CN110983285A - Vacuum winding coating equipment capable of simultaneously coating multiple rolls of base materials - Google Patents
Vacuum winding coating equipment capable of simultaneously coating multiple rolls of base materials Download PDFInfo
- Publication number
- CN110983285A CN110983285A CN201911405903.7A CN201911405903A CN110983285A CN 110983285 A CN110983285 A CN 110983285A CN 201911405903 A CN201911405903 A CN 201911405903A CN 110983285 A CN110983285 A CN 110983285A
- Authority
- CN
- China
- Prior art keywords
- winding
- coating
- roller
- unwinding
- chamber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000000576 coating method Methods 0.000 title claims abstract description 152
- 239000011248 coating agent Substances 0.000 title claims abstract description 151
- 238000004804 winding Methods 0.000 title claims abstract description 133
- 239000000463 material Substances 0.000 title claims abstract description 70
- 230000007246 mechanism Effects 0.000 claims abstract description 151
- 238000009434 installation Methods 0.000 claims abstract description 12
- 238000005507 spraying Methods 0.000 claims abstract description 4
- 239000000758 substrate Substances 0.000 claims description 18
- 239000002184 metal Substances 0.000 claims description 5
- 239000004744 fabric Substances 0.000 claims description 4
- 239000007888 film coating Substances 0.000 claims description 4
- 238000009501 film coating Methods 0.000 claims description 4
- 239000011521 glass Substances 0.000 claims description 4
- 230000008020 evaporation Effects 0.000 claims description 3
- 238000001704 evaporation Methods 0.000 claims description 3
- 238000000623 plasma-assisted chemical vapour deposition Methods 0.000 claims description 3
- 238000001771 vacuum deposition Methods 0.000 abstract description 2
- 238000010586 diagram Methods 0.000 description 18
- 230000000712 assembly Effects 0.000 description 13
- 238000000429 assembly Methods 0.000 description 13
- 238000000034 method Methods 0.000 description 9
- 238000001514 detection method Methods 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000002265 prevention Effects 0.000 description 2
- 238000006467 substitution reaction Methods 0.000 description 2
- 239000000956 alloy Substances 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000005096 rolling process Methods 0.000 description 1
Images
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
- C23C14/562—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks for coating elongated substrates
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/54—Apparatus specially adapted for continuous coating
- C23C16/545—Apparatus specially adapted for continuous coating for coating elongated substrates
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- General Chemical & Material Sciences (AREA)
- Physical Vapour Deposition (AREA)
Abstract
The invention relates to vacuum winding coating equipment capable of coating multiple rolls of base materials simultaneously, which comprises an unwinding chamber, a coating chamber and a winding chamber, wherein the unwinding chamber, the coating chamber and the winding chamber are sequentially arranged along a base material running path; the unwinding chamber is internally provided with a plurality of unwinding mechanisms, the coating chamber is internally provided with a coating source, the spraying direction of the coating source faces to the base material, the winding chamber is internally provided with at least one winding mechanism, and a plurality of guide roller mechanisms are arranged along the running path of the base material; the unwinding mechanism comprises an installation plate, a driving motor fixed on the installation plate and an unwinding roller rotatably installed on the installation plate; the coiled base material is wound on the unwinding roller, and the unwinding roller is connected to the output end of the driving motor; the winding mechanism comprises a bearing plate, a power motor fixed on the bearing plate and a winding roller rotatably mounted on the bearing plate; the coiled base material is wound on a winding roller, and the winding roller is connected to the output end of a power motor. The vacuum winding coating equipment can simultaneously carry out coating on a plurality of rolls of base materials by using the coating source, and belongs to the technical field of vacuum coating.
Description
Technical Field
The invention relates to the technical field of vacuum coating, in particular to vacuum winding coating equipment capable of coating multiple rolls of base materials simultaneously.
Background
The existing winding coating equipment can only coat a single roll of base material, and for coating a roll of base material with small width, the method has low efficiency and high cost. At present, no equipment is available for simultaneously coating multiple rolls of substrates.
Disclosure of Invention
Aiming at the technical problems in the prior art, the invention aims to: provides a vacuum winding coating device capable of coating a plurality of rolls of base materials simultaneously, which can simultaneously coat the films of the plurality of rolls of base materials by sharing a coating source.
In order to achieve the purpose, the invention adopts the following technical scheme:
the vacuum winding coating equipment capable of coating multiple rolls of base materials simultaneously comprises an unwinding chamber, a coating chamber and a winding chamber which are sequentially arranged along a base material running path; more than one unwinding mechanism is arranged in the unwinding chamber, a coating source is arranged in the coating chamber, the spraying direction of the coating source faces to the base material, at least one winding mechanism is arranged in the winding chamber, and a plurality of guide roller mechanisms are arranged along the running path of the base material; the unwinding mechanism comprises an installation plate, a driving motor fixed on the installation plate and an unwinding roller rotatably installed on the installation plate; the coiled base material is wound on the unwinding roller, and the unwinding roller is connected to the output end of the driving motor; the winding mechanism comprises a bearing plate, a power motor fixed on the bearing plate and a winding roller rotatably mounted on the bearing plate; the coiled base material is wound on a winding roller, and the winding roller is connected to the output end of a power motor; the guide roller mechanism comprises a bearing seat, a guide roller shaft rotatably arranged on the bearing seat, and a guide sleeve assembly sleeved on the guide roller shaft; the guide sleeve assembly comprises a guide roller sleeve, bearings are arranged at two ends of the interior of the guide roller sleeve, and the bearings are sleeved on a guide roller shaft.
Further, the method comprises the following steps: the vacuum winding coating equipment further comprises a fixing plate, wherein in the plurality of unwinding mechanisms, the driving motor of each unwinding mechanism corresponds to the unwinding roller for driving the unwinding mechanism, one end of each unwinding roller of each unwinding mechanism is connected to the mounting plate of the corresponding unwinding mechanism, and the other end of each unwinding roller is connected to the fixing plate.
Further, the method comprises the following steps: the vacuum winding coating equipment also comprises a connecting plate; when a plurality of winding mechanisms are arranged, in the plurality of winding mechanisms, the power motor of each winding mechanism correspondingly drives the winding roller of the winding mechanism, one end of each winding roller of all the winding mechanisms is connected to the bearing plate of the winding mechanism, and the other end of each winding roller of each winding mechanism is connected to the connecting plate; when the winding mechanism is one, one end of the winding roller is connected to the bearing plate, and the other end of the winding roller is connected to the connecting plate.
Further, the method comprises the following steps: the bearing seats of the guide roller mechanisms are two, two ends of the guide roller shaft are both installed on the bearing seats through bearings, and at least one guide sleeve assembly is arranged.
Further, the method comprises the following steps: the coating chamber is internally provided with or not provided with a coating roller, when the coating roller is arranged in the coating chamber, all base materials are wound around the coating roller, and the positions of the wound-in and wound-out coating rollers are provided with a guide roller mechanism.
Further, the method comprises the following steps: when the coating chamber is not provided with the coating roller, all the coating sources are positioned at the same side of the base material or both sides of the base material are provided with the coating sources.
Further, the method comprises the following steps: and guide roller mechanisms are arranged in the winding chamber and the unwinding chamber, and the coating chamber is internally provided with or not provided with the guide roller mechanisms.
Further, the method comprises the following steps: the coating source is a magnetic control target, an evaporation source, an arc source or a PECVD source.
Further, the method comprises the following steps: the base material is organic film, metal coiled material, cloth, sponge or ultrathin glass.
In summary, the present invention has the following advantages:
the vacuum winding coating equipment can realize simultaneous coating of multiple rolls of base materials by using a coating source, thereby greatly improving the production efficiency and the cost performance of products. The multi-roll vacuum winding coating equipment adopts a plurality of guide sleeve assemblies and a plurality of rolls of base material to realize scratch prevention by adopting each roll of independent motor and a guide roller mechanism and independently controlling the speed of the base material, thereby greatly improving the product quality. The vacuum winding coating equipment has strong upgrading space, can be used for coating multiple rolls simultaneously and can also be used for realizing single-roll coating after being transformed. The guide sleeve assembly can realize that the rotating speed of each roll of base material is independent, and the requirement of constant-speed film coating of inconsistent speed of each roll of base material is met. The vacuum winding coating equipment is suitable for coating metal films, conductive films, alloy films, dielectric films and the like on flexible substrates such as organic films, metal coiled materials, cloth, sponge, ultrathin glass and the like.
Drawings
FIG. 1 is a schematic structural diagram of the vacuum winding coating equipment in the main view direction, provided with coating rollers and having 2 unwinding mechanisms.
FIG. 2 is a schematic structural diagram of the vacuum winding coating equipment in the front view direction, wherein a coating roller is not arranged and a coating source is arranged on one side of a substrate.
FIG. 3 is a schematic structural diagram of the vacuum winding coating equipment in the front view direction, without coating rollers and with coating sources on both sides of the substrate.
FIG. 4 is a schematic structural diagram of the vacuum winding coating apparatus in the front view direction, provided with coating rollers and having 4 unwinding mechanisms.
FIG. 5 is a schematic structural diagram of the vacuum winding coating apparatus in the top view direction, and includes 2 unwinding mechanisms, 1 guide sleeve assembly per guide roller mechanism, and 1 winding mechanism.
FIG. 6 is a schematic structural diagram of the vacuum winding coating apparatus in the top view direction, and there are 4 unwinding mechanisms, and each guide roller mechanism has only 1 guide sleeve assembly and 1 winding mechanism.
FIG. 7 is a schematic structural diagram of the vacuum winding coating device in the top view direction, and the vacuum winding coating device has 2 unwinding mechanisms, 2 guide sleeve assemblies for each guide roller mechanism, and 2 winding mechanisms.
FIG. 8 is a schematic structural diagram of the vacuum winding coating device in the top view direction, and the vacuum winding coating device has 4 unwinding mechanisms, 4 guide sleeve assemblies for each guide roller mechanism, and 4 winding mechanisms.
Fig. 9 is a schematic structural diagram of 2 unwinding mechanisms.
Fig. 10 is a schematic structural diagram of 3 unwinding mechanisms.
Fig. 11 is a schematic structural diagram of 4 unwinding mechanisms.
FIG. 12 is a schematic view of a configuration in which multiple rolls of substrate are wound around 1 take-up mechanism.
Fig. 13 is a schematic view of the structure of only 1 guide sleeve assembly on the guide roller mechanism.
Fig. 14 is a schematic diagram of the structure of 2 guide sleeve assemblies on the guide roller mechanism.
Fig. 15 is a schematic diagram of the structure of the guide roller mechanism with 3 guide sleeve assemblies.
Fig. 16 is a schematic diagram of the guide roller mechanism with 4 guide sleeve assemblies.
Detailed Description
The present invention will be described in further detail with reference to the accompanying drawings and detailed description.
To facilitate a uniform view of the various reference numbers within the drawings, reference numbers appearing in the drawings are now described collectively as follows:
the device comprises an unwinding chamber 1, a coating chamber 2, a winding chamber 3, an unwinding mechanism 4, a winding mechanism 5, a guide roller mechanism 6, a coating source 7, a base material 8, a fixing plate 9, a connecting plate 10, an unwinding roller 4-1, a driving motor 4-2, a mounting plate 4-3, a winding roller 5-1, a power motor 5-2, a bearing plate 5-3, a bearing seat 6-1, a guide roller shaft 6-2, a guide roller sleeve 6-3 and a bearing 6-4.
Referring to fig. 1, a vacuum winding coating apparatus capable of coating multiple rolls of substrate simultaneously includes an unwinding chamber, a coating chamber, and a winding chamber sequentially disposed along a substrate moving path; the vacuum winding coating equipment can be used for coating a plurality of rolls of base materials at the same time. The unwinding chamber is internally provided with more than one unwinding mechanism, the vacuum winding film coating equipment is provided with a plurality of unwinding mechanisms, and the structure of each unwinding mechanism is the same. The coating chamber is internally provided with a coating source, the spraying direction of the coating source faces to the base material, and the coating source is arranged on the running path of the base material. At least one winding mechanism is arranged in the winding chamber, and when a plurality of winding mechanisms are arranged, the structure of each winding mechanism is the same. A plurality of guide roller mechanisms are arranged along the running path of the base material, and can guide and change the running direction of the base material and assist the running of the base material. The unwinding mechanism comprises an installation plate, a driving motor fixed on the installation plate and an unwinding roller rotatably installed on the installation plate; the rolled base material is wound around an unwinding roller connected to an output end of a driving motor. The winding mechanism comprises a bearing plate, a power motor fixed on the bearing plate and a winding roller rotatably mounted on the bearing plate; the coiled base material is wound on a winding roller, and the winding roller is connected to the output end of a power motor. The unwinding mechanism and the winding mechanism are the same in structure, one is unwinding and the other is winding. The guide roller mechanism comprises a bearing seat, a guide roller shaft arranged on the bearing seat in a rotary mode, and a guide sleeve assembly sleeved on the guide roller shaft. The guide sleeve assembly comprises guide roller sleeve bearings, bearings are arranged at two ends inside the guide roller sleeve, namely two bearings are arranged inside the guide roller sleeve, the two bearings are arranged at two ends inside the guide roller sleeve respectively, and the bearings are sleeved on the guide roller shaft, so that the guide roller sleeve is sleeved on the guide roller shaft in a rotating mode.
The vacuum winding coating equipment further comprises a fixing plate, wherein in the plurality of unwinding mechanisms, the driving motor of each unwinding mechanism corresponds to the unwinding roller for driving the unwinding mechanism, one end of each unwinding roller of each unwinding mechanism is connected to the mounting plate of the corresponding unwinding mechanism, and the other end of each unwinding roller is connected to the fixing plate. As shown in fig. 9, 2 unwinding mechanisms are provided in the scheme of fig. 9, 2 rolls of substrate can be wound, 2 driving motors in 2 unwinding mechanisms respectively correspond to 2 unwinding rollers for driving 2 unwinding mechanisms, one ends of 2 unwinding rollers in 2 unwinding mechanisms are respectively connected to the mounting plates of 2 unwinding mechanisms, and the other ends of 2 unwinding rollers are all connected to the fixing plate together. As shown in fig. 10, 3 unwinding mechanisms are provided in the scheme of fig. 10, 3 rolls of substrate can be wound, 3 driving motors in the 3 unwinding mechanisms respectively correspond to 3 unwinding rollers for driving the 3 unwinding mechanisms, one ends of the 3 unwinding rollers in the 3 unwinding mechanisms are respectively connected to the mounting plates of the 3 unwinding mechanisms, and the other ends of the 3 unwinding rollers are all connected to the fixing plate together. As shown in fig. 11, the scheme of fig. 11 has 4 unwinding mechanisms, and can unwind 4 rolls of substrate, 4 driving motors in the 4 unwinding mechanisms respectively correspond to 4 unwinding rollers for driving the 4 unwinding mechanisms, one ends of the 4 unwinding rollers in the 4 unwinding mechanisms are respectively connected to the mounting plates of the 4 unwinding mechanisms, and the other ends of the 4 unwinding rollers are all connected to the fixing plate together. The number of the unwinding mechanisms can be set according to actual needs, and more unwinding mechanisms can be arranged.
The vacuum winding coating equipment also comprises a connecting plate; when winding mechanism is a plurality of, among a plurality of winding mechanism, the driving motor of every winding mechanism corresponds the wind-up roll of this winding mechanism of drive, and the one end of the wind-up roll of all winding mechanism is connected on this winding mechanism's loading board, and the other end is connected on the connecting plate jointly. When the number of the winding mechanisms is 2, 3 or 4, the winding mechanisms can be understood by combining corresponding fig. 9, 10 or 11 in the unwinding mechanism scheme. Referring to fig. 12, when there is one winding mechanism, one end of the winding roller is connected to the carrier plate, and the other end is connected to the connecting plate.
The bearing seats of the guide roller mechanisms are two, two ends of the guide roller shaft are both installed on the bearing seats through bearings, and at least one guide sleeve assembly is arranged. In the solution shown in fig. 13, the guide roller mechanism has 1 guide sleeve assembly. In the solution shown in fig. 14, the guide roller mechanism has 2 guide sleeve assemblies. In the solution shown in fig. 15, the guide roller mechanism has 3 guide sleeve assemblies. In the arrangement shown in fig. 16, the guide roller mechanism has 4 guide sleeve assemblies. The arrangement of the guide sleeve assembly can realize the independence of the rotating speed of each roll of base material and the inconsistency of the speed of each roll of base material. The number of guide sleeve assemblies may be greater depending on the application. As shown in fig. 5, there are 2 unwinding mechanisms, only 1 guide sleeve assembly for each guide roller mechanism, and 1 winding mechanism (i.e. the same winding roller is used to wind all the substrates). As shown in fig. 6, there are 4 unwinding mechanisms (only 2 driving motors are shown), and there are only 1 guide sleeve assembly and 1 winding mechanism for each guide roller mechanism (i.e. the same winding roller is used to wind all the substrates). As shown in fig. 7, there are 2 unwinding mechanisms, 2 guide sleeve assemblies of each guide roller mechanism, and 2 winding mechanisms correspondingly. As shown in fig. 8, there are 4 unwinding mechanisms, 4 guide sleeve assemblies of each guide roller mechanism, and 4 winding mechanisms correspondingly.
The coating film is characterized in that the coating film roller is arranged in the coating film chamber or not, when the coating film roller is arranged in the coating film chamber, all base materials are wound around the coating film roller, namely, the base materials wound out by all unwinding mechanisms are wound around the same coating film roller, and a guide roller mechanism is arranged at the position of the wound-in and wound-out coating film roller. As shown in fig. 1, a coating roller is arranged in the coating chamber, 2 unwinding mechanisms (only 1 is shown in a main view diagram) are arranged in the unwinding chamber, and 2 winding mechanisms (only 1 is shown in the main view diagram) are arranged in the winding chamber. As shown in fig. 2, no coating rolls are provided in the coating chamber, and all coating sources are coated on the same side of the substrate. As shown in FIG. 3, no coating roller is provided in the coating chamber, and coating sources are provided on both sides of the substrate. As shown in fig. 4, a coating roller is disposed in the coating chamber, 4 unwinding mechanisms (only 2 are shown in the main view diagram) are disposed in the unwinding chamber, and 4 winding mechanisms (only 2 are shown in the main view diagram) are disposed in the winding chamber.
When the coating chamber is not provided with the coating roller, all the coating sources are positioned at the same side of the base material or both sides of the base material are provided with the coating sources. According to the difference of the temperature resistance degree of the base materials, the coating roller can be arranged or not arranged in the coating chamber, the base materials which are not high in temperature resistance are arranged, the coating roller can be arranged on the base materials which are high in temperature resistance, the coating roller can not be arranged on the base materials which are high in temperature resistance, the coating mode with the coating roller adopts a plurality of rolls of base materials which share the coating roller, and all rolls of base materials are wound around the coating roller to be coated.
And guide roller mechanisms are arranged in the winding chamber and the unwinding chamber, and the coating chamber is internally provided with or not provided with the guide roller mechanisms.
The coating source is a magnetic control target, an evaporation source, an arc source or a PECVD source.
The base material is organic film, metal coiled material, cloth, sponge or ultrathin glass.
The speed control of each roll of base material can be realized through closed-loop control or open-loop control, the closed-loop control and the open-loop control belong to the prior art, the closed-loop control adopts subsection tension detection, and each section of detection signal is fed back to a corresponding motor, so that the speed of each roll is independently controlled. The closed-loop control can also adopt feedback signals such as motor torque detection, speed detection and the like to control the motor, so that the speed of each roll can be independently controlled.
This coating process of vacuum winding filming equipment, after all substrates come out from unwinding mechanism, get into the coating film room through guide roller mechanism earlier, carry out the coating film to the substrate at the indoor coating film source of coating film, then come out from the coating film room and pass through guide roller mechanism again, get into the rolling room, winding mechanism winds the substrate. The vacuum winding coating equipment can realize simultaneous coating of multiple rolls of base materials by using a coating source, thereby greatly improving the production efficiency and the cost performance of products. The multi-roll vacuum winding coating equipment adopts a plurality of guide sleeve assemblies and a plurality of rolls of base material to realize scratch prevention by adopting each roll of independent motor and a guide roller mechanism and independently controlling the speed of the base material, thereby greatly improving the product quality. The vacuum winding coating equipment has strong upgrading space, can be used for coating multiple rolls simultaneously and can also be used for realizing single-roll coating after being transformed. The guide sleeve assembly can realize that the rotating speed of each roll of base material is independent, and the requirement of constant-speed film coating of inconsistent speed of each roll of base material is met.
The above embodiments are preferred embodiments of the present invention, but the present invention is not limited to the above embodiments, and any other changes, modifications, substitutions, combinations, and simplifications which do not depart from the spirit and principle of the present invention should be construed as equivalents thereof, and all such changes, modifications, substitutions, combinations, and simplifications are intended to be included in the scope of the present invention.
Claims (9)
1. The vacuum winding coating equipment capable of simultaneously coating multiple rolls of substrates is characterized in that: the device comprises an unreeling chamber, a film coating chamber and a reeling chamber which are sequentially arranged along a running path of a base material; more than one unwinding mechanism is arranged in the unwinding chamber, a coating source is arranged in the coating chamber, the spraying direction of the coating source faces to the base material, at least one winding mechanism is arranged in the winding chamber, and a plurality of guide roller mechanisms are arranged along the running path of the base material; the unwinding mechanism comprises an installation plate, a driving motor fixed on the installation plate and an unwinding roller rotatably installed on the installation plate; the coiled base material is wound on the unwinding roller, and the unwinding roller is connected to the output end of the driving motor; the winding mechanism comprises a bearing plate, a power motor fixed on the bearing plate and a winding roller rotatably mounted on the bearing plate; the coiled base material is wound on a winding roller, and the winding roller is connected to the output end of a power motor; the guide roller mechanism comprises a bearing seat, a guide roller shaft rotatably arranged on the bearing seat, and a guide sleeve assembly sleeved on the guide roller shaft; the guide sleeve assembly comprises a guide roller sleeve, bearings are arranged at two ends of the interior of the guide roller sleeve, and the bearings are sleeved on a guide roller shaft.
2. The vacuum-winding coating apparatus of claim 1, wherein: the vacuum winding coating equipment further comprises a fixing plate, wherein in the plurality of unwinding mechanisms, the driving motor of each unwinding mechanism corresponds to the unwinding roller for driving the unwinding mechanism, one end of each unwinding roller of each unwinding mechanism is connected to the mounting plate of the corresponding unwinding mechanism, and the other end of each unwinding roller is connected to the fixing plate.
3. The vacuum-winding coating apparatus of claim 1, wherein: the vacuum winding coating equipment also comprises a connecting plate; when a plurality of winding mechanisms are arranged, in the plurality of winding mechanisms, the power motor of each winding mechanism correspondingly drives the winding roller of the winding mechanism, one end of each winding roller of all the winding mechanisms is connected to the bearing plate of the winding mechanism, and the other end of each winding roller of each winding mechanism is connected to the connecting plate; when the winding mechanism is one, one end of the winding roller is connected to the bearing plate, and the other end of the winding roller is connected to the connecting plate.
4. The vacuum-winding coating apparatus of claim 1, wherein: the bearing seats of the guide roller mechanisms are two, two ends of the guide roller shaft are both installed on the bearing seats through bearings, and at least one guide sleeve assembly is arranged.
5. The vacuum-winding coating apparatus of claim 1, wherein: the coating chamber is internally provided with or not provided with a coating roller, when the coating roller is arranged in the coating chamber, all base materials are wound around the coating roller, and the positions of the wound-in and wound-out coating rollers are provided with a guide roller mechanism.
6. The vacuum-winding coating apparatus of claim 5, wherein: when the coating chamber is not provided with the coating roller, all the coating sources are positioned at the same side of the base material or both sides of the base material are provided with the coating sources.
7. The vacuum-winding coating apparatus of claim 1, wherein: and guide roller mechanisms are arranged in the winding chamber and the unwinding chamber, and the coating chamber is internally provided with or not provided with the guide roller mechanisms.
8. The vacuum-winding coating apparatus of claim 1, wherein: the coating source is a magnetic control target, an evaporation source, an arc source or a PECVD source.
9. The vacuum-winding coating apparatus of claim 1, wherein: the base material is organic film, metal coiled material, cloth, sponge or ultrathin glass.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201911405903.7A CN110983285A (en) | 2019-12-31 | 2019-12-31 | Vacuum winding coating equipment capable of simultaneously coating multiple rolls of base materials |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201911405903.7A CN110983285A (en) | 2019-12-31 | 2019-12-31 | Vacuum winding coating equipment capable of simultaneously coating multiple rolls of base materials |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN110983285A true CN110983285A (en) | 2020-04-10 |
Family
ID=70079525
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201911405903.7A Pending CN110983285A (en) | 2019-12-31 | 2019-12-31 | Vacuum winding coating equipment capable of simultaneously coating multiple rolls of base materials |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN110983285A (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112853303A (en) * | 2020-12-31 | 2021-05-28 | 广东欣丰科技有限公司 | Vacuum winding coating device and processing method thereof |
| CN114381695A (en) * | 2021-12-31 | 2022-04-22 | 重庆金美新材料科技有限公司 | Film production line and film production method |
| CN114686838A (en) * | 2022-03-28 | 2022-07-01 | 尚越光电科技股份有限公司 | High-stability transmission system of CIGS co-evaporation equipment |
| CN116479412A (en) * | 2023-04-24 | 2023-07-25 | 江苏微导纳米科技股份有限公司 | Winding type processing equipment and processing method |
Citations (21)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP1561837A1 (en) * | 2004-02-07 | 2005-08-10 | Applied Films GmbH & Co. KG | Strip coating installation with a vacuum chamber and a coating cylinder |
| CN203360567U (en) * | 2013-07-19 | 2013-12-25 | 南昌欧菲光科技有限公司 | Double-side winding-type coating machine |
| CN104651792A (en) * | 2015-03-09 | 2015-05-27 | 常州工学院 | Single-sided continuous winding magnetron sputtering coating automatic production line for flexible substrate |
| CN204509449U (en) * | 2015-01-29 | 2015-07-29 | 厦门玉通光电有限公司 | Magnetic control winding film coating machine |
| CN204509448U (en) * | 2015-01-29 | 2015-07-29 | 厦门玉通光电有限公司 | The two rolling charging/discharging device of vacuum plating |
| CN105239052A (en) * | 2015-11-17 | 2016-01-13 | 广东腾胜真空技术工程有限公司 | Double-release and double-collection winding film coating device and method |
| CN105349961A (en) * | 2015-11-30 | 2016-02-24 | 广东腾胜真空技术工程有限公司 | Multi-roller and multi-chamber coiling film coating device |
| CN205188432U (en) * | 2015-11-17 | 2016-04-27 | 广东腾胜真空技术工程有限公司 | Two pair receipts winding coating devices of putting |
| CN105986238A (en) * | 2016-06-27 | 2016-10-05 | 广东腾胜真空技术工程有限公司 | Device for electronic beams to assist plasma in sputtering coating of flexibility copper-clad plate |
| CN106835051A (en) * | 2017-03-31 | 2017-06-13 | 无锡光润真空科技有限公司 | Wire rod winding film coating machine |
| CN206328459U (en) * | 2016-12-23 | 2017-07-14 | 青州金青云新材料有限公司 | A kind of film vacuum with flattening of blowing is aluminized production equipment |
| CN107460446A (en) * | 2017-10-11 | 2017-12-12 | 肇庆兆达光电科技有限公司 | A kind of flexible copper-clad plate winding film plating system of carrying magnetic electrode device |
| CN109056254A (en) * | 2018-08-31 | 2018-12-21 | 嘉善凝红绒业有限公司 | A kind of flocked fabric final finishing device |
| CN109319411A (en) * | 2018-09-13 | 2019-02-12 | 西部矿业股份有限公司 | A kind of non-maintaining guide roller |
| CN109335777A (en) * | 2018-11-14 | 2019-02-15 | 广州市高浦特光电科技有限公司 | A kind of Scissoring device for the diaphragm that adds lustre to |
| CN208913003U (en) * | 2018-10-11 | 2019-05-31 | 天津丰通金属制品有限公司 | A kind of stamping system weed take-up device |
| CN209177652U (en) * | 2017-04-24 | 2019-07-30 | 浙江佳阳塑胶新材料有限公司 | Wrap-up is used in a kind of production of film |
| CN209428594U (en) * | 2019-01-06 | 2019-09-24 | 山东天厚新材料科技有限公司 | A kind of magnetron sputtering energy saver |
| CN110331376A (en) * | 2019-08-21 | 2019-10-15 | 广东腾胜科技创新有限公司 | A kind of T-type Vacuum Roll Coating Equipment with diaphragm valve |
| DE212019000054U1 (en) * | 2019-10-13 | 2019-11-21 | Suzhou Bidaer Innovation Materials Technology Co. Ltd. | A device for the uniform strengthening of textile fibers |
| CN211142163U (en) * | 2019-12-31 | 2020-07-31 | 广东腾胜科技创新有限公司 | Vacuum winding coating equipment capable of simultaneously coating multiple rolls of base materials |
-
2019
- 2019-12-31 CN CN201911405903.7A patent/CN110983285A/en active Pending
Patent Citations (21)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP1561837A1 (en) * | 2004-02-07 | 2005-08-10 | Applied Films GmbH & Co. KG | Strip coating installation with a vacuum chamber and a coating cylinder |
| CN203360567U (en) * | 2013-07-19 | 2013-12-25 | 南昌欧菲光科技有限公司 | Double-side winding-type coating machine |
| CN204509449U (en) * | 2015-01-29 | 2015-07-29 | 厦门玉通光电有限公司 | Magnetic control winding film coating machine |
| CN204509448U (en) * | 2015-01-29 | 2015-07-29 | 厦门玉通光电有限公司 | The two rolling charging/discharging device of vacuum plating |
| CN104651792A (en) * | 2015-03-09 | 2015-05-27 | 常州工学院 | Single-sided continuous winding magnetron sputtering coating automatic production line for flexible substrate |
| CN105239052A (en) * | 2015-11-17 | 2016-01-13 | 广东腾胜真空技术工程有限公司 | Double-release and double-collection winding film coating device and method |
| CN205188432U (en) * | 2015-11-17 | 2016-04-27 | 广东腾胜真空技术工程有限公司 | Two pair receipts winding coating devices of putting |
| CN105349961A (en) * | 2015-11-30 | 2016-02-24 | 广东腾胜真空技术工程有限公司 | Multi-roller and multi-chamber coiling film coating device |
| CN105986238A (en) * | 2016-06-27 | 2016-10-05 | 广东腾胜真空技术工程有限公司 | Device for electronic beams to assist plasma in sputtering coating of flexibility copper-clad plate |
| CN206328459U (en) * | 2016-12-23 | 2017-07-14 | 青州金青云新材料有限公司 | A kind of film vacuum with flattening of blowing is aluminized production equipment |
| CN106835051A (en) * | 2017-03-31 | 2017-06-13 | 无锡光润真空科技有限公司 | Wire rod winding film coating machine |
| CN209177652U (en) * | 2017-04-24 | 2019-07-30 | 浙江佳阳塑胶新材料有限公司 | Wrap-up is used in a kind of production of film |
| CN107460446A (en) * | 2017-10-11 | 2017-12-12 | 肇庆兆达光电科技有限公司 | A kind of flexible copper-clad plate winding film plating system of carrying magnetic electrode device |
| CN109056254A (en) * | 2018-08-31 | 2018-12-21 | 嘉善凝红绒业有限公司 | A kind of flocked fabric final finishing device |
| CN109319411A (en) * | 2018-09-13 | 2019-02-12 | 西部矿业股份有限公司 | A kind of non-maintaining guide roller |
| CN208913003U (en) * | 2018-10-11 | 2019-05-31 | 天津丰通金属制品有限公司 | A kind of stamping system weed take-up device |
| CN109335777A (en) * | 2018-11-14 | 2019-02-15 | 广州市高浦特光电科技有限公司 | A kind of Scissoring device for the diaphragm that adds lustre to |
| CN209428594U (en) * | 2019-01-06 | 2019-09-24 | 山东天厚新材料科技有限公司 | A kind of magnetron sputtering energy saver |
| CN110331376A (en) * | 2019-08-21 | 2019-10-15 | 广东腾胜科技创新有限公司 | A kind of T-type Vacuum Roll Coating Equipment with diaphragm valve |
| DE212019000054U1 (en) * | 2019-10-13 | 2019-11-21 | Suzhou Bidaer Innovation Materials Technology Co. Ltd. | A device for the uniform strengthening of textile fibers |
| CN211142163U (en) * | 2019-12-31 | 2020-07-31 | 广东腾胜科技创新有限公司 | Vacuum winding coating equipment capable of simultaneously coating multiple rolls of base materials |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112853303A (en) * | 2020-12-31 | 2021-05-28 | 广东欣丰科技有限公司 | Vacuum winding coating device and processing method thereof |
| CN114381695A (en) * | 2021-12-31 | 2022-04-22 | 重庆金美新材料科技有限公司 | Film production line and film production method |
| CN114686838A (en) * | 2022-03-28 | 2022-07-01 | 尚越光电科技股份有限公司 | High-stability transmission system of CIGS co-evaporation equipment |
| CN114686838B (en) * | 2022-03-28 | 2024-06-11 | 尚越光电科技股份有限公司 | High-stability transmission system of CIGS co-evaporation equipment |
| CN116479412A (en) * | 2023-04-24 | 2023-07-25 | 江苏微导纳米科技股份有限公司 | Winding type processing equipment and processing method |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN110983285A (en) | Vacuum winding coating equipment capable of simultaneously coating multiple rolls of base materials | |
| CN109898067B (en) | Automatic production line for double-sided winding coating of flexible base material | |
| CN211142163U (en) | Vacuum winding coating equipment capable of simultaneously coating multiple rolls of base materials | |
| WO2022047947A1 (en) | Multi-roller vacuum coating device | |
| CN102555406A (en) | Rolling device of electrode material | |
| KR20140146929A (en) | Apparatus for winding thin film and Method thereof | |
| CN111235544B (en) | Film coating machine | |
| CN103046015A (en) | Reel-to-reel type high-efficiency magnetron-sputtering vacuum coating device and method | |
| JP3245999B2 (en) | Continuous wire coating equipment | |
| CN215050645U (en) | Double-sided winding film coating machine adopting high-power electron beam evaporation | |
| CN214003543U (en) | Double-servo rewinding machine | |
| CN115602782A (en) | Battery sheet dry process coating pressing equipment | |
| CN210763432U (en) | Double-sided soft board roll-to-roll loosening and tightening machine | |
| CN113265623A (en) | Double-sided winding film coating machine adopting high-power electron beam evaporation | |
| CN219099302U (en) | Roll-to-roll coating equipment | |
| CN112095087A (en) | Coating equipment with air isolation structure for production of conductive film | |
| CN218291093U (en) | Double-sided multi-station winding type vacuum coating machine | |
| CN221235652U (en) | Film double-sided copper plating equipment | |
| CN218089774U (en) | Double-sided vacuum magnetron sputtering winding coating machine | |
| CN218345540U (en) | Winding device based on flexible substrate double-sided coating and winding coating equipment | |
| CN114379193B (en) | Full-automatic coating device for proton exchange membrane of hydrogen fuel cell | |
| CN113201722B (en) | Strip vacuum plasma coating method and device | |
| CN212270229U (en) | Continuous winding vacuum coating production device of tunnel type stainless steel decorative coiled plate | |
| CN115852321A (en) | Roll-to-roll film coating equipment and film coating method | |
| CN216947177U (en) | Continuous multi-roll efficient film coating machine |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination |