CN221037445U - Hemispherical resonator gyro excitation and detection device - Google Patents
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- CN221037445U CN221037445U CN202322600574.XU CN202322600574U CN221037445U CN 221037445 U CN221037445 U CN 221037445U CN 202322600574 U CN202322600574 U CN 202322600574U CN 221037445 U CN221037445 U CN 221037445U
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- 238000001514 detection method Methods 0.000 title claims abstract description 138
- 230000005284 excitation Effects 0.000 title claims abstract description 128
- 238000006073 displacement reaction Methods 0.000 claims abstract description 52
- 230000005684 electric field Effects 0.000 claims abstract description 4
- 229910052751 metal Inorganic materials 0.000 claims description 10
- 239000002184 metal Substances 0.000 claims description 10
- 238000012360 testing method Methods 0.000 abstract description 35
- 238000000034 method Methods 0.000 abstract description 15
- 238000012545 processing Methods 0.000 abstract description 11
- 238000005516 engineering process Methods 0.000 abstract description 9
- 238000005259 measurement Methods 0.000 description 17
- 239000010453 quartz Substances 0.000 description 9
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 9
- 230000001360 synchronised effect Effects 0.000 description 4
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- 238000010586 diagram Methods 0.000 description 3
- 239000003990 capacitor Substances 0.000 description 2
- 239000011248 coating agent Substances 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 238000012937 correction Methods 0.000 description 1
- 238000013461 design Methods 0.000 description 1
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- 239000011810 insulating material Substances 0.000 description 1
- 238000010884 ion-beam technique Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 238000007517 polishing process Methods 0.000 description 1
- 238000005086 pumping Methods 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
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- 239000007787 solid Substances 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
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Abstract
The utility model discloses a hemispherical resonator gyro excitation and detection device, which comprises: an excitation and detection body component, the excitation and detection body component comprising: the device comprises a turntable, a clamping device, a 3-axis displacement table, a high-voltage power connector, an excitation electrode and a detection electrode, wherein the clamping device is used for clamping or loosening an outer anchor rod of the hemispherical resonator gyroscope; the 3-axis displacement table comprises: the first 3-axis displacement table, the second 3-axis displacement table and the third 3-axis displacement table; the high voltage power supply connector is located on the first 3-axis displacement platform, and the high voltage power supply connector is used for providing the high voltage electric field to the hemispherical resonator gyro, and excitation and detection electrodes include: an excitation electrode and a detection electrode; the excitation electrode is used for exciting the hemispherical resonant gyroscope to generate vibration; the detection electrode is used for detecting the capacitance variation between the thin shell of the hemispherical resonator gyroscope and the detection electrode. The electrode processing technology of the device is simple, the device is easy to process with high precision, the requirement on the gap is low when the device is used for measuring, and the device can be used for measuring various test items.
Description
Technical Field
The utility model relates to the technical field of quartz hemispherical resonator gyro testing, in particular to a hemispherical resonator gyro excitation and detection device.
Background
The hemispherical resonator gyroscope is a solid fluctuation gyroscope based on the Ge effect, has the advantages of high precision, long service life and high reliability, and is an important direction for the development of the gyroscope in the future. The future application direction of the hemispherical resonator gyro comprises various fields of aerospace, navigation, strategic tactical weapons and the like, and the conventional film-coated hemispherical resonator gyro excitation method mainly comprises the steps of preparing quartz excitation and detection bases, and adopting an electrostatic excitation scheme for detection.
The Q value test of the current coated hemispherical resonator gyro has the difficulty that: 1, the quartz excitation base has large processing difficulty and needs complex coating process treatment; 2, the fixing method is complex, the disassembly and assembly are difficult, and hemispherical products are easy to damage; and 3, the test function is single, and the result correction cannot be carried out by adopting a vibration meter at the same time.
Therefore, a new hemispherical resonator gyro excitation and detection device is needed to be provided, the electrode processing technology of the device is simple, the device is easy to process with high precision, the requirement on the gap is low when the measurement is carried out, and the measurement of various test items can be carried out.
Disclosure of utility model
The present utility model aims to solve at least one of the technical problems existing in the prior art. Therefore, the hemispherical resonator gyro excitation and detection device provided by the utility model has the advantages that the electrode processing technology is simple, the high-precision processing is easy, the requirement on the gap is low when the measurement is carried out, and the measurement of various test items can be carried out.
The utility model relates to a hemispherical resonator gyro excitation and detection device, which comprises: an excitation and detection body component, the excitation and detection body component comprising: the device comprises a turntable, a clamping device, a 3-axis displacement table, a high-voltage power supply connector and an excitation and detection electrode, wherein the clamping device is positioned on the turntable and is used for clamping or loosening an outer anchor rod of the hemispherical resonator gyroscope; the 3-axis displacement table comprises: the first 3-axis displacement table, the second 3-axis displacement table and the third 3-axis displacement table; the high voltage power supply connector is located first 3 axial displacement tables, and first 3 axial displacement tables are used for driving high voltage power supply connector reciprocates to with hemisphere resonance gyro's interior anchor pole electric connection or disconnection, high voltage power supply connector is used for providing high voltage electric field to hemisphere resonance gyro, excitation and detection electrode include: an excitation electrode and a detection electrode; the excitation electrode is positioned on a second 3-axis displacement table, the second 3-axis displacement table is used for driving the excitation electrode to be close to or far away from a thin shell of the hemispherical resonator gyroscope, and the excitation electrode is used for exciting the hemispherical resonator gyroscope to generate vibration; the detection electrode is fixed on a third 3-axis displacement table, the third 3-axis displacement table is used for driving the detection electrode to be close to or far away from the thin shell of the hemispherical resonator gyro, and the detection electrode is used for detecting the capacitance variation between the thin shell of the hemispherical resonator gyro and the detection electrode.
Furthermore, the exciting electrode and the detecting electrode are both metal electrodes, the wall surface of the exciting electrode, which is opposite to the outer wall of the thin shell of the hemispherical resonator gyroscope, is a profiling surface matched with the outer wall of the thin shell of the hemispherical resonator gyroscope, and the wall surface of the detecting electrode, which is opposite to the outer wall of the thin shell of the hemispherical resonator gyroscope, is also a profiling surface matched with the outer wall of the thin shell of the hemispherical resonator gyroscope.
Furthermore, electrode lead interfaces are arranged on the excitation electrode and the detection electrode.
Further, still include the electrode support frame, the electrode support frame includes: a first electrode support frame and a second electrode support frame; the excitation electrode is arranged on the second 3-axis displacement table through the first electrode supporting frame, and the detection electrode is arranged on the third 3-axis displacement table through the second electrode supporting frame.
Further, the high-voltage power connector is electrically connected with an inner anchor rod of the hemispherical resonator gyroscope through a first connecting end, and the first connecting end is a high-voltage connector elastic sheet; the high-voltage power supply connector is electrically connected with the high-voltage power supply through a second connecting end.
Further, the excitation and detection body part further includes: the image detection device is used for determining the gap between the excitation and detection electrode and the thin shell of the hemispherical resonator gyroscope.
Further, the excitation and detection body part further includes: the workbench surface, the 3-axis displacement table and the turntable are positioned on the workbench surface.
Still further, still include: the tank body is connected with the vacuumizing device, and the excitation and detection main body component is positioned in the tank body.
Still further, still include: and the vibration meter is used for being electrically connected with the excitation electrode.
Still further, still include: and the lock-in amplifier is used for being electrically connected with the excitation electrode and/or the detection electrode.
The hemispherical resonator gyro excitation and detection device has at least the following technical effects:
according to the hemispherical resonator gyro excitation and detection device, excitation/detection electrodes are designed, and the excitation/detection electrodes are driven to be close to or far away from the thin shell of the hemispherical resonator gyro through the 3-axis displacement table, so that the hemispherical resonator gyro generates common-frequency vibration, capacitance variation between the thin shell of the hemispherical resonator gyro and the detection electrodes is obtained, different angles can be tested by matching with rotation of the turntable, and therefore various test item measurements such as precession angle, rigid axis and the like can be realized. Compared with the traditional scheme of preparing a quartz excitation and detection base and adopting an electrostatic excitation scheme for detection, the method has the advantages of simple mounting and dismounting and measurement modes, no need of complex coating technology and greatly reduced detection cost.
The excitation/detection electrode is a profiling metal electrode matched with the hemispherical resonator thin shell, the metal electrode has high processing precision, simple process and extremely small resistance, and the effective area of the capacitor generated by the hemispherical resonator is large, so that the assembly clearance between the metal electrode and the hemispherical resonator thin shell is low (the assembly clearance of the conventional excitation method is required to be less than 50um, and the utility model only requires to be less than 200 um), and meanwhile, the working voltage during testing is greatly reduced; therefore, the excitation/detection electrode has the advantages of low resistance, high working area, high capacitance value, low requirement on the gap between the hemisphere and the electrode, and simple processing technology compared with the conventional quartz electrode.
The utility model can simultaneously utilize the lock-in amplifier and the vibration meter to carry out detection, namely, adopts a double-measurement scheme to carry out synchronous test, and more effectively corrects the test result under the condition of ensuring that the test conditions are completely consistent. The phase-locked amplifier and the vibration meter are both provided with excitation signal sources, so that excitation and vibration starting of the hemispherical harmonic oscillator can be realized. The lock-in amplifier is electrically connected with the detection electrode, so that the detection of the capacitance variation between the thin shell of the hemispherical resonator gyroscope and the detection electrode can be realized; the vibration meter is a Doppler vibration meter LDV, and the laser head of the vibration meter can be used for measuring the vibration position of the hemispherical resonator, so that the noncontact detection of the capacitance variation between the thin shell of the hemispherical resonator gyroscope and the detection electrode can be realized.
When the hemispherical resonator gyro excitation and detection device is used for testing, a double-measurement scheme can be used for synchronous testing, and the test result is more effectively checked under the condition that the test conditions are completely consistent; and mixed measurement of multiple testing methods can be realized, and result deviation caused by a single measurement scheme is reduced.
Drawings
For easier understanding of the present utility model, the present utility model will be described in more detail by referring to specific embodiments shown in the drawings. These drawings depict only typical embodiments of the utility model and are not therefore to be considered to limit the scope of the utility model.
Fig. 1 is a schematic structural diagram of a hemispherical resonator gyroscope according to an embodiment of the disclosure;
FIG. 2 is a system block diagram of an excitation and detection device according to an embodiment of the present disclosure;
FIG. 3 is an axial view of an excitation and detection body component provided by an embodiment of the present disclosure;
FIG. 4 is a top view of an excitation and detection body component provided by embodiments of the present disclosure;
Fig. 5 is a schematic structural diagram of an excitation and detection electrode according to an embodiment of the present disclosure.
Detailed Description
Embodiments of the present utility model will be described below with reference to the accompanying drawings so that those skilled in the art can better understand the present utility model and implement it, but the examples listed are not limiting to the present utility model, and the following examples and technical features of the examples can be combined with each other without conflict, wherein like parts are denoted by like reference numerals.
As shown in fig. 1, a hemispherical resonator gyro 1 is a quartz workpiece with an anchor rod in the middle of a semicircular thin shell, and includes: the shell 1.1, the outer anchor rod 1.2, the inner anchor rod 1.3 and the skirt 1.4 are respectively provided with a connecting end and a non-connecting end, the connecting end of the outer anchor rod 1.2 is connected to the top of the outer surface of the shell 1.1, the connecting end of the inner anchor rod 1.3 is connected to the top of the inner surface of the shell 1.1, and the shell 1.1, the outer anchor rod 1.2 and the inner anchor rod 1.3 are coaxially arranged and integrally formed, so that the equatorial plane of the shell 1.1 forms the skirt 1.4.
The structure of the hemispherical resonator gyro excitation and detection apparatus of the present utility model will be described with reference to fig. 1 to 5 in conjunction with specific embodiments.
As shown in fig. 2 to 4, the hemispherical resonator gyro excitation and detection apparatus of the present utility model includes an excitation and detection main body part 2, and the excitation and detection main body part 2 includes: a turntable 6, a clamping device 8, a 3-axis displacement table 5, a high-voltage power supply connector 9, an excitation electrode 4 and a detection electrode 4, wherein,
The clamping device 8 is positioned on the turntable 6 and is used for clamping or loosening the outer anchor rod 1.2 of the hemispherical resonator gyroscope 1;
The 3-axis displacement table comprises: the first 3-axis displacement table, the second 3-axis displacement table and the third 3-axis displacement table;
The high-voltage power supply connector 9 is positioned on a first 3-axis displacement table, the first 3-axis displacement table is used for driving the high-voltage power supply connector 9 to move up and down until the high-voltage power supply connector 9 is electrically connected with or disconnected from the inner anchor rod 1.3 of the hemispherical resonator gyro 1, the high-voltage power supply connector 9 is used for providing a high-voltage electric field for the hemispherical resonator gyro 1,
The excitation and detection electrode 4 includes: an excitation electrode and a detection electrode;
the excitation electrode is positioned on a second 3-axis displacement table, the second 3-axis displacement table is used for driving the excitation electrode to be close to or far away from the thin shell 1.1 of the hemispherical resonator gyroscope 1, and the excitation electrode is used for exciting the hemispherical resonator gyroscope 1 to generate vibration;
The detection electrode is fixed on a third 3-axis displacement table, the third 3-axis displacement table is used for driving the detection electrode to be close to or far away from the thin shell 1.1 of the hemispherical resonator gyro 1, and the detection electrode is used for detecting the capacitance variation between the thin shell 1.1 of the hemispherical resonator gyro 1 and the detection electrode.
According to the hemispherical resonator gyro excitation and detection device, excitation/detection electrodes are designed, and the excitation/detection electrodes are driven to be close to or far away from the thin shell 1.1 of the hemispherical resonator gyro 1 through the 3-axis displacement table, so that the hemispherical resonator gyro 1 generates common-frequency vibration, capacitance variation between the thin shell 1.1 of the hemispherical resonator gyro 1 and the detection electrodes is obtained, and different-angle tests can be carried out by matching with rotation of a turntable, so that various test item measurements such as a precession angle, a rigid shaft and the like can be realized. Compared with the traditional scheme of preparing a quartz excitation and detection base and adopting an electrostatic excitation scheme for detection, the method has the advantages of simple mounting and dismounting and measurement modes, no need of complex coating technology and greatly reduced detection cost.
Preferably, the exciting electrode and the detecting electrode are both metal electrodes, the wall surface of the exciting electrode opposite to the outer wall of the thin shell 1.1 of the hemispherical resonator gyro 1 (i.e. the electrode working surface of the exciting electrode) is a profiling surface matched with the outer wall of the thin shell 1.1 of the hemispherical resonator gyro 1, and the wall surface of the detecting electrode opposite to the outer wall of the thin shell 1.1 of the hemispherical resonator gyro 1 (i.e. the electrode working surface of the detecting electrode) is also a profiling surface matched with the outer wall of the thin shell 1.1 of the hemispherical resonator gyro 1.
The excitation/detection electrode is a profiling metal electrode matched with the hemispherical resonator thin shell, the metal electrode has high processing precision, simple process and extremely small resistance, and the effective area of the capacitor generated by the hemispherical resonator is large, so that the assembly clearance between the metal electrode and the hemispherical resonator thin shell is low (the assembly clearance of the conventional excitation method is required to be less than 50um, and the utility model only requires to be less than 200 um), and meanwhile, the working voltage during testing is greatly reduced; therefore, the excitation/detection electrode has the advantages of low resistance, high working area, high capacitance value, low requirement on the gap between the hemisphere and the electrode, and simple processing technology compared with the conventional quartz electrode.
More preferably, as shown in fig. 5, the excitation and detection electrode 4 is a metal cavity structure having an electrode working face 11, and the connecting wall faces of the electrode working face 11 are provided with electrode lead interfaces 12.
The two excitation and detection electrodes 4 in fig. 3 and 4 are the same in structure and material, and can be used as both excitation electrodes and detection electrodes.
Preferably, the excitation and detection body part 2 of the present utility model further comprises: electrode support frame 10, electrode support frame 10 includes: a first electrode support frame and a second electrode support frame; the excitation electrode is arranged on the second 3-axis displacement table through the first electrode supporting frame, and the detection electrode is arranged on the third 3-axis displacement table through the second electrode supporting frame. More preferably, the electrode support frame 10 is made of PP, PVC, ABS or another insulating material.
More preferably, the opposite wall surface of the electrode working surface 11 of the excitation and detection electrode 4 is provided with screw holes for fixing with the electrode holder 10.
The electrode working surface 11 of the excitation and detection electrode 4 is a profiling design structure adopting the thin shell 1.1 appearance structure of the hemispherical resonator gyroscope 1, so that the excitation and detection electrode has the characteristics of low resistance, high contact area and high capacitance value, and the processing technology is simple and easy to process with high precision.
More preferably, the electrode working face 11 is subjected to a mirror polishing process, and has a surface resistance value of about 0Ω and a working surface area of 50 to 100mm 2.
Because the working surface area of the electrode working surface 11 is larger, and the effective working surface between the electrode working surface 11 and the thin shell 1.1 of the hemispherical resonator gyro 1 is larger in the working process, the assembly gap requirement between the electrode working surface 11 and the thin shell 1.1 is reduced (the assembly gap requirement of the conventional excitation method is less than 50 um), so that the excitation and detection electrode 4 has the advantage of simple processing technology compared with the conventional quartz electrode, and the working voltage in the test process can be greatly reduced.
More preferably, the excitation and detection electrode 4 is made of a metal material such as aluminum, red copper, or silver.
More preferably, the excitation and detection electrode 4 is provided with screw holes for fixing with the electrode holder 10.
Preferably, the high-voltage power connector 9 is electrically connected with the inner anchor rod 1.3 of the hemispherical resonator gyro 1 through a first connecting end, and the first connecting end is a high-voltage connector elastic sheet; the high-voltage power supply connector 9 is electrically connected with a high-voltage power supply through a second connecting end. More preferably, the excitation and detection body part 2 of the present utility model further comprises: the high-voltage power supply is used for being electrically connected with the second connecting end of the high-voltage power supply connector 9.
More preferably, the excitation and detection body part 2 of the present utility model further comprises: an image detection device for determining the gap between the excitation and detection electrode 4 and the thin shell 1.1 of the hemispherical resonator gyro 1.
More preferably, the excitation and detection body part 2 further comprises: the workbench surface, the 3-axis displacement table 5 and the turntable 6 are positioned on the workbench surface.
Alternatively, the turntable 6 is a high-speed precision turntable. The high-speed precise turntable is adopted for rotation test, so that the testing of different angles can be realized, the measurement of various test items such as precession angle, rigid shaft and the like can be realized according to the data obtained by the testing, and the ion beam leveling process can be expanded.
Still preferably, the hemispherical resonator gyro excitation and detection apparatus of the present utility model further includes: the canister 100, the excitation and detection body member 2 is located within the canister 100. More preferably, the canister 100 is a vacuum canister with a viewing window.
Still preferably, the hemispherical resonator gyro excitation and detection apparatus of the present utility model further includes: and the vibration meter 3 is used for being electrically connected with the excitation electrode. More preferably, the vibration meter 3 is electrically connected to the electrode lead interface 12 of the excitation electrode. Alternatively, the vibration meter 3 is a doppler vibration meter LDV.
Still preferably, the hemispherical resonator gyro excitation and detection apparatus of the present utility model further includes: and the lock-in amplifier is used for being electrically connected with the excitation electrode and/or the detection electrode.
The utility model can simultaneously utilize the lock-in amplifier and the vibration meter to carry out detection, namely, adopts a double-measurement scheme to carry out synchronous test, and more effectively corrects the test result under the condition of ensuring that the test conditions are completely consistent.
The phase-locked amplifier and the vibration meter are both provided with excitation signal sources, so that excitation and vibration starting of the hemispherical harmonic oscillator can be realized. The lock-in amplifier is electrically connected with the detection electrode, so that the detection of the capacitance variation between the thin shell of the hemispherical resonator gyroscope and the detection electrode can be realized; the vibration meter is a Doppler vibration meter LDV, and the laser head of the vibration meter can be used for measuring the vibration position of the hemispherical resonator, so that the noncontact detection of the capacitance variation between the thin shell of the hemispherical resonator gyroscope and the detection electrode can be realized.
The basic flow of testing with the hemispherical resonator gyro excitation and detection apparatus of the present utility model is described below by way of a specific embodiment.
2-5, Placing the hemispherical resonator gyroscope 1 to be tested on the clamping device 8 in a mode that the inner anchor rod 1.3 is arranged on the upper outer anchor rod 1.2, clamping the hemispherical resonator gyroscope 1 on the clamping device 8 by using a torque wrench, and finishing assembly as shown in FIG. 3;
assembling a high-voltage power connector 9, and compacting a high-voltage connector elastic sheet of the high-voltage power connector 9 through a third 3-axis displacement table to ensure that the high-voltage connector elastic sheet is tightly contacted with an inner anchor rod 1.3 of the hemispherical resonator gyro 1 to form electric conduction;
Assembling an excitation and detection electrode 4 on an electrode support frame 10, determining an assembly gap between an electrode working surface 11 of the excitation and detection electrode 4 and a thin shell 1.1 of the hemispherical resonator gyro 1 by using image detection equipment, wherein the assembly gap is 10-200 mu m, and adjusting the gap between the excitation and detection electrode 4 and the thin shell 1.1 to the assembly gap by a 3-axis displacement table 5;
The excitation electrode, the electrode lead interface 12 of the detection electrode and the high-voltage power connector 9 are connected to corresponding circuit interfaces, the tank body 100 is sealed, the high-vacuum pumping operation is completed, the vacuum degree is smaller than 10 -3 pa, after the resonance frequency of the hemispherical resonator gyro 1 is determined by using a phase-locked amplifier to sweep frequency, the frequency-fixed timing excitation is performed, and meanwhile, the data test is performed by using the phase-locked amplifier and the Doppler vibration meter LDV, and the single-point test is completed.
The hemispherical resonator gyro 1 in the above example may be a coated hemispherical resonator; the clamping device 8 may be a hemispherical chuck.
When the hemispherical resonator gyro excitation and detection device is used for testing, a double-measurement scheme can be used for synchronous testing, and the test result is more effectively checked under the condition that the test conditions are completely consistent; and mixed measurement of multiple testing methods can be realized, and result deviation caused by a single measurement scheme is reduced.
The above embodiments only explain the structure of the hemispherical resonator gyro excitation and detection apparatus according to the present utility model with reference to the drawings, but external conditions such as dimensions and appearance vary with the dimensions and appearance of the workpiece to be developed and produced, and are not particularly limited.
The foregoing embodiments, but only the preferred embodiments of the utility model, use of the phrases "in one embodiment," "in another embodiment," "in yet another embodiment," or "in other embodiments" in this specification may all refer to one or more of the same or different embodiments in accordance with the present disclosure. Common variations and substitutions by those skilled in the art within the scope of the present utility model are intended to be included in the scope of the present utility model.
Claims (10)
1. A hemispherical resonator gyro excitation and detection device, comprising: an excitation and detection body component, the excitation and detection body component comprising: the device comprises a turntable, a clamping device, a 3-axis displacement table, a high-voltage power supply connector, an excitation electrode and a detection electrode, wherein,
The clamping device is positioned on the turntable and used for clamping or loosening an outer anchor rod of the hemispherical resonator gyroscope;
The 3-axis displacement table comprises: the first 3-axis displacement table, the second 3-axis displacement table and the third 3-axis displacement table;
The high-voltage power supply connector is positioned on a first 3-axis displacement table, the first 3-axis displacement table is used for driving the high-voltage power supply connector to move up and down until the high-voltage power supply connector is electrically connected or disconnected with an inner anchor rod of the hemispherical resonator gyro, the high-voltage power supply connector is used for providing a high-voltage electric field for the hemispherical resonator gyro,
The excitation and detection electrodes include: an excitation electrode and a detection electrode;
The excitation electrode is positioned on a second 3-axis displacement table, the second 3-axis displacement table is used for driving the excitation electrode to be close to or far away from a thin shell of the hemispherical resonator gyroscope, and the excitation electrode is used for exciting the hemispherical resonator gyroscope to generate vibration;
The detection electrode is fixed on a third 3-axis displacement table, the third 3-axis displacement table is used for driving the detection electrode to be close to or far away from the thin shell of the hemispherical resonator gyro, and the detection electrode is used for detecting the capacitance variation between the thin shell of the hemispherical resonator gyro and the detection electrode.
2. The hemispherical resonator gyro excitation and detection apparatus according to claim 1, wherein the excitation electrode and the detection electrode are both metal electrodes,
The wall surface of the excitation electrode opposite to the outer wall of the thin shell of the hemispherical resonator gyroscope is a profiling surface matched with the outer wall of the thin shell of the hemispherical resonator gyroscope,
The wall surface of the detection electrode, which is opposite to the outer wall of the thin shell of the hemispherical resonator gyroscope, is also a profiling surface matched with the outer wall of the thin shell of the hemispherical resonator gyroscope.
3. The hemispherical resonator gyro excitation and detection apparatus according to claim 1, wherein electrode lead interfaces are provided on both the excitation electrode and the detection electrode.
4. The hemispherical resonator gyro excitation and detection apparatus of claim 1, further comprising an electrode support frame, the electrode support frame comprising: a first electrode support frame and a second electrode support frame;
The excitation electrode is arranged on the second 3-axis displacement table through the first electrode supporting frame, and the detection electrode is arranged on the third 3-axis displacement table through the second electrode supporting frame.
5. The hemispherical resonator gyro excitation and detection apparatus according to claim 1, wherein the high-voltage power connector is electrically connected with the inner anchor rod of the hemispherical resonator gyro through a first connecting end, and the first connecting end is a high-voltage connector elastic sheet; the high-voltage power supply connector is electrically connected with the high-voltage power supply through a second connecting end.
6. The hemispherical resonator gyro excitation and detection apparatus of any one of claims 1-5, wherein the excitation and detection body section further comprises: the image detection device is used for determining the gap between the excitation and detection electrode and the thin shell of the hemispherical resonator gyroscope.
7. The hemispherical resonator gyro excitation and detection apparatus of any one of claims 1-5, wherein the excitation and detection body section further comprises: the workbench surface, the 3-axis displacement table and the turntable are positioned on the workbench surface.
8. The hemispherical resonator gyro excitation and detection apparatus according to any one of claims 1-5, further comprising: the tank body is connected with the vacuumizing device, and the excitation and detection main body component is positioned in the tank body.
9. The hemispherical resonator gyro excitation and detection apparatus according to any one of claims 1-5, further comprising: and the vibration meter is used for being electrically connected with the excitation electrode.
10. The hemispherical resonator gyro excitation and detection apparatus according to any one of claims 1-5, further comprising: and the lock-in amplifier is used for being electrically connected with the excitation electrode and/or the detection electrode.
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| Application Number | Priority Date | Filing Date | Title |
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| CN202322600574.XU CN221037445U (en) | 2023-09-25 | 2023-09-25 | Hemispherical resonator gyro excitation and detection device |
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| CN202322600574.XU CN221037445U (en) | 2023-09-25 | 2023-09-25 | Hemispherical resonator gyro excitation and detection device |
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