CN112981479A - Spray head for micro electro-deposition processing and micro electro-deposition processing device - Google Patents
Spray head for micro electro-deposition processing and micro electro-deposition processing device Download PDFInfo
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- CN112981479A CN112981479A CN202110169264.XA CN202110169264A CN112981479A CN 112981479 A CN112981479 A CN 112981479A CN 202110169264 A CN202110169264 A CN 202110169264A CN 112981479 A CN112981479 A CN 112981479A
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- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D5/00—Electroplating characterised by the process; Pretreatment or after-treatment of workpieces
- C25D5/08—Electroplating with moving electrolyte e.g. jet electroplating
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B33—ADDITIVE MANUFACTURING TECHNOLOGY
- B33Y—ADDITIVE MANUFACTURING, i.e. MANUFACTURING OF THREE-DIMENSIONAL [3-D] OBJECTS BY ADDITIVE DEPOSITION, ADDITIVE AGGLOMERATION OR ADDITIVE LAYERING, e.g. BY 3-D PRINTING, STEREOLITHOGRAPHY OR SELECTIVE LASER SINTERING
- B33Y30/00—Apparatus for additive manufacturing; Details thereof or accessories therefor
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Abstract
The invention provides a spray head for micro electro-deposition processing, which comprises: the anode is inserted into a first interface of the three-way adapter, the nozzle is inserted into a second interface of the three-way adapter, and a third interface of the three-way adapter is used for inserting the liquid supply pipe; the inner flow passage of the nozzle is reduced in a multi-stage step mode towards the liquid outlet direction, one end of the anode is connected with the inner wall of the first connector, the other end of the anode extends into the nozzle, and a certain distance is reserved between the end, extending into the nozzle, of the anode and the inner wall of the nozzle. The invention also provides a micro electro-deposition processing device. The invention can solve the problem that the touch nozzle is easily blocked by-products when the tubular electrodeposition nozzle is processed, and meanwhile, the stepped internal flow passage structure can solve the problem that the tapered electrodeposition nozzle cannot accurately control the size and the wall thickness of the inner diameter, thereby reducing the processing cost.
Description
Technical Field
The invention relates to the technical field of micro electrochemical machining, in particular to a spray head for micro electro-deposition machining and a micro electro-deposition machining device.
Background
Electrodeposition is a metal additive manufacturing technology based on the principle of electrochemical cathode deposition, and compared with other metal additive manufacturing technologies such as laser additive manufacturing, electron beam additive manufacturing, electric arc additive manufacturing and the like, subsequent annealing and homogenization heat treatment are not needed, and residual stress is avoided. In theory, metal atoms or crystal grains formed by redox reaction are induced to be controllably stacked according to design purpose, and the metal base structure and the part with any shape can be processed or printed by utilizing the electrodeposition technology.
With the development of scientific technology, people further research in the micro world. Various micro-sized micro-structural parts with millimeter and micron or even nanometer level play more and more important roles in the fields of national defense and military, aerospace, new energy, new materials, biomedicine, semiconductor devices and the like. The realization of the micro-machining of micro-scale microstructure parts is an important development direction which is concerned by the manufacturing industry at present, and a 3D printing technology, namely an electrochemical printing technology, which uses micro-electrodeposition to perform micro-structure metal parts is utilized, and a nozzle is utilized to restrain an electric field, so that a high-resolution complex structure can be printed.
The current spray heads applied to micro electro-deposition processing mainly comprise a tubular spray head and a conical spray head, but the tubular spray head and the conical spray head have certain limitations when being applied: for example, CN109778244A discloses a device for manufacturing a 3D fine metal additive by spray electrodeposition, which adopts a nozzle as a tubular nozzle, and can realize flow rate adjustment by adjusting the position of an anode, but the tubular nozzle cannot well discharge gas byproducts generated in the processing process, and gas is easily accumulated near the anode and the liquid outlet of the nozzle to hinder processing; for example, CN210856367U discloses a nozzle for spray electrodeposition, which provides a nozzle body with a tapered flow passage, and although there is no problem of easy clogging of the nozzle head, the processing is complicated, the tapered nozzle has difficulty in precisely controlling the size and wall thickness of the inner diameter, and the processing cost is high.
Disclosure of Invention
The invention aims to overcome the problems that in the prior art, a tubular spray head has a problem that a nozzle is easy to block by-products of processing so as to obstruct processing, and a conical spray head has a defect that the size and the wall thickness of a flow channel cannot be accurately controlled so as to cause high processing cost, and provides a spray head for micro electro-deposition processing and a micro electro-deposition processing device. The invention can ensure that the processing by-product floats upwards in enough space without influencing the electro-deposition processing, and simultaneously, the flow passage in the nozzle is gradually reduced in a step manner, the size and the wall thickness of each step can be accurately controlled according to requirements, so that the processing of a casting mold is easy, and the processing cost is reduced.
In order to solve the technical problems, the invention adopts the technical scheme that:
a showerhead for a microdeposition process, comprising: the anode is inserted into a first interface of the three-way adapter, the nozzle is inserted into a second interface of the three-way adapter, a third interface of the three-way adapter is used for inserting a liquid supply pipe, the first interface is positioned at the upper end of the three-way adapter, the second interface is positioned at the lower end of the three-way adapter, and the first interface and the second interface are opposite; the inner flow passage of the nozzle is reduced in a multi-stage step mode towards the liquid outlet direction, one end of the anode is connected with the inner wall of the first connector, the other end of the anode extends into the nozzle, and a certain distance is reserved between the end, extending into the nozzle, of the anode and the inner wall of the nozzle.
Therefore, the inner flow passage of the nozzle which is reduced in a multistage step-type manner is not reduced gradually, but is suddenly changed in a step-type manner, and the design can ensure that enough clearance is still left between the anode and the inner wall of the nozzle on the premise that the inner diameter of the liquid outlet of the nozzle is dozens of microns, so that bubbles can smoothly float upwards, and further the smooth processing is ensured.
Furthermore, each stepped cross section of the flow passage in the nozzle is circular, and the circle centers of the stepped cross sections are positioned on the same straight line. Therefore, the size of the cross section circle of each step of the nozzle can be accurately controlled within one value according to design requirements, the circle centers of the cross sections of the internal flow channels are positioned on the same straight line, no requirement is determined on the external shape, the size meets the design requirements, the technical effect can be achieved, the problems that the machining precision and the wall thickness of the tapered nozzle are difficult to master when the continuous reducing diameter of the tapered nozzle is processed are solved, the machining is convenient when each step of the internal flow channel of the nozzle is processed, and the machining cost is reduced; meanwhile, the inner flow channel of the nozzle is a smooth reducing cylindrical flow channel from the liquid outlet to the bottom and the top, has no corner, and is not easy to be blocked when bubbles float upwards.
Furthermore, the tail end of the liquid outlet of the nozzle is in a capillary shape, the length of the tail end of the capillary shape is 0.5mm-5mm, the inner diameter of the liquid outlet of the nozzle is 10 μm-500 μm, and the nozzle is made of corrosion-resistant materials. Like this, the nozzle can be applicable to the electrodeposition reaction of different working liquids, and is not fragile, and the control of nozzle end capillary form length can guarantee the course of working, and working electrode provides stronger electric field for the reaction within the certain distance under equal voltage, improves deposition rate, and the internal diameter control of liquid outlet can provide the necessary passageway of deposition reaction for the working liquid simultaneously, guarantees that the reaction sequence normally goes on to be convenient for adjust the speed of electrodeposition reaction sequence.
Furthermore, the positive pole comprises first cylinder and the second cylinder of different diameters, first cylinder is connected with the inner wall of first interface, inside the nozzle was stretched into to the second cylinder, second cylinder diameter was less than first cylinder, and the axis of first cylinder and second cylinder and the centre of a circle of each ladder cross-section of the inside runner of nozzle are in same straight line. Therefore, the anode can be ensured to be positioned on the central shaft of the nozzle internal flow passage, the distance between the anode second cylinder and each step inner wall of the nozzle internal flow passage is the same, and the passing effect of byproducts such as bubbles generated at any part is not influenced.
Furthermore, the diameter of the second anode cylinder is 1-3 times of the inner diameter of the liquid outlet of the nozzle, and the distance between the end of the second anode cylinder, which extends into the nozzle, and the inner side wall of the nozzle is 1-5 times of the diameter of the second anode cylinder. Like this, along with the continuation of reaction going on, the bubble that the positive pole produced grows up constantly, and the bubble can not cut off the electric field because the distance between nozzle inner wall and the positive pole is too little, and the distance of the second cylinder end of positive pole and negative pole can provide stronger electric field for the reaction under equal voltage, improves deposition rate.
Further, the material of the anode is an inert metal or the same as the deposition metal during the electrodeposition process.
The present invention also provides a micro electro-deposition processing apparatus, comprising: the base is located motion platform on the base fixes the liquid bath on the motion platform, places in the negative pole at liquid bath middle part, installs on the base and is located the removal support of liquid bath top is fixed in the shower nozzle anchor clamps on the removal support, connects the shower nozzle that is used for fine electro-deposition to process on the shower nozzle anchor clamps is used for the power of the positive pole power supply of negative pole and shower nozzle, and is used for connecting the feed liquid system of feed pipe on the shower nozzle.
Furthermore, the spray head for micro electro-deposition processing is fixed on the spray head fixture through a screw and a nut, the negative electrode of the power supply is electrically connected with the negative electrode of the power supply, the positive electrode of the power supply is electrically connected with the anode of the spray head for micro electro-deposition processing, the working liquid is pumped into the liquid supply pipe by the liquid supply system, and the working liquid reaches the spray head for micro electro-deposition processing through the liquid supply pipe. Therefore, before processing, the nozzle and the liquid supply pipe are filled with working liquid, the liquid supply system provides fresh working liquid for electrodeposition processing, the working liquid flows through the liquid supply pipe, the three-way adapter and the nozzle and finally flows to the cathode, metal ions obtain electrons on the cathode and become metal atoms, and the metal atoms are deposited on the cathode, so that a three-dimensional structure is deposited.
Furthermore, the liquid supply system comprises an injector and a micro-injection pump, and the injector is clamped on a push-pull clamping seat of the micro-injection pump. Like this, provide power through the micro-injection pump, fresh working solution is constantly accurately pumped into to the syringe, realizes meticulous electro-deposition processing, guarantees simultaneously that the electro-deposition course of working goes out the liquid rate stably.
Further, the motion platform can realize XY axle removal, the movable support can realize Z axle removal. Therefore, when the micro electro-deposition processing is carried out, the structure and the shape of the electro-deposition workpiece can be adjusted from 3 dimensions, and the low-speed operation stability is ensured.
Compared with the prior art, the invention has the beneficial effects that:
(1) according to the invention, the second cylinder of the anode is extended into the nozzle, the tail end of the second cylinder of the anode is spaced from the inner wall of the nozzle by a certain distance, and the inner flow passage of the nozzle which is reduced in a multi-step manner is in a step-shaped sudden change, so that the processing by-product bubbles can not be gathered near the anode or adhered to the side wall in the processing process, and can smoothly float upwards without hindering processing.
(2) The stepped sections of the internal flow passage of the nozzle are circular, the circle centers of the sections of the internal flow passage are positioned on the same straight line, the numerical value of the section circle can be accurately controlled within one numerical value, no requirement is determined on the external shape, the processing difficulty is greatly reduced, the problem that the processing precision and the wall thickness of the tapered nozzle are difficult to master is solved, and the processing cost is reduced.
Drawings
FIG. 1 is a schematic view of the entire showerhead for a micro electrodeposition process according to the present invention.
Fig. 2 is a partially enlarged view of a portion a in fig. 1.
FIG. 3 is a schematic view of the entire structure of the microdeposition processing apparatus of the present invention.
The graphic symbols are illustrated as follows:
1-anode, 2-three-way adapter, 3-liquid supply tube, 4-power supply, 5-nozzle, 6-movable support, 7-injector, 8-micro injection pump, 9-moving platform, 10-spray head clamp, 11-screw, 12-nut, 13-liquid pool, 14-cathode, and 15-base.
Detailed Description
The present invention will be further described with reference to the following embodiments. Wherein the showings are for the purpose of illustrating the invention only and not for the purpose of limiting the same, and in which there is shown by way of illustration only and not in the drawings in which there is no intention to limit the invention thereto; to better illustrate the embodiments of the present invention, some parts of the drawings may be omitted, enlarged or reduced, and do not represent the size of an actual product; it will be understood by those skilled in the art that certain well-known structures in the drawings and descriptions thereof may be omitted.
The same or similar reference numerals in the drawings of the embodiments of the present invention correspond to the same or similar components; in the description of the present invention, it should be understood that if there is an orientation or positional relationship indicated by the terms "upper", "lower", etc. based on the orientation or positional relationship shown in the drawings, it is only for convenience of describing the present invention and simplifying the description, but it is not intended to indicate or imply that the referred device or element must have a specific orientation, be constructed in a specific orientation and be operated, and therefore, the terms describing the positional relationship in the drawings are only used for illustrative purposes and are not to be construed as limiting the present invention, and the specific meaning of the above terms will be understood by those skilled in the art according to specific situations.
The following detailed description of specific embodiments of the invention refers to the accompanying drawings.
Example 1
As shown in fig. 1 and 2, a showerhead for a micro electro deposition process includes: the three-way adapter comprises a three-way adapter 2, a nozzle 5 and an anode 1, wherein the anode 1 is inserted into a first interface at the upper end of the three-way adapter 2, the nozzle 5 is inserted into a second interface at the lower end of the three-way adapter 2, a third interface of the three-way adapter 2 is used for inserting a liquid supply pipe 3, the first interface is positioned at the upper end of the three-way adapter 2, the second interface is positioned at the lower end of the three-way adapter 2, and the first interface and the second interface are; the internal flow passage of the nozzle 5 is reduced in a multistage step mode towards the liquid outlet direction, one end of the anode 1 is connected with the inner wall of the first connector, the other end of the anode 1 extends into the nozzle 5, and a certain distance is reserved between one end of the anode 1 extending into the nozzle 5 and the inner wall of the nozzle 5.
Like this, the nozzle 5 internal flow path that is multistage cascaded and dwindles does not dwindle gradually, but the echelonment sudden change, and such design can guarantee still to leave sufficient clearance for between the positive pole 1 and the nozzle 5 inner wall under the prerequisite of nozzle 5 liquid outlet internal diameter tens of microns, can guarantee that the bubble floats up smoothly, and then ensures that processing goes on smoothly.
In this embodiment, each stepped cross section of the internal flow passage of the nozzle 5 is circular, and the centers of the stepped cross sections are located on the same straight line. Therefore, the size of the cross section circle of each step of the nozzle 5 can be accurately controlled within one value according to the design requirement, the circle centers of the cross sections of the internal flow passage are positioned on the same straight line, the external shape is not required to be determined, the size meets the design requirement, the technical effect can be achieved, the problems that the machining precision and the wall thickness of the tapered nozzle are difficult to master are solved, each step of the internal flow passage of the nozzle 5 is convenient to machine, and the machining cost is low; meanwhile, the inner flow channel of the nozzle 5 is a smooth reducing cylindrical flow channel from the liquid outlet to the bottom and the top, has no corner, and is not easy to be blocked when bubbles float upwards.
In this embodiment, the end of the nozzle 5 where the liquid outlet is located is in the shape of a capillary, the length of the capillary end is 3mm, the inner diameter of the liquid outlet of the nozzle 5 is 200 μm, and the nozzle 5 is made of a corrosion-resistant material. Like this, nozzle 5 can be applicable to the electrodeposition reaction of different working liquids, and is not fragile, and 5 terminal capillary form length control of nozzle have guaranteed in the course of working, and working electrode guarantees within the certain distance, under equal voltage, for the reaction provides stronger electric field, improve deposition rate, and the internal diameter control of liquid outlet can provide the necessary passageway of deposition reaction for the working liquid simultaneously, ensures that the reaction sequence normally goes on.
In this embodiment, the anode 1 is composed of a first cylinder and a second cylinder with different diameters, the first cylinder is connected with the inner wall of the first interface, the second cylinder extends into the nozzle 5, the diameter of the second cylinder is smaller than that of the first cylinder, and the axial lines of the first cylinder and the second cylinder and the circle center of each step section of the internal flow passage of the nozzle 5 are located on the same straight line. Thus, the anode 1 is ensured to be positioned on the central axis of the internal flow passage of the nozzle 5, the distance between the second cylinder of the anode 1 and the inner wall of each step of the internal flow passage of the nozzle 5 is the same, and the passing effect of byproducts such as bubbles generated at any part is not influenced.
In this embodiment, the diameter of the second cylinder of the anode 1 is 2 times the inner diameter of the liquid outlet of the nozzle 5, and the distance between the end of the second cylinder of the anode 1 extending into the nozzle 5 and the inner side wall of the nozzle 5 is 2 times the diameter of the second cylinder of the anode 1. Therefore, along with the continuous progress of the reaction, bubbles generated by the anode 1 continuously grow, the bubbles cannot cut off an electric field because the distance between the inner wall of the nozzle 5 and the anode 1 is too small, and the distance between the tail end of the second cylinder of the anode 1 and the cathode 14 provides a stronger electric field for the reaction under the same voltage, so that the deposition rate is improved.
In this embodiment, the material of the anode 1 is an inert metal or the same as the deposition metal in the electrodeposition process.
Example 2
This embodiment is similar to embodiment 1, except that in this embodiment, the end of the liquid outlet of the nozzle 5 is capillary-shaped, the length of the end is 5mm, and the inner diameter of the liquid outlet of the nozzle 5 is 500 μm. The diameter of the second cylindrical end of the anode 1 extending into the nozzle 5 is 3 times of the inner diameter of the liquid outlet of the nozzle 5, and the distance between the second cylindrical end of the anode 1 and the inner wall of the nozzle 5 is 1 time of the diameter of the second cylindrical end of the anode 1. The structure and operation principle of the other parts of this embodiment are the same as those of embodiment 1.
Example 3
This embodiment is similar to embodiment 1, except that in this embodiment, the end of the liquid outlet of the nozzle 5 is capillary-shaped, the length of the end is 0.5mm, and the inner diameter of the liquid outlet of the nozzle 5 is 10 μm. The diameter of the second cylindrical end of the anode 1 extending into the nozzle 5 is 1 time of the inner diameter of the liquid outlet of the nozzle 5, and the distance between the second cylindrical end of the anode 1 and the inner wall of the nozzle 5 is 5 times of the diameter of the second cylindrical end of the anode 1. The structure and operation principle of the other parts of this embodiment are the same as those of embodiment 1.
Example 4
As shown in fig. 3, a micro electro deposition processing apparatus includes: the device comprises a base 15, a moving platform 9 arranged on the base 15, a liquid pool 13 fixed on the moving platform 9, a cathode 14 placed in the middle of the liquid pool 13, a moving support 6 installed on the base 15 and positioned above the liquid pool 13, a spray head fixture 10 fixed on the moving support 6, a spray head connected to the spray head fixture 10 and used for micro electro-deposition processing, a power supply 4 used for supplying power to the cathode 14 and an anode 1 of the spray head, and a liquid supply system used for connecting a liquid supply pipe 3 of the spray head.
In this embodiment, the nozzle for micro electro-deposition processing is fixed to the nozzle holder 10 by the screw 11 and the nut 12, the negative electrode of the power supply 4 is electrically connected to the negative electrode 14, the positive electrode of the power supply 4 is electrically connected to the positive electrode 1 of the nozzle for micro electro-deposition processing, the liquid supply system pumps the working liquid into the liquid supply tube 3, and the working liquid reaches the nozzle for micro electro-deposition processing through the liquid supply tube. Therefore, before machining, the nozzle 5 and the liquid supply pipe 3 are filled with working liquid, the liquid supply system provides fresh working liquid for electrodeposition machining, the working liquid flows through the liquid supply pipe 3, the three-way adapter 2 and the nozzle 5 and finally flows to the cathode 14, metal ions obtain electrons on the cathode 14 and become metal atoms, and the metal atoms are deposited on the cathode 14, so that a three-dimensional structure is deposited.
In this embodiment, the liquid supply system includes an injector 7 and a micro-injection pump 8, and the injector 7 is clamped on a push-pull clamping seat of the micro-injection pump 8. Like this, provide power through micro-injection pump 8, syringe 7 continuously goes into fresh working solution with working solution 6 accurate pump, realizes meticulous electrodeposition processing, guarantees simultaneously that electrodeposition processing process goes out the liquid rate stably.
In this embodiment, the motion platform can realize the XY axle and remove, and the movable support can realize the Z axle and remove. Therefore, when the micro electro-deposition processing is carried out, the structure and the shape of the electro-deposition workpiece can be adjusted from 3 dimensions, the control precision of the movement can reach 5 mu m, and the low-speed operation stability is ensured.
It should be understood that the above-described embodiments of the present invention are merely examples for clearly illustrating the present invention, and are not intended to limit the embodiments of the present invention. Other variations and modifications will be apparent to persons skilled in the art in light of the above description. And are neither required nor exhaustive of all embodiments. Any modification, equivalent replacement, and improvement made within the spirit and principle of the present invention should be included in the protection scope of the claims of the present invention.
Claims (10)
1. A showerhead for a microdeposition process, comprising: the device comprises a three-way adapter (2), a nozzle (5) and an anode (1), wherein the anode (1) is inserted into a first interface of the three-way adapter (2), the nozzle (5) is inserted into a second interface of the three-way adapter (2), and a third interface of the three-way adapter (2) is used for inserting a liquid supply pipe (3);
the device is characterized in that an internal flow passage of the nozzle (5) is reduced in a multi-stage step mode towards a liquid outlet direction, one end of the anode (1) is connected with the inner wall of the first connector, the other end of the anode extends into the nozzle (5), and a certain distance is reserved between one end of the anode (1) extending into the nozzle (5) and the inner wall of the nozzle (5).
2. The showerhead for microdeposition processing according to claim 1, wherein the first port is located at an upper end of the three-way joint (2), the second port is located at a lower end of the three-way joint (2), and the first port and the second port are opposite.
3. The showerhead for microdeposition processing according to claim 1, wherein the inner flow passage of the nozzle (5) has a circular cross-section in each step, and the center of the cross-section is aligned with the center of the cross-section.
4. The showerhead for microelectrodeposition processing according to claim 3, wherein the nozzle (5) is made of corrosion-resistant material, the end of the nozzle (5) where the liquid outlet is located is in the shape of a capillary, the length of the capillary end is 0.5mm to 5mm, and the inner diameter of the liquid outlet of the nozzle (5) is 10 μm to 500 μm.
5. The showerhead for microdeposition processing according to claim 4, wherein the anode (1) is composed of a first cylinder and a second cylinder having different diameters, the first cylinder is connected to an inner wall of the first port, the second cylinder extends into the nozzle (5), the second cylinder has a smaller diameter than the first cylinder, and the axes of the first cylinder and the second cylinder are aligned with the center of each step section of the flow channel inside the nozzle (5).
6. The showerhead for microelectrodeposition machining according to claim 5, wherein the diameter of the second cylinder of the anode (1) is 1 to 3 times the inner diameter of the liquid outlet of the nozzle (5).
7. The showerhead for microdeposition processing according to claim 6, wherein an end of the second cylinder of the anode (1) extending into the nozzle (5) is spaced from an inner sidewall of the nozzle (5) by a distance 1 to 5 times a diameter of the second cylinder of the anode (1).
8. The showerhead for a micro electro deposition process according to claim 7, wherein the material of the anode (1) is an inert metal or the same as a deposition metal during an electro deposition process.
9. A micro electro-deposition processing apparatus comprising: a base (15), a moving platform (9) arranged on the base (10), a liquid pool (13) fixed on the moving platform (9), a cathode (14) placed in the middle of the liquid pool (13), a moving support (6) installed on the base (15) and located above the liquid pool (13), a nozzle clamp (10) fixed on the moving support (6), a nozzle for micro electro-deposition machining according to any one of claims 1 to 8 connected to the nozzle clamp (10), a power supply (4) for supplying power to the cathode (14) and an anode (1) of the nozzle, and a liquid supply system for connecting the liquid supply pipe (3).
10. The microdeposition processing apparatus as claimed in claim 9, wherein the liquid supply system includes a syringe (7) and a micro syringe pump (8), and the syringe (7) is attached to a push-pull holder of the micro syringe pump (8).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110169264.XA CN112981479B (en) | 2021-02-07 | 2021-02-07 | Spray head for micro electro-deposition processing and micro electro-deposition processing device |
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|---|---|---|---|
| CN202110169264.XA CN112981479B (en) | 2021-02-07 | 2021-02-07 | Spray head for micro electro-deposition processing and micro electro-deposition processing device |
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| CN112981479B CN112981479B (en) | 2022-04-29 |
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Cited By (2)
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|---|---|---|---|---|
| CN113564650A (en) * | 2021-07-26 | 2021-10-29 | 广东工业大学 | Electrodeposition method and electrodeposition device |
| CN115976580A (en) * | 2022-12-27 | 2023-04-18 | 青岛理工大学 | Fine 3D circulation electrodeposition shower nozzle device and 3D printer |
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| CN113564650B (en) * | 2021-07-26 | 2022-07-26 | 广东工业大学 | Electrodeposition method and electrodeposition device |
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