CN113764188A - Vacuum capacitor capable of changing capacitance capacity - Google Patents
Vacuum capacitor capable of changing capacitance capacity Download PDFInfo
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- CN113764188A CN113764188A CN202111104286.4A CN202111104286A CN113764188A CN 113764188 A CN113764188 A CN 113764188A CN 202111104286 A CN202111104286 A CN 202111104286A CN 113764188 A CN113764188 A CN 113764188A
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- 230000008859 change Effects 0.000 abstract description 6
- 238000010586 diagram Methods 0.000 description 5
- 239000004065 semiconductor Substances 0.000 description 4
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- 230000007774 longterm Effects 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 238000012360 testing method Methods 0.000 description 3
- 230000009286 beneficial effect Effects 0.000 description 2
- 238000009413 insulation Methods 0.000 description 2
- 239000012212 insulator Substances 0.000 description 2
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- 230000004075 alteration Effects 0.000 description 1
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
- H01G5/00—Capacitors in which the capacitance is varied by mechanical means, e.g. by turning a shaft; Processes of their manufacture
- H01G5/04—Capacitors in which the capacitance is varied by mechanical means, e.g. by turning a shaft; Processes of their manufacture using variation of effective area of electrode
- H01G5/14—Capacitors in which the capacitance is varied by mechanical means, e.g. by turning a shaft; Processes of their manufacture using variation of effective area of electrode due to longitudinal movement of electrodes
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
- H01G5/00—Capacitors in which the capacitance is varied by mechanical means, e.g. by turning a shaft; Processes of their manufacture
- H01G5/01—Details
- H01G5/014—Housing; Encapsulation
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Abstract
The invention relates to the technical field of electronics, and discloses a vacuum capacitor with a changeable capacitor capacity. According to the invention, the voice coil motor coil is electrified to generate a driving force magnetic field under the action of current, so that the magnet generates an induced electromotive force, and under the action of the induced electromotive force, because the current of the voice coil motor coil is different, the movable electrode moves in a direction vertical to the current direction of the voice coil motor coil, so that the relative area between the movable electrode and the fixed electrode is changed, and the capacitance capacity is convenient to change rapidly.
Description
Technical Field
The invention relates to the technical field of electronics, in particular to a vacuum capacitor with changeable capacitor capacity.
Background
The vacuum capacitor is a capacitor taking vacuum as a medium, and compared with capacitors of other media, the vacuum capacitor has the characteristics of high withstand voltage, small volume, low loss, stable and reliable performance and the like, and the variable vacuum capacitor is a key part in a radio frequency source matcher and is widely applied to semiconductor etching machines, industrial machine equipment such as coated plasma and the like, medical magnetic resonance and radio station emission.
The existing vacuum capacitor capable of changing the capacitance capacity is characterized in that when the capacitance value of the capacitor is adjusted, a testing instrument bridge is additionally arranged at two ends of a shell insulator, meanwhile, a screw rod screw is adjusted to drive an action electrode, the relative area between the electrodes is changed by compressing and stretching a corrugated pipe, so that the capacitance capacity is changed, the operation is inconvenient, the adjusting time is long, the production efficiency of a semiconductor chip is seriously influenced, in long-term use, the screw rod thread can cause the gap of the screw rod thread to be enlarged due to long-term frequent rotation, the capacitance value is not accurately adjusted, meanwhile, the corrugated pipe is easy to generate elastic fatigue under continuous stretching and compression, the corrugated pipe can generate crack vacuum leakage, the insulation degree is reduced, and the service life and the use cost of the vacuum capacitor are seriously influenced.
Disclosure of Invention
Technical problem to be solved
Aiming at the defects of the prior art, the invention provides the vacuum capacitor with the capacity capable of being changed, the vacuum capacitor has the advantages of higher impedance matching speed, millisecond-level actuation time, long service life, long-term and stable vacuum degree sealing performance and small volume, the capacity value adjusting speed of the vacuum capacitor is high, the precision is high, the production efficiency and the product yield of a semiconductor chip are greatly improved, and the problems in the background art are solved.
(II) technical scheme
In order to achieve the purpose, the invention provides the following technical scheme: a vacuum capacitor capable of changing capacitance capacity comprises an insulating rod, wherein the top end of the insulating rod is connected with an upper shell, the bottom end of the insulating rod is provided with a lower shell, and the top end of the lower shell is connected with a fixed electrode;
the top of the fixed electrode is provided with a movable electrode, and the outer wall of the movable electrode is connected with a magnet;
the upper shell and the lower shell are connected through an insulating shell, and a voice coil motor coil is arranged on the outer wall of the insulating shell;
a spring is sleeved on the outer wall of the top of the insulating rod, and the spring is installed at the bottom of the upper shell;
the bottom of spring is connected with the moving electrode connection piece, and the bottom of moving electrode connection piece is connected with the movable electrode.
Preferably, the bottom end of the fixed electrode is fixedly connected with the lower shell, and the central axis of the fixed electrode coincides with the central axis of the lower shell.
Preferably, the insulating rod is fixedly installed at the axial centers of the upper shell and the lower shell, and the upper shell, the lower shell and the insulating shell form a vacuum chamber outside the fixed electrode and the movable electrode.
Preferably, the movable range of the fixed electrode and the movable electrode is a vacuum chamber consisting of an insulating shell, an upper shell and a lower shell.
Preferably, the moving electrode connecting piece forms an elastic structure through the spring and the upper shell, and the central axis of the spring coincides with the central axis of the insulating rod.
Preferably, the voice coil motor coil is wound and connected on the outer wall of the insulating shell.
Preferably, the outer side wall of the moving electrode connecting piece is connected with the inner wall of the upper shell in a fitting manner, and three groups of moving electrode connecting pieces are arranged in the axial center of the insulating rod in an annular and equidistant manner.
Preferably, the movable electrodes are uniformly distributed at intervals on the top of the fixed electrode, and the outermost ring of the movable electrode is connected with the magnet.
Preferably, the movable electrode forms a lifting structure with the fixed electrode through the magnet, the voice coil motor coil, and the central axis of the fixed electrode coincides with the central axis of the movable electrode, and the central axis of the movable electrode coincides with the central axis of the insulating rod.
Preferably, the insulation rod and the movable electrode connecting piece are vertically distributed, and the movable electrode connecting piece and the movable electrode form a transmission structure through a spring.
(III) advantageous effects
Compared with the prior art, the invention has the following beneficial effects:
1. according to the invention, the voice coil motor coil is electrified to generate a driving force magnetic field under the action of current, so that the magnet generates an induced electromotive force, under the action of the induced electromotive force, the current of the voice coil motor coil is different, so that the movable electrode moves in a direction vertical to the current direction of the voice coil motor coil, the relative area between the movable electrode and the fixed electrode is changed, and the capacitance capacity is convenient to change rapidly.
2. According to the invention, when the capacitance value of the variable vacuum capacitor is adjusted, the integral structure of the variable vacuum capacitor is changed, so that the capacitance adjusting time of the variable vacuum capacitor is shortened, the position accuracy of the capacitance value is greatly improved, the external volume is small, the variable vacuum capacitor can be conveniently used in different ranges, and meanwhile, the impedance matching speed and the millisecond-level actuation time are higher, the innovation of the variable vacuum capacitor in the radio frequency industry is realized, and the production efficiency and the yield of semiconductor chips are favorably improved.
Drawings
FIG. 1 is a schematic diagram of an external structure of a vacuum capacitor with a variable capacitance according to the present invention;
FIG. 2 is a schematic diagram illustrating an internal cross-sectional structure of a vacuum capacitor with a variable capacitance according to the present invention;
FIG. 3 is a schematic view of a connection structure of a connecting piece for a moving electrode according to the present invention;
FIG. 4 is a schematic diagram of an internal open structure of a vacuum capacitor with variable capacitance according to the present invention;
FIG. 5 is a schematic diagram of an internal three-dimensional cross-sectional structure of a vacuum capacitor with a variable capacitance according to the present invention;
FIG. 6 is a schematic cross-sectional view of a conventional vacuum capacitor with variable capacitance;
FIG. 7 is a schematic view of a conventional connection structure of a vacuum capacitor with a variable capacitance;
FIG. 8 is a schematic diagram of an open structure of a conventional vacuum capacitor with variable capacitance;
fig. 9 is a schematic external structural view of a conventional vacuum capacitor capable of changing capacitance.
In the figure: 1. an insulating rod; 2. an upper housing; 3. a lower housing; 4. a fixed electrode; 5. a movable electrode; 6. a magnet; 7. an insulating housing; 8. a voice coil motor coil; 9. a spring; 10. and a moving electrode connecting sheet.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
Referring to fig. 6-9, the conventional vacuum capacitor with changeable capacitance comprises a screw, a ceramic insulator, a bellows, a housing, and two electrodes fixed and movable respectively, and the movable electrode is driven to move by adjusting the screw, so as to compress and extend the bellows to change the relative area between the movable electrode and the fixed electrode, thereby changing the capacitance.
Example one
Referring to fig. 1 to 5, a vacuum capacitor capable of changing capacitance capacity includes an insulating rod 1, an upper case 2, a lower case 3, a fixed electrode 4, a movable electrode 5, a magnet 6, an insulating housing 7, a voice coil motor coil 8, a spring 9, and a movable electrode connecting piece 10, wherein the top end of the insulating rod 1 is connected to the upper case 2, the bottom end of the insulating rod 1 is provided with the lower case 3, the top end of the lower case 3 is connected to the fixed electrode 4, the volume of the vacuum capacitor is reduced, and when the capacitance capacity is adjusted, the adjustment speed is fast, the accuracy is high, the external dimension of the vacuum capacitor capable of changing capacitance capacity is 130mm long × 73mm in diameter, and the mass m is 1.2 kg;
the top of the fixed electrode 4 is provided with a movable electrode 5, the outer wall of the movable electrode 5 is connected with a magnet 6, the actuating direction of the movable electrode 5 can change the height h between two capacitor polarities, so that the capacitor capacity C is changed, the higher the height h of the two polarities is, the larger the capacitor capacity C is, and the capacitor capacity C is in direct proportion to the height h;
the upper shell 2 and the lower shell 3 are connected through an insulating shell 7, a voice coil motor coil 8 is arranged on the outer wall of the insulating shell 7, and because the current of the voice coil motor coil 8 is different, the induced electromotive force generated by the magnet 6 is different, and under the interaction of the two magnetic fields, the movable electrode 5 acts in a direction perpendicular to the current direction of the voice coil motor coil 8;
the spring 9 is sleeved on the outer wall of the top of the insulating rod 1, the spring 9 is installed at the bottom of the upper shell 2, and the movable electrode 5 is driven to move on the same axis under the action of the insulating rod 1 serving as a central shaft through the arrangement of the insulating rod 1, so that the moving precision between the movable electrode 5 and the fixed electrode 4 is ensured;
the bottom end of the spring 9 is connected with a movable electrode connecting piece 10, the bottom end of the movable electrode connecting piece 10 is connected with the movable electrode 5, and the movable electrode connecting piece 10 is used for measuring the capacitance value of the variable vacuum capacitor by connecting the movable electrode 5 with the upper shell 2.
Referring to fig. 2-5, the bottom end of the fixed electrode 4 is fixedly connected to the lower housing 3, and the central axis of the fixed electrode 4 coincides with the central axis of the lower housing 3, so that the fixed electrode 4 is fixed, and the vertical movement of the movable electrode 5 can adjust the relative area between the fixed electrode 4 and the movable electrode 5, thereby changing the capacitance.
Referring to fig. 2, the insulating rod 1 is fixedly mounted at the axial centers of the upper housing 2 and the lower housing 3, and the upper housing 2, the lower housing 3 and the insulating housing 7 form a vacuum chamber outside the fixed electrode 4 and the movable electrode 5, the insulating housing 7 has a good insulating function, and the insulating housing 7 can form an internal vacuum chamber through the upper housing 2 and the lower housing 3.
Referring to fig. 2, the movable range of the fixed electrode 4 and the movable electrode 5 is a vacuum chamber formed by the insulating housing 7 and the upper housing 2 and the lower housing 3, and by adjusting the relative area between the fixed electrode 4 and the movable electrode 5, the higher the two-capacitor polarity height h of the fixed electrode 4 and the movable electrode 5 is, the larger the capacitor capacitance C is.
Referring to fig. 2-5, the moving electrode connecting piece 10 forms an elastic structure with the upper case 2 through the spring 9, and the central axis of the spring 9 coincides with the central axis of the insulating rod 1, so that the spring 9 can prevent the moving electrode 5 from colliding with the upper case 2, and meanwhile, has a downward thrust to the moving electrode 5, so as to ensure the stability of capacitance change and be beneficial to prolonging the service life.
Referring to fig. 1-3, the vcm coil 8 is wound around the outer wall of the insulating housing 7, and a driving force magnetic field can be generated by the vcm coil 8 when the vcm coil 8 is energized.
Referring to fig. 2-5, the outer sidewall of the moving electrode connecting piece 10 is attached to the inner wall of the upper housing 2, and three sets of the moving electrode connecting pieces 10 are annularly and equidistantly disposed about the axis of the insulating rod 1, so that the moving electrode connecting pieces 10 are attached to the upper housing 2 to facilitate the conduction between the moving electrode connecting pieces 10 and the inner wall of the upper housing 2, thereby ensuring the stability of the vacuum capacitor.
Referring to fig. 3-5, the movable electrodes 5 are uniformly spaced on the top of the fixed electrode 4, and the outermost ring of the movable electrode 5 is connected with the magnet 6, the magnet 6 can generate an induced magnetic field, and the acting force generated by the coil 8 of the voice coil motor is equal to the acting force generated by the magnet 6 and opposite in direction.
Referring to fig. 5, the movable electrode 5 forms a lifting structure with the fixed electrode 4 through the magnet 6 and the voice coil motor coil 8, the central axis of the fixed electrode 4 coincides with the central axis of the movable electrode 5, the central axis of the movable electrode 5 coincides with the central axis of the insulating rod 1, the movable electrode 5 and the fixed electrode 4 are two polarities of a vacuum capacitor, and the capacity of the vacuum capacitor is changed by changing the relative area between the two electrodes of the movable electrode 5 and the fixed electrode 4.
Referring to fig. 2-5, the insulating rod 1 and the movable electrode connecting piece 10 are vertically distributed, and the movable electrode connecting piece 10 and the movable electrode 5 form a transmission structure through the spring 9, so that the movable electrode 5 can be prevented from upwardly colliding with the upper case 2 through the arrangement of the spring 9, and a downward pushing force is provided for the movable electrode 5, so as to change the relative area between the movable electrode 5 and the fixed electrode 4.
Example two
To compare the parameter difference between the vacuum capacitor with the variable capacitance of the present embodiment, the present capacitor model SCV-205G is compared with the vacuum capacitor with the variable capacitance of the present embodiment:
the external dimension of the vacuum capacitor with the capacitor model of SCV-205G is set to be 140 mm in length multiplied by 73mm in diameter, the weight W is 1.3 kg, the polar height h of the two capacitors is 0-35 mm, the rotating shaft can rotate for 12 circles totally, the rotating shaft rotates for one circle, the moving electrode moves for 2.9 mm, the rotating shaft rotates for 500 picofarads for 35 mm-500 picofarads for 1 mm-14.3 picofarads, the rotating shaft rotates for one circle for 12 circles-500 picofarads for 1 circle-41.7 picofarads for one circle, the moving electrode moves for 2.9 mm, and the capacitance capacity is changed for 41.47 picofarads.
In this embodiment, the external dimension of the variable vacuum capacitor is 130mm × 73mm in diameter, and the mass m is 1.2 kg, when the force generated by the voice coil motor coil 8 and the force generated by the magnet 6 are equal in magnitude and opposite in direction, the time t is 1 second, the length L of the voice coil motor coil 8 is 1 m, the mass m of the capacitor is 1.2 kg, the diameter d of the capacitor is 73mm, the ampere force F is BIL, the electromotive force E is BLV is Δ Φ/dt, so as to obtain the velocity V is Δ Φ/FLI, and the capacitance h/t is obtained as the two-capacitor-polarity height h is Δ Φ/FLI, that is, the current I is larger, the two-capacitor-polarity height h is higher, the capacitance C is larger, that is, the current I is 1 ma is obtained as the two-capacitor-polarity height h is 1 mm, and the capacitance C is 14.3 picofarad.
The vacuum capacitance was tested by the following steps:
the method comprises the following steps: testing the capacitance value of the capacitor by using a bridge;
step two: and (3) electrifying alternating-current high voltage to two ends of the variable vacuum capacitor by using a voltage-resistant tester, and determining whether the variable vacuum capacitor is normal within the test voltage range.
From the above data it can be derived: the variable vacuum capacitor has the advantages that the external dimension is 130mm multiplied by 73mm, the mass m is 1.2 kg, the volume is smaller compared with the existing vacuum capacitor, the variable vacuum capacitor is convenient to use under different environments, the adjustment speed is high and the accuracy is high when the capacitor capacity is adjusted under the condition that other parameters are not changed, the adjustment time is shortened when the capacitance value of the variable vacuum capacitor is adjusted, the position accuracy of the adjustment value is greatly improved, and the optimal design on the aspects of changing the capacitance value, the performance and the like is realized.
The working principle is as follows: when the vacuum capacitor is used, voltage is provided for the voice coil motor coil 8 from the outside, so that the voice coil motor coil 8 generates a driving force magnetic field under the action of current, meanwhile, the magnet 6 in the insulating shell 7 also generates an induced electromotive force with unchanged size and direction, the induced electromotive force generated by the magnet 6 is different due to the different current sizes of the voice coil motor coil 8, under the interaction of the two magnetic fields, the movable electrode 5 moves in a direction vertical to the current direction of the voice coil motor coil 8, so that the movable electrode connecting sheet 10 is connected with the movable electrode 5 to move, the spring 9 buffers the movable electrode 5 in the moving process at the top of the movable electrode connecting sheet 10, the upper shell 2 is prevented from being damaged, downward thrust is provided for the movable electrode 5, the relative area between the movable electrode 5 and the fixed electrode 4 is changed, and the capacity of the vacuum capacitor is changed, when the voice coil motor coil 8 is energized, the electromotive force E generated by the voice coil motor coil 8 is caused to become BLV, and L: the shape and length of the voice coil motor coil 8 are related, B is a constant magnetic field, V is a speed, the dynamic electromotive force generated by the voice coil motor coil 8 is in a proportional relationship with L and V, the induced electromotive force generated by the magnet 6 is not changed in magnitude and direction with the electromotive force generated by the voice coil motor coil 8, the actuation of the induced electromotive force is integrated with the actuation of the movable electrode 5, that is, the actuation direction of the movable electrode 5 is only related to the current and length of the voice coil motor coil 8, the magnetic field generated by the magnet 6 and the magnetic field generated by the voice coil motor coil 8 have the same polarity, the energized voice coil motor coil 8 generates a force in the magnetic field, if the magnetic field and the voice coil motor coil 8 are consistent, the magnitude of the force is proportional to the current of the voice coil motor coil 8, F is BIL, and L: the operation principle of the variable vacuum capacitor is completed by the fact that the shape and the length of the voice coil motor coil 8 are related, B is a constant magnetic field, the larger the current is, the larger the force is, the more the magnetic flux generated by the magnet 6 becomes, the more the magnetic flux Ψ becomes B · Scos θ, the θ becomes the included angle between B and S, the constant magnetic field becomes, the area S becomes Π r2 becomes constant, and the θ becomes 0, so that the magnetic flux of the magnet 6 becomes constant.
Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.
Claims (10)
1. A vacuum capacitor capable of changing capacitance capacity comprises an insulating rod (1), and is characterized in that: the top end of the insulating rod (1) is connected with an upper shell (2), the bottom end of the insulating rod (1) is provided with a lower shell (3), and the top end of the lower shell (3) is connected with a fixed electrode (4);
a movable electrode (5) is arranged at the top of the fixed electrode (4), and a magnet (6) is connected to the outer wall of the movable electrode (5);
the upper shell (2) is connected with the lower shell (3) through an insulating shell (7), and a voice coil motor coil (8) is arranged on the outer wall of the insulating shell (7);
a spring (9) is sleeved on the outer wall of the top of the insulating rod (1), and the spring (9) is installed at the bottom of the upper shell (2);
the bottom end of the spring (9) is connected with an electrode-moving connecting piece (10), and the bottom end of the electrode-moving connecting piece (10) is connected with the movable electrode (5).
2. The vacuum capacitor of claim 1, wherein: the bottom end of the fixed electrode (4) is fixedly connected with the lower shell (3), and the central axis of the fixed electrode (4) coincides with the central axis of the lower shell (3).
3. The vacuum capacitor of claim 1, wherein: the insulating rod (1) is fixedly installed at the axle centers of the upper shell (2) and the lower shell (3), and the upper shell (2), the lower shell (3) and the insulating shell (7) form a vacuum chamber outside the fixed electrode (4) and the movable electrode (5).
4. The vacuum capacitor of claim 1, wherein: the movable ranges of the fixed electrode (4) and the movable electrode (5) are a vacuum chamber consisting of an insulating shell (7), an upper shell (2) and a lower shell (3).
5. The vacuum capacitor of claim 1, wherein: the moving electrode connecting piece (10) forms an elastic structure with the upper shell (2) through the spring (9), and the central axis of the spring (9) coincides with the central axis of the insulating rod (1).
6. The vacuum capacitor of claim 1, wherein: and the voice coil motor coil (8) is wound and connected on the outer wall of the insulating shell (7).
7. The vacuum capacitor of claim 1, wherein: the outer side wall of the moving electrode connecting piece (10) is connected with the inner wall of the upper shell (2) in a fitting mode, and three groups of moving electrode connecting pieces (10) are arranged in the axial center of the insulating rod (1) in an annular and equidistant mode.
8. The vacuum capacitor of claim 1, wherein: the movable electrodes (5) are uniformly distributed at intervals on the top of the fixed electrode (4), and the outermost ring of the movable electrode (5) is connected with a magnet (6).
9. The vacuum capacitor of claim 1, wherein: the movable electrode (5) forms a lifting structure through the magnet (6), the voice coil motor coil (8) and the fixed electrode (4), the central axis of the fixed electrode (4) coincides with the central axis of the movable electrode (5), and the central axis of the movable electrode (5) coincides with the central axis of the insulating rod (1).
10. The vacuum capacitor of claim 1, wherein: the insulating rod (1) and the movable electrode connecting piece (10) are vertically distributed, and the movable electrode connecting piece (10) and the movable electrode (5) form a transmission structure through the spring (9).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202111104286.4A CN113764188B (en) | 2021-09-18 | Vacuum capacitor capable of changing capacitance |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202111104286.4A CN113764188B (en) | 2021-09-18 | Vacuum capacitor capable of changing capacitance |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN113764188A true CN113764188A (en) | 2021-12-07 |
| CN113764188B CN113764188B (en) | 2024-05-24 |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114783774A (en) * | 2022-06-21 | 2022-07-22 | 沈阳工业大学 | Electric energy storage system |
| WO2023231500A1 (en) * | 2022-05-30 | 2023-12-07 | 昆山国力电子科技股份有限公司 | Capacitance value rapid-switching vacuum capacitor |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB254596A (en) * | 1924-11-13 | 1926-07-08 | Alfredo Cianchi | Improvements in or relating to variable square law electric condensers |
| JP2964248B1 (en) * | 1998-08-05 | 1999-10-18 | 株式会社 コムクラフト | Control method of capacitance in vacuum variable capacitor and vacuum variable capacitor using the same |
| CN102844827A (en) * | 2010-04-19 | 2012-12-26 | 株式会社明电舍 | Vacuum capacitor |
| CN102959657A (en) * | 2010-06-28 | 2013-03-06 | 康姆艾德公司 | Vacuum variable capacitor |
| CN215955107U (en) * | 2021-09-18 | 2022-03-04 | 上海华盈实科技有限公司 | Vacuum capacitor capable of changing capacitance capacity |
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB254596A (en) * | 1924-11-13 | 1926-07-08 | Alfredo Cianchi | Improvements in or relating to variable square law electric condensers |
| JP2964248B1 (en) * | 1998-08-05 | 1999-10-18 | 株式会社 コムクラフト | Control method of capacitance in vacuum variable capacitor and vacuum variable capacitor using the same |
| CN102844827A (en) * | 2010-04-19 | 2012-12-26 | 株式会社明电舍 | Vacuum capacitor |
| CN102959657A (en) * | 2010-06-28 | 2013-03-06 | 康姆艾德公司 | Vacuum variable capacitor |
| CN215955107U (en) * | 2021-09-18 | 2022-03-04 | 上海华盈实科技有限公司 | Vacuum capacitor capable of changing capacitance capacity |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2023231500A1 (en) * | 2022-05-30 | 2023-12-07 | 昆山国力电子科技股份有限公司 | Capacitance value rapid-switching vacuum capacitor |
| CN114783774A (en) * | 2022-06-21 | 2022-07-22 | 沈阳工业大学 | Electric energy storage system |
| CN114783774B (en) * | 2022-06-21 | 2022-09-02 | 沈阳工业大学 | Electric energy storage system |
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