CN206161956U - Combined type piezoelectricity distorting lens - Google Patents
Combined type piezoelectricity distorting lens Download PDFInfo
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- CN206161956U CN206161956U CN201621113020.0U CN201621113020U CN206161956U CN 206161956 U CN206161956 U CN 206161956U CN 201621113020 U CN201621113020 U CN 201621113020U CN 206161956 U CN206161956 U CN 206161956U
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- piezoelectric
- layer
- distorting lens
- piezo actuator
- single pressure
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Abstract
The utility model provides a combined type piezoelectricity distorting lens, includes single pressure electricity distorting lens and single pressure [electric] actuator array, the setting of single pressure electricity distorting lens is in the top of single pressure [electric] actuator array to spliced pole through connecting on the single pressure [electric] actuator array supports, single pressure electricity distorting lens is by following the last optics reflection stratum that down sets gradually, first elastic layer, conduct front electrode layer, first piezoelectric layer, backside electrode layer publicly, the single pressure [electric] actuator array includes the single pressure [electric] actuator on a plurality of bases that are fixed in the band -pass hole, and every single pressure [electric] actuator includes second elastic layer and second piezoelectric layer, and the two sides of second piezoelectric layer has all covered the electrode layer, all is connected with the spliced pole that supports usefulness on every single pressure [electric] actuator. The utility model discloses piezoelectricity distorting lens combination by upper and lower two -layer forms, and is higher in the degree of integrating, promotes whole correcting feature, has improved the work bandwidth of distorting lens.
Description
Technical field
The utility model belongs to optics field, is related to a kind of compound piezoelectric distorting lens, in astronomical telescope
Make aberration correction.
Technical background
Adaptive optics is a kind of wavefront correction technology that recent decades grow up, by the face shape reality for adjusting distorting lens
Now to the correction of distorted wavefront in light path, imaging resolution is improved.Development of the adaptive optics to astronomical telescope generates leather
The impact of life property, modern heavy foundation, space-based telescope are almost provided with ADAPTIVE OPTICS SYSTEMS.With astronomical telescope
（The especially construction of more large aperture telescope）Also to the increase of adaptive optics demand, Primary Component distorting lens is proposed more
High challenge：Driver number is up to thousands of or even up to ten thousand, and more than 10 microns, bandwidth is more than hundred hertz for deflection.Double pressures
Electricity or single piezoelectric deforming mirror drive surface deformation using piezo-electric traverse effect, excellent with simple structure, lightweight, low cost etc.
Point, has broad application prospects in 8-10 meter level telescopes.
The B2 of United States Patent (USP) US 6,464,364 discloses a kind of bimorph deformable mirror, by two panels piezoelectric ceramics or electroluminescent
Telescopic material bonding is formed, wherein a piece of outer surface plates reflecting layer as optical surface through polishing, while also serving as producing
The driving layer of out of focus, another outer surface figure dissolves discrete electrodes array as the driving layer of correction higher order aberratons.Due to general
Logical piezoceramic material quality is crisp to be difficult to produce the high quality optical minute surface of larger caliber.The resonance frequency of deformation mirror driver
Rate and distorting lens size square are inversely proportional to, driver popularization（Size increases）Cause the decline of operating frequency.It is to protect
Enlargement deformation mirror driver scale and reduces cost on the premise of operating frequency is held, the A2 of international monopoly WO 2009/007447 is public
Opened a kind of based on modular single piezoelectric patches distorting lens, device is spliced by multiple detached sub- distorting lens, system it is humorous
Vibration frequency determines by sub- distorting lens, but have that minute surface is discontinuous and each sub- distorting lens between phase coordination difficulty high ask
Topic.The design of the above distorting lens cannot meet the needs of atmospheric perturbation wavefront distortion correction in astronomical telescope.
The content of the invention
The purpose of this utility model is to overcome deficiency of the prior art, there is provided a kind of both to have had high driver number
Again the compound piezoelectric distorting lens of the low-cost and high-performance with high workload bandwidth, for astronomical telescope a kind of new wavefront is provided
Adjuster.
A kind of compound piezoelectric distorting lens, it is characterised in that：It is single including single piezoelectric deforming mirror and single piezo actuator array
Piezoelectric deforming mirror is arranged on the top of single piezo actuator array, and the connecting pole by being connected on single piezo actuator array
Support；Single piezoelectric deforming mirror is by the optical reflecting layer for setting gradually from top to bottom, the first elastic layer, as front electricity publicly
Pole layer, the first piezoelectric layer, back electrode layer；Single piezo actuator array includes multiple single pressures being fixed on the pedestal with through hole
Electric actuator, each single piezo actuator includes the second elastic layer and the second piezoelectric layer, and the two sides of the second piezoelectric layer is all covered with
Electrode layer, is respectively connected with the connecting pole of support on each single piezo actuator.The utility model is become by the piezoelectricity of upper and lower two-layer
Shape mirror is combined, higher in integration degree；The displacement transmission that bottom list piezo actuator is produced by connecting pole
To distorting lens minute surface, single piezo actuator array of bottom can provide large deformation to be used to correct low order aberration, top list piezoelectric patches
Distorting lens is then used to correct higher order aberratons, and the combination of two distorting lens lifts Integral correction performance, is driven by single piezoelectricity of bottom
The effect of contraction of dynamic device array, the intrinsic frequency for making single piezoelectric patches distorting lens is not directly dependent on distorting lens diameter, improves change
The bandwidth of operation of shape mirror.
Further, single piezoelectric deforming mirror front electrode layer is monolithic structure, and back electrode layer is combined by multiple small electrodes
Form so that single piezoelectric deforming mirror can correct higher order aberratons.
Further, the number of electrodes of single piezoelectric deforming mirror one or two quantity higher than single piezo actuator array electrode quantity
Level, can well correct higher order aberratons.
Further, the resonant frequency of single piezo actuator is higher than the resonant frequency of single piezoelectric deforming mirror, through connecting pole
After support, single piezoelectric deforming mirror resonant frequency is improved.
Further, the multiple single piezo actuator in single piezo actuator array is integrative-structure or isolating construction.
Further, the second piezoelectric layer of single piezo actuator is arranged on the top of the second elastic layer, or the second elastic layer
It is arranged on the top of the second piezoelectric layer.
Further, connecting pole is located at the center of single piezo actuator.
Further, a through hole is corresponded to below each single piezo actuator, is fixed on pedestal by the second elastic layer.
When the second piezoelectric layer is arranged on the second elastic layer lower section, the setting of through hole facilitates the extraction of the electrode on the second piezoelectric layer.
Operation principle of the present utility model：When single piezo actuator array applied voltage of bottom, actuator produce from
Face displacement, single piezoelectric deforming mirror can be delivered to by connecting pole by displacement, be deformed single piezoelectric deforming mirror.Bottom list piezoelectricity
Actuator array number is less, but displacement is big, can be used to correct the low order aberration of higher magnitude.Superposed single piezoelectricity becomes
Because horizontal inverse piezoelectric effect can make minute surface produce flexural deformation, the actuator quantity of single piezoelectric deforming mirror during shape mirror applied voltage
One or two orders of magnitude higher than the actuator array of bottom, therefore can well correct higher order aberratons.In application process, single pressure
Electric actuator array and single piezoelectric deforming mirror compound use, with correction amplitude it is big, calibration capability is strong the characteristics of.
The utility model has the advantage of：
1., by the effect of contraction of single piezo actuator array of bottom, make the intrinsic frequency of single piezoelectric patches distorting lens not straight
Connect and depend on distorting lens diameter, improve the bandwidth of operation of distorting lens.
2. single piezo actuator array of bottom can provide large deformation for correcting low order aberration, and top list piezoelectric patches becomes
Shape mirror is then used to correct higher order aberratons, and the combination of two distorting lens lifts Integral correction performance.
3. combined by two piezoelectric deforming mirrors, compared to two independent deformation microscope groups into co-deflection mirror system,
It is higher in integration degree.
Description of the drawings
Fig. 1 is structural representation of the present utility model.
Fig. 2 is the schematic diagram of the utility model list piezoelectric deforming mirror.
Fig. 3 is 2 kinds of electrode structure schematic diagrames of the utility model list piezoelectric deforming mirror.
Fig. 4 is the various structures schematic diagram of single piezo actuator array of the present utility model.
Fig. 5 is the cooperation schematic diagram of bottom list piezo actuator array of the present utility model and top list piezoelectric deforming mirror.
Specific embodiment
Referring to the drawings, the utility model is further illustrated：
Referring to Fig. 1, the compound piezoelectric piece distorting lens of the present embodiment offer, including single piezoelectric deforming mirror and the bottom on top
Single piezo actuator array, single piezoelectric deforming mirror supports by the connecting pole 21 being connected on single piezo actuator array.Connection
Post 21 is 1 millimeter of diameter, long 10 millimeters ceramics pole, and connecting pole 21 is consistent with single piezo actuator quantity of bottom, and is located at
Single piezo actuator center.
The schematic diagram of the mono- piezoelectric deforming mirrors of Fig. 2, single piezoelectric deforming mirror is made up of the first elastic layer 12 and the first piezoelectric layer 11.
In the present embodiment the first elastic layer 12 for 500 microns of 150 millimeters thick of diameter twin polishing silicon chip, the diameter of the first piezoelectric layer 11
150 200 microns of millimeters thicks.Piezoelectric layer two sides covers electrode layer, and electrode layer is thick 5 microns silver electrode, wherein elastic with first
The front electrode layer 14 of the contact of layer 12 is full wafer electrode, and used as publicly, back electrode layer 15 is divided into multiple little electrodes.
Fig. 3 show two kinds of detached electrode patterns, and the electrode of Fig. 3 a is sector structure, and electrode is according to annular array, the electrode of Fig. 3 b
For hexagonal structure, honeycomb arrangement.When to 14 applied voltage of back electrode layer 15 and front electrode layer, pressed due to laterally inverse
Electrical effect can make minute surface produce flexural deformation.Back electrode layer adopts inscribed circle for 4 millimeters of hexagonal shaped electrodes in the present embodiment
Pattern, in single piezoelectric deforming mirror of 150 mm dias 1000 multiple electrodes units can be arranged.Due to electrode number it is numerous, it is single
Piezoelectric deforming mirror can correct higher order aberrations.Second elastic layer upper surface covers metal or polymeric optical reflecting layer 13, uses
In the reflection to light beam.
Fig. 4 is single piezo actuator array of bottom.Multiple single piezo actuators are included in array and band through hole is fixed on
Pedestal 33 on, below each single piezo actuator correspondence one through hole.Single piezo actuator is by the second elastic layer 32 and second
Piezoelectric layer 31 is constituted, and is fixed on pedestal by the second elastic layer 32, and the second piezoelectric layer two sides covers electrode layer 34,35.Single pressure
Electric actuator can have various ways, can be second piezoelectric layer 31 and the second elastic layer 32 of each actuator as shown in fig. 4 a
All it is detached and the second piezoelectric layer 31 is on the second elastic layer 32, or the second bullet of each actuator as shown in Figure 4 b
Property layer 32 is continuous and the second piezoelectric layer 31 is detached and the second piezoelectric layer 31 is on the second elastic layer 32, or such as
Second piezoelectric layer 31 and the second elastic layer 32 of each actuator shown in Fig. 4 c is detached and the second piezoelectric layer 31 is
Under two elastic layers 32, or the second elastic layer 32 of each actuator as shown in figure 4d is continuous and the second piezoelectric layer
31 is detached and the second piezoelectric layer 31 is under the second elastic layer 32.The present embodiment adopts Fig. 4 a schemes, the second elastic layer 32
For 34 millimeters thick of diameter, 200 microns of copper sheet, 200 microns of 31 diameter of the second piezoelectric layer, 28 millimeters thick.Cover on the second piezoelectric layer two sides
The thick 2 microns silver electrode layer of lid.When single piezo actuator array applied voltage of bottom, actuator produces acoplanarity displacement, leads to
Crossing support column 21 can be delivered to single piezoelectric deforming mirror by displacement, be deformed single piezoelectric deforming mirror.Bottom actuator array number
Mesh is less, but displacement is big, can be used to correct the low order aberration of higher magnitude.The intrinsic frequency of single piezoelectric deforming mirror is with size
Increase and index increases, but by the effect of contraction of bottom list piezo actuator array, make the intrinsic of single piezoelectric patches distorting lens
Frequency is not directly dependent on distorting lens diameter, improves bandwidth of operation.
Fig. 5 is a kind of coordinated scheme of bottom list piezo actuator array and top list piezoelectric deforming mirror, single piezoelectric deforming
The electrode of mirror and single piezo actuator array are all honeycomb arrangements, and both arrangement modes are not limited to this.Single piezoelectricity becomes
The number of electrodes of shape mirror one or two orders of magnitude higher than bottom actuator array, using middle and lower part list piezo actuator array and upper
Single piezoelectric deforming mirror compound use in portion, can either correct the low order aberration of higher magnitude, and higher order aberratons, Neng Gouman can be corrected again
Requirement of the astronomical telescope to distorting lens in 10 meters of foot.When single piezo actuator array applied voltage of bottom, actuator is produced
Raw acoplanarity displacement, single piezoelectric deforming mirror can be delivered to by connecting pole 21 by displacement, be deformed single piezoelectric deforming mirror.Bottom
Single piezo actuator array can provide large deformation for correcting low order aberration, top list piezoelectric patches distorting lens is then used to correct height
Rank aberration, piezo actuator array and single piezoelectric deforming mirror compound use, with correction amplitude it is big, calibration capability is strong the characteristics of.
Content described in this specification embodiment is only enumerating for the way of realization to inventive concept, of the present utility model
Protection domain is not construed as being only limitted to the concrete form that embodiment is stated, protection domain of the present utility model is also and in this
Art personnel according to the utility model design it is conceivable that equivalent technologies mean.
Claims (8)
1. a kind of compound piezoelectric distorting lens, it is characterised in that：Including single piezoelectric deforming mirror and single piezo actuator array, single pressure
Electric distorting lens is arranged on the top of single piezo actuator array, and the connecting pole by being connected on single piezo actuator array
Support；Single piezoelectric deforming mirror is by the optical reflecting layer for setting gradually from top to bottom, the first elastic layer, as front electrode publicly
Layer, the first piezoelectric layer, back electrode layer；Single piezo actuator array includes multiple single piezoelectricity being fixed on the pedestal with through hole
Actuator, each single piezo actuator includes the second elastic layer and the second piezoelectric layer, and the two sides of the second piezoelectric layer is all covered with electricity
Pole layer, is respectively connected with the connecting pole of support on each single piezo actuator.
2. compound piezoelectric distorting lens as claimed in claim 1, it is characterised in that：Single piezoelectric deforming mirror front electrode layer is whole
Chip architecture, back electrode layer is combined by multiple small electrodes.
3. compound piezoelectric distorting lens as claimed in claim 1, it is characterised in that：The number of electrodes of single piezoelectric deforming mirror is than single
High one or two orders of magnitude of piezo actuator array electrode quantity.
4. compound piezoelectric distorting lens as claimed in claim 1, it is characterised in that：The resonant frequency of single piezo actuator is than single
The resonant frequency of piezoelectric deforming mirror is high.
5. the compound piezoelectric distorting lens as described in one of claim 1 ~ 4, it is characterised in that：In single piezo actuator array
Multiple single piezo actuators are integrative-structure or isolating construction.
6. compound piezoelectric distorting lens as claimed in claim 5, it is characterised in that：Second piezoelectric layer of single piezo actuator sets
Put in the top of the second elastic layer, or the second elastic layer is arranged on the top of the second piezoelectric layer.
7. compound piezoelectric distorting lens as claimed in claim 6, it is characterised in that：Connecting pole is located in single piezo actuator
At the heart.
8. compound piezoelectric distorting lens as claimed in claim 7, it is characterised in that：Correspond to below each single piezo actuator
One through hole, is fixed on pedestal by the second elastic layer.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201621113020.0U CN206161956U (en) | 2016-10-11 | 2016-10-11 | Combined type piezoelectricity distorting lens |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201621113020.0U CN206161956U (en) | 2016-10-11 | 2016-10-11 | Combined type piezoelectricity distorting lens |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN206161956U true CN206161956U (en) | 2017-05-10 |
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ID=58652613
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201621113020.0U Expired - Fee Related CN206161956U (en) | 2016-10-11 | 2016-10-11 | Combined type piezoelectricity distorting lens |
Country Status (1)
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| CN (1) | CN206161956U (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106405824A (en) * | 2016-10-11 | 2017-02-15 | 宁波大学 | Composite piezoelectric deformable mirror |
| CN112068307A (en) * | 2020-09-21 | 2020-12-11 | 中国科学院长春光学精密机械与物理研究所 | Hybrid thermally-driven wavefront correction device |
| CN113534443A (en) * | 2020-04-21 | 2021-10-22 | 中国科学院理化技术研究所 | Driver and deformable mirror |
-
2016
- 2016-10-11 CN CN201621113020.0U patent/CN206161956U/en not_active Expired - Fee Related
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106405824A (en) * | 2016-10-11 | 2017-02-15 | 宁波大学 | Composite piezoelectric deformable mirror |
| CN113534443A (en) * | 2020-04-21 | 2021-10-22 | 中国科学院理化技术研究所 | Driver and deformable mirror |
| CN112068307A (en) * | 2020-09-21 | 2020-12-11 | 中国科学院长春光学精密机械与物理研究所 | Hybrid thermally-driven wavefront correction device |
| CN112068307B (en) * | 2020-09-21 | 2021-12-07 | 中国科学院长春光学精密机械与物理研究所 | Hybrid thermally-driven wavefront correction device |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20170510 Termination date: 20191011 |