CN107607130A - One kind is without plated film quartz hemispherical resonator detection means and method - Google Patents
One kind is without plated film quartz hemispherical resonator detection means and method Download PDFInfo
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- CN107607130A CN107607130A CN201710828483.8A CN201710828483A CN107607130A CN 107607130 A CN107607130 A CN 107607130A CN 201710828483 A CN201710828483 A CN 201710828483A CN 107607130 A CN107607130 A CN 107607130A
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Abstract
The invention discloses one kind without plated film quartz hemispherical resonator detection means, including quartzy electrode tip holder, detection circuit and detector, quartzy electrode tip holder includes mounting seat, detection interdigital electrode, excitation interdigital electrode and mounting hole, and detection circuit includes signal acquisition circuit, electric field excitation radiation signal eliminates circuit, self-excited circuit and static excitation circuit.Its Q value is measured before quartzy hemispherical resonator plated film, underproof quartzy hemispherical resonator can be rejected, it is of great significance to improving the process procedure technology tool such as the shaping of raising crude green body, precision grinding, compared with the Q values that quartzy hemispherical resonator is measured after plated film, the technical program, avoid because plated film causes Q value changes, the misalignment of measurement result caused by, the accuracy rate of quartzy hemispherical resonator detection is improved, also reduces the cost that plated film is carried out to unqualified quartzy hemispherical resonator.
Description
Technical field
The present invention relates to fiber optic sensor technology field, specifically, is related to a kind of without the inspection of plated film quartz hemispherical resonator
Survey device and method.
Background technology
Hemispherical reso nance gyroscope is a kind of all solid state vibratory gyroscope, and it passes through essence by the fused quartz glass material of high-quality
Close machining, then coordinate the auxiliary process of complexity to be made.Because hemispherical reso nance gyroscope uses exclusive material and work
Skill, have the advantages that reliability height, precision height, long lifespan, Radiation hardness are strong, particularly it exclusive is up to more than 15 years
Working life feature, it is set to be especially suitable for using in the space application such as spacecraft, satellite workplace.It is that aerospace is highly reliable
Application field first choice gyroscope instrument.
Quality factor-Q the values of hemispherical resonator are to determine the core index of hemispherical reso nance gyroscope series of advantages.Q values
It is defined as：2 π times of the ratio between the energy of energy and each cycle internal loss of oscillatory system storage.The Q values of hemispherical resonator are got over
It is high, it is meant that the loss of energy is smaller, only needs the energy supplement of very little to maintain the stable stationary wave vibration of harmonic oscillator so that nothing
The static excitation of contact is possibly realized.High Q values also cause the vibration of harmonic oscillator during noenergy supplement to decay slowly, hemispherical resonator top
Spiral shell remains to keep also relying on this characteristic to the sensitivity of input angle speed after a loss of power.The Q values of oscillatory system also are indicated as inherently
The ratio of frequency of oscillation and-three dB bandwidth, Q values are higher to show that natural mode shape external interference resistance is stronger, the frequency of vibration
Degree of purity is higher, and these are all the concrete embodiments of hemispherical reso nance gyroscope good characteristic.Make the fused quartz glass of hemispherical reso nance gyroscope
Glass material has very high quality factor and excellent temperature stability, is the preferable material for making high-precision seismic inertia device
Material.However, because its hardness is very high and has stronger fragility, the processing of fused quartz glass has great difficulty.Crude green body into
In type and precision grinding technical process, hemispherical resonator can be made to produce larger stress and surface breakdown layer, including many naked eyes
The internal flaws such as sightless micro-crack, these factors cause the Q values of hemisphere oscillator to reduce.
The content of the invention
For above-mentioned the deficiencies in the prior art, the invention provides one kind without plated film quartz hemispherical resonator detection means,
Its Q value is measured before quartzy hemispherical resonator plated film, underproof quartzy hemispherical resonator can be rejected, to improving
Improve the process procedure technologies such as crude green body shaping, precision grinding tool to be of great significance, with measuring quartz half after plated film
The Q values of ball harmonic oscillator are compared, the technical program, are avoided because plated film causes Q value changes, the mistake of measurement result caused by
Standard, the accuracy rate of quartzy hemispherical resonator detection is improved, also reduces and plated film is carried out to unqualified quartzy hemispherical resonator
Cost.
In order to solve the above-mentioned technical problem, present invention employs following technical scheme：
One kind is described without plated film quartz hemispherical resonator detection means, including quartzy electrode tip holder, detection circuit and detector
Quartzy electrode tip holder includes mounting seat, detection interdigital electrode, excitation interdigital electrode and mounting hole, and detection circuit includes signal acquisition electricity
Road, electric field excitation radiation signal eliminate circuit, self-excited circuit and static excitation circuit, wherein：
The installation seating face is provided with metal film interdigital electrode, and the metal film interdigital electrode includes excitation interdigital electrode
And detection interdigital electrode, the mounting hole are arranged on the mounting seat center, no plated film quartz hemispherical resonator passes through the peace
When filling hole in the mounting seat, the inwall of the no plated film quartz hemispherical resonator and the outer surface of the mounting seat are deposited
In gap；
The detection interdigital electrode is made to be connected with the signal acquisition circuit, and the signal acquisition circuit is used to gather without plating
First vibration signal of film quartz hemispherical resonator, the electric field excitation radiation signal eliminate circuit and shaken for eliminating described first
The vibration signal of radiation excitation signal generation second in dynamic signal, the self-excited circuit are used to feed back second vibration signal
To the static excitation circuit, the static excitation circuit is connected with the excitation interdigital electrode, and the static excitation circuit is used
In to the excitation interdigital electrode application high-voltage signal so that the no plated film quartz hemispherical resonator vibrates；
The output end that the detector eliminates circuit with the electric field excitation radiation signal is connected, and the detector is used to examine
Survey second vibration signal.
Preferably, the mounting seat outer surface is the inner sphere radius that radius is less than the no plated film quartz hemispherical resonator
Sphere, the no plated film quartz hemispherical resonator be arranged on the mounting seat on when, the no plated film quartz hemisphere is humorous
The outer surface of the Internal Spherical Surface of oscillator and the mounting seat is concentric.
Preferably, the detection interdigital electrode is separately positioned on the mounting seat outer surface with the excitation interdigital electrode
Relative both sides.
Preferably, the signal acquisition circuit includes resistance R1, resistance R2, the first electric capacity C1, the second electric capacity C2, first high
1 and second high impedance amplifier △ 2 of impedance amplifier △, wherein：
Described resistance R1 one end is connected with the first high voltage power supply HV1, the one end and institute of the other end with the first electric capacity C1
State an interdigital parallel connection of detection interdigital electrode；Described in resistance R2 one end ground connection, the other end and the second electric capacity C2 one end
Detection interdigital electrode is not connected with the interdigital parallel connection of the resistance R1；One end that the first electric capacity C1 is not connected with the resistance R1
It is connected with the described first high impedance amplifier △ 1 input；One end that the second electric capacity C2 is not connected with the resistance R2 with
The input connection of the second high impedance amplifier △ 2；The first high impedance amplifier △ 1 and the described second high impedance amplifier △
2 output end eliminates circuit with the electric field excitation radiation signal respectively as the output end of the signal acquisition circuit and is connected.
Preferably, the electric field excitation radiation signal, which eliminates circuit, includes the first rp-op amp, the second anti-phase fortune
Amplifier and difference amplifier are calculated, wherein：
The output end of the inverting input of first rp-op amp and the described first high impedance amplifier △ 1 connects
Connect, the output end of first rp-op amp is connected with the inverting input of the difference amplifier；Described second is anti-
The inverting input of phase operational amplifier is connected with the described second high impedance amplifier △ 2 output end, the second anti-phase computing
The output end of amplifier is connected with the normal phase input end of the difference amplifier；Described in the output end of the difference amplifier is used as
The output end that electric field excitation radiation signal eliminates circuit is connected with the self-excited circuit.
Preferably, the self-excited circuit includes adjustable phase shifter and variable gain amplifier, wherein：
Input and the electric field excitation radiation signal of the input of the adjustable phase shifter as the self-excited circuit
Circuit connection is eliminated, the output end of the adjustable phase shifter is connected with the inverting input of the variable gain amplifier, described
The output end of variable gain amplifier is connected as the output end of the self-excited circuit with the static excitation circuit.
Preferably, the static excitation circuit includes high-voltage amplifier △ 3, the 4th electric capacity C4 and resistance R17, wherein：
The input of the high-voltage amplifier △ 3 connects as the input of the static excitation circuit with the self-excited circuit
Connect, the output end of the high-voltage amplifier △ 3 is connected with one end of the 4th electric capacity C4, one of the excitation interdigital electrode
It is interdigital in parallel with one end of the other end of the 4th electric capacity C4 and the resistance R17, the other end of the resistance R17 and
Two high voltage power supply HV2 connections, it is described to encourage an interdigital electrode not interdigital ground connection with the resistance R17.
One kind detects without plated film quartz hemispherical resonator detection method suitable for above-mentioned no plated film quartz hemispherical resonator
Device, comprise the following steps：
The no plated film quartz hemispherical resonator is arranged in the mounting seat by the mounting hole；
The static excitation circuit applies intrinsic with the no plated film quartz hemispherical resonator to the excitation interdigital electrode
The sinusoidal high-voltage signal of the identical frequency of frequency of oscillation；
The detector detects second vibration signal；
When the voltage magnitude of second vibration signal reaches default amplitude, the static excitation circuit stops to described
Interdigital electrode is encouraged to apply the sinusoidal high-voltage signal of frequency identical with the no plated film quartz hemispherical resonator natural mode shape；
Utilize the die-away time of the second vibration signal described in detectors measure；
The Q values of the no plated film quartz hemispherical resonator are calculated based on the die-away time.
Preferably, the quartzy electrode tip holder and the no plated film quartz hemispherical resonator are placed in vacuum in detection process
Detected in environment.
The invention discloses one kind without plated film quartz hemispherical resonator detection means, including quartzy electrode tip holder, detection circuit
And detector, quartzy electrode tip holder include mounting seat, detection interdigital electrode, excitation interdigital electrode and mounting hole, detection circuit includes
Signal acquisition circuit, electric field excitation radiation signal eliminate circuit, self-excited circuit and static excitation circuit.In quartzy hemispherical resonator
Its Q value is measured before plated film, underproof quartzy hemispherical resonator can be rejected, crude green body shaping, essence are improved to improving
The process procedure such as close reconditioning technology tool is of great significance, the Q value phases with measuring quartzy hemispherical resonator after plated film
Than the technical program, avoiding because plated film causes Q value changes, the misalignment of measurement result caused by, improving quartzy hemisphere
The accuracy rate of harmonic oscillator detection, also reduce the cost that plated film is carried out to unqualified quartzy hemispherical resonator.
Brief description of the drawings
In order that the purpose, technical scheme and advantage of invention are clearer, the present invention is made into one below in conjunction with accompanying drawing
The detailed description of step, wherein：
Fig. 1 is a kind of structural representation of no plated film quartz hemispherical resonator detection means disclosed by the invention；
Fig. 2 is a kind of structural representation of quartzy electrode tip holder disclosed by the invention；
Fig. 3 is a kind of flow chart of no plated film quartz hemispherical resonator detection method disclosed by the invention.
Embodiment
The present invention is described in further detail below in conjunction with the accompanying drawings.
It is a kind of structural representation of no plated film quartz hemispherical resonator detection means disclosed by the invention as shown in Figure 1,
Including quartzy electrode tip holder, detection circuit and detector, quartzy electrode tip holder includes mounting seat, detection interdigital electrode, the interdigital electricity of excitation
Pole and mounting hole, detection circuit includes signal acquisition circuit, electric field excitation radiation signal eliminates circuit, self-excited circuit and electrostatic and swashed
Circuit is encouraged, wherein：
Installation seating face is provided with metal film interdigital electrode, and metal film interdigital electrode includes excitation interdigital electrode and detection fork
Referring to electrode, mounting hole is arranged on mounting seat center, when no plated film quartz hemispherical resonator is arranged in mounting seat by mounting hole,
Gap be present in the outer surface of inwall and mounting seat without plated film quartz hemispherical resonator；
Detection interdigital electrode is made to be connected with signal acquisition circuit, and it is humorous without plated film quartz hemisphere that signal acquisition circuit is used for collection
First vibration signal of oscillator, electric field excitation radiation signal eliminate the radiation excitation letter that circuit is used to eliminate in the first vibration signal
Number the second vibration signal of generation, self-excited circuit are used to the second vibration signal feeding back to static excitation circuit, static excitation circuit
It is connected with excitation interdigital electrode, static excitation circuit is used to apply high-voltage signal to excitation interdigital electrode so that without plated film quartz
Hemispherical resonator vibrates；
The output end that detector eliminates circuit with electric field excitation radiation signal is connected, and detector is used to detect the second vibration letter
Number.
Quartzy electrode tip holder outer surface forms metal film using vacuum coating technology, is then formed using laser ablation metal film
Metal film interdigital electrode.Detect interdigital electrode and encourage the interdigital electrode ground connection of interdigital electrode, another interdigital electrode and high pressure
Power supply connects.After quartzy electrode tip holder clamping quartz resonance, interdigital electrode and excitation interdigital electrode are detected and without plated film quartz half
Ball harmonic oscillator inner surface keeps microgap, collectively forms the variable capacitor of dielectric coefficient.Due to originals such as the in itself noise of circuit
Cause, no plated film quartz hemispherical resonator can vibrate, and because higher without plated film quartz hemispherical resonator Q values itself, have
Excellent selecting frequency characteristic, its vibration frequency are its resonant frequency.When being vibrated without plated film quartz hemispherical resonator, no plated film stone
Gap between English hemispherical resonator Internal Spherical Surface and quartzy electrode tip holder outer surface changes, and causes capacitor equivalent dielectric coefficient to change
So that capacitance variation, signal acquisition circuit can collect differential electric signal, i.e., the first vibration by detecting interdigital electrode
Signal.Because the radiated electric field that the high-voltage signal of high voltage power supply output is formed is stronger, thus signal acquisition circuit collect the
Include in one vibration signal because of radiation excitation signal caused by radiated electric field, and radiation excitation signal is stronger, amplitude is much
More than without signal caused by the vibration of plated film quartz hemispherical resonator, it is therefore desirable to eliminate circuit by electric field excitation radiation signal and disappear
Except the vibration signal of radiation excitation signal generation second in the first vibration signal.Then it is by self-excited circuit that the second vibration signal is anti-
Static excitation circuit is fed to, oneself circuit has the function of regulation loop gain, when loop gain is more than 1, you can meet
Self-oscillatory gain condition, so as to realize the closed loop self-oscillation of no plated film quartz hemispherical resonator detection means.
During using the technical program offer without plated film quartz hemispherical resonator detection means, in electric field excitation radiation signal
The output end for eliminating circuit detects the second vibration signal using detector, and detector can be oscillograph.Due to loop gain
More than 1, therefore the Oscillation Amplitude without plated film quartz hemispherical resonator can be increasingly stronger, and the amplitude of the second vibration signal also can be more next
It is stronger, when amplitude reaches default amplitude, high-voltage signal that cut-out static excitation circuit applies to excitation interdigital electrode, measurement the
The die-away time of two vibration signals, and by formula：Q=π f τ try to achieve the Q values of no plated film quartz hemispherical resonator.
Wherein：F is frequency of oscillation, and unit Hz, τ are that Oscillation Amplitude decays to 1/e unit interval from 1 unit interval
Duration, unit interval are the second, and e is natural constant.
In summary, the invention discloses one kind without plated film quartz hemispherical resonator detection means, including quartzy electrode tip holder,
Circuit and detector are detected, quartzy electrode tip holder includes mounting seat, detection interdigital electrode, excitation interdigital electrode and mounting hole, detection
Circuit includes signal acquisition circuit, electric field excitation radiation signal eliminates circuit, self-excited circuit and static excitation circuit.In quartz half
Its Q value is measured before ball harmonic oscillator plated film, underproof quartzy hemispherical resonator can be rejected, crude green body is improved to improving
The process procedure such as shaping, precision grinding technology tool is of great significance, with measuring quartzy hemispherical resonator after plated film
Q values compare, the technical program, avoid because plated film causes Q value changes, the misalignment of measurement result, is improved caused by
The accuracy rate of quartzy hemispherical resonator detection, also reduces the cost that plated film is carried out to unqualified quartzy hemispherical resonator.
For further optimization above-mentioned technical proposal, it is less than as shown in Fig. 2 mounting seat outer surface is radius without plated film quartz half
The sphere of the inner sphere radius of ball harmonic oscillator, when no plated film quartz hemispherical resonator is arranged in mounting seat, no plated film quartz half
The Internal Spherical Surface of ball harmonic oscillator and the outer surface of mounting seat are concentric.
In order to reduce the interdigital electrode of mounting seat outer surface as far as possible and without the gap between plated film quartz hemispherical resonator, more
Good forms the variable capacitor of dielectric coefficient, improves the precision of testing result, and mounting seat outer surface is hemispherical dome structure, and
Radius is slightly less than the radius of no plated film quartz hemispherical resonator, so that being arranged on without plated film quartz hemispherical resonator in mounting seat
When inner surface and mounting seat outer surface keep certain interval, and without plated film quartz hemispherical resonator be arranged on mounting seat on after,
The spherical concentric of sphere and mounting seat without plated film quartz hemispherical resonator.
To reduce air to the damping action vibrated without plated film quartz hemispherical resonator, the precision of detection is improved, can be
Detected under vacuum environment.
For further optimization above-mentioned technical proposal, detection interdigital electrode is separately positioned on outside mounting seat with excitation interdigital electrode
Relative both sides on surface.
Detection interdigital electrode is separately positioned on both sides relative on mounting seat outer surface with excitation interdigital electrode, so that two
The distance of interdigital electrode is farthest, so as to reduce interference of the excitation electrical field to detection interdigital electrode as far as possible.
For further optimization above-mentioned technical proposal, signal acquisition circuit includes resistance R1, resistance R2, the first electric capacity C1, the
Two electric capacity C2, the first high 1 and second high impedance amplifier △ 2 of impedance amplifier △, wherein：
Resistance R1 one end is connected with the first high voltage power supply HV1, the other end and the first electric capacity C1 one end and the interdigital electricity of detection
One interdigital parallel connection of pole；Resistance R2 one end is grounded, the other end and the second electric capacity C2 not connected electricity of one end detection interdigital electrode
Hinder R1 interdigital parallel connection；First electric capacity C1 is not connected with one end that resistance R1 is connected with the first high impedance amplifier △ 1 input；
Second electric capacity C2 is not connected with one end that resistance R2 is connected with the second high impedance amplifier △ 2 input；First high impedance amplifier
Output end and electric field excitation radiation signal of 1 and second high impedance amplifier △ 2 of the △ output end respectively as signal acquisition circuit
Eliminate circuit connection.
Being collectively formed without plated film quartz hemispherical resonator and vacuum in the region that two interdigital electrodes cover with high voltage electric field
Capacitor.Plate condenser can be equivalent to describe the capacitance of the electric capacity：
Wherein, ε0For dielectric constant, its value is 8.85 × 10- 12.ε is medium relative dielectric constant, and S is plate condenser
Area, d be plate condenser spacing.Herein, medium signified ε includes vacuum and hemispherical resonator quartz material,
It is that, when being vibrated without plated film quartz hemispherical resonator, it is transported by an equivalent value of their distribution situations in field regime
Dynamic direction is as shown in the direction of arrow in Fig. 1：During close to electrode, no plated film quartz hemispherical resonator quartz material is in capacitor dielectric
Ratio increase, during away from electrode, ratio of no plated film quartz hemispherical resonator quartz material in capacitor dielectric reduces, equivalent
In ε synchronous increase and reduction.When vibration without plated film quartz hemispherical resonator is sinusoidal rule, ε can be reduced to formula (2)
ε=εb sinωt (2)
εbCapacitor equivalent relative dielectric constant during not vibrated without plated film quartz hemispherical resonator, t are the time.
According to the definition of electric capacity, when applying voltage U on electric capacity, the charge Q of electric capacity storage is electricity with voltage V ratio
The electric capacity of container, such as formula (3).
High pressure HV1 is applied in detection interdigital electrode by resistance R1 and resistance R2, two it is interdigital on voltage U can be approximate
For steady state value, capacitance variations caused by no plated film quartz hemispherical resonator vibration will cause electric capacity to have weak current to flow through.Its value
For：
Substitution formula (1) and formula (2), are obtained：
Because the input impedance of two high impedance amplifiers is very high, its input current is ignored, and flows through the electric current I of electric capacity
(t) it is equal to the electric current for flowing through resistance R1, is also equal to flow through resistance R2 electric current, then in two interdigital voltages of detection interdigital electrode
Respectively HV1-R1I (t) and R2I (t), by electric capacity C1 and C2 blocking effect, its DC component is removed, and the first high resistant is put
Big device △ 1 input signal is-R1I (t), the second high impedance amplifier △ 2 input signal are R2I (t), work as R1=R2When, two-way
Signal magnitude is equal, reverse-phase.
When being vibrated without plated film quartz hemispherical resonator with sinusoidal rule, the signal that collects is cosine rule, i.e., first
Vibration signal.
For further optimization above-mentioned technical proposal, electric field excitation radiation signal, which eliminates circuit, includes the first anti-phase operation amplifier
Device, the second rp-op amp and difference amplifier, wherein：
The inverting input of first rp-op amp is connected with the first high impedance amplifier △ 1 output end, and first is anti-
The output end of phase operational amplifier and the inverting input of difference amplifier connect；The anti-phase input of second rp-op amp
End is connected with the second high impedance amplifier △ 2 output end, and the output end and difference amplifier of the second rp-op amp are just
Phase input connects；The output end of difference amplifier eliminates the output end and self-excited circuit of circuit as electric field excitation radiation signal
Connection.
First rp-op amp is made up of operational amplifier OP1 and resistance R3, resistance R4, resistance R5；Second is anti-phase
Operational amplifier is made up of operational amplifier OP2 and resistance R6, resistance R7, resistance R8；Difference amplifier is by operational amplifier OP3
With resistance R9, resistance R10, resistance R11, resistance R12 compositions.First high impedance amplifier △ 1 output end connection first is anti-phase to put
The input resistance R3, the second high impedance amplifier △ 2 of big device output end connect the input resistance R6 of the second inverting amplifier, by height
The weak vibration electric signal that impedance amplifier detects is amplified, then the inverting input R9 of input difference amplifier and same phase
Input R10.From the description of aforementioned signal Acquisition Circuit, interdigital electricity is being detected when no plated film quartz hemispherical resonator vibrates
Pole two it is interdigital on the electric signal that collects it is equal in magnitude, opposite in phase.After difference amplifier carries out difference, output second is shaken
The amplitude of dynamic signal is 2 times of the first vibration signal, and signal is strengthened.
Static excitation circuit is applied with high-voltage signal by encouraging interdigital electrode, the radiated electric field that high-voltage signal is formed compared with
By force, the pumping signal can be collected in detection interdigital electrode, be i.e. can include radiation excitation signal, and spoke in the first vibration signal
The amplitude for penetrating pumping signal is much larger than the amplitude without signal caused by the vibration of plated film quartz hemispherical resonator, if therefore directly making
The detection of no plated film quartz hemispherical resonator is carried out with the first vibration signal, its precision is extremely low.Due to detection interdigital electrode
The distances of two interdigital distance excitation interdigital electrodes are identical, two it is interdigital on the radiation excitation signal amplitude that collects it is identical, phase phase
Together, cancelled each other under the additive operation of difference amplifier, so as to eliminate radiation excitation signal, of difference amplifier output
Whether there is the vibration electricity number of plated film quartz hemispherical resonator, i.e. the second vibration signal.Accordingly, detector also radiates in electric field excitation
The output end of signal removing circuit is that the output end of difference amplifier gathers the second vibration signal, for measuring without plated film quartz half
The Q values of ball harmonic oscillator, so as to realize to the detection without plated film quartz hemispherical resonator.
Include adjustable phase shifter and variable gain amplifier for further optimization above-mentioned technical proposal, self-excited circuit, wherein：
The input of adjustable phase shifter eliminates circuit with electric field excitation radiation signal as the input of self-excited circuit and is connected,
The output end of adjustable phase shifter and the inverting input of variable gain amplifier connect, the output end conduct of variable gain amplifier
The output end of self-excited circuit is connected with static excitation circuit.
Static excitation circuit includes high-voltage amplifier △ 3, the 4th electric capacity C4 and resistance R17, wherein：
High-voltage amplifier △ 3 input is connected as the input of static excitation circuit with self-excited circuit, high voltage amplifier
Device △ 3 output end is connected with the 4th electric capacity C4 one end, encourage one of interdigital electrode it is interdigital another with the 4th electric capacity C4
End and resistance R17 one end are in parallel, and the resistance R17 other end is connected with the second high voltage power supply HV2, encourage interdigital electrode not with
A resistance R17 interdigital ground connection.It is above-mentioned when amplitude reaches default amplitude, cut-out static excitation circuit to encourage interdigital electrode
The high-voltage signal of application, that is, it is turned off the second high voltage power supply HV2.
Second vibration signal inputs adjustable phase shifter, carries out phase shift, and adjustable phase shifter output signal feeding adjustable gain is put
Big device carries out the amplification computing of adjustable gain, and it, which is exported, is sent into high-voltage amplifier △ 3.High-voltage amplifier △ 3 output passes through
Four electric capacity C4 connections encourage interdigital electrode.From formula (2) and formula (5), the vibration of no plated film quartz hemispherical resonator is sine
Vibration, the second vibration signal is cosine signal, and both have 90 ° of phase angle errors, after adjustable phase shifter provides -90 ° of phase shifts, is swashed
It is identical with the vibration phase without plated film quartz hemispherical resonator to encourage the excitation phase of electrode, meets self-oscillatory phase condition.
The gain of variable gain amplifier can be adjusted, and can meet self-oscillatory gain condition when loop gain is more than 1,
So as to realize no plated film quartz hemispherical resonator closed loop self-oscillation.Because quartzy hemispherical resonator Q values are high, there is excellent choosing
Frequency characteristic, the frequency of oscillation after self-excitation are the natural mode shape of harmonic oscillator.
As shown in figure 3, be a kind of flow chart of no plated film quartz hemispherical resonator detection method disclosed by the invention, we
Method is detected using above-mentioned no plated film quartz hemispherical resonator detection means, is comprised the following steps：
S101, it will be arranged on without plated film quartz hemispherical resonator by mounting hole in mounting seat；
S102, static excitation circuit apply and without plated film quartz hemispherical resonator natural mode shape to excitation interdigital electrode
The sinusoidal high-voltage signal of identical frequency；
S103, detector detect the second vibration signal；
S104, when the voltage magnitude of the second vibration signal reaches default amplitude, static excitation circuit stop to excitation pitch
Refer to electrode to apply and the sinusoidal high-voltage signal without the identical frequency of plated film quartz hemispherical resonator natural mode shape；
S105, the die-away time using the vibration signal of detectors measure second；
S106, based on die-away time calculate the Q values without plated film quartz hemispherical resonator.
Its Q value is measured before quartzy hemispherical resonator plated film using this method, underproof stone can be rejected
English hemispherical resonator, it is of great significance to improving the process procedure technology tool such as the shaping of raising crude green body, precision grinding,
Compared with the Q values that quartzy hemispherical resonator is measured after plated film, the technical program, avoid because plated film causes Q value changes, so as to draw
The misalignment of the measurement result risen, the accuracy rate of quartzy hemispherical resonator detection is improved, is also reduced to unqualified quartzy hemisphere
Harmonic oscillator carries out the cost of plated film.
Further to optimize above-mentioned technical proposal, by quartzy electrode tip holder and without plated film quartz hemispherical resonator in detection process
Son is placed in vacuum environment and detected.
Finally illustrate, the above embodiments are merely illustrative of the technical solutions of the present invention and it is unrestricted, although passing through ginseng
According to the preferred embodiments of the present invention, invention has been described, it should be appreciated by those of ordinary skill in the art that can
So that various changes are made to it in the form and details, the present invention that is limited without departing from appended claims
Spirit and scope.
Claims (9)
1. one kind is without plated film quartz hemispherical resonator detection means, it is characterised in that including quartzy electrode tip holder, detection circuit and inspection
Device is surveyed, the quartzy electrode tip holder includes mounting seat, detection interdigital electrode, excitation interdigital electrode and mounting hole, and detection circuit includes
Signal acquisition circuit, electric field excitation radiation signal eliminate circuit, self-excited circuit and static excitation circuit, wherein：
The installation seating face is provided with metal film interdigital electrode, and the metal film interdigital electrode includes excitation interdigital electrode and inspection
Interdigital electrode is surveyed, the mounting hole is arranged on the mounting seat center, and no plated film quartz hemispherical resonator passes through the mounting hole
When in the mounting seat, between the inwall of the no plated film quartz hemispherical resonator and the outer surface presence of the mounting seat
Gap；
The detection interdigital electrode is made to be connected with the signal acquisition circuit, and the signal acquisition circuit is used to gather without plated film stone
First vibration signal of English hemispherical resonator, the electric field excitation radiation signal eliminate circuit and are used to eliminate the first vibration letter
The vibration signal of radiation excitation signal generation second in number, the self-excited circuit are used to second vibration signal feeding back to institute
State static excitation circuit, the static excitation circuit be connected with the excitation interdigital electrode, the static excitation circuit for
The excitation interdigital electrode applies high-voltage signal so that the no plated film quartz hemispherical resonator vibration；
The output end that the detector eliminates circuit with the electric field excitation radiation signal is connected, and the detector is used to detect institute
State the second vibration signal.
2. as claimed in claim 1 without plated film quartz hemispherical resonator detection means, it is characterised in that the mounting seat appearance
Face is less than the sphere of the inner sphere radius of the no plated film quartz hemispherical resonator, the no plated film quartz hemispherical resonator for radius
When son is arranged in the mounting seat, the Internal Spherical Surface of the no plated film quartz hemispherical resonator and the appearance of the mounting seat
Face is concentric.
3. as claimed in claim 2 without plated film quartz hemispherical resonator detection means, it is characterised in that the interdigital electricity of detection
Pole is separately positioned on both sides relative on the mounting seat outer surface with the excitation interdigital electrode.
4. as described in claim any one of 1-3 without plated film quartz hemispherical resonator detection means, it is characterised in that the letter
Number Acquisition Circuit includes resistance R1, resistance R2, the first electric capacity C1, the second electric capacity C2, the first high high resistants of impedance amplifier △ 1 and second
Amplifier △ 2, wherein：
Described resistance R1 one end is connected with the first high voltage power supply HV1, the one end and the inspection of the other end with the first electric capacity C1
Survey an interdigital parallel connection of interdigital electrode；Detection described in resistance R2 one end ground connection, the other end and the second electric capacity C2 one end
Interdigital electrode is not connected with the interdigital parallel connection of the resistance R1；The first electric capacity C1 not with resistance R1 one end being connected and institute
State the first high impedance amplifier △ 1 input connection；The second electric capacity C2 not with one end that the resistance R2 is connected with it is described
Second high impedance amplifier △ 2 input connection；The first high impedance amplifier △ 1 and the described second high impedance amplifier △'s 2
Output end eliminates circuit with the electric field excitation radiation signal respectively as the output end of the signal acquisition circuit and is connected.
5. as claimed in claim 4 without plated film quartz hemispherical resonator detection means, it is characterised in that the electric field excitation spoke
Penetrating signal removing circuit includes the first rp-op amp, the second rp-op amp and difference amplifier, wherein：
The inverting input of first rp-op amp is connected with the described first high impedance amplifier △ 1 output end, institute
The output end for stating the first rp-op amp is connected with the inverting input of the difference amplifier；The second anti-phase computing
The inverting input of amplifier is connected with the described second high impedance amplifier △ 2 output end, second rp-op amp
Output end be connected with the normal phase input end of the difference amplifier；The output end of the difference amplifier swashs as the electric field
The output end for encouraging radiation signal elimination circuit is connected with the self-excited circuit.
6. as described in claim any one of 1-3 without plated film quartz hemispherical resonator detection means, it is characterised in that it is described from
Excitation circuit includes adjustable phase shifter and variable gain amplifier, wherein：
The input of the adjustable phase shifter eliminates as the input of the self-excited circuit with the electric field excitation radiation signal
Circuit is connected, and the output end of the adjustable phase shifter is connected with the inverting input of the variable gain amplifier, described adjustable
The output end of gain amplifier is connected as the output end of the self-excited circuit with the static excitation circuit.
7. as described in claim any one of 1-3 without plated film quartz hemispherical resonator detection means, it is characterised in that it is described quiet
Electric excitation circuit includes high-voltage amplifier △ 3, the 4th electric capacity C4 and resistance R17, wherein：
The input of the high-voltage amplifier △ 3 is connected as the input of the static excitation circuit with the self-excited circuit,
The output end of the high-voltage amplifier △ 3 is connected with one end of the 4th electric capacity C4, a fork of the excitation interdigital electrode
Refer to, the other end and second of the resistance R17 in parallel with the other end of the 4th electric capacity C4 and one end of the resistance R17
High voltage power supply HV2 connections, it is described to encourage an interdigital electrode not interdigital ground connection with the resistance R17.
8. one kind is without plated film quartz hemispherical resonator detection method, it is characterised in that suitable for as claimed in claim 1 without plating
Film quartz hemispherical resonator detection means, comprises the following steps：
The no plated film quartz hemispherical resonator is arranged in the mounting seat by the mounting hole；
The static excitation circuit applies and the no plated film quartz hemispherical resonator natural oscillation to the excitation interdigital electrode
The sinusoidal high-voltage signal of same frequency；
The detector detects second vibration signal；
When the voltage magnitude of second vibration signal reaches default amplitude, the static excitation circuit stops to the excitation
Interdigital electrode applies the sinusoidal high-voltage signal of frequency identical with the no plated film quartz hemispherical resonator natural mode shape；
Utilize the die-away time of the second vibration signal described in detectors measure；
The Q values of the no plated film quartz hemispherical resonator are calculated based on the die-away time.
9. as claimed in claim 8 without plated film quartz hemispherical resonator detection method, it is characterised in that will in detection process
The quartzy electrode tip holder and the no plated film quartz hemispherical resonator are placed in vacuum environment and detected.
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