CN221224165U

CN221224165U - Visual test system of ultraviolet light module

Info

Publication number: CN221224165U
Application number: CN202323310038.2U
Authority: CN
Inventors: 梁森
Original assignee: Libo Photoelectric Technology Wuxi Co ltd
Current assignee: Libo Photoelectric Technology Wuxi Co ltd
Filing date: 2023-12-05
Publication date: 2024-06-25
Anticipated expiration: 2033-12-05

Abstract

The utility model discloses a visual test system of an ultraviolet optical module, which relates to the field of optical detection and comprises an ultraviolet interferometer and a visible light interferometer, wherein the visible light generated by the visible light interferometer is perpendicular to the light path direction of ultraviolet light generated by the ultraviolet interferometer; the functional optical module is matched with the ultraviolet interferometer, the visible light interferometer and the ultraviolet optical module to be tested and at least comprises a light combining lens and a light splitting prism, wherein the light combining lens is used for enabling ultraviolet light and visible light to be transmitted to the ultraviolet optical module to be tested in a collinear manner; the beam splitting prism is used for generating a first light path output ray; the rotary reflection module is used for reflecting the output light of the first light path emitted by the beam splitting prism to form the input light of the second light path; the second light path input light comprises ultraviolet light reflection light, and the ultraviolet light reflection light propagates back to the ultraviolet interferometer to test the optical characteristics of the ultraviolet optical module to be tested. The test system reduces the adjustment difficulty of the test light path and improves the test efficiency.

Description

Visual test system of ultraviolet light module

Technical Field

The utility model relates to the field of optical detection, in particular to a visual test system of an ultraviolet light module.

Background

The use of interferometers to test optical characteristics is generally focused on the visible light band, but as semiconductor technology enters nodes of 10 nm and below, the use of ultraviolet and deep ultraviolet bands for optical detection is required, and so the use of ultraviolet interferometers to test optical characteristics is increasingly required.

Because the ultraviolet interferometer has low power and invisible ultraviolet light beams, when the ultraviolet interferometer is used for testing the multi-lens non-coplanar complex light path with long light path, the difficulty of adjusting reflected light to return along the original light path and further find interferometer signals is great, the long light path can be generally only split into a plurality of collinear short light paths, the adjustment and the test can be carried out path by path, if one light path has problems in adjustment, the adjustment needs to be restarted from the first light path, the adjustment difficulty is great, the adjustment precision is low, and the test efficiency of the optical module is influenced.

Disclosure of utility model

The inventor provides a visual test system of an ultraviolet optical module aiming at the problems and the technical requirements.

The technical scheme of the utility model is as follows:

A visual test system for an ultraviolet optical module, comprising:

an ultraviolet interferometer for generating ultraviolet light;

the visible light interferometer is used for generating visible light rays, and the visible light rays generated by the visible light interferometer are perpendicular to the light path direction of the ultraviolet light rays generated by the ultraviolet interferometer;

The functional optical module is matched with the ultraviolet interferometer, the visible light interferometer and the ultraviolet optical module to be tested and at least comprises a light combining lens and a light splitting prism, wherein,

The light combining lens is arranged in the incident direction of the first light path direction of the ultraviolet optical module to be tested and is used for enabling ultraviolet light and visible light to be transmitted to the ultraviolet optical module to be tested in a collinear manner;

the beam splitting prism is arranged in the emergent direction of the first light path direction of the ultraviolet optical module to be tested, ultraviolet rays and visible rays collinearly emergent from the ultraviolet optical module to be tested are incident to the beam splitting prism, the beam splitting prism generates first light path output rays, wherein,

The first light path output light comprises visible light output light and ultraviolet light output light, and the visible light output light and the ultraviolet light output light differ by a deflection angle delta in the light path direction;

The rotary reflection module is arranged in the emergent direction of the first light path direction of the beam-splitting prism and is used for reflecting the first light path output light rays emergent from the beam-splitting prism to form second light path input light rays;

The second light path input light comprises ultraviolet light reflected by the rotary reflection module, and the ultraviolet light reflected light propagates back to the ultraviolet interferometer through the beam splitting prism, the ultraviolet optical module to be tested and the beam combining mirror so as to test the optical characteristics of the ultraviolet optical module to be tested.

The further technical scheme is that the included angle between the mirror surface direction of the light combining mirror and the light path direction of the visible light generated by the visible light interferometer and the ultraviolet light generated by the ultraviolet interferometer is 45 degrees;

The light converging lens comprises a first mirror surface and a second mirror surface, wherein,

The ultraviolet light generated by the ultraviolet interferometer is incident from a first mirror surface of the light combining mirror, and the propagation direction of the ultraviolet light is kept to propagate to the ultraviolet optical module to be tested;

The visible light generated by the visible light interferometer is incident by the second mirror surface of the light combining mirror, reflected by 45 degrees at the second mirror surface, and the reflected visible light and the ultraviolet light are collinearly transmitted to the ultraviolet optical module to be tested;

The ultraviolet optical module to be tested comprises a first optical unit, wherein the first optical unit comprises a first diaphragm, a half-wave plate, a first polarizing prism, a first lens and a second lens which are sequentially arranged along a first light path direction,

The center of the first diaphragm and the centers of the half wave plate, the first polarizing prism, the first lens and the second lens are positioned on the same straight line;

The visible light rays and the ultraviolet light rays vertically enter the half-wave plate through the first diaphragm and are transmitted to the first lens through the first polarizing prism;

The first lens is a plano-concave lens, the second lens is a plano-convex lens, the first lens is arranged in a focus of the second lens, visible light rays and ultraviolet light rays which are transmitted to a concave surface of the first lens in a collinear mode are transmitted to a convex surface of the second lens after being diffused by the first lens, and the diffused visible light rays and ultraviolet light rays are emitted in parallel by a plane of the second lens.

The ultraviolet optical module to be tested further comprises a reflecting unit, wherein the reflecting unit comprises a first reflecting mirror, a second reflecting mirror, a third reflecting mirror and a fourth reflecting mirror which are sequentially arranged according to the first light path direction;

the first reflecting mirror is arranged in the emergent direction of the first light path direction of the second lens, and the centers of the first reflecting mirror and the lens of the second lens are positioned on the same straight line;

The second reflector is parallel to the first reflector in the mirror surface direction, the third reflector and the second reflector are in the same straight line, and the connecting line of the third reflector and the second reflector is perpendicular to the connecting line of the second reflector and the first reflector;

The mirror centers of the fourth mirror and the third mirror are positioned on the same straight line in the vertical direction.

The incident angles of the collinear visible light rays and ultraviolet light rays on the incident surfaces of the first reflecting mirror, the second reflecting mirror, the third reflecting mirror and the fourth reflecting mirror are 45+/-1 degrees.

The further technical scheme is that the reflectivity of the first reflecting mirror, the second reflecting mirror, the third reflecting mirror and the fourth reflecting mirror in the ultraviolet band is more than or equal to 99 percent, and the reflectivity in the visible light band is more than or equal to 90 percent.

The further technical proposal is that the ultraviolet optical module to be tested also comprises a second optical unit, the second optical unit comprises a third lens, a fourth lens, a second polarizing prism and a second diaphragm which are arranged in sequence according to the direction of the first light path,

The centers of the third lens, the fourth lens, the second polarizing prism and the second diaphragm are positioned on the same straight line;

The third lens is a plano-convex lens, the fourth lens is a plano-concave lens, the fourth lens is arranged in a focus of the third lens, visible light rays and ultraviolet light rays which are transmitted to the plane of the third lens in a collinear mode are converged by the third lens and then transmitted to the plane of the fourth lens, and the visible light rays and the ultraviolet light rays are emitted to the second polarizing prism in parallel from a concave surface of the fourth lens and are emitted to the beam splitting prism through the second diaphragm.

The ultraviolet optical module to be tested comprises a half wave plate, a first polarizing prism, a first lens, a second lens, a first reflecting mirror, a second reflecting mirror, a third reflecting mirror, a fourth reflecting mirror, a third lens, a fourth lens and a second polarizing prism which are all fixed on a lens holder provided with a piezoelectric actuator, wherein the piezoelectric actuator is used for adjusting the position and the angle of each lens.

The further technical scheme is that the beam-splitting prism comprises a Pelin Brillock prism, and the base angle of the Pelin Brillock prism is 75 degrees.

The further technical proposal is that the rotary reflection module comprises a rotary table, a visible light reflection flat crystal and an ultraviolet reflection flat crystal which are arranged on the rotary table, wherein,

The position of the visible light reflection flat crystal corresponds to the visible light output rays emitted by the beam splitting prism;

The position of the ultraviolet reflection flat crystal corresponds to the ultraviolet output light rays emitted by the beam splitting prism;

The position of the visible light reflection flat crystal and the ultraviolet reflection flat crystal changes along with the rotation of the rotary table.

The beneficial technical effects of the utility model are as follows:

The visual testing system provided by the utility model is provided with the visible light interferometer, a reference light path is formed based on visible light rays generated by the visible light interferometer, ultraviolet light rays generated by the ultraviolet interferometer and the visible light rays generated by the visible light interferometer enter an ultraviolet optical module to be tested in a collinear way through the light combining lens, and a deflection angle delta which is fixed between the light path directions of the visible light output light rays and the ultraviolet light output light rays is formed by utilizing the light splitting prism.

And adjusting the ultraviolet light module to be tested by utilizing the light splitting characteristic of the light splitting prism and the visibility of visible light, so that the ultraviolet light reflected by the rotary reflection module propagates back to the ultraviolet interferometer through the light splitting prism, the ultraviolet light module to be tested and the light combining mirror to test the optical characteristic of the ultraviolet light module to be tested. The system avoids complex section-by-section light path adjustment, provides a simple and convenient test system for testing the overall optical characteristics of the ultraviolet optical module, reduces the difficulty in adjusting the test light path and improves the adjustment precision, thereby effectively improving the test efficiency of the optical characteristics of the ultraviolet optical module.

Drawings

Fig. 1 is a schematic top view of an embodiment of the present utility model.

Fig. 2 is a schematic diagram of an ultraviolet optical module to be tested according to an embodiment of the present utility model.

Fig. 3 is a schematic view of a beam-splitting prism according to an embodiment of the present utility model.

Reference numerals: 101-visible light interferometer, 102-ultraviolet interferometer, 200-light combining lens, 201-first mirror, 202-second mirror, 300-ultraviolet optical module to be tested, 301-first diaphragm, 302-half wave plate, 303-first polarizing prism, 304-first lens, 305-second lens, 306-first reflecting mirror, 307-second reflecting mirror, 308-third reflecting mirror, 309-fourth reflecting mirror, 310-third lens, 311-fourth lens, 312-second polarizing prism, 313-second diaphragm, 400-beam splitting prism, 500-rotary table, 501-ultraviolet reflecting crystal and 502-red light reflecting crystal.

Detailed Description

The following describes the embodiments of the present utility model further with reference to the drawings.

In order to improve the testing efficiency of the optical characteristics of the ultraviolet optical module, the utility model provides a visual testing system of the ultraviolet optical module, which comprises:

an ultraviolet interferometer 102 for generating ultraviolet light;

A visible light interferometer 101, configured to generate visible light, where the visible light generated by the visible light interferometer 101 is perpendicular to the light path direction of the ultraviolet light generated by the ultraviolet interferometer 102;

The functional optical module is matched with the ultraviolet interferometer 102, the visible light interferometer 101 and the ultraviolet optical module 300 to be tested, and at least comprises a light combining lens 200 and a light splitting prism 400, wherein,

The light combining lens 200 is disposed in an incident direction of the first light path direction of the ultraviolet optical module 300 to be tested, and is used for co-linearly transmitting the ultraviolet light and the visible light to the ultraviolet optical module 300 to be tested;

The beam splitting prism 400 is disposed in the outgoing direction of the first light path direction of the ultraviolet optical module 300 to be tested, the ultraviolet light and the visible light which are collinearly outgoing from the ultraviolet optical module 300 to be tested are incident to the beam splitting prism 400, and the beam splitting prism 400 generates the first light path output light, wherein,

The rotary reflection module is arranged in the emergent direction of the first light path direction of the beam splitting prism 400 and is used for reflecting the first light path output light rays emergent from the beam splitting prism 400 to form second light path input light rays;

The second light path input light includes an ultraviolet light reflected by the rotary reflection module, and the ultraviolet light reflected light propagates back to the ultraviolet interferometer 102 through the beam splitting prism 400, the ultraviolet optical module 300 to be tested and the light combining mirror 200 to test the optical characteristics of the ultraviolet optical module 300 to be tested.

In one embodiment of the present utility model, the visible light interferometer 101 is a red light interferometer, which is used as a visible light source of the reference light path, and generates red light with a wavelength of 633nm, and the red light propagates to the rotating reflection module along the first light path direction, is reflected by the rotating reflection module, and propagates back to the red light interferometer along the second light path direction, so as to form a visible reference light path. Meanwhile, the ultraviolet interferometer 102 is used as a light source of the test light path to generate ultraviolet light with the wavelength of 266nm, the ultraviolet light and the red light synchronously propagate to the rotary reflection module along the first light path direction, and the ultraviolet light is reflected by the rotary reflection module and then propagates back to the ultraviolet interferometer 102 along the second light path direction so as to form the test light path.

The first light path direction is the light path direction in which the visible light emitted by the visible light interferometer 101 and the ultraviolet light emitted by the ultraviolet interferometer 102 are emitted to the rotary reflection module through the light combining mirror 200, the ultraviolet optical module 300 to be tested and the light splitting prism 400. The second light path direction is opposite to the first light path direction, and the ultraviolet light and the visible light reflected by the rotary reflection module are used as incident light, and are respectively emitted to the light path directions of the ultraviolet interferometer 102 and the visible light interferometer 101 through the beam splitter prism 400, the ultraviolet optical module 300 to be tested and the light combiner 200 according to the original light path. The ultraviolet interferometer 101 and the visible light interferometer 102 are interferometers commonly used in the art, and the working principle of the interferometers is consistent with the prior art.

As shown in fig. 1, the functional optical module is adapted to the ultraviolet interferometer 102 and the visible light interferometer 101, that is, the combiner 200 in the functional optical module is disposed in the outgoing direction of the first optical path direction of the ultraviolet interferometer 102 and the visible light interferometer 101. The functional optical module is adapted to the ultraviolet optical module to be tested, that is, the light combining lens 200 is disposed in the incident direction of the first light path direction of the ultraviolet optical module to be tested 300, and the light splitting prism 400 is disposed in the emergent direction of the first light path direction of the ultraviolet optical module to be tested 300.

In the first optical path direction, the visible light interferometer 101 and the ultraviolet interferometer 102 are placed perpendicular to each other in the first optical path incident direction of the optical module 300 to be tested, so that the optical path directions of the visible light and the ultraviolet light incident on the combiner 200 are perpendicular to each other, the ultraviolet light and the visible light are incident on the ultraviolet optical module 300 to be tested through the combiner 200 in a collinear manner, and are emitted to the beam splitter prism 400 through the ultraviolet optical module 300 to be tested in a collinear manner, the ultraviolet light and the visible light incident on the beam splitter prism 400 in a collinear manner are separated by the beam splitter prism 400, and the visible light output light and the ultraviolet light output light which differ by a deflection angle delta are emitted.

In the second light path direction, the rotary reflection module is adjusted based on the deflection angle delta, so that the rotary reflection module reflects the first light path output light emitted by the beam splitting prism 400 to form second light path input light, the second light path input light comprises visible light reflection light and ultraviolet light reflection light, the visible light reflection light and the ultraviolet light reflection light are collinearly incident to the ultraviolet light optical module 300 to be detected from the beam splitting prism 400 according to the original light path and then are transmitted through the light combining mirror 200, and the visible light reflection light is transmitted back to the visible light interferometer 101 to form a reference light path. Here, for ultraviolet light and visible light of specific wavelengths, the deflection angle δ of the dichroic prism for the visible light output light and the ultraviolet light output light is a fixed value, and the value of the deflection angle δ is related to the spectroscopic characteristics of the dichroic prism 400, and a specific manner of obtaining the deflection angle δ may be referred to the following embodiments. The positions of the lenses in the optical module are adjusted based on the reference light path, so that the ultraviolet reflected light propagates back to the ultraviolet interferometer 102 to test the optical characteristics of the ultraviolet optical module 300 to be tested.

Further, the included angle between the mirror surface direction of the light combining mirror 200 and the light path direction of the visible light generated by the visible light interferometer 101 and the ultraviolet light generated by the ultraviolet interferometer 102 is 45 °;

The combiner 200 includes a first mirror 201 and a second mirror 202, wherein,

The ultraviolet light generated by the ultraviolet interferometer 102 is incident from the first mirror 201 of the light combining mirror 200, and keeps the propagation direction of the ultraviolet light propagating to the ultraviolet optical module 300 to be tested;

The visible light generated by the visible light interferometer 101 is incident from the second mirror 202 of the light combining mirror 200, and reflected at 45 ° at the second mirror 202, and the reflected visible light and the ultraviolet light are collinearly transmitted to the ultraviolet optical module 300 to be tested.

Specifically, the light combining lens 200 is disposed at a 90 ° angle formed by intersecting ultraviolet rays and visible rays, and the light combining lens 200 can transmit 45 ° incident ultraviolet rays in the original propagation direction and reflect visible rays. Thus, the ultraviolet light emitted by the ultraviolet interferometer 102 is incident at an incident angle of 45 ° by the first mirror 201 of the combiner 200 and is transmitted in the original propagation direction via the second mirror 202. The visible light emitted by the visible light interferometer 101 enters the ultraviolet optical module 300 to be tested by being incident at the second mirror surface 202 of the light combining mirror 200 at an incident angle of 45 degrees, reflected at the second mirror surface 202 at an angle of 45 degrees and collinearly enters the ultraviolet optical module 300 to be tested with the ultraviolet light. In an embodiment of the present utility model, the dichroic mirror is selected as the combiner 200, and in implementation, the form of the combiner 200 may be selected according to actual requirements, so as to meet the requirement that the visible light and the ultraviolet light enter the ultraviolet optical module 300 to be tested in a collinear manner.

Further, the ultraviolet light module 300 to be tested includes a first optical unit including a first diaphragm 301, a half-wave plate 302, a first polarizing prism 303, a first lens 304 and a second lens 305 sequentially arranged in a first optical path direction,

The center of the first diaphragm 301 is positioned on the same straight line with the center of the half-wave plate 302, the first polarizing prism 303, the first lens 304 and the second lens 305;

the visible light and ultraviolet light are vertically incident to the half-wave plate 302 through the first diaphragm 301, and are transmitted to the first lens 304 through the first polarizing prism 303;

The first lens 304 is a plano-concave lens, the second lens is a plano-convex lens 305, the first lens 304 is disposed in a focal point of the second lens 305, visible light rays and ultraviolet light rays which are collinearly transmitted to a concave surface of the first lens 304 are transmitted to a convex surface of the second lens 305 after being diffused by the first lens 304, and the diffused visible light rays and ultraviolet light rays are emitted in parallel by a plane of the second lens 305.

Generally, the optical path of the non-coplanar ultraviolet optical module is long and complex, and the adjustment requirement for the test optical path is large when testing the optical characteristics of the non-coplanar ultraviolet optical module, so in one embodiment of the present utility model, the ultraviolet optical module 300 to be tested is a non-coplanar ultraviolet optical module, and each optical lens in the non-coplanar ultraviolet optical module may exist in different planes. Of course, the test system can also meet the test requirement of the coplanar optical module.

As shown in fig. 2, to facilitate the description of the positions of the optical lenses, the overall structure of the ultraviolet optical module 300 to be tested is regarded as a cuboid, wherein the length of the AB side of the cuboid is 30cm, the length of the AD side is 20cm, and the length of the AE side is 15cm. The rectangular ABFE surface and the ADHE surface are respectively provided with a first rectangular hole and a second rectangular hole, and the lengths and the widths of the first rectangular hole and the second rectangular hole are respectively 0.6cm and 0.3cm.

Specifically, a three-dimensional coordinate system is constructed in the x-axis, y-axis, and z-axis directions shown in fig. 2 with the point a in fig. 2 as the origin, with the first rectangular hole as the first diaphragm 301, and the unit length of the coordinate system is 1cm. In the above coordinate system, the coordinate of the center point of the first diaphragm 301 is (25,0,5). The visible light and the ultraviolet light are vertically incident to the half-wave plate 302 through the first diaphragm 301, the diameter of the half-wave plate 302 is 2.5cm, the thickness of the half-wave plate 302 is 0.3cm, and the working wave band of the half-wave plate 302 is 200nm to 1000nm, so that the polarization directions of the visible light and the ultraviolet light are rotated. In one embodiment of the present utility model, the first polarizing prism 303 is a graticule prism, which is used to separate or select polarized light in a specific direction, and the working principle of the graticule prism is consistent with the prior art. The visible light rays and the ultraviolet light rays which are collinearly transmitted to the concave surface of the first lens 304 are transmitted to the convex surface of the second lens 305 after being diffused by the first lens 304, the effective focal length of the first lens 304 is 1.25cm, the effective focal length of the second lens 305 is 6.25cm, and the first lens 304 and the second lens 305 are matched to expand the beam sizes of the collinearly visible light rays and the ultraviolet light rays to 5 times of the original beam sizes so as to facilitate observation in the process of adjusting a test light path.

Further, the ultraviolet light module 300 to be tested further includes a reflecting unit, including a first reflecting mirror 306, a second reflecting mirror 307, a third reflecting mirror 308, and a fourth reflecting mirror 309, which are sequentially arranged according to the first light path direction;

The first reflecting mirror 306 is disposed in the outgoing direction of the first light path direction of the second lens 305, and the centers of the first reflecting mirror 306 and the second lens 305 are located on the same straight line;

The second reflecting mirror 307 is parallel to the mirror surface direction of the first reflecting mirror 306, the third reflecting mirror 308 is on the same straight line with the mirror surface center of the second reflecting mirror 308, and the connecting line of the third reflecting mirror 308 and the mirror surface center of the second reflecting mirror 305 is perpendicular to the connecting line of the second reflecting mirror 307 and the mirror surface center of the first reflecting mirror 306;

The fourth mirror 309 is positioned on the same straight line in the vertical direction as the mirror center of the third mirror 308.

Specifically, the mirrors are flat mirrors and have a diameter of 5cm, the thicknesses of the first mirror 306 and the fourth mirror 309 are 0.5cm, and the thicknesses of the second mirror 307 and the third mirror 308 are 1cm. In the coordinate system constructed as described above, the coordinates of the lens center point of the first mirror 306 are (25, 10, 5), the coordinates of the lens center point of the second mirror 307 are (25, 10, 5), the coordinates of the lens center point of the third mirror 308 are (20, 15, 5), and the coordinates of the lens center point of the fourth mirror 309 are (20, 15, 10).

In an embodiment of the present utility model, the mirrors are all perpendicular to the ABCD surface of the cuboid in fig. 2, the reflecting surface of the first mirror 306 is in a plane formed by rotating the cuboid ABFE surface by 45 ° about the BF side as the axial BFCG plane, the reflecting surface of the second mirror 307 is parallel to the reflecting surface of the first mirror 306, and the reflecting surface of the third mirror 308 is in the same plane as the reflecting surface of the first mirror 306. The reflection surface of the fourth mirror 309 is parallel to a plane formed by 45 ° rotation of the rectangular ADHE surface about the DH side as the axial HGCD surface. The incidence angles of the collinear visible light rays and ultraviolet light rays on the incidence surfaces of the first mirror 306, the second mirror 307, the third mirror 308 and the fourth mirror 309 are all 45±1°.

Further, the first mirror 306, the second mirror 307, the third mirror 308, and the fourth mirror 309 have a reflectance of 99% or more in the ultraviolet band and a reflectance of 90% or more in the visible band.

In one embodiment of the present utility model, since the visible light emitted from the visible light interferometer 101 is red light having a wavelength of 633nm, the light emitted from the ultraviolet interferometer 102 is ultraviolet light having a wavelength of 266 nm. The reflectance of the reflecting mirror at 266nm was 99.3% and the reflectance at 633nm was 90% corresponding to red light having a wavelength of 633nm and ultraviolet light having a wavelength of 266 nm.

Further, the ultraviolet light module 300 further comprises a second optical unit, which includes a third lens 310, a fourth lens 311, a second polarizing prism 312 and a second diaphragm 313 sequentially arranged along the first optical path direction, wherein,

The centers of the third lens 310, the fourth lens 311, the second polarizing prism 312 and the second diaphragm 313 are positioned on the same straight line;

The third lens 310 is a plano-convex lens, the fourth lens 311 is a plano-concave lens, the fourth lens 311 is disposed in a focal point of the third lens 310, visible light rays and ultraviolet rays which are collinearly propagated to a plane of the third lens 310 are converged by the third lens 310 and propagated to a plane of the fourth lens 311, and the visible light rays and the ultraviolet rays are emitted from a concave surface of the fourth lens 311 to the second polarizing prism 312 in parallel and are emitted to the light splitting prism 400 through the second diaphragm 313.

Specifically, the effective focal length of the third lens 310 is 6.25cm, the effective focal length of the fourth lens 311 is 1.25cm, and the beam sizes of the collinear visible light rays and ultraviolet light rays are reduced to the original beam size by the cooperation of the third lens 310 and the fourth lens 311. The second polarizing prism 312 is the same as the first polarizing prism 303, and a glaring prism is also selected to control the optical power in the optical module in cooperation with the first polarizing prism. The second rectangular hole is used as a second diaphragm 313, the coordinates of the center point of the second diaphragm 313 in the coordinate system are (0, 15, 10), and the visible light and ultraviolet light are collinearly emitted from the second diaphragm 313 to the beam splitting prism 400.

Further, the half-wave plate 302, the first polarizing prism 303, the first lens 304, the second lens 305, the first reflecting mirror 306, the second reflecting mirror 307, the third reflecting mirror 308, the fourth reflecting mirror 309, the third lens 310, the fourth lens 311 and the second polarizing prism 312 in the ultraviolet optical module to be tested are all fixed on a frame provided with a piezoelectric actuator for adjusting the position and angle of each lens.

Specifically, the piezoelectric actuator is generally controlled by a computer, and when the optical path is adjusted based on the reference optical path during the process of testing the optical characteristics of the ultraviolet optical module 300 to be tested, the position and angle of each optical lens in the optical module can be accurately adjusted by the piezoelectric controller, so that the interferometer generates a detection signal or the interference pattern is clarified.

Further, the beam splitting prism 400 includes a peclin brazier prism, and a prism base angle of the peclin brazier prism is 75 °.

Preferably, the beam splitting prism 400 is a petrillic prism, and the base angle of the prism is angle C in fig. 3. As shown in fig. 3, when the visible light and the ultraviolet light are incident on the petlin bloc prism in a collinear manner, the incident angle a of the visible light and the ultraviolet light is the same, and after the light Jing Peilin bloc prism with different wavelengths exits, the included angle phi _λ between the incident light and the exiting light is different according to the spectroscopic characteristics of the petlin bloc prism. The difference between the included angle phi _λa of the visible light and the included angle phi _λb of the ultraviolet light is the deflection angle delta between the visible light output light and the ultraviolet light output light, wherein the calculation mode of the included angle phi _λ is consistent with the prior art, and the description is omitted here.

In one embodiment of the present utility model, the beam splitter prism 400 is a petrillic prism with a base angle of 75 °, and the petrillic prism is made of calcium fluoride, and the deflection angle δ of the visible light output light and the ultraviolet light output light is 5.3 ° for the ultraviolet light with a wavelength of 266nm and the red visible light with a wavelength of 633 nm. In specific implementation, the type of the beam splitting prism 400 may be selected according to actual requirements, specifically based on satisfying the beam splitting requirement of the test system for fixing the deflection angle.

Further, the rotary reflection module includes a rotary table 500, a visible light reflecting flat crystal 501 and an ultraviolet reflecting flat crystal 502 placed on the rotary table 500, wherein,

The position of the visible light reflection flat crystal 501 corresponds to the visible light output ray emitted by the beam splitter prism 400;

The position of the ultraviolet reflection flat crystal 502 corresponds to the ultraviolet output light emitted by the beam splitter prism 400;

The positions of the visible light reflecting flat crystal 501 and the ultraviolet reflecting flat crystal 502 are changed with the rotation of the turntable 400.

Specifically, when testing the optical characteristics of the ultraviolet light module 300 to be tested, due to the invisibility of ultraviolet light, the ultraviolet reflective flat crystal 502 needs to be placed based on the deflection angle δ and the position of the visible light reflective flat crystal 501. The position of the visible light reflecting flat crystal 501 corresponds to the visible light output light rays emitted by the beam splitting prism 400, that is, the position of the visible light reflecting flat crystal 501 can reflect the visible light output light rays back to the beam splitting prism 400 according to the original light path. The position of the ultraviolet reflective flat crystal 502 corresponds to the ultraviolet output light emitted by the beam splitter prism 400, i.e. the position of the ultraviolet reflective flat crystal 502 can reflect the original light path of the ultraviolet output light back to the beam splitter prism 400.

For the visual testing system of the ultraviolet optical module, the utility model provides a testing method for testing the optical characteristics of the ultraviolet optical module 300 to be tested by using the testing system, and specifically, the testing method comprises the following steps:

Step 1: the visible light interferometer 101, the ultraviolet interferometer 102, the functional optical module, the rotary table, the red light reflection flat crystal 501 and the ultraviolet optical module 300 to be tested are placed according to the positional relationship of the test system, so that ultraviolet light and visible light enter the ultraviolet optical module 300 to be tested from the first diaphragm 301 in a collinear manner.

Step 2: by utilizing the visibility of the reference light path, the position and angle of each optical lens in the ultraviolet optical module 300 to be tested are adjusted by the piezoelectric actuator, so that the visible light is emitted from the second diaphragm 313 of the ultraviolet optical module 300 to be tested.

Step 3: the angle of the beam-splitting prism 400 is rotated, so that visible light rays are reflected by the inside of the beam-splitting prism 400, deflected by 90 degrees, emitted by the beam-splitting prism 400, and transmitted to the red light reflection flat crystal 501 arranged on the rotary table 500, the angle of each optical lens of the ultraviolet optical module 300 to be tested is finely adjusted to enable an interference signal to appear in a visible light interferometer, an interference image is generated, the interference image is clarified by adjusting the angle of each optical lens, and the optical characteristics of the ultraviolet optical module 300 to be tested in the visible light band are tested.

Step 4: the deflection angles delta of the visible light output light rays and the ultraviolet light output light rays are calculated, and the ultraviolet reflection flat crystal 502 is correspondingly placed on the rotary table 500 according to the deflection angles delta.

Step 5: the rotation stage is rotated by an angle delta so that the reflecting surface of the ultraviolet reflection flat crystal 502 is perpendicular to the light path direction of the ultraviolet output light.

Step 6: it is determined whether an interference signal is present in the ultraviolet interferometer 102.

If no interference signal appears in the ultraviolet interferometer 102, the position and angle of the ultraviolet optical module 300 to be measured are finely adjusted, so that the interference signal appears in the ultraviolet interferometer 102, and the interference signal of the visible light interferometer 101 is ensured to be in the field of view.

If an interference signal is present in the ultraviolet interferometer 102, step 7 is directly performed.

Step 7: fine-tuning the pitching position of the ultraviolet reflection flat crystal 502 and the positions and angles of the optical lenses of the ultraviolet optical module 300 to be tested, so as to make the interference image in the ultraviolet interferometer 102 clear and test the optical characteristics of the ultraviolet optical module 300 to be tested in the ultraviolet wave band.

In sum, the test system utilizes the light splitting characteristic of the light splitting prism and the visibility of visible light to adjust the ultraviolet optical module to be tested, avoids complex section-by-section light path adjustment, provides a simple test system for the test of the integral optical characteristic of the ultraviolet optical module, reduces the difficulty of adjusting the test light path and improves the adjustment precision, thereby effectively improving the test efficiency of the optical characteristic of the ultraviolet optical module.

The above is only a preferred embodiment of the present utility model, and the present utility model is not limited to the above examples. It is to be understood that other modifications and variations which may be directly derived or contemplated by those skilled in the art without departing from the spirit and concepts of the present utility model are deemed to be included within the scope of the present utility model.

Claims

1. A visual test system for an ultraviolet optical module, comprising:

an ultraviolet interferometer for generating ultraviolet light;

The beam splitting prism is arranged in the emergent direction of the first light path direction of the ultraviolet optical module to be tested, ultraviolet rays and visible rays which are collinearly emergent from the ultraviolet optical module to be tested are incident to the beam splitting prism, the beam splitting prism generates first light path output rays, wherein,

2. The visual test system of an ultraviolet optical module according to claim 1, wherein the included angle between the mirror surface direction of the light combining mirror and the light path direction of the visible light generated by the visible light interferometer and the ultraviolet light generated by the ultraviolet interferometer is 45 degrees;

And the visible light generated by the visible light interferometer is incident by the second mirror surface of the light combining mirror, is reflected by 45 degrees at the second mirror surface, and is collinearly transmitted to the ultraviolet optical module to be detected by the reflected visible light and ultraviolet light.

3. The visual testing system of an ultraviolet optical module according to claim 1, wherein the ultraviolet optical module to be tested comprises a first optical unit comprising a first diaphragm, a half-wave plate, a first polarizing prism, a first lens and a second lens sequentially arranged in a first optical path direction,

4. The visual testing system of an ultraviolet optical module according to claim 3, wherein the ultraviolet optical module to be tested further comprises a reflecting unit, including a first reflecting mirror, a second reflecting mirror, a third reflecting mirror and a fourth reflecting mirror, which are sequentially arranged according to a first light path direction;

5. The visual testing system of claim 4, wherein the incidence angles of the collinear visible light rays and the ultraviolet light rays on the incidence surfaces of the first reflector, the second reflector, the third reflector and the fourth reflector are 45+ -1 °.

6. The visual testing system of an ultraviolet optical module according to claim 4, wherein the reflectivity of the first mirror, the second mirror, the third mirror and the fourth mirror in the ultraviolet band is greater than or equal to 99% and the reflectivity in the visible band is greater than or equal to 90%.

7. The visual testing system of an ultraviolet optical module according to claim 4, wherein the ultraviolet optical module to be tested further comprises a second optical unit comprising a third lens, a fourth lens, a second polarizing prism and a second diaphragm sequentially arranged in the first optical path direction,

8. The visual testing system of claim 7, wherein the half-wave plate, the first polarizing prism, the first lens, the second lens, the first mirror, the second mirror, the third mirror, the fourth mirror, the third lens, the fourth lens, and the second polarizing prism in the ultraviolet optical module to be tested are all fixed on a frame provided with a piezoelectric actuator for adjusting the position and angle of each lens.

9. The uv optical module visualization test system of any one of claims 1-8, wherein the beam splitting prism comprises a pelin brazier prism and the prism base angle of the pelin brazier prism is 75 °.

10. The visual testing system of an ultraviolet light module according to any one of claims 1-8, wherein the rotational reflection module comprises a rotational stage, a visible light reflective plat crystal placed on the rotational stage, and an ultraviolet reflective plat crystal, wherein,