CN107306097A - Using the micro machine of multi-layer annular piezoelectric ceramics - Google Patents
Using the micro machine of multi-layer annular piezoelectric ceramics Download PDFInfo
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- CN107306097A CN107306097A CN201610258548.5A CN201610258548A CN107306097A CN 107306097 A CN107306097 A CN 107306097A CN 201610258548 A CN201610258548 A CN 201610258548A CN 107306097 A CN107306097 A CN 107306097A
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- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 10
- 239000000741 silica gel Substances 0.000 claims description 10
- 229910002027 silica gel Inorganic materials 0.000 claims description 10
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- 229920000647 polyepoxide Polymers 0.000 claims description 5
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 4
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Classifications
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/10—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/10—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
- H02N2/12—Constructional details
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Abstract
The invention discloses a kind of micro machine of use multi-layer annular piezoelectric ceramics, belong to piezoelectric actuator, small and special electric machine and mini drive field, the micro machine of the present invention includes housing, housing is internally provided with stator and rotor, stator includes stator ring, the side of stator ring is provided with contact, opposite side is provided with multi-layer annular piezoelectric ceramics, multi-layer annular piezoelectric ceramics is uniformly divided into even number subregion, the polarised direction of two neighboring subregion is on the contrary, the power-up of the ring-shaped piezo ceramic of adjacent two layers is in opposite direction；The upper and lower surface of multi-layer annular piezoelectric ceramics has positive electrode and negative electrode, and positive electrode is also classified into even number subregion and corresponded with the subregion of multi-layer annular piezoelectric ceramics；The quantity of the subregion of multi-layer annular piezoelectric ceramics is twice of the quantity of contact, and the position of contact is corresponding to the clear area between the subregion of adjacent positive electrode two-by-two.Compared with prior art, the present invention has low-voltage driving, stability good and the characteristics of high pulling torque is exported.
Description
Technical field
The present invention relates to piezoelectric actuator, small and special electric machine and mini drive field, one kind is particularly related to
Using the micro machine of multi-layer annular piezoelectric ceramics.
Background technology
Micromachine generally refer to size (size of overall structure size or a direction) it is small,
Positioning precision (or repetitive positioning accuracy) is high, the motor that energy expenditure is low, power density is big.Mesh
Before, increasing research and engineer applied field produce urgent demand to micromachine, and pass
The winding-type electromagnetic machine of system is difficult to be miniaturized due to its complicated structure.After the eighties in last century
Phase, researcher utilizes the micro-processing technology of silicon, is manufactured that static electrical micro-machine, and its diameter can be with
To hundreds of microns, microelectromechanical systems (MEMS, Micro Electromechanical is triggered
System) the change of field microactrator.But, although it has small, simple in construction excellent of size
Point, still, its power output or suitable small.
Therefore, big, the simple in construction piezoelectric micro motor of output torque is just widely paid close attention to.Due to
Using the piezoceramic material of high-energy-density as drive mechanism, piezoelectric micro motor can directly drive
And output torque is kept, so as to save speed change gear and brake apparatus, it is easier to be miniaturized, collect
Cheng Hua.Piezoelectric micro motor is hopeful to be applied in extensive field, such as precision instrument, biological skill
Art, microfluid system, medicine, microrobot etc..
Piezoelectric actuator is the inverse piezoelectric effect using piezoelectric, excites elastomer to produce supersonic range
Micro breadth oscillation, force the particle of contact surface to produce similar elliptical orbit or periodically twists and turns
Motion, and rotation or the linear motion of mover are converted thereof into by the friction between fixed and moving son.Rotation
The dynamic piezoelectric actuator of transhipment is also referred to as piezoelectric motor.Piezoelectric actuator has that structure type is various, position
Put that precision is high, inertia is small, low noise operation, response is fast, cut off self-lock, do not produce magnetic field also not by
The advantages of electromagnetic interference.Due to having many advantages, such as the above, piezoelectric actuator is in industrial automation, boat
The fields such as empty space flight, medical treatment, bioengineering have obtained substantial amounts of application, and have played huge effect.
At present, existing piezoelectric motor is driven using the piezoelectric ceramics of individual layer, to be produced certain big
Small driving force and actuating speed, it is necessary to relatively large driving voltage (typically about 200V/mm),
This does not have too big for the larger motor of occasion or own vol that motor is independently used
Influence, still, for micromachine, the small volume of its motor in itself, general application scenario is
Some small-sized electronic products, be at this moment accomplished by that the driving voltage of motor to be tried one's best is small, to reach as far as possible
To (driving voltage about 5V) is directly driven with cmos device, moreover, than larger driving electricity
Pressure also results in the unfavorable shadow such as the influence increase of danger coefficient increase, high pressure to low-pressure end when motor is used
Ring.At this moment, it is difficult to reach requirement using the block piezoelectric ceramics of traditional individual layer.
Also, driven more than existing piezoelectric motor using the two phase circuit of same frequency, for two phase circuit
For, it is ensured that two phase circuit frequency keeps stricter equal within the period that whole motor works
It is difficult to, along with mismachining tolerance, the error of electric circuit electronics technical component, temperature drift phenomenon
The problems such as, the stability of motor can be caused relatively low.
In addition, in the prior art, in order to realize that piezoelectric motor high pulling torque is exported, it usually needs increase volume
Outer circuit structure could realize, so be easily caused motor volume increase, and for own vol compared with
Small micro machine, realizes that high pulling torque output is more difficult.
The content of the invention
Have low-voltage driving, stability good, big the technical problem to be solved in the present invention is to provide one kind
The micro machine of the use multi-layer annular piezoelectric ceramics of torque output.
In order to solve the above technical problems, present invention offer technical scheme is as follows：
A kind of micro machine of use multi-layer annular piezoelectric ceramics, including housing, the inside of the housing is set
Stator and rotor are equipped with, the stator includes stator ring, and the side of the stator ring is circumferentially square
To at least two contacts for being used to drive the rotor are evenly arranged with, opposite side is provided with for driving
The multi-layer annular piezoelectric ceramics of the stator ring motion, wherein：
The multi-layer annular piezoelectric ceramics is uniformly divided into even number subregion, the polarization side of two neighboring subregion
To on the contrary, the power-up of the ring-shaped piezo ceramic of adjacent two layers is in opposite direction；
The upper and lower surface of the multi-layer annular piezoelectric ceramics has positive electrode and negative electrode, the positive electrode
It is also classified into even number subregion and is corresponded with the subregion of the multi-layer annular piezoelectric ceramics；
The quantity of the subregion of the multi-layer annular piezoelectric ceramics is twice of the quantity of the contact, described
The clear area that the position of contact corresponds between the subregion of adjacent positive electrode two-by-two.
Further, the contact is oblique angle type contact.
Further, the corresponding positive and negative electrode of each lamination electroceramics and the lamination electroceramics is using curtain coating work
Skill is generated, and is superimposed as multilayer piezoelectric ceramic base substrate, and the multilayer piezoelectric ceramic base substrate is common by low temperature
The multi-layer annular piezoelectric ceramics is made in burning technology sintering.
Further, the positive electrode and negative electricity of each lamination electroceramics in the multi-layer annular piezoelectric ceramics
Pole is interconnected respectively so that the multi-layer annular piezoelectric ceramics only has two power-up terminals.
Further, the housing is included on motor drain pan and the motor connected with the motor bottom shell phase
Lid, the stator is arranged in the motor drain pan, and one end of the rotor is corresponding with the stator to be set
Put, the other end of the rotor is passed through to be covered on the motor.
Further, it is provided with the rotor on Step Shaft, the Step Shaft and is arranged with disk spring
It is right；
Bearing is arranged with the rotating shaft of the rotor, the bearing extruding is arranged on the disk spring pair
On, it is provided with the bearing hole for placing the bearing on lid on described motor；
The bottom of the motor drain pan is provided with silica gel pad below the stator.
Further, the edge of the stator ring is provided with stator positioning convex, the motor drain pan
Inwall on be provided with the groove being engaged with the stator positioning convex.
Further, the contact is 3, and the multi-layer annular piezoelectric ceramics is uniformly divided into 6 points
Area.
Further, the multi-layer annular piezoelectric ceramics is glued by epoxide-resin glue and the stator ring
Connect.
Further, the stator ring, contact, stator positioning convex are with the one of Copper fabrication
Body structure.
The invention has the advantages that：
In the present invention, micro machine is driven using multi-layer annular piezoelectric ceramics, multilayer of the invention
The direction of primary motion of ring-shaped piezo ceramic is circumferential movement direction, and power-up direction is hung down with direction of primary motion
Directly, therefore, multi-layer annular piezoelectric ceramics is d31Mode of operation, for being operated in d31Under mode of operation
Multilayer piezoelectric ceramic, the relation of deflection and voltage is Δ L=d31×(U33× L)/t, wherein, Δ L is
Deformation after multilayer piezoelectric ceramic power-up, d31For piezoelectricity-deformation coefficient of piezoelectric ceramics, U33For along
The amplitude of voltage signal added by single layer piezoelectric ceramics polarised direction.It can be seen from above-mentioned formula, when
When piezoelectric ceramics is individual layer bulk piezoelectric ceramics, t values want to reach certain deflection Δ L than larger,
Need increase driving voltage U33, when piezoelectric ceramics is multilayer bulk piezoelectric ceramics (when the number of plies is general
For tens to hundreds of layers when), then t values are then original one tens to several percent, want to reach phase
Same deflection Δ L, then the driving voltage U needed33Only need for original one tens to several percent
Size, thus can greatly reduce the driving voltage of motor；
Also, the present invention multi-layer annular piezoelectric ceramics two neighboring subregion polarised direction on the contrary,
So, when being powered to multi-layer annular piezoelectric ceramics, two adjacent subregions are driven using single-phase circuit,
The generation opposite direction deformation of two neighboring subregion piezoelectric ceramics can be made, it is to avoid use in the prior art
The problem of stability that the two phase circuit drive belt of same frequency is come is low；
Moreover, the present invention makes micro machine using the standing wave operation principle of multi-layer annular piezoelectric ceramics
The characteristic being overlapped mutually using multilayer piezoelectric ceramic power output, you can realize that high thrust is exported, make micro- electricity
Machine has the characteristic that high pulling torque is exported.
To sum up, compared with prior art, the present invention has low-voltage driving, stability good and high pulling torque
The characteristics of output.
Brief description of the drawings
Fig. 1 is the structural representation of the micro machine of the use multi-layer annular piezoelectric ceramics of the present invention；
Fig. 2 shows for the structure of the stator ring of the micro machine of the use multi-layer annular piezoelectric ceramics of the present invention
It is intended to；
Fig. 3 a in Fig. 3 are the multilayer loop of the micro machine of the use multi-layer annular piezoelectric ceramics of the present invention
The electrode district arrangement form and polarised direction schematic diagram of the positive electrode side of shape piezoelectric ceramics；
Fig. 3 b in Fig. 3 are the multilayer loop of the micro machine of the use multi-layer annular piezoelectric ceramics of the present invention
The side view of shape piezoelectric ceramics；
Fig. 3 c in Fig. 3 are the multilayer loop of the micro machine of the use multi-layer annular piezoelectric ceramics of the present invention
The electrode district arrangement form of the negative electrode side of shape piezoelectric ceramics；
Fig. 4 is the multi-layer annular piezoelectric ceramics of the micro machine of the use multi-layer annular piezoelectric ceramics of the present invention
Hierarchy schematic diagram；
Fig. 5 is the stator and rotor expanded view of the micro machine of the use multi-layer annular piezoelectric ceramics of the present invention
And operation principle schematic diagram.
Embodiment
, below will knot to make the technical problem to be solved in the present invention, technical scheme and advantage clearer
Drawings and the specific embodiments are closed to be described in detail.
On the one hand, the present invention provides a kind of micro machine of use multi-layer annular piezoelectric ceramics, such as Fig. 1 institutes
Show, including housing, housing is internally provided with stator and rotor 1, and stator includes stator ring 5,
The side of stator ring 5 is along the circumferential direction evenly arranged with least two contacts for being used to drive rotor 1
51, opposite side is provided with the multi-layer annular piezoelectric ceramics 6 for driving stator ring 5 to move, wherein：
Multi-layer annular piezoelectric ceramics 6 is uniformly divided into even number subregion, the polarised direction of two neighboring subregion
On the contrary, the power-up of the ring-shaped piezo ceramic of adjacent two layers is in opposite direction；
The upper and lower surface of multi-layer annular piezoelectric ceramics 6 has positive electrode and negative electrode, and positive electrode is also classified into
Even number subregion and corresponded with the subregion of multi-layer annular piezoelectric ceramics 6；
The quantity of the subregion of multi-layer annular piezoelectric ceramics 6 is twice of the quantity of contact 51, contact 51
Position correspond to adjacent positive electrode two-by-two subregion between clear area.
In the present invention, micro machine is driven using multi-layer annular piezoelectric ceramics 6, of the invention is more
The direction of primary motion of layer ring-shaped piezo ceramic is circumferential movement direction, and power-up direction is hung down with direction of primary motion
Directly, therefore, multi-layer annular piezoelectric ceramics is d31Mode of operation, for being operated in d31Under mode of operation
Multilayer piezoelectric ceramic, the relation of deflection and voltage is Δ L=d31×(U33× L)/t, wherein, Δ L is
Deformation after multilayer piezoelectric ceramic power-up, d31For piezoelectricity-deformation coefficient of piezoelectric ceramics, U33For along
The amplitude of voltage signal added by single layer piezoelectric ceramics polarised direction.It can be seen from above-mentioned formula, when
When piezoelectric ceramics is individual layer bulk piezoelectric ceramics, t values want to reach certain deflection Δ L than larger,
Need increase driving voltage U33, when piezoelectric ceramics is multilayer bulk piezoelectric ceramics (when the number of plies is general
For tens to hundreds of layers when), then t values are then original one tens to several percent, want to reach phase
Same deflection Δ L, then the driving voltage U needed33Only need for original one tens to several percent
Size, thus can greatly reduce the driving voltage of motor；
Also, the present invention multi-layer annular piezoelectric ceramics 6 two neighboring subregion polarised direction on the contrary,
So, when being powered to multi-layer annular piezoelectric ceramics 6, two adjacent subregions are driven using single-phase circuit
It is dynamic, you can make the generation opposite direction deformation of two neighboring subregion piezoelectric ceramics, it is to avoid in the prior art
Using the two phase circuit drive belt of same frequency come stability it is low the problem of；
Moreover, the present invention makes micro- electricity using the standing wave operation principle of multi-layer annular piezoelectric ceramics 6
The characteristic that machine is overlapped mutually using multilayer piezoelectric ceramic power output, you can realize that high thrust is exported, make micro-
Motor has the characteristic that high pulling torque is exported.
To sum up, compared with prior art, the present invention has low-voltage driving, stability good and high pulling torque
The characteristics of output.
As shown in Fig. 2 contact 51 is oblique angle type contact 51.Make the present invention that there is single-phase rotatory.
Existing electromagnetic machine and most piezoelectric motor, all with bidirectional rotation, that is, pass through
Exchange power output end two-way (or three tunnels) signal, you can realize motor commutation rotation, this
It is necessary in most practical application, still, in some special application scenarios, often exists
The application requirement need not or must can not with bidirectional rotation, the invention provides one kind tool
There is the piezoelectric micro motor of single direction rotation, it is micro- for single direction rotation to solve some particular applications
The specific demand of motor.In the present invention, oblique angle type contact 51 is employed on stator ring 5, even in
Exchange after two-way voltage signal wiring, micro machine will not also occur commutation and rotate, and realize single direction rotation
Work.
In the present invention, as shown in Figure 3-4, each lamination electroceramics and the lamination electroceramics are corresponding positive and negative
Electrode is generated using casting technique, and is superimposed as multilayer piezoelectric ceramic base substrate, multilayer piezoelectric ceramic base substrate
Multi-layer annular piezoelectric ceramics 6 is made by low temperature co-firing technology sintering.
It is used as the improvement of the present invention, the positive electrode of each lamination electroceramics in multi-layer annular piezoelectric ceramics 6
Interconnected respectively with negative electrode so that multi-layer annular piezoelectric ceramics 6 only has two power-up terminals.
Specifically, wire can be welded with each divisional electrode of multi-layer annular piezoelectric ceramics 6,
And the wire welded on each divisional electrode is both connected to together, in multi-layer annular piezoelectric ceramics
Wire is also welded with 6 main plot electrode, so, all wires ultimately form two electric terminals.This
During invention power-up, the sine voltage signal or sawtooth of certain frequency can be applied on two electric terminals
Wave voltage signal, applies the frequency of voltage signal close to the resonant frequency of micromotor stator.
As a modification of the present invention, as shown in figure 1, housing can include motor drain pan 3 and with
Lid 2 on the connected motor of motor drain pan 3, stator is arranged in motor drain pan 3, one end of rotor 1
It is correspondingly arranged with stator, the other end of rotor 1 passes through lid 2 on motor.
In the present invention, lid 2 is connected through a screw thread on motor drain pan 3 and motor.Lid 2 and electricity on motor
Machine drain pan 3 is respectively arranged with lid 2 and motor drain pan 3 on internal and external screw thread, motor in junction and passed through
Internal and external screw thread links together, meanwhile, by between lid in regulation motor 2 and motor drain pan 3
The tightness of threaded connection, can with the pretightning force between regulation motor rotor 1 and stator ring 5,
Reach the effect of regulation motor pretightning force.
As a further improvement on the present invention, as shown in figure 1, being provided with Step Shaft, platform on rotor 1
Disk spring is arranged with rank axle to 7；
It is arranged with bearing 8 in the rotating shaft of rotor 1, the extruding of bearing 8 is arranged on disk spring on 7,
Motor on the bearing hole for placing bearing 8 is provided with lid 2；
The bottom of motor drain pan 3 is provided with silica gel pad 4 below stator.
In the present invention, silica gel pad 4 can use high damping material, and the silica gel pad 4 of the material has
There is to carry out motor stator the silica gel pad 4 in flexible constraint, the present invention except using silica gel
, can also be using well known to a person skilled in the art other replaceable high damping materials beyond material
Material, can also realize the technique effect of the present invention.
In the present invention, as shown in Fig. 2 the edge of stator ring 5 can be provided with stator positioning convex
52, the groove being engaged with stator positioning convex 52 can be provided with the inwall of motor drain pan 3.
Stator positioning convex 52 is positioned in groove, can play the positioning of stator ring 5 radially and circumferentially.
In the present invention, multi-layer annular piezoelectric ceramics 6 can be uniformly divided into the quantity even number more than 2 point
Area, such as 4 subregions, 6 subregions or 8 subregions, the quantity of contact 51 are the half of number of partitions,
It is preferred that, contact 51 is 3, and multi-layer annular piezoelectric ceramics 6 is uniformly divided into 6 subregions.
It is preferred that, multi-layer annular piezoelectric ceramics 6 can be bonded with stator ring 5 by epoxide-resin glue.
In order to strengthen the mechanical performance of stator, stator ring 5, contact 51, stator positioning convex 52
For with the integrative-structure of Copper fabrication.
As a further improvement on the present invention, the thickness of each lamination electroceramics may be about 50 μm,
The ring-shaped piezo ceramic of adjacent two layers shares same electrode.
Below, the present invention provides a complete embodiment with reference to accompanying drawing：
The structure of the present invention, as shown in figure 1, including lid 2, stator circle on motor drain pan 3, motor
Ring 5, multi-layer annular piezoelectric ceramics 6, rotor 1, silica gel pad 4, disk spring are to 7, axle
Hold 8.Multi-layer annular piezoelectric ceramics 6 is bonded together by epoxide-resin glue with stator ring 5, shape
Into motor stator.Silica gel pad 4 is provided with motor drain pan 3, motor stator is arranged on silica gel pad
On 4, rotor 1 is arranged on the stator ring 5 of motor stator, and disk spring is set in 7
On the Step Shaft of rotor 1, bearing 8 is set in the rotating shaft of rotor 1 and and disk spring
Produced to 7 and be machined with the bearing hole that bearing 8 is set on extruding, motor on lid 2, bearing 8 is arranged on
On motor in the bearing hole of lid 2.Lid 2 and motor drain pan 3 are machined with internal and external screw thread respectively on motor,
Lid 2 and motor drain pan 3 are linked together by internal and external screw thread on motor, meanwhile, by adjusting electricity
The tightness of threaded connection on machine between lid 2 and motor drain pan 3, can be with regulation motor rotor 1
Pressure between stator ring 5, so as to reach the purpose of regulation motor pretightning force.
The structure of stator ring 5, as shown in Fig. 2 including the matrix of stator ring 5,3 equably
The oblique angle type contact 51 for being arranged on the side of stator ring 5 and 3 are evenly provided on stator ring 5
The stator positioning convex 52 of matrix border.The matrix of stator ring 5, oblique angle type contact 51 and stator are fixed
Position projection 52 is the integrative-structure with Copper fabrication.Being machined with the inwall of motor drain pan 3 is used for
The groove being engaged with the stator positioning convex 52 of stator ring 5, the stator positioning of stator ring 5
Projection 52 is positioned in groove, plays the positioning action of stator ring 5 radially and circumferentially.
The overall structure figure of multi-layer annular piezoelectric ceramics 6, as shown in Fig. 3 a, 3b, 3c in Fig. 3,
Multi-layer annular piezoelectric ceramics 6 is the piezoelectric ceramics of circular ring type, the both sides bottom of multi-layer annular piezoelectric ceramics 6
High temperature silver electrode is brushed with face.The high temperature silver electrode of the positive electrode side of multi-layer annular piezoelectric ceramics 6 is
Uniform six divisional electrode, six divisional electrodes are followed successively by 631,641,651,661,671 in Fig. 3 a
The multi-layer annular piezoelectric ceramics of each subregion is represented with the plus sige (+) and minus sign (-) in 681, Fig. 3 a
6 polarised direction.The high temperature silver electrode of the negative electrode side of multi-layer annular piezoelectric ceramics 6 is main plot electricity
691 in pole, i.e. Fig. 3 b.
The internal structure of multi-layer annular piezoelectric ceramics 6, as shown in figure 4, multi-layer annular piezoelectric ceramics 6
For subregion-finger-inserting type structure.601st, 602 and 603 be piezoceramics layer, and 631 be piezoceramics layer
601 six subregion positive electrode layers, 632 be six subregion positive electrode layers of piezoceramics layer 602,692
For the public main plot positive electrode layer of piezoceramics layer 601 and 602, piezoceramics layer 601 and 602
Oppositely arranged, 691 be the main plot positive electrode layer of piezoceramics layer 603, the six of piezoceramics layer 603
Subregion positive electrode layer is the six subregion positive electrode layers 632 public with piezoceramics layer 602.Therefore, may be used
To find out, the power-up of the ring-shaped piezo ceramic of adjacent two layers is in opposite direction.In the present invention, piezoelectric ceramics
Layer and electrode layer are generated by casting technique, and are superimposed as multilayer piezoelectric ceramic base substrate, multi-layer piezoelectric pottery
Porcelain base substrate is sintered by low temperature co-firing technology, ultimately forms required multi-layer annular piezoelectric ceramics 6.
The operation principle of the micro machine of above-described embodiment：
As shown in figure 5, being motor stator (including stator ring 5 and multi-layer annular piezoelectric ceramics 6)
With the expanded view of rotor 1 circumferentially.Wherein, the stator ring 5 of motor, multi-layer annular pressure
Electroceramics 6 and rotor 1 are respectively 5,6 and 1 in Fig. 5.
Six area polarizing directions of multi-layer annular piezoelectric ceramics 6 are respectively on the contrary, such as polarised direction 61
It is shown.Stator ring 5 is bonded together with multi-layer annular piezoelectric ceramics 6 by epoxy resin glue,
In bonding, electrode 691 and the no contact 51 of stator ring 5 of multi-layer annular piezoelectric ceramics 6
Simultaneously it is bonded, and is ensured, two electricity in the one side of the divisional electrode of multi-layer annular piezoelectric ceramics 6
Blank space (electrodeless clear area) between the subregion of pole will align with the contact 51 of stator ring 5.
Wire is welded with each divisional electrode of multi-layer annular piezoelectric ceramics 6, and all wires connect
It is connected together, wire, all wires is also welded with the main plot electrode of multi-layer annular piezoelectric ceramics 6
Ultimately form two electric terminals.
Sine voltage signal U=Asin (ω t) is carried on two above-mentioned electric terminals, at this moment, stator
Annulus 5 and the motor stator of the formation of multi-layer annular piezoelectric ceramics 6 can produce deformation as shown in Figure 5：
Due to the piezoelectric ceramics polarised direction between two adjacent electrode compartments on the contrary, so adjacent two
The deformation of piezoelectric ceramics subregion on the contrary, during i.e. one subregion elongation, another subregion can shorten, and by
Will not spontaneous strain, work of the stator ring 5 in multi-layer annular piezoelectric ceramics 6 in stator ring 5 itself
Deformed under, so micro machine can form continuous flexural deformation on the whole.When driving voltage letter
Number U=Asin (ω t) frequency close to motor stator resonant frequency when, the amplitude of motor stator can be obtained
Significantly increase.Because the contact 51 of stator ring 5 is always maintained at hanging down with the matrix of stator ring 5
Straight state, at the node positions that stator ring 5 is bent, the case of bending of stator ring 5 reaches
Maximum, because contact 51 is arranged on the node location of the bending of stator ring 5, now, contact 51
The maximum that right side is swung is reached, the top end of contact 51 obtains maximum lateral displacement amount.Applying
Plus after the sinusoidal drive voltage signal U=Asin (ω t) of a complete cycle, contact 51 with rotor 1
The part of contact produces the oscillation trajectory of approximate skew lines, and the oscillation trajectory passes through on stator ring 5
Frictional force pushing motor rotor 1 between contact 51 and rotor 1 produces rotary motion.
Above-mentioned, specific embodiment brings following beneficial effect：
1st, multilayer piezoelectric ceramic structure is employed, is ensureing driving force and the constant situation of actuating speed
Under, driving voltage can be caused relatively small, make the present invention that there is low-voltage driving；
2nd, because motor operationally only needs to apply voltage signal all the way, it can avoid due to multiphase
Drive belt come job insecurity the problem of, with stability it is good the characteristics of；
3rd, using the standing wave operation principle of multi-layer annular piezoelectric ceramics 6, micro machine is made using many laminations
The characteristic that electroceramics power output is overlapped mutually, promotes 3 contacts 51 to work simultaneously, while to motor
Rotor 1 carries out frictional force promotion, makes power output parallel connection superposition, realizes that high thrust is exported, make micro machine
The characteristic exported with high pulling torque；
4th, two-way voltage is being exchanged as a result of oblique angle type contact 51 on stator ring of the invention
After signal wiring, commutation rotation can't occur for micro machine, can realize that single direction rotation works.
Described above is the preferred embodiment of the present invention, it is noted that for the general of the art
For logical technical staff, on the premise of principle of the present invention is not departed from, some change can also be made
Enter and retouch, these improvements and modifications also should be regarded as protection scope of the present invention.
Claims (10)
1. a kind of micro machine of use multi-layer annular piezoelectric ceramics, including housing, the housing it is interior
Portion is provided with stator and rotor, it is characterised in that the stator includes stator ring, the stator circle
The side of ring is along the circumferential direction evenly arranged with least two contacts for being used to drive the rotor, another
Side is provided with the multi-layer annular piezoelectric ceramics for driving the stator ring motion, wherein：
The multi-layer annular piezoelectric ceramics is uniformly divided into even number subregion, the polarization side of two neighboring subregion
To on the contrary, the power-up of the ring-shaped piezo ceramic of adjacent two layers is in opposite direction；
The upper and lower surface of the multi-layer annular piezoelectric ceramics has positive electrode and negative electrode, the positive electrode
It is also classified into even number subregion and is corresponded with the subregion of the multi-layer annular piezoelectric ceramics；
The quantity of the subregion of the multi-layer annular piezoelectric ceramics is twice of the quantity of the contact, described
The clear area that the position of contact corresponds between the subregion of adjacent positive electrode two-by-two.
2. the micro machine of use multi-layer annular piezoelectric ceramics according to claim 1, its feature
It is, the contact is oblique angle type contact.
3. the micro machine of use multi-layer annular piezoelectric ceramics according to claim 1, its feature
It is, each lamination electroceramics and the corresponding positive and negative electrode of lamination electroceramics are generated using casting technique,
And multilayer piezoelectric ceramic base substrate is superimposed as, the multilayer piezoelectric ceramic base substrate is burnt by low temperature co-firing technology
The multi-layer annular piezoelectric ceramics is made in knot.
4. the micro machine of use multi-layer annular piezoelectric ceramics according to claim 1, its feature
It is, positive electrode and the negative electrode difference of each lamination electroceramics in the multi-layer annular piezoelectric ceramics are mutual
Even so that the multi-layer annular piezoelectric ceramics only has two power-up terminals.
5. the micro machine of use multi-layer annular piezoelectric ceramics according to claim 1, its feature
It is, the housing includes motor drain pan and with being covered on the motor of the motor bottom shell phase even, described fixed
Son is arranged in the motor drain pan, and one end of the rotor is correspondingly arranged with the stator, described turn
The other end of son is passed through and covered on the motor.
6. the micro machine of use multi-layer annular piezoelectric ceramics according to claim 5, its feature
It is, is provided with the rotor on Step Shaft, the Step Shaft and is arranged with disk spring pair；
Bearing is arranged with the rotating shaft of the rotor, the bearing extruding is arranged on the disk spring pair
On, it is provided with the bearing hole for placing the bearing on lid on described motor；
The bottom of the motor drain pan is provided with silica gel pad below the stator.
7. according to the micro machine of any described use multi-layer annular piezoelectric ceramics in claim 1-6,
Characterized in that, the edge of the stator ring is provided with stator positioning convex, the motor drain pan
The groove being engaged with the stator positioning convex is provided with inwall.
8. the micro machine of use multi-layer annular piezoelectric ceramics according to claim 7, its feature
It is, the contact is 3, and the multi-layer annular piezoelectric ceramics is uniformly divided into 6 subregions.
9. the micro machine of use multi-layer annular piezoelectric ceramics according to claim 8, its feature
It is, the multi-layer annular piezoelectric ceramics is Nian Jie with the stator ring by epoxide-resin glue.
10. the micro machine of use multi-layer annular piezoelectric ceramics according to claim 9, its feature
It is, the stator ring, contact, stator positioning convex are with the integrative-structure of Copper fabrication.
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| CN111650827A (en) * | 2020-05-27 | 2020-09-11 | 维沃移动通信有限公司 | Electronic device |
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| CN113852292A (en) * | 2021-08-09 | 2021-12-28 | 大连理工大学 | Piezoelectric ceramic-substrate integrated driver |
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