CN110231358B - Combined device of scanning electron microscope and spectrum equipment - Google Patents
Combined device of scanning electron microscope and spectrum equipment Download PDFInfo
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- CN110231358B CN110231358B CN201910628602.4A CN201910628602A CN110231358B CN 110231358 B CN110231358 B CN 110231358B CN 201910628602 A CN201910628602 A CN 201910628602A CN 110231358 B CN110231358 B CN 110231358B
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- 238000001228 spectrum Methods 0.000 title claims abstract description 61
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- 238000010894 electron beam technology Methods 0.000 claims abstract description 27
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- 238000005086 pumping Methods 0.000 claims 3
- 238000011065 in-situ storage Methods 0.000 description 5
- 238000005259 measurement Methods 0.000 description 5
- 238000001237 Raman spectrum Methods 0.000 description 3
- 238000002189 fluorescence spectrum Methods 0.000 description 3
- 238000012512 characterization method Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000005284 excitation Effects 0.000 description 2
- 238000012625 in-situ measurement Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 238000002381 microspectrum Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 238000011160 research Methods 0.000 description 2
- 230000003595 spectral effect Effects 0.000 description 2
- 238000001069 Raman spectroscopy Methods 0.000 description 1
- 230000006399 behavior Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 238000004020 luminiscence type Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000005424 photoluminescence Methods 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 230000002441 reversible effect Effects 0.000 description 1
- 238000005070 sampling Methods 0.000 description 1
- 238000010183 spectrum analysis Methods 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
- G01N21/63—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
- G01N21/64—Fluorescence; Phosphorescence
- G01N21/645—Specially adapted constructive features of fluorimeters
- G01N21/6456—Spatial resolved fluorescence measurements; Imaging
- G01N21/6458—Fluorescence microscopy
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
- G01N21/63—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
- G01N21/65—Raman scattering
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
- G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
- G01N23/2206—Combination of two or more measurements, at least one measurement being that of secondary emission, e.g. combination of secondary electron [SE] measurement and back-scattered electron [BSE] measurement
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
- G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
- G01N23/225—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material using electron or ion
- G01N23/2251—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material using electron or ion using incident electron beams, e.g. scanning electron microscopy [SEM]
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2223/00—Investigating materials by wave or particle radiation
- G01N2223/07—Investigating materials by wave or particle radiation secondary emission
- G01N2223/09—Investigating materials by wave or particle radiation secondary emission exo-electron emission
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2223/00—Investigating materials by wave or particle radiation
- G01N2223/10—Different kinds of radiation or particles
- G01N2223/102—Different kinds of radiation or particles beta or electrons
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
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Abstract
The invention provides a combined device of a scanning electron microscope and spectrum equipment, which relates to the technical field of optical detection instruments, and comprises the following components: the device comprises a spectrum detection device, a scanning electron microscope receiving device and an electron gun; the spectrum detection device can emit laser to the sample along a first direction, the electron gun can emit electron beams to the sample along a second direction, and the probe of the scanning electron microscope receiving device faces to a third direction and is used for receiving the electronic signals emitted by the surface of the sample. The direction of the laser emitted by the spectrum detection device is different from the signal receiving direction of the electron microscope device and the emission direction of the electron gun respectively, and the directions of the laser are towards the sample, so that the spectrum detection device, the scanning electron microscope receiving device and the electron gun can carry out spectrum detection and scanning electron microscope function detection on the same position of the sample from different directions and at the same time.
Description
Technical Field
The invention relates to the technical field of optical detection instruments, in particular to a scanning electron microscope and spectrum equipment combined device.
Background
The scanning electron microscope-Raman/fluorescence spectrum combined system can observe the nano-scale resolution and simultaneously perform in-situ detection such as Raman, photoluminescence, luminescence and the like, so that in-situ characterization of material elements, structures, mechanical property parameters and dynamic behaviors is realized, and the system is a common requirement for research, development and detection in the field of scientific research and industry of a plurality of subjects.
The working principles of the existing scanning electron microscope-Raman/fluorescence spectrum combined system are two. The working principle is "separate detection". The spectrum measuring platform and the scanning electron microscope platform are arranged at different positions of the same vacuum bin, and a transmission table for precise transmission is arranged between the spectrum measuring platform and the scanning electron microscope platform, so that the spectrum and the electron microscope at the same position of the same sample are respectively detected. This principle results in measurement pseudo-in-situ, not in real time. Another working principle is based on parabolic mirror lateral spectrum. Specifically, a parabolic reflector with micropores at the upper part is horizontally inserted between an electron gun and a sample under the basic frame of a scanning electron microscope. The focus of the parabolic reflector is arranged on the surface of the sample, the horizontally emitted collimated light can be focused on the surface of the sample to realize excitation, and the light signals scattered by the surface of the sample can be collected by the parabolic reflector and reflected to a far-end spectrum analysis device in the horizontal direction. Meanwhile, as the micropore at the upper part of the parabolic reflector is positioned on the electron gun vertical emission electron beam route, the electron beam passes through the micropore and reaches the surface of the sample, thereby realizing the simultaneous detection of the scanning electron microscope and the microscopic spectrum. This principle results in a complex focusing process and inability to observe samples during spectral measurement, and difficulty in ensuring accurate selection of sampling point locations and spectral resolution. Furthermore, the intervention of the parabolic mirror also blocks the light path of other characterization devices (e.g., the energy spectrum) from detection.
Disclosure of Invention
The invention aims to provide a combined device of a scanning electron microscope and spectrum equipment, which is used for solving the technical problems of inconsistent measuring positions, low efficiency and low resolution of a scanning electron microscope-Raman/fluorescence spectrum combined system.
Embodiments of the present invention are implemented as follows:
the device for combining the scanning electron microscope and the spectrum equipment provided by the embodiment of the invention comprises: the device comprises a spectrum detection device, a scanning electron microscope receiving device and an electron gun;
the spectrum detection device can emit laser to a sample along a first direction, the electron gun can emit electron beams to the sample along a second direction, and the probe of the scanning electron microscope receiving device faces to a third direction and is used for receiving electronic signals emitted by the surface of the sample; and the first direction is not coincident with the second direction and the third direction, respectively.
Further, the combined device of the scanning electron microscope and the spectrum equipment comprises a vacuum bin and a sample table, and the spectrum detection device and the scanning electron microscope receiving device are both fixed on the vacuum bin;
the electron gun and the sample table are both arranged in the vacuum bin, and the electron gun is positioned above the sample table;
and the spectrum detection device and the scanning electron microscope receiving device are respectively positioned at two sides of the electron gun.
Further, the sample table comprises a table top and a lifting mechanism, wherein the table top is connected with the lifting mechanism, and the lifting mechanism is used for driving the table top to vertically move up and down.
Further, the spectrum detection device comprises a laser, a spectrograph, an external light path component, a first displacement adjustment mechanism, a light transmission flange, a second displacement adjustment mechanism and a microscope lens;
the light-passing flange is arranged on the wall of the vacuum bin, so that the inside and the outside of the vacuum bin can be conducted by the light-passing flange;
the laser and the spectrograph are connected with one end of the outer light path component, the other end of the outer light path component is connected with the movable end of the first displacement adjusting mechanism, and the fixed end of the first displacement adjusting mechanism is fixedly connected to the outer side wall of the light transmission flange;
the fixed end of the second displacement adjusting mechanism is arranged on the inner side wall of the light transmission flange; the micro lens is arranged at the movable end of the second displacement adjusting mechanism, and the first displacement adjusting mechanism and the second displacement adjusting mechanism are used for adjusting the outer light path component and the micro lens to be on the same optical axis.
Further, the first displacement adjustment mechanism is a two-dimensional displacement fixing platform, the second displacement adjustment mechanism comprises a three-dimensional displacement adjustment platform and a lens bracket, the lens bracket is installed on the three-dimensional displacement adjustment platform, and the lens bracket is used for fixing the micro lens.
Further, the scanning electron microscope receiving device comprises electron beam analysis equipment, a fixed flange and an electron beam collecting probe; the fixing flange is arranged on the wall of the vacuum bin, so that the inside and the outside of the vacuum bin can be communicated through the fixing flange;
the electron beam collecting probe is fixedly arranged on the inner side of the fixed flange, and the outer end of the electron beam collecting probe penetrates through the fixed flange and then is connected with the electron beam analysis equipment fixed on the outer side of the fixed flange.
Further, the external light path component comprises a collimator, a narrow-band filter, a first reflecting mirror and a bicolor laser spectroscope, wherein the bicolor laser spectroscope can reflect laser emitted by the laser and can transmit the laser reflected from the sample;
the first reflecting mirror is used for reflecting the light emitted from the narrow-band filter to the bicolor laser spectroscope so that the light emitted from the laser can sequentially pass through the collimator, the narrow-band filter, the first reflecting mirror and the bicolor laser spectroscope and then enter the microscope lens;
the external light path component further comprises a coupling lens and a high-pass filter, and the coupling lens and the high-pass filter are both positioned between the spectrograph and the double-color laser spectroscope, so that laser reflected from the sample can sequentially pass through the microscope lens, the double-color laser spectroscope, the high-pass filter and the coupling lens and then enter the spectrograph.
Further, the external light path component further comprises a light source, an image sensor, a half-reflecting half-lens, a second reflecting mirror and a third reflecting mirror, wherein the third reflecting mirror can be inserted and pulled between the high-pass filter and the bicolor laser spectroscope, so that light emitted by the light source can be transmitted from the bicolor laser spectroscope after being reflected by the half-reflecting half-lens, the second reflecting mirror and the third reflecting mirror in sequence;
the image sensor is positioned on the light transmitting side of the half-reflecting half-lens so that the image sensor can receive the light transmitted by the bicolor laser spectroscope, reflected by the second reflecting mirror and the third reflecting mirror and transmitted by the half-reflecting half-lens to form the image information of the sample.
Further, the combined device of the scanning electron microscope and the spectrum equipment comprises a vacuumizing mechanism, wherein the vacuumizing mechanism is connected with the vacuum bin and used for vacuumizing the vacuum bin.
The embodiment of the invention has the following beneficial effects:
according to the device for combining the scanning electron microscope and the spectrum equipment, provided by the embodiment of the invention, the direction of the laser emitted by the spectrum detection device is different from the signal receiving direction of the electron microscope device and the emission direction of the electron gun respectively, and the directions of the laser emitted by the spectrum detection device and the electron gun face the sample, so that the spectrum detection device, the scanning electron microscope receiving device and the electron gun can carry out spectrum detection and scanning electron microscope function detection on the same position of the sample at the same time. And there is no shielding object between the electron gun and the sample and between the sample and the scanning electron microscope receiving device, so that the spectrum function and the scanning electron microscope optical measurement function can be respectively and completely and independently operated without mutual interference, and real-time in-situ measurement is realized.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the related art, the drawings that are required to be used in the description of the embodiments or the related art will be briefly described, and it is apparent that the drawings in the description below are some embodiments of the present invention, and other drawings may be obtained according to the drawings without inventive effort for those skilled in the art.
FIG. 1 is a schematic diagram of a combined device of a scanning electron microscope and a spectrum device according to an embodiment of the present invention;
fig. 2 is a schematic diagram of an external optical path component of a combined device of a scanning electron microscope and a spectrum device according to an embodiment of the present invention.
Icon: 110-a laser; 120-spectrograph; 130-an external light path component; 140-a first displacement adjustment mechanism; 150-a light-transmitting flange; 160-a second displacement adjustment mechanism; 170-a microscope lens; 200-electron gun; 300-vacuum bin; 400-sample stage; 510-an electron beam collection probe; 520-a fixed flange; 530-an electron beam analysis device;
610-collimator; 620-a narrow band filter; 630-a first mirror; 640-a two-color laser spectroscope; 710-coupling a lens; 720-a high-pass filter; 810-a light source; 820-an image sensor; 830—half-mirror half lens; 840-a second mirror; 850-third mirror.
Detailed Description
For the purpose of making the objects, technical solutions and advantages of the embodiments of the present invention more apparent, the technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention, and it is apparent that the described embodiments are some embodiments of the present invention, but not all embodiments of the present invention. The components of the embodiments of the present invention generally described and illustrated in the figures herein may be arranged and designed in a wide variety of different configurations.
Thus, the following detailed description of the embodiments of the invention, as presented in the figures, is not intended to limit the scope of the invention, as claimed, but is merely representative of selected embodiments of the invention. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.
It should be noted that: like reference numerals and letters denote like items in the following figures, and thus once an item is defined in one figure, no further definition or explanation thereof is necessary in the following figures.
In the description of the present invention, it should be noted that, directions or positional relationships indicated by terms such as "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc., are directions or positional relationships based on those shown in the drawings, or are directions or positional relationships conventionally put in use of the inventive product, are merely for convenience of describing the present invention and simplifying the description, and are not indicative or implying that the apparatus or element to be referred to must have a specific direction, be constructed and operated in a specific direction, and thus should not be construed as limiting the present invention. Furthermore, the terms "first," "second," "third," and the like are used merely to distinguish between descriptions and should not be construed as indicating or implying relative importance.
Furthermore, the terms "horizontal," "vertical," "overhang," and the like do not denote a requirement that the component be absolutely horizontal or overhang, but rather may be slightly inclined. As "horizontal" merely means that its direction is more horizontal than "vertical", and does not mean that the structure must be perfectly horizontal, but may be slightly inclined.
In the description of the present invention, it should also be noted that, unless explicitly specified and limited otherwise, the terms "disposed," "mounted," "connected," and "connected" are to be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium, and can be communication between two elements. The specific meaning of the above terms in the present invention will be understood in specific cases by those of ordinary skill in the art.
As shown in fig. 1, a combined scanning electron microscope and spectrum device apparatus provided in an embodiment of the present invention includes: a spectrum detecting device, a scanning electron microscope receiving device and an electron gun 200; the spectrum detection device can emit laser to the sample along a first direction, the electron gun 200 can emit electron beams to the sample along a second direction, and the probe of the scanning electron microscope receiving device faces to a third direction and is used for receiving electronic signals emitted by the surface of the sample; and the first direction is not coincident with the second direction and the third direction, respectively. According to the device for combining the scanning electron microscope and the spectrum equipment, provided by the embodiment of the invention, the direction of the laser emitted by the spectrum detection device is different from the signal receiving direction of the electron microscope device and the emitting direction of the electron gun 200 respectively and faces the sample, so that the spectrum detection device, the scanning electron microscope receiving device and the electron gun 200 can perform spectrum detection and scanning electron microscope function detection on the same position of the sample at the same time. And no shielding object exists between the electron gun 200 and the sample and between the sample and the scanning electron microscope receiving device, so that the spectrum function and the scanning electron microscope optical measurement function can be respectively and completely operated independently without mutual interference. The in-situ measurement of the spectrum measuring device and the scanning electron microscope is realized, and the method has the advantages of high resolution, high accuracy and the like.
The combined device of the scanning electron microscope and the spectrum equipment comprises a vacuum bin 300 and a sample table 400, and the spectrum detection device and the scanning electron microscope receiving device are both fixed on the vacuum bin 300. Both the electron gun 200 and the sample stage 400 are mounted inside the vacuum chamber 300. The electron gun 200 is fixedly installed on the top surface of the vacuum chamber 300, the muzzle of the electron gun 200 is vertically downward, the sample stage 400 is located right below the electron gun 200, and the spectrum detection device is located on one side of the electron gun 200, which is fixed on the chamber wall of the vacuum chamber 300 with respect to the vertical inclination, the scanning electron microscope detection device is located on the opposite side of the electron gun 200, which is also fixed on the chamber wall of the vacuum chamber 300 with respect to the vertical inclination, and the inclination direction of the spectrum detection device is opposite to the inclination direction of the scanning electron microscope detection device.
The spectrum detection device and the scanning electron microscope detection device may be disposed asymmetrically on both sides of the electron gun 200, or may be disposed on the same side of the electron gun 200.
The second and third directions may be non-coincident; the overlapping may be made, for example, when the scanning electron microscope detecting device is also installed at the edge of the electron gun.
Further, the sample stage 400 includes a stage surface and a lifting mechanism, the stage surface is connected with the lifting mechanism, the lifting mechanism is used for driving the stage surface to move up and down vertically, the lifting mechanism may include a screw rod or an air cylinder, and the height of the stage surface is used for adjusting the height position of the sample on the stage surface to change so as to adapt to the light spectrum detection device, the scanning electron microscope receiving device and the electron gun 200.
Specifically, the spectrum detection device includes a laser 110, a spectrograph 120, an external light path component 130, a first displacement adjustment mechanism 140, a light transmission flange 150, a second displacement adjustment mechanism 160, and a microscope lens 170; the light-transmitting flange 150 is disposed on the wall of the vacuum chamber 300, the light-transmitting flange 150 has the functions of fixing and transmitting light, and transparent windows are disposed on the light-transmitting flange 150, so that laser conduction can be realized inside and outside the vacuum chamber 300.
The laser 110 and the spectrograph 120 are both connected with one end of the external light path component 130, the other end of the external light path component 130 is connected with the movable end of the first displacement adjustment mechanism 140, and the fixed end of the first displacement adjustment mechanism 140 is fixedly connected to the outer side wall of the light transmission flange 150. The light emitted by the laser 110 and the light received by the spectrograph 120 all need to pass through the outer light path component 130, the fixed end of the first displacement adjustment mechanism 140 is connected with the light transmission flange 150, the movable end is connected with the outer light path component 130, the optical axis of the outer light path component 130 can be changed by adjusting the first displacement adjustment mechanism 140, and the fixed end of the second displacement adjustment mechanism 160 is arranged on the inner side wall of the light transmission flange 150; the micro lens 170 is mounted on the movable end of the second displacement adjustment mechanism 160, and the external light path component 130 and the micro lens 170 can be coaxial with the optical axis by adjusting the first displacement adjustment mechanism 140 and the second displacement adjustment mechanism 160.
The light-transmitting flange 150 divides the spectrum detection device into two parts, one part is arranged in the vacuum chamber 300, and the other part is arranged outside the vacuum chamber 300, so that the vacuum degree of the vacuum chamber 300 is ensured, the basic condition of scanning electron microscope measurement is met, and the spectrum detection device has wider applicability to various different scanning electron microscopes.
The first displacement adjustment mechanism 140 may be a two-dimensional displacement fixed platform or a three-dimensional displacement fixed platform. Taking the first displacement adjustment mechanism 140 as an example of a two-dimensional displacement fixing platform, by manipulating the adjusting knob of the two-dimensional displacement fixing platform, the movement of the external light path component 130 in two vertical directions on the plane where the light transmission flange 150 is located can be realized.
The second displacement adjustment mechanism 160 may include a three-dimensional displacement adjustment platform and a lens holder, wherein the three-dimensional displacement adjustment platform may be replaced by a two-dimensional displacement fixation platform. The lens holder is mounted on the three-dimensional displacement adjustment platform, and is used for fixing the micro-lens 170, and by operating the second displacement adjustment mechanism 160, adjustment of the micro-lens 170 in three directions perpendicular to each other, up and down, left and right, front and rear, can be achieved. Microscope 170 is enabled to align the sample prior to testing.
The scanning electron microscope receiving device includes an electron beam analysis apparatus 530, a fixing flange 520, and an electron beam collecting probe 510. The fixing flange 520 is fixedly installed on the wall of the vacuum chamber 300 so that the inside and the outside of the vacuum chamber 300 can be communicated through the fixing flange 520, and the disk surface of the fixing flange 520 is inclined with respect to the vertical direction. The electron beam collecting probe 510 is fixedly installed at the inner side of the fixing flange 520, and the outer end of the electron beam collecting probe 510 penetrates the fixing flange 520 and then is connected with the electron beam analyzing apparatus 530 fixed at the outer side of the fixing flange 520.
As shown in fig. 2, in particular, the external optical path assembly 130 may include a collimator 610, a narrow band filter 620, a first reflecting mirror 630, and a dichroic laser beam splitter 640, wherein the dichroic laser beam splitter 640 is capable of reflecting laser light emitted from the laser 110 and transmitting the laser light reflected from the sample. The first reflecting mirror 630 is used to reflect the light emitted from the narrow band filter 620 toward the dichroic laser beam splitter 640. Laser light emitted from the laser 110 can sequentially pass through the collimator 610, the narrow band filter 620, the first reflecting mirror 630, and the dichroic laser beam splitter 640, and then enter the microscope 170, and then be irradiated onto the sample.
The external light path assembly 130 further includes a coupling lens 710 and a high pass filter 720, both of which are located between the spectrograph 120 and the two-color laser beam splitter 640. Laser light reflected from the sample can pass through the microscope lens 170, the dichroic laser beam splitter 640, the high-pass filter 720, and the coupling lens 710 in this order, and then enter the spectrograph 120.
Further, the external light path assembly 130 further includes a light source 810, an image sensor 820, a half mirror 830, a second mirror 840 and a third mirror 850, the third mirror 850 being pluggable between the high pass filter 720 and the dichroic laser beam splitter 640. When the third reflecting mirror 850 is inserted between the high-pass filter 720 and the dichroic laser beam splitter 640, the light emitted from the light source 810 can be transmitted from the dichroic laser beam splitter 640 after being reflected by the half-reflecting half-lens 830, the second reflecting mirror 840 and the third reflecting mirror 850 in sequence, and then is irradiated on the sample through the micro lens 170; the image sensor 820 is located on the light transmitting side of the half mirror 830. According to the reversible distance of the light path, the image sensor 820 can receive the light transmitted by the dichroic laser beam splitter 640, reflected by the second mirror 840 and the third mirror 850, and transmitted by the half mirror 830, so as to form image information of the sample.
When viewing is desired, a third mirror 850 is interposed between the high pass filter 720 and the dichroic laser beamsplitter 640 to introduce the light from the light source 810 into the light path, thereby ready viewing of the light path. After the observation is completed, the third mirror 850 is taken out from between the high-pass filter 720 and the two-color laser beam splitter 640, so that the spectrum detection light path is communicated.
The spectrum detection device adopts the optical microscope 170, focuses excitation and collection spectra with high resolution, and can realize observation and selection of the focusing position of the sample surface by matching with the external light path component 130.
The design principle of this embodiment is as follows: the external optical path component 130 and the micro-lens 170 are adjusted to be on the same optical axis by adjusting the first displacement adjustment mechanism 140 and the micro-lens 170 to fix and the second displacement adjustment mechanism 160; laser light emitted by the laser 110 firstly enters the external light path component 130, then is transmitted through the oblique light transmission flange 150 to enter the micro lens 170 and is focused on the surface of the sample right below the electron gun 200; the optical signals excited by the laser or the electron beam are collected by the micro lens 170, transmitted through the inclined light-passing flange 150 and enter the external light path assembly 130, and finally reach the spectrograph 120, so that the micro spectrum analysis function is realized; the scanning electron beam emitted by the SEM electron gun 200, the electron signal excited on the surface of the sample is detected by the electron beam collecting probe 510 and is analyzed by the electron beam analyzing device 530, so as to realize the function of a scanning electron microscope.
The embodiment of the invention breaks through the defects of non-in-situ/non-real time, poor reliability, low resolution and the like of the existing combined system of the micro spectrum and the scanning electron microscope, and can realize real-time, in-situ and collaborative high-resolution spectrum detection and micro observation.
The combined device of the scanning electron microscope and the spectrum equipment comprises a vacuumizing mechanism, wherein the vacuumizing mechanism is connected with the vacuum bin 300 and is used for vacuumizing the vacuum bin 300. A pressure gauge is further disposed in the vacuum chamber 300, and is used for detecting the air pressure in the vacuum chamber 300.
The above is only a preferred embodiment of the present invention, and is not intended to limit the present invention, but various modifications and variations can be made to the present invention by those skilled in the art. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present invention should be included in the protection scope of the present invention.
Claims (5)
1. A scanning electron microscope and spectroscopic apparatus combination device, comprising: the device comprises a spectrum detection device, a scanning electron microscope receiving device and an electron gun;
the spectrum detection device can emit laser to a sample along a first direction, the electron gun can emit electron beams to the sample along a second direction, and the probe of the scanning electron microscope receiving device faces to a third direction and is used for receiving electronic signals emitted by the surface of the sample; the first direction is not overlapped with the second direction and the third direction respectively;
the combined device of the scanning electron microscope and the spectrum equipment comprises a vacuum bin and a sample table, and the spectrum detection device and the scanning electron microscope receiving device are both fixed on the vacuum bin;
the electron gun and the sample table are both arranged in the vacuum bin, and the electron gun is positioned above the sample table;
the spectrum detection device and the scanning electron microscope receiving device are respectively positioned at two sides of the electron gun;
the sample table comprises a table top and a lifting mechanism, wherein the table top is connected with the lifting mechanism, and the lifting mechanism is used for driving the table top to vertically move up and down;
the spectrum detection device comprises a laser, a spectrograph, an external light path component, a first displacement adjustment mechanism, a light transmission flange, a second displacement adjustment mechanism and a microscope lens;
the light-passing flange is arranged on the wall of the vacuum bin, so that the inside and the outside of the vacuum bin can be conducted by the light-passing flange;
the laser and the spectrograph are connected with one end of the outer light path component, the other end of the outer light path component is connected with the movable end of the first displacement adjusting mechanism, and the fixed end of the first displacement adjusting mechanism is fixedly connected to the outer side wall of the light transmission flange;
the fixed end of the second displacement adjusting mechanism is arranged on the inner side wall of the light transmission flange; the first displacement adjusting mechanism and the second displacement adjusting mechanism are used for adjusting the outer light path component and the microscope lens to be on the same optical axis;
the scanning electron microscope receiving device comprises electron beam analysis equipment, a fixed flange and an electron beam collecting probe; the fixing flange is arranged on the wall of the vacuum bin, so that the inside and the outside of the vacuum bin can be communicated through the fixing flange;
the electron beam collecting probe is fixedly arranged on the inner side of the fixed flange, and the outer end of the electron beam collecting probe penetrates through the fixed flange and then is connected with the electron beam analysis equipment fixed on the outer side of the fixed flange.
2. The combined scanning electron microscope and spectroscopic equipment device according to claim 1, wherein the first displacement adjustment mechanism is a two-dimensional displacement fixing platform, the second displacement adjustment mechanism comprises a three-dimensional displacement adjustment platform and a lens bracket, the lens bracket is mounted on the three-dimensional displacement adjustment platform, and the lens bracket is used for fixing the microscope lens.
3. The scanning electron microscope and spectroscopic device combination according to claim 1, wherein the external light path component comprises a collimator, a narrow-band filter, a first reflecting mirror, and a dichroic laser spectroscope, the dichroic laser spectroscope being capable of reflecting laser light emitted from the laser and transmitting the laser light reflected from the sample;
the first reflecting mirror is used for reflecting the light emitted from the narrow-band filter to the bicolor laser spectroscope so that the light emitted from the laser can sequentially pass through the collimator, the narrow-band filter, the first reflecting mirror and the bicolor laser spectroscope and then enter the microscope lens;
the external light path component further comprises a coupling lens and a high-pass filter, and the coupling lens and the high-pass filter are both positioned between the spectrograph and the double-color laser spectroscope, so that laser reflected from the sample can sequentially pass through the microscope lens, the double-color laser spectroscope, the high-pass filter and the coupling lens and then enter the spectrograph.
4. The scanning electron microscope and spectroscopic device combination according to claim 3, wherein the external light path component further comprises a light source, an image sensor, a half-reflecting half-lens, a second reflecting mirror and a third reflecting mirror, wherein the third reflecting mirror can be inserted and pulled between the high-pass filter and the two-color laser spectroscope, so that light emitted by the light source can be transmitted from the two-color laser spectroscope after being reflected by the half-reflecting half-lens, the second reflecting mirror and the third reflecting mirror in sequence;
the image sensor is positioned on the light transmitting side of the half-reflecting half-lens so that the image sensor can receive the light transmitted by the bicolor laser spectroscope, reflected by the second reflecting mirror and the third reflecting mirror and transmitted by the half-reflecting half-lens to form the image information of the sample.
5. The scanning electron microscope and spectroscopic equipment combined device according to claim 1, wherein the scanning electron microscope and spectroscopic equipment combined device comprises a vacuum pumping mechanism, and the vacuum pumping mechanism is connected with the vacuum bin and is used for carrying out vacuum pumping treatment on the vacuum bin.
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| CN109827940A (en) * | 2018-12-21 | 2019-05-31 | 中山大学 | A kind of in-situ characterization method and device of optical-electronic excited electrons transmitting |
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