CN113794400A - Laminated piezoelectric ceramic high-speed deflection mirror structure and manufacturing process thereof - Google Patents
Laminated piezoelectric ceramic high-speed deflection mirror structure and manufacturing process thereof Download PDFInfo
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- 239000000919 ceramic Substances 0.000 title claims abstract description 49
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 15
- 238000000034 method Methods 0.000 claims abstract description 6
- 230000008569 process Effects 0.000 claims abstract description 4
- 238000005245 sintering Methods 0.000 claims description 22
- 239000000463 material Substances 0.000 claims description 14
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 claims description 9
- 238000007639 printing Methods 0.000 claims description 9
- 238000007650 screen-printing Methods 0.000 claims description 9
- 229910052709 silver Inorganic materials 0.000 claims description 9
- 239000004332 silver Substances 0.000 claims description 9
- 238000000462 isostatic pressing Methods 0.000 claims description 6
- SWELZOZIOHGSPA-UHFFFAOYSA-N palladium silver Chemical compound [Pd].[Ag] SWELZOZIOHGSPA-UHFFFAOYSA-N 0.000 claims description 6
- 239000011810 insulating material Substances 0.000 claims description 5
- 229910010293 ceramic material Inorganic materials 0.000 claims description 3
- 238000005520 cutting process Methods 0.000 claims description 3
- 238000007731 hot pressing Methods 0.000 claims description 3
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 claims description 3
- RVTZCBVAJQQJTK-UHFFFAOYSA-N oxygen(2-);zirconium(4+) Chemical compound [O-2].[O-2].[Zr+4] RVTZCBVAJQQJTK-UHFFFAOYSA-N 0.000 claims description 3
- 239000012466 permeate Substances 0.000 claims description 3
- 229910001928 zirconium oxide Inorganic materials 0.000 claims description 3
- 230000009471 action Effects 0.000 abstract description 5
- 238000010344 co-firing Methods 0.000 abstract description 2
- 230000007547 defect Effects 0.000 abstract description 2
- 230000000694 effects Effects 0.000 description 12
- 238000006073 displacement reaction Methods 0.000 description 9
- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 description 4
- 238000010586 diagram Methods 0.000 description 4
- 230000006698 induction Effects 0.000 description 4
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 2
- 230000008859 change Effects 0.000 description 2
- 238000009434 installation Methods 0.000 description 2
- 230000004044 response Effects 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
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Abstract
The invention discloses a laminated piezoelectric ceramic high-speed deflection mirror structure and a manufacturing process thereof. The existing oscillating mirror structure is composed of ceramic elements and a mechanical structure, a plurality of components are formed, the assembly process is complex, the inherent frequency of the mechanical components is very low, the working speed of the oscillating mirror is within millisecond time, and the existing oscillating mirror structure is large in size, heavy in weight and incapable of meeting the requirement of high-speed operation. The invention abandons mechanical elements, has no spring tension, has an all-ceramic integrated co-firing structure, and removes the defect of low action frequency of mechanical parts, so that the deflection mirror structure can work and respond at microsecond-level speed.
Description
Technical Field
The invention belongs to the technical field of piezoelectric ceramic deflection mirrors, and particularly relates to a laminated piezoelectric ceramic high-speed deflection mirror structure and a manufacturing process thereof.
Background
The stacked piezoelectric ceramic is formed by laminating, bonding and co-firing piezoelectric ceramic substrates, and when a voltage difference exists between two ends of the stacked piezoelectric ceramic, an inverse piezoelectric effect occurs, and the stacked piezoelectric ceramic deforms.
The existing oscillating mirror structure is composed of ceramic elements and a mechanical structure, so that the existing oscillating mirror structure has the disadvantages of many components, complex assembly process, very low natural frequency of mechanical components, millisecond-level time of working speed of the oscillating mirror, large size, heavy weight and incapability of meeting the requirement of high-speed operation. Therefore, the laminated piezoelectric ceramic high-speed deflection mirror structure has the advantages of no mechanical element, no spring tension, no installation error, small overall size, simplicity in installation and debugging, high rigidity, good manufacturability, easiness in integrated use and large response speed range, and can be used as an independent element.
Disclosure of Invention
In view of the problems raised by the above background art, the present invention is directed to: aims to provide a laminated piezoelectric ceramic high-speed deflection mirror structure and a manufacturing process thereof.
In order to achieve the technical purpose, the technical scheme adopted by the invention is as follows:
the laminated piezoelectric ceramic high-speed deflection mirror structure comprises an upper insulating layer, a lower insulating layer, a positive electrode integral layer, a negative electrode integral layer and a piezoelectric medium layer, wherein the positive electrode integral layer, the negative electrode integral layer and the piezoelectric medium layer are positioned between the upper insulating layer and the lower insulating layer;
the positive electrode integral layer comprises four groups of mutually independent first positive electrode layers, second positive electrode layers, third positive electrode layers and fourth positive electrode layers with the same shape, and the outer circumferences of the first positive electrode layers, the second positive electrode layers, the third positive electrode layers and the fourth positive electrode layers are all provided with first lugs;
the negative electrode integral layer comprises four groups of mutually independent first negative electrode layers, second negative electrode layers, third negative electrode layers and fourth negative electrode layers with the same shape, and second lugs are arranged on the outer circumferences of the first negative electrode layers, the second negative electrode layers, the third negative electrode layers and the fourth negative electrode layers;
the piezoelectric medium layer is provided with four mutually independent induction areas, and the shape of each induction area is matched with the shape of the first positive electrode layer or the first negative electrode layer;
the angle interval between the first bump and the second bump is forty-five degrees, the first bumps in the first positive electrode layer are sintered into a first external positive electrode layer in parallel, the second bumps in the first negative electrode layer are parallelly sintered into a first external negative electrode layer, the first bumps in the second positive electrode layer are parallelly sintered into a second external positive electrode layer, the second bumps in the second negative electrode layer are parallelly sintered into a second external negative electrode layer, the first bumps in the third positive electrode layer are parallelly sintered into a third external positive electrode layer, the second bumps in the third negative electrode layer are parallelly sintered into a third external negative electrode layer, the first bumps in the fourth positive electrode layer are parallelly sintered into a fourth external positive electrode layer, the second bumps in the fourth negative electrode layer are sintered into a fourth external negative electrode layer in parallel;
the first positive electrode layer and the first negative electrode layer are respectively positioned at two sides of the piezoelectric medium layer and are superposed and corresponding in position, and the first positive electrode layer, the first negative electrode layer and the piezoelectric medium layer form an independent first laminated piezoelectric structure; the second positive electrode layer and the second negative electrode layer are respectively positioned on two sides of the piezoelectric medium layer and are also superposed and corresponding in position, and the second positive electrode layer, the second negative electrode layer and the piezoelectric medium layer form an independent second laminated piezoelectric structure; the third positive electrode layer and the third negative electrode layer are respectively positioned on two sides of the piezoelectric medium layer and are also superposed and corresponding in position, and the third positive electrode layer, the third negative electrode layer and the piezoelectric medium layer form an independent third laminated piezoelectric structure; the fourth positive electrode layer and the fourth negative electrode layer are respectively located on two sides of the piezoelectric medium layer and are also coincided and corresponding in position, the fourth positive electrode layer, the fourth negative electrode layer and the piezoelectric medium layer form an independent fourth laminated piezoelectric structure, and the first laminated piezoelectric structure, the second laminated piezoelectric structure, the third laminated piezoelectric structure and the fourth laminated piezoelectric structure are distributed at intervals of ninety degrees and are mutually independent.
Further, the external shape of the laminated piezoelectric ceramic high-speed deflection mirror structure is one of an annular structure, an outer inner ring structure or an outer inner structure, and the structural design enables the laminated piezoelectric ceramic high-speed deflection mirror structure to be processed and manufactured more easily and can be adapted to different use requirements.
Further, the upper insulating layer is made of a slightly deformable soft insulating material, and the lower insulating layer is made of an aluminum oxide or zirconium oxide material, so that the structure design is that the upper insulating layer is formed by the soft insulating material to provide insulating capability and deformation, and the lower insulating layer is formed by the aluminum oxide or zirconium oxide material to provide supporting capability and insulating capability.
And further limiting, the number of the stacked piezoelectric medium layers is more than or equal to ninety layers, and the structural design enables enough piezoelectric medium layers to generate an inverse piezoelectric effect, and small deformation is accumulated to output enough displacement.
The invention also provides a manufacturing process of the laminated piezoelectric ceramic high-speed deflection mirror structure, which comprises the following steps:
s1, selecting a piezoelectric ceramic material film with proper thickness as a piezoelectric medium layer;
s2, printing a silver palladium material on one side of the piezoelectric medium layer through screen printing to form a positive electrode integral layer;
s3, bonding another laminated dielectric layer on the other side of the positive electrode integral layer by hot pressing;
s4, printing a silver palladium material on the other side of the next piezoelectric medium layer through screen printing to form a negative electrode integral layer;
s5, repeating the second step to the fourth step to enable the stacking layer number of the piezoelectric medium layers to be more than or equal to ninety layers, and then carrying out warm isostatic pressing;
s6, cutting the combined body into a required shape after warm isostatic pressing is finished;
s7, placing the combined body with the specific shape into a high-temperature furnace, and sintering according to a certain temperature gradient;
s8, screen-printing silver paste on the first bumps and the second bumps by using a screen, and performing high-temperature sintering to enable the silver paste to permeate into the combination body, wherein the corresponding first bumps are connected in parallel, and the corresponding second bumps are connected in parallel to form corresponding external electrode layers;
and S9, printing a wiring electrode on the corresponding external electrode layer by adopting a silver material after the second sintering is finished, and connecting the wiring electrode with a driving voltage.
The invention has the beneficial effects that:
1. the laminated piezoelectric ceramic high-speed deflection mirror structure has no mechanical structure, the displacement control of the laminated piezoelectric ceramic is realized by electric control, a mechanical part in the existing deflection mirror structure is abandoned, and the defect of low action frequency of mechanical parts is overcome, so that the laminated piezoelectric ceramic high-speed deflection mirror structure can work and respond at the microsecond level, and the deflection action of the laminated piezoelectric ceramic high-speed deflection mirror structure is controlled by driving voltage, the swing speed is high, and the laminated piezoelectric ceramic high-speed deflection mirror structure can swing at the microsecond level;
2. the structure is simple and compact, no mechanical parts are needed, no gap exists, the appearance is small, the high-frequency response is fast, and the device can be used as an independent element.
Drawings
The invention is further illustrated by the non-limiting examples given in the accompanying drawings;
FIG. 1 is an exploded view of an embodiment of the stacked piezoelectric ceramic high-speed deflecting mirror structure and its manufacturing process according to the present invention;
FIG. 2 is a schematic diagram of a first structure of an embodiment of the stacked piezoelectric ceramic high-speed deflecting mirror structure and its manufacturing process according to the present invention;
FIG. 3 is a schematic diagram of a second structure of an embodiment of the stacked piezoelectric ceramic high-speed deflecting mirror structure and its manufacturing process according to the present invention;
FIG. 4 is a diagram of an actual wiring driving method in an embodiment of the stacked piezoelectric ceramic high-speed deflecting mirror structure and the manufacturing process thereof according to the present invention;
FIG. 5 is a simplified circuit diagram of an embodiment of the stacked piezoelectric ceramic high-speed deflecting mirror structure and its manufacturing process according to the present invention;
the main element symbols are as follows:
an upper insulating layer 1, a positive electrode integral layer 2, a piezoelectric medium layer 3, a negative electrode integral layer 4 and a lower insulating layer 8;
a first positive electrode layer 2-1, a second positive electrode layer 2-2, a third positive electrode layer 2-3, a fourth positive electrode layer 2-4;
a first negative electrode layer 4-1, a second negative electrode layer 4-2, a third negative electrode layer 4-3, a fourth negative electrode layer 4-4;
a first external positive electrode layer 7-1, a second external positive electrode layer 7-2, a third external positive electrode layer 7-3, a fourth external positive electrode layer 7-4;
a first external negative electrode layer 9-1, a second external negative electrode layer 9-2, a third external negative electrode layer 9-3, a fourth external negative electrode layer 9-4;
the piezoelectric structure comprises a first laminated piezoelectric structure F-1, a second laminated piezoelectric structure F-2, a third laminated piezoelectric structure F-3 and a fourth laminated piezoelectric structure F-4.
Detailed Description
In order that those skilled in the art can better understand the present invention, the following technical solutions are further described with reference to the accompanying drawings and examples.
As shown in fig. 1-5, the stacked piezoelectric ceramic high-speed deflection mirror structure of the present invention comprises an upper insulating layer 1, a lower insulating layer 8, and a positive electrode integral layer 2, a negative electrode integral layer 4 and a piezoelectric medium layer 3 which are located between the upper insulating layer 1 and the lower insulating layer 8, wherein the positive electrode integral layer 2 and the negative electrode integral layer 4 are alternately distributed in a space formed by the upper insulating layer 1 and the lower insulating layer 8, and the piezoelectric medium layer 3 is located between the positive electrode integral layer 2 and the negative electrode integral layer 4;
the positive electrode integral layer 2 comprises four groups of mutually independent first positive electrode layers 2-1, second positive electrode layers 2-2, third positive electrode layers 2-3 and fourth positive electrode layers 2-4 which are identical in shape, and first lugs are arranged on the outer circumferences of the first positive electrode layers 2-1, the second positive electrode layers 2-2, the third positive electrode layers 2-3 and the fourth positive electrode layers 2-4;
the negative electrode integral layer 4 comprises four groups of mutually independent first negative electrode layer 4-1, second negative electrode layer 4-2, third negative electrode layer 4-3 and fourth negative electrode layer 4-4 with the same shape, and second lugs are arranged on the outer circumferences of the first negative electrode layer 4-1, the second negative electrode layer 4-2, the third negative electrode layer 4-3 and the fourth negative electrode layer 4-4;
the piezoelectric medium layer 3 is provided with four mutually independent induction areas, and the shape of each induction area is matched with the shape of the first positive electrode layer 2-1 or the first negative electrode layer 4-1;
the angular interval between the first and second bumps is forty-five degrees, the first external positive electrode layer 7-1 is formed by parallel sintering between the first bumps in the first positive electrode layer 2-1, the first external negative electrode layer 9-1 is formed by parallel sintering between the second bumps in the first negative electrode layer 4-1, the second external positive electrode layer 7-2 is formed by parallel sintering between the first bumps in the second positive electrode layer 2-2, the second external negative electrode layer 9-2 is formed by parallel sintering between the second bumps in the second negative electrode layer 4-2, the third external positive electrode layer 7-3 is formed by parallel sintering between the first bumps in the third positive electrode layer 2-3, the third external negative electrode layer 9-3 is formed by parallel sintering between the second bumps in the third negative electrode layer 4-3, the fourth external positive electrode layer 7-4 is formed by parallel sintering between the first bumps in the fourth positive electrode layer 2-4, the second bumps in the fourth negative electrode layer 4-4 are sintered in parallel to form a fourth external negative electrode layer 9-4;
the first positive electrode layer 2-1 and the first negative electrode layer 4-1 are respectively positioned at two sides of the piezoelectric medium layer 3 and are superposed correspondingly, and the first positive electrode layer 2-1, the first negative electrode layer 4-1 and the piezoelectric medium layer 3 form an independent first laminated piezoelectric structure F-1; the second positive electrode layer 2-2 and the second negative electrode layer 4-2 are respectively positioned on two sides of the piezoelectric medium layer 3, and the positions of the second positive electrode layer 2-2, the second negative electrode layer 4-2 and the piezoelectric medium layer 3 are also superposed and correspond to each other, so that the second positive electrode layer 2-2, the second negative electrode layer 4-2 and the piezoelectric medium layer 3 form an independent second laminated piezoelectric structure F-2; the third positive electrode layer 2-3 and the third negative electrode layer 4-3 are respectively positioned at two sides of the piezoelectric medium layer 3, and the positions of the third positive electrode layer 2-3, the third negative electrode layer 4-3 and the piezoelectric medium layer 3 are also superposed and correspond to each other, so that the third positive electrode layer 2-3, the third negative electrode layer 4-3 and the piezoelectric medium layer 3 form an independent third laminated piezoelectric structure F-3; the fourth positive electrode layer 2-4 and the fourth negative electrode layer 4-4 are respectively located on two sides of the piezoelectric medium layer 3 and are also coincided and corresponding in position, the fourth positive electrode layer 2-4, the fourth negative electrode layer 4-4 and the piezoelectric medium layer 3 form an independent fourth laminated piezoelectric structure F-4, and the first laminated piezoelectric structure F-1, the second laminated piezoelectric structure F-2, the third laminated piezoelectric structure F-3 and the fourth laminated piezoelectric structure F-4 are distributed at intervals of ninety degrees and are independent of each other.
In the implementation scheme, the piezoelectric medium layer 3 is positioned between the positive electrode integral layer 2 and the negative electrode integral layer 4, when the piezoelectric medium layer 3 applies driving voltage on two ends through the positive electrode integral layer 2 and the negative electrode integral layer 4, the piezoelectric medium layer 3 generates inverse piezoelectric effect, so as to generate vertical deformation, the positive electrode integral layer 2 is divided into a first positive electrode layer 2-1, a second positive electrode layer 2-2, a third positive electrode layer 2-3 and a fourth positive electrode layer 2-4 which are mutually independent, the negative electrode integral layer 4 is divided into a first negative electrode layer 4-1, a second negative electrode layer 4-2, a third negative electrode layer 4-3 and a fourth negative electrode layer 4-4, the piezoelectric medium layer 3 is further provided with four mutually independent sensing areas, and the four sensing areas pass through the first positive electrode layer 2-1, the first negative electrode layer 4-1 and the independent areas in the piezoelectric medium layer 3, the three are mutually matched to form an independent first laminated piezoelectric structure F-1, and by analogy, other three groups of independent laminated piezoelectric structures can be formed, namely a second laminated piezoelectric structure F-2, a third laminated piezoelectric structure F-3 and a fourth laminated piezoelectric structure F-4;
the first external positive electrode layer 7-1 and the first external negative electrode layer 9-1 control the operating state of the first stacked piezoelectric structure F-1 in common, the second external positive electrode layer 7-2 and the second external negative electrode layer 9-2 control the operating state of the second stacked piezoelectric structure F-2 in common, the third external positive electrode layer 7-3 and the third external negative electrode layer 9-3 control the operating state of the third stacked piezoelectric structure F-3 in common, and the fourth external positive electrode layer 7-4 and the fourth external negative electrode layer 9-4 control the operating state of the fourth stacked piezoelectric structure F-4 in common;
when the first laminated piezoelectric structure F-1, the second laminated piezoelectric structure F-2, the third laminated piezoelectric structure F-3 and the fourth laminated piezoelectric structure F-4 are under the same driving voltage, inverse piezoelectric effects with the same effect can be generated, the four groups of laminated piezoelectric structures simultaneously generate displacement, and the upper insulating layer 1 positioned on the uppermost layer generates Z-direction displacement;
when one group of the two opposite groups of laminated piezoelectric structures independently applies a driving voltage A, the other group of the two opposite groups of laminated piezoelectric structures independently applies a driving voltage B, the driving voltage A is greater than the driving voltage B, the rest two groups of laminated piezoelectric structures do not work, because the driving voltage A is greater than the driving voltage B, the displacement generated by the inverse piezoelectric effect under the driving voltage A is also greater than the displacement generated by the inverse piezoelectric effect under the driving voltage B, and the upper insulating layer 1 positioned on the uppermost layer generates deflection in the X-axis direction;
the upper insulating layer 1 is controlled to generate deflection in the Y-axis direction, the principle is the same as that of the X-axis, and the description is omitted here;
because there is not mechanical structure in the high-speed deflection mirror structure of laminated piezoelectric ceramics, the displacement control of laminated piezoelectric ceramics is realized by the electronic control, have abandoned the mechanical part in the existing swing mirror structure, has removed the disadvantage that the mechanical part frequency of action is low, make the high-speed deflection mirror structure of laminated piezoelectric ceramics work and respond with the speed of microsecond level, and the deflection action of the high-speed deflection mirror structure of laminated piezoelectric ceramics is under the control of driving voltage, the swing speed is faster, can swing with the speed of microsecond level;
the specific electrically controlled driving method in the laminated piezoelectric ceramic high-speed deflection mirror structure is described by figures 4 and 5, in fig. 4, 1-way bias voltage, 2-way bias voltage, 3-way bias voltage, which outputs a voltage of 0 to 150V, 1-way bias voltage connecting the first external positive electrode layer 7-1 and the fourth external positive electrode layer 7-4, 2-way bias voltage connecting the second external positive electrode layer 7-2 and the fourth external negative electrode layer 9-4, 3-way bias voltage connecting the first external negative electrode layer 9-1 and the third external positive electrode layer 7-3, the second external negative electrode layer 9-2, the third external negative electrode layer 9-3 being grounded at the same time, the first external negative electrode layer 9-1 being connected to the third external positive electrode layer 7-3, and the fourth external negative electrode layer 9-4 being connected to the second external positive electrode layer 7-2;
when 1 way of bias voltage is added from 0V to 150V, and 2 ways of bias voltage and 3 ways of bias voltage are disconnected, the first laminated piezoelectric structure F-1, the second laminated piezoelectric structure F-2, the third laminated piezoelectric structure F-3 and the fourth laminated piezoelectric structure F-4 obtain the same 75V voltage drop, each group of laminated piezoelectric structures generate upward displacement output under the drive of the same voltage, and the overall height can be adjusted by 1 way of bias voltage;
when 2-path bias voltage is connected to a point G, the voltage of a fourth positive electrode layer 2-4 in a fourth laminated piezoelectric structure F-4 is kept at 150V through a fourth external positive electrode layer 7-4, when 2-path bias voltage is input to 0V, the voltage drop of two ends of the fourth laminated piezoelectric structure F-4 is 150V, the voltage drop of two ends of a second laminated piezoelectric structure F-2 is 0V, at the moment, the fourth laminated piezoelectric structure F-4 generates inverse piezoelectric effect to increase deformation, the second laminated piezoelectric structure F-2 returns to a zero position, when 2-path bias voltage is input to 150V, the voltage drop of two ends of the fourth laminated piezoelectric structure F-4 is 0V, the voltage drop of two ends of the second laminated piezoelectric structure F-2 is 150V, the fourth laminated piezoelectric structure F-4 returns to the zero position, and the second laminated piezoelectric structure F-2 generates inverse piezoelectric effect to increase deformation, when a reflector is bonded on the top of the laminated piezoelectric ceramic high-speed deflection mirror structure, the deflection angle can be adjusted by 2 paths of bias voltage;
when 3 bias voltages are connected to a point H, the first positive electrode layer 2-1 in the first laminated piezoelectric structure F-1 keeps 150V voltage through the first external positive electrode layer 7-1, when 3 bias voltages are input to 0V, the voltage drop at two ends of the first laminated piezoelectric structure F-1 is 150V, the voltage drop at two ends of the third laminated piezoelectric structure F-3 is 0V, at the moment, the first laminated piezoelectric structure F-1 generates inverse piezoelectric effect to increase deformation, the third laminated piezoelectric structure F-3 returns to a zero position, when 3 bias voltages are input to 150V, the voltage drop at two ends of the first laminated piezoelectric structure F-1 is 0V, the voltage drop at two ends of the third laminated piezoelectric structure F-3 is 150V, the first laminated piezoelectric structure F-1 returns to the zero position, and the third laminated piezoelectric structure F-3 generates inverse piezoelectric effect to increase deformation, when a reflector is bonded on the top of the laminated piezoelectric ceramic high-speed deflection mirror structure, 3 paths of bias voltage can adjust the deflection angle;
the electric control driving mode realizes the high deformation of the laminated piezoelectric ceramic high-speed deflection mirror structure and the angle adjustment change of the X and Y vertical directions, and the laminated piezoelectric ceramic high-speed deflection mirror structure can work in a high-speed adjustment range due to the fact that a redundant mechanical structure of a traditional deflection mirror is eliminated.
Preferably, the external shape of the laminated piezoelectric ceramic high-speed deflection mirror structure is one of an annular structure, an outer inner ring structure or an outer inner structure, and the structural design makes the laminated piezoelectric ceramic high-speed deflection mirror structure easier to process and manufacture and can adapt to different use requirements. In fact, other shapes of the laminated piezoelectric ceramic high-speed deflection mirror structure can be specifically considered according to specific situations.
Preferably, the upper insulating layer 1 is a slightly deformable soft insulating material, and the lower insulating layer 8 is made of an alumina or zirconia material, such that the upper insulating layer 1 is formed of the soft insulating material to provide insulating capability and deformation, and the lower insulating layer 8 is formed of the alumina or zirconia material to provide supporting capability and insulating capability. In fact, other material choices of the upper insulating layer 1 and the lower insulating layer 8 may be specifically considered according to the specific situation.
Preferably, the number of stacked piezoelectric medium layers 3 is ninety or more, and the structure is designed such that a sufficient number of piezoelectric medium layers 3 are provided to generate an inverse piezoelectric effect, and a small deformation is accumulated to output a sufficient displacement. In fact, other numbers of stacked layers of the piezoelectric medium layers 3 may be specifically considered according to the specific situation.
The invention also provides a manufacturing process of the laminated piezoelectric ceramic high-speed deflection mirror structure, which comprises the following steps:
s1, selecting a piezoelectric ceramic material film with proper thickness as a piezoelectric medium layer;
s2, printing a silver palladium material on one side of the piezoelectric medium layer through screen printing to form a positive electrode integral layer;
s3, bonding another laminated dielectric layer on the other side of the positive electrode integral layer by hot pressing;
s4, printing a silver palladium material on the other side of the next piezoelectric medium layer through screen printing to form a negative electrode integral layer;
s5, repeating the second step to the fourth step to enable the stacking layer number of the piezoelectric medium layers to be more than or equal to ninety layers, and then carrying out warm isostatic pressing;
s6, cutting the combined body into a required shape after warm isostatic pressing is finished;
s7, placing the combined body with the specific shape into a high-temperature furnace, and sintering according to a certain temperature gradient;
s8, screen-printing silver paste on the first bumps and the second bumps by using a screen, and performing high-temperature sintering to enable the silver paste to permeate into the combination body, wherein the corresponding first bumps are connected in parallel, and the corresponding second bumps are connected in parallel to form corresponding external electrode layers;
and S9, printing a wiring electrode on the corresponding external electrode layer by adopting a silver material after the second sintering is finished, and connecting the wiring electrode with a driving voltage.
The foregoing embodiments are merely illustrative of the principles of the present invention and its efficacy, and are not to be construed as limiting the invention. Any person skilled in the art can modify or change the above-mentioned embodiments without departing from the spirit and scope of the present invention. Accordingly, it is intended that all equivalent modifications or changes which can be made by those skilled in the art without departing from the spirit and technical spirit of the present invention be covered by the claims of the present invention.
Claims (5)
1. The laminated piezoelectric ceramic high-speed deflection mirror structure is characterized in that: the piezoelectric ceramic battery comprises an upper insulating layer (1), a lower insulating layer (8), a positive electrode integral layer (2), a negative electrode integral layer (4) and a piezoelectric medium layer (3), wherein the positive electrode integral layer (2), the negative electrode integral layer (4) and the piezoelectric medium layer (3) are positioned between the upper insulating layer (1) and the lower insulating layer (8), the positive electrode integral layer (2) and the negative electrode integral layer (4) are alternately distributed in a space formed by the upper insulating layer (1) and the lower insulating layer (8), and the piezoelectric medium layer (3) is positioned between the positive electrode integral layer (2) and the negative electrode integral layer (4);
the positive electrode integral layer (2) comprises four groups of first positive electrode layers (2-1), second positive electrode layers (2-2), third positive electrode layers (2-3) and fourth positive electrode layers (2-4) which are identical in shape and independent of each other, and first protrusions are arranged on the outer circumferences of the first positive electrode layers (2-1), the second positive electrode layers (2-2), the third positive electrode layers (2-3) and the fourth positive electrode layers (2-4);
the negative electrode integral layer (4) comprises four groups of mutually independent first negative electrode layers (4-1), second negative electrode layers (4-2), third negative electrode layers (4-3) and fourth negative electrode layers (4-4) which are identical in shape, and second protrusions are arranged on the outer circumferences of the first negative electrode layers (4-1), the second negative electrode layers (4-2), the third negative electrode layers (4-3) and the fourth negative electrode layers (4-4);
the piezoelectric medium layer (3) is provided with four mutually independent sensing areas, and the shapes of the sensing areas are matched with the shapes of the first positive electrode layer (2-1) or the first negative electrode layer (4-1);
the angle interval between the first bump and the second bump is forty-five degrees, the parallel sintering between the first bumps in the first positive electrode layer (2-1) is a first external positive electrode layer (7-1), the parallel sintering between the second bumps in the first negative electrode layer (4-1) is a first external negative electrode layer (9-1), the parallel sintering between the first bumps in the second positive electrode layer (2-2) is a second external positive electrode layer (7-2), the parallel sintering between the second bumps in the second negative electrode layer (4-2) is a second external negative electrode layer (9-2), the parallel sintering between the first bumps in the third positive electrode layer (2-3) is a third external positive electrode layer (7-3), the parallel sintering between the second bumps in the third negative electrode layer (4-3) is a third external negative electrode layer (9-3), the first lugs in the fourth positive electrode layer (2-4) are sintered in parallel to form a fourth external positive electrode layer (7-4), and the second lugs in the fourth negative electrode layer (4-4) are sintered in parallel to form a fourth external negative electrode layer (9-4);
the first positive electrode layer (2-1) and the first negative electrode layer (4-1) are respectively positioned at two sides of the piezoelectric medium layer (3) and are superposed correspondingly, and the first positive electrode layer (2-1), the first negative electrode layer (4-1) and the piezoelectric medium layer (3) form an independent first laminated piezoelectric structure (F-1); the second positive electrode layer (2-2) and the second negative electrode layer (4-2) are respectively positioned on two sides of the piezoelectric medium layer (3) and are also superposed and corresponding in position, and the second positive electrode layer (2-2), the second negative electrode layer (4-2) and the piezoelectric medium layer (3) form an independent second laminated piezoelectric structure (F-2); the third positive electrode layer (2-3) and the third negative electrode layer (4-3) are respectively positioned on two sides of the piezoelectric medium layer (3) and are also superposed and corresponding in position, and the third positive electrode layer (2-3), the third negative electrode layer (4-3) and the piezoelectric medium layer (3) form an independent third laminated piezoelectric structure (F-3); the fourth positive electrode layers (2-4) and the fourth negative electrode layers (4-4) are respectively located on two sides of the piezoelectric medium layer (3) and are also overlapped and corresponding in position, the fourth positive electrode layers (2-4), the fourth negative electrode layers (4-4) and the piezoelectric medium layer (3) form an independent fourth laminated piezoelectric structure (F-4), and the first laminated piezoelectric structure (F-1), the second laminated piezoelectric structure (F-2), the third laminated piezoelectric structure (F-3) and the fourth laminated piezoelectric structure (F-4) are distributed at intervals of ninety degrees and are independent of one another.
2. The stacked piezoelectric ceramic high-speed deflection mirror structure according to claim 1, wherein: the appearance of the laminated piezoelectric ceramic high-speed deflection mirror structure is one of an annular structure, an outer square inner ring structure or an outer square inner structure.
3. The stacked piezoelectric ceramic high-speed deflection mirror structure according to claim 2, wherein: the upper insulating layer (1) is made of a slightly deformable soft insulating material, and the lower insulating layer (8) is made of aluminum oxide or zirconium oxide.
4. The stacked piezoelectric ceramic high-speed deflection mirror structure according to claim 3, wherein: the stacking number of the piezoelectric medium layers (3) is more than or equal to ninety layers.
5. The process for manufacturing a stacked piezoelectric ceramic high-speed deflecting mirror structure according to any one of claims 1 to 4, wherein: the manufacturing process comprises the following steps of,
s1, selecting a piezoelectric ceramic material film with proper thickness as a piezoelectric medium layer;
s2, printing a silver palladium material on one side of the piezoelectric medium layer through screen printing to form a positive electrode integral layer;
s3, bonding another laminated dielectric layer on the other side of the positive electrode integral layer by hot pressing;
s4, printing a silver palladium material on the other side of the next piezoelectric medium layer through screen printing to form a negative electrode integral layer;
s5, repeating the second step to the fourth step to enable the stacking layer number of the piezoelectric medium layers to be more than or equal to ninety layers, and then carrying out warm isostatic pressing;
s6, cutting the combined body into a required shape after warm isostatic pressing is finished;
s7, placing the combined body with the specific shape into a high-temperature furnace, and sintering according to a certain temperature gradient;
s8, screen-printing silver paste on the first bumps and the second bumps by using a screen, and performing high-temperature sintering to enable the silver paste to permeate into the combination body, wherein the corresponding first bumps are connected in parallel, and the corresponding second bumps are connected in parallel to form corresponding external electrode layers;
and S9, printing a wiring electrode on the corresponding external electrode layer by adopting a silver material after the second sintering is finished, and connecting the wiring electrode with a driving voltage.
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Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH1174576A (en) * | 1997-08-29 | 1999-03-16 | Kyocera Corp | Laminated piezoelectric actuator |
| JP2000294843A (en) * | 1999-04-08 | 2000-10-20 | Nissan Motor Co Ltd | Piezoelectric element and laminated piezoelectric actuator |
| JP2006303349A (en) * | 2005-04-25 | 2006-11-02 | Nec Tokin Corp | Method for manufacturing piezoelectric ceramic lamination element and piezoelectric ceramic lamination actuator |
| CN101378106A (en) * | 2008-10-10 | 2009-03-04 | 中国科学院上海光学精密机械研究所 | Stacking shape actuator for shearing piezoelectric ceramics |
| CN107070297A (en) * | 2017-04-14 | 2017-08-18 | 哈尔滨工业大学 | Laminated type flexure type piezoelectric ceramic actuator |
| CN107306097A (en) * | 2016-04-22 | 2017-10-31 | 北京派和智能装备技术有限公司 | Using the micro machine of multi-layer annular piezoelectric ceramics |
-
2021
- 2021-09-16 CN CN202111088784.4A patent/CN113794400B/en active Active
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH1174576A (en) * | 1997-08-29 | 1999-03-16 | Kyocera Corp | Laminated piezoelectric actuator |
| JP2000294843A (en) * | 1999-04-08 | 2000-10-20 | Nissan Motor Co Ltd | Piezoelectric element and laminated piezoelectric actuator |
| JP2006303349A (en) * | 2005-04-25 | 2006-11-02 | Nec Tokin Corp | Method for manufacturing piezoelectric ceramic lamination element and piezoelectric ceramic lamination actuator |
| CN101378106A (en) * | 2008-10-10 | 2009-03-04 | 中国科学院上海光学精密机械研究所 | Stacking shape actuator for shearing piezoelectric ceramics |
| CN107306097A (en) * | 2016-04-22 | 2017-10-31 | 北京派和智能装备技术有限公司 | Using the micro machine of multi-layer annular piezoelectric ceramics |
| CN107070297A (en) * | 2017-04-14 | 2017-08-18 | 哈尔滨工业大学 | Laminated type flexure type piezoelectric ceramic actuator |
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