CN112853303A - Vacuum winding coating device and processing method thereof - Google Patents

Vacuum winding coating device and processing method thereof Download PDF

Info

Publication number
CN112853303A
CN112853303A CN202011628505.4A CN202011628505A CN112853303A CN 112853303 A CN112853303 A CN 112853303A CN 202011628505 A CN202011628505 A CN 202011628505A CN 112853303 A CN112853303 A CN 112853303A
Authority
CN
China
Prior art keywords
coating
roller
chamber
tension
roller group
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN202011628505.4A
Other languages
Chinese (zh)
Inventor
余荣沾
王忠雨
袁世成
张欣
于小杰
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Guangdong Xinfeng Technology Co ltd
Original Assignee
Guangdong Xinfeng Technology Co ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Guangdong Xinfeng Technology Co ltd filed Critical Guangdong Xinfeng Technology Co ltd
Priority to CN202011628505.4A priority Critical patent/CN112853303A/en
Publication of CN112853303A publication Critical patent/CN112853303A/en
Pending legal-status Critical Current

Links

Images

Classifications

    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • C23C14/562Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks for coating elongated substrates
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/54Controlling or regulating the coating process

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

The invention provides a vacuum winding coating device, which is characterized by comprising the following components: the coating roller is installed and contained in the coating chamber and used for winding the coiled material and performing coating treatment on the coiled material; a drive roller group which is arranged at the upstream side of the coating chamber and is used for supplying coiled materials to the coating roller; the tensioning roller group is arranged between the driving roller group and the film coating roller and is used for tensioning the coiled material and detecting the tensioning force of the coiled material; and a control unit which detects the feeding speed of the driving roller group according to the tensioning roller group and adjusts the tensioning force. According to the present invention, the coating rollers, the drive roller group, and the tension roller group are provided in a group, whereby the tension of the base material supplied to the coating rollers can be individually adjusted, and the base material can be coated in an optimum tension state.

Description

Vacuum winding coating device and processing method thereof
Technical Field
The invention relates to a vacuum winding coating device and a processing method thereof.
Background
Conventionally, the vacuum winding coating technique has been widely used. The product is mainly used for preparing decorative, color printing and functional films, and common base materials comprise PET, BOPP, CPP, lacquered paper, ultrathin stainless steel and the like.
In recent years, the preparation of films on textile fabrics by using vacuum coating technology is gradually emerging, and the preparation process of the films also belongs to the technical field of nano surface treatment. Unlike conventional base materials, textile fabrics have properties different from those of conventional materials, and are widely used, and for example, they can be given special functions such as antibacterial, anti-pollution, radiation protection, ultraviolet protection, and heat preservation. But also can prepare decorative fabrics with rich luster and high ornamental value, such as metal color, gradient color, angle color, double-side color and other decorative colors. The terminal product can be clothing, a hat, a mask which can be worn by the people and protective articles with special functions, such as protective clothing for the medical and health industry, tents with special functions in the military field and the like, and the product has wide market prospect. Moreover, the country increasingly attaches importance to the protection of the ecological environment, policies further tighten the environmental supervision of the traditional high-pollution printing and dyeing industry, and the environmental pressure is forcing the transformation and upgrading of the printing and dyeing industry. Compared with the traditional printing and dyeing, the vacuum coating has almost zero pollution to the environment, and with the gradual maturity of the vacuum winding coating technology, the dyeing processing of a part of decorative color fabrics can be completely replaced by the vacuum coating technology.
At present, a few vacuum winding coating devices taking textile fabrics as base materials are available in the market, and the existing vacuum winding coating devices are basically small devices or experimental devices in the field of functional films. Particularly, the large vacuum winding coating continuous line equipment for replacing the traditional printing and dyeing partial decorative color fabric is still blank.
The continuous line equipment adopts a magnetron sputtering technology, prepares a uniform film layer on a large-width textile fabric according to a specific process formula, and has the production capacity of long-time continuity. The main key technical points of the equipment are as follows; 1. the structure of the base material transmission system requires that the base material is transmitted at a constant speed under constant tension in a vacuum environment at a certain speed, and the phenomena of folds, curling, shrinkage caused by overlarge tension and the like can not occur in the transmission process; 2. the stable vacuum gas field environment ensures that the gas field environment between each magnetic control cathode and the adjacent coating chamber sections is relatively isolated and does not interfere with each other in the film deposition process; 3. the installation mode of the magnetic control cathode and the related structural design of the maintenance convenience of the whole equipment, especially the magnetic control cathode and related components must be maintained regularly, the magnetic control cathode on the mass production type equipment has more quantity, larger size and weight, and the later use and maintenance are time-consuming and labor-consuming; the equipment belongs to a large-scale production line, the number of vacuum cavity modules is large, the structural design of the cavity is particularly important, and the structure and the size directly influence the configuration, the installation, the debugging and the maintenance convenience of a vacuum system and the manufacturing cost of the whole line.
Disclosure of Invention
In view of the above problems of the prior art, the present invention provides a vacuum roll coating apparatus, comprising: the coating roller is installed and contained in the coating chamber and used for winding the coiled material and performing coating treatment on the coiled material; a drive roller group which is arranged at the upstream side of the coating chamber and is used for supplying coiled materials to the coating roller; the tensioning roller group is arranged between the driving roller group and the film coating roller and is used for tensioning the coiled material and detecting the tensioning force of the coiled material; and a control unit which detects the feeding speed of the driving roller group according to the tensioning roller group and adjusts the tensioning force. By arranging the coating roller, the drive roller group and the tension roller group in a group manner, the tension of the base material can be independently adjusted for the coating roller, so that the base material is coated in an optimal tension state.
In some embodiments, it is preferable that the film deposition device further comprises an unwinding roller and a winding roller, and the web supplied by the unwinding roller is recovered by the winding roller after the film deposition process is completed by the driving roller set, the tensioning roller set and the film deposition roller set.
In some embodiments, preferably, when the coating process is started, the control unit controls to drive the unwinding roller and the winding roller in opposite directions, apply a pre-tensioning force to the coiled material, and then drive the driving roller group and the coating roller to rotate at the same linear speed to convey the substrate. Thereby ensuring the flat winding state at the beginning and improving the quality of the coiled material after the whole coil is coated with the film.
In some embodiments, it is preferable that the control unit controls the torques for driving the unwinding roller and the winding roller in opposite directions according to the magnitude of the pretensioning force detected by the set of tensioning rollers.
In some embodiments, a plurality of conveying processing units containing the driving roller group, the tensioning roller group and the coating roller are preferably arranged in series. Thereby forming large-scale coating equipment for coating different types of films.
In some embodiments, it is preferred to have a transition chamber housing the drive roller set and the tension roller set. In a preferred embodiment, a plurality of transfer processing units including the transition chamber and the coating chamber are preferably arranged in series. Thereby modularizing the equipment and conveniently adjusting a plurality of coating treatment processes.
In some embodiments, it is preferable that the control unit independently controls the tension of the substrate subjected to the plating process in each of the transport processing units.
According to the present invention, the coating rollers, the drive roller group, and the tension roller group are provided in a group, whereby the tension of the base material supplied to the coating rollers can be individually adjusted, and the base material can be coated in an optimum tension state.
Drawings
FIG. 1 is an overall configuration diagram of a vacuum roll coating apparatus according to a preferred embodiment of the present invention.
FIG. 2 is a schematic view showing an isolation chamber of a vacuum roll coating apparatus according to a preferred embodiment of the present invention.
FIG. 3 is an enlarged view showing a valve portion of an isolation chamber in a vacuum roll coating apparatus according to a preferred embodiment of the present invention.
FIG. 4 is a schematic view of a vacuum roll coating apparatus according to a preferred embodiment of the present invention.
FIG. 5 is a system block diagram of a vacuum roll coating apparatus according to a preferred embodiment of the present invention.
FIG. 6 is a control flow chart of the vacuum roll coating apparatus according to the preferred embodiment of the present invention.
Detailed Description
Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings.
FIG. 1 is an overall configuration diagram of a vacuum roll coating apparatus according to a preferred embodiment of the present invention. As shown in fig. 1, the vacuum roll coating apparatus 100 of the present embodiment includes, in order from a left supply end to a right take-up end: the film coating device comprises an unreeling chamber 101, a first isolation chamber 103, a second isolation chamber 105, a first transition chamber 107, a first film coating chamber 109, a second transition chamber 111, a second film coating chamber 113, a third isolation chamber 115, a fourth isolation chamber 117 and a reeling chamber 119.
Wherein, the first to fourth isolation chambers 103, 105, 115 and 117 have the same modular structure; the first and second transition chambers 107 and 111 have the same modular structure, and the first and second coating chambers 109 and 113 may have the same module, different modules used according to different coating materials, or only cathodes disposed therein have different structures. Since each part, particularly the isolation chambers 103, 105, 115, 117 and the transition chambers 109, 113 have the same structure, a large-sized vacuum roll coating apparatus for coping with various complicated coating processes can be easily constituted by arbitrarily combining the same or different coating chambers 109, 113 as a necessary connection means.
And as the unit for connecting, isolation chamber and transition room, can use the common housing part, thus greatly reduce the installation of the apparatus, maintenance cost. Next, the structure of each isolation chamber will be described by taking the isolation chamber 103 as an example.
In this embodiment, fig. 2 and 3 are respectively a diagram showing a structure of an isolation chamber according to a preferred embodiment of the present invention. The isolation chamber 103 has a flat case 10301, and flanges 10303 as connection ports are provided at both ends of the isolation chamber, respectively, and a plurality of isolation chambers 103(105, 115, 117, etc.) can be connected by the flanges 10303 at both ends, or the isolation chamber 103 can be connected to another process module which is also provided with a flange which fits the flange 10303. A seat plate 10305 is arranged on the inner side of the flange 10303 at one end, and a notch 10307 is arranged on the seat plate 10305 and used for penetrating through the base material. On one side (upper side in the present embodiment) of the notch 10307, a valve shaft 10309 is provided in parallel with the notch 10307, and an elongated valve plate 10311 is provided along the valve shaft 10309 to be fixed to the valve shaft 10309. As a result, by actuating valve spindle 10309, valve plate 10311 can be pivoted and valve plate 10311 covers and closes notch 10307, thus sealing the other devices connected to isolation chamber 103 by flange 10303. In the present embodiment, the valve shaft 10309 is driven by a swing arm 10313 and a cylinder 10315 provided at one end thereof. The valve stem 10309 can be twisted by the cylinder 10315 to ensure the sealing property of the valve plate 10311 covering the notch 10307. In the use state, when the valve plate 10311 is rotated to cover the notch 10307 to achieve sealing, the base material penetrates through the notch 10307, and when the base material is textile fabric, on one hand, there is no fear that the base material of the textile fabric is damaged, and on the other hand, the sufficient contact length in the length direction of the textile fabric ensures the reliability of sealing to the maximum extent, and reduces vacuum leakage. The function of which will be described in detail later.
Shaft mounting holes 10317, 10319, 10321 are provided in the opposite side walls of the case 10301 as necessary, and a roller set for conveyance is pierced in the case, and in the present embodiment, the roller set provided in the isolation chamber 103 is a drive roller set. Further, a gas passage flange 10323 connected to a gas passage is provided on one side (lower side in the present embodiment) of the casing to be connected to an external vacuum device, and the air in the casing 10301 of the isolation chamber 103 is discharged during operation to be in a vacuum state.
In the present embodiment, the transition chambers 109 and 113 are formed to have a flat box like the isolation chamber 103, and flanges are formed at both ends of the box to connect to the isolation chamber 103 or other devices. The difference from the isolation chamber 103 is that the transition chambers 109 and 113 are provided with a drive roller group and a tension roller group in series, which will be described in detail later.
The plurality of isolation chambers 103, 105, 115, and 117, the transition chambers 109 and 113, the coating chambers 109 and 113, the unwinding chamber 101 as a supply unit, and the winding chamber 119 as a recovery unit are connected to each other, so that the inside of the vacuum winding coating apparatus 100 is formed as a communicable sealed chamber. When each module is vacuumized, the vacuum degree in the whole device can be maintained stably when the base material made of the textile fabric is subjected to film coating treatment.
FIG. 4 is a view for explaining the functions of the respective parts of the vacuum roll coating apparatus according to the preferred embodiment of the present invention. In fig. 4, the housings of the respective modules shown in fig. 1 are omitted, and only functional portions are shown. Any treatment process can be obtained by modularly combining the modularized isolation chamber, the transition chamber, the coating chamber and the winding and unwinding chamber.
As shown in fig. 4, the drive roller groups 203, 205, 215, 217 are roller groups provided in the isolation chambers 103, 105, 115, 117, respectively; the drive roller group 207A and the tension roller group 207B are roller groups provided in the transition chamber 107, and the drive roller group 211A and the tension roller group 211B are roller groups provided in the transition chamber 111; the unwinding roller 201 is arranged in the unwinding chamber 101; the wind-up roller 219 is disposed in the wind-up chamber 119. Fig. 5 is a block diagram of a control module of the vacuum roll coating apparatus according to the present embodiment. The control unit 301 controls the operations of the take-up and pay-off rolls 201 and 219, the roll groups, and the coating rolls through the bus 303. The operation principle of the vacuum roll coating apparatus 100 of the present embodiment will be described in detail below.
[ START-UP AND OPERATION ]
When the substrates are mounted on the unwinding rollers 201 and 219, respectively, it is prepared to start the supply of the substrate from the unwinding roller 201 and the recovery of the substrate from the winding roller 219, and before the substrate is subjected to the coating process by the coating rollers 209 and 213, the control unit 301 controls the unwinding roller 201 and the winding roller 219 to rotate in opposite directions, respectively. The opposite direction in the present embodiment is not the direction in which the unwinding roller 201 and the winding roller 219 actually rotate, but the rotation direction in which both of them normally operate to perform supply and recovery. When the unwinding roller 201 and the winding roller 219 rotate in opposite directions, the mounted substrate to be processed is applied with a pretension force. At this time, the magnitude of the pretension is detected by the tension roller groups 207B and 211B in the transition chambers 107 and 111, and the pretension is set to a predetermined value.
Then, the control unit 301 controls the unwinding roller 201 and the winding roller 219, and the coating rollers 209 and 213 and the respective drive roller groups 203, 205, 207A, 211A, 215, and 217 to rotate at the same linear velocity, completing the startup. Before the start, the unwinding roll 201 and the winding roll 219 are rotated in opposite directions to apply a predetermined pre-tension to the base material, and therefore, when the roll groups are started to rotate forward at the same speed, a predetermined tension can be maintained from the beginning. Therefore, the substrate on the innermost layer of the winding roller 219 is kept flat, and the influence of wrinkle deformation on the substrate which is wound next and is subjected to film coating treatment due to uneven winding during starting is avoided.
The control unit 301 receives the tension information detected by the tension roller sets 207B and 211B, and controls the rotation speed of each driving roller set and the coating roller according to the information, so as to ensure that the tension of the surface of each part of the base material is uniform from unreeling to reeling. Thereby, the thickness of the plating film on the surface of the substrate can be controlled well. In particular, in the present embodiment, when a base material made of a textile fabric is treated and the base material is coated in the coating chambers 209 and 213, if the tension of the base material is not uniform, the depth of penetration of the coating film into the base material and the uniformity change, and the texture of the base material after coating is not uniform, which seriously affects the usability of the base material and the like, and deteriorates the yield.
The transition chambers 107 and 111 are respectively arranged in front of the coating rollers 209 and 213, and the tension rollers 207B and 211B of the transition chambers detect the tension of the base materials entering the coating chambers 109 and 113, so that the tension of the base materials entering the coating chambers 107 and 111 to be subjected to coating treatment can be actively adjusted in time, and real-time control is realized. And by arranging the tensioning roller sets 207B and 211B at the upstream sides of the coating rollers 209 and 213, the transmission error of a system can be effectively compensated, and the uniform tensioning force of the base material receiving the coating treatment can be kept.
On the other hand, closed loop control of the tension of the substrate receiving the coating process is achieved with the tension roller sets 207B, 211B also being used. Taking the tension roller set 207B as an example, when the detected tension of the tension roller set 207B is smaller than the threshold value, which indicates that the feeding speed of the base material is too high, the control module 301 controls the upstream driving roller sets 203, 205, 207A to reduce the feeding speed so as to ensure that the base material can continuously pass through the coating roller 209 at a constant speed and maintain a specified tension; conversely, when the tension roller set 207B detects a tension greater than the threshold, indicating that the substrate feed rate is too slow, the control module 301 controls the upstream drive roller sets 203, 205, 207A to increase the feed rate to ensure that the substrate continuously passes through the coating roller 209 at a constant speed while maintaining the specified tension. Similarly, the tension roller group 211B and the coating roller 213 control the rotation speed of the upstream drive roller group 211A based on the detection information of the tension roller group 211B, so that the substrate entering the coating chamber 113 maintains a predetermined tension, thereby maintaining a predetermined tension while continuously passing through the coating roller 213 at a constant speed. Therefore, the tension of the substrate in the coating process in each coating chamber 109 and 113 can be controlled independently by making the tension of the substrate in the coating process in each coating chamber 109 and 113 different.
Furthermore, the continuous substrates supplied to the coating chambers 109 and 113 can be subjected to different stages of coating processes at different tensions according to the requirements of different materials and specifications of the coating chambers 109 and 113. Therefore, the vacuum winding coating device 100 can complete various treatments of different specifications in the sequential winding and unwinding processes, and the adaptability is wider. In particular, as shown in this embodiment, by using the modularized isolation chambers 103, 105, 115, and 117, the transition chambers 107 and 111, and the coating chambers 109 and 113, it is possible to flexibly change a combination of a plurality of coating processes.
[ RECOVERY TREATMENT ]
In this embodiment, since the substrate is supplied, coated, and wound in the vacuum chamber, after a roll of the substrate is supplied, the roll of the unwinding chamber 101 and the winding chamber 119 need to be replaced by breaking the vacuum, and the process can be resumed by performing the vacuum again. The flow of the recovery processing in the present embodiment will be described below.
When the supply of the substrate for one roll is completed to prepare for replacement, first, in step S601, the control unit 301 closes the valve plate 10311 in the upstream side isolation chambers 103 and 105 and the downstream side isolation chambers 115 and 117, and causes the valve plate 10311 to cover the notch 10307.
Then, in step S602, the chambers of the unwinding chamber 101 and the winding chamber 119 are controlled to be evacuated, and at this time, the coating chambers 109 and 113 are kept evacuated, and the evacuation state of each of the isolation chambers 103, 105, 115, and 117 may be kept or adjusted downward.
Next, in step S603, the doors of the unwinding chamber 101 and the winding chamber 119 are opened, and the substrate and the finished roll are replaced.
Next, in step S604, the unwinding chamber 101 and the winding chamber 119 are evacuated, and the vacuum state of each of the isolation chambers 103, 105, 115, and 117 is restored.
Then, in step S605, after the unwinding chamber 101 and the winding chamber 119 reach a predetermined degree of vacuum, the valve plate 10311 of each of the isolation chambers 103, 105, 115, and 117 is opened.
Finally, the start can be completed based on the above start mode, and the recovery processing is realized.
In the present embodiment, since the isolation chambers 103, 105, 115, and 117 are provided with the valve plate 10311 capable of covering the notch 10307, respectively, in the recovery operation, the transition chamber 107, the coating chamber 109, the transition chamber 111, and the coating chamber 113 between the isolation chambers 103 and 105 and the isolation chambers 115 and 117 are isolated by closing the notch 10307, and the vacuum state can be independently maintained, so that the substrate and the web in the unwinding chamber 101 and the winding chamber 119 can be replaced only by performing the breaking process on the unwinding chamber 101 and the winding chamber 119.
After the replacement is completed, only the unreeling chamber 101 and the reeling chamber 119 need to be vacuumized again, all chambers of the vacuum reeling coating device can be restored to the vacuum degree required by the operation, and the coating operation can be restored by opening each valve plate 10311 again.
Because the vacuuming needs a lot of processing time and consumes a lot of energy, the vacuum winding coating device 100 according to the present embodiment only needs to perform the operations of breaking and recovering the vacuum for the unwinding chamber 101 and the winding chamber 109 during the recovery operation, so the recovery operation time is greatly shortened, and the production efficiency of the device is improved. In addition, the waste of energy is reduced as much as possible, and the cost is reduced.
In addition, in the present embodiment, since the isolation chambers 103, 105, 115, and 117 and the transition chambers 107 and 111 are formed in a modular manner, when a plurality of sets of the upstream isolation chambers 103 and 105 and the downstream isolation chambers 115 and 117 are provided, partial sealing by the two-stage valve plate 10311 can be easily realized by the combined module, and thus, reliability of sealing is improved, and leakage of the vacuum degree in the coating chambers 109 and 113 is also reduced. In particular, even if the vacuum degree of the coating chambers 109 and 113 is maintained by the normal vacuum-pumping power, the vacuum degree of the coating chamber 109 is not excessively reduced after the replacement of the substrate and the coil is completed. Furthermore, since the isolation chambers 103, 105, 115, 117 form independent sealed spaces at the upstream and downstream ends of the coating chambers 109, 113, respectively, the vacuum degree of the isolation chambers 103, 105, 115, 117 can be maintained at a predetermined vacuum degree by a small power by using the gas passage 10323 as a vacuum line, and the vacuum degree of the isolation chambers 103, 117 from the upstream and downstream ends is increased stepwise toward the coating chambers 109, 113 in the middle, thereby further reducing the loss of the vacuum degree in the coating chambers 109, 113, and remarkably shortening the time for breaking and recovering the vacuum in the recovery operation.
In this embodiment, since the object to be processed of the vacuum roll coater is a flexible substrate, particularly a substrate made of a textile fabric, when the upstream and downstream ends are sealed with the substrate passing through the isolation chambers 103, 105, 115, and 117, the sealing effect is often poor. According to the present embodiment, when the seal structure is formed by turning the valve plate 10311 over the notch 10309, the base material is pressed against the seat plate 10305 by the valve plate 10311 at the notch 10309, and the thickness is compressed. At this time, a planar gap having a thickness smaller than that of the compressed base material is formed between the seat plate 10305 and the valve plate 10311, and the planar gap is formed only on the side where the base material is not sandwiched, so that the air leakage flow distance is long, the resistance is large, and the whole sealing performance is good. Compared with a valve in which the base material is tightly clamped from the upper side and the lower side of the base material transmission direction, the base material is the textile fabric, so that leakage holes are directly formed in gaps of the textile fabric, the gas circulation distance is short, the resistance is small, air flows through the gaps of textile fabric fibers when leaking at a high speed, the fiber structure at the sealing position is damaged, and the strength is reduced; on the other hand, in order to improve the sealing property, when the base material is clamped, the fabric fibers of the base material are damaged, and this causes a risk that the base material is broken due to the strength reduction of the damaged base material fibers when the recovery operation is resumed, and the continuous production cannot be smoothly performed, and the entire production line must be broken and recovered.
Although the preferred embodiments of the present invention have been described in detail, the above description is not intended to limit the scope of the present invention, and those skilled in the art can make various changes, modifications, deletions, and the like in addition to the above preferred embodiments, and these changes, modifications, and deletions all fall within the scope of the present invention, and the scope of the present invention should be determined based on the claims.

Claims (8)

1. A vacuum winding coating apparatus is characterized by comprising:
the coating roller is installed and contained in the coating chamber and used for winding the coiled material and performing coating treatment on the coiled material;
a drive roller group which is arranged at the upstream side of the coating chamber and is used for supplying coiled materials to the coating roller;
the tensioning roller group is arranged between the driving roller group and the film coating roller and is used for tensioning the coiled material and detecting the tensioning force of the coiled material; and
and a control unit for adjusting the feeding speed of the driving roller group according to the detected tension of the tension roller group.
2. The vacuum roll coating apparatus of claim 1, wherein:
also comprises an unwinding roller and a winding roller,
and the coiled material supplied by the unwinding roller is recycled by the winding roller after the coating treatment is finished by the driving roller set, the tensioning roller set and the coating roller set.
3. The vacuum roll coating apparatus of claim 2, wherein:
when the film coating treatment is started,
the control unit controls to drive the unwinding roller and the winding roller in opposite directions to apply pre-tension to the coiled material,
and then driving the driving roller group and the coating roller to rotate at the same linear speed to convey the substrate.
4. The vacuum roll coating apparatus of claim 3, wherein:
and the control unit controls the torque for driving the unwinding roller and the winding roller in opposite directions according to the pre-tensioning force detected by the tensioning roller group.
5. The vacuum roll coating apparatus of claim 3, wherein:
a plurality of conveying and processing units containing the driving roller group, the tensioning roller group and the coating roller are arranged in series.
6. The vacuum roll coating apparatus of claim 3, wherein:
a transition chamber housing the drive roller set and the tension roller set.
7. The vacuum roll coating apparatus of claim 6, wherein:
a plurality of conveying processing units containing the transition chamber and the coating chamber are arranged in series.
8. The vacuum roll coating apparatus of claim 7, wherein:
the control unit is used for independently controlling the tension of the base material subjected to the coating treatment in each conveying treatment unit.
CN202011628505.4A 2020-12-31 2020-12-31 Vacuum winding coating device and processing method thereof Pending CN112853303A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202011628505.4A CN112853303A (en) 2020-12-31 2020-12-31 Vacuum winding coating device and processing method thereof

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202011628505.4A CN112853303A (en) 2020-12-31 2020-12-31 Vacuum winding coating device and processing method thereof

Publications (1)

Publication Number Publication Date
CN112853303A true CN112853303A (en) 2021-05-28

Family

ID=75999617

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202011628505.4A Pending CN112853303A (en) 2020-12-31 2020-12-31 Vacuum winding coating device and processing method thereof

Country Status (1)

Country Link
CN (1) CN112853303A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113416940A (en) * 2021-06-29 2021-09-21 辽宁分子流科技有限公司 Parallel winding coating production line
CN113416942A (en) * 2021-06-29 2021-09-21 辽宁分子流科技有限公司 Winding film coating machine

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH11231754A (en) * 1998-02-19 1999-08-27 Fuji Xerox Co Ltd Image forming device
CN101798681A (en) * 2010-03-30 2010-08-11 袁惠芬 Winding-type vacuum coater
CN201553778U (en) * 2009-08-26 2010-08-18 兰州大成科技股份有限公司 Metal thin sheet strip continuous proceeding surface vacuum film coating device
CN203333755U (en) * 2013-05-09 2013-12-11 肇庆市腾胜真空技术工程有限公司 Vacuum coating device with independent vacuum locks
JP2014184988A (en) * 2013-03-21 2014-10-02 Fuji Xerox Co Ltd Speed controller, image processor, and speed control program
CN107794510A (en) * 2016-08-31 2018-03-13 湘潭宏大真空技术股份有限公司 Fexible film vertical vacuum coating film production line
CN110983285A (en) * 2019-12-31 2020-04-10 广东腾胜科技创新有限公司 Vacuum winding coating equipment capable of simultaneously coating multiple rolls of base materials

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH11231754A (en) * 1998-02-19 1999-08-27 Fuji Xerox Co Ltd Image forming device
CN201553778U (en) * 2009-08-26 2010-08-18 兰州大成科技股份有限公司 Metal thin sheet strip continuous proceeding surface vacuum film coating device
CN101798681A (en) * 2010-03-30 2010-08-11 袁惠芬 Winding-type vacuum coater
JP2014184988A (en) * 2013-03-21 2014-10-02 Fuji Xerox Co Ltd Speed controller, image processor, and speed control program
CN203333755U (en) * 2013-05-09 2013-12-11 肇庆市腾胜真空技术工程有限公司 Vacuum coating device with independent vacuum locks
CN107794510A (en) * 2016-08-31 2018-03-13 湘潭宏大真空技术股份有限公司 Fexible film vertical vacuum coating film production line
CN110983285A (en) * 2019-12-31 2020-04-10 广东腾胜科技创新有限公司 Vacuum winding coating equipment capable of simultaneously coating multiple rolls of base materials

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113416940A (en) * 2021-06-29 2021-09-21 辽宁分子流科技有限公司 Parallel winding coating production line
CN113416942A (en) * 2021-06-29 2021-09-21 辽宁分子流科技有限公司 Winding film coating machine
CN113416940B (en) * 2021-06-29 2023-02-24 辽宁分子流科技有限公司 Parallel winding coating production line

Similar Documents

Publication Publication Date Title
CN112853303A (en) Vacuum winding coating device and processing method thereof
US7896968B2 (en) Winding type plasma CVD apparatus
US20110139072A1 (en) Continuous deposition apparatus
US3158507A (en) Floating roller seal
JP5665290B2 (en) Deposition equipment
EP2492369B1 (en) Cvd film forming device
EP3674440A1 (en) Vacuum processing system and methods therefor
US20110240225A1 (en) Treatment apparatus for flexible substrate
KR20090128428A (en) Vacuum treatment of strip-shaped substrates
US20110274838A1 (en) System and process for the continuous vacuum coating of a material in web form
KR20110028229A (en) Film deposition method
WO2009048104A1 (en) Production system of thin film solar battery
CN215628272U (en) Vacuum winding coating device
US20100304155A1 (en) Film deposition method, film deposition apparatus, and gas barrier film
CN215593180U (en) Vacuum winding coating device
CN112853304A (en) Vacuum winding coating device and processing method thereof
JP4714714B2 (en) Gate valve for maintaining airtightness, film manufacturing apparatus and film manufacturing method using the gate valve
JP3560134B2 (en) Thin-film semiconductor manufacturing equipment
CN213000864U (en) Coating back roll, back roll coating machine and double-sided back roll coating machine
US20070107781A1 (en) Lock valve in particular for a strip processing unit
JP3610808B2 (en) Thin film manufacturing equipment
CN102534540A (en) Continuous coating device and production process
CN210127269U (en) Ultra-thin baseband draw gear among flexible roll-to-roll magnetron sputtering coating film
CN217455277U (en) Film laminating device applied to water-washing photosensitive resin plate
CN219631836U (en) Prevent fold multichannel coating machine

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination
RJ01 Rejection of invention patent application after publication
RJ01 Rejection of invention patent application after publication

Application publication date: 20210528