CN207163978U - Surface acoustic wave resonant sensor - Google Patents
Surface acoustic wave resonant sensor Download PDFInfo
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- CN207163978U CN207163978U CN201720507969.7U CN201720507969U CN207163978U CN 207163978 U CN207163978 U CN 207163978U CN 201720507969 U CN201720507969 U CN 201720507969U CN 207163978 U CN207163978 U CN 207163978U
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Abstract
It the utility model is related to a kind of surface acoustic wave resonant sensor, including piezoelectric substrate, the interdigital transducer being arranged on piezoelectric substrate, two groups of groove reflecting grating arrays and antenna, the electrode of wherein interdigital transducer is external to the antenna, two groups of groove reflecting grating arrays are symmetricly set on the both sides of interdigital transducer, groove reflecting grating array includes the more groove reflecting gratings be arrangeding in parallel, the length of more groove reflecting gratings is unequal, and the length change of wherein groove reflecting grating meets weighting function equation.Above-mentioned surface acoustic wave resonant sensor, using groove reflecting grating, because the luminance factor of groove reflecting grating is larger, reflecting grating number can be effectively reduced, so as to greatly reduce size sensor.In addition, the length of groove reflecting grating is unequal, it can effectively suppress the side lobe height of sensor by the way of length weight so that sensor strong antijamming capability.
Description
Technical field
Resonant transducer is the utility model is related to, more particularly to a kind of surface acoustic wave resonant sensor.
Background technology
Surface acoustic wave (Surface Acosstic Wave, abbreviation SAW), it is a kind of sound propagated along elastic matrix surface
This phenomenon all be present in ripple, any surface of solids.Some extraneous factors (such as temperature, pressure, acceleration, magnetic field, voltage) are right
SAW propagation parameter can be impacted, and the various things of measurement can be developed according to the relation between these influences and extraneous factor
Reason, the SAW sensor of chemical parameters.
Resonant transducer, it is a kind of sensor using resonant element tested parameter transform for frequency signal, also known as
Frequency type sensor.When tested parameter changes, the eigentone of vibrating elements changes therewith, by surveying accordingly
Measure circuit, so that it may obtain the electric signal into certain relation with tested parameter.
Surface acoustic wave resonant sensor has been widely used in wireless and passive due to the characteristic that its is easy of integration, loss is low
Sensory field.The loss of sensor component is the important indicator of sensor, is generally reflected with quality factor (also known as Q values), Q values
Bigger device loss is smaller.In order to improve the Q values of sensor, increase the reflection grizzly bar of resonant transducer under normal circumstances.But
Because the reflectivity of every reflection grizzly bar is smaller, existing surface acoustic wave resonant sensor reflection grizzly bar would generally compare
It is more, often up to hundreds of.Therefore the size of surface acoustic wave resonant sensor is bigger now, and the size for reflecting grizzly bar accounts for
The 2/3 of whole resonant mode transducer.
Utility model content
Based on this, it is necessary to for the problem of existing surface acoustic wave resonant size sensor is big, reflecting grating quantity is more, carry
For a kind of surface acoustic wave resonant sensor.
A kind of surface acoustic wave resonant sensor, it is characterised in that including piezoelectric substrate, the fork being arranged on piezoelectric substrate
Finger transducer, two groups of groove reflecting grating arrays and antenna, the electrode of wherein interdigital transducer are external to the antenna, two groups of institutes
The both sides that groove reflecting grating array is symmetricly set on the interdigital transducer are stated, the groove reflecting grating array is parallel including more
The groove reflecting grating of setting, the length of the more groove reflecting gratings is unequal, and the length change of wherein groove reflecting grating meets
Weighting function equation.
Surface acoustic wave resonant sensor of the present utility model, using groove reflecting grating, due to the reflection of groove reflecting grating
Rate is bigger, reflecting grating number can be effectively reduced, so as to greatly reduce size sensor.In addition, the length of groove reflecting grating
It is unequal, it can effectively suppress the side lobe height of sensor by the way of length weight so that sensor strong antijamming capability.
Brief description of the drawings
Fig. 1 is the structural representation of surface acoustic wave resonant sensor in one embodiment in the utility model；
Fig. 2 is the structural representation of conventional surface acoustic wave resonant sensor；
Fig. 3 is groove reflecting grating and conventional surface acoustic wave resonance in several surface wave resonant transducers of the present utility model
Metallic reflection grizzly bar overturns comparison result figure in formula sensor.
Description of reference numerals：
100- piezoelectric substrates, 200- interdigital transducers, 300- grooves reflecting grating, 400- sensor reception antennas；
210- conventional sensors piezoelectric substrate, 220- conventional sensors interdigital transducer, 230- metallic reflections grizzly bar, 240-
Conventional sensors reception antenna.
Embodiment
For the ease of understanding the utility model, below with reference to relevant drawings to being originally described more fully.Need
Bright, when an element is considered as " connection " another element, it can be directly to another element and therewith
It is combined as a whole, or may be simultaneously present centering elements.Term as used herein " installation ", " one end ", " other end " with
And similar statement is for illustrative purposes only.
Unless otherwise defined, the technology of technical field of all of technologies and scientific terms used here by the article with belonging to this
The implication that personnel are generally understood that is identical.Term used in book described herein is intended merely to describe the mesh of specific embodiment
, it is not intended that in limitation the utility model.Term as used herein " and/or " include one or more related listd
The arbitrary and all combination of purpose.
As shown in figure 1, a kind of surface acoustic wave resonant sensor, including piezoelectric substrate 100, it is arranged on piezoelectric substrate
200, two groups of groove reflecting grating arrays of interdigital transducer and antenna 400, the electrode of wherein interdigital transducer 200 are external to described
Antenna 400, groove reflecting grating array described in two groups are symmetricly set on the both sides of the interdigital transducer 200, the groove reflection
Grid array includes the more groove reflecting gratings 400 be arrangeding in parallel, and the length of the more groove reflecting gratings is unequal, wherein groove
The length change of reflecting grating meets weighting function equation.
Specifically, the metal electrode of interdigital transducer is made on piezoelectric substrate surface, in the both sides of metal electrode using half
Conductor etching process techniques etch one group of groove reflecting grating array respectively, i.e. two groups of groove reflecting gratings are using interdigital transducer in
The heart is symmetric, and each of which group groove reflecting grating array includes multiple groove reflecting gratings, is put down between multiple groove reflecting gratings
Row sets and (is parallel to each other between i.e. multiple groove reflecting gratings, the inclination angle of each groove reflecting grating arrangement is identical), plurality of ditch
The length of groove reflecting grating is unequal, and the change of its length meets weighting function equation.
For the ease of understanding the utility model, a specific embodiment is provided, if weighting function equation is f (n), one group of ditch
Groove reflecting grating array includes multiple groove reflecting gratings, is designated as N respectively1、N2、N3... ..Nn, then weighting function can be utilized
Equation f (n) calculates the length of this group of groove reflecting grating, groove reflecting grating N1Length be f (N1), groove reflecting grating N2Length
Spend f (N2), groove reflecting grating N3Length f (N3) ... .., groove reflecting grating NnLength f (Nn), i.e. the length of groove reflecting grating
Change meets weighting function equation.
Above-mentioned surface acoustic wave resonant sensor, using groove reflecting grating, due to groove reflecting grating luminance factor compared with
Greatly, reflecting grating number can be effectively reduced, so as to greatly reduce size sensor.In addition, the length of groove reflecting grating is unequal,
The side lobe height of sensor can effectively be suppressed by the way of length weight so that sensor strong antijamming capability.
In one of which embodiment, using quarter window functional equation as weighting function come the length to groove reflecting grating
Degree is weighted design.Triangle window functionτ represents the time cycle, in addition quarter window letter
Number can also state discrete trigonometrical number form as.According to quarter window function formula, then there are 2 (N+1) individual fingers for individual
The groove reflecting grating of bar, the length of each groove reflecting grating are calculated as follows：
N=0, ± 1, ± 2, ± 3 ... ... ± N, W (n) represent groove reflecting grating n length, can
To calculate groove reflecting grating N successively using W (n) calculation formula1、N2、N3... ..NnLength.
W (n) is referred to as taking leaf (Fejer) function, and (i.e. groove reflecting grating is weighted to groove reflection gate length with it
Length change meet the curvilinear equation of triangle window function), the corresponding secondary lobe of frequency can be eliminated, improve sensor performance.
As an alternative embodiment, hamming window function equation or Chebyshev window functional equation can be used to be used as and add
Weight function to the length of groove reflecting grating is weighted design.Hamming window is also one kind of Cosine Window, more than also known as improved liter
Porthole.Hamming window and Hanning window are all Cosine Windows, and simply weight coefficient is different.The coefficient of hamming window weighting can be such that secondary lobe reaches more
It is small.In one of which embodiment, the length of each groove reflecting grating is weighted using hamming window function, can effectively be pressed down
The secondary lobe of sensor processed, improve sensor performance.
A kind of time histories sample of local optimum of Chebyshev window.It meets the maximum amplitude ratio criterion of window function, so
Referred to as maximum amplitude ratio time histories sample.In one of which embodiment, reflected using each groove of Chebyshev window function pair
The length of grid is weighted, and can eliminate the corresponding secondary lobe of frequency, improves sensor performance.
After the completion of the length computation of groove reflecting grating, in groove reflecting grating array setting up procedure, groove can be used to reflect
The mode that gate length successively decreases arranges.Specifically, as shown in figure 1, the groove reflecting grating of surface acoustic wave resonant sensor is close
The groove reflection gate length of interdigital transducer is bigger, the groove reflecting grating away from interdigital transducer (or close to piezoelectric substrate edge)
Length is smaller.Using this arrangement mode, sound-electric (electro-acoustic) conversion rate of sensor is fast, efficiency high.
In one of the embodiments, the groove reflecting grating is lithium niobate groove reflecting grating.
As an alternative embodiment, groove reflecting grating is bismuth germanium oxide groove reflecting grating or quartzy groove reflecting grating.
Specifically, numerical control ion bean etcher can be used, even depth or the length of different depth are etched on piezoelectric substrate
Degree weighting groove reflecting grating.Due to the groove depth of groove, the inclination angle of distribution and its physical dimension, a point reflectivity system is directly affected
Number, insertion loss and other performances, therefore in etching process, to select suitable parameters and etch application so that groove depth indexes
Distribution with trench length is close to theoretical value.In addition, the piezoelectric substrate of sensor can be lithium niobate, bismuth germanium oxide or quartz piezoelectric
Substrate, therefore, groove reflecting grating are lithium niobate groove reflecting grating, bismuth germanium oxide groove reflecting grating or quartzy groove reflecting grating.
Further, in the present embodiment, the gash depth of the groove reflecting grating is the 0.05 of interdigital transducer wavelength
~0.5 times.
Specifically, the gash depth of groove reflecting grating directly affects the reflectance factor of sensor, therefore selects suitable ditch
The depth of groove reflecting grating is very crucial.In a kind of specific embodiment, each groove reflecting grating can be even depth, can be with
The depth of groove reflecting grating is set as M times of interdigital transducer wavelength, wherein M=[0.05,0.5].
In a kind of optional embodiment, each groove reflecting grating can also be that depth is unequal, using weighting letter
Number equation is weighted to gash depth and (weights depth groove reflecting grating).Sensor secondary lobe can effectively be suppressed.Alternatively,
Wherein weighting function equation can be quarter window functional equation, hamming window function equation or Chebyshev window functional equation.
In one of the embodiments, groove reflecting grating be that reflectivity is groove reflecting grating 0.57 times of gash depth
Groove reflecting grating.
Specifically, the loss of sensor component is the important indicator of sensor, generally with quality factor (also known as Q values) come anti-
Reflect, the bigger device loss of Q values is smaller.In order to improve the Q values of sensor, the reflection grizzly bar reflectivity of normal conditions lower sensor is got over
Greatly, the loss of Q values is smaller.As can be seen here, the reflectivity for reflecting grizzly bar is the key factor of sensor.In the present embodiment, it is described
The reflectivity of groove reflecting grating can be 0.57 times of the gash depth of groove reflecting grating.
In one of the embodiments, the number of the groove reflecting grating is inversely proportional with groove reflecting grating reflectivity.
Specifically, the reflectivity for reflecting grizzly bar is the key factor for influenceing sensor Q values, in order to improve the Q values of sensor,
Increase the reflection grizzly bar of resonant transducer under normal circumstances.Therefore, it is relevant to reflect the reflectivity of the number heel-tap reflex grid of grizzly bar,
In the present embodiment, the number of groove reflecting grating is inversely proportional with groove reflecting grating reflectivity.Preferably, the number of groove reflecting grating
For the inverse of groove reflecting grating reflectivity, i.e. 1/ groove reflecting grating reflectivity.
In one of the embodiments, the width of the described more groove reflecting gratings be arrangeding in parallel is equal, and groove is anti-
The width for penetrating grid is 0.25 times of interdigital transducer wavelength.
Specifically, the groove depth of groove reflection gate groove, distribution and its physical dimension, directly affect reflectivity factor, because
This, the width of groove reflectivity is also the key factor for influenceing reflectivity.In the present embodiment, the width of each groove reflecting grating can
To be equal, its width can be 0.25 times of interdigital transducer wavelength.
In a kind of optional embodiment, the width of its each groove reflecting grating can be unequal, using weighting
Functional equation is weighted to groove width and (weights width groove reflecting grating).Sensor secondary lobe can effectively be suppressed.It is optional
Ground, wherein weighting function equation can be quarter window functional equation, hamming window function equation or Chebyshev window functional equation.
In one of the embodiments, the spacing between the described more groove reflecting gratings be arrangeding in parallel is equal, and groove
Spacing between reflecting grating is 0.25 times of interdigital transducer wavelength.
Specifically, the spacing between groove reflection gate groove can also influence reflectivity factor.In the present embodiment, each ditch
Spacing between groove reflecting grating is equal, and its spacing is 0.25 times of interdigital transducer wavelength.
In a kind of optional embodiment, the spacing between its each groove reflecting grating can be it is unequal, it is available
Weighting function equation is weighted to ditch separation and (weights spacing groove reflecting grating).Sensor secondary lobe can effectively be suppressed.
Alternatively, wherein weighting function equation can be quarter window functional equation, hamming window function equation or Chebyshev window function side
Journey.
In one of the embodiments, the piezoelectric substrate is quartz crystal piezoelectric substrate.
Alternatively, piezoelectric substrate can be lithium niobate piezoelectric substrate or bismuth germanium oxide piezoelectric substrate.
Specifically, the material of piezoelectric substrate can be quartz crystal, lithium niobate, bismuth germanium oxide etc..Quartz, lithium niobate and germanic acid
Bismuth is all the substrate material that delay temperature coefficient is big, surface wave velocity is small, can cause transducer sensitivity height.In the present embodiment
In, lithium niobate piezoelectric substrate or bismuth germanium oxide piezoelectric substrate are 55~75 degree of YX tangential (rotating 55~75 degree around Y-direction X-direction),
To obtain specific temperature coefficient and good pressure-sensitivity.
In one of the embodiments, the piezoelectric substrate is the tangential quartz crystal piezoelectric substrates of Y.
Quartz crystal tangential Y is making have positive frequency-temperature coefficient during thickness shear mode vibration as piezoelectric substrate,
There is negative frequency-temperature coefficient when being vibrated on length direction, total temperature coefficient can be from -20 × 10-6DEG C~100 × 10-6℃。
It is more extensive using the tangential quartz crystal temperature coefficient excursions of Y, it is easy to sensor to select suitable temperature coefficient.
Preferably, quartz crystal piezoelectric substrate can be tangentially JCL or LST cut types, can further increase sensor
Sensitivity, and with preferably linear.
In one of the embodiments, the interdigital transducer, which is metal simple-substance interdigital transducer, metal alloy is interdigital changes
Can device or conductive metal oxide interdigital transducer.
Specifically, interdigital transducer is the building block that surface acoustic wave resonant sensor main is wanted, and is widely used in sound table
The excitation and detection of face sensor, its each cycle are more electrodes for replacing connection by periodic arrangement and with total lead
(also known as finger) is formed.Its simplest form is that series of parallel metal electrode is periodically set on piezoelectric substrate.Can
Selection of land, interdigital transducer material can be metal simple-substance, metal alloy or conductive metal oxide.Such as material can be selected from
The simple substance of Al, Cu, Au, Ag, Ni, Pd, W, Ti, Ta, Mo, Zn, Zr metal, the alloy of these metals and these metals
Electroconductive oxide.Using the interdigital transducer of metal material have low sound-electric (electro-acoustic) transition loss, flexible design and
Easily make.
In order to preferably embody the beneficial effect of the technical solution of the utility model, some surface acoustic wave resonances are described below
The application example of formula sensor.
Application and preparation example：
Using example 1：
The preparation process of the utility model surface acoustic wave resonant sensor：
(1) it is quartz crystal to select piezoelectric substrate, and using LST tangential manners, interdigital transducing is made on piezoelectric substrate surface
Device, the centre frequency f of its interdigital transducer0=433MHz, wavelength X=7.2 μm of interdigital transducer, wherein interdigital transducer
Finger interval and finger width are 1/4 λ (1.8 μm), and the finger radical of interdigital transducer is 60, the finger of difference transducer
Length is 80 λ (576 μm).In addition, the material of interdigital transducer is aluminium.
(2) relevant parameter of groove reflecting grating is calculated, groove reflecting grating gash depth is 0.1 λ (0.72 μm), groove width
At intervals of 1/4 λ (1.8 μm) between groove, groove reflectivity is 0.057, groove reflecting grating in a groove reflecting grating array
Number is 1/0.057=17, and groove reflecting grating and difference transducer finger overlap length are 80 λ (576 μm), i.e. groove reflecting grating
Length maximum be 80 λ (576 μm), the length of its groove reflecting grating is weighted using hamming window weighting function.
(3) according to above-mentioned parameter, the sound wave surface probe (as shown in Figure 1) is manufactured, wherein the ditch of each groove reflecting grating
Groove depth is identical, and the interval between groove width and groove is all identical.In addition, each groove reflecting grating is parallel to be distributed (i.e. each ditch
Inclination angle of the groove reflecting grating on piezoelectric substrate is identical).
Using example 2：
The preparation process of conventional surface acoustic wave resonant sensor：
1) it is quartz crystal to select piezoelectric substrate, and using LST tangential manners, interdigital transducing is made on piezoelectric substrate surface
Device, the centre frequency f of its interdigital transducer0=433MHz, wavelength X=7.2 μm of interdigital transducer, wherein interdigital transducer
Finger interval and finger width are 1/4 λ (1.8 μm), and the finger radical of interdigital transducer is 60, the finger of difference transducer
Length is 80 λ (576 μm).In addition, the material of interdigital transducer is aluminium.
2) relevant parameter of reflecting grating is calculated, wherein reflecting grating uses metallic reflection grizzly bar.Wherein, reflecting grating grill width
At intervals of 1/4 λ (1.8 μm) between grizzly bar, reflection grizzly bar number is 100, groove reflecting grating and difference transducer finger weight
Folded length is 80 λ (576 μm), i.e., the length maximum of reflecting grating is 80 λ (576 μm).
3) according to above-mentioned parameter, the sound wave surface probe (as shown in Figure 2) is manufactured, wherein the length phase of each reflecting grating
Together, the interval reflected between grid width and reflecting grating is all identical.In addition, the parallel distribution of each reflecting grating (pressing by i.e. each reflecting grating
Inclination angle on electric substrate is identical).
Using example 3：
Surface acoustic wave resonant sensor in the utility model and conventional surface acoustic wave resonant sensor are compared
To (i.e. using example 1 and applying example 2), the Q values (as shown in Figure 3) of each sensor are calculated, surface acoustic wave in the utility model
Resonant transducer Q1=12617, conventional surface acoustic wave resonant sensor Q2=13290.In the utility model surface acoustic wave
Resonant transducer Q1 values and surface acoustic wave resonant sensor Q2 values relatively when, surface acoustic wave resonance of the present utility model
Formula sensor bulk reduces 1- (60+17*2)/(60+100*2)=54%.
Each technical characteristic of embodiment described above can be combined arbitrarily, to make description succinct, not to above-mentioned reality
Apply all possible combination of each technical characteristic in example to be all described, as long as however, the combination of these technical characteristics is not deposited
In contradiction, the scope that this specification is recorded all is considered to be.
Embodiment described above only expresses several embodiments of the present utility model, and its description is more specific and detailed,
But therefore it can not be interpreted as the limitation to utility model patent scope.It should be pointed out that the common skill for this area
For art personnel, without departing from the concept of the premise utility, various modifications and improvements can be made, these are belonged to
The scope of protection of the utility model.Therefore, the protection domain of the utility model patent should be determined by the appended claims.
Claims (10)
- A kind of 1. surface acoustic wave resonant sensor, it is characterised in that including piezoelectric substrate, be arranged on it is interdigital on piezoelectric substrate Transducer, two groups of groove reflecting grating arrays and antenna, the electrode of wherein interdigital transducer is external to the antenna, described in two groups Groove reflecting grating array is symmetricly set on the both sides of the interdigital transducer, and the groove reflecting grating array includes more and parallel set The groove reflecting grating put, the length of the more groove reflecting gratings is unequal, and the length change of wherein groove reflecting grating, which meets, to be added Weight function equation.
- 2. surface acoustic wave resonant sensor according to claim 1, it is characterised in that the groove reflecting grating is niobic acid Lithium groove reflecting grating, bismuth germanium oxide groove reflecting grating or quartzy groove reflecting grating.
- 3. surface acoustic wave resonant sensor according to claim 1, it is characterised in that the groove of the groove reflecting grating Depth is 0.05~0.5 times of interdigital transducer wavelength.
- 4. surface acoustic wave resonant sensor according to claim 3, it is characterised in that the groove reflecting grating is reflection Rate is 0.57 times of groove reflecting grating of the gash depth of the groove reflecting grating.
- 5. surface acoustic wave resonant sensor according to claim 4, it is characterised in that the number of the groove reflecting grating It is inversely proportional with the groove reflecting grating reflectivity.
- 6. surface acoustic wave resonant sensor according to claim 1, it is characterised in that the more ditches be arrangeding in parallel The width of groove reflecting grating is equal, and the width of the groove reflecting grating is 0.25 times of the interdigital transducer wavelength.
- 7. surface acoustic wave resonant sensor according to claim 1, it is characterised in that the more ditches be arrangeding in parallel Spacing between groove reflecting grating is equal, and the spacing between the groove reflecting grating is 0.25 times of interdigital transducer wavelength.
- 8. surface acoustic wave resonant sensor according to claim 1, it is characterised in that the piezoelectric substrate is quartz-crystal Body piezoelectric substrate, lithium niobate piezoelectric substrate or bismuth germanium oxide piezoelectric substrate.
- 9. surface acoustic wave resonant sensor according to claim 1, it is characterised in that the interdigital transducer is metal Simple substance interdigital transducer, metal alloy interdigital transducer or conductive metal oxide interdigital transducer.
- 10. surface acoustic wave resonant sensor according to claim 9, it is characterised in that the piezoelectric substrate is that Y is tangential Quartz crystal piezoelectric substrate.
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Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106338164A (en) * | 2015-07-06 | 2017-01-18 | 中南大学 | Thermoacoustic heat regenerator based on surface acoustic wave generator |
| CN109374157A (en) * | 2018-09-14 | 2019-02-22 | 北京遥测技术研究所 | A kind of surface acoustic wave pressure sensor based on loss detection |
| CN109787579A (en) * | 2019-01-22 | 2019-05-21 | 成都频岢微电子有限公司 | A kind of SAW resonator with the spuious function of reduction |
| CN113346859A (en) * | 2021-07-07 | 2021-09-03 | 无锡中微晶园电子有限公司 | Surface acoustic wave resonator with high Q value and preparation method thereof |
| CN114257206A (en) * | 2022-01-18 | 2022-03-29 | 深圳新声半导体有限公司 | Surface acoustic wave resonator, filter and communication device |
| CN114268294A (en) * | 2022-03-03 | 2022-04-01 | 深圳新声半导体有限公司 | SAW device including hybrid weighting type reflection grating and hybrid weighting type reflection grating |
| CN117040470A (en) * | 2023-07-24 | 2023-11-10 | 苏州声芯电子科技有限公司 | Surface acoustic wave resonator |
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2017
- 2017-05-09 CN CN201720507969.7U patent/CN207163978U/en active Active
Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106338164A (en) * | 2015-07-06 | 2017-01-18 | 中南大学 | Thermoacoustic heat regenerator based on surface acoustic wave generator |
| CN106338164B (en) * | 2015-07-06 | 2019-02-01 | 中南大学 | Thermal acoustic regenerator based on surface acoustic wave generating device |
| CN109374157A (en) * | 2018-09-14 | 2019-02-22 | 北京遥测技术研究所 | A kind of surface acoustic wave pressure sensor based on loss detection |
| CN109787579A (en) * | 2019-01-22 | 2019-05-21 | 成都频岢微电子有限公司 | A kind of SAW resonator with the spuious function of reduction |
| CN109787579B (en) * | 2019-01-22 | 2020-04-03 | 成都频岢微电子有限公司 | SAW resonator with reduce spurious function |
| CN113346859A (en) * | 2021-07-07 | 2021-09-03 | 无锡中微晶园电子有限公司 | Surface acoustic wave resonator with high Q value and preparation method thereof |
| CN114257206A (en) * | 2022-01-18 | 2022-03-29 | 深圳新声半导体有限公司 | Surface acoustic wave resonator, filter and communication device |
| CN114268294A (en) * | 2022-03-03 | 2022-04-01 | 深圳新声半导体有限公司 | SAW device including hybrid weighting type reflection grating and hybrid weighting type reflection grating |
| CN114268294B (en) * | 2022-03-03 | 2022-06-17 | 深圳新声半导体有限公司 | SAW device including hybrid weighting type reflection grating and hybrid weighting type reflection grating |
| CN117040470A (en) * | 2023-07-24 | 2023-11-10 | 苏州声芯电子科技有限公司 | Surface acoustic wave resonator |
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