CN113758912A - Full-surface analysis system for free-form surface sample - Google Patents
Full-surface analysis system for free-form surface sample Download PDFInfo
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- CN113758912A CN113758912A CN202111030416.4A CN202111030416A CN113758912A CN 113758912 A CN113758912 A CN 113758912A CN 202111030416 A CN202111030416 A CN 202111030416A CN 113758912 A CN113758912 A CN 113758912A
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- 238000005211 surface analysis Methods 0.000 title claims abstract description 15
- 230000003287 optical effect Effects 0.000 claims abstract description 75
- 238000006073 displacement reaction Methods 0.000 claims abstract description 14
- 238000001514 detection method Methods 0.000 claims abstract description 11
- 239000000835 fiber Substances 0.000 claims description 23
- 239000013307 optical fiber Substances 0.000 claims description 15
- 238000005286 illumination Methods 0.000 claims description 14
- 238000003384 imaging method Methods 0.000 claims description 13
- 238000004458 analytical method Methods 0.000 claims description 9
- 230000005284 excitation Effects 0.000 claims description 7
- 238000012544 monitoring process Methods 0.000 claims description 7
- 238000001228 spectrum Methods 0.000 description 5
- 238000002536 laser-induced breakdown spectroscopy Methods 0.000 description 4
- 230000003595 spectral effect Effects 0.000 description 4
- 238000000034 method Methods 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- JJWKPURADFRFRB-UHFFFAOYSA-N carbonyl sulfide Chemical compound O=C=S JJWKPURADFRFRB-UHFFFAOYSA-N 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 239000000383 hazardous chemical Substances 0.000 description 1
- 238000009616 inductively coupled plasma Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000002834 transmittance Methods 0.000 description 1
- 238000004876 x-ray fluorescence Methods 0.000 description 1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
- G01N21/71—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light thermally excited
- G01N21/718—Laser microanalysis, i.e. with formation of sample plasma
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
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Abstract
The invention discloses a free-form surface sample full-surface analysis system which is suitable for full-surface analysis and detection of a curved surface sample and comprises a workbench, wherein the upper part of the workbench is respectively provided with an optical mechanism, a spectrometer, a laser, a computer and an electric cabinet; the optical mechanism comprises a shielding cover, a sample rotating table, an optical assembly and an optical assembly rotating table, wherein the bottom of the shielding cover is connected with the workbench, the sample rotating table is arranged below the inner part of the shielding cover and used for driving a sample to rotate, the optical assembly is arranged above the sample rotating table and corresponds to the sample rotating table, the bottom of the optical assembly rotating table is connected with the shielding cover through an optical assembly displacement table, and the optical assembly rotating table is arranged on the back of the shielding cover and used for driving the optical assembly to rotate.
Description
Technical Field
The invention relates to the technical field of surface analysis, in particular to a free-form surface sample full-surface analysis system.
Background
The laser-induced breakdown spectroscopy utilizes high-power-density pulsed laser to ablate substances to generate plasma, and the components and content of the substances are obtained by analyzing atomic and ionic spectral lines in the plasma spectrum. Compared with traditional analysis methods such as inductively coupled plasma spectrum/quality, X-ray fluorescence, electron microscope energy spectrum and the like, the laser-induced breakdown spectroscopy has the unique advantages of no need of sample preparation, simplicity, rapidness, capability of analyzing light elements and the like, and is widely applied to the field of material analysis and detection such as environmental detection, cosmic detection, hazardous substance detection and the like.
With the appearance of optical instruments such as optical telescopes, optical fibers and the like, laser-induced breakdown spectroscopy gradually leaves a laboratory, and is really applied to production and life of people. At present, the laser-induced breakdown spectroscopy technology is mainly developed towards portable equipment, aims at a tiny plane sample and a general scene without accurate positioning, and cannot be applied to detection of a curved surface sample needing accurate positioning.
Therefore, there is an urgent need for a free-form surface sample full-surface analysis system, which realizes full-surface automatic focusing, precise positioning and full-surface scanning of a curved surface sample through automatic control software, a moving part, an electric cabinet and imaging monitoring, and has an important role in full-surface analysis and detection of the free-form surface sample.
Disclosure of Invention
The present invention is directed to a system for analyzing the entire surface of a free-form surface sample, so as to solve the problems mentioned in the background art.
In order to achieve the purpose, the technical scheme adopted by the invention is as follows:
a free-form surface sample full-surface analysis system is suitable for full-surface analysis and detection of a curved surface sample and comprises a workbench, wherein the upper part of the workbench is respectively provided with an optical mechanism, a spectrometer, a laser, a computer and an electric cabinet; the optical mechanism comprises a shielding cover, a sample rotating table, an optical assembly rotating table and a lighting source, wherein the bottom of the shielding cover is connected with the workbench, the sample rotating table is arranged below the inner portion of the shielding cover and used for driving a sample to rotate, the optical assembly is arranged above the sample rotating table and corresponds to the sample rotating table, the bottom of the optical assembly rotating table is connected with the shielding cover through an optical assembly displacement table, the optical assembly rotating table is arranged at the back of the shielding cover and used for driving the optical assembly to rotate, and the lighting source is arranged below the back of the shielding cover and used for lighting the sample.
Further, optical assembly includes the shell body, installs the imaging detector at the shell body top, sets up the achromatism objective in shell body bottom to and all locate inside first fiber collimator, notch filter, second fiber collimator, first spectroscope, energy detector, third fiber collimator, second spectroscope, third spectroscope and the eyepiece of shell body, second fiber collimator, second spectroscope and notch filter coaxial line just lay in proper order along vertical decurrent direction, eyepiece, third spectroscope, first spectroscope and energy detector coaxial line just lay in proper order along vertical decurrent direction, second spectroscope, third spectroscope and third fiber collimator are in same water flat line, notch filter, first spectroscope and first fiber collimator are in same water flat line.
Further, laser instrument, first fiber collimator, notch filter and achromatic objective constitute sample excitation system, second fiber collimator, spectrum appearance and computer constitute signal acquisition analytic system, first spectroscope, energy detector, light source, third fiber collimator, second spectroscope, third spectroscope, eyepiece and formation of image detector constitute sample surface and laser energy monitoring system.
Further, the electric cabinet is located the shield cover rear, just the electric cabinet is used for controlling the work of sample revolving stage, optical assembly displacement platform and optical assembly revolving stage.
Compared with the prior art, the invention has the following beneficial effects:
(1) in the invention, the sample rotating platform, the optical component displacement platform and the optical component rotating platform are skillfully arranged, and because the optical component displacement platform can realize automatic focusing on the surface of the sample, the optical component rotating platform can realize accurate scanning positioning on the spherical shell sample at the same longitude and the sample rotating platform can realize accurate scanning positioning on the spherical shell sample at the same latitude, the sample rotating platform, the optical component displacement platform and the optical component rotating platform are matched for use, so that a user can automatically and accurately position the whole surface of the spherical shell sample when using the system to analyze the surface of the curved surface sample.
(2) In the invention, the optical component is skillfully provided with the notch filter, and the reflection of the main laser and the transmission of the signal light reflected by the sample can be realized through the notch filter so as to carry out full-spectrum detection and analysis on the excitation signal.
(3) In the invention, a large number of light splitting elements with high transmittance and reflectance are adopted in the optical assembly, so that laser energy is split, most of main laser energy is used for exciting a sample, and a small part of laser energy is transmitted to the energy detector so as to monitor the laser energy.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings needed to be used in the embodiments will be briefly described below, it should be understood that the following drawings only illustrate some embodiments of the present invention, and therefore should not be considered as limiting the scope of protection, and it is obvious for those skilled in the art that other related drawings can be obtained according to these drawings without inventive efforts.
FIG. 1 is a schematic view of the structure of the present invention.
FIG. 2 is a schematic view (back) of the structure of the present invention.
Fig. 3 is a schematic structural diagram of an optical assembly according to the present invention.
FIG. 4 is a schematic view of the using state of the spherical shell sample of the present invention.
In the drawings, the names of the parts corresponding to the reference numerals are as follows:
1. a work table; 2. an optical mechanism; 20. a shield case; 21. a sample rotation stage; 22. an optical assembly displacement stage; 23. an optical component; 230. an eyepiece; 231. an imaging detector; 232. an achromatic objective lens; 2331. a first fiber collimator; 2332. a second fiber collimator; 2333. a third fiber collimator; 234. a notch filter; 235. an energy detector; 2361. a first beam splitter; 2362. a second spectroscope; 2363. a third beam splitter; 24. an optical assembly rotating table; 25. an illumination light source; 3. a spectrometer; 4. a laser; 5. a computer; 6. an electric cabinet.
Detailed Description
To further clarify the objects, technical solutions and advantages of the present application, the present invention will be further described with reference to the accompanying drawings and examples, and embodiments of the present invention include, but are not limited to, the following examples. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present application.
Examples
As shown in fig. 1 to 4, the present embodiment provides a system for analyzing a full surface of a free-form surface sample, which is suitable for analyzing and detecting a full surface of a curved surface sample. First, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings, and are only for convenience of describing the present invention and simplifying the description, but do not indicate or imply that the referred device or element must have a specific orientation, be constructed in a specific orientation and be operated, and thus, should not be construed as limiting the present invention. Furthermore, the terms "first" and "second" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.
In this embodiment, the free-form surface sample full-surface analysis system includes a workbench 1, and an optical mechanism 2, a spectrometer 3, a laser 4, a computer 5 and an electric cabinet 6 are respectively arranged on the upper portion of the workbench 1;
the optical mechanism 2 comprises a shielding cover 20, a sample rotating table 21, an optical assembly 23, an optical assembly rotating table 24 and an illuminating light source 25, wherein the bottom of the shielding cover 20 is connected with the workbench, the sample rotating table 21 is arranged below the inner portion of the shielding cover 20 and used for driving a sample to rotate, the optical assembly 23 is arranged above the sample rotating table 21 and corresponds to the sample rotating table 21, the bottom of the optical assembly rotating table is connected with the shielding cover 20 through an optical assembly displacement table 22, the optical assembly rotating table 24 is arranged at the back of the shielding cover 20 and used for driving the optical assembly 23 to rotate, and the illuminating light source 25 is arranged below the back of the shielding cover 20 and used for illuminating the sample.
The optical assembly 23 includes an outer casing, an imaging detector 231 installed at the top of the outer casing, an achromatic objective 232 installed at the bottom of the outer casing, and a first optical collimator 2331, a notch filter 234, a second optical collimator 2332, a first spectroscope 2361, an energy detector 235, a third optical collimator 2333, a second spectroscope 2362, a third spectroscope 2363 and an eyepiece 230 all installed inside the outer casing, the second optical collimator 2332, the second spectroscope 2362 and the notch filter 234 are coaxial and are sequentially arranged along a vertical downward direction, the eyepiece 230, the third spectroscope 2363, the first spectroscope 2361 and the energy detector 235 are coaxial and are sequentially arranged along a vertical downward direction, the second spectroscope 2362, the third spectroscope 2363 and the third optical collimator 2333 are located at the same horizontal line, the notch filter 234, the first spectroscope 2361 and the first optical collimator 2331 are located at the same horizontal line, the optical component 23 can reflect and transmit the laser and the illumination light conveniently, and the optical path is prevented from being mixed.
The laser 4, the first optical fiber collimator 2331, the notch filter 234 and the achromatic objective 232 form a sample excitation system, the sample excitation system is used for transmitting laser emitted by the laser 4 to the first optical fiber collimator 2331 through optical fibers to form parallel light, the parallel light is reflected by the notch filter 234 and then focused to the surface of a sample through the achromatic objective 232, the second optical fiber collimator 2332, the spectrometer 3 and the computer 5 form a signal acquisition and analysis system, the signal acquisition and analysis system is used for collecting signal light excited by the surface of the sample through the achromatic objective 232 to form parallel light, the parallel light penetrates through the second optical fiber collimator 2332 and is transmitted to the spectrometer 3 through the optical fibers, the spectrometer 3 transmits spectral information obtained by analysis to the computer 5 for collection, and the first spectroscope 2361, the energy detector 235, the illumination light source 25, the second optical fiber collimator 2332, the energy detector 235, the achromatic lens and the achromatic lens 232 transmit the spectral information to the spectrometer 3 through the optical fibers for collection and processing, The third optical fiber collimator 2333, the second spectroscope 2362, the third spectroscope 2363, the eyepiece 230 and the imaging detector 231 constitute a sample surface and laser energy monitoring system, and the sample surface and laser energy monitoring system can be used for dispersing the excitation light emitted by the laser 4 through the first spectroscope 2361, so that a part of the laser is reflected to enter the energy detector 235 to realize monitoring of the excitation light energy; the illumination light emitted by the illumination light source 25 is transmitted to the third fiber collimator 2333 through the optical fiber to be changed into a collimated light source, and is reflected by the second spectroscope 2362 and focused by the achromatic objective 232 to illuminate the surface of the sample, and then the reflected light on the surface of the sample is changed into parallel light through the achromatic objective 232, is reflected by the second spectroscope 2362 and the third spectroscope 2363, and is focused into the imaging detector 231 through the eyepiece 230 to realize the monitoring of the surface of the sample.
The electric cabinet 6 is positioned behind the shielding cover 20, the electric cabinet 6 is used for controlling the sample rotating table 21, the optical component displacement table 22 and the optical component rotating table 24 to work, and the sample rotating table 21, the optical component displacement table 22 and the optical component rotating table 24 form a full-surface automatic focusing system, so that after the computer 5 analyzes images of the sample surface and the main laser focal spot obtained by the imaging detector 231, a motion signal can be sent out, the electric cabinet 6 controls the optical component displacement table 22 to translate along the focal depth direction of the achromatic objective 232 so as to adjust the main laser focal spot and the imaging quality of the sample surface, and the automatic focusing of the sample surface is realized; the optical assembly rotation stage 24 and the sample rotation stage 21 are simultaneously controlled to drive the optical assembly 23 to rotate and the sample to rotate, respectively, so as to adjust the main laser focal spot position on the sample surface, thereby achieving precise positioning and full surface scanning of the sample surface (similar to positioning an arbitrary position of the earth surface by longitude and latitude).
In this embodiment, the whole surface analysis and detection process of the spherical shell sample by the system is as follows:
first, main laser light emitted by a laser 4 is transmitted to a first fiber collimator 2331 through a fiber to be changed into parallel light, and the parallel light is split by a first beam splitter 2361, so that a small part of the main laser light enters an energy detector 235, and the energy of the main laser light is monitored; most of the main laser light is incident on the notch filter 234 through the first spectroscope 2361, reflected by the notch filter 234, focused to the surface of the spherical shell-shaped sample by the achromatic objective 232, and reflected light of the main laser light on the surface of the sample can enter the eyepiece 230 through the third spectroscope 2363 and is finally imaged to the imaging detector 231 after being collected by the achromatic objective 232, reflected by the notch filter 234 and the first spectroscope 2361;
meanwhile, the illumination light emitted by the illumination light source 25 is transmitted to the third fiber collimator 2333 through the optical fiber to become parallel illumination light, half of the parallel illumination light sequentially passes through the third spectroscope 2363 and the second spectroscope 2362, and is reflected by the second spectroscope 2362, and a part of the parallel illumination light passes through the notch filter 234, and is focused on the surface of the spherical shell-shaped sample through the achromatic objective 232, so that the surface of the spherical shell-shaped sample is illuminated, and the rest of the illumination light is lost, and then the reflected light of the illumination light on the surface of the sample is sequentially collected by the achromatic objective 232, transmitted by the notch filter 234, reflected by the first spectroscope 2361 and the third spectroscope 2363, and is imaged into the imaging detector 231 through the eyepiece 230;
then, after the computer 5 analyzes and processes the surface of the sample and the image of the main laser collected by the imaging detector 231, the electric cabinet 6 controls the optical component displacement table 22 to drive the whole optical component 23 to translate along the focal depth direction of the achromatic objective 232 so as to realize automatic focusing on the surface of the sample, meanwhile, the computer 5 controls the optical component rotation table 24 through the electric cabinet 6 so as to drive the optical component 23 to rotate so as to realize accurate scanning positioning on the spherical shell sample at the same longitude, and the sample rotation table 21 can drive the spherical shell-shaped sample thereon to rotate so as to realize accurate scanning positioning on the spherical shell sample at the same latitude, so that the optical component 23 can realize automatic accurate positioning on the whole surface of the spherical shell sample;
after the surface of the spherical shell-shaped sample is irradiated by the main laser, the signal light excited by the spherical shell-shaped sample is collected by the achromatic objective 232, transmitted by the notch filter 234 and transmitted by the second beam splitter 2362, and then is coupled to the optical fiber by the second optical collimator 2332 and transmitted to the spectrometer 3 for analysis, and the spectrometer 3 transmits the spectral data obtained by analysis to the computer 5.
The above-mentioned embodiments are only preferred embodiments of the present invention, and do not limit the scope of the present invention, but all the modifications made by the principles of the present invention and the non-inventive efforts based on the above-mentioned embodiments shall fall within the scope of the present invention.
Claims (4)
1. A free-form surface sample full-surface analysis system is suitable for full-surface analysis and detection of a curved surface sample, and comprises a workbench (1), and is characterized in that an optical mechanism (2), a spectrometer (3), a laser (4), a computer (5) and an electric cabinet (6) are respectively arranged at the upper part of the workbench (1);
optical mechanism (2) include shield cover (20) that bottom and workstation (1) are connected, locate shield cover (20) inside below, a sample revolving stage (21) for driving the sample and carry out the rotation, locate sample revolving stage (21) top, corresponding with sample revolving stage (21), optical assembly (23) that the bottom is connected with shield cover (20) through optical assembly displacement platform (22), locate shield cover (20) back, an optical assembly revolving stage (24) for driving optical assembly (23) rotation, and locate shield cover (20) back below, a source of illumination (25) for illuminating the sample.
2. The free-form surface sample full-surface analysis system as claimed in claim 1, wherein the optical assembly (23) comprises an outer shell, an imaging detector (231) installed at the top of the outer shell, an achromatic objective lens (232) arranged at the bottom of the outer shell, and a first fiber collimator (2331), a notch filter (234), a second fiber collimator (2332), a first spectroscope (2361), an energy detector (235), a third fiber collimator (2333), a second spectroscope (2362), a third spectroscope (2363) and an eyepiece (230) which are all arranged inside the outer shell, the second fiber collimator (2332), the second spectroscope (2362) and the notch filter (234) are coaxially arranged in sequence along a vertically downward direction, the eyepiece (230), the third spectroscope (2363), the first spectroscope (2361) and the energy detector (235) are coaxially arranged in sequence along a vertically downward direction, the second spectroscope (2362), the third spectroscope (2363) and the third optical fiber collimator (2333) are located on the same horizontal line, and the notch filter (234), the first spectroscope (2361) and the first optical fiber collimator (2331) are located on the same horizontal line.
3. The system for analyzing the whole surface of the free-form surface sample as claimed in claim 2, wherein the laser (4), the first fiber collimator (2331), the notch filter (234) and the achromatic objective lens (232) form a sample excitation system, the second fiber collimator (2332), the spectrometer (3) and the computer (5) form a signal acquisition and analysis system, and the first spectroscope (2361), the energy detector (235), the illumination light source (25), the third fiber collimator (2333), the second spectroscope (2362), the third spectroscope (2363), the eyepiece (230) and the imaging detector (231) form a sample surface and a laser energy monitoring system.
4. The system for analyzing the whole surface of a free-form surface sample according to claim 1, wherein the electric cabinet (6) is located behind the shielding case (20), and the electric cabinet (6) is used for controlling the operation of the sample rotating table (21), the optical assembly displacement table (22) and the optical assembly rotating table (24).
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| Application Number | Priority Date | Filing Date | Title |
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| CN202111030416.4A CN113758912A (en) | 2021-09-03 | 2021-09-03 | Full-surface analysis system for free-form surface sample |
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| Application Number | Priority Date | Filing Date | Title |
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| CN202111030416.4A CN113758912A (en) | 2021-09-03 | 2021-09-03 | Full-surface analysis system for free-form surface sample |
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