CN111855007A - Temperature sensor and system based on metal nanometer groove structure - Google Patents
Temperature sensor and system based on metal nanometer groove structure Download PDFInfo
- Publication number
- CN111855007A CN111855007A CN202010775939.0A CN202010775939A CN111855007A CN 111855007 A CN111855007 A CN 111855007A CN 202010775939 A CN202010775939 A CN 202010775939A CN 111855007 A CN111855007 A CN 111855007A
- Authority
- CN
- China
- Prior art keywords
- metal
- temperature sensor
- molybdenum disulfide
- block
- temperature
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
- G01K11/00—Measuring temperature based upon physical or chemical changes not covered by groups G01K3/00, G01K5/00, G01K7/00 or G01K9/00
- G01K11/006—Measuring temperature based upon physical or chemical changes not covered by groups G01K3/00, G01K5/00, G01K7/00 or G01K9/00 using measurement of the effect of a material on microwaves or longer electromagnetic waves, e.g. measuring temperature via microwaves emitted by the object
Landscapes
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- General Physics & Mathematics (AREA)
- Measuring Temperature Or Quantity Of Heat (AREA)
Abstract
The invention relates to a temperature sensor and a system based on a metal nanometer groove structure, and mainly relates to the field of temperature detection. The temperature sensor includes: the optical fiber, the molybdenum disulfide layer, the supporting layer and the metal nanometer groove structure; the metal nanometer groove structure comprises a plurality of first metal blocks, a plurality of second metal blocks and a plurality of thermal expansion blocks, when the external temperature changes, the volume of the plurality of thermal expansion blocks of the metal nanometer groove structure changes, further the structure of the metal nanometer groove structure changes, the absorption condition of the temperature sensor to laser is changed, the light intensity of the laser emitted by the optical fiber is detected through a spectrometer, the absorption condition of the temperature sensor to the laser under the influence of the temperature to be measured is obtained, the variation condition of the light intensity of the emergent laser of the temperature sensor around the temperature to be measured is obtained through calculation, the variation condition of the light intensity of the emergent laser of the temperature sensor corresponds to the temperature to be measured, and the temperature to be measured is obtained.
Description
Technical Field
The invention relates to the field of temperature detection, in particular to a temperature sensor and a system based on a metal nanometer groove structure.
Background
A temperature sensor is a sensor that senses temperature and converts it into a usable output signal. The measurement method can be divided into a contact type and a non-contact type, and the measurement method can be divided into a thermal resistor and a thermocouple according to the characteristics of sensor materials and electronic elements.
The detection principle of the temperature sensor of the thermal resistor is that the resistance value of metal changes along with the temperature change, the temperature is measured by measuring the resistance and the relation between the resistance and the temperature, and the thermocouple temperature sensor is composed of two metal wires made of different materials and welded together at the tail end. The temperature of the heating point can be accurately known by measuring the ambient temperature of the unheated part.
Because thermal resistance temperature sensor and thermocouple temperature sensor all need to heat through the metal with temperature sensor inside, the metal absorbs certain heat at the in-process of heating for this thermal resistance temperature sensor and thermocouple temperature sensor have great error to the measurement of temperature.
Disclosure of Invention
The invention aims to provide a temperature sensor and a system based on a metal nanometer groove structure aiming at the defects in the prior art, and aims to solve the problem that the measurement of the temperature by the thermal resistance temperature sensor and the thermocouple temperature sensor has large errors due to the fact that the metal in the temperature sensor needs to be heated and absorbs certain heat in the heating process by the thermal resistance temperature sensor and the thermocouple temperature sensor in the prior art.
In order to achieve the above purpose, the embodiment of the present invention adopts the following technical solutions:
in a first aspect, the present application provides a temperature sensor based on a metal nanochannel structure, the temperature sensor comprising: the optical fiber, the molybdenum disulfide layer, the supporting layer and the metal nanometer groove structure; one end of optic fibre is provided with the molybdenum disulfide layer, one side that optic fibre was kept away from on the molybdenum disulfide layer is provided with the supporting layer, metal nanometer groove structure sets up the one side of keeping away from the molybdenum disulfide layer at the supporting layer, metal nanometer groove structure includes a plurality of first metal blocks, a plurality of second metal blocks and a plurality of thermal expansion piece, wherein, every first metal block inside corresponds and sets up a thermal expansion piece, one side of every first metal block sets up a second metal block, first metal block, second metal block and thermal expansion piece cycle set up and constitute metal nanometer structure, and the height of first metal block is higher than the second metal block, first metal block outstanding in the one side that the molybdenum disulfide layer was kept away from with the supporting part in the one end of second metal block is connected, the material of thermal expansion piece is thermal expansion material.
Optionally, the material of the support is silica glass.
Optionally, the material of the first metal block and the second metal block is a noble metal.
Optionally, the material of the first metal block and the second metal block is silver.
Optionally, the material of the support is a transparent thermal expansion material.
Optionally, the temperature sensor further comprises a focusing lens disposed on a side of the molybdenum disulfide layer away from the support.
Optionally, the focusing lens is a lens group.
In a second aspect, the present application provides a temperature sensing system based on a metal nanochannel structure, the temperature sensing system comprising: the temperature sensor of any one of light source, spectrum appearance and first aspect, light source and spectrum appearance all set up in optic fibre and keep away from the one end of molybdenum disulfide layer, and the light source is used for producing light, and the spectrum appearance is used for detecting the light intensity of temperature sensor's reverberation.
The invention has the beneficial effects that:
the application provides a temperature sensor includes: the optical fiber, the molybdenum disulfide layer, the supporting layer and the metal nanometer groove structure; one end of the optical fiber is provided with a molybdenum disulfide layer, one side of the molybdenum disulfide layer, which is far away from the optical fiber, is provided with a supporting layer, a metal nanometer groove structure is arranged on one side of the supporting layer, which is far away from the molybdenum disulfide layer, the metal nanometer groove structure comprises a plurality of first metal blocks, a plurality of second metal blocks and a plurality of thermal expansion blocks, wherein one thermal expansion block is correspondingly arranged in each first metal block, one side of each first metal block is provided with one second metal block, the first metal blocks, the second metal blocks and the thermal expansion blocks are periodically arranged to form the metal nanometer structure, the height of each first metal block is higher than that of each second metal block, one end, protruding out of each second metal block, of each first metal block is connected with one side, which is far away from the molybdenum disulfide layer, of the supporting part, and the thermal expansion blocks are made of thermal expansion materials, before the temperature to be measured is measured, laser is transmitted to the molybdenum disulfide layer, the metal nano-groove structure is formed by periodically arranging a first metal block, a second metal block and a thermal expansion block, the metal nano-groove structure resonates with laser under the irradiation of the laser to absorb the laser and reflect a part of the laser to the molybdenum disulfide layer, the molybdenum disulfide layer reflects a part of the reflected laser to the metal nano-groove structure, the absorption of the metal nano-groove structure to the laser is further increased, the other part of the laser on the molybdenum disulfide layer is transmitted to the optical fiber, the absorption condition of the temperature sensor to the laser under the influence of no external temperature can be obtained by detecting the laser emitted from the optical fiber, when the temperature to be measured needs to be measured, the thermal expansion block is made of a thermal expansion material, and when the external temperature changes, the volumes of a plurality of thermal expansion blocks of the metal nano-groove structure change, the structure of the metal nanometer groove structure is changed, the absorption condition of the temperature sensor to laser is changed, the light intensity of the laser emitted by the optical fiber is detected through a spectrometer, the absorption condition of the temperature sensor to the laser under the influence of the temperature to be measured is obtained, the variation condition of the light intensity of the emitted laser of the temperature sensor before and after the temperature to be measured is obtained through calculation, and the temperature to be measured is obtained through the corresponding relation between the variation condition of the light intensity of the emitted laser of the temperature sensor and the temperature to be measured; and this application turns into the measurement of the temperature that awaits measuring into and measures optical fiber emergent light intensity, reduces the error that the temperature that awaits measuring produced, increases the accuracy of measuring the temperature that awaits measuring to because the volume of this supporting part receives the temperature influence comparatively obvious, further increased this temperature sensor's sensitivity.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings needed to be used in the embodiments will be briefly described below, it should be understood that the following drawings only illustrate some embodiments of the present invention and therefore should not be considered as limiting the scope, and for those skilled in the art, other related drawings can be obtained according to the drawings without inventive efforts.
Fig. 1 is a schematic structural diagram of a temperature sensor based on a metal nano-groove structure according to an embodiment of the present invention;
fig. 2 is a schematic structural diagram of a metal nano-groove structure according to an embodiment of the present invention;
fig. 3 is a schematic structural diagram of a temperature sensor based on a metal nano-groove structure according to an embodiment of the present invention.
An icon; 10-an optical fiber 10; 20-a molybdenum disulfide layer; 30-a support layer; 40-metal nanochannel structures; 41-a first metal block; 42-a second metal block; 43-thermal expansion block.
Detailed Description
In order to make the objects, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiment is a metal plate embodiment of the present invention, and not all embodiments. The components of embodiments of the present invention generally described and illustrated in the figures herein may be arranged and designed in a wide variety of different configurations.
Thus, the following detailed description of the embodiments of the present invention, presented in the figures, is not intended to limit the scope of the invention, as claimed, but is merely representative of selected embodiments of the invention. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
It should be noted that: like reference numbers and letters refer to like items in the following figures, and thus, once an item is defined in one figure, it need not be further defined and explained in subsequent figures.
In the description of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings or the orientations or positional relationships that the products of the present invention are conventionally placed in use, and are only used for convenience in describing the present invention and simplifying the description, but do not indicate or imply that the devices or elements referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus, should not be construed as limiting the present invention. Furthermore, the terms "first," "second," "third," and the like are used solely to distinguish one from another and are not to be construed as indicating or implying relative importance.
Furthermore, the terms "horizontal", "vertical" and the like do not imply that the components are required to be absolutely horizontal or pendant, but rather may be slightly inclined. For example, "horizontal" merely means that the direction is more horizontal than "vertical" and does not mean that the structure must be perfectly horizontal, but may be slightly inclined.
In the description of the present invention, it should also be noted that, unless otherwise explicitly specified or limited, the terms "disposed," "mounted," "connected," and "connected" are to be construed broadly and may, for example, be fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meanings of the above terms in the present invention can be understood in specific cases to those skilled in the art.
In order to make the implementation of the present invention clearer, the following detailed description is made with reference to the accompanying drawings.
Fig. 1 is a schematic structural diagram of a temperature sensor based on a metal nano-groove structure according to an embodiment of the present invention; fig. 2 is a schematic structural diagram of a metal nano-groove structure according to an embodiment of the present invention; as shown in fig. 1 and 2, the present application provides a temperature sensor based on a metal nano-groove structure 40, the temperature sensor comprising: the optical fiber 10, the molybdenum disulfide layer 20, the support layer 30 and the metal nanometer groove structure 40; the optical fiber comprises an optical fiber 10, a molybdenum disulfide layer 20 is arranged at one end of the optical fiber 10, a supporting layer 30 is arranged on one side, away from the optical fiber 10, of the molybdenum disulfide layer 20, a metal nano-groove structure 40 is arranged on one side, away from the molybdenum disulfide layer 20, of the supporting layer 30, the metal nano-groove structure 40 comprises a plurality of first metal blocks 41, a plurality of second metal blocks 42 and a plurality of thermal expansion blocks 43, one thermal expansion block 43 is correspondingly arranged inside each first metal block 41, one second metal block 42 is arranged on one side of each first metal block 41, the first metal blocks 41, the second metal blocks 42 and the thermal expansion blocks 43 are periodically arranged to form a metal nano-structure, the height of each first metal block 41 is higher than that of each second metal block 42, one end, protruding out of each second metal block 41, of each first metal block 41 is connected with one side, away from the molybdenum disulfide layer 20, of the supporting portion, and.
In general, the optical fiber 10 is a hollow cylindrical structure, the cross-section of the metal nano-groove structure 40 should also be circular, the first metal block 41, the second metal block 42 and the thermal expansion block 43 are a period, the metal nano-groove structure 40 includes a plurality of periods, the geometric parameters of the first metal block 41, the second metal block 42 and the thermal expansion block 43 in each period are determined according to actual needs, and are not specifically limited herein, the number of periods in the metal nano-groove structure 40 is determined according to actual needs, and is not specifically limited herein, the metal nano-groove structure 40 is nano-sized, that is, the length, width and height of the first metal block 41, the second metal block 42 and the thermal expansion block 43 of the metal nano-groove structure 40 are all less than 100 nanometers, the shape of the first metal block 41, the second metal block 42 and the thermal expansion block 43 is generally a cuboid, and the length and width of the first metal block 41 are respectively equal to the length and width of the second metal block 42, the height of the first metal block 41 is greater than that of the second metal block 42, the material of the thermal expansion block 43 is a thermal expansion material, and is disposed inside the first metal block 41, when the external temperature changes, the heated volume of the thermal expansion block 43 changes, so that the volume of the first metal block 41 changes, and the resonance between the metal nano-groove structure 40 and the molybdenum disulfide layer 20 changes, the shapes of the molybdenum disulfide layer 20 and the supporting layer 30 are cylinders, the diameters of the conical molybdenum disulfide layer 20 and the supporting layer 30 are slightly smaller than the diameter of the optical fiber 10, the heights of the molybdenum disulfide layer 20 and the supporting layer 30 are determined according to the actual conditions, and are not specifically limited herein, before measuring the temperature to be measured, laser is transmitted to the molybdenum disulfide layer 20 through the optical fiber 10, and is transmitted to the metal nano-groove structure 40 through the molybdenum disulfide layer 20 and the supporting layer 30, because the metal nano-groove structure 40 is formed by periodically arranging the first metal block 41, the second metal block 42 and the thermal expansion block 43, under the irradiation of laser, the metal nano-groove structure 40 resonates with the laser to absorb the laser and reflect a part of the laser to the molybdenum disulfide layer 20, the molybdenum disulfide layer 20 reflects a part of the reflected laser to the metal nano-groove structure 40, so as to further increase the absorption of the laser by the metal nano-groove structure 40, the other part of the laser on the molybdenum disulfide layer 20 is transmitted to the optical fiber 10, through the detection of the laser emitted by the optical fiber 10, the absorption condition of the temperature sensor to the laser without the influence of external temperature can be obtained, when the temperature to be measured needs to be measured, the thermal expansion block 43 is made of a thermal expansion material, when the external temperature changes, the volumes of the thermal expansion blocks 43 of the metal nano-groove structure 40 change, further changing the structure of the metal nanometer groove structure 40, changing the absorption condition of the temperature sensor to the laser, detecting the light intensity of the laser emitted by the optical fiber 10 through a spectrometer to obtain the absorption condition of the temperature sensor to the laser under the influence of the temperature to be measured, calculating the variation condition of the light intensity of the emitted laser of the temperature sensor before and after the temperature to be measured is measured, and obtaining the temperature to be measured through the corresponding relation between the variation condition of the light intensity of the emitted laser of the temperature sensor and the temperature to be measured; it should be noted that the corresponding relationship between the variation of the intensity of the laser beam emitted from the temperature sensor and the temperature to be measured is obtained according to actual measurement, and is not specifically limited herein. In addition, the measurement of the temperature to be measured is converted into the measurement of the emergent light intensity of the optical fiber 10, the error generated by measuring the temperature to be measured is reduced, the accuracy of measuring the temperature to be measured is improved, and the sensitivity of the temperature sensor is further improved because the volumes of the plurality of thermal expansion blocks 43 of the metal nanometer groove structure 40 are obviously influenced by the temperature.
Optionally, the material of the support is silica glass.
The supporting part made of the silica glass material has good light transmission, less laser penetrates through the loss of the supporting part, and then the measuring error is reduced, so that the temperature measuring result of the temperature sensor is more accurate.
Alternatively, the material of the first metal block 41 and the second metal block 42 is a noble metal.
The material of the first metal block 41 and the second metal block 42 may be one of noble metals, or a mixed noble metal material formed by combining a plurality of noble metals from the noble metals, and if the material of the first metal block 41 and the second metal block 42 is a mixed noble metal material formed by combining a plurality of noble metals, the noble metal type and the mixing ratio of the mixed noble metal material are determined according to actual needs, and are not particularly limited herein.
Optionally, the material of the first metal block 41 and the second metal block 42 is silver.
Optionally, the material of the support is a transparent thermal expansion material.
The material of the supporting portion is a transparent thermal expansion material, when the external temperature changes, the volume of the supporting portion of the thermal expansion material changes, and then the distance between the molybdenum disulfide layer 20 and the metal nano-groove structure 40 is changed, that is, the resonance condition between the molybdenum disulfide layer 20 and the metal nano-groove structure 40 is changed, so that the temperature sensor of the present application is enhanced by the temperature influence degree, that is, the sensitivity of the temperature sensor is increased.
Fig. 3 is a schematic structural diagram of a temperature sensor based on a metal nano-groove structure according to an embodiment of the present invention, and as shown in fig. 3, the temperature sensor further includes a focusing lens, where the focusing lens is disposed on a side of the molybdenum disulfide layer 20 away from the support.
The focusing lens is arranged on one side of the molybdenum disulfide layer 20 far away from the supporting part, so that light transmitted to the molybdenum disulfide layer 20 from the optical fiber 10 is further converged, the loss of laser is reduced, the accuracy of temperature detection to be detected is improved, the focusing lens can also converge light transmitted to the optical fiber 10 from the molybdenum disulfide layer 20, the loss of laser is further reduced, and the accuracy of temperature detection to be detected is improved.
Optionally, the focusing lens is a lens group.
The application provides a temperature sensor includes: the optical fiber 10, the molybdenum disulfide layer 20, the support layer 30 and the metal nanometer groove structure 40; one end of the optical fiber 10 is provided with a molybdenum disulfide layer 20, one side of the molybdenum disulfide layer 20, which is far away from the optical fiber 10, is provided with a supporting layer 30, a metal nano-groove structure 40 is arranged on one side of the supporting layer 30, which is far away from the molybdenum disulfide layer 20, the metal nano-groove structure 40 comprises a plurality of first metal blocks 41, a plurality of second metal blocks 42 and a plurality of thermal expansion blocks 43, wherein one thermal expansion block 43 is correspondingly arranged inside each first metal block 41, one side of each first metal block 41 is provided with one second metal block 42, the first metal blocks 41, the second metal blocks 42 and the thermal expansion blocks 43 are periodically arranged to form a metal nano-structure, the height of each first metal block 41 is higher than that of each second metal block 42, one end of each first metal block 41, which protrudes out of each second metal block 42, is connected with one side of the supporting portion, which is far away from the molybdenum disulfide layer 20, the thermal expansion blocks 43 are made of, the laser is transmitted to the molybdenum disulfide layer 20 through the optical fiber 10, and is transmitted to the metal nano-groove structure 40 through the molybdenum disulfide layer 20 and the supporting layer 30, because the metal nano-groove structure 40 is a metal nano-structure formed by periodically arranging a first metal block 41, a second metal block 42 and a thermal expansion block 43, under the irradiation of the laser, the metal nano-groove structure 40 resonates with the laser to absorb the laser and reflect a part of the laser to the molybdenum disulfide layer 20, the molybdenum disulfide layer 20 reflects a part of the reflected laser to the metal nano-groove structure 40, the absorption of the metal nano-groove structure 40 to the laser is further increased, the other part of the laser on the molybdenum disulfide layer 20 is transmitted to the optical fiber 10, and the absorption of the laser by the temperature sensor under the influence of no external temperature can be obtained by detecting the laser emitted from the optical fiber 10, when the temperature to be measured needs to be measured, the thermal expansion blocks 43 are made of thermal expansion materials, when the external temperature changes, the volumes of the thermal expansion blocks 43 of the metal nano-groove structure 40 change, the structure of the metal nano-groove structure 40 changes, the absorption condition of the temperature sensor on laser is changed, the light intensity of the laser emitted by the optical fiber 10 is detected through a spectrometer, the absorption condition of the temperature sensor on the laser under the influence of the temperature to be measured is obtained, the light intensity change condition of the emitted laser of the temperature sensor before and after the temperature to be measured is obtained through calculation, and the temperature to be measured is obtained through the corresponding relation between the light intensity change condition of the emitted laser of the temperature sensor and the temperature to be measured; in addition, the measurement of the temperature to be measured is converted into the measurement of the emergent light intensity of the optical fiber 10, the error generated by measuring the temperature to be measured is reduced, the accuracy of measuring the temperature to be measured is improved, and the sensitivity of the temperature sensor is further improved because the volumes of the plurality of thermal expansion blocks 43 of the metal nanometer groove structure 40 are obviously influenced by the temperature.
The application provides a temperature sensing system based on metal nanometer groove structure 40, molybdenum disulfide layer 20 temperature sensing system includes: the light source, the spectrum appearance and any one above-mentioned molybdenum disulfide layer 20 temperature sensor, molybdenum disulfide layer 20 light source and molybdenum disulfide layer 20 spectrum appearance all set up in molybdenum disulfide layer 20 optic fibre 10 keep away from molybdenum disulfide layer 20 one end of layer 20, and molybdenum disulfide layer 20 light source is used for producing light, and molybdenum disulfide layer 20 spectrum appearance is used for detecting the light intensity of the reflection light of molybdenum disulfide layer 20 temperature sensor.
The above is only a preferred embodiment of the present invention, and is not intended to limit the present invention, and various modifications and changes will occur to those skilled in the art. Any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included in the protection scope of the present invention.
Claims (8)
1. A temperature sensor based on a metal nanochannel structure, the temperature sensor comprising: the optical fiber, the molybdenum disulfide layer, the supporting layer and the metal nanometer groove structure; the molybdenum disulfide layer is arranged at one end of the optical fiber, the supporting layer is arranged on one side of the molybdenum disulfide layer far away from the optical fiber, the metal nano-groove structure is arranged on one side of the supporting layer far away from the molybdenum disulfide layer and comprises a plurality of first metal blocks, a plurality of second metal blocks and a plurality of thermal expansion blocks, wherein, a thermal expansion block is correspondingly arranged inside each first metal block, one side of each first metal block is provided with a second metal block, the first metal block, the second metal block and the thermal expansion block are periodically arranged to form the metal nano structure, the height of the first metal block is higher than that of the second metal block, one end, protruding out of the second metal block, of the first metal block is connected with one side, far away from the molybdenum disulfide layer, of the supporting portion, and the thermal expansion block is made of thermal expansion materials.
2. The metal nanochannel structure-based temperature sensor of claim 1, wherein the material of the support is silica glass.
3. The metal-nanochannel structure-based temperature sensor of claim 2, wherein the material of the first metal block and the second metal block is a noble metal.
4. The metal-nanochannel structure-based temperature sensor of claim 3, wherein the material of the first metal block and the second metal block is silver.
5. The metal nanochannel structure-based temperature sensor of claim 1, wherein the material of the support is a transparent thermal expansion material.
6. The metal nanochannel structure-based temperature sensor of claim 1, further comprising a focusing lens disposed on a side of the molybdenum disulfide layer distal from the support.
7. The metal-nanochannel structure-based temperature sensor of claim 6, wherein the focusing lens is a lens group.
8. A temperature sensing system based on a metal nanochannel structure, the temperature sensing system comprising: a light source, a spectrometer and the temperature sensor of any one of claims 1-7, wherein the light source and the spectrometer are disposed at an end of the optical fiber away from the molybdenum disulfide layer, the light source is configured to generate light, and the spectrometer is configured to detect a light intensity of reflected light from the temperature sensor.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010775939.0A CN111855007A (en) | 2020-08-05 | 2020-08-05 | Temperature sensor and system based on metal nanometer groove structure |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010775939.0A CN111855007A (en) | 2020-08-05 | 2020-08-05 | Temperature sensor and system based on metal nanometer groove structure |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN111855007A true CN111855007A (en) | 2020-10-30 |
Family
ID=72971890
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202010775939.0A Withdrawn CN111855007A (en) | 2020-08-05 | 2020-08-05 | Temperature sensor and system based on metal nanometer groove structure |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN111855007A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113280942A (en) * | 2021-07-05 | 2021-08-20 | 西南大学 | Temperature sensor based on piezoelectric effect |
| CN113358234A (en) * | 2021-06-10 | 2021-09-07 | 山东第一医科大学(山东省医学科学院) | Temperature sensor |
| CN113607302A (en) * | 2021-08-10 | 2021-11-05 | 云南师范大学 | Temperature detection device based on surface plasmon |
-
2020
- 2020-08-05 CN CN202010775939.0A patent/CN111855007A/en not_active Withdrawn
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113358234A (en) * | 2021-06-10 | 2021-09-07 | 山东第一医科大学(山东省医学科学院) | Temperature sensor |
| CN113358234B (en) * | 2021-06-10 | 2022-03-25 | 山东第一医科大学(山东省医学科学院) | Temperature sensor |
| CN113280942A (en) * | 2021-07-05 | 2021-08-20 | 西南大学 | Temperature sensor based on piezoelectric effect |
| CN113607302A (en) * | 2021-08-10 | 2021-11-05 | 云南师范大学 | Temperature detection device based on surface plasmon |
| CN113607302B (en) * | 2021-08-10 | 2024-02-02 | 云南师范大学 | Temperature detection device based on surface plasmon |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN111855007A (en) | Temperature sensor and system based on metal nanometer groove structure | |
| CA1300370C (en) | Measuring curvature of transparent or translucent material | |
| Yang et al. | A review of recent developed and applications of plastic fiber optic displacement sensors | |
| CN104335018A (en) | Laser power sensor | |
| CN107121726B (en) | Optical fiber double-parameter sensor and preparation method thereof | |
| CN111896140A (en) | Optical fiber temperature sensor and system | |
| CN102967582A (en) | High-sensitivity micro-nano fiber compound type microcavity biochemical sensor and manufacture method thereof | |
| CN112485805A (en) | Laser triangular displacement sensor and measuring method thereof | |
| CN111289140A (en) | Temperature sensor and system based on optical fiber structure | |
| CN112284565B (en) | Anti-resonance optical fiber temperature detector | |
| CN109655176B (en) | High-precision temperature probe based on cavity filling type microstructure optical fiber interferometer | |
| CN208595984U (en) | A kind of high sensitivity optical fiber temperature sensor | |
| CN113310507A (en) | Optical fiber SPR sensor for measuring displacement and angle, calibration device and method | |
| CN113267206A (en) | Low-cost repeatedly-producible optical fiber non-closed Fabry-Perot sensor | |
| CN2480802Y (en) | Outer size measurer for cigarette and filter tip | |
| CN110779653B (en) | Gas pressure detector and system based on optical fiber structure resonant cavity principle | |
| CN111896139A (en) | Temperature sensor and system | |
| CN113049181A (en) | Method for manufacturing optical fiber Fabry-Perot vacuum gauge | |
| CN108168449A (en) | Miniature Fiber optic displacement sensor with high resolution | |
| CN114061801A (en) | Optical fiber V-groove cladding SPR strain sensor and manufacturing method thereof | |
| CN207936923U (en) | A kind of ethyl alcohol filling photonic crystal fiber bending sensor based on directional couple | |
| CN112881337A (en) | Chiral detection device and system based on photonic crystal fiber | |
| CN113176009A (en) | Temperature measuring device based on arc-shaped convex optical fiber | |
| CN111220296A (en) | Microcavity type temperature sensor and system | |
| CN218601155U (en) | Multimode interference hydrogen concentration sensor based on capillary |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| WW01 | Invention patent application withdrawn after publication | ||
| WW01 | Invention patent application withdrawn after publication |
Application publication date: 20201030 |