CN113063967B - Rotary sample table device capable of realizing three-dimensional atom probe microtip array sample rotation - Google Patents
Rotary sample table device capable of realizing three-dimensional atom probe microtip array sample rotation Download PDFInfo
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- CN113063967B CN113063967B CN202110190572.0A CN202110190572A CN113063967B CN 113063967 B CN113063967 B CN 113063967B CN 202110190572 A CN202110190572 A CN 202110190572A CN 113063967 B CN113063967 B CN 113063967B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
- G01Q30/00—Auxiliary means serving to assist or improve the scanning probe techniques or apparatus, e.g. display or data processing devices
- G01Q30/20—Sample handling devices or methods
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Abstract
The invention discloses a rotary sample table capable of placing a three-dimensional atom probe microtip array sample, which can not analyze microtip array samples in large batch at the same time due to the problem of the design of a three-dimensional atom probe laser mode light path, and needs to design a sample table capable of freely rotating so as to improve the experimental efficiency. The rotary sample table mainly comprises a fixing device, a rack, a gear and a rotating shaft. The three-dimensional atom probe microtip array platform is provided with four rows of needle tip arrays, and the nano needle tips on the four rows of arrays can not finish analysis in the same batch due to the problem that the needle tips shield laser mutually during analysis, and the other two rows can be analyzed after the two rows are analyzed by rotating 180 degrees. The equipment can drive the rotating shaft through the transmission of the gear and the rack, can realize the rotation of the microtip array sample, and can realize the rotation on the premise of not taking the microtip array sample out of the instrument, thereby greatly improving the testing efficiency.
Description
Technical Field
The invention relates to a rotary sample table for testing a three-dimensional atom probe micro-tip array sample, which is convenient for testing the three-dimensional atom probe micro-tip array sample and belongs to accessories used in the three-dimensional atom probe test.
Background
The three-dimensional atom probe equipment consists of a time-of-flight mass spectrometer, a position sensitive probe, a control field evaporation system and other components. Atoms on the surface of a pinpoint sample with the curvature radius smaller than 100nm are ionized under the action of a strong electric field, the field is evaporated to leave the surface of the sample, the sample flies to a position sensitive probe, and the flight time is recorded to realize the one-by-one identification of ion species, so that the three-dimensional distribution condition of various elements in a material nanometer space is obtained, the spatial resolution of a near atomic scale can be realized, and the device is the most powerful device for researching the problems of nanometer segregation, precipitation and the like in the material. The preparation methods of the three-dimensional atom probe sample mainly include two methods: one is electropolishing; the other is focused ion beam FIB cutting. The use of electropolishing requires that the material be capable of being corroded by acid to produce a sample of the needle tip at random locations. If a particular region of interest is to be analyzed, the sample can only be cut by FIB. The FIB cut tip sample is typically placed on a microtip array stage. The micro-tip array platform has two groups of four rows of positions, and the two groups are arranged oppositely. Each group of two rows can be used for placing 11 needle point samples, 5 needle point samples in one row and 6 needle point samples in one row, and the positions of the samples are staggered. However, due to the problem that the microtip array shields the laser, when one group of samples are tested, the needle point sample table must be rotated so that the other group of nano needle point samples can be irradiated by the laser for testing. However, the conventional microtip array sample stage cannot realize the operation in the instrument, and the sample must be taken out of the instrument and the operation is carried out outside the instrument. After the sample is taken out of the instrument, the sample is put into the instrument again for testing, operations such as vacuumizing for 6 hours, cooling and the like are needed, the time consumption is long, the continuous testing of the sample is extremely inconvenient, and the heating and cooling processes can possibly influence the micro-tissues of the sample. Therefore, a device capable of realizing rotation of the microtip array sample stage is needed, and the operation can be performed in a three-dimensional atomic probe instrument, so that the test efficiency can be improved, and unnecessary test data interference can be reduced, which becomes a technical problem to be solved urgently.
Disclosure of Invention
In order to solve the problems in the prior art, the invention aims to overcome the defects in the prior art, and provides a rotary sample stage device capable of realizing the rotation of a three-dimensional atom probe microtip array sample, wherein the rotation of the microtip array sample can be realized by driving a rotating shaft through the transmission of a gear and a rack, and the rotation of a nano needle tip array at 180 degrees or other required angles can be realized in a three-dimensional atom probe instrument.
In order to achieve the purpose of the invention, the invention adopts the following technical scheme:
a rotary sample table device capable of realizing rotation of a three-dimensional atom probe microtip array sample comprises a fixing device and a rack-and-pinion transmission device, wherein the fixing device is a device with a hollow box type structure, the fixing device is arranged on a sample table of a three-dimensional atom probe instrument, a limiting hole is formed in the upper side of the device with the hollow box type structure, the rack-and-pinion transmission device is meshed, connected and assembled by a gear and a rack, the gear is used as a driven part, the rack is used as a driving part to form a rack-and-pinion transmission mechanism, the rack penetrates through the front side or the rear side of the fixing device and is horizontally arranged and horizontally moved, and the rack is provided with a limiting device to prevent the rack from falling off in the transmission process;
the upper part of a rotating shaft fixedly connected with the gear integrally penetrates through an upper side limiting hole of the fixing device, so that the top end of the rotating shaft is higher than the upper surface of the fixing device, a rotating sample table is formed on the surface of the top end of the rotating shaft, and a three-dimensional atom probe microtip array sample is placed on the rotating sample table; the lower part of the rotating shaft is arranged in the box body of the fixing device, so that the lower part of the rotating shaft is rotatably connected with the bottom of the box body;
the gear is arranged to rotate in a horizontal plane, so that the rotating shaft is driven to rotate horizontally; the rotary sample stage device is integrally placed in a three-dimensional atom probe instrument, a three-dimensional atom probe micro-tip array sample is placed on the surface of the top end of a rotating shaft, after one group of samples on the three-dimensional atom probe micro-tip array are measured, the three-dimensional atom probe micro-tip array sample does not need to be taken out of the three-dimensional atom probe instrument when the other group of samples are measured, a sample rod in the three-dimensional atom probe instrument is only used for pushing a rack to drive a gear to rotate, then the rotating shaft and the micro-tip array sample on the rotating shaft are driven to rotate, and the test can be continued after the sample rod is rotated to a required angle position.
Preferably, the rack has a length of 14 to 15mm, a width of 4 to 8mm, and a modulus of 1mm.
Preferably, the thickness of the gear is 4-5 mm, the diameter of a reference circle is 12mm, the number of teeth is 12, the modulus is 1mm, and the center of the gear is provided with a hole with the diameter not less than 2mm for fixedly assembling with a rotating shaft.
Preferably, the length of the transmission shaft is 9-11 mm, and the diameter is not less than 2mm.
Preferably, the fixing device is a cuboid hollow box type structure device, the length is 17-19mm, the width is 17-19mm, the height is 7-9 mm, and the thickness of the box body wall is 1-2 mm.
Preferably, the fixing device is a hollow box type structure device in a rectangular parallelepiped shape, wherein the front and rear sides of the box are open to form an annular rectangular parallelepiped shape, and the rack moves along the front and rear direction of the box.
Preferably, a fixing shaft with the diameter not less than 2mm and the length of 7-10 mm is fixedly connected to one side of the lower part of the fixing device, and the fixing device is placed on a sample table of the three-dimensional atom probe instrument through the fixing shaft.
Preferably, the fixed shaft and the rotating shaft are arranged in a staggered manner.
Preferably, the fixing device, the gear, the rack, the rotating shaft and the related accessories are made of any one of aluminum and copper, or alloy thereof.
Compared with the prior art, the invention has the following obvious substantive characteristics and remarkable advantages:
1. the device can realize 180-degree rotation of the microtip array and the rotation angle is controllable and adjustable, which cannot be realized by the conventional microtip array sample stage;
2. the device has the advantages of simple structure, convenient processing and low maintenance cost, and can realize the required functions only by simple gear transmission;
3. all parts of the device are made of metal materials, so that the device has good conductivity, the distribution of an electric field and a magnetic field in the device cannot be influenced, the device cannot be destroyed under high voltage, and the device cannot interfere with a tested sample;
4. the device of the invention is used for testing the microtip array sample by depending on the rotating device, thereby greatly saving time and improving the testing efficiency of the sample.
Drawings
FIG. 1 is an assembly view of a rotary sample stage apparatus of the present invention. Wherein 1 is a fixing device, 2 is a gear, 3 is a rack, 4 is a rotating shaft, and 5 is a fixing shaft.
FIG. 2 is a schematic view of a fixing device of the rotary sample stage device according to the present invention.
FIG. 3 is a schematic diagram of the gear and rack transmission of the rotary sample stage device of the present invention.
Fig. 4 is a schematic view of a rotating shaft and a fixed shaft of the rotary sample stage device according to the present invention.
FIG. 5 is a diagram of a microtip array sample.
FIG. 6 is a test chart of a microtip array sample.
Detailed Description
The above-described embodiments are further illustrated below with reference to specific examples, in which preferred embodiments of the invention are detailed below:
the first embodiment is as follows:
in this embodiment, referring to fig. 1 to fig. 6, a rotary sample stage device capable of implementing rotation of a three-dimensional atom probe microtip array sample includes a fixing device 1 and a rack-and-pinion transmission device; the fixing device 1 is a hollow box type structure device, the fixing device 1 is arranged on a sample platform of a three-dimensional atomic probe instrument, a limiting hole is formed in the upper side of the hollow box type structure device, the gear and rack transmission device is formed by meshing, connecting and assembling a gear 2 and a rack 3, the gear 2 is used as a driven part, the rack 3 is used as a driving part to form a gear and rack transmission mechanism, the rack 3 penetrates through the front side or the rear side of the fixing device 1 and horizontally arranged and horizontally moved, and the rack 3 is provided with a limiting device to prevent the rack 3 from falling off in the transmission process;
the upper part of a rotating shaft 4 which is fixedly connected with the gear 2 integrally penetrates through an upper side limiting hole of the fixing device 1, so that the top end of the rotating shaft 4 is higher than the upper surface of the fixing device 1, a rotating sample table is formed on the top end surface of the rotating shaft 4, and a three-dimensional atom probe micro-tip array sample is placed; the lower part of the rotating shaft 4 is arranged in the box body of the fixing device 1, so that the lower part of the rotating shaft 4 is rotatably connected with the bottom of the box body;
the gear 2 is arranged to rotate in a horizontal plane, so that the rotating shaft 4 is driven to rotate horizontally; the rotary sample stage device is integrally placed in a three-dimensional atom probe instrument, three-dimensional atom probe micro-tip array samples are placed on the surface of the top end of the rotating shaft 4, after one group of samples on the three-dimensional atom probe micro-tip array are measured, the three-dimensional atom probe micro-tip array samples do not need to be taken out of the three-dimensional atom probe instrument when the other group of samples are tested, the gear 2 can be driven to rotate only by pushing the rack 3 through a sample rod in the three-dimensional atom probe instrument, then the rotating shaft 4 and the micro-tip array samples on the rotating shaft 4 are driven to rotate, and the test can be continued after the required angle position is reached.
The rotating sample table capable of realizing three-dimensional atom probe microtip array sample rotation comprises a fixing device 1 which is hollow and provided with a limiting hole. The rack 3, the gear 2 and the rotating shaft 4 can be assembled together through the gear, and the gear, the gear and the rotating shaft play a role of limiting assembly. The rack 3 is a force application device and is assembled with the gear 2, and the limit is carried out by a fixing device. The gear 2 is placed in the fixing device 1, assembled with the gear 2, and connected with the rotation shaft 4 at the same time, and when the gear 2 rotates, the rotation shaft 4 can follow the rotation. The rotating shaft 4 and the gear 2 are assembled and connected in an interference fit mode. The three-dimensional atom probe microtip array sample can be placed at the top end of the rotating shaft 4. The rotating sample table device capable of realizing the rotation of the three-dimensional atom probe microtip array sample can drive the rotating shaft through the transmission of the gear and the rack, can realize the rotation of the microtip array sample, and can enable the nanometer needle tip array to realize the rotation of 180 degrees or other required angles in the three-dimensional atom probe instrument.
Example two
This embodiment is substantially the same as the first embodiment, and is characterized in that:
in this embodiment, the rack 3 has a length of 14 to 15mm, a width of 4 to 8mm, and a modulus of 1mm. The rack 3 is rectangular and is meshed with the gear 2, when the gear 2 and the rotating shaft 4 are assembled together and are assembled in the fixing device 1, a certain distance exists between the gear 2 and one end of the fixing device 1, the distance is used for limiting the rack 3, the rack 3 is a force application device and is assembled together with the gear 2, and limiting devices are arranged at two ends of the rack 3 to prevent the rack from falling off in the transmission process.
In the embodiment, the thickness of the gear 2 is 4-5 mm, the diameter of the reference circle is 12mm, the number of teeth is 12, the modulus is 1mm, and the center of the gear 2 is provided with a hole with the diameter not less than 2mm for fixing and assembling with the rotating shaft 4. The gear 2 is assembled with the rotating shaft 4 by means of a limiting hole in the fixing device 1.
In the embodiment, the length of the transmission shaft 4 is 9-11 mm, and the diameter is not less than 2mm. The rotating shaft 4 and the gear 2 are in interference fit, are assembled in a limiting hole in the fixing device 1 and are assembled together with the gear, and the transmission shaft and the gear are in interference fit. The atom probe microtip array sample can be placed on the upper end of the rotating shaft 4.
In this embodiment, the fixing device 1 is a hollow box-type structure device in a rectangular parallelepiped shape, and has a length of 17-19mm, a width of 17-19mm, a height of 7-9 mm, and a box wall thickness of 1-2 mm. The fixing device 1 is provided with limiting holes at the upper and lower parts, the diameter of the limiting hole is not less than 2mm, and the fixing device is used for assembling and limiting the rotating shaft 4. The fixing device 1 is provided with a limiting hole to limit the rotating shaft.
In this embodiment, a fixing shaft 5 having a diameter of not less than 2mm and a length of 7 to 10mm is fixedly connected to a lower side of the fixing device 1, and the fixing device 1 is placed on a sample stage of a three-dimensional atomic probe instrument by the fixing shaft 5. The fixed shaft 5 and the rotating shaft 4 are arranged in a staggered mode.
In this embodiment, the fixing device 1, the gear 2, the rack 3, the rotating shaft 4 and the related parts are made of any one of aluminum and copper, or an alloy thereof.
The device can realize 180-degree rotation of the microtip array and the rotation angle is controllable and adjustable, which cannot be realized by the conventional microtip array sample stage; the device of the embodiment has the advantages of simple structure, convenience in processing and low maintenance cost, and can realize required functions only by means of simple gear transmission.
EXAMPLE III
This embodiment is substantially the same as the above embodiment, and is characterized in that:
in this embodiment, the fixing device 1 is a hollow box-type structure device having a rectangular parallelepiped shape, in which the front and rear sides of the box are open to form a circular rectangular parallelepiped shape, and the rack 3 moves in the front and rear direction of the box. The fixing device 1 is simple in structure, saves materials, facilitates installation and maintenance of the gear 2, the rack 3 and the rotating shaft 4, and is convenient to use.
Example four
This embodiment is substantially the same as the above embodiment, and is characterized in that:
in this embodiment, the parts assembly steps are as follows: the central hole of the gear 2 is aligned with the limiting hole of the fixing device 1, then the rotating shaft 4 is inserted into the limiting hole and the central hole, and the limiting hole is in clearance fit with the rotating shaft 4 to realize rotation of the rotating shaft. And the rotating shaft 4 and the gear 2 are in interference fit, so that the gear 2 drives the rotating shaft 4 to rotate. Because fixing device 1 is opened from top to bottom and is had spacing hole, can restrict the dislocation about axis of rotation 4, and gear 2 places fixing device, can restrict dislocation about gear 2, is interference fit between axis of rotation 4 and the gear 2, can realize based on above that gear 2 can not misplace with axis of rotation 4 in fixing device 1. After the gear 2, the rotating shaft 4 and the fixing device 1 are assembled, a certain gap is reserved between the gear 2 and one end of the fixing device 4, and the rack 3 can be assembled with the gear 2 by means of the gap and has a limiting effect. And at this point, the assembly of the rotary sample table is finished. The three-dimensional atom probe micro-tip array sample is fixed at the upper end of a rotating shaft 4 and is placed and fixed on a three-dimensional atom probe common sample table by a fixing shaft 5 at the lower end of a fixing device 1. After the instrument is put in, after a group of samples on the nanometer needle point array are measured, the instrument does not need to be taken out when the other group is measured, the gear 2 can be driven to rotate only by pushing the rack 3 by a sample rod in the atomic probe instrument, then the rotating shaft 4 and the microtip array sample on the rotating shaft are driven to rotate, and the test can be continued after the rotation of 180 degrees.
Firstly, grinding a sample to be tested to the requirement of FIB cutting, welding nano needle point samples to a micro-tip array platform after the nano needle point samples are prepared by the FIB cutting, wherein two groups of micro-tip array sample platforms are provided, 11 nano needle point samples can be placed in each group, and as shown in figure 5, the micro-tip array samples prepared by the FIB can be fixed at the upper end of a rotating shaft on a rotating sample platform.
After the microtip array sample is placed on the rotating shaft 4, the rotating sample table is placed on a common three-dimensional atom probe sample table, then the three-dimensional atom probe sample table is sent into a first chamber of a three-dimensional atom probe, after the three-dimensional atom probe sample table is pre-vacuumized for 6 hours, the sample table is moved into a second chamber, and after the sample table waits for several minutes, the three-dimensional atom probe sample table is placed into an analysis chamber for analysis, as shown in fig. 6.
After the test of the nano needle point samples on the first group of the micro-tip array samples is finished, the sample rod is used for pushing the rack 3 on the rotary sample table, the rack 3 drives the gear 2 to rotate, then the rotary shaft 4 and the micro-tip array samples on the rotary shaft 4 are driven, the micro-tip array samples are rotated, and after the micro-tip array samples are rotated to a proper angle, the follow-up analysis of the needle points is carried out.
In summary, due to the problem of the design of the laser mode optical path of the three-dimensional atom probe, the micro-tip array sample cannot be simultaneously analyzed in large quantities, a sample table capable of rotating freely needs to be designed, and the rotating sample table device capable of placing the three-dimensional atom probe micro-tip array sample in the embodiment can improve the experimental efficiency. The rotary sample table mainly comprises a fixing device 1, a rack 2, a gear 3 and a rotating shaft 4. The three-dimensional atom probe microtip array platform is provided with four rows of needle tip arrays, and the nano needle tips on the four rows of arrays can not finish analysis in the same batch due to the problem that the needle tips shield laser mutually during analysis, and the other two rows can be analyzed after the two rows are analyzed by rotating 180 degrees. The device of the embodiment can drive the rotating shaft 4 through the transmission of the gear 2 and the rack 3, can realize the rotation of the microtip array sample, and can realize the rotation on the premise of not taking the microtip array sample out of the device, thereby greatly improving the testing efficiency.
The embodiments of the present invention have been described with reference to the accompanying drawings, but the present invention is not limited to the embodiments, and various changes and modifications can be made according to the purpose of the invention, and any changes, modifications, substitutions, combinations or simplifications made according to the spirit and principle of the technical solution of the present invention shall be equivalent substitutions, as long as the purpose of the present invention is met, and the present invention shall fall within the protection scope of the present invention without departing from the technical principle and inventive concept of the present invention.
Claims (8)
1. The utility model provides a can realize little sharp array sample pivoted of three-dimensional atom probe and rotate sample platform device, includes fixing device (1), rack and pinion transmission, its characterized in that: the fixing device (1) is a hollow box type structure device, the fixing device (1) is arranged on a sample platform of a three-dimensional atomic probe instrument, a limiting hole is formed in the upper side of the hollow box type structure device, the gear rack transmission device is formed by meshing, connecting and assembling a gear (2) and a rack (3), the gear (2) is used as a driven part, the rack (3) is used as a driving part to form a gear rack transmission mechanism, the rack (3) penetrates through the front side or the rear side of the fixing device (1) and is horizontally arranged and horizontally moved, and the rack (3) is provided with a limiting device to prevent the rack (3) from falling off in the transmission process;
the upper part of a rotating shaft (4) which is fixedly connected with the gear (2) integrally penetrates through an upper side limiting hole of the fixing device (1), so that the top end of the rotating shaft (4) is higher than the upper surface of the fixing device (1), a rotating sample table is formed on the top end surface of the rotating shaft (4), and a three-dimensional atom probe micro-tip array sample is placed; the lower part of the rotating shaft (4) is arranged in the box body of the fixing device (1), so that the lower part of the rotating shaft (4) is rotatably connected with the bottom of the box body;
the gear (2) is arranged to rotate in a horizontal plane, so that the rotating shaft (4) is driven to rotate horizontally; the rotary sample stage device is integrally placed in a three-dimensional atom probe instrument, a three-dimensional atom probe micro-tip array sample is placed on the top end surface of a rotating shaft (4), after a group of samples on the three-dimensional atom probe micro-tip array are measured, the three-dimensional atom probe micro-tip array sample does not need to be taken out of the three-dimensional atom probe instrument when another group of samples are tested, a sample rod in the three-dimensional atom probe instrument is only used for pushing a rack (3) to drive a gear (2) to rotate, then the rotating shaft (4) and the micro-tip array sample on the rotating shaft (4) are driven to rotate, and after the sample rod is rotated to a required angle position, the test can be continued.
2. The apparatus for rotating the sample stage according to claim 1, wherein the apparatus comprises: the length of the rack (3) is 14 to 15mm, the width is 4 to 8mm, and the modulus is 1mm.
3. The rotary sample stage device capable of realizing the rotation of the three-dimensional atom probe microtip array sample as claimed in claim 1, wherein: the thickness of the gear (2) is 4 to 5mm, the diameter of a reference circle is 12mm, the number of teeth is 12, the modulus is 1mm, and a hole with the diameter not smaller than 2mm is formed in the center of the gear (2) and used for being fixedly assembled with the rotating shaft (4).
4. The apparatus for rotating the sample stage according to claim 1, wherein the apparatus comprises: the length of the transmission shaft (4) is 9 to 11mm, and the diameter is not less than 2mm.
5. The rotary sample stage device capable of realizing the rotation of the three-dimensional atom probe microtip array sample as claimed in claim 1, wherein: the fixing device (1) is a cuboid hollow box type structure device, the length is 17-19mm, the width is 17-19mm, the height is 7-9 mm, and the thickness of the box body wall is 1-2 mm.
6. The apparatus for rotating the sample stage according to claim 1, wherein the apparatus comprises: fixing device (1) is the device of the cavity box body formula structure of cuboid shape, and wherein both sides open around the box, form the annular cuboid shape, rack (3) remove along the box fore-and-aft direction.
7. The rotary sample stage device capable of realizing the rotation of the three-dimensional atom probe microtip array sample as claimed in claim 1, wherein: a fixed shaft (5) with the diameter not less than 2mm and the length of 7-10 mm is fixedly connected to one side of the lower portion of the fixing device (1), and the fixing device (1) is placed on a sample platform of the three-dimensional atom probe instrument through the fixed shaft (5).
8. The rotary sample stage device capable of realizing the rotation of the three-dimensional atom probe microtip array sample as claimed in claim 7, wherein: the fixed shaft (5) and the rotating shaft (4) are arranged in a staggered manner.
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| CN105891116A (en) * | 2016-06-27 | 2016-08-24 | 佛山市南海区欧谱曼迪科技有限责任公司 | Multi-focus confocal scanning microscopic system and method based on volume hologram record |
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| CN109324072A (en) * | 2017-07-28 | 2019-02-12 | 中国科学院苏州纳米技术与纳米仿生研究所 | The detection system and its detection method of high-throughput combined material chip |
| CN107677771A (en) * | 2017-09-15 | 2018-02-09 | 北京大学 | Ultrahigh vacuum cryogenic sample platform |
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| CN110857903A (en) * | 2018-08-23 | 2020-03-03 | 忻州市质量技术监督检验测试所（山西省法兰锻件产品质量监督检验中心） | Sampling knife for food detection |
| CN109346391A (en) * | 2018-08-26 | 2019-02-15 | 南京理工大学 | It is a kind of for loading the double-beam system sample stage of nearly local electrode |
| CN109239114A (en) * | 2018-09-29 | 2019-01-18 | 胜科纳米（苏州）有限公司 | Multifunctional sample platform |
| CN109307784A (en) * | 2018-10-12 | 2019-02-05 | 南京理工大学 | A kind of preparation method of the semiconductor needle point sample for three-dimensional atom probe detection |
| CN209992257U (en) * | 2019-02-27 | 2020-01-24 | 南京理工大学 | Axial rotating device |
| CN110082567A (en) * | 2019-04-22 | 2019-08-02 | 南京理工大学 | A kind of method of rotary preparation three-dimensional atom probe sample |
| CN110596427A (en) * | 2019-08-15 | 2019-12-20 | 南京理工大学 | Method for preparing three-dimensional atom probe sample on powder particles |
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| CN110987995A (en) * | 2019-12-26 | 2020-04-10 | 重庆大学 | Universal sample holder for scanning electron microscope, in-situ mechanical test and three-dimensional atom probe equipment |
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