CN202007125U - System for batch preparation of three-dimensional microstructures with large aspect ratio - Google Patents
System for batch preparation of three-dimensional microstructures with large aspect ratio Download PDFInfo
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- CN202007125U CN202007125U CN2011200183678U CN201120018367U CN202007125U CN 202007125 U CN202007125 U CN 202007125U CN 2011200183678 U CN2011200183678 U CN 2011200183678U CN 201120018367 U CN201120018367 U CN 201120018367U CN 202007125 U CN202007125 U CN 202007125U
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Abstract
The utility model discloses a system for batch preparation of three-dimensional microstructures with large aspect ratio, and fast batch preparation of different three-dimensional microstructures is realized by adopting an electrochemical deposition method and utilizing a step motor to control microelectrodes to move along the Z-direction and a processing base to move along the X-direction and the Y-direction. The system comprises a computer, an X-direction and Y-direction step moving platform, a Z-direction step motor, a CCD (charge coupled device) monitoring system, a three-dimensional structure batch preparation core unit, a power source and a control circuit, wherein the computer, the X-direction and Y-direction step moving platform, the Z-direction step motor, the CCD monitoring system, the three-dimensional structure batch preparation core unit, the power source and the control circuit are mutually connected. Problems of low processing efficiency and accuracy, insufficient processing dimension, poor processing stability and the like are solved by the aid of the microelectrodes, the three-dimensional microstructures with large aspect ratio and fine uniformity can be prepared, and accurate high-efficiency preparation of the three-dimensional microstructures is realized by the aid of multiple microelectrodes which are in parallel connection and the step motor controlling the microelectrodes to move along the Z-direction and a processing base to move along the X-direction and the Y-direction.
Description
Technical field
The utility model relates to a kind of system of prepared in batches wide aspect ratio three-dimensional microstructures.Be used for some difficult-to-machine metal and alloy material thereof Precision Machining, the crudy performance is had little processing occasion (as smooth surface, stressless processing etc.) of specific (special) requirements and rapid batch processing microelectrode on metal or semi-conducting material.
Background technology
(Micro-Optical-Electro-Mechanical System is that microelectric technique combines and produces with machinery, optical technology MOEMS) to MOEMS, is the intelligent miniature system of rising early 1990s.Most active fields is the research of Micrometer-Nanometer Processing Technology in the MOEMS research.These technology mainly comprise the body micro-processing technology of silicon, surperficial micro-processing technology, the depths photoetching of LIGA(X ray, electrotyping forming and mould casting mold) technology and bonding techniques and sacrificial layer technology etc.But the weak point of these technology is that they often need expensive equipment and complicated step, needs long manufacturing cycle, and to the restriction of rapidoprint etc.Therefore, be necessary to seek low cost, Micrometer-Nanometer Processing Technology simply fast.
Compare with other fine machining method, the little processing of electrochemistry has that the machinable material scope is wide, no macroscopical elaboration power, machined surface quality, internal stress free, can realize plurality of advantages such as batch machining and three-dimensional processing.In recent years, along with people to the deepening continuously of electrochemistry micro-processing technology research, Electrolyzed Processing has obtained significant progress in many aspects.The achievement in research of aspects such as the detection of novel power supply (as adopting the ultrashort pulse power supply of nanosecond pulsewidth), effective small machining gap and method for supervising, the novel electrolyte (as the ultra-pure water novel electrolyte) of excellent performance, various combined machining method (as ultrasonic electrolysis Compound Machining, the little processing of laser assisted electrochemical etc.), motion feeding scheme, special-purpose control system for processing continues to bring out, and has made Electrolyzed Processing enter little manufacture field.
But, utilize traditional microelectrode to process, still have many problems, for example working (machining) efficiency and precision not high, processing undersize fine, processing stability is not enough.For this reason, a kind of brand-new microelectrode of the utility model research and design has proposed a kind of new technology of prepared in batches wide aspect ratio three-dimensional microstructures, has set up a kind of technical equipment of prepared in batches wide aspect ratio three-dimensional microstructures.Employing is with a plurality of (three or more) this microelectrode parallel connection and use step motor control microelectrode Z to moving and processing substrate XY to the mode that moves respectively, and make the primary clearance between a plurality of microelectrodes and the cathode substrate be consistent by CCD monitoring, realize the rapid batch preparation of three-dimensional microstructures, satisfy the national demand in fields such as Chinese national economy and social development, science and technology and national defence.
Summary of the invention
The purpose of this utility model is to overcome the deficiencies in the prior art, and a kind of system of prepared in batches wide aspect ratio three-dimensional microstructures is provided.
The system of prepared in batches wide aspect ratio three-dimensional microstructures comprise computer, XY to stepping mobile platform, Z to stepper motor, CCD monitoring system, three-dimensional microstructures prepared in batches core cell, power supply and control circuit; Computer is connected to stepper motor, CCD monitoring system to stepping mobile platform, Z with XY respectively, and three-dimensional microstructures prepared in batches core cell is connected to stepper motor, CCD monitoring system to stepping mobile platform, Z with power supply and control circuit, XY respectively; Three-dimensional microstructures prepared in batches core cell comprise anode microelectrode, shockproof platform, XY to the mixed solution of stepping translation stage, electrolysis liquid pool, cathode substrate, copper sulphate and sulfuric acid, dc source, current-limiting resistance, slide rheostat, Z to stepper motor; On shockproof platform, be provided with XY to stepping translation stage, dc source, Z to stepper motor, on the stepping translation stage, be provided with the electrolysis liquid pool at XY, be fixed with cathode substrate in electrolysis liquid pool bottom, be full of the mixed solution of copper sulphate and sulfuric acid in electrolysis liquid pool inside, on stepper motor, be fixed with the anode microelectrode at Z.
Described anode microelectrode comprises first capillary glass tube, a Pt-Ir silk, second capillary glass tube, the 2nd Pt-Ir silk, the 3rd capillary glass tube, the 3rd Pt-Ir silk; Be inserted with a Pt-Ir silk in first capillary glass tube, be inserted with the 2nd Pt-Ir silk in second capillary glass tube, be inserted with the 3rd Pt-Ir silk in the 3rd capillary glass tube, an end of a Pt-Ir silk, the 2nd Pt-Ir silk, the 3rd Pt-Ir silk links to each other.
The technology and the system of prepared in batches wide aspect ratio three-dimensional microstructures of the present utility model, its advantage is simple for structure, technical conditions are easy to realize.Overcome the processing of traditional micro-structural often need expensive equipment and complicated step, needs length manufacturing cycle and to the problems such as restriction of rapidoprint, designed that a kind of novel microelectrode has solved working (machining) efficiency and precision is not high, problem such as undersize fine, the processing stability deficiency of processing, can process the three-dimensional microstructures of the big good uniformity of aspect ratio, by a plurality of microelectrodes are in parallel and realized that to the mode that moves accurately efficient batch carries out the preparation of three-dimensional microstructures to moving with step motor control microelectrode Z respectively with processing substrate XY.Be expected to be used widely in micronano optical manufacturing and manufacture field.
Description of drawings
Fig. 1 is the system block diagram of prepared in batches wide aspect ratio three-dimensional microstructures;
Fig. 2 is the structural representation of three-dimensional microstructures prepared in batches core cell of the present utility model;
Fig. 3 is an anode microelectrode structural representation of the present utility model;
Among the figure: anode microelectrode 1, shockproof platform 2, XY to the mixed solution 6 of stepping translation stage 3, electrolysis liquid pool 4, cathode substrate 5, copper sulphate and sulfuric acid, dc source 7, current-limiting resistance 8, slide rheostat 9, Z to stepper motor 10, first capillary glass tube 11, a Pt-Ir silk 12, second capillary glass tube 13, the 2nd Pt-Ir silk 14, the 3rd capillary glass tube 15, the 3rd Pt-Ir silk 16.
The specific embodiment
Adopt the method for electrochemical deposition, introduced a kind of microelectrode, this microelectrode directly is inserted into the Pt-Ir silk and makes in the capillary glass tube, and terminal and capillary port maintains an equal level, adjust the 3～5um primary clearance that obtains between cathode substrate and the anode microelectrode by the CCD monitoring, and in process, keep this minim gap, effectively reduced the adverse effect of dispersion corrosion, strengthen the locality of anodic solution, thereby the precision of the processing that is shaped is improved.The one end parallel connection of a plurality of (three or more) microelectrode is connected step motor control microelectrode Z then to moving, stepper motor is controlled substrate XY simultaneously to moving, and make the primary clearance between a plurality of microelectrodes and the cathode substrate be consistent by CCD monitoring, realize the rapid batch preparation of three-dimensional microstructures.
As shown in Figure 1, 2, the system of prepared in batches wide aspect ratio three-dimensional microstructures comprise computer, XY to stepping mobile platform, Z to stepper motor, CCD monitoring system, three-dimensional microstructures prepared in batches core cell, power supply and control circuit; Computer is connected to stepper motor, CCD monitoring system to stepping mobile platform, Z with XY respectively, and three-dimensional microstructures prepared in batches core cell is connected to stepper motor, CCD monitoring system to stepping mobile platform, Z with power supply and control circuit, XY respectively; Three-dimensional microstructures prepared in batches core cell comprise anode microelectrode 1, shockproof platform 2, XY to the mixed solution 6 of stepping translation stage 3, electrolysis liquid pool 4, cathode substrate 5, copper sulphate and sulfuric acid, dc source 7, current-limiting resistance 8, slide rheostat 9, Z to stepper motor 10; On shockproof platform 2, be provided with XY to stepping translation stage 3, dc source 7, Z to stepper motor 10, on stepping translation stage 3, be provided with electrolysis liquid pool 4 at XY, be fixed with cathode substrate 5 in electrolysis liquid pool 4 bottoms, be full of the mixed solution 6 of copper sulphate and sulfuric acid in electrolysis liquid pool 4 inside, on stepper motor 10, be fixed with anode microelectrode 1 at Z.
As shown in Figure 3, anode microelectrode 1 comprises first capillary glass tube 11, a Pt-Ir silk 12, second capillary glass tube 13, the 2nd Pt-Ir silk 14, the 3rd capillary glass tube 15, the 3rd Pt-Ir silk 16; Be inserted with a Pt-Ir silk 12 in first capillary glass tube 11, be inserted with the 2nd Pt-Ir silk 14 in second capillary glass tube 13, an end that is inserted with the 3rd Pt-Ir silk 16, the one Pt-Ir silks 12, the 2nd Pt-Ir silk 14, the 3rd Pt-Ir silk 16 in the 3rd capillary glass tube 15 links to each other.Pt-Ir silk and capillary glass tube end remain basically stable, and each capillary glass tube is on same straight line, and end also maintains an equal level mutually.
The anode microelectrode is made side by side by the capillary glass tube that three inside are inserted with the Pt-Ir silk, and wherein the Pt-Ir silk of different-diameter can prepare the three-dimensional microstructures of different live widths; With purity be 99.9% copper sheet as cathode substrate, thickness is 10mm X10mm for the 100mm length and width; For the electric conductivity of controlling electrochemistry dispersion corrosion and electrolyte to improve machining accuracy, choose 0.5 lower M/L CuSO of concentration
4+ 0.4 M/L H
2SO
4Mixed solution as electrolyte; Control voltage (0-5V) and Z translational speed according to the live width of three-dimensional microstructures to be processed to stepper motor.
With diameter is that the Pt-Ir silk of 100mm is made microelectrode, and copper sheet is fixed on electrolysis liquid pool bottom, and the anode microelectrode is fixed on Z on stepper motor, and places electrolyte simultaneously, adjusts primary clearance between microelectrode and the copper sheet by the observation of CCD monitoring system.In the process of electrochemical deposition, keep the minim gap of two inter-stages can effectively reduce the adverse effect of dispersion corrosion, strengthen the locality of anodic solution, thereby the precision of the processing that is shaped is improved.If also can bring some problems, as add the electrolysate that produces man-hour, be easy to take place alluvial and adhesion, thereby cause short circuit, influence normally carrying out of process with more difficult discharge but simultaneously machining gap is too small; Also make inter-stage low baking temperature flower electric discharge phenomena occur in addition easily, produce uncontrollable discharge ablation, machining accuracy and surface quality are descended.For this reason, by the observation of CCD monitoring system three primary clearances all are adjusted into about 5mm.
The adjusting of voltage and current density realizes by the resistance that changes slide rheostat, and regulates the translational speed of Z to stepper motor accordingly, makes the rate of climb of microelectrode and sedimentation rate be consistent substantially, just can prepare one group of copper microtrabeculae fast.The electrolysis liquid pool is fixed on XY on the stepping translation stage, keep XY to maintain static in the micro-structural preparation process to the stepping translation stage, after a certain zone, copper sheet surface processes one group of (three) copper microtrabeculae, thereby mobile XY changes the relative position of anode microelectrode and cathode substrate to the stepping translation stage, repeat procedure of processing, just can process another group copper microtrabeculae in copper sheet surface one new region.Several times can obtain one group of copper micro-pillar array so repeatedly, realize the rapid batch preparation of three-dimensional microstructures.Utilize this method, add man-hour if Z is moved to the stepping translation stage simultaneously to stepper motor and XY, and by computer programming control mobile route and speed, but prepared in batches goes out the three-dimensional microstructures of various required forms.
The live width of micro-structural and aspect ratio are mainly by each parameter decision in the process.The Pt-Ir filament diameter is got regularly, and live width depends on Z to the stepper motor translational speed, and aspect ratio depends on process time, and within the specific limits, aspect ratio is with increasing process time.Technical indicator of the present utility model is: the micro-structural live width is adjustable in 1～100mm, preparation speed is controlled in 0.1～10mm/s, maximum aspect ratio can surpass 50:1, can prepare a plurality of micro-structurals fast simultaneously, reach and utilized the efficient accurately target of the three-dimensional microstructures of the big good uniformity of prepared in batches aspect ratio of low-cost simple device.
Claims (2)
1. the system of a prepared in batches wide aspect ratio three-dimensional microstructures, it is characterized in that comprising computer, XY to stepping mobile platform, Z to stepper motor, CCD monitoring system, three-dimensional microstructures prepared in batches core cell, power supply and control circuit; Computer is connected to stepper motor, CCD monitoring system to stepping mobile platform, Z with XY respectively, and three-dimensional microstructures prepared in batches core cell is connected to stepper motor, CCD monitoring system to stepping mobile platform, Z with power supply and control circuit, XY respectively; Three-dimensional microstructures prepared in batches core cell comprise anode microelectrode (1), shockproof platform (2), XY to the mixed solution (6) of stepping translation stage (3), electrolysis liquid pool (4), cathode substrate (5), copper sulphate and sulfuric acid, dc source (7), current-limiting resistance (8), slide rheostat (9), Z to stepper motor (10); On shockproof platform (2), be provided with XY to stepping translation stage (3), dc source (7), Z to stepper motor (10), on stepping translation stage (3), be provided with electrolysis liquid pool (4) at XY, be fixed with cathode substrate (5) in electrolysis liquid pool (4) bottom, be full of the mixed solution (6) of copper sulphate and sulfuric acid in electrolysis liquid pool (4) inside, on stepper motor (10), be fixed with anode microelectrode (1) at Z.
2. the system of a kind of prepared in batches wide aspect ratio three-dimensional microstructures according to claim 1 is characterized in that described anode microelectrode (1) comprises first capillary glass tube (11), a Pt-Ir silk (12), second capillary glass tube (13), the 2nd Pt-Ir silk (14), the 3rd capillary glass tube (15), the 3rd Pt-Ir silk (16); Be inserted with a Pt-Ir silk (12) in first capillary glass tube (11), be inserted with the 2nd Pt-Ir silk (14) in second capillary glass tube (13), be inserted with the 3rd Pt-Ir silk (16) in the 3rd capillary glass tube (15), an end of a Pt-Ir silk (12), the 2nd Pt-Ir silk (14), the 3rd Pt-Ir silk (16) links to each other.
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| Application Number | Priority Date | Filing Date | Title |
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| CN2011200183678U CN202007125U (en) | 2011-01-20 | 2011-01-20 | System for batch preparation of three-dimensional microstructures with large aspect ratio |
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| CN2011200183678U CN202007125U (en) | 2011-01-20 | 2011-01-20 | System for batch preparation of three-dimensional microstructures with large aspect ratio |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102092676A (en) * | 2011-01-20 | 2011-06-15 | 浙江大学 | Method and system for preparing high-aspect ratio three-dimensional microstructures in batch |
| CN106801248A (en) * | 2017-02-03 | 2017-06-06 | 中山大学 | The preparation facilities and method of a kind of three-dimensional micro-nano structure device |
| CN110093641A (en) * | 2019-04-23 | 2019-08-06 | 河南理工大学 | A kind of micro-structure is without magnetic property method and system |
-
2011
- 2011-01-20 CN CN2011200183678U patent/CN202007125U/en not_active Expired - Fee Related
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102092676A (en) * | 2011-01-20 | 2011-06-15 | 浙江大学 | Method and system for preparing high-aspect ratio three-dimensional microstructures in batch |
| CN106801248A (en) * | 2017-02-03 | 2017-06-06 | 中山大学 | The preparation facilities and method of a kind of three-dimensional micro-nano structure device |
| CN106801248B (en) * | 2017-02-03 | 2020-04-10 | 中山大学 | Device and method for manufacturing three-dimensional micro-nano structure device |
| CN110093641A (en) * | 2019-04-23 | 2019-08-06 | 河南理工大学 | A kind of micro-structure is without magnetic property method and system |
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| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20111012 Termination date: 20130120 |
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| CF01 | Termination of patent right due to non-payment of annual fee |