CN114235344A - Debugging device and debugging method for laser resonator cavity mirror - Google Patents
Debugging device and debugging method for laser resonator cavity mirror Download PDFInfo
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- CN114235344A CN114235344A CN202111532036.0A CN202111532036A CN114235344A CN 114235344 A CN114235344 A CN 114235344A CN 202111532036 A CN202111532036 A CN 202111532036A CN 114235344 A CN114235344 A CN 114235344A
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Abstract
A debugging device and a debugging method for a laser resonator cavity mirror belong to the technical field of laser debugging. A debugging device of a laser resonant cavity mirror comprises a He-Ne laser, a negative lens, a positive lens, a reflecting mirror I, a reflecting mirror II, a reflecting mirror III, a semi-transparent semi-reflecting mirror, a CCD camera, a computer, a resonant cavity mirror I and a resonant cavity mirror II, wherein laser emitted by the He-Ne laser sequentially penetrates through the center of the negative lens and the center of the positive lens, is reflected to the reflecting mirror II through the reflecting mirror I and then is reflected to the semi-transparent semi-reflecting mirror, light beams penetrating through the semi-transparent semi-reflecting mirror are incident to the resonant cavity mirror I or the resonant cavity mirror II, the resonant cavity mirror I or the resonant cavity mirror II reflects incident light beams to the semi-transparent semi-reflecting mirror, light reflected by the semi-transparent semi-reflecting mirror is reflected to the CCD camera through the reflecting mirror III, and the CCD camera is electrically connected with the computer. The invention overcomes the defect of low debugging precision of the traditional laser, improves the debugging precision of the traditional laser by several orders of magnitude and improves the output performance of the laser.
Description
Technical Field
The invention relates to a debugging device and a debugging method of a laser resonator cavity mirror, and belongs to the technical field of laser debugging.
Background
The resonant cavity of the laser is an essential component of the laser, and the adjustment precision of the resonant cavity directly affects the output performance of the laser, such as output power, output mode, emission direction and the like. A laser resonant cavity with very high adjustment precision can greatly reduce the geometric deflection loss and improve the output performance of a laser. In the adjustment of the laser resonator cavity mirror, a technician usually adopts a combined means of He-Ne light and the small aperture diaphragm to adjust, and the He-Ne light reflected by the resonator cavity mirror is positioned at the center of the small aperture diaphragm and then the adjustment is considered to be finished. Although this method is simple and easy to operate, the adjustment accuracy is not high, and it is difficult to minimize the geometric deflection loss of the resonator.
Disclosure of Invention
The invention provides a debugging device of a laser resonator cavity mirror, aiming at improving the adjustment precision of the laser resonator cavity mirror.
The second purpose of the invention is to provide a debugging method for realizing the laser resonator cavity mirror by using the debugging device of the laser resonator cavity mirror.
In order to achieve the purpose, the invention adopts the following technical scheme:
a debugging device of a laser resonator mirror comprises a He-Ne laser, a negative lens, a positive lens, a reflecting mirror I, a reflecting mirror II, a reflecting mirror III, a semi-transparent semi-reflecting mirror, a CCD camera, a computer, a resonator mirror I and a resonator mirror II, wherein laser emitted by the He-Ne laser sequentially passes through the center of the negative lens and the center of the positive lens, is reflected to the reflecting mirror II through the reflecting mirror I and then reflected to the semi-transparent semi-reflecting mirror, light beams passing through the semi-transparent semi-reflecting mirror are incident to the resonator mirror I or the resonator mirror II, the incident light beams are reflected to the semi-transparent semi-reflecting mirror through the resonator mirror I or the resonator mirror II, light reflected by the semi-transparent semi-reflecting mirror is reflected to the CCD camera through the reflecting mirror III, and the CCD camera is electrically connected with the computer.
A method for debugging a laser resonator cavity mirror by using the debugging device comprises the following steps:
s1: adjusting the confocal arrangement of the negative lens and the positive lens to enable the laser emitted by the He-Ne laser to sequentially pass through the centers of the negative lens and the positive lens;
s2: adjusting the position of the small-hole diaphragm I to enable the center of the light beam penetrating through the positive lens to be positioned at the center of the light through hole I;
s3: adjusting the reflector I and the reflector II, and adjusting the position of the aperture diaphragm II to enable the reflected light of the reflector II to sequentially pass through the center of the light through hole II of the aperture diaphragm II and the semi-transparent semi-reflective mirror and horizontally enter the resonator mirror I;
s4: adjusting the resonant cavity mirror I to enable the incident and reflected laser to irradiate the aperture diaphragm II and be concentric with the light through hole II;
s5: adjusting the semi-transmitting semi-reflecting mirror and the reflecting mirror III to enable the light reflected by the resonant cavity mirror I to be incident on a photosensitive surface of the CCD camera;
s6: the light spot incident to the CCD camera is displayed by a computer, and the position of the light spot is marked in a display area;
s7: placing a resonance cavity mirror II, inserting a baffle between the resonance cavity mirror I and the resonance cavity mirror II, roughly adjusting the resonance cavity mirror II to enable incident and reflected light energy to irradiate on the small-hole diaphragm II and be concentric with the light through hole II;
s8: at the moment, the light reflected by the resonant cavity mirror II is reflected by the semi-transparent semi-reflecting mirror and the reflecting mirror III and then is incident on a photosensitive surface of the CCD camera, and light spots can be observed on a computer;
s9: finely adjusting the deflection and pitch angles of the resonant cavity mirror II to enable the light spot position displayed on the computer to coincide with the light spot position marked in the step S6;
s10: and removing the baffle, and finishing the adjustment of the resonant cavity mirror I and the resonant cavity mirror II.
Compared with the prior art, the invention has the beneficial effects that:
1. the invention utilizes the CCD camera to image the reflected lights of the two lenses forming the resonant cavity, ensures the high-precision adjustment of the lenses of the resonant cavity by the consistent imaging positions of the reflected lights of the two lenses, and solves the defect of low debugging precision of the traditional method utilizing He-Ne light and the small-hole diaphragm.
2. According to the invention, the CCD camera is used for replacing naked eyes to observe the light spots, the precision is higher, the error is only a few pixels, and compared with the traditional method, the adjustment precision is improved by a few orders of magnitude.
3. The invention adopts the expanded He-Ne light as a debugging light source, thereby greatly reducing the observation error caused by the directional jitter of the He-Ne light and improving the adjustment precision; the geometric deflection loss of the laser is reduced, and the output performance of the laser is improved.
Drawings
FIG. 1 is a schematic structural view of the present invention;
in the figure, 1, He-Ne laser; 2. a negative lens; 3. a positive lens; 4. a reflector I; 5. a reflector II; 6. a reflector III; 7. a semi-transparent semi-reflective mirror; 8. a CCD camera; 9. a computer; 10. a resonant cavity mirror I; 11. a resonant cavity mirror II; 12. a small-hole diaphragm I; 13. a small aperture diaphragm II; 14. an attenuation sheet; 15. and a baffle plate.
Detailed Description
The technical solutions in the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the invention, rather than all embodiments, and all other embodiments obtained by those skilled in the art without any creative work based on the embodiments of the present invention belong to the protection scope of the present invention.
Detailed description of the invention
A debugging device of a laser resonator mirror comprises a He-Ne laser 1, a negative lens 2, a positive lens 3, a reflector I4, a reflector II 5, a reflector III 6, a semi-transparent semi-reflecting mirror 7, a CCD camera 8, a computer 9, a resonator mirror I10 and a resonator mirror II 11, wherein laser emitted by the He-Ne laser 1 sequentially penetrates through the center of the negative lens 2 and the center of the positive lens 3, is reflected to the reflector II 5 through the reflector I4 and then reflected to the semi-transparent semi-reflecting mirror 7, light beams penetrating through the semi-transparent semi-reflecting mirror 7 are incident to the resonator mirror I10 or the resonator mirror II 11, the incident light beams are reflected to the semi-transparent semi-reflecting mirror 7 through the resonator I10 or the resonator mirror II 11, light reflected to the CCD camera 8 through the reflector III 6 reflected by the semi-transparent semi-reflecting mirror 7, and the CCD camera 8 is electrically connected with the computer 9.
Further, the laser light horizontally emitted by the He-Ne laser 1 is perpendicular to the reflected light of the reflecting mirror i 4 and parallel to the reflected light of the reflecting mirror ii 5; the reflected light of the resonant cavity mirror I10 or the resonant cavity mirror II 11 is vertical to the reflected light of the semi-transparent semi-reflecting mirror 7 and parallel to the reflected light of the reflecting mirror III 6.
Further, the negative lens 2 and the positive lens 3 are arranged in a confocal manner, and the focal length ratio of the positive lens 3 to the negative lens 2 is greater than 5, and the main purpose of the beam expansion of the He-Ne light is to improve the stability of the light beam and reduce the light beam pointing jitter.
Further, the debugging device still includes aperture diaphragm I12, aperture diaphragm I12 sets up between positive lens 3 and speculum I4, plays the effect of restriction light beam, the clear opening of aperture diaphragm I12 is located laser beam's center, the clear opening aperture of aperture diaphragm I12 is not more than 2 mm.
Furthermore, the debugging device also comprises an aperture diaphragm II 13, the aperture diaphragm II 13 is positioned between the reflecting mirror II 5 and the semi-transparent semi-reflecting mirror 7, a light through hole of the aperture diaphragm II 13 is positioned in the center of the laser beam, the aperture of the light through hole of the aperture diaphragm II 13 is not more than 2mm, and the aperture diaphragm II 13 is used for observing He-Ne light reflected by the vibrating cavity mirror to be tuned and roughly adjusting the resonant cavity mirror.
Further, the debugging device also comprises an attenuation sheet 14, the attenuation sheet 14 is positioned between the reflector III 6 and the CCD camera 8, and the attenuation proportion of the attenuation sheet 14 is preferably unsaturated according to the intensity of the CCD camera.
Furthermore, the resonant cavity mirror I10 and the resonant cavity mirror II 11 are plane mirrors.
Furthermore, the reflecting mirror I4, the reflecting mirror II 5 and the reflecting mirror III 6 are plane mirrors, and have reflectivity of more than 90% for light with the wavelength of 632.8 nm.
Further, the resolution of the CCD camera 8 is not lower than 2592 × 2048.
Further, the sum of the distances between the half mirror 7, the third reflector III 7 and the CCD camera 8 is not less than 2 meters.
The light emitted from the He — Ne laser 1 was 632.8nm visible light.
Further, the half mirror 7 has a function of partially reflecting and partially transmitting light of 632.8 nm.
The method comprises the following steps that 632.8nm visible light emitted by a He-Ne laser 1 is expanded by a confocal beam expanding system consisting of a negative lens 2 and a positive lens 3, and then is incident on a reflector I4 through an aperture diaphragm I12, then is incident on a resonant cavity mirror I10 or a resonant cavity mirror II 11 to be debugged through a reflector II 5, an aperture diaphragm II 13 and a semi-transparent reflector 7, and the reflected light of the resonant cavity mirror I10 or the resonant cavity mirror II 11 is received by a CCD camera 8 after passing through the semi-transparent semi-reflective mirror 7, a reflector III 6 and an attenuation sheet 14, and is displayed by a computer 9 to mark the position of a light spot; and then, adjusting the second resonant cavity mirror in the same way to enable the position of the reflected light spot of the second resonant cavity mirror to coincide with the position of the light spot of the first resonant cavity mirror.
Detailed description of the invention
A debugging method using the debugging apparatus according to the first embodiment, comprising:
s1: adjusting the confocal arrangement of the negative lens 2 and the positive lens 3 to enable 632.8nm laser emitted by the He-Ne laser 1 to sequentially pass through the centers of the negative lens 2 and the positive lens 3;
s2: adjusting the position of the small-hole diaphragm I12 to enable a light through hole to be positioned in the center of a light beam;
s3: adjusting the reflector I4 and the reflector II 5, and adjusting the position of the aperture diaphragm II 13, so that the laser passes through the aperture diaphragm II 13 and horizontally enters the resonant cavity mirror I10;
s4: adjusting the resonant cavity mirror I10 to enable the incident and reflected 632.8nm laser to irradiate the aperture diaphragm II 13 and be concentric with the light through hole;
s5: adjusting the semi-transparent semi-reflecting mirror 7 and the reflecting mirror III 6 to enable 632.8nm light reflected by the resonant cavity mirror I10 to be incident on a photosensitive surface of the CCD camera 8 and be positioned at the center of the photosensitive surface as much as possible;
s6: the light spot incident to the CCD camera 8 is displayed by a computer 9, and the position of the light spot is marked in a display area;
s7: placing a resonant cavity mirror II 11, inserting a baffle 15 between the resonant cavity mirror I10 and the resonant cavity mirror II 11, roughly adjusting the resonant cavity mirror II 11 to enable incident and reflected light energy to irradiate on a small-hole diaphragm II 13 and be concentric with a light through hole of the small-hole diaphragm II 13;
s8: at the moment, 632.8nm light reflected by the resonant cavity mirror II 11 is reflected by the semi-transparent semi-reflecting mirror 7 and the reflecting mirror III 6 and then enters a photosensitive surface of the CCD camera 8, and light spots can be observed on the computer 9;
s9: finely adjusting the deflection and pitch angles of the resonant cavity mirror II 11 to enable the light spot position displayed on the computer 9 to be superposed with the light spot position marked in the step S6;
s10: and removing the baffle 15, and finishing the adjustment of the resonant cavity mirror I10 and the resonant cavity mirror II 11.
The existing resonant cavity adjusting technology is usually realized by combining He-Ne light with a small-hole diaphragm, and whether the cavity mirror is well adjusted is judged by adjusting whether the He-Ne light incident on the resonant cavity mirror is reflected to the central position of the small-hole diaphragm. Because the aperture diaphragm is usually close to the resonant cavity mirror, and the position of reflected light is judged by visual observation, the adjustment precision of the resonant cavity mirror is very low, and the resonant cavity has larger geometric deflection loss. According to the invention, the high-resolution CCD camera 8 is adopted to position and coincide the He-Ne reflected light positions of the two resonant cavity mirrors, and the light path between the resonant cavity mirror and the CCD camera 8 is long enough, so that the error of several pixels is avoided when the imaging light spot is observed, therefore, compared with the traditional visual observation method, the precision is improved by several orders of magnitude.
It will be evident to those skilled in the art that the invention is not limited to the details of the foregoing illustrative embodiments, and that the present invention may be embodied in other specific forms without departing from the spirit or essential attributes thereof. The present embodiments are therefore to be considered in all respects as illustrative and not restrictive, the scope of the invention being indicated by the appended claims rather than by the foregoing description, and all changes which come within the meaning and range of equivalency of the claims are therefore intended to be embraced therein. Any reference sign in a claim should not be construed as limiting the claim concerned.
Furthermore, it should be understood that although the present description refers to embodiments, not every embodiment may contain only a single embodiment, and such description is for clarity only, and those skilled in the art should integrate the description, and the embodiments may be combined as appropriate to form other embodiments understood by those skilled in the art.
Claims (10)
1. The utility model provides a debugging device of laser instrument resonant cavity mirror which characterized in that: comprises a He-Ne laser (1), a negative lens (2), a positive lens (3), a reflector I (4), a reflector II (5), a reflector III (6), a semi-transparent semi-reflecting mirror (7), a CCD camera (8), a computer (9), a resonant cavity mirror I (10) and a resonant cavity mirror II (11), wherein laser emitted by the He-Ne laser (1) sequentially passes through the center of the negative lens (2) and the center of the positive lens (3), is reflected to the reflector II (5) through the reflector I (4) and then is reflected to the semi-transparent semi-reflecting mirror (7), light beams passing through the semi-transparent semi-reflecting mirror (7) are incident to the resonant cavity mirror I (10) or the resonant cavity mirror II (11), the incident light beams are reflected to the semi-transparent semi-reflecting mirror (7) through the resonant cavity mirror I (10) or the resonant cavity mirror II (11), and light reflected to the CCD camera (8) through the reflector III), the CCD camera is electrically connected with a computer (9).
2. The debugging device of a laser resonator cavity mirror of claim 1, wherein: the laser emitted horizontally by the He-Ne laser (1) is vertical to the reflected light of the reflecting mirror I (4) and parallel to the reflected light of the reflecting mirror II (5); the reflected light of the resonant cavity mirror I (10) or the resonant cavity mirror II (11) is vertical to the reflected light of the semi-transparent semi-reflecting mirror (7) and parallel to the reflected light of the reflecting mirror III (6).
3. The debugging device of a laser resonator cavity mirror of claim 1, wherein: the negative lens (2) and the positive lens (3) are placed in a confocal mode, and the focal length ratio of the positive lens (3) to the negative lens (2) is larger than 5.
4. The debugging device of a laser resonator cavity mirror of claim 1, wherein: the debugging device still includes aperture diaphragm I (12), aperture diaphragm I (12) set up between positive lens (3) and speculum I (4), the clear opening of aperture diaphragm I (12) is located laser beam's center.
5. The debugging device of a laser resonator cavity mirror of claim 1, wherein: the debugging device further comprises a small-hole diaphragm II (13), the small-hole diaphragm II (13) is located between the reflecting mirror II (5) and the semi-transparent semi-reflecting mirror (7), and a light through hole of the small-hole diaphragm II (13) is located in the center of the laser beam.
6. The debugging device of a laser resonator cavity mirror of claim 1, wherein: the debugging device also comprises an attenuation sheet (14), and the attenuation sheet (14) is positioned between the reflector III (6) and the CCD camera (8).
7. The debugging device of a laser resonator cavity mirror of claim 1, wherein: the resonant cavity mirror I (10) and the resonant cavity mirror II (11) are plane mirrors.
8. The debugging device of a laser resonator cavity mirror of claim 1, wherein: and the reflecting mirror I (4), the reflecting mirror II (5) and the reflecting mirror III (6) are plane mirrors.
9. The debugging device of a laser resonator cavity mirror of claim 1, wherein: the sum of the distances among the semi-transparent semi-reflecting mirror (7), the reflecting mirror III (6) and the CCD camera (8) is not less than 2 meters.
10. A method for debugging a laser resonator cavity mirror by using the debugging device of any one of claims 1 to 9, comprising the following steps:
s1: adjusting the negative lens (2) and the positive lens (3) to be in confocal arrangement, so that laser emitted by the He-Ne laser (1) sequentially passes through the centers of the negative lens (2) and the positive lens (3);
s2: adjusting the position of the small-hole diaphragm I (12) to enable the center of the light beam penetrating through the positive lens (3) to be positioned at the center of the light through hole I;
s3: adjusting the reflector I (4) and the reflector II (5), and adjusting the position of the aperture diaphragm II (13), so that the reflected light of the reflector II (5) sequentially passes through the center of the light through hole II of the aperture diaphragm II (13) and the semi-transparent semi-reflective mirror (7) and horizontally enters the resonator mirror I (10);
s4: adjusting the resonant cavity mirror I (10) to enable the incident and reflected laser to irradiate on the small-hole diaphragm II (13) and be concentric with the light through hole II;
s5: adjusting the semi-transmitting semi-reflecting mirror (7) and the reflecting mirror III (6) to enable light reflected by the resonant cavity mirror I (10) to be incident on a photosensitive surface of the CCD camera (8);
s6: light spots incident to the CCD camera (8) are displayed by a computer (9), and the positions of the light spots are marked in a display area;
s7: putting a resonant cavity mirror II (11), inserting a baffle (15) between the resonant cavity mirror I (10) and the resonant cavity mirror II (11), roughly adjusting the resonant cavity mirror II (11), and enabling incident and reflected light energy to irradiate on the small-hole diaphragm II (13) and be concentric with the light through hole II;
s8: at the moment, the light reflected by the resonant cavity mirror II (11) is reflected by the semi-transparent semi-reflecting mirror (7) and the reflecting mirror III (6) and then enters a photosensitive surface of the CCD camera (8), and light spots can be observed on a computer (9);
s9: finely adjusting the deflection and pitch angles of the resonant cavity mirror II (11) to enable the light spot position displayed on the computer (9) to be superposed with the light spot position marked in the step S6;
s10: and (4) removing the baffle (15), and finishing the adjustment of the resonant cavity mirror I (10) and the resonant cavity mirror II (11).
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| CN202111532036.0A CN114235344B (en) | 2021-12-14 | 2021-12-14 | Debugging device and method for laser resonant cavity mirror |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN117451325A (en) * | 2023-12-26 | 2024-01-26 | 长春工程学院 | Resonant cavity measurement system based on aspheric lens |
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2021
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| JP2002334479A (en) * | 2001-05-09 | 2002-11-22 | Matsushita Electric Ind Co Ltd | Laser diode unit adjusting device and its proof-reading method |
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