessary modal sound waves under a more compact structure, and the Q value of the device is improved.
Example 3
The embodiment protects a hybrid weighted reflective gate, which comprises a plurality of reflective gate electrodes distributed at equal intervals, wherein the lengths and the widths of the plurality of reflective gate electrodes are decreased progressively in a preset direction.
The distribution function of the lengths of the reflective gate electrodes in the hybrid weighted reflective gate is exemplified by:
(ii) a Wherein the content of the first and second substances,l i indicates the length of the ith reflection gate electrode in a preset direction,Aindicates the length of the 1 st reflective gate electrode in a preset direction,arepresenting a first preset parameter.
The distribution function of the width of the reflective gate electrode in the hybrid weighted reflective gate is exemplified by:
(ii) a Wherein the content of the first and second substances,w i indicates the width of the ith reflection gate electrode in a preset direction,fwhich represents a second preset parameter that is set by the user,ba third preset parameter is indicated which is,crepresenting a fourth preset parameter.
The distribution function of the length and width of the reflective gate electrode in the hybrid weighting type reflective gate may be in other forms as long as it is satisfied that the length decreases in the predetermined direction.
For the corresponding description, reference is made to the above description, which is not repeated herein.
According to the specific embodiment provided by the invention, the invention discloses the following technical effects:
according to the invention, the hybrid weighting type reflection grating is arranged into a plurality of reflection gate electrodes distributed at equal intervals, and the lengths and the widths of the plurality of reflection gate electrodes are decreased progressively in the direction away from the interdigital transducer, so that a hybrid weighting structure combining width gradual-change weighting and apodization weighting is formed, transverse clutter generated in the SAW device can be suppressed under a more compact structure, the clutter suppression performance is improved, the frequency response characteristic of the SAW device is improved, and the Q value of the SAW device is further improved.
The embodiments in the present description are described in a progressive manner, each embodiment focuses on differences from other embodiments, and the same and similar parts among the embodiments are referred to each other.
The principles and embodiments of the present invention have been described herein using specific examples, which are provided only to help understand the method and the core concept of the present invention; meanwhile, for a person skilled in the art, according to the idea of the present invention, the specific embodiments and the application range may be changed. In view of the above, the present disclosure should not be construed as limiting the invention.
Claims (7)
1. A SAW device comprising a hybrid weighted-type reflection grating, comprising a piezoelectric substrate, and an interdigital transducer and two hybrid weighted-type reflection gratings disposed on the piezoelectric substrate, wherein the two hybrid weighted-type reflection gratings are symmetrically disposed with respect to the interdigital transducer;
the hybrid weighting type reflection grating comprises a plurality of reflection gate electrodes distributed at equal intervals, the lengths and the widths of the plurality of reflection gate electrodes are decreased progressively in a preset direction, and the preset direction is a direction far away from the interdigital transducer;
the distribution function of the lengths of the reflecting gate electrodes in the mixed weighting type reflecting gate is as follows:
；
wherein the content of the first and second substances,l i indicates the length of the ith reflection gate electrode in a preset direction,Aindicates the length of the 1 st reflective gate electrode in a preset direction,arepresenting a first preset parameter;
the distribution function of the widths of the reflecting gate electrodes in the mixed weighting type reflecting gate is as follows:
；
wherein the content of the first and second substances,w i indicates the width of the ith reflection gate electrode in a preset direction,fwhich represents a second preset parameter that is set by the user,ba third preset parameter is indicated which is,crepresenting a fourth preset parameter.
2. A SAW device incorporating a hybrid weighted reflective grating according to claim 1,Ais a first predetermined parameter, the distance between two busbars in the interdigital transduceraIs 0.1.
3. A SAW device including a hybrid weighted reflection grating as claimed in claim 1, wherein the second predetermined parameterfThe value of (a) is the design wavelength of the SAW device containing the hybrid weighted reflection grating; third preset parameterbIs 4, a fourth preset parametercIs 2.
4. A SAW device including a hybrid-weighted reflection grating as recited in claim 1, wherein the distribution interval of the reflection gate electrodes in the hybrid-weighted reflection grating is 1/4 times the design wavelength of the SAW device including the hybrid-weighted reflection grating.
5. A SAW device including a hybrid weighted reflection grating as recited in claim 1 wherein said interdigital transducer comprises two interdigital electrode elements;
the interdigital electrode unit comprises a bus bar and a plurality of interdigital electrodes connected with the bus bar;
interdigital electrodes in the two interdigital electrode units are arranged in a crossed manner;
the distance d between the bus bars in the two interdigital electrode units is larger than the length of the interdigital electrode.
6. A SAW device incorporating a hybrid weighted reflective grating as claimed in claim 5, wherein the difference between said distance d and the length of the interdigital electrodes is 0.05 times said distance d.
7. The hybrid weighting type reflecting gate is characterized by comprising a plurality of reflecting gate electrodes which are distributed at equal intervals, wherein the lengths and the widths of the plurality of reflecting gate electrodes are gradually reduced in a preset direction;
the distribution function of the lengths of the reflecting gate electrodes in the mixed weighting type reflecting gate is as follows:
；
wherein the content of the first and second substances,l i indicates the length of the ith reflection gate electrode in a preset direction,Aindicates the length of the 1 st reflective gate electrode in a preset direction,arepresenting a first preset parameter;
the distribution function of the widths of the reflecting gate electrodes in the mixed weighting type reflecting gate is as follows:
；
wherein, the first and the second end of the pipe are connected with each other,w i indicates the width of the ith reflection gate electrode in a preset direction,fwhich represents a second preset parameter that is set by the user,ba third preset parameter is indicated which is,crepresenting a fourth preset parameter.
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| US6650207B1 (en) * | 2000-04-24 | 2003-11-18 | Mitsubishi Denki Kabushiki Kaisha | Longitudinally coupled surface acoustic wave filter with linearly weighted reflectors |
| CN101860342A (en) * | 2010-04-29 | 2010-10-13 | 贵州大学 | SAW (Surface Acoustic Wave) device of bus bar doubled as reflecting grating type IDT (Interdigital Transducer) structure |
| CN101889392A (en) * | 2007-12-11 | 2010-11-17 | 株式会社村田制作所 | Surface acoustic wave device and duplexer |
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| EP2202882A4 (en) * | 2007-10-18 | 2011-12-21 | Murata Manufacturing Co | Surface acoustic wave resonator and ladder type filter |
| WO2019094388A1 (en) * | 2017-11-07 | 2019-05-16 | Resonant Inc. | Ultra-wide-band saw sensor with hyperbolically frequency-modulated etched reflector |
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| US6650207B1 (en) * | 2000-04-24 | 2003-11-18 | Mitsubishi Denki Kabushiki Kaisha | Longitudinally coupled surface acoustic wave filter with linearly weighted reflectors |
| CN101889392A (en) * | 2007-12-11 | 2010-11-17 | 株式会社村田制作所 | Surface acoustic wave device and duplexer |
| CN101860342A (en) * | 2010-04-29 | 2010-10-13 | 贵州大学 | SAW (Surface Acoustic Wave) device of bus bar doubled as reflecting grating type IDT (Interdigital Transducer) structure |
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