CN112563865A - Laser off-line debugging device and method - Google Patents
Laser off-line debugging device and method Download PDFInfo
- Publication number
- CN112563865A CN112563865A CN202011459953.6A CN202011459953A CN112563865A CN 112563865 A CN112563865 A CN 112563865A CN 202011459953 A CN202011459953 A CN 202011459953A CN 112563865 A CN112563865 A CN 112563865A
- Authority
- CN
- China
- Prior art keywords
- laser
- reflector
- resonant cavity
- debugging
- reflected
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/0014—Monitoring arrangements not otherwise provided for
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/05—Construction or shape of optical resonators; Accommodation of active medium therein; Shape of active medium
- H01S3/08—Construction or shape of optical resonators or components thereof
- H01S3/081—Construction or shape of optical resonators or components thereof comprising three or more reflectors
- H01S3/0813—Configuration of resonator
- H01S3/0816—Configuration of resonator having 4 reflectors, e.g. Z-shaped resonators
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/05—Construction or shape of optical resonators; Accommodation of active medium therein; Shape of active medium
- H01S3/08—Construction or shape of optical resonators or components thereof
- H01S3/086—One or more reflectors having variable properties or positions for initial adjustment of the resonator
Landscapes
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Optics & Photonics (AREA)
- Lasers (AREA)
Abstract
A laser off-line debugging device and a debugging method belong to the technical field of laser debugging. The two groups of debugging mechanisms are arranged in a mirror image mode, laser emitted by the laser device is reflected to the resonant cavity mirror in parallel after passing through the first reflecting mirror and the second reflecting mirror, reflected light of the resonant cavity mirror enters the center of the CCD camera after being reflected by the third reflecting mirror, and the signal output end of the CCD camera is connected with a computer. Installing an auxiliary lens at the position of the resonant cavity mirror; debugging a resonant cavity of a laser to obtain optimal output; placing all the components in sequence; adjusting the positions and angles of the first reflector, the second reflector and the third reflector; adjusting the position of the small-hole diaphragm; connecting the CCD camera to a computer, and recording the positions of the two groups of light spots on the computer; and taking down the auxiliary lens, placing the resonant cavity lens, and then adjusting the angle to enable the reflected light to be imaged to the position of the light spot. The invention solves the defect that the resonant cavity lens of the military laser is difficult to debug in an optimized way, is convenient to debug, saves the debugging time and has higher debugging precision.
Description
Technical Field
The invention relates to an off-line debugging device and a debugging method for a laser, and belongs to the technical field of laser debugging.
Background
The military laser has good stability and reliability, and can stably work in the environments with large vibration and temperature change and extreme severe environments, so that the common two-dimensional optical adjusting frame is not suitable for the adjustment of the resonant cavity in the military laser. The current common practice is to stick the resonator mirror to the designed and processed resonator mirror bracket, and then to pad spacers with different thicknesses between the resonator mirror bracket and the laser bottom plate to realize the angle adjustment of the resonator mirror, and to judge the optimization of the tuning of the mirror according to the output power condition.
Although the resonant cavity adjusted by the method has high stability and is not easy to be detuned, the laser needs to work on line, so that much inconvenience is brought to the debugging process. Especially when the two resonator mirrors are optimized simultaneously, the operation is very difficult.
Disclosure of Invention
In order to solve the problems in the background art, the invention provides an off-line debugging device and a debugging method for a laser.
The invention adopts the following technical scheme: an off-line debugging device for a laser comprises a computer and two groups of debugging mechanisms; the two groups of debugging mechanisms are arranged in a mirror image mode, and each group of debugging mechanisms comprises a laser, a first reflector, a second reflector, a CCD camera, a third reflector and a resonant cavity mirror; the laser emitted by the laser is reflected to the resonant cavity mirror after being reflected to the second reflector by the first reflector, and the laser emitted by the laser is parallel to the reflected light reflected to the resonant cavity mirror by the second reflector; reflected light of the resonant cavity mirror enters the center of the CCD camera after being reflected by the third reflector, and the reflected light of the resonant cavity mirror is vertical to the reflected light of the third reflector; the signal output ends of the CCD cameras of the two debugging mechanisms are connected with a computer.
The invention discloses a debugging method of an off-line debugging device of a laser, which comprises the following steps:
s1: auxiliary lenses are arranged at the positions of the two resonant cavity mirrors;
s2: debugging a resonant cavity of the laser to ensure that the laser obtains the optimal output;
s3: sequentially placing a laser, a first reflector, a second reflector, an aperture diaphragm, a CCD camera, a third reflector and a computer;
s4: adjusting the positions and angles of the first reflector and the second reflector to enable the laser emitted by the laser and the reflected light reflected to the resonant cavity mirror by the second reflector to be parallel;
s5: adjusting the position and the angle of the third reflector to enable the reflected light of the resonant cavity mirror to enter the center of the CCD camera after being reflected by the third reflector;
s6: adjusting the angle of the second reflecting mirror again, and adjusting the position of the aperture diaphragm to enable the reflected light of the second reflecting mirror to be incident from the center of the aperture diaphragm, reflected by the corresponding resonant cavity mirror and then symmetrically irradiated on the aperture diaphragm;
s7: the CCD camera is connected to a computer,
s8: recording the light spot positions of the two debugging mechanisms collected by the two CCD cameras on a computer, and respectively recording the light spot positions as a position I and a position II;
s9: taking down the auxiliary lens, and respectively placing the two resonant cavity mirrors to be debugged at corresponding positions;
s10: adjusting the angles of the two resonant cavity mirrors to enable reflected light reflected to the centers of the corresponding CCD cameras to be imaged to the corresponding positions I or II in S8;
s11: observing whether the spot position at position I or position II at S10 coincides with the spot position at position I or position II at S8; if the two are consistent, the adjustment is ended; if they do not match, S10 is repeated.
Compared with the prior art, the invention has the beneficial effects that:
1. according to the invention, the optimal debugging of the laser can be realized by comparing the positions of the two imaging light spots of the CCD camera, which is equivalent to the visualization of the debugging process of the laser, the defect that the military laser resonant cavity lens is difficult to be optimally debugged is solved, the debugging is convenient and the debugging time is saved;
2. compared with the criterion of judging the optimal debugging by depending on the output power of the laser during online debugging, the invention adopts the high-resolution CCD camera, so that the debugging precision is higher;
3. the invention realizes the off-line optimal debugging of the laser, is convenient to debug and greatly saves the debugging time of the laser.
Drawings
Fig. 1 is a schematic structural view of the present invention.
Detailed Description
The technical solutions in the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the invention, rather than all embodiments, and all other embodiments obtained by those skilled in the art without any creative work based on the embodiments of the present invention belong to the protection scope of the present invention.
An off-line debugging device for a laser comprises a computer 8 and two groups of debugging mechanisms; the two groups of debugging mechanisms are arranged in a mirror image mode, and each group of debugging mechanisms comprises a laser 1, a first reflecting mirror 2, a second reflecting mirror 3, a CCD camera 5, a third reflecting mirror 6 and a resonant cavity mirror 7; the laser emitted by the laser 1 is reflected to the second reflecting mirror 3 through the first reflecting mirror 2 and then reflected to the resonant cavity mirror 7, and the laser emitted by the laser 1 is parallel to the reflected light reflected to the resonant cavity mirror 7 by the second reflecting mirror 3; the reflected light of the resonant cavity mirror 7 enters the center of the CCD camera 5 after being reflected by the third reflector 6, and the reflected light of the resonant cavity mirror 7 is vertical to the reflected light of the third reflector 6; the signal output ends of the CCD cameras 5 of the two debugging mechanisms are connected with a computer 8.
The laser 1 emits He — Ne laser light.
The first reflector 2, the second reflector 3 and the third reflector 6 are plane mirrors.
The optical path between the laser 1 and the corresponding resonant cavity mirror 7 is larger than 1.5 m.
An aperture diaphragm 4 is arranged between the second reflecting mirror 3 and the corresponding resonant cavity mirror 7, the aperture diaphragm 4 mainly plays a role in limiting light beams, the angle of the second reflecting mirror 3 needs to be adjusted, and the position of the aperture diaphragm 4 needs to be adjusted, so that He-Ne laser emitted by the laser 1 is incident from the center of the aperture diaphragm 4 and is symmetrically irradiated onto the corresponding aperture diaphragm 4 after being reflected by the corresponding resonant cavity mirror 7.
The aperture of the small aperture diaphragm 4 is less than 1 mm.
The resolution of the CCD camera 5 is not lower than 2592 x 2048.
The invention discloses a debugging method of an off-line debugging device of a laser, which comprises the following steps:
s1: auxiliary lenses are arranged at the positions of the two resonant cavity mirrors 7;
s2: debugging the resonant cavity of the laser 1 on line by using a two-dimensional optical adjusting frame to ensure that the laser 1 obtains the optimal output;
s3: a laser 1, a first reflector 2, a second reflector 3, an aperture diaphragm 4, a CCD camera 5, a third reflector 6 and a computer 8 are sequentially arranged;
s4: adjusting the positions and angles of the first reflector 2 and the second reflector 3 to enable the laser emitted by the laser 1 to be parallel to the reflected light reflected to the resonant cavity mirror 7 by the second reflector 3;
s5: adjusting the position and the angle of the third reflector 6 to enable the reflected light of the resonant cavity mirror 7 to enter the center of the CCD camera 5 after being reflected by the third reflector 6;
s6: the angle of the second reflecting mirror 3 is adjusted again, and the position of the small-hole diaphragm 4 is adjusted, so that the reflected light of the second reflecting mirror 3 is incident from the center of the small-hole diaphragm 4, reflected by the corresponding resonant cavity mirror 7 and symmetrically irradiated on the small-hole diaphragm 4;
s7: the CCD camera 5 is connected to a computer 8,
s8: recording the light spot positions of the two debugging mechanisms acquired by the two CCD cameras 5 on the computer 8, and respectively recording the light spot positions as a position I and a position II;
s9: taking down the auxiliary lens, and respectively placing the two resonator mirrors 7 to be debugged at corresponding positions;
s10: adjusting the angles of the two resonator mirrors 7 to enable the reflected light reflected by the two resonator mirrors 7 to the center of the corresponding CCD camera 5 to be imaged to the corresponding position I or position II in S8;
namely: adjusting the angle of one resonant cavity mirror 7 to enable the reflected light reflected to the center of the corresponding CCD camera 5 to be imaged to the corresponding position I in S8; meanwhile, the angle of the other resonant cavity mirror 7 is adjusted, so that the reflected light reflected to the center of the corresponding CCD camera 5 is imaged to the corresponding position II in S8;
s11: observing whether the spot position at position I or position II at S10 coincides with the spot position at position I or position II at S8; if the two are consistent, the adjustment is ended; if they do not match, S10 is repeated.
Namely: it is observed whether the reflected light image reflected by the one resonator mirror 7 to the center of the corresponding CCD camera 5 at S10 coincides with the position I at S8, and at the same time, it is observed whether the reflected light image reflected by the other resonator mirror 7 to the center of the corresponding CCD camera 5 at S10 coincides with the position II at S8.
After the resonant cavity mirror 7 of the laser 1 is adjusted to be optimal by using the two-dimensional optical adjusting frame, the off-line debugging device of the invention is utilized to record the light spot position of He-Ne light on the CCD camera 5, which is equivalent to indirectly recording the attitude information of the resonant cavity mirror 7 when the optimization is debugged; and (3) removing the two-dimensional optical adjusting frame, replacing the resonant cavity mirror 7 of the laser 1 to be debugged, judging whether the resonant cavity mirror 7 is adjusted to be optimized or not at the moment, and determining whether the position of the light spot of the He-Ne light is consistent with the position of the He-Ne light before through observation and judgment.
In the prior art, whether the debugging is optimal or not is judged by the fact that a laser 1 works on line and the output power is the highest, and the debugging is difficult to judge because the output power is usually unstable. The invention adopts the high-resolution CCD camera 5, the He-Ne light imaging positions are twice before and after, even if the He-Ne light imaging positions are observed by naked eyes, the error of a few pixels is not large, and therefore, compared with the traditional power maximization criterion, the accuracy is much higher.
It will be evident to those skilled in the art that the invention is not limited to the details of the foregoing illustrative embodiments, and that the present invention may be embodied in other specific forms without departing from the spirit or essential attributes thereof. The present embodiments are therefore to be considered in all respects as illustrative and not restrictive, the scope of the invention being indicated by the appended claims rather than by the foregoing description, and all changes which come within the meaning and range of equivalency of the claims are therefore intended to be embraced therein. Any reference sign in a claim should not be construed as limiting the claim concerned.
Furthermore, it should be understood that although the present description refers to embodiments, not every embodiment may contain only a single embodiment, and such description is for clarity only, and those skilled in the art should integrate the description, and the embodiments may be combined as appropriate to form other embodiments understood by those skilled in the art.
Claims (8)
1. The utility model provides a laser instrument off-line debugging device which characterized in that: comprises a computer (8) and two groups of debugging mechanisms; the two groups of debugging mechanisms are arranged in a mirror image mode, and each group of debugging mechanisms comprises a laser (1), a first reflector (2), a second reflector (3), a CCD camera (5), a third reflector (6) and a resonant cavity mirror (7); the laser emitted by the laser (1) is reflected to the second reflector (3) through the first reflector (2) and then reflected to the resonant cavity mirror (7), and the laser emitted by the laser (1) is parallel to the reflected light reflected to the resonant cavity mirror (7) by the second reflector (3); the reflected light of the resonant cavity mirror (7) enters the center of the CCD camera (5) after being reflected by the third reflector (6), and the reflected light of the resonant cavity mirror (7) is vertical to the reflected light of the third reflector (6); the signal output ends of the CCD cameras (5) of the two debugging mechanisms are connected with a computer (8).
2. The off-line debugging device for the laser according to claim 1, wherein: the laser (1) emits He-Ne laser light.
3. The off-line debugging device for the laser according to claim 1 or 2, wherein: the first reflector (2), the second reflector (3) and the third reflector (6) are plane mirrors.
4. The off-line debugging device for the laser according to claim 1 or 2, wherein: the optical path between the laser (1) and the corresponding resonant cavity mirror (7) is larger than 1.5 m.
5. The off-line debugging device for the laser according to claim 1 or 2, wherein: and a small-hole diaphragm (4) is arranged between the second reflector (3) and the corresponding resonant cavity mirror (7).
6. The off-line debugging device for the laser according to claim 5, wherein: the aperture of the small aperture diaphragm (4) is smaller than 1 mm.
7. The off-line debugging device for the laser according to claim 3 or 6, wherein: the resolution of the CCD camera (5) is not lower than 2592 x 2048.
8. A method for debugging the laser offline debugging device according to any one of claims 1 to 7, wherein: the method comprises the following steps:
s1: auxiliary lenses are arranged at the positions of the two resonant cavity mirrors (7);
s2: debugging a resonant cavity of the laser (1) to ensure that the laser (1) obtains the optimal output;
s3: a laser (1), a first reflector (2), a second reflector (3), an aperture diaphragm (4), a CCD camera (5), a third reflector (6) and a computer (8) are sequentially arranged;
s4: adjusting the positions and angles of the first reflector (2) and the second reflector (3) to enable the laser emitted by the laser (1) to be parallel to the reflected light reflected to the resonant cavity mirror (7) by the second reflector (3);
s5: adjusting the position and the angle of the third reflector (6) to enable the reflected light of the resonant cavity mirror (7) to enter the center of the CCD camera (5) after being reflected by the third reflector (6);
s6: the angle of the second reflecting mirror (3) is adjusted again, and the position of the small-hole diaphragm (4) is adjusted, so that the reflected light of the second reflecting mirror (3) is incident from the center of the small-hole diaphragm (4), reflected by the corresponding resonant cavity mirror (7) and symmetrically irradiated on the small-hole diaphragm (4);
s7: the CCD camera (5) is connected to a computer (8),
s8: recording the light spot positions of the two debugging mechanisms collected by the two CCD cameras (5) on a computer (8), and respectively recording the light spot positions as a position I and a position II;
s9: taking down the auxiliary lens, and respectively placing two resonant cavity mirrors (7) to be debugged at corresponding positions;
s10: adjusting the angles of the two resonant cavity mirrors (7) to enable reflected light reflected to the centers of the corresponding CCD cameras (5) to be imaged to the corresponding positions I or II in S8;
s11: observing whether the spot position at position I or position II at S10 coincides with the spot position at position I or position II at S8; if the two are consistent, the adjustment is ended; if they do not match, S10 is repeated.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN202011459953.6A CN112563865B (en) | 2020-12-11 | 2020-12-11 | Debugging method of laser off-line debugging device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN202011459953.6A CN112563865B (en) | 2020-12-11 | 2020-12-11 | Debugging method of laser off-line debugging device |
Publications (2)
Publication Number | Publication Date |
---|---|
CN112563865A true CN112563865A (en) | 2021-03-26 |
CN112563865B CN112563865B (en) | 2021-11-09 |
Family
ID=75062439
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN202011459953.6A Active CN112563865B (en) | 2020-12-11 | 2020-12-11 | Debugging method of laser off-line debugging device |
Country Status (1)
Country | Link |
---|---|
CN (1) | CN112563865B (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN114088078A (en) * | 2021-12-02 | 2022-02-25 | 湖南二零八先进科技有限公司 | Collimating device and collimating method for angular cavity of laser gyro resonant cavity |
CN114235344A (en) * | 2021-12-14 | 2022-03-25 | 哈尔滨工业大学 | Debugging device and debugging method for laser resonator cavity mirror |
Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP1601071A1 (en) * | 2004-05-25 | 2005-11-30 | Fujitsu Limited | Wavelength tunable laser device |
CN107221832A (en) * | 2017-08-01 | 2017-09-29 | 南京先进激光技术研究院 | A kind of U-shaped cavity laser that can efficiently debug and its adjustment method |
US20170324212A1 (en) * | 2016-05-09 | 2017-11-09 | Korea Institute Of Science And Technology | Single pulse laser apparatus |
CN107800027A (en) * | 2017-09-21 | 2018-03-13 | 北京航空航天大学 | One kind tackles the potential possible resonator mirror fixing means of off resonance |
CN108471041A (en) * | 2018-04-04 | 2018-08-31 | 哈尔滨工业大学 | One kind is for engineering laser resonant cavity eyeglass fine adjustment and fixed auxiliary device and method |
CN109254376A (en) * | 2018-10-22 | 2019-01-22 | 哈尔滨工业大学 | A kind of special type lens dead axle stage apparatus |
CN109633921A (en) * | 2019-01-07 | 2019-04-16 | 中国科学院上海光学精密机械研究所 | Laser mirror assistant resetting device and its application method |
CN109883657A (en) * | 2019-03-26 | 2019-06-14 | 北京市燃气集团有限责任公司 | The long humorous device and method of interference light intonation based on self-compensation type translation shaft |
-
2020
- 2020-12-11 CN CN202011459953.6A patent/CN112563865B/en active Active
Patent Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP1601071A1 (en) * | 2004-05-25 | 2005-11-30 | Fujitsu Limited | Wavelength tunable laser device |
US20170324212A1 (en) * | 2016-05-09 | 2017-11-09 | Korea Institute Of Science And Technology | Single pulse laser apparatus |
CN107221832A (en) * | 2017-08-01 | 2017-09-29 | 南京先进激光技术研究院 | A kind of U-shaped cavity laser that can efficiently debug and its adjustment method |
CN107800027A (en) * | 2017-09-21 | 2018-03-13 | 北京航空航天大学 | One kind tackles the potential possible resonator mirror fixing means of off resonance |
CN108471041A (en) * | 2018-04-04 | 2018-08-31 | 哈尔滨工业大学 | One kind is for engineering laser resonant cavity eyeglass fine adjustment and fixed auxiliary device and method |
CN109254376A (en) * | 2018-10-22 | 2019-01-22 | 哈尔滨工业大学 | A kind of special type lens dead axle stage apparatus |
CN109633921A (en) * | 2019-01-07 | 2019-04-16 | 中国科学院上海光学精密机械研究所 | Laser mirror assistant resetting device and its application method |
CN109883657A (en) * | 2019-03-26 | 2019-06-14 | 北京市燃气集团有限责任公司 | The long humorous device and method of interference light intonation based on self-compensation type translation shaft |
Non-Patent Citations (2)
Title |
---|
ZHU, XH: "Specular Reflectance Calibration Based on Integral Cavity Output Spectroscopy", 《OPTICAL SENSING AND IMAGING TECHNOLOGIES AND APPLICATIONS》 * |
梁荣杰: "LD泵浦Nd:YVO4固体激光器调试技术的研究", 《大学物理实验》 * |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN114088078A (en) * | 2021-12-02 | 2022-02-25 | 湖南二零八先进科技有限公司 | Collimating device and collimating method for angular cavity of laser gyro resonant cavity |
CN114088078B (en) * | 2021-12-02 | 2023-02-17 | 湖南二零八先进科技有限公司 | Collimating device and collimating method for angular cavity of laser gyro resonant cavity |
CN114235344A (en) * | 2021-12-14 | 2022-03-25 | 哈尔滨工业大学 | Debugging device and debugging method for laser resonator cavity mirror |
CN114235344B (en) * | 2021-12-14 | 2023-09-22 | 哈尔滨工业大学 | Debugging device and method for laser resonant cavity mirror |
Also Published As
Publication number | Publication date |
---|---|
CN112563865B (en) | 2021-11-09 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
CN112563865B (en) | Debugging method of laser off-line debugging device | |
CN111650695A (en) | Space light-optical fiber coupling alignment method for optical fiber transmission characteristic measurement | |
CN108981608B (en) | Novel line structured light vision system and calibration method | |
US20180017382A1 (en) | Measuring head and eccentricity measuring device including the same | |
WO2022027896A1 (en) | Parameter adjustment method for vibrating mirror, apparatus, device, and readable storage medium | |
JPH0674863A (en) | Core eccentricity measuring method for optical connector and optical connector | |
CN110824459B (en) | Intelligent optical axis adjustment system based on interference fringes and adjustment method thereof | |
CN114114564B (en) | Space light-optical fiber coupling device and method based on visual detection | |
CN114235344B (en) | Debugging device and method for laser resonant cavity mirror | |
CN112114436B (en) | Method for assembling and adjusting long-focal-depth laser cutting head | |
CN116818667A (en) | 2D and 3D integrated semiconductor microscopic vision detection system and method | |
CN108278980B (en) | Torsion angle dynamic measurement device and method based on piezoelectric deflection table | |
CN108318887B (en) | Laser-assisted binocular range finding system | |
CN114815284B (en) | Method for eliminating optical interval adjustment error by using optical lens with folded light path | |
CN105353497A (en) | Double-oscillating-mirror adjustment method | |
CN214174750U (en) | External auto-collimation receiving device | |
CN115384060A (en) | 3D printing device based on light spot quality detector and light spot quality detection method | |
CN111829652B (en) | Focusing light spot analysis platform of laser fiber field lens | |
CN114001676A (en) | Optical axis automatic alignment method for detecting optical element by knife edge instrument | |
CN111486791A (en) | Device for adaptively adjusting light quality of sine stripe structure and operation method | |
CN112857262A (en) | Improved oblique illumination type color confocal measurement system and detection method | |
CN220933268U (en) | High NA large view field multi-interface microscope objective and wafer defect detection system | |
CN204594429U (en) | A kind of device measuring right alignment | |
CN109470145A (en) | Polarization Modulation high resolution Stereo Vision Measurement System and method | |
CN219475904U (en) | Imaging device and detection system thereof |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
PB01 | Publication | ||
PB01 | Publication | ||
SE01 | Entry into force of request for substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
GR01 | Patent grant | ||
GR01 | Patent grant |