CN114226760A - Adjusting device and adjusting method for input light path of vibrating mirror of powder paving equipment for selective laser melting - Google Patents
Adjusting device and adjusting method for input light path of vibrating mirror of powder paving equipment for selective laser melting Download PDFInfo
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- CN114226760A CN114226760A CN202111660436.XA CN202111660436A CN114226760A CN 114226760 A CN114226760 A CN 114226760A CN 202111660436 A CN202111660436 A CN 202111660436A CN 114226760 A CN114226760 A CN 114226760A
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B22—CASTING; POWDER METALLURGY
- B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
- B22F12/00—Apparatus or devices specially adapted for additive manufacturing; Auxiliary means for additive manufacturing; Combinations of additive manufacturing apparatus or devices with other processing apparatus or devices
- B22F12/40—Radiation means
- B22F12/41—Radiation means characterised by the type, e.g. laser or electron beam
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B22—CASTING; POWDER METALLURGY
- B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
- B22F10/00—Additive manufacturing of workpieces or articles from metallic powder
- B22F10/20—Direct sintering or melting
- B22F10/28—Powder bed fusion, e.g. selective laser melting [SLM] or electron beam melting [EBM]
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B22—CASTING; POWDER METALLURGY
- B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
- B22F10/00—Additive manufacturing of workpieces or articles from metallic powder
- B22F10/30—Process control
- B22F10/31—Calibration of process steps or apparatus settings, e.g. before or during manufacturing
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B22—CASTING; POWDER METALLURGY
- B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
- B22F10/00—Additive manufacturing of workpieces or articles from metallic powder
- B22F10/80—Data acquisition or data processing
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B22—CASTING; POWDER METALLURGY
- B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
- B22F12/00—Apparatus or devices specially adapted for additive manufacturing; Auxiliary means for additive manufacturing; Combinations of additive manufacturing apparatus or devices with other processing apparatus or devices
- B22F12/90—Means for process control, e.g. cameras or sensors
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B33—ADDITIVE MANUFACTURING TECHNOLOGY
- B33Y—ADDITIVE MANUFACTURING, i.e. MANUFACTURING OF THREE-DIMENSIONAL [3-D] OBJECTS BY ADDITIVE DEPOSITION, ADDITIVE AGGLOMERATION OR ADDITIVE LAYERING, e.g. BY 3-D PRINTING, STEREOLITHOGRAPHY OR SELECTIVE LASER SINTERING
- B33Y30/00—Apparatus for additive manufacturing; Details thereof or accessories therefor
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P10/00—Technologies related to metal processing
- Y02P10/25—Process efficiency
Abstract
The invention provides a device and a method for adjusting the input light path of a vibrating mirror of powder paving equipment for selective laser melting, wherein the adjusting device comprises: a longitudinal guide rail; a first slider and a second slider which are provided on the longitudinal guide rail and can slide along the guide rail; a support frame; the cross micrometer mounting rack and the cross micrometer; the optical system is arranged on the support frame, and the light emitting end of the optical system faces the cross micrometer and is used for emitting laser beams; the beam expanding lens assembly is arranged in an emergent light path of the optical system and is used for expanding and shaping the laser beam emitted towards the cross micrometer; and the optical fine adjustment system is arranged on the supporting frame and used for adjusting the position of the beam expander component. The vibrating mirror input optical path adjusting device of the powder paving equipment accurately calculates the light beam collimation and the corresponding adjusting mode through measuring the central position and the diameter of a light spot behind the beam expanding mirror, and adjusts and calibrates the input optical path at the front end of the vibrating mirror.
Description
Technical Field
The invention relates to the technical field of selective laser melting additive manufacturing, in particular to a galvanometer system calibration, and specifically relates to a device and a method for adjusting an input light path of a galvanometer of powder paving equipment for selective laser melting.
Background
In the technical field of additive manufacturing, the selective laser melting process has better forming performance and extremely high forming precision. The selective laser melting system generally comprises a control system, a powder spreading system, an atmosphere protection system and a laser scanning system, so that the additive manufacturing function and the precision control are realized, and the main error source influencing the forming is also realized.
The laser beam emitted from the fiber is the first factor affecting the shaping effect and needs good collimation, otherwise it affects the printing quality, even burning optical components and scattering in the equipment cavity to generate heat. However, the problem is not focused and solved, the products on the market mostly depend on the matching collimation laser between machines, and the error generated by the initial rough adjustment cannot be corrected during the later stage galvanometer calibration.
Disclosure of Invention
The invention aims to provide a device and a method for adjusting the input light path of a vibrating mirror of powder paving equipment for selective laser melting, which solve the problems of complicated operation process and inaccurate adjustment in the light path adjustment and adjustment process of the existing powder paving equipment, such as lens burning.
According to a first aspect of the object of the invention, a device for adjusting the input optical path of a vibrating mirror of a powder paving equipment for selective laser melting is provided, which comprises:
a longitudinal guide rail;
a first slider and a second slider which are provided on the longitudinal guide rail and can slide along the guide rail;
the supporting frame and the first sliding block are limited at one end of the longitudinal guide rail;
the cross micrometer is fixedly arranged on the cross micrometer mounting rack and can be adjusted in position in a vertical plane through the cross micrometer mounting rack; the above-mentioned
The optical system is arranged on the support frame, and the light emitting end of the optical system faces the cross micrometer and is used for emitting laser beams; the optical fiber collimator comprises an optical fiber collimating head and an optical fiber head fixing sleeve;
the beam expanding lens assembly is arranged in an emergent light path of the optical system and is used for expanding and shaping the laser beam emitted towards the cross micrometer; and
and the optical fine adjustment system is arranged on the support frame and used for adjusting the position of the beam expander component.
According to a second aspect of the present invention, there is provided a method for adjusting and calibrating an input optical path of a galvanometer, comprising the steps of:
step 1: the mirror that shakes input light path adjusts calbiration system and builds, include: step 1.1: the optical fiber collimating head penetrates through the optical fiber head fixing sleeve, and the optical fiber collimating head and the optical fiber head fixing sleeve are locked by a jackscrew; step 1.2: the assembly assembled in the step 1.1 is connected with a support frame in a locking way; step 1.3: the assembly assembled in the step 1.2 is connected with a beam expander mounting sleeve in a locking way; step 1.4: mounting the assembly assembled in the step 1.3 on a first sliding block and locking, and locking and fixing the first sliding block and the lengthwise guide rail; the cross micrometer is arranged on a cross micrometer mounting rack of the second sliding block and locked, the second sliding block is moved to be close to the output end of the optical fiber collimating head, and then the second sliding block and the lengthwise guide rail are locked and fixed;
step 2, 532nm red visible light for indication is turned on through a laser control system, parallel light beams output by an optical fiber collimating head are projected on a cross micrometer positioned at the front end of the laser control system, the reading number of the laser spot boundary falling on the scale of the scale is read by the front cross micrometer, and the reading number in the direction of X, Y is respectively recorded as xR、xL、yR、yLAnd adjusting the position of the cross micrometer in a vertical plane to ensure that: x is the number ofR+xL＝0，yR+yL0, i.e. the intersecting centre of the graduation line of the cross micrometer and the laserThe centers of the light spots coincide to finish the zero setting of the system;
and step 3: turning off the red visible light for indicating by the laser, matching and locking the beam expander component and the beam expander threaded sleeve by fine threads, inserting the beam expander component and the beam expander threaded sleeve into the beam expander mounting sleeve as a whole, and pre-tightening and fixing the beam expander component and the beam expander threaded sleeve by a jackscrew;
and 4, step 4: and opening the red visible light for indication again, after the beam is shaped by the beam expander assembly, projecting the output light beam onto a cross micrometer placed at the front end, calculating the diameter and relative position data of a laser spot according to the scales on the cross micrometer, and realizing the calibration of the beam expander assembly.
The specific implementation of the step 4 comprises the following steps:
step 4.1: the front-view cross micrometer uses the edge of red circular laser spot as standard fine reading, and can read out four scale values x in X, Y directionR1、xL1、yR1、yL1And calculating the position (x) of the center of the circle1，y1) And spot diameter D1；
Adjusting jackscrew at the joint of the beam expander mounting sleeve and the beam expander threaded sleeve, and moving the beam expander component on a vertical plane to enable x to be larger than xR1+xL1＝0，yR1+yL1The center of the light spot is coincident with the center generated by the scale intersection of the cross micrometer;
step 4.2: the cross micrometer is moved to the farthest end of the longitudinal guide rail, and four scale values x in the direction of X, Y are read againR2、xL2、yR2、yL2And calculating the position (x) of the center of the circle2，y2) And spot diameter D2；
Step 4.3: and (4) judging the offset and beam expanding performance of the beam expanding lens assembly based on the circle center position and the spot diameter respectively calculated in the step (4.1) and the step (4.2).
According to the embodiment of the invention, the invention provides the rapid measurement of the central position and the diameter of the light spot passing through the beam expander, and the calibration with low cost, high efficiency and high precision is formed on the input light path at the front end of the galvanometer by accurately calculating the collimation of the light beam and a corresponding adjusting mode by using the measured data.
Drawings
FIG. 1 is a schematic diagram of a vibrating mirror input optical path adjusting device of a powder paving device for selective laser melting according to the present invention.
FIG. 2 is a schematic view of a cross micrometer used in a method for adjusting an input optical path of a vibrating mirror of a powder paving device;
FIG. 3 is a flow chart of the operation of the adjusting method of the input optical path of the vibrating mirror of the powder paving equipment.
Detailed Description
In order to better understand the technical content of the present invention, specific embodiments are described below with reference to the accompanying drawings.
In this disclosure, aspects of the present invention are described with reference to the accompanying drawings, in which a number of illustrative embodiments are shown. Embodiments of the present disclosure are not necessarily intended to include all aspects of the invention. It should be appreciated that the various concepts and embodiments described above, as well as those described in greater detail below, may be implemented in any of numerous ways, as the disclosed concepts and embodiments are not limited to any one implementation. In addition, some aspects of the present disclosure may be used alone, or in any suitable combination with other aspects of the present disclosure.
The input optical path adjusting device of the vibrating mirror of the powder paving equipment for selective laser melting in combination with the embodiments shown in the attached figures 1 and 2 aims to perform high-efficiency and high-precision calibration on the input optical path at the front end of the vibrating mirror by measuring and comparing the central position and the diameter of a light spot behind a beam expander and accurately calculating the collimation of the light beam and a corresponding adjusting mode by using measured data.
The vibrating mirror input optical path adjusting device of the powder paving equipment shown in the example of fig. 1 comprises a longitudinal guide rail 1, a first slide block 2-1 and a second slide block 2-2.
The first sliding block 2-1 and the second sliding block 2-2 are arranged on the longitudinal guide rail and can slide along the guide rail.
As shown in fig. 1, the supporting frame 7 is disposed on the first sliding block 2-1, and the supporting frame 7 and the first sliding block are limited at one end of the longitudinal guide rail at the end position.
A cross micrometer (not shown) for laser spot measurement is mounted on the cross micrometer mounting frame 3 and integrally mounted on the second slider 2-2, and can slide synchronously with the second slider 2-2 on the longitudinal guide rail 1.
Wherein, cross micrometer accessible fastener rigidity fixed mounting is on cross micrometer mounting bracket 3 to its position in the vertical plane is adjusted through cross micrometer mounting bracket 3, moves up and down promptly.
And the optical system is arranged on the support frame 7, and the light outlet end of the optical system faces the cross micrometer and is used for emitting laser beams. Referring to fig. 1, the optical system includes an optical fiber collimating head 8 and an optical fiber head fixing sleeve 9, the optical fiber collimating head 8 is locked inside the optical fiber fixing sleeve 9, and the optical fiber head fixing sleeve 9 is mounted on the supporting frame 7.
With reference to fig. 1, the beam expander assembly 4 is disposed in an outgoing light path of the optical system, and configured to expand and shape the laser beam emitted toward the cross micrometer.
And the optical fine adjustment system is arranged on the support frame 7 and is used for adjusting the position of the beam expander component 4.
Combine figure 1, optics fine setting system includes the beam expanding lens thread bush 5 and the beam expanding lens installation cover 6 of sharing the optical axis, and 4 threaded connection of beam expanding lens subassembly are in the inside and the locking of beam expanding lens thread bush 5, and as whole after beam expanding lens subassembly 4 and the locking of beam expanding lens thread bush 5, insert in the beam expanding lens installation cover and fix through jackscrew pretension, and beam expanding lens installation cover 6 is installed on the support frame 7.
Therefore, the red visible light beam output by the optical system to be calibrated is projected to the cross micrometer scale to form a circular light spot, the cross micrometer scale (division value is 0.1mm) is used for measuring the position of the edge of the light spot on the graduated scale, and the obtained measurement data is used for calculating the central position and the diameter of the light spot and judging whether the light spot is collimated or not. Meanwhile, the four-dimensional adjusting locking structure can be finely adjusted through a fine adjustment system according to measurement parameters, for example, the jackscrew structures are respectively arranged in the X-axis direction and the Y-axis direction to form a four-dimensional adjusting mechanism, and fine calibration is realized.
Preferably, the cross micrometer adopts a flat structure, is used as a light spot information measuring device of the system, and is required to be a flat plate material which has good flatness and is not easy to expand with heat and contract with cold, and the material has obvious color change after receiving the irradiation of the output light path of the optical system to be calibrated. Two strictly vertical scales are arranged on the cross micrometer, the measuring ranges of the scales are both larger than the spot diameter of the output light path, and the division value of the scales is 0.1mm, as shown in figure 2.
With reference to the flow schematic shown in fig. 3, the input optical path adjusting and calibrating method for the galvanometer provided by the invention comprises the following steps:
step 1: the mirror that shakes input light path adjusts calbiration system and builds, include:
step 1.1: the optical fiber collimating head penetrates through the optical fiber head fixing sleeve, and the optical fiber collimating head and the optical fiber head fixing sleeve are locked by a jackscrew;
step 1.2: the assembly assembled in the step 1.1 is connected with a support frame in a locking way;
step 1.3: the assembly assembled in the step 1.2 is connected with a beam expander mounting sleeve in a locking way;
step 1.4: mounting the assembly assembled in the step 1.3 on a first sliding block and locking, and locking and fixing the first sliding block and the lengthwise guide rail; the cross micrometer is arranged on a cross micrometer mounting rack of the second sliding block and locked, the second sliding block is moved to be close to the output end of the optical fiber collimating head, and then the second sliding block and the lengthwise guide rail are locked and fixed;
step 2, 532nm red visible light for indication is turned on through a laser control system, parallel light beams output by an optical fiber collimating head are projected on a cross micrometer positioned at the front end of the laser control system, the reading number of the laser spot boundary falling on the scale of the scale is read by the front cross micrometer, and the reading number in the direction of X, Y is respectively recorded as xR、xL、yR、yLAnd adjusting the position of the cross micrometer in a vertical plane to ensure that: x is the number ofR+xL＝0，yR+yLWhen the scale mark is 0, the intersecting center of the scale mark of the cross micrometer coincides with the circle center of the laser spot, and the system zero setting is finished;
and step 3: turning off the red visible light for indicating by the laser, matching and locking the beam expander component and the beam expander threaded sleeve by fine threads, inserting the beam expander component and the beam expander threaded sleeve into the beam expander mounting sleeve as a whole, and pre-tightening and fixing the beam expander component and the beam expander threaded sleeve by a jackscrew;
and 4, step 4: and opening the red visible light for indication again, after the beam is shaped by the beam expander assembly, projecting the output light beam onto a cross micrometer placed at the front end, calculating the diameter and relative position data of a laser spot according to the scales on the cross micrometer, and realizing the calibration of the beam expander assembly.
The specific implementation of the step 4 comprises the following steps:
step 4.1: the front-view cross micrometer uses the edge of red circular laser spot as standard fine reading, and can read out four scale values x in X, Y directionR1、xL1、yR1、yL1And calculating the position (x) of the center of the circle1，y1) And spot diameter D1；
Adjusting jackscrew at the joint of the beam expander mounting sleeve and the beam expander threaded sleeve, and moving the beam expander component on a vertical plane to enable x to be larger than xR1+xL1＝0，yR1+yL1The center of the light spot is coincident with the center generated by the scale intersection of the cross micrometer;
step 4.2: the cross micrometer is moved to the farthest end of the longitudinal guide rail, and four scale values x in the direction of X, Y are read againR2、xL2、yR2、yL2And calculating the position (x) of the center of the circle2，y2) And spot diameter D2；
Step 4.3: and (4) judging the offset and beam expanding performance of the beam expanding lens assembly based on the circle center position and the spot diameter respectively calculated in the step (4.1) and the step (4.2).
In the step 4.3, comparing the circle center coordinates obtained in the steps 4.1 and 4.2, if the circle center obtained in the step 4.2 is shifted towards the X axis in the forward direction or the reverse direction, adjusting a jackscrew on the beam expander mounting sleeve, and correspondingly shifting the tail of the beam expander assembly towards the X axis in the forward direction or the reverse direction.
In step 4.3, comparing the diameters of the light spots obtained in steps 4.1 and 4.2, if the diameter of the light spot obtained in step 4.2 changes, it is indicated that the collimated light beam input by the laser cannot be expanded into a collimated light beam with a larger aperture in the shaping process of the light beam by the beam expander component, and then the beam expander is prompted to be replaced, and the beam expander is required to be replaced to solve the problem.
Although the present invention has been described with reference to the preferred embodiments, it is not intended to be limited thereto. Those skilled in the art can make various changes and modifications without departing from the spirit and scope of the invention. Therefore, the protection scope of the present invention should be determined by the appended claims.
Claims (8)
1. A powder paving equipment galvanometer input light path adjusting device for selective laser melting is characterized by comprising:
a longitudinal guide rail;
a first slider and a second slider which are provided on the longitudinal guide rail and can slide along the guide rail;
the supporting frame and the first sliding block are limited at one end of the longitudinal guide rail;
the cross micrometer is fixedly arranged on the cross micrometer mounting rack and can be adjusted in position in a vertical plane through the cross micrometer mounting rack; the above-mentioned
The optical system is arranged on the support frame, and the light emitting end of the optical system faces the cross micrometer and is used for emitting laser beams;
the beam expanding lens assembly is arranged in an emergent light path of the optical system and is used for expanding and shaping the laser beam emitted towards the cross micrometer; and
and the optical fine adjustment system is arranged on the support frame and used for adjusting the position of the beam expander component.
2. The tuning device for the input optical path of the galvanometer of a powder-spreading device for selective laser melting as defined in claim 1, wherein the optical system comprises an optical fiber collimating head and an optical fiber fixing sleeve, the optical fiber collimating head is locked in the optical fiber fixing sleeve, and the optical fiber fixing sleeve is mounted on the supporting frame.
3. The input optical path adjusting device for the vibrating mirror of the powder paving equipment for selective laser melting according to claim 1, wherein the optical fine adjustment system comprises a coaxial threaded sleeve of the beam expander and a threaded sleeve of the beam expander, the threaded sleeve of the beam expander is connected and locked in the threaded sleeve of the beam expander, the threaded sleeve of the beam expander is inserted into the threaded sleeve of the beam expander and is fixed by a jackscrew in a pre-tightening manner, and the threaded sleeve of the beam expander is installed on the supporting frame.
4. The device for adjusting the input optical path of the vibrating mirror of the powder paving equipment for selective laser melting according to claim 1, wherein the cross micrometer is flat and generates color change after receiving the irradiation of the output optical path of the optical system, two strictly vertical scales are arranged on the cross micrometer, the measuring range of the scales is larger than the spot diameter of the output optical path, and the division value of the scales is 0.1 mm.
5. The method for adjusting and calibrating the input optical path of the vibrating mirror of the powder paving equipment vibrating mirror input optical path adjusting device for selective laser melting according to claim 1, characterized by comprising the following steps:
step 1: the mirror that shakes input light path adjusts calbiration system and builds, include:
step 1.1: the optical fiber collimating head penetrates through the optical fiber head fixing sleeve, and the optical fiber collimating head and the optical fiber head fixing sleeve are locked by a jackscrew;
the method comprises the following steps: 1.2: the assembly assembled in the step 1.1 is connected with a support frame in a locking way;
step 1.3: the assembly assembled in the step 1.2 is connected with a beam expander mounting sleeve in a locking way;
step 1.4: mounting the assembly assembled in the step 1.3 on a first sliding block and locking, and locking and fixing the first sliding block and the lengthwise guide rail; the cross micrometer is arranged on a cross micrometer mounting rack of the second sliding block and locked, the second sliding block is moved to be close to the output end of the optical fiber collimating head, and then the second sliding block and the lengthwise guide rail are locked and fixed;
step 2, 532nm red visible light for indication is turned on through a laser control system, parallel light beams output by an optical fiber collimating head are projected on a cross micrometer positioned at the front end of the laser control system, the reading number of the laser spot boundary falling on the scale of the scale is read by the front cross micrometer, and the reading number in the direction of X, Y is respectively recorded as xR、xL、yR、yLAnd adjusting the position of the cross micrometer in a vertical plane to ensure that: x is the number ofR+xL＝0，yR+yLWhen the scale mark is 0, the intersecting center of the scale mark of the cross micrometer coincides with the circle center of the laser spot, and the system zero setting is finished;
and step 3: turning off the red visible light for indicating by the laser, matching and locking the beam expander component and the beam expander threaded sleeve by fine threads, inserting the beam expander component and the beam expander threaded sleeve into the beam expander mounting sleeve as a whole, and pre-tightening and fixing the beam expander component and the beam expander threaded sleeve by a jackscrew;
and 4, step 4: and opening the red visible light for indication again, after the beam is shaped by the beam expander assembly, projecting the output light beam onto a cross micrometer placed at the front end, calculating the diameter and relative position data of a laser spot according to the scales on the cross micrometer, and realizing the calibration of the beam expander assembly.
6. The galvanometer input optical path adjustment calibration method according to claim 5, wherein the specific implementation of step 4 comprises:
step 4.1: the front-view cross micrometer uses the edge of red circular laser spot as standard fine reading, and can read out four scale values x in X, Y directionR1、xL1、yR1、yL1And calculating the position (x) of the center of the circle1，y1) And spot diameter D1；
Adjusting jackscrew at the joint of the beam expander mounting sleeve and the beam expander threaded sleeve, and moving the beam expander component on a vertical plane to enable x to be larger than xR1+xL1＝0，yR1+yL1The center of the light spot is coincident with the center generated by the scale intersection of the cross micrometer;
step 4.2: cross shapeThe micrometer is moved to the farthest end of the longitudinal rail, and four scale values x in the direction of X, Y are read againR2、xL2、yR2、yL2And calculating the position (x) of the center of the circle2，y2) And spot diameter D2；
Step 4.3: and (4) judging the offset and beam expanding performance of the beam expanding lens assembly based on the circle center position and the spot diameter respectively calculated in the step (4.1) and the step (4.2).
7. The method for adjusting and calibrating the input optical path of the galvanometer according to claim 6, wherein in step 4.3, comparing the coordinates of the circle center obtained in steps 4.1 and 4.2, if the circle center obtained in step 4.2 is shifted in the forward direction or the reverse direction toward the X axis, the jackscrew on the mounting sleeve of the beam expander is adjusted to shift the tail of the beam expander assembly in the forward direction or the reverse direction toward the X axis correspondingly.
8. The method for adjusting and calibrating the input optical path of the galvanometer according to claim 6, wherein in the step 4.3, compared with the diameters of the light spots obtained in the steps 4.1 and 4.2, if the diameter of the light spot obtained in the step 4.2 changes, it indicates that the collimated light beam input by the laser cannot be expanded into a collimated light beam with a required larger aperture in the process of shaping the light beam by the beam expander assembly, and then the beam expander is prompted to be replaced.
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