CN113607302B - Temperature detection device based on surface plasmon - Google Patents
Temperature detection device based on surface plasmon Download PDFInfo
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- CN113607302B CN113607302B CN202110913464.1A CN202110913464A CN113607302B CN 113607302 B CN113607302 B CN 113607302B CN 202110913464 A CN202110913464 A CN 202110913464A CN 113607302 B CN113607302 B CN 113607302B
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- 238000001514 detection method Methods 0.000 title claims abstract description 50
- 229910052751 metal Inorganic materials 0.000 claims abstract description 78
- 239000002184 metal Substances 0.000 claims abstract description 78
- 239000000463 material Substances 0.000 claims abstract description 64
- 239000013013 elastic material Substances 0.000 claims abstract description 18
- 238000001228 spectrum Methods 0.000 claims abstract description 5
- 239000002923 metal particle Substances 0.000 claims description 9
- 239000007769 metal material Substances 0.000 claims description 4
- 229910000510 noble metal Inorganic materials 0.000 claims description 4
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims description 3
- DQXBYHZEEUGOBF-UHFFFAOYSA-N but-3-enoic acid;ethene Chemical compound C=C.OC(=O)CC=C DQXBYHZEEUGOBF-UHFFFAOYSA-N 0.000 claims description 3
- 239000005038 ethylene vinyl acetate Substances 0.000 claims description 3
- 229910052746 lanthanum Inorganic materials 0.000 claims description 3
- FZLIPJUXYLNCLC-UHFFFAOYSA-N lanthanum atom Chemical compound [La] FZLIPJUXYLNCLC-UHFFFAOYSA-N 0.000 claims description 3
- 229920001200 poly(ethylene-vinyl acetate) Polymers 0.000 claims description 3
- 229920000642 polymer Polymers 0.000 claims description 3
- 230000003287 optical effect Effects 0.000 abstract description 3
- 230000009286 beneficial effect Effects 0.000 abstract 1
- 230000003595 spectral effect Effects 0.000 description 7
- 230000005540 biological transmission Effects 0.000 description 5
- 230000008878 coupling Effects 0.000 description 4
- 238000010168 coupling process Methods 0.000 description 4
- 238000005859 coupling reaction Methods 0.000 description 4
- 238000000411 transmission spectrum Methods 0.000 description 4
- 239000003245 coal Substances 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 238000002198 surface plasmon resonance spectroscopy Methods 0.000 description 3
- 230000001419 dependent effect Effects 0.000 description 2
- 230000014509 gene expression Effects 0.000 description 2
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical group [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 2
- 230000010354 integration Effects 0.000 description 2
- 230000035945 sensitivity Effects 0.000 description 2
- 230000010259 detection of temperature stimulus Effects 0.000 description 1
- 239000004205 dimethyl polysiloxane Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 238000005286 illumination Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 229920000435 poly(dimethylsiloxane) Polymers 0.000 description 1
- -1 polydimethylsiloxane Polymers 0.000 description 1
- 230000000750 progressive effect Effects 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
- G01K11/00—Measuring temperature based upon physical or chemical changes not covered by groups G01K3/00, G01K5/00, G01K7/00 or G01K9/00
- G01K11/006—Measuring temperature based upon physical or chemical changes not covered by groups G01K3/00, G01K5/00, G01K7/00 or G01K9/00 using measurement of the effect of a material on microwaves or longer electromagnetic waves, e.g. measuring temperature via microwaves emitted by the object
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- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- General Physics & Mathematics (AREA)
- Measuring Temperature Or Quantity Of Heat (AREA)
Abstract
The invention belongs to the field of temperature detection, and particularly relates to a temperature detection device based on surface plasmons. The device comprises a transparent elastic material layer, a metal array structure and a thermal expansion material block, wherein the metal array structure is arranged on the transparent elastic material layer and consists of periodically arranged metal units, gaps are formed in the metal units, gaps are formed between the metal units and the metal units, and the thermal expansion material block is arranged in the gaps. The thermal expansion material blocks expand due to temperature change, and the gaps are narrowed, so that the positions of resonance valleys in an emergent spectrum are moved, and temperature detection is realized through the position movement of the resonance valleys. The device realizes temperature detection based on surface plasmons, realizes temperature detection by detecting optical signals, has simple structure, is more beneficial to use in severe environments, has high detection precision and small volume, and is convenient to integrate.
Description
Technical Field
The invention belongs to the field of temperature detection, and particularly relates to a temperature detection device based on surface plasmons.
Background
Currently, temperature sensors play an important role in safe production. For example, laboratory temperature-dependent instruments, temperature-controlled test boxes, high temperature ovens; in places related to temperature in production, temperatures under mines, temperatures in workshops, etc. However, most of the traditional temperature sensors are realized by means of the change of the electric signals, and the temperature sensors based on the change of the electric signals are greatly limited in practical application, so that on one hand, the use of the electric signals can cause additional potential safety hazards to certain environments (such as coal mines), and on the other hand, the temperature sensors are greatly interfered by the environments and have low detection precision when used in severe environments.
Disclosure of Invention
In order to solve the problems that the existing sensor is greatly interfered by the environment and the detection precision is not high when being used in a severe environment, the invention provides a temperature detection device based on surface plasmons, and the problems of large use error and low detection precision in the severe environment are avoided.
The aim of the invention is achieved by the following technical scheme:
a surface plasmon-based temperature detection device comprising a transparent elastic material layer, a metal array structure and a thermal expansion material block;
the metal array structure is arranged on the transparent elastic material layer;
the metal array structure consists of periodically arranged metal units, and the metal units are provided with notches;
a gap is formed between the metal units;
the thermal expansion material block is arranged in the notch;
the thermal expansion material block expands due to temperature change, and the gap is narrowed, so that the position of a resonance valley in an emergent spectrum is moved, and temperature detection is realized through the position movement of the resonance valley.
Optionally, the notch is rectangular, and the notch penetrates through the metal unit.
Optionally, the notch is trapezoidal, and the notch penetrates through the metal unit.
Optionally, the device further comprises an elastic light material, wherein the elastic light material is arranged in the gap.
Optionally, the width of the gap is 100nm-200nm.
Optionally, the heat-expandable material further comprises a plurality of metal particles, wherein the metal particles are arranged on two sides of the top of the gap and on the heat-expandable material block.
Optionally, the material of the metal array structure is a noble metal material.
Optionally, the material of the block of thermally expandable material is an ethylene vinyl acetate polymer.
Optionally, the elasto-optical material is lead lanthanum zirconate titanate.
According to the specific embodiment provided by the invention, the invention discloses the following technical effects:
1. the thermal expansion material block expands due to temperature change, and the gap is narrowed, so that the position of a resonance valley in an emergent spectrum is moved, and temperature detection is realized through the position movement of the resonance valley.
2. Based on detection of surface plasmons, the structure of the device is nano-scale, and the device has simple structure, small volume and convenient integration.
3. The detection device realizes temperature detection by detecting the optical signals, so that on one hand, the problem that the use of the electrical signals can cause additional potential safety hazards to certain environments (such as coal mines) is avoided, and on the other hand, the interference from the environments is small when the detection device is used in severe environments.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions of the prior art, the drawings that are needed in the embodiments will be briefly described below, it being obvious that the drawings in the following description are only some embodiments of the present invention, and that other drawings may be obtained according to these drawings without inventive effort for a person skilled in the art.
Fig. 1 is a sectional view of a surface plasmon-based temperature detection apparatus of embodiment 1;
fig. 2 is a sectional view of a temperature detection device based on surface plasmons of embodiment 2;
fig. 3 is a sectional view of a temperature detection device based on surface plasmons of embodiment 3;
fig. 4 is a cross-sectional view of a surface plasmon-based temperature detection apparatus of embodiment 4.
Symbol description:
1-transparent elastic material layer, 2-metal unit, 21-first metal block, 22-second metal block, 3-thermal expansion material block, 4-gap, 5-metal particle.
Detailed Description
The following description of the embodiments of the present invention will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present invention, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.
The terms first, second, third and the like in the description and in the claims and in the above drawings, if any, are used for distinguishing between similar objects and not necessarily for describing a particular sequential or chronological order. It will be appreciated that the objects so described may be interchanged where appropriate. Furthermore, the terms "comprise" and "have," as well as any variations thereof, are intended to cover a non-exclusive inclusion.
In the present invention, the drawings discussed below and the various embodiments used to describe the principles of the present disclosure are by way of illustration only and should not be construed to limit the scope of the present disclosure. Those skilled in the art will understand that the principles of the present invention may be implemented in any suitably arranged system. Exemplary embodiments will be described in detail, examples of which are illustrated in the accompanying drawings. Further, a terminal according to an exemplary embodiment will be described in detail with reference to the accompanying drawings. Like reference symbols in the drawings indicate like elements.
The terminology used in the description of the invention herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention. The use of expressions in the singular encompasses plural forms of expressions unless the context clearly dictates otherwise. In the present description, it should be understood that terms such as "comprising," "having," "including," and "containing" are intended to specify the presence of the stated features, integers, steps, actions, or combinations thereof disclosed in the present description, but are not intended to preclude the presence or addition of one or more other features, integers, steps, actions, or combinations thereof. Like reference numerals in the drawings refer to like parts.
The invention aims to provide a temperature detection device based on surface plasmons, so that the detection accuracy of temperature is higher and the detector can be used in a severe environment.
In order that the above-recited objects, features and advantages of the present invention will become more readily apparent, a more particular description of the invention will be rendered by reference to the appended drawings and appended detailed description.
Example 1
As shown in fig. 1, the surface plasmon-based temperature detection device comprises a transparent elastic material layer 1, a metal array structure and a thermal expansion material block 3; the metal array structure is arranged on the transparent elastic material layer 1; the metal array structure consists of periodically arranged metal units 2, and the metal units 2 are provided with notches; a gap 4 is formed between the metal units 2 and the metal units 2; the block of thermally expandable material 3 is arranged in the gap.
The material of the thermal expansion material block is ethylene-vinyl acetate polymer, the thermal expansion coefficient is large, and the temperature change of the thermal expansion material block is proportional to the length change, so that the temperature detection with higher sensitivity is realized.
The transparent elastic material layer is made of polydimethylsiloxane, so that light can penetrate through the transparent elastic material layer, and the transmission spectrum of the device can be conveniently tested.
The principle of the device is as follows:
when light irradiates on the periodically arranged metal array structure, the light interacts with the periodically arranged metal array structure, plasmon resonance is formed on the surface of the metal array structure, and a transmission spectral line is obtained by detecting a signal of transmitted light. The intensity of the transmitted light, as well as the peak-to-valley shift in the transmission line, is dependent on the shape of the metal structure array, as well as the variation in the spacing of the metal array structural units. The present invention is based on the feature that the block of thermally expandable material 3 is deformed by a change in temperature, that is, the block of thermally expandable material 3 expands with an increase in temperature. The metal unit is subjected to the thrust of the expansion of the block of thermally expansive material 3, resulting in narrowing of the slit 4 and thus a red shift in wavelength from the surface plasmon resonance in the slit 4, resulting in a red shift in the position of the resonance valley in the spectral line.
Since the thermal expansion coefficient of the thermal expansion material block 3 is large, the thermal expansion material block temperature change is proportional to the length change. That is, by changing the width of the slit 4 by temperature, the coupling between the metal units is changed, thereby realizing high-precision detection. The change in temperature corresponds to a red shift of the resonance line. The invention realizes temperature detection based on surface plasmons, realizes temperature detection through the movement of the resonance valley of the spectral line, has high detection precision, simple structure and small volume, and is convenient for integration.
The distance between the gaps 4 is 100nm-200nm, so that the metal units 2 can be conveniently coupled, and strong surface plasmon resonance can be generated in the gaps 4. When the distance of the gap 4 is less than 100nm, the manufacturing difficulty is high; when the distance of the slit 4 is greater than 200nm, the coupling between the gold units is weak, that is, the expansion of the thermal expansion material block 3 does not significantly change the coupling between the metal units, the sensitivity of detection is not high, so the slit pitch between the metal units is set to be between 100nm and 200nm.
The material of the metal array structure is noble metal material which can generate surface plasmon resonance under illumination, and the noble metal material is preferably gold or silver.
In this embodiment, the shape of the notch is not limited, so the preparation is simple. When the size of the notch is enlarged, the width of the slit 4 can be changed more, thereby shifting the transmission valley in the transmission spectrum more, thereby realizing high-sensitivity temperature detection.
Example 2
As shown in fig. 2, the surface plasmon-based temperature detection device comprises a transparent elastic material layer 1, a metal array structure and a thermal expansion material block 3, wherein the metal array structure is arranged on the transparent elastic material layer 1; the metal array structure is composed of periodically arranged metal units, wherein through gaps are formed in the metal units, and the cross sections of the gaps are rectangular. The metal unit is divided into a first metal block 21 and a second metal block 22, and the block of thermal expansion material 3 is disposed in a gap between the first metal block 21 and the second metal block 22. That is to say, the thermal expansion material block 3 contacts with the transparent elastic material layer 1, and expansion of the thermal expansion material block 3 drives deformation of the transparent elastic material layer 1.
Specifically, in the invention, light irradiates on the metal array structure, the light interacts with the periodically arranged metal array structure, and plasmon resonance is formed on the metal array structure. When the temperature rises, the thermal expansion material block 3 expands, and as the notch penetrates through the metal unit 2, the thermal expansion material 3 and the transparent elastic material layer 1 are in contact with each other, the thermal expansion material block 3 expands, and on one hand, the first metal block 21 and the second metal block 22 of the metal unit are pressed to move outwards, so that the distance of the gap 4 is narrowed, and the position of the transmission valley in the transmission spectrum is red shifted. By detecting the red shift of the resonance valley, detection of temperature is achieved. The notch penetrates through the metal unit to enable the thermal expansion material block 3 to be in direct contact with the transparent elastic material layer 1, so that the red shift amount of the spectral line is larger, and the detection precision is higher.
Still further, the gap 4 is further provided with an elastic light material, the specific elastic light material is lead lanthanum zirconate titanate, the external temperature changes, the expansion amount of the thermal expansion material block 3 changes, the width of the gap 4 changes, that is, when the temperature rises, the thermal expansion material block 3 expands, the distance between the metal units 2 and 2 becomes narrow, the expansion of the thermal expansion material block 3 applies an acting force to the first metal block 21 and the second metal block 22, the acting force acts on the elastic light material, and the isotropic elastic light material becomes heterogeneous elastic light material, that is, the refractive index of the elastic light material changes. Specifically, the increase in temperature causes the thermal expansion material block 3 to expand on the one hand, and the width of the slit 4 becomes narrower. On the other hand, the refractive index of the elasto-optical material is changed, the higher the temperature is, the higher the stress is, the higher the refractive index of the elasto-optical material is, the coupling between metal units is changed, and the spectral line is red shifted. Thus, the introduction of an elasto-optical material increases the amount of red shift of the resonant valleys in the transmission spectrum, resulting in greater accuracy of detection.
Example 3
The difference between the present invention and the embodiment 2 is that, as shown in fig. 3, the metal unit of the embodiment has a trapezoid shape, the notch penetrates through the metal unit, the contact area between the metal unit and the first metal block 21 and the second metal block 22 is increased, in addition, the thrust of the thermal expansion material block 3 received by the metal block is not uniform, the thrust received by the upper ends of the first metal block 21 and the second metal block 22 is increased, the gap 4 between the first metal block 21 and the adjacent second metal block 22 is changed into an inverted wedge shape, and the transmission amount of light passing through the gap is reduced. The notch is trapezoidal, the amount of change of the gap 4 is larger under the change of temperature, the red shift of the spectral line is more obvious, and the accuracy of temperature detection is higher.
Example 4
On the basis of embodiment 3, the present invention differs from embodiment 3 only in that, as shown in fig. 4, there are also a plurality of metal particles 5, and the metal particles 5 are disposed on both sides of the top of the slit 4 and on the block of thermal expansion material 3. The thermal expansion material block 3 expands, on one hand, the resonance distance between the metal particles 5 and the metal units is changed, the expansion resonance distance of the thermal expansion material block is increased, and the corresponding spectral line of the metal particles scattered is red shifted; on the other hand, the arrangement of the metal particles makes the light near the gaps scattered, so that the light intensity between the gaps of the metal units is weakened, the transmitted light is reduced, the middle resonance valley of the detection spectrum is more obvious, and the measurement is more accurate.
The detection device realizes temperature detection by detecting the optical signals, so that on one hand, the problem that the use of the electrical signals can cause additional potential safety hazards to certain environments (such as coal mines) is avoided, and on the other hand, the interference from the environments is small when the detection device is used in severe environments.
In the present specification, each embodiment is described in a progressive manner, and each embodiment is mainly described in a different point from other embodiments, and identical and similar parts between the embodiments are all enough to refer to each other.
The principles and embodiments of the present invention have been described herein with reference to specific examples, the description of which is intended only to assist in understanding the methods of the present invention and the core ideas thereof; also, it is within the scope of the present invention to be modified by those of ordinary skill in the art in light of the present teachings. In view of the foregoing, this description should not be construed as limiting the invention.
Claims (7)
1. The surface plasmon-based temperature detection device is characterized by comprising a transparent elastic material layer, a metal array structure and a thermal expansion material block;
the metal array structure is arranged on the transparent elastic material layer;
the metal array structure consists of periodically arranged metal units, and the metal units are provided with notches;
a gap is formed between the metal units;
the thermal expansion material block is arranged in the notch;
wherein the notch penetrates through the metal unit, and the thermal expansion material block is contacted with the transparent elastic material layer; the width of the gap is 100nm-200nm; the device further comprises an elastic light material, wherein the elastic light material is arranged in the gap;
the thermal expansion material block expands due to temperature change, and the gap is narrowed, so that the position of a resonance valley in an emergent spectrum is moved, and temperature detection is realized through the position movement of the resonance valley.
2. The surface plasmon-based temperature detection apparatus of claim 1 wherein the notch is rectangular.
3. The surface plasmon-based temperature detection apparatus of claim 1 wherein the notch is trapezoidal.
4. The surface plasmon-based temperature detection apparatus of claim 3 further comprising a plurality of metal particles disposed on both sides of the slit top and on the block of thermally expansive material.
5. The surface plasmon-based temperature detection apparatus of claim 1 wherein the material of the metal array structure is a noble metal material.
6. The surface plasmon based temperature sensing device of claim 1 wherein the material of the block of thermally expansive material is an ethylene vinyl acetate polymer.
7. The surface plasmon-based temperature detection device of claim 1 wherein the elasto-optical material is lead lanthanum zirconate titanate.
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| CN202110913464.1A CN113607302B (en) | 2021-08-10 | 2021-08-10 | Temperature detection device based on surface plasmon |
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