CN105127528A - Coaxial electrolyte flushing method and device for array group electrode micro-hole electromachining - Google Patents
Coaxial electrolyte flushing method and device for array group electrode micro-hole electromachining Download PDFInfo
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- CN105127528A CN105127528A CN201510523510.1A CN201510523510A CN105127528A CN 105127528 A CN105127528 A CN 105127528A CN 201510523510 A CN201510523510 A CN 201510523510A CN 105127528 A CN105127528 A CN 105127528A
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Abstract
The invention discloses a coaxial electrolyte flushing device and method for array group electrode micro-hole electromachining. The coaxial electrolyte flushing device comprises a sealing cavity, array group electrodes, an electrolyte sealing cavity, an electrolyte groove, an insulating gasket and electromagnetic chucks. When the electrolyte sealing cavity is driven by a machine tool main shaft to move to be attached to the insulating gasket, an insulating cavity composed of the electrolyte sealing cavity, the insulating gasket and a workpiece to be machined is formed through the attraction function of the electromagnetic chucks; and the diameter of a single cathode of the array group electrodes is smaller than the diameter of a single hole in the workpiece to be machined, and an electrolyte sealing flow diversion cavity is formed through the cathodes and the corresponding holes. The coaxial electrolyte flushing method is simple and compact in structure, coaxial machining is conducted on micro holes through the array group electrodes, it is guaranteed electrolytes flow into the machining region along the side walls of the cathodes of the array group electrodes, the flowing speed of the electrolytes at different positions is consistent by keeping the pressure of the electrolyte sealing cavity consistent, machining stability and group control machining consistency can be improved, operation is convenient, and implementation is easy.
Description
Technical field
The present invention relates to EDM Technology field, belong to the special process, particularly relate to a kind of array group act on sets micro hole electric machining and coaxially rush liquid method and device.
Background technology
Along with the development of science and technology, and industrial circle is to the demand of product precise treatment, miniaturization, the miniaturization of machine components becomes the study hotspot in current manufacture field, and in biological medicine, the fields such as precision instrument and sensor manufacture have broad application prospects and important Research Significance.The processing and manufacturing that diameter dimension is less than the micro hole structure of 1mm is one of key technology realizing these targets.
The method realizing micro hole machining comprises machining process, special process method and combined machining method, and often kind of processing method differs from one another.Wherein, micro EDM, electrochemical micromachining technology belong to the noncontact processing method in special process method; without cutting force operation in processing; its processing is carried out with molecule or ionic means; material least unit is removed can reach below micron order; unique process principle, makes it in microfabrication, play unique advantage, and minute aperture processing is wherein a kind of application.In addition, EDM micro elements method can process high strength, high hardness material, obtains certain application in fields such as Aero-Space, Medical Devices, weaving, automobiles.
In recent years in order to improve the efficiency of EDM micro elements, researcher attempts adopting group act on sets to carry out the processing of group pore structure, as fine electric spark group hole machined, group hole mask electrochemical micromachining, process based on the multiple micro-holes of LIGA group act on sets, electric spark+electrolysis compound group hole machined etc.Be the material removal method of conducting medium based on electrolyte due to electric machining, in fine electric spark group hole machined, fresh working solution is difficult to enter, galvanic corrosion product can not be recycled working solution in time and take away, and easily attachment or double teeming are at surface of the work, forms arc discharge.In micro-electrochemical machining group hole machined, the electric conductivity of machining gap electrolyte inside directly affects efficiency, the stability of process, the uniformity of group's hole machined that material is removed.In the Electrolyzed Processing of group hole, because gap electrolyte inside flow behavior is comparatively difficult to ensure that card is consistent, along with the carrying out of cell reaction, in gap, zones of different electrolyte ion concentration is different gradually, electrolytic conductivity there occurs change, and finally causing material removing rate in zones of different different, the uniformity of processing stability and group's hole machined is deteriorated, and affects workpiece processing quality.
The present invention proposes a kind of array group act on sets micro hole electric machining and coaxially rushes liquid method and device, the method can ensure that electrolyte flows into machining area along tool cathode sidewall, be consistent by controlling electrolyte enclosed cavity pressure, the object that diverse location place electrolyte flow rate is consistent can be realized, the method can improve electric machining stability, group's hole machined uniformity, and easy to operate, easily realize.
Summary of the invention
The object of the invention is to solve the gap electrolyte flow rate existed in the electric machining of current array group hole different, speed removed by the zones of different material caused, the problems such as the rear group's hole dimension uniformity difference of processing, provide one and can improve electric machining stability, group's hole machined uniformity, and it is easy to operate, a kind of array group act on sets micro hole electric machining of easy realization coaxially rushes liquid method and device, the method can ensure that electrolyte flows into machining area along tool cathode sidewall, be consistent by controlling electrolyte enclosed cavity pressure, the object that diverse location place electrolyte flow rate is consistent can be realized.
The present invention is achieved through the following technical solutions above-mentioned purpose: a kind of array group act on sets micro hole electric machining coaxially rushes liquid device, comprise annular seal space, array group act on sets, electrolyte annular seal space, electrolytic bath, insulation spacer, upper end magnechuck and lower end magnechuck, the cathode terminal of described array group act on sets is provided with multiple single negative electrode in array distribution, described array group act on sets carries out clamping by electrolyte annular seal space, the cathode terminal of array group act on sets vertically down, immediately below array group act on sets, workpiece to be processed is set, the both sides, bottom of workpiece to be processed are fixed with lower end magnechuck, the upper end of workpiece to be processed is provided with insulation spacer, lower end magnechuck is fixed in electrolytic bath, the both sides, upper end of described electrolyte annular seal space are provided with the upper end magnechuck matched with described lower end magnechuck, the upper end of described electrolyte annular seal space is fixed on to drive on machine tool chief axis and by machine tool chief axis and moves up and down, and described electrolyte annular seal space moves to when fitting with insulation spacer and forms by the adhesive effect of upper end magnechuck and lower end magnechuck the insulated cavity be made up of electrolyte annular seal space, insulation spacer and workpiece to be processed, the single cathode diameter of described array group act on sets is less than the diameter in single hole on workpiece to be processed, forms electrolyte sealing branch chamber between the single hole that single negative electrode is corresponding with it.
Further, described electrolyte annular seal space comprises the first electrolyte annular seal space and the second electrolyte annular seal space, and described first electrolyte annular seal space and the second electrolyte annular seal space are positioned by alignment pin, and are bolted to connection.
Further, described upper end magnechuck and lower end magnechuck are powered by same magnechuck control power supply.
Further, the two ends, left and right of described electrolyte annular seal space are respectively equipped with electrolyte entrance and electrolyte outlet.
A kind of array group act on sets micro hole electric machining coaxially rushes liquid method, and the concrete steps of the method are as follows:
1) processing prepares array group act on sets in advance, and is arranged in electrolyte annular seal space by array group act on sets negative electrode, is clamped by electrolyte annular seal space; Electrolyte annular seal space is made up of the first electrolyte annular seal space and the second electrolyte annular seal space, and the first electrolyte annular seal space and the second electrolyte annular seal space are positioned by alignment pin and be bolted;
2) workpiece to be processed is installed in the electrolytic bath immediately below array group act on sets, and insulation spacer is set at workpiece to be processed, ensure that workpiece to be processed surface is parallel with place, the bottom surface plane of array group act on sets;
3) porch of electrolyte from electrolyte annular seal space is sent into, flow into processing district, connect the power supply of array group act on sets again, the entirety utilizing machine tool chief axis to drive array group act on sets and electrolyte annular seal space to be formed does feed motion downwards, goes out array hole in workpiece to be processed Surface Machining; Due to the characteristic of electric machining, the size of array hole is greater than the diameter dimension of array group act on sets negative electrode;
4) entirety utilizing machine tool chief axis to continue to drive array group act on sets and electrolyte annular seal space to be formed does low speed feed motion downwards, until the insulation spacer of electrolyte annular seal space surface contact workpiece to be processed upper surface, now stop the feeding of machine tool chief axis, and connect the power supply of magnechuck, by being installed on magnechuck on electrolyte annular seal space and being installed on the magnechuck adhesive of workpiece to be processed lower surface, form electrolyte between the negative electrode of array group act on sets and array hole and seal branch chamber;
5) when the power supply of lasting connection array group act on sets, electrolyte sealing branch chamber restriction electrolyte only can flow out from the gap connecting array group act on sets cathode side walls, and be ejected into workpiece to be processed surface, what realize workpiece to be processed capillary processing coaxially rushes liquid.
Beneficial effect of the present invention is: the present invention is simple and compact for structure, by array group act on sets, micro hole is coaxially processed, ensure that electrolyte flows into machining area along the cathode side walls of array group act on sets, be consistent by the pressure controlling electrolyte annular seal space, the electrolyte flow rate realizing diverse location place is consistent, the uniformity of the stability of processing, team control processing can be improved, and easy to operate, easily realize.
Accompanying drawing explanation
Fig. 1 is the structural representation that array group act on sets micro hole electric machining of the present invention coaxially rushes liquid device.
Fig. 2 is the sectional view that array group act on sets micro hole electric machining of the present invention coaxially rushes liquid device.
Detailed description of the invention
Below in conjunction with accompanying drawing, the invention will be further described:
As shown in Fig. 1 ~ 2, a kind of array group act on sets micro hole electric machining coaxially rushes liquid device, comprise array group act on sets 8, electrolyte annular seal space, electrolytic bath 3, insulation spacer 5, upper end magnechuck 7 and lower end magnechuck 6, the cathode terminal of array group act on sets 8 is provided with multiple single negative electrode in array distribution, array group act on sets 8 carries out clamping by electrolyte annular seal space, the cathode terminal of array group act on sets 8 vertically down, workpiece to be processed 4 is set immediately below array group act on sets 8, the both sides, bottom of workpiece to be processed 4 are fixed with lower end magnechuck 6, the upper end of workpiece to be processed 4 is provided with insulation spacer 5, lower end magnechuck 6 is fixed in electrolytic bath 3, the both sides, upper end of electrolyte annular seal space are provided with the upper end magnechuck 7 matched with lower end magnechuck 6, the upper end of electrolyte annular seal space is fixed on to drive on machine tool chief axis 9 and by machine tool chief axis 9 and moves up and down, and electrolyte annular seal space moves to when fitting with insulation spacer 5 and forms by upper end magnechuck 7 and the adhesive effect of lower end magnechuck 6 insulated cavity be made up of electrolyte annular seal space, insulation spacer 5 and workpiece to be processed 4, the single cathode diameter of array group act on sets 8 is less than the diameter in single hole on workpiece to be processed 4, forms electrolyte sealing branch chamber between the single hole that single negative electrode is corresponding with it.
Electrolyte annular seal space is comprised the first electrolyte annular seal space 1 and the second electrolyte annular seal space 2, first electrolyte annular seal space 1 and the second electrolyte annular seal space 2 and is positioned by alignment pin, and is bolted to connection.
Upper end magnechuck 7 and lower end magnechuck 6 control power supply by same magnechuck and power.
The two ends, left and right of electrolyte annular seal space are respectively equipped with electrolyte entrance and electrolyte outlet.
A kind of array group act on sets micro hole electric machining coaxially rushes liquid method, and the concrete steps of the method are as follows:
Processing in advance prepares array group act on sets 8, and is arranged in electrolyte annular seal space by array group act on sets 8 negative electrode, is clamped by electrolyte annular seal space; Electrolyte annular seal space is made up of the first electrolyte annular seal space 1 and the second electrolyte annular seal space 2, and the first electrolyte annular seal space 1 and the second electrolyte annular seal space 2 are positioned by alignment pin and be bolted;
Workpiece to be processed 4 is installed in the electrolytic bath 3 immediately below array group act on sets 8, and insulation spacer 5 is set at workpiece to be processed 4, ensure that workpiece to be processed 4 surface is parallel with place, the bottom surface plane of array group act on sets 8;
The porch of electrolyte from electrolyte annular seal space is sent into, flow into processing district, connect the power supply of array group act on sets 8 again, the entirety utilizing machine tool chief axis 9 to drive array group act on sets 8 and electrolyte annular seal space to be formed does feed motion downwards, goes out array hole in workpiece to be processed 4 Surface Machining; Due to the characteristic of electric machining, the size of array hole is greater than the diameter dimension of array group act on sets 8 negative electrode;
The entirety utilizing machine tool chief axis 9 to continue to drive array group act on sets 8 and electrolyte annular seal space to be formed does low speed feed motion downwards, until the insulation spacer 5 of electrolyte annular seal space surface contact workpiece to be processed 4 upper surface, now stop the feeding of machine tool chief axis 9, and connect the power supply of magnechuck, by being installed on magnechuck on electrolyte annular seal space and being installed on the magnechuck adhesive of workpiece to be processed 4 lower surface, form electrolyte between the negative electrode of array group act on sets 8 and array hole and seal branch chamber;
When the power supply of lasting connection array group act on sets 8, electrolyte sealing branch chamber restriction electrolyte only can flow out from the gap connecting array group act on sets 8 cathode side walls, and be ejected into workpiece to be processed 4 surface, what realize workpiece to be processed 4 capillary processing coaxially rushes liquid.
Wherein, the feed speed that in step 4, machine tool chief axis 9 drives the entirety of dynamic array group act on sets 8 and the formation of electrolyte annular seal space downward is 50 [mu; The machining voltage of array group act on sets 8 is 6V.
Above-described embodiment is preferred embodiment of the present invention; it is not the restriction to technical solution of the present invention; as long as without the technical scheme that creative work can realize on the basis of above-described embodiment, all should be considered as falling within the scope of the rights protection of patent of the present invention.
Claims (5)
1. an array group act on sets micro hole electric machining coaxially rushes liquid device, it is characterized in that: comprise array group act on sets (8), electrolyte annular seal space, electrolytic bath (3), insulation spacer (5), upper end magnechuck (7) and lower end magnechuck (6), the cathode terminal of described array group act on sets (8) is provided with multiple single negative electrode in array distribution, described array group act on sets (8) carries out clamping by electrolyte annular seal space, the cathode terminal of array group act on sets (8) vertically down, workpiece to be processed (4) is set immediately below array group act on sets (8), the both sides, bottom of workpiece to be processed (4) are fixed with lower end magnechuck (6), the upper end of workpiece to be processed (4) is provided with insulation spacer (5), lower end magnechuck (6) is fixed in electrolytic bath (3), the both sides, upper end of described electrolyte annular seal space are provided with the upper end magnechuck (7) matched with described lower end magnechuck (6), the upper end of described electrolyte annular seal space is fixed on machine tool chief axis (9) and goes up and moved up and down by machine tool chief axis (9) drive, and described electrolyte annular seal space moves to when fitting with insulation spacer (5) and forms by upper end magnechuck (7) and the adhesive effect of lower end magnechuck (6) insulated cavity be made up of electrolyte annular seal space, insulation spacer (5) and workpiece to be processed (4), the single cathode diameter of described array group act on sets (8) is less than the diameter in the upper single hole of workpiece to be processed (4), forms electrolyte sealing branch chamber between the single hole that single negative electrode is corresponding with it.
2. a kind of array group act on sets micro hole electric machining according to claim 1 coaxially rushes liquid device, it is characterized in that: described electrolyte annular seal space comprises the first electrolyte annular seal space (1) and the second electrolyte annular seal space (2), described first electrolyte annular seal space (1) and the second electrolyte annular seal space (2) are positioned by alignment pin, and are bolted to connection.
3. a kind of array group act on sets micro hole electric machining according to claim 1 coaxially rushes liquid device, it is characterized in that: described upper end magnechuck (7) and lower end magnechuck (6) control power supply by same magnechuck and power.
4. a kind of array group act on sets micro hole electric machining according to claim 1 coaxially rushes liquid device, it is characterized in that: the two ends, left and right of described electrolyte annular seal space are respectively equipped with electrolyte entrance and electrolyte outlet.
5. array group act on sets micro hole electric machining coaxially rushes a liquid method, it is characterized in that: the concrete steps of the method are as follows:
1) processing prepares array group act on sets (8) in advance, and is arranged in electrolyte annular seal space by array group act on sets (8) negative electrode, is clamped by electrolyte annular seal space; Electrolyte annular seal space is made up of the first electrolyte annular seal space (1) and the second electrolyte annular seal space (2), and the first electrolyte annular seal space (1) and the second electrolyte annular seal space (2) are positioned by alignment pin and be bolted;
2) workpiece to be processed (4) is installed in the electrolytic bath (3) immediately below array group act on sets (8), and insulation spacer (5) is set at workpiece to be processed (4), ensure that workpiece to be processed (4) surface is parallel with place, the bottom surface plane of array group act on sets (8);
3) porch of electrolyte from electrolyte annular seal space is sent into, flow into processing district, connect the power supply of array group act on sets (8) again, the entirety utilizing machine tool chief axis (9) to drive array group act on sets (8) and electrolyte annular seal space to be formed does feed motion downwards, goes out array hole in workpiece to be processed (4) Surface Machining; Due to the characteristic of electric machining, the size of array hole is greater than the diameter dimension of array group act on sets (8) negative electrode;
4) entirety utilizing machine tool chief axis (9) to continue to drive array group act on sets (8) and electrolyte annular seal space to be formed does low speed feed motion downwards, until the insulation spacer (5) of electrolyte annular seal space surface contact workpiece to be processed (4) upper surface, now stop the feeding of machine tool chief axis (9), and connect the power supply of magnechuck, by being installed on magnechuck on electrolyte annular seal space and being installed on the magnechuck adhesive of workpiece to be processed (4) lower surface, form electrolyte between the negative electrode of array group act on sets (8) and array hole and seal branch chamber;
5) when the power supply of lasting connection array group act on sets (8), electrolyte sealing branch chamber restriction electrolyte only can flow out from the gap connecting array group act on sets (8) cathode side walls, and be ejected into workpiece to be processed (4) surface, what realize workpiece to be processed (4) capillary processing coaxially rushes liquid.
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107470729A (en) * | 2017-09-27 | 2017-12-15 | 浙江工业大学 | Cylindrical inner wall linear array pipe electrode jet electrolytic machining device |
| CN107695467A (en) * | 2017-11-20 | 2018-02-16 | 浙江工业大学 | A kind of pressure type circulating jet Electrolyzed Processing micro-electrode array preparation method and device |
| CN117182215A (en) * | 2023-11-07 | 2023-12-08 | 成都宝利根创科电子有限公司 | Electrode assembly and processing method and using method thereof |
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| BE566822A (en) * | 1957-04-19 | |||
| SU1328095A1 (en) * | 1984-12-14 | 1987-08-07 | Рубцовский Проектно-Конструкторский Технологический Институт Тракторостроения | Apparatus for electrochemical working |
| MD208Z (en) * | 2009-10-30 | 2010-12-31 | Институт Прикладной Физики Академии Наук Молдовы | Tool electrode and process for electrochemical working of metals |
| CN103317196B (en) * | 2013-05-27 | 2015-06-03 | 南京航空航天大学 | Electrochemical machining method for auxiliary anode tube electrode |
| CN103624348B (en) * | 2013-11-25 | 2016-08-17 | 南京航空航天大学 | Massive array group of mean people's pore electrolytic machining method based on PDMS mask |
| CN205057226U (en) * | 2015-08-24 | 2016-03-02 | 浙江工业大学 | Little hole machining of array crowd electrode is coaxial towards liquid device |
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107470729A (en) * | 2017-09-27 | 2017-12-15 | 浙江工业大学 | Cylindrical inner wall linear array pipe electrode jet electrolytic machining device |
| CN107470729B (en) * | 2017-09-27 | 2023-06-27 | 浙江工业大学 | Cylindrical inner wall linear array tube electrode jet electrolytic machining device |
| CN107695467A (en) * | 2017-11-20 | 2018-02-16 | 浙江工业大学 | A kind of pressure type circulating jet Electrolyzed Processing micro-electrode array preparation method and device |
| CN117182215A (en) * | 2023-11-07 | 2023-12-08 | 成都宝利根创科电子有限公司 | Electrode assembly and processing method and using method thereof |
| CN117182215B (en) * | 2023-11-07 | 2024-01-23 | 成都宝利根创科电子有限公司 | Electrode assembly and processing method and using method thereof |
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