CN108507493A - A kind of test system of comprehensive more sensing three-dimensional optical gauge heads - Google Patents
A kind of test system of comprehensive more sensing three-dimensional optical gauge heads Download PDFInfo
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- CN108507493A CN108507493A CN201810610445.XA CN201810610445A CN108507493A CN 108507493 A CN108507493 A CN 108507493A CN 201810610445 A CN201810610445 A CN 201810610445A CN 108507493 A CN108507493 A CN 108507493A
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- 238000012360 testing method Methods 0.000 title claims abstract description 29
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- 238000005259 measurement Methods 0.000 claims abstract description 33
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- 230000009471 action Effects 0.000 description 2
- 201000009310 astigmatism Diseases 0.000 description 2
- 230000000903 blocking effect Effects 0.000 description 2
- 239000000571 coke Substances 0.000 description 2
- 238000012937 correction Methods 0.000 description 2
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
- G01B11/245—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures using a plurality of fixed, simultaneously operating transducers
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Abstract
The invention discloses a kind of test systems of comprehensive more sensing three-dimensional optical gauge heads, including the use of microcobjective, LED illumination light source, industrial CCD camera, infrared beamsplitter, tube lens, more than one collimating mirror, spectroscope, facade Amici prism, spectro-grating, semiconductor laser LD, speculum, cylindrical mirror, 4 quadrant detector, light-conductive optic fibre, focus lamp, the test module of dichroic mirror and two-dimensional position-sensitive detector PSD compositions, the test module includes that the two-dimentional micro-imaging measurement module of topography measurement is carried out to article, the Z axis distance sensing module of Z-direction elevation carrection is carried out to article, the X Y plane angles of article are sensed to realize the X Y plane angle sensing modules of spatial pose positioning, X Y planes angle sensing modules are also connect with omni-directional visual platform.The present invention improves accuracy of detection.
Description
Technical field
The present invention relates to a kind of technical field of vision measurement, especially a kind of comprehensive more sensing three-dimensional optical gauge heads
Test system.
Background technology
Vision-based detection is exactly to replace human eye with machine to measure and judge.Vision-based detection refers to passing through machine vision product
(i.e. image-pickup device is divided to two kinds of CMOS and CCD) will be ingested target and be converted into picture signal, send at dedicated image
Reason system is transformed into digitized signal according to the information such as pixel distribution and brightness, color；Picture system carries out these signals
Various operations control live device action to extract clarification of objective according to the result of differentiation.It is mainly used for
In the valuable mechanism of production, assembly or packaging.It is in the work(for detecting defect with preventing faulty goods to be dispensed into consumer
Energy aspect has immeasurable value, therefore is widely applied in market, and with the development of vision measurement, with shadow
As bidimensional image measurement that measuring instrument is Typical Representative has been able to extensive use and increasingly complete, but current vision measurement
It is measured, is caused for the measurement object of some 3 D stereos by two dimension angular, measurement accuracy is relatively
Difference, measurement is not accurate enough, and needs to adjust zoom manually when measurement, causes to measure relative complex, it is therefore desirable to improve.
Invention content
A kind of comprehensive more sensing three-dimensional lights are provided the purpose of the present invention is to solve above-mentioned the deficiencies in the prior art
The test system of gauge head is learned, the present invention is to set up the two-dimentional micro-imaging survey that long reach microcobjective is corrected based on far field
It measures in system-based, Z axis distance sensing and X-Y plane angle sensing is dexterously combined, and entirely square by industrial intelligent
Position Vision Table realizes the comprehensive three-dimensional non-cpntact measurement in place to workpiece, and realize based on autozoom principle three
Topography measurement is tieed up, measurement accuracy, accuracy of measurement are finally improved and the difficulty of measurement is allowed to substantially reduce.
To achieve the goals above, the test system of a kind of comprehensive more sensing three-dimensional optical gauge heads designed by the present invention
System, including the use of microcobjective, LED illumination light source, industrial CCD camera, infrared beamsplitter, tube lens, more than one standard
Straight mirror, spectroscope, facade Amici prism, spectro-grating, semiconductor laser LD, speculum, cylindrical mirror, 4 quadrant detector,
The test module of light-conductive optic fibre, focus lamp, dichroic mirror and two-dimensional position-sensitive detector PSD compositions, the test mould
Block includes the Z axis for carrying out the two-dimentional micro-imaging measurement module of topography measurement to article, carrying out Z-direction elevation carrection to article
Distance sensing module senses the X-Y plane angle of article to realize the X-Y plane angle sensing modules of spatial pose positioning,
X-Y plane angle sensing modules are also connect with omni-directional visual platform, it is described two dimension micro-imaging module be using microcobjective,
The optical combination that LED illumination light source and industrial CCD camera are constituted realizes that the white light that LED illumination light source is sent out passes through the first standard
Straight mirror, infrared beamsplitter and facade Amici prism enter microcobjective, and the light beam after microcobjective focuses is by surface to be measured
Reflect, after facade Amici prism, by tube lens focus on industrial CCD camera practise physiognomy upper progress two dimension at
Picture；
The Z axis distance sensing module is that the laser sent out using semiconductor laser LD the grating that is split is divided into three beams
Light beam, i.e. 0 grade of light and ± 1 order diffraction light, 0 grade of light is after the reflection of spectroscope and speculum at this time, by the second standard
Straight mirror is collimated into collimated light beam, which enters microcobjective after the reflection of facade Amici prism, then by determinand
Then the light beam of body reflection passes through on focus of cylindrical mirror to 4 quadrant detector according to backtracking to spectroscope, utilizes four-quadrant
Limit the voltage signal output end output detection signal of four A, B, C and D on detector；
The X-Y plane angle sensing modules are to send out laser using the infrared laser light source of side, then using leading
Light optical fiber, third collimating mirror and focus lamp focus on dichroic mirror, and the focus is overlapped with the focus of microcobjective, profit
The position relationship at 45 ° between Amici prism and microcobjective and with optical axis with dichroic mirror so that by two to
Infrared laser is vertically reflected into microcobjective after color speculum, the parallel infrared laser beam of outgoing is anti-by testee
It is emitted back towards microcobjective, then using an infrared beamsplitter between dichroic mirror and microcobjective by the red of return
Outer laser beam is reflected on two-dimensional position-sensitive detector PSD and realizes DATA REASONING.
It is equipped between the top and tube lens of facade Amici prism and filters the laser sent out by semiconductor laser LD
It removes, it is avoided to hinder filter to the band that white light imaging impacts on CCD.
The microcobjective is non-contact laser scanning feeler.
The centre wavelength 650nm for the laser that the semiconductor laser LD is sent out.
A kind of test system for comprehensive more sensing three-dimensional optical gauge heads that the present invention obtains, the present invention is based in establishment
On the basis of far field corrects the two-dimentional micro-imaging measuring system of long reach microcobjective, by Z axis distance sensing and X-Y plane
Angle sensing dexterously combines, and by industrial intelligent omni-directional visual holder, realizes to comprehensive in place the three of workpiece
Non-cpntact measurement is tieed up, and realizes the measuring three-dimensional morphology based on autozoom principle, measurement accuracy is finally improved, measures accurately
It spends and the difficulty of measurement is allowed to substantially reduce.
Reference numeral
Fig. 1 is a kind of equipment of test module in test systems of comprehensive more sensing three-dimensional optical gauge heads in embodiment 1
Connection figure；
Fig. 2 is a kind of module diagram of the test module of comprehensive more sensing three-dimensional optical gauge heads in embodiment 1；
Fig. 3 is normalization focus error signal test result in embodiment 1；
Fig. 4 is the test result of TFES and TNFES in embodiment 1；
Fig. 5 is the schematic diagram that microcobjective focus on light beam is irradiated to inclined-plane in embodiment 1.
In reference numeral：1. microcobjective；2.LED lighting sources；3. industrial CCD camera；4. infrared beamsplitter；5. collimation
Mirror；The first collimating mirrors of 5-1.；The second collimating mirrors of 5-2.；5-3. third collimating mirrors；6. spectroscope；7. facade Amici prism；8. point
Light grating；9. semiconductor laser LD；10. speculum；11. cylindrical mirror；12. 4 quadrant detector；13. light-conductive optic fibre；14. poly-
Jiao Jing；15. dichroic mirror；16. two-dimensional position-sensitive detector PSD；17. two-dimentional micro-imaging measurement module；18.Z axis
Distance sensing module；19.X-Y Plane Angle sensing modules；20. band resistance filter；21. tube lens；22. omni-directional visual is flat
Platform；24. infrared laser light source.
Specific implementation mode
Innovation and creation are preferably illustrated with reference to embodiment.
Embodiment 1：
As Figure 1-Figure 2, the test system of a kind of comprehensive more sensing three-dimensional optical gauge heads provided in this embodiment, packet
It includes and utilizes microcobjective 1, LED illumination light source 2, industrial CCD camera 3, infrared beamsplitter 4, tube lens 21, more than one standard
Straight mirror 5, spectroscope 6, facade Amici prism 7, spectro-grating 8, semiconductor laser LD9, speculum 10, cylindrical mirror 11, four-quadrant
Limit detector 12, light-conductive optic fibre 13, focus lamp 14, dichroic mirror 15 and two-dimensional position-sensitive detector PSD16 compositions
Test module, the test module include to article carry out topography measurement two-dimentional micro-imaging measurement module 17, to article into
The Z axis distance sensing module 18 of row Z-direction elevation carrection senses the X-Y plane angle of article to realize that spatial pose is fixed
The X-Y plane angle sensing modules 19 of position, X-Y plane angle sensing modules 19 are also connect with omni-directional visual platform 22,
The two dimension micro-imaging measurement module 17 is to utilize microcobjective 1, LED illumination light source 2 and industrial CCD camera
3 optical combinations constituted realize that the white light that LED illumination light source 2 is sent out passes through the first collimating mirror 5-1, infrared beamsplitter 4 and facade
Amici prism 7 enters microcobjective 1, and the light beam after the focusing of microcobjective 1 is returned by surface reflection to be measured, using facade
After Amici prism 7, the upper carry out two-dimensional imaging of practising physiognomy of industrial CCD camera 3 is focused on by tube lens 21；
The Z axis distance sensing module 18 is that the laser sent out using semiconductor laser LD9 the grating 8 that is split is divided into
Three light beams, i.e. 0 grade of light and ± 1 order diffraction light, 0 grade of light is after the reflection of spectroscope 6 and speculum 10 at this time, quilt
Second collimating mirror 5-2 is collimated into collimated light beam, which enters microcobjective 1 after the reflection of facade Amici prism 7, so
The light beam reflected afterwards by object under test, to spectroscope 6, then focuses on Quadrant detector according to backtracking by cylindrical mirror 11
On device 12, the voltage signal output end output detection signal of four A, B, C and D on 4 quadrant detector 12 are utilized；
The X-Y plane angle sensing modules 19 are to send out laser using the infrared laser light source 24 of side, then sharp
It is focused on dichroic mirror 15 with light-conductive optic fibre 13, third collimating mirror 5-3 and focus lamp 14, and the focus and microcobjective
1 focus overlaps, between facade Amici prism 7 and microcobjective 1 and at 45 ° with optical axis using dichroic mirror 15
Position relationship so that infrared laser is vertically reflected into microcobjective 1 after dichroic mirror 15, outgoing it is parallel
Infrared laser beam is reflected back microcobjective 1 by testee, then using positioned at dichroic mirror 15 and microcobjective 1 it
Between an infrared beamsplitter 4 infrared laser beam of return be reflected on two-dimensional position-sensitive detector PSD16 realize data
It measures.
It is equipped between the top of facade Amici prism 7 and tube lens 21 and swashs what is sent out by semiconductor laser LD9
Light filters out, it is avoided to hinder filter 20 to the band that white light imaging impacts on CCD.
The microcobjective 1 is non-contact laser scanning feeler.
The centre wavelength 650nm for the laser that the semiconductor laser LD9 is sent out.
In this embodiment due to 4 quadrant detector 12 export be weak voltage signals, need to be in Quadrant detector
Setting signal amplifying circuit after device 12, the voltage signal exported after amplification can correspondingly be denoted as UA、UB、UCAnd UD, therefore focus and miss
Difference signal is FES=(UA+UC)-(UB+UD), and it is NFES=[(U to normalize focus error signalA+UC)-(UB+UD)]/(UA+
UB+UC+UD)。
Focal length due to cylindrical mirror 11 in meridian direction with sagitta of arc direction is different, falls the focusing on 4 quadrant detector 12
Hot spot introduces a kind of geometrical aberration, is called astigmatism；When testee surface is located at the position of focal plane of microcobjective 1, i.e., from
Burnt displacement d=0, the focal beam spot on 4 quadrant detector 12 are circle, FES=0；As testee surface closely coke Δ d ＞ 0
When with remote coke Δ d ＜ 0, focal beam spot is the orthogonal ellipse in direction, there is FES ＞ 0 and FES ＜ 0 respectively.
Using distance, delta d between testee surface and the focal plane of microcobjective 1 as horizontal axis, with focus error signal FES or
It is the longitudinal axis to normalize focus error signal NFES, obtains the S curve of astigmatism autofocus system, curve dead-center position is exactly accurate
The position of focusing, one section of curve centre have good linear relationship, testee surface can be measured using the linear relationship
In the displacement of Z-direction, as shown in Figure 3.
When practical measurement, due to the nonmonotonicity of FES and NFES curves, target object location can be caused uncertain.However
In Fig. 4, when FES is in zero crossing and signal SS reaches maximum value, and the shape of SS curves is symmetrical about maximum value.According to
The characteristic can block FES and NFES with a threshold value is set in signal SS, make it have monotonicity.If with signal SS
More than threshold value, a gate signal GS is set as logical truth (i.e. high-voltage value)；Otherwise it is set as logical falsehood.
FES and NFES obtains blocking focus error signal TFES and blocking returning after the logic and operation of gate signal GS
One changes focus error signal TNFES, and test results are shown in figure 3.
In order to avoid the light of the light beam of auto-focusing and sensing inclination angle in 19 operating process of X-Y plane angle sensing modules
Beam influences each other, and gauge head uses light source of the red laser as auto-focusing, and uses infrared laser as the light at sensing inclination angle
Source.Therefore, gauge head answers chromatic aberration correction microcobjective using limited far infrared, which carries out visible light near infrared band
Chromatic aberration correction.
If Fig. 5 shows, if there is inclination angle on testee surface in the Y direction, the infrared laser beam being reflected back focuses on two dimension
The variation of position is had in the Y-direction of PSD；Similarly, if there is inclination angle on testee surface in X-direction, what is be reflected back is infrared
Laser beam focus also has the variation of position in the X-direction of two-dimensional position-sensitive detector PSD16.Therefore, measured object body surface
There is inclination angle in face in any direction, can be sensed by the position of luminous point on two-dimensional position-sensitive detector PSD16 come.
Spatial pose positioning in 19 operating process of X-Y plane angle sensing modules, the spatial pose of gauge head position work(
Can be realized by omni-directional visual platform 22, from the foregoing, it will be observed that X-Y plane on the basis of X-Y plane angle sensing function
Angle sensing function module and omni-directional visual platform 22 constitute a modified closed loop tune of optical measuring head spatial pose in place
Save mechanism.The groundwork flow of spatial pose positioning includes the following steps：
The first step senses the tilt quantity of workpiece measured surface；
Measured value is sent to omni-directional visual platform 22 by second step, controls its movement, and gauge head spatial pose is driven to occur
Change, optical axis is made to tend to be vertical with measured surface；
Third walks, and since the operating distance of gauge head and measured surface changes, therefore also needs to execute auto-focusing behaviour again
Make.
In real work, generally require that above-mentioned workflow is performed a plurality of times.In addition, to realize the comprehensive in place of workpiece
Then three-dimensional non-cpntact measurement utilizes the intelligently guiding of workpiece CAD model, according to the position for the tested feature that CAD model is provided
Parameter is set, quickly guides gauge head to target location, and primarily determine pose.
The present invention is to set up the two-dimentional micro-imaging measuring system base that long reach microcobjective is corrected based on far field
On plinth, Z axis distance sensing and X-Y plane angle sensing are dexterously combined, and by industrial intelligent omni-directional visual cloud
Platform realizes the comprehensive three-dimensional non-cpntact measurement in place to workpiece, and realizes that the three-dimensional appearance based on autozoom principle is surveyed
Amount finally improves measurement accuracy, accuracy of measurement and the difficulty of measurement is allowed to substantially reduce.
The above shows and describes the basic principles and main features of the present invention and the advantages of the present invention, for this field skill
For art personnel, it is clear that invention is not limited to the details of the above exemplary embodiments, and without departing substantially from the present invention spirit or
In the case of essential characteristic, the present invention can be realized in other specific forms.Therefore, in all respects, should all incite somebody to action
Embodiment regards exemplary as, and is non-limiting, the scope of the present invention by appended claims rather than on state
Bright restriction, it is intended that including all changes that come within the meaning and range of equivalency of the claims in the present invention
It is interior.Any reference signs in the claims should not be construed as limiting the involved claims.
It although an embodiment of the present invention has been shown and described, for the ordinary skill in the art, can be with
Understanding without departing from the principles and spirit of the present invention can carry out these embodiments a variety of variations, modification, replace
And modification, the scope of the present invention is defined by the appended.
Claims (5)
1. a kind of test system of comprehensive more sensing three-dimensional optical gauge heads, it is characterised in that：Including the use of microcobjective (1),
LED illumination light source (2), industrial CCD camera (3), infrared beamsplitter (4), tube lens (21), more than one collimating mirror (5),
Spectroscope (6), facade Amici prism (7), spectro-grating (8), semiconductor laser LD (9), speculum (10), cylindrical mirror
(11), 4 quadrant detector (12), light-conductive optic fibre (13), focus lamp (14), dichroic mirror (15) and two-dimensional position-sensitive
The test module of detector PSD (16) compositions, the test module include that the two-dimentional micro-imaging of topography measurement is carried out to article
Measurement module (17) carries out article the Z axis distance sensing module (18) of Z-direction elevation carrection, to the X-Y plane angle of article
Degree sensing come realize spatial pose positioning X-Y plane angle sensing modules (19), X-Y plane angle sensing modules (19) also with
Omni-directional visual platform (22) connects,
The two dimension micro-imaging measurement module (17) is to utilize microcobjective (1), LED illumination light source (2) and industrial CCD phase
The optical combination that machine (3) is constituted realizes that the white light that LED illumination light source (2) is sent out passes through the first collimating mirror (5-1), infrared spectroscopy
Mirror (4) and facade Amici prism (7) enter microcobjective (1), and the light beam after microcobjective (1) focusing is anti-by surface to be measured
It is emitted back towards and, after facade Amici prism (7), the upper progress of practising physiognomy of industrial CCD camera (3) is focused on by tube lens (21)
Two-dimensional imaging；
The Z axis distance sensing module (18) is that the laser sent out using semiconductor laser LD (9) is split grating (8) point
At three light beams, i.e. 0 grade of light and ± 1 order diffraction light, 0 grade of light is by the anti-of spectroscope (6) and speculum (10) at this time
After penetrating, collimated light beam is collimated by the second collimating mirror (5-2), which enters after facade Amici prism (7) reflection
Microcobjective (1) then then passes through cylindrical mirror by the light beam of object under test reflection according to backtracking to spectroscope (6)
(11) it focuses on 4 quadrant detector (12), the voltage signal using four A, B, C and D on 4 quadrant detector (12) is defeated
Outlet output detection signal；
The X-Y plane angle sensing modules (19) are to send out laser using the infrared laser light source (24) of side, then sharp
Focused on dichroic mirror (15) with light-conductive optic fibre (13), third collimating mirror (5-3) and focus lamp (14), and the focus with
The focus of microcobjective (1) overlaps, using dichroic mirror (15) be located at facade Amici prism (7) and microcobjective (1) it
Between and the position relationship at 45 ° with optical axis so that infrared laser is vertically reflected into after dichroic mirror (15) aobvious
In speck mirror (1), the parallel infrared laser beam of outgoing is reflected back microcobjective (1) by testee, then using positioned at two
The infrared laser beam of return is reflected into two to an infrared beamsplitter (4) between color speculum (15) and microcobjective (1)
DATA REASONING is realized on dimension Position-Sensitive Detector PSD (16).
2. a kind of test system of comprehensive more sensing three-dimensional optical gauge heads according to claim 1, which is characterized in that
Being equipped between the top and tube lens (21) of facade Amici prism (7) will be filtered by the laser that semiconductor laser LD (9) are sent out
It removes, the band resistance filter (20) for avoiding it from being impacted to white light imaging on CCD.
3. a kind of test system of comprehensive more sensing three-dimensional optical gauge heads according to claim 1, which is characterized in that institute
The microcobjective (1) stated is non-contact laser scanning feeler.
4. a kind of test system of comprehensive more sensing three-dimensional optical gauge heads according to claim 1 or 2, feature exist
In the centre wavelength 650nm for the laser that the semiconductor laser LD (9) sends out.
5. a kind of test system of comprehensive more sensing three-dimensional optical gauge heads according to claim 3, which is characterized in that institute
State the centre wavelength 650nm for the laser that semiconductor laser LD (9) is sent out.
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| CN109870816A (en) * | 2019-03-16 | 2019-06-11 | 南京华群光电技术有限公司 | A kind of optical system and its displacement measurement method of laser displacement sensor |
| CN110763598A (en) * | 2019-09-12 | 2020-02-07 | 北京理工大学 | External digital holographic phase quantitative imaging device |
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