CN114075657B - Method for improving air tightness of resin-based composite material forming member - Google Patents
Method for improving air tightness of resin-based composite material forming member Download PDFInfo
- Publication number
- CN114075657B CN114075657B CN202111300027.9A CN202111300027A CN114075657B CN 114075657 B CN114075657 B CN 114075657B CN 202111300027 A CN202111300027 A CN 202111300027A CN 114075657 B CN114075657 B CN 114075657B
- Authority
- CN
- China
- Prior art keywords
- composite material
- resin
- vacuum chamber
- based composite
- magnetron sputtering
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/35—Sputtering by application of a magnetic field, e.g. magnetron sputtering
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/02—Pretreatment of the material to be coated
- C23C14/021—Cleaning or etching treatments
- C23C14/022—Cleaning or etching treatments by means of bombardment with energetic particles or radiation
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/14—Metallic material, boron or silicon
- C23C14/20—Metallic material, boron or silicon on organic substrates
- C23C14/205—Metallic material, boron or silicon on organic substrates by cathodic sputtering
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/54—Controlling or regulating the coating process
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
Abstract
The invention belongs to the field of composite material preparation, and particularly relates to a method for improving the air tightness of a resin-based composite material forming member, which comprises the steps of pretreatment of the forming member, hanging and installing of the forming member in a vacuum chamber, vacuumizing of the vacuum chamber, activation of plasma, deposition of a metal coating and taking out of the forming member; the process improves the air tightness, and the metal is any one of Al, ti, cr and Ni, so that the outgassing of the resin matrix composite material is obviously reduced, and the corrosion resistance of the resin matrix composite material to halogen medium is greatly improved. The bonding strength between the large-thickness metal coating and the matrix layer of the composite material member is larger than 1MPa through the surface plasma activation of the resin-based composite material and the low-temperature deposition of the metal coating by the physical vapor deposition technology, so that the reliability of the resin-based composite material used under special working conditions can be improved.
Description
Technical Field
The invention belongs to the field of composite material preparation, and particularly relates to a method for improving the air tightness of a resin-based composite material forming member.
Background
The composite material cured by the fiber reinforced resin has excellent performances of high strength, strong toughness, light weight, fatigue resistance and the like, and is widely applied in various fields. However, with the development of multifunction of the novel component, the vacuum tightness of the resin-based composite material is lower than that of metal materials such as stainless steel and aluminum due to the forming mode and the inherent characteristics of the resin-based composite material, and the resin-based composite material is used in some special environments to affect the performance of the whole component and even cause major accidents. The vacuum air tightness of the resin-based composite material is effectively improved, and the method is an important measure for widening the application field of the composite material.
The vacuum airtightness of the material mainly comprises two types of material deflation and gas leakage, wherein the deflation refers to gas release caused by evaporation, sublimation, reaction and degradation of the material under a vacuum condition; the leakage is mainly the leakage of gas generated by the material forming component and parts thereof. In order to improve the vacuum airtightness of the resin-based composite material and reduce the air release rate and the air leakage rate and the adverse effects caused by the air release rate and the air leakage rate, numerous researches are carried out in the industry, such as systematic measures of composite material system and structure optimization, process route and method optimization, process control, use maintenance optimization and the like, and the airtightness of the resin-based composite material can be effectively improved.
At the present stage, with the increasing use field of fiber reinforced resin matrix cured composite materials, the use environment of complex components of the molded resin matrix cured composite materials is increasingly severe, such as the displacement corrosion of halogen-containing organic medium environment, the corrosion of atomic oxygen environment and the like, and the severe use environment often destroys the air tightness of the molded parts prepared by adopting the technical means. However, in the process of molding the resin-based molding member, although the airtightness is further improved by improving a resin system, a molding method and process parameters, reducing surface damage and the like, these improvement means are mostly based on the traditional methods such as materials or molding processing, and the airtightness of the resin-based composite material can be improved to a certain extent, but the resin-based composite material cannot well resist the corrosion of halogen-containing gas medium, and the application field is limited. How to further improve the air tightness, the corrosion resistance and the like after the resin matrix composite material member is formed is suitable for being used in special environments, and the technical method is not reported.
Disclosure of Invention
The invention aims to provide a method for improving the air tightness of a resin-based composite material forming member, which can resist the corrosion of halogen-containing gas media while improving the air tightness and meet the use requirements of special environments.
The technical scheme of the invention is as follows:
a method for improving the air tightness of a resin-based composite material forming component comprises the following steps:
step 1) pre-treating a forming member;
step 2), hanging the formed member in a vacuum chamber;
step 3), vacuumizing a vacuum chamber;
step 4), activating plasma;
step 5), depositing a metal coating;
step 6), taking out the formed member;
in the step 5), the metal coating is deposited by selecting any one of Al, ti, cr and Ni.
And 2) hanging the formed member in a vacuum chamber, wherein the formed member is hung by adopting a hanging structure, and the hanging structure comprises 2-6 connecting screw rods of which the upper ends are fixed at the top of the vacuum chamber, a connecting flange connected with the lower end of the connecting screw rod and a limiting nut arranged below the connecting flange and in threaded fit with the connecting screw rod.
The forming component is a cylindrical component, a columnar magnetron sputtering target is arranged in the forming component, and the forming component and the columnar magnetron sputtering target are coaxially arranged.
When the connecting flange moves up and down relative to the position of the connecting screw rod through threaded fit, the connecting flange drives the cylindrical component to change relative to the position inside the vacuum chamber, and the cylindrical component is locked and fixed through the limiting nut when adjusted to a required position.
In the step 1), the formed member is degreased and cleaned by absolute ethyl alcohol, and then is dried by dry gas.
In the step 3), the vacuum chamber is closed, and vacuum extraction is started until the background vacuum degree of the vacuum chamber is better than 3 multiplied by 10 - 3 Pa。
In the step 4), working gas is conveyed into the vacuum chamber, the vacuum degree is controlled to be 0.1-10Pa, and plasma activation is carried out.
The working gas medium is argon or oxygen.
The plasma activation adopts a radio frequency, pulse and other glow discharge mode or a Hall discharge mode, and the activation time is 30-100 minutes.
In the step 5), the vacuum degree is controlled to be 0.3-0.5Pa, the magnetron sputtering target is started, the current is controlled, and the metal coating deposition is carried out.
The deposition mode is direct current magnetron sputtering or pulse magnetron sputtering.
The coating thickness was 12-15 microns.
The discharge power density of the magnetron sputtering target is 2-4w/cm 2 。
When the forming component is a glass fiber cyanate ester resin-based composite material, a metal Ni coating with the thickness of 15 micrometers is deposited on the surface of the forming component, the distance between the surface of the forming component and a nickel metal target is 100mm, the working gas is argon, plasma activation is carried out in a Hall plasma discharge mode, the discharge voltage is 1000V, the duty ratio is 10%, and the activation time is 30 minutes.
When the forming component is a carbon fiber epoxy resin-based composite material, a metal Al coating with the thickness of 12 micrometers is deposited on the surface of the forming component, a cylindrical magnetron sputtering metal aluminum target material with the outer diameter phi of 40 millimeters and the length of 1 meter is adopted, an internal magnetic core rotates, the forming component is a cylindrical component made of the carbon fiber epoxy resin-based composite material, the inner diameter phi of the cylindrical component is 100 millimeters and the length of the cylindrical component is 500 millimeters, plasma activation is carried out in a pulse plasma glow discharge mode, wherein a metal aluminum target is an anode, a vacuum chamber is a cathode, the discharge voltage is 1000V, the duty ratio is 10 percent, and the activation time is 30 minutes.
The invention has the following remarkable effects:
the core of the method is that a metal coating with high bonding strength and large thickness is deposited on the surface of a material, the air tightness is improved by the process, any one of Al, ti, cr and Ni is selected as the metal, the outgassing of the resin-based composite material is obviously reduced, and the corrosion resistance of the resin-based composite material to halogen media is greatly improved.
The bonding strength of the large-thickness metal coating and the matrix layer of the composite material member is larger than 1MPa through the surface plasma activation of the resin-based composite material and the low-temperature deposition of the metal coating by the physical vapor deposition technology, so that the reliability of the resin-based composite material used under special working conditions can be improved.
Through the deposition of the large-thickness metalized coating and the passivation film formed on the surface, the corrosion resistance of the resin-based composite material to halogen-containing media can be improved.
The physical vapor deposition technology is adopted, and various types of metal coatings can be prepared simply, conveniently and environmentally.
Drawings
FIG. 1 is a flow chart of a method for improving the airtightness of a resin-based composite material molding member;
FIG. 2 is a schematic view of a hanging structure;
in the figure: 1. connecting a nut; 2. connecting a screw rod; 3. a connecting flange; 4. a limit nut; 5. a columnar magnetron sputtering target; 6. a fixing ring; 7. a cylindrical member; 8. a vacuum chamber.
Detailed Description
The invention is further illustrated by the accompanying drawings and the detailed description.
The method is implemented by the steps shown in fig. 1.
The composite material molding member is a resin-based curing molding member;
and (3) degreasing and cleaning the component by using absolute ethyl alcohol, and then drying the component by using dry gas.
The composite material molding member is installed in the vacuum chamber through a hanging structure.
As shown in fig. 2, the composite material molded member in this embodiment is a cylindrical member 7, and a fixing ring 6 is attached to the outside of the cylindrical member 7, and the cylindrical member 7 is fixed to the connecting flange 3 inside the vacuum chamber 8 by the fixing ring 6.
Two connecting screw rods 2 are arranged at the top of the vacuum chamber 8, the lower ends of the connecting screw rods are in threaded connection with the connecting flange 3, the height position of the connecting flange 3 is adjusted and controlled through a limiting nut 4 which is positioned below the connecting flange 3 and in threaded connection with the connecting screw rods 2, a columnar magnetron sputtering target 5 is arranged inside the cylindrical component 7, and the columnar magnetron sputtering target and the cylindrical component are coaxially arranged.
When the connecting flange 3 moves up and down relative to the connecting screw rod 2 through threaded fit, the connecting flange 3 drives the cylindrical component 7 to change relative to the position inside the vacuum chamber 8, and the cylindrical component is locked and fixed through the limiting nut 4 when adjusted to a required position.
Closing the vacuum chamber, and starting vacuum extraction until the background vacuum degree of the vacuum chamber is better than 3 multiplied by 10 -3 Pa；
Delivering working gas into the vacuum chamber, controlling the vacuum degree within a preset range (0.1-10 Pa), and activating plasma;
the working gas medium for plasma activation can be argon or oxygen;
the plasma activation adopts a radio frequency, pulse glow discharge mode or a Hall discharge mode, and the activation time is not less than 30 minutes
Conveying working gas into a vacuum chamber, controlling the vacuum degree within a preset range (0.3-0.5 Pa), starting a magnetron sputtering target, controlling the current, and depositing a metal coating;
the magnetron sputtering deposition mode is direct current magnetron sputtering or pulse magnetron sputtering.
The thickness of the metal coating should be greater than 10 microns.
The discharge power density of the magnetron sputtering target is not suitable to be too large (2-4 w/cm) 2 ) Excessive temperature rise should be avoided as much as possible.
The deposition time is set (in the known art) according to the deposition rate of the coating and the set coating thickness, which is 12-15 microns. When the set time is reached, closing the magnetron sputtering power supply to finish the coating deposition;
And after the deposition of the coating is finished, discharging gas into the vacuum chamber, and opening the vacuum chamber to take the workpiece.
Example 1: glass fiber cyanate resin-based composite material
A metal nickel coating with the thickness of 15 microns is deposited on the surface of a forming flat plate member by adopting a planar direct-current magnetron sputtering coating technology, so that the air tightness is effectively improved, and the substitutional corrosion of fluorine is prevented, wherein a rectangular planar magnetron sputtering target is adopted as a nickel magnetron sputtering target, and the size of the sputtering target is 100mm multiplied by 600mm.
(1) The method comprises the following steps of pretreating a glass fiber cyanate ester resin matrix composite molding flat plate component, and specifically comprises the following steps: and (3) degreasing and degreasing the pipe fitting by using absolute ethyl alcohol, and then drying the pipe fitting by using dry gas.
(2) Mounting the cleaned forming flat plate component on a workpiece in a vacuum chamber, wherein the distance between the surface of the component and a nickel metal target is 100mm;
(3) Closing the vacuum chamber, and starting vacuum extraction until the background vacuum degree of the vacuum chamber is better than 3 x 10 < -3 > Pa;
(4) Conveying working gas argon into a vacuum chamber, controlling the vacuum degree to be 0.1-0.5Pa, and activating plasma by adopting a Hall plasma discharge mode, wherein the discharge voltage is 1000V, the duty ratio is 10%, and the activation time is 30 minutes;
(5) Conveying working gas argon into the vacuum chamber, adjusting a pumping speed baffle and a gas feeding mode to control the pressure of the working gas in the vacuum chamber to be uniform, controlling the vacuum degree to be 0.3-0.5Pa, starting a power supply of the metal nickel magnetron sputtering target, controlling the current to be 3 amperes, and depositing a metal coating;
(6) Setting the deposition time for 3 hours according to the deposition rate of the coating, closing a magnetron sputtering power supply after the set time is reached, completing the deposition of the coating, depositing a metal nickel coating on the glass fiber cyanate resin matrix composite molding flat component, wherein the thickness of the metal nickel coating is 15 micrometers, and the bonding strength of the coating is 3MPa;
(7) And after the deposition of the coating is finished, exhausting gas to the vacuum chamber, and opening the vacuum chamber to take the workpiece.
Example 2: carbon fiber epoxy resin based composite material
According to the embodiment, the metal aluminum coating with the thickness of 12 microns is deposited on the inner wall of the formed cylindrical component by adopting the columnar magnetron sputtering, so that the air tightness is effectively improved, and the substitutional corrosion of fluorine elements is prevented. The realization method mainly comprises the following steps:
(1) The method comprises the following steps of pretreating a molded composite material cylindrical component, and specifically comprises the following steps: the method is characterized in that absolute ethyl alcohol is adopted to perform degreasing and degreasing cleaning on the pipe fitting, the inner wall of the pipe fitting is particularly scrubbed repeatedly, and then dry gas is adopted to blow the pipe fitting.
(2) Mounting the cleaned composite material cylindrical member on a workpiece hanging mechanism in a vacuum chamber, placing a columnar magnetron sputtering target in the composite material cylindrical member, and ensuring the composite material cylindrical member to be coaxial and concentric with the composite material cylindrical member, as shown in FIG. 2; the outer diameter phi of the columnar magnetron sputtering metal aluminum target material is 40 mm, the length is 1m, and the internal magnetic core rotates; the inner diameter phi of the carbon fiber epoxy resin matrix composite tubular component is 100mm, and the length is 500 mm;
(3) Closing the vacuum chamber, and starting vacuum extraction until the background vacuum degree of the vacuum chamber is better than 3 multiplied by 10 -3 Pa；
(4) And (2) conveying working gas argon into a vacuum chamber, controlling the vacuum degree to be 2-5Pa, and activating plasma by adopting a pulse equal glow discharge mode, wherein a metal aluminum target is an anode, the vacuum chamber is a cathode, the discharge voltage is 1000V, the duty ratio is 10%, and the activation time is 30 minutes.
(5) Conveying working gas argon into a vacuum chamber, adjusting a pumping speed baffle and a gas feeding mode to control the pressure of the working gas on the inner wall of the composite material cylindrical member in the vacuum chamber to be uniform, controlling the vacuum degree to be 0.3-0.5Pa, starting a power supply of a magnetron sputtering target and controlling the current to be 3 amperes, and depositing a metal coating;
(6) Setting the deposition time for 4 hours according to the deposition rate of the coating, closing a magnetron sputtering power supply after the set time is reached, completing the deposition of the coating, depositing the metal aluminum coating on the inner wall of the pipe fitting, wherein the thickness of the coating is 12 micrometers, and the bonding strength of the coating is 1MPa;
(7) And after the deposition of the coating is finished, exhausting gas to the vacuum chamber, and opening the vacuum chamber to take the workpiece.
Claims (8)
1. A method for improving the air tightness of a resin-based composite material forming component is characterized by comprising the following steps:
step 1) pre-treating a forming member;
step 2), hanging the formed member in a vacuum chamber;
step 3), vacuumizing a vacuum chamber;
step 4), activating plasma;
step 5), depositing a metal coating;
step 6), taking out the formed member;
the forming component is a cylindrical component (7), a columnar magnetron sputtering target (5) is arranged in the forming component, and the forming component and the columnar magnetron sputtering target are coaxially arranged;
in the step 5), any one of Al, ti, cr and Ni is selected as the metal in the deposited metal coating;
in the step 5), controlling the vacuum degree to be 0.3-0.5Pa, starting a magnetron sputtering target and controlling the current to deposit a metal coating;
the deposition mode is direct current magnetron sputtering or pulse magnetron sputtering;
the thickness of the coating is 12-15 microns;
the discharge power density of the magnetron sputtering target is 2-4w/cm 2 ；
Step 2) hanging the formed member in a vacuum chamber, wherein the formed member is hung by adopting a hanging structure, and the hanging structure comprises 2-6 connecting screw rods (2) with the upper ends fixed on the top of the vacuum chamber (8), a connecting flange (3) connected with the lower end of the connecting screw rods (2), and a limit nut (4) which is arranged below the connecting flange (3) and is in threaded fit with the connecting screw rods (2);
when the connecting flange (3) moves up and down relative to the position of the connecting screw rod (2) through threaded fit, the connecting flange (3) drives the cylindrical component (7) to change relative to the position inside the vacuum chamber (8), and the cylindrical component is locked and fixed through the limiting nut (4) when adjusted to a required position.
2. The method for improving the airtightness of the resin-based composite material molded member according to claim 1, wherein: in the step 1), the formed member is degreased and cleaned by absolute ethyl alcohol, and then is dried by dry gas.
3. The method for improving the airtightness of the resin-based composite material molded member according to claim 1, wherein: in the step 3), the vacuum chamber is closed, and vacuum extraction is started until the background vacuum degree of the vacuum chamber is better than 3 multiplied by 10 -3 Pa。
4. The method for improving the airtightness of the resin-based composite molded member according to claim 1, wherein: in the step 4), working gas is conveyed into the vacuum chamber, the vacuum degree is controlled to be 0.1-10Pa, and plasma activation is carried out.
5. The method for improving the airtightness of the resin-based composite material molded member according to claim 4, wherein: the working gas medium is argon or oxygen.
6. The method for improving the airtightness of the resin-based composite material molded member according to claim 5, wherein: the plasma activation adopts a glow discharge mode or a Hall discharge mode such as radio frequency and pulse, and the activation time is 30-100 minutes.
7. The method for improving the airtightness of the resin-based composite material molded member according to claim 1, wherein: when the formed component is a glass fiber cyanate ester resin matrix composite, a metal Ni coating with the thickness of 15 micrometers is deposited on the surface of the formed component, the distance between the surface of the component and a nickel metal target is 100mm, the working gas is argon, plasma activation is carried out in a Hall plasma discharge mode, the discharge voltage is 1000V, the duty ratio is 10%, and the activation time is 30 minutes.
8. The method for improving the airtightness of the resin-based composite material molded member according to claim 1, wherein: when the forming member is a carbon fiber epoxy resin-based composite material, a metal Al coating with the thickness of 12 microns is deposited on the surface of the forming member, a cylindrical magnetron sputtering metal aluminum target material is adopted, the outer diameter phi is 40 mm, the length is 1m, an internal magnetic core rotates, the forming member is made into a cylindrical member, the inner diameter phi of the cylindrical member is 100mm, the length is 500 mm, plasma activation is carried out in a pulse glow discharge mode, wherein the metal aluminum target is an anode, a vacuum chamber is a cathode, the discharge voltage is 1000V, the duty ratio is 10%, and the activation time is 30 minutes.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202111300027.9A CN114075657B (en) | 2021-11-04 | 2021-11-04 | Method for improving air tightness of resin-based composite material forming member |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202111300027.9A CN114075657B (en) | 2021-11-04 | 2021-11-04 | Method for improving air tightness of resin-based composite material forming member |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN114075657A CN114075657A (en) | 2022-02-22 |
| CN114075657B true CN114075657B (en) | 2023-01-24 |
Family
ID=80283613
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202111300027.9A Active CN114075657B (en) | 2021-11-04 | 2021-11-04 | Method for improving air tightness of resin-based composite material forming member |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN114075657B (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116023045B (en) * | 2022-12-22 | 2024-07-09 | 湖北华中长江光电科技有限公司 | Optical fiber surface coating system and coating method |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4732147B2 (en) * | 2005-11-21 | 2011-07-27 | 豊田合成株式会社 | Resin product, method for producing the same, and method for forming metal film |
| JP4776033B2 (en) * | 2006-07-05 | 2011-09-21 | 柿原工業株式会社 | Method for producing decorative plated product using resin conductivity by sputtering |
| CN102152541B (en) * | 2010-12-10 | 2013-11-20 | 厦门建霖工业有限公司 | Method for preparing composite interlayer coating film on surface of engineering plastics |
| CN110846620A (en) * | 2019-11-13 | 2020-02-28 | 上海卫星装备研究所 | Surface metallization method for flexible antenna made of resin-based carbon fiber composite material |
| CN113278931A (en) * | 2020-02-20 | 2021-08-20 | 核工业理化工程研究院 | Method for thickening magnetron sputtering coating on surface of composite material |
-
2021
- 2021-11-04 CN CN202111300027.9A patent/CN114075657B/en active Active
Also Published As
| Publication number | Publication date |
|---|---|
| CN114075657A (en) | 2022-02-22 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN106521440B (en) | A method of high adhesion force aluminizer is prepared using magnetron sputtering method | |
| CN114075657B (en) | Method for improving air tightness of resin-based composite material forming member | |
| CN103360122B (en) | Method for improving metalized surface performance of ceramic workpiece | |
| CN109020625A (en) | A kind of preparation method of antioxidant coating | |
| CN106699228A (en) | Low-cost tantalum carbide coating preparation method | |
| CN113061844B (en) | Preparation process of superhard high-temperature-resistant Ta-C coating | |
| CN112410728B (en) | CrB with high Cr content 2 Preparation process of-Cr coating | |
| CN103436837A (en) | Improved rotary target spraying system | |
| CN109055901A (en) | A kind of device and technique improving hard coat and substrate binding force | |
| CN112831767A (en) | Composite processing method for metallized film on surface of composite material | |
| CN107858684B (en) | Metal-diamond-like composite coating, preparation method and application thereof and coated tool | |
| CN113684453A (en) | Film with low secondary electron emission coefficient and preparation method thereof | |
| CN114836715A (en) | Metal surface Cr/CrN/CrCN/Cr-DLC multilayer composite self-lubricating film and preparation method thereof | |
| CN101294284A (en) | Ablation-resistant fatigue-resistant plasma surface recombination reinforcing method | |
| CN112501571B (en) | High-temperature-resistant nano multilayer self-lubricating coating for die-casting core pulling and preparation method thereof | |
| EP3088560B1 (en) | Vacuum plasma sprayed coating including oxide dispersions | |
| CN113265642A (en) | Method for depositing diamond-like carbon film on inner wall surface of metal cylinder (or tube) with large length-diameter ratio | |
| CN110923650B (en) | DLC coating and preparation method thereof | |
| CN108396306A (en) | A kind of method for the diamond-like carbon composite film that low temperature depositing hardness is controllable | |
| CN109778119B (en) | Ni-CrSiN wear-resistant corrosion-resistant coating and preparation method thereof | |
| CN113278931A (en) | Method for thickening magnetron sputtering coating on surface of composite material | |
| CN113293355B (en) | AlCrN/AlScN nano-composite piezoelectric coating for intelligent bolts and preparation method thereof | |
| CN116219374A (en) | Device and method for improving surface finish and film-based bonding strength of inner wall coating of pipe barrel | |
| CN114293148A (en) | Titanium alloy surface repair and strengthening functional coating integrated coating material and preparation method and application thereof | |
| CN213538086U (en) | Device for depositing hard coating in metal tube with large length-diameter ratio |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |