CN113791521A - 高压放电灯 - Google Patents

高压放电灯 Download PDF

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Publication number
CN113791521A
CN113791521A CN202110935321.0A CN202110935321A CN113791521A CN 113791521 A CN113791521 A CN 113791521A CN 202110935321 A CN202110935321 A CN 202110935321A CN 113791521 A CN113791521 A CN 113791521A
Authority
CN
China
Prior art keywords
reflector
side tube
light emitting
lamp
tube portion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN202110935321.0A
Other languages
English (en)
Chinese (zh)
Inventor
原田智纪
川岛洋德
榎本芳幸
吉本芳幸
富樫工
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Phoenix Motor Co ltd
Phoenix Electric Co Ltd
Original Assignee
Phoenix Motor Co ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Phoenix Motor Co ltd filed Critical Phoenix Motor Co ltd
Publication of CN113791521A publication Critical patent/CN113791521A/zh
Pending legal-status Critical Current

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Classifications

    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/20Exposure; Apparatus therefor
    • G03F7/2002Exposure; Apparatus therefor with visible light or UV light, through an original having an opaque pattern on a transparent support, e.g. film printing, projection printing; by reflection of visible or UV light from an original such as a printed image
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/20Exposure; Apparatus therefor
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00Gas-discharge or vapour-discharge lamps
    • H01J61/02Details
    • H01J61/36Seals between parts of vessels; Seals for leading-in conductors; Leading-in conductors
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00Gas-discharge or vapour-discharge lamps
    • H01J61/02Details
    • H01J61/52Cooling arrangements; Heating arrangements; Means for circulating gas or vapour within the discharge space
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00Gas-discharge or vapour-discharge lamps
    • H01J61/84Lamps with discharge constricted by high pressure
    • H01J61/86Lamps with discharge constricted by high pressure with discharge additionally constricted by close spacing of electrodes, e.g. for optical projection

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Non-Portable Lighting Devices Or Systems Thereof (AREA)
  • Vessels And Coating Films For Discharge Lamps (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
CN202110935321.0A 2017-02-02 2018-01-31 高压放电灯 Pending CN113791521A (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2017017856 2017-02-02
JP2017-017856 2017-02-02
CN201880009946.0A CN110249267B (zh) 2017-02-02 2018-01-31 高压放电灯

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
CN201880009946.0A Division CN110249267B (zh) 2017-02-02 2018-01-31 高压放电灯

Publications (1)

Publication Number Publication Date
CN113791521A true CN113791521A (zh) 2021-12-14

Family

ID=63040732

Family Applications (2)

Application Number Title Priority Date Filing Date
CN201880009946.0A Active CN110249267B (zh) 2017-02-02 2018-01-31 高压放电灯
CN202110935321.0A Pending CN113791521A (zh) 2017-02-02 2018-01-31 高压放电灯

Family Applications Before (1)

Application Number Title Priority Date Filing Date
CN201880009946.0A Active CN110249267B (zh) 2017-02-02 2018-01-31 高压放电灯

Country Status (5)

Country Link
JP (1) JP6457162B2 (ja)
KR (1) KR102483865B1 (ja)
CN (2) CN110249267B (ja)
TW (1) TWI765960B (ja)
WO (1) WO2018143300A1 (ja)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102537954B1 (ko) * 2017-08-23 2023-05-30 페닉스덴키가부시키가이샤 광원 장치, 노광 장치 및 광원 장치의 판정 방법
WO2020130090A1 (ja) * 2018-12-21 2020-06-25 株式会社ブイ・テクノロジー 露光装置用光照射装置

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012114390A (ja) * 2010-11-29 2012-06-14 Nsk Technology Co Ltd 露光装置用光照射装置
JP2013004503A (ja) * 2011-06-22 2013-01-07 Ushio Inc 光源装置

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1158354A1 (en) * 1999-12-02 2001-11-28 Matsushita Electric Industrial Co., Ltd. Discharge lamp and lamp device
JP3481612B2 (ja) * 1999-12-02 2003-12-22 松下電器産業株式会社 放電ランプおよびランプ装置
JP2002075014A (ja) * 2000-06-16 2002-03-15 Matsushita Electric Ind Co Ltd ランプユニットおよび画像投影装置
JP3855955B2 (ja) * 2003-03-28 2006-12-13 セイコーエプソン株式会社 光源装置及びプロジェクタ
KR20040102301A (ko) * 2003-05-27 2004-12-04 삼성전자주식회사 보조광원을 채용하는 조명 장치 및 프로젝션 시스템
JP2006260891A (ja) * 2005-03-16 2006-09-28 Phoenix Denki Kk 超高圧放電灯ユニット
CN1881522A (zh) * 2005-06-15 2006-12-20 晶赞光电股份有限公司 一种具有辅助反射装置的高压气体放电灯
WO2008135084A1 (de) * 2007-05-04 2008-11-13 Osram Gesellschaft mit beschränkter Haftung Hochdruckentladungslampe mit zündhilfe
JP5243837B2 (ja) * 2008-04-14 2013-07-24 三菱電機照明株式会社 反射鏡付放電ランプ
JP2010244821A (ja) * 2009-04-06 2010-10-28 Ushio Inc 光照射装置
DE202009011727U1 (de) * 2009-08-28 2009-12-17 Osram Gesellschaft mit beschränkter Haftung Entladungslampe mit Reflektor
JP5376409B2 (ja) * 2010-01-07 2013-12-25 ウシオ電機株式会社 光源装置および光照射装置
JP2012113269A (ja) 2010-11-29 2012-06-14 Nsk Technology Co Ltd 露光装置用光照射装置
JP2013012389A (ja) * 2011-06-29 2013-01-17 Ushio Inc 光源素子
JP5869713B1 (ja) 2015-04-13 2016-02-24 フェニックス電機株式会社 光源装置及び露光装置とその検査方法

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012114390A (ja) * 2010-11-29 2012-06-14 Nsk Technology Co Ltd 露光装置用光照射装置
JP2013004503A (ja) * 2011-06-22 2013-01-07 Ushio Inc 光源装置

Also Published As

Publication number Publication date
JPWO2018143300A1 (ja) 2019-02-07
TW201832268A (zh) 2018-09-01
KR20190111045A (ko) 2019-10-01
CN110249267A (zh) 2019-09-17
WO2018143300A1 (ja) 2018-08-09
TWI765960B (zh) 2022-06-01
JP6457162B2 (ja) 2019-01-23
KR102483865B1 (ko) 2023-01-03
CN110249267B (zh) 2021-09-03

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