CN210127269U - Ultra-thin baseband draw gear among flexible roll-to-roll magnetron sputtering coating film - Google Patents
Ultra-thin baseband draw gear among flexible roll-to-roll magnetron sputtering coating film Download PDFInfo
- Publication number
- CN210127269U CN210127269U CN201920686229.3U CN201920686229U CN210127269U CN 210127269 U CN210127269 U CN 210127269U CN 201920686229 U CN201920686229 U CN 201920686229U CN 210127269 U CN210127269 U CN 210127269U
- Authority
- CN
- China
- Prior art keywords
- flexible
- baseband
- cavity
- base band
- film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Images
Landscapes
- Physical Vapour Deposition (AREA)
Abstract
The utility model relates to a vacuum coating field provides an ultra-thin baseband draw gear in flexible volume to volume magnetron sputtering coating film, adopt high low vacuum cavity vacuum isolating device, utilize the flexible ultra-thin baseband that high low vacuum pressure difference will need the deposit coating film and flexible auxiliary base band laminating to form the better compound baseband of tensile strength, for flexible ultra-thin baseband provides the removal carrier, prevent that flexible ultra-thin baseband from warping, but the wide application is in the manufacturing of continuous flexible film display, thin-film solar cell, flexible window membrane of adjusting luminance, flexible electromagnetic shielding membrane etc..
Description
Technical Field
The utility model relates to a vacuum coating field provides an ultra-thin baseband draw gear in flexible volume to volume magnetron sputtering coating film, adopts high low vacuum cavity vacuum isolating device, utilizes the flexible ultra-thin baseband and the laminating of flexible supplementary baseband that high low vacuum pressure difference will need the deposit coating film to form the better compound baseband of tensile strength, provides the removal carrier for flexible ultra-thin baseband, prevents that flexible ultra-thin baseband from warping.
Background
The flexible thin film display, the thin film solar cell, the flexible light-adjusting window film and the flexible electromagnetic shielding film (collectively called as film forming) are increasingly widely applied, and in production practice, an ultra-thin flexible substrate is frequently used as a substrate, a magnetron sputtering film plating machine is utilized, inert gas is used as working gas, and a magnetron sputtering deposition type vacuum film plating technology is adopted to deposit a cathode target material or a cathode target material oxide thin film layer on the ultra-thin flexible substrate in a layered mode to form a film.
In order to maintain the continuity of film-forming production and adapt to large-scale and large-batch production, a winding (reel-to-reel), flexible and continuous magnetron sputtering deposition process is mostly adopted in the prior art.
However, in the production practice of continuous roll-to-roll magnetron sputtering deposition coating, because the ultra-thin flexible substrate has low tensile strength and the flexible substrate liner is easy to deform, the product quality of the magnetron sputtering deposition coating is affected negatively, and even the severe situation is that the magnetron sputtering deposition coating cannot be completed.
SUMMERY OF THE UTILITY MODEL
The utility model aims at providing an ultra-thin baseband draw gear in flexible volume to volume magnetron sputtering coating film adopts high low vacuum cavity vacuum isolating device, utilizes the flexible ultra-thin baseband and the laminating of flexible supplementary baseband that high low vacuum pressure difference will need the deposit coating film to form the better compound baseband of tensile strength, provides the removal carrier for flexible ultra-thin baseband, prevents that flexible ultra-thin baseband from warping.
The utility model aims at realizing through the following technical scheme:
the ultra-thin baseband traction device in the flexible roll-to-roll magnetron sputtering coating comprises a cavity body which is divided by a partition plate into an unreeling cavity, a coating cavity and a reeling cavity, inert gas is used as working gas, an unreeling table in the unreeling cavity continuously and respectively releases a flexible ultra-thin baseband and a flexible auxiliary baseband, a cold drum in the coating cavity drives a composite baseband formed by laminating the flexible ultra-thin baseband and the flexible auxiliary baseband to continuously move by a traction driving wheel, and a reeling table in the reeling cavity continuously and respectively reels a film and the flexible auxiliary baseband; the flexible auxiliary base band is tightly attached to the cold drum, the composite base band is movably arranged between the cold drum and a deposition cathode chamber of a magnetron sputtering device arranged around the cold drum, and the flexible auxiliary base band is characterized in that the vacuum degree of an unwinding chamber and the vacuum degree of a winding chamber are higher than that of a coating chamber; a passing window for enabling the composite base band to pass from the unreeling cavity to the film coating cavity and enabling the flexible auxiliary base band and the composite film band which is attached with the film on the flexible auxiliary base band to pass from the film coating cavity to the reeling cavity is formed in the partition board; a high-low vacuum cavity vacuum degree isolating device is arranged on the passing window, a base band composite extrusion roller used for removing a flexible auxiliary base band and gas still existing between flexible ultrathin base bands and enabling the flexible auxiliary base band and the flexible ultrathin base band to be tightly attached to form a composite base band is rotatably arranged between the passing window and the unwinding table, and a film material separation auxiliary roller used for assisting the composite film band to be separated into the flexible auxiliary base band and a film is rotatably arranged between the passing window and the winding table; the film-forming device further comprises an unreeling adjusting device arranged between the unreeling platform and the threading window and used for adjusting unreeling speed, and a reeling adjusting device arranged between the threading window and the reeling platform and used for adjusting film-forming reeling speed.
When in use, 1, preparation before film coating operation
The air pressure in each working chamber is equal and equal to one standard atmospheric pressure, and at the moment, the vacuum degree isolation devices of the high and low vacuum chambers are opened.
2. Feeding material
Clamping the flexible ultrathin base band coiled material and the flexible auxiliary base band coiled material on an unreeling table, and leading out a rolling head of the flexible ultrathin base band coiled material and a rolling head of the flexible auxiliary base band coiled material from the unreeling table;
the flexible ultrathin base band and the flexible auxiliary base band are overlapped and are connected to the coating cavity through a middle seam of the base band composite extrusion roller, a passing window and a middle seam of a high-low vacuum cavity vacuum degree isolation device;
the overlapped flexible ultrathin baseband and the flexible auxiliary baseband pass through a gap between a deposition cathode chamber of the magnetron sputtering device and a cold drum to be surrounded on the cold drum, are led out of the cold drum, and pass through a middle seam of a high-low vacuum cavity vacuum degree isolating device, a passing window and a middle seam of a membrane material separation auxiliary roller to reach a winding cavity;
and the flexible auxiliary base band winding head and the flexible ultrathin base band winding head are led into a winding table to complete the feeding of the flexible auxiliary base band and the flexible ultrathin base band.
3. Coating operation
Unreel chamber, coating film chamber, rolling chamber degasification, evacuation:
in the vacuumizing process, along with the improvement of the vacuum degrees of the unwinding cavity, the coating cavity and the winding cavity, the vacuum degree difference between the coating cavity and the unwinding cavity and the winding cavity is continuously increased, namely, the pressure difference between the coating cavity and the unwinding cavity and the winding cavity is continuously increased, and the high-low vacuum cavity vacuum degree isolating device is closed, so that the vacuum degrees of the unwinding cavity and the winding cavity and the flow of working gas reach design parameters when the magnetron sputtering coating machine operates.
4. Adjusting the pretightening force (surface tension) of the flexible auxiliary base band, the flexible ultrathin base band, the composite membrane band and the membrane:
the unwinding speed is adjusted by using the unwinding adjusting device, namely the pretightening force of the flexible auxiliary base band, the flexible ultrathin base band and the composite base band is adjusted, the winding speed is adjusted by using the winding adjusting device, namely the pretightening force of the composite membrane band and the film forming is adjusted, the unwinding speed and the unwinding length of the flexible auxiliary base band and the flexible ultrathin base band are kept the same, and the unwinding speed of the flexible auxiliary base band and the flexible ultrathin base band is consistent with the running speed of the composite base band; particularly, the elasticity of the flexible ultrathin base belt is ensured to be constant, namely the tensile force borne by the flexible ultrathin base belt is not excessively tensioned and is not excessively relaxed;
the cold drum draws the composite baseband to continuously move, and determines the running speed of the composite baseband;
producing a composite film strip through film coating operation;
the composite film strip is led out of the cold drum S3;
the composite film belt passes through the passing window and the high-low vacuum cavity vacuum degree isolation device to the winding cavity, and under the action of the vacuum degree of the film coating cavity and the air pressure difference of the vacuum degree of the winding cavity and the assistance of the film material separation auxiliary roller, the composite film belt is separated into a flexible auxiliary base belt and is wound on a winding table after film formation.
The ultrathin baseband traction device applied to the flexible roll-to-roll magnetron sputtering coating in the magnetron sputtering coating machine adopts inert gas as working gas, adopts the high-low vacuum cavity vacuum degree isolation device, utilizes the high-low vacuum degree pressure difference of the unwinding cavity and the coating cavity and tightly laminates the flexible ultrathin baseband needing to be coated with a deposition film with the flexible auxiliary baseband by means of the extrusion action of the baseband composite extrusion roller to form the composite baseband with better tensile strength, provides a moving carrier for the flexible ultrathin baseband and prevents the flexible ultrathin baseband from deforming.
In the process of drawing the ultrathin base band to continuously move, the unreeling speed, the cold drum drawing speed and the film forming and reeling speed are respectively regulated by the unreeling regulating device, the drawing regulating device and the reeling regulating device, so that the unreeling speed, the cold drum drawing speed and the film forming and reeling speed have consistency, and the guarantee is provided for uniform and continuous deposition and film coating.
The ultrathin base band traction device in the flexible roll-to-roll magnetron sputtering coating further comprises a composite base band guide roller and a composite film band guide roller which are rotatably arranged in the coating cavity, the composite base band is movably arranged on the composite base band guide roller, and the composite film band is movably arranged on the composite film band guide roller; the middle seam of the base band composite squeeze roller, the middle seam of the high-low vacuum cavity vacuum degree isolation device and the working bus of the composite base band guide roller are coplanar; the working bus of the composite film belt guide roll, the middle seam of the vacuum degree isolation device of the high-low vacuum cavity and the middle seam of the film material separation auxiliary roll are coplanar.
In the ultrathin base band traction device in the flexible roll-to-roll magnetron sputtering coating, the unwinding table comprises a flexible ultrathin base band unwinding table for continuously releasing the flexible ultrathin base band and a flexible auxiliary base band unwinding table for continuously releasing the flexible auxiliary base band; the winding table comprises a film forming winding table for continuously winding and forming a film and a flexible auxiliary base band winding table for continuously winding a flexible auxiliary base band; and a composite film belt auxiliary traction roller for applying driving force or stagnation force to the film material separation auxiliary roller is rotatably arranged on the film material separation auxiliary roller.
The flexible ultrathin base band unwinding table, the flexible auxiliary base band unwinding table, the film forming winding table and the flexible auxiliary base band winding table are all driven by a torque motor, and the torque motor is in strong current connection with an electric cabinet arranged on the cavity; the unwinding adjusting device comprises a flexible ultrathin baseband unwinding adjusting device and a flexible auxiliary baseband unwinding adjusting device, the flexible ultrathin baseband unwinding adjusting device comprises a flexible ultrathin baseband pressure sensor which is arranged in an unwinding cavity and is in weak electric connection with an electric control box, the flexible ultrathin baseband is movably arranged on the flexible ultrathin baseband pressure sensor, the flexible auxiliary baseband unwinding adjusting device comprises a flexible auxiliary baseband pressure sensor which is arranged in the unwinding cavity and is in weak electric connection with the electric control box, and the flexible auxiliary baseband is movably arranged on the flexible auxiliary baseband pressure sensor; the traction adjusting device comprises a composite film belt pressure sensor which is arranged in the film coating cavity and is in weak current connection with the electric cabinet, and the composite film belt is movably arranged on the composite film belt pressure sensor; the winding adjusting device comprises a film forming pressure sensor which is arranged in the winding cavity and is in weak current connection with the electric cabinet, and the film forming movement is arranged on the film forming pressure sensor.
According to the technical scheme, the composite film material is separated into the film forming and the flexible auxiliary base band by utilizing the high-low vacuum degree pressure difference of the film coating cavity and the winding cavity and the assistance of the film material separation auxiliary roller, the composite film material is respectively wound, the wound flexible auxiliary base band can be repeatedly reused, and the material cost is saved.
The base band composite extrusion roller and the film material separation auxiliary roller have the function of the guide roller, and are used for enabling the composite base band and the composite film belt to pass through the middle seam of the high-low vacuum cavity vacuum degree isolating device under the combined action of the guide roller and the guide roller which is rotatably arranged in the film coating cavity, so that the running resistance of the composite base band and the composite film belt can be reduced, and the product protection is facilitated.
The moment motor is selected to drive the flexible ultrathin baseband unreeling platform, the flexible auxiliary baseband unreeling platform, the cold drum, the film forming reeling platform and the flexible auxiliary baseband reeling platform, the flexible ultrathin baseband pressure sensor, the flexible auxiliary baseband pressure sensor, the composite film tape pressure sensor and the film forming pressure sensor are adopted to respectively measure the surface tension of the flexible ultrathin baseband, the flexible auxiliary baseband, the composite film tape and the film forming in real time, namely measuring the tightness of the flexible ultrathin base band, the flexible auxiliary base band, the composite film band and the film forming in the running process, converting the tightness into an electric signal and feeding the electric signal back to the electric cabinet in real time for regulating the rotating speed of the torque motor in real time, namely, the moving speeds of the flexible ultrathin base band, the flexible auxiliary base band, the composite film band and the film forming are adjusted, and the influence of the deformation of the flexible ultrathin base band, the flexible auxiliary base band, the composite film band and the film forming on the uniformity of the film coating is prevented.
Add and establish compound membrane material auxiliary traction roller, play the supplementary regulation of traction force or the isolated effect of flexible supplementary baseband rolling platform pulling force between flexible supplementary baseband rolling platform and cold drum, prevent that flexible supplementary baseband rolling platform from rolling up the change of the first footpath of rolling up to the end and producing the influence to rolling pulling force or baseband functioning speed.
In the ultrathin base band traction device in the flexible roll-to-roll magnetron sputtering coating, a glow discharge ion surface pretreatment chamber for treating the pre-deposition surface of the flexible ultrathin base band is also arranged in the unwinding cavity; and an online monitoring chamber for monitoring the coating quality in real time is also arranged in the winding cavity.
According to the traction device for the ultrathin base band in the flexible roll-to-roll magnetron sputtering coating, when the magnetron sputtering coating machine operates, the vacuum degrees of the unwinding cavity, the surface pretreatment chamber, the online monitoring chamber and the winding cavity are 6X10-7torr, working gas flow 0; the vacuum degree of the coating cavity G2 is 4X 10-3torr, working gas flow 500 sccm.
In the ultrathin baseband traction device in the flexible roll-to-roll magnetron sputtering coating, the working gas is argon.
According to the ultrathin base band traction device in the flexible roll-to-roll magnetron sputtering coating, the flexible ultrathin base band and the flexible auxiliary base band are both PET.
Drawings
FIG. 1 is a schematic view of an ultra-thin base band traction device in flexible roll-to-roll magnetron sputtering coating.
Detailed Description
The present invention will be further explained with reference to the accompanying drawings:
referring to fig. 1, a schematic diagram of an ultra-thin baseband traction device in flexible roll-to-roll magnetron sputtering coating includes a chamber G having an unwinding chamber G1, a coating chamber G2, and a winding chamber G3 hermetically separated by a partition H; a surface pretreatment chamber (not shown in the figure) for treating the pre-deposition surface of the flexible ultrathin base tape P is also arranged in the unreeling chamber G1; an online monitoring chamber (not shown in the figure) for monitoring the coating quality in real time is also arranged in the winding chamber G3. In the present case, a glow discharge ion surface pretreatment technology in the prior art is selected to treat the pre-deposition surface of the flexible ultrathin baseband P, and an online monitoring technology for monitoring the coating quality in real time in an online monitoring room is also the prior art, which is not described herein again.
The ultrathin baseband traction device in the flexible roll-to-roll magnetron sputtering coating uses inert gas as working gas, uses an unreeling table arranged in an unreeling cavity G1 with the vacuum degree of the unreeling cavity to continuously and respectively release a flexible ultrathin baseband P and a flexible auxiliary baseband J, uses a cold drum S3 rotatably arranged in a coating cavity with the vacuum degree of the coating cavity to drive a composite baseband P1 formed by laminating the flexible ultrathin baseband P and the flexible auxiliary baseband J to continuously move by using a traction driving wheel, and uses a reeling table arranged in a reeling cavity G3 with the vacuum degree of the reeling cavity to continuously and respectively reel the film forming P3 and the flexible auxiliary baseband J; the flexible auxiliary base band J is closely attached to the cold drum S3, and the composite base band P1 is movably arranged between the cold drum S3 and magnetron sputtering device deposition cathode chambers Y1, Y2, Y3 and Y4 which are arranged around the cold drum S3.
The vacuum degree of the unwinding cavity and the vacuum degree of the winding cavity are far higher than that of the coating cavity.
The surface of the partition board H positioned in the film coating cavity G2 is smooth, and a passing window (not shown in the figure) for enabling the composite base band P1 to pass from the unreeling cavity G1 to the film coating cavity G2 and enabling the composite film band P2 comprising the flexible auxiliary base band J and the film forming P3 attached to the flexible auxiliary base band J to pass from the film coating cavity G2 to the reeling cavity G3 is arranged on the partition board H. The passing window is rectangular and parallel to the axis of the cold drum, the length of the passing window is slightly larger than the width of the flexible strip, and the length of the passing window is 80mm larger than the width of the flexible strip.
The device is characterized in that a high-low vacuum cavity vacuum degree isolating device Z is arranged on the passing window, a base band composite extrusion roller E1 used for removing gas still existing between the flexible auxiliary base band J and the flexible ultrathin base band P and enabling the flexible auxiliary base band J and the flexible ultrathin base band P to be tightly attached to form a composite base band P1 is rotatably arranged between the passing window and the unwinding table, and a film material separation auxiliary roller E2 used for assisting the composite film band P2 to be separated into the flexible auxiliary base band J and a film forming P3 is rotatably arranged between the passing window and the winding table.
The high-low vacuum cavity vacuum degree isolation device Z is used for enabling the composite base band and the composite membrane band to penetrate through a middle seam of the high-low vacuum cavity vacuum degree isolation device Z and physically and fixedly connecting adjacent working cavities so as to keep the vacuum degrees of the working cavities.
The ultrathin baseband traction device applied to the flexible roll-to-roll magnetron sputtering coating in the magnetron sputtering coating machine further comprises an unreeling adjusting device arranged between the unreeling table and the threading window and used for adjusting unreeling speed, and a reeling adjusting device arranged between the threading window and the reeling table and used for adjusting film forming and reeling speed.
The ultrathin baseband traction device applied to the flexible roll-to-roll magnetron sputtering coating in the magnetron sputtering coating machine further comprises a composite baseband guide roller D2 and a composite film belt guide roller D5 which are rotatably arranged in a coating cavity G2, wherein the composite baseband P1 is movably arranged on the composite baseband guide roller D2, and the composite film belt P2 is movably arranged on the composite film belt guide roller D5. The middle seam of the base band composite extrusion roller E1, the middle seam of the high-low vacuum cavity vacuum degree isolating device Z and the working bus of the composite base band guide roller D2 are coplanar; the working generatrix of the composite film belt guide roller D5, the center seam of the vacuum degree isolation device Z of the high-low vacuum cavity and the center seam of the film material separation auxiliary roller E2 are coplanar. In the figure, the working generatrix of the composite base tape guide roll D2 is the upper generatrix of the composite base tape guide roll D2, and the working generatrix of the composite film tape guide roll D5 is the upper generatrix of the composite film tape guide roll D5.
The unwinding station comprises a flexible ultrathin base tape unwinding station S12 for continuously releasing the flexible ultrathin base tape P and a flexible auxiliary base tape unwinding station S11 for continuously releasing the flexible auxiliary base tape J; the winding table comprises a film forming winding table S22 for continuously winding the film forming P3 and a flexible auxiliary base tape winding table S21 for continuously winding the flexible auxiliary base tape J; a composite film belt auxiliary traction roller R for applying a driving force or a stagnation force to the film separation auxiliary roller E2 is rotatably provided on the film separation auxiliary roller E2.
Considering the possible interference caused by the winding diameter factors of the flexible auxiliary base band J, the flexible ultrathin base band P, the composite base band P1, the composite film band P2 and the film forming P3, a guide roller D1 is rotatably arranged in the film coating cavity, and the flexible ultrathin base band P is movably arranged on the guide roller D1 and used for changing the moving direction of the flexible ultrathin base band P; a guide roller D6 is rotatably provided in the winding chamber, and a film forming P3 is movably provided on the guide roller D6 for changing the moving direction of the film forming P3.
A guide roller D3 is rotatably arranged in the film coating cavity G2, and the composite base tape P1 is movably arranged on the guide roller D3 and used for guiding the composite base tape P1 to be introduced into the cold drum S3; a guide roller D4 is rotatably arranged in the film coating cavity G2, and the composite film belt P2 is movably arranged on the guide roller D4 and is used for guiding the composite film belt P2 to be led out of the cold drum S3.
The flexible ultrathin base band unwinding station S12, the flexible auxiliary base band unwinding station S11, the film forming winding station S22 and the flexible auxiliary base band winding station S21 are all driven by a torque motor (not shown in the figure), and the torque motor is in strong current connection with an electric cabinet arranged on the cavity G. The torque motors of the flexible ultrathin base band unwinding station S12, the flexible auxiliary base band unwinding station S11, the film forming winding station S22 and the flexible auxiliary base band winding station S21 can be respectively called as a flexible ultrathin base band unwinding station torque motor, a flexible auxiliary base band unwinding station torque motor, a film forming winding station torque motor and a flexible auxiliary base band winding station torque motor. The motor that drives the cold drum in operation is referred to as the cold drum motor.
The unwinding adjusting device comprises a flexible ultrathin baseband unwinding adjusting device and a flexible auxiliary baseband unwinding adjusting device, the flexible ultrathin baseband unwinding adjusting device comprises a flexible ultrathin baseband pressure sensor F2 which is arranged in an unwinding cavity G1 and is in weak electric connection with an electric cabinet, a flexible ultrathin baseband P is movably arranged on a flexible ultrathin baseband pressure sensor F2, the flexible auxiliary baseband unwinding adjusting device comprises a flexible auxiliary baseband pressure sensor F1 which is arranged in an unwinding cavity G1 and is in weak electric connection with the electric cabinet, and a flexible auxiliary baseband J is movably arranged on a flexible auxiliary baseband pressure sensor F1; the traction adjusting device comprises a composite film belt pressure sensor F3 which is arranged in the film coating cavity G2 and is in weak electric connection with the electric cabinet, and the composite film belt P2 is movably arranged on the composite film belt pressure sensor F3; the winding adjusting device comprises a film forming pressure sensor F4 which is arranged in the winding cavity G3 and is in weak electric connection with the electric cabinet, and a film forming P3 is movably arranged on the film forming pressure sensor F4.
The pressure sensor is prior art and will not be described in detail herein.
According to the traction device for the ultrathin base band in the flexible roll-to-roll magnetron sputtering coating, when the magnetron sputtering coating machine operates, the vacuum degrees of the unreeling cavity G1, the surface pretreatment chamber, the online monitoring chamber and the reeling cavity G3 are 6X10-7torr, working gas flow 0; the vacuum degree of the coating cavity G2 is 4X 10-3torr, working gas flow 500 sccm.
The working gas is argon.
The flexible ultrathin baseband P and the flexible auxiliary baseband J are both made of PET.
The specific ultra-thin base band traction device in the flexible roll-to-roll magnetron sputtering coating is introduced in detail by combining the driver process of the magnetron sputtering coating machine, and the steps are carried out as follows; the flexible ultrathin baseband P is made of PET, and has the width of 1350mm, the length of 2500M and the thickness of 0.025 mm; the flexible auxiliary base band J is made of PET (polyethylene terephthalate), the width is 1350mm, the length is 2500M, and the thickness is 0.125 mm:
1. preparation before coating operation
Cleaning the working chamber of the magnetron sputtering coating machine. The air pressure in each working chamber is equal and equal to one standard atmospheric pressure, and at the moment, the vacuum degree isolation device Z of the high-low vacuum chamber is opened to form a gap through which the composite baseband P1 can freely pass.
2. Feeding material
Clamping a flexible ultrathin base band P coiled material on a flexible ultrathin base band unwinding table S12, clamping a flexible auxiliary base band J coiled material on a flexible auxiliary base band unwinding table S11, leading out a coiling head of the flexible ultrathin base band P coiled material from the flexible ultrathin base band unwinding table S12, and leading out a coiling head of the flexible auxiliary base band J coiled material from the flexible auxiliary base band unwinding table S11;
the flexible ultrathin base band P is guided by a guide roller D1 to change the direction, is overlapped with the flexible auxiliary base band J, passes through a middle slit of a base band composite extrusion roller E1, a passing window and a middle slit of a high-low vacuum cavity vacuum degree isolating device Z and is guided by a guide roller D2 to reach a film coating cavity G2;
under the guide of a guide roller D3, the overlapped flexible ultrathin base band P and the flexible auxiliary base band J pass through gaps among a magnetron sputtering device deposition cathode chamber Y1, Y2, Y3, Y4 and a cold drum S2 to surround the cold drum S3, are guided by the guide roller D4 to be led out of the cold drum S3, are guided by a guide roller D5, and are guided to a rolling chamber G3 through a middle seam, a passing window and a middle seam of a film material separation auxiliary roller E2 of a high-vacuum chamber and low-vacuum chamber vacuum degree isolating device Z;
the head of the flexible auxiliary base band J is led into a flexible auxiliary base band rolling platform S21, and the flexible auxiliary base band J is fed; after the direction of the flexible ultrathin base tape P is changed by the guide of the guide roller D6, the winding head of the flexible ultrathin base tape P is led into a film forming winding table S22, and the feeding of the flexible ultrathin base tape P is completed.
3. Coating operation
Unreel chamber G1, coating film chamber G2, rolling chamber G3 degasification, evacuation:
in the vacuumizing process, along with the improvement of the vacuum degrees of the unreeling cavity G1, the coating cavity G2 and the reeling cavity G3, the vacuum degree difference between the coating cavity G2 and the unreeling cavity G1 and the reeling cavity G3 is continuously increased, namely, the pressure difference between the coating cavity G2 and the unreeling cavity G1 and the reeling cavity G3 is continuously increased, the high-low vacuum cavity vacuum degree isolation device Z is closed, and when the magnetron sputtering coating machine operates, the vacuum degrees of the unreeling cavity G1, the surface pretreatment chamber, the online monitoring chamber and the reeling cavity G3 are 6X10-7torr, working gas flow 0; the vacuum degree of the coating cavity G2 is 4X 10-3torr, working gas flow 500 sccm.
4. Adjusting the pretightening force (surface tension) of the flexible auxiliary base belt J, the flexible ultrathin base belt P, the composite base belt P1, the composite film belt P2 and the film forming P3:
starting each torque motor and each cold drum motor;
the cold drum motor drives the cold drum S3 to draw the composite baseband P1 to move continuously, and the running speed of the composite baseband P1 is determined;
the flexible ultrathin baseband unreeling platform S12 and the flexible auxiliary baseband unreeling platform S11 continuously release the flexible auxiliary baseband J and the flexible ultrathin baseband P, the flexible ultrathin baseband P passes through the glow discharge ion surface pretreatment chamber to treat the pre-deposition surface of the flexible ultrathin baseband P, is guided by a guide roll D1, is overlapped with the flexible auxiliary baseband J, is extruded by a baseband composite extrusion roll E1, and is discharged with gas between the flexible auxiliary baseband J and the flexible ultrathin baseband P to form a composite baseband P1, and then passes through a passing window and a high-low vacuum degree isolating device Z to a coating cavity G2; the flexible auxiliary baseband pressure sensor F1 monitors the surface tension of the flexible auxiliary baseband J in real time to form an electric signal which is fed back to the electric cabinet and adjusts the running state of the flexible auxiliary baseband unreeling platform torque motor, the flexible ultrathin baseband pressure sensor F2 monitors the surface tension of the flexible ultrathin baseband P in real time to form an electric signal which is fed back to the electric cabinet and adjusts the running state of the flexible ultrathin baseband unreeling platform torque motor, the unreeling speed and the unreeling length of the flexible auxiliary baseband J and the flexible ultrathin baseband P are kept the same, and the unreeling speed of the flexible auxiliary baseband J and the flexible ultrathin baseband P is the same as the running speed of the composite baseband P1; particularly, the rotating torque of the torque motor of the unwinding table of the flexible ultrathin base band is controlled, and the tightness of the flexible ultrathin base band P is ensured to be constant, namely the pulling force borne by the flexible ultrathin base band P is not excessively tensioned and is not excessively loosened;
in the unreeling cavity G1, as the vacuum degree of the film coating cavity is far lower than that of the unreeling cavity, the two layers of the composite base band P1 are further tightly attached under the action of air pressure, and the stress capacity of the composite base band P1 when being dragged is increased when being dragged;
the composite base tape P1 is guided by guide rollers D2 and D3 and introduced into a cold drum S3;
in the coating operation, a composite film tape pressure sensor F3 feeds back information to assist in controlling the traction tension of the composite film tape P2 (mainly a flexible auxiliary base tape winding table torque motor);
the composite film belt P2 is guided by guide rollers D4 and D5 and is led out of a cold drum S3;
the composite film belt P2 passes through the passing window and the high-low vacuum cavity vacuum degree isolation device Z to the winding cavity G3, and under the action of the vacuum degree of the film coating cavity and the air pressure difference of the vacuum degree of the winding cavity and under the assistance of the composite film belt P2 on the film material separation auxiliary roller E2, the composite film belt P2 is separated into a flexible auxiliary base belt J and a film forming P3; the composite film material auxiliary traction roller R plays a role in auxiliary traction force adjustment or tension isolation of the flexible auxiliary base band winding table S21 between the flexible auxiliary base band winding table S21 and the cold drum S3; the film forming pressure sensor F4 monitors the surface tension of the film forming P3 in real time to form an electric signal which is fed back to the electric cabinet and adjusts the running state of the torque motor of the film forming winding table;
the film forming P3 is subjected to real-time film coating quality monitoring by an online monitoring chamber, guided by a guide roller D6 and wound on a film forming winding table S22, and wound on a flexible auxiliary baseband winding table S21.
The utility model has the advantages that:
an ultrathin baseband traction device in flexible roll-to-roll magnetron sputtering coating adopts a high-low vacuum cavity vacuum degree isolation device Z, and a flexible ultrathin baseband needing film deposition and coating is attached to a flexible auxiliary baseband by utilizing high-low vacuum degree pressure difference to form a composite baseband with better tensile strength, so that a moving carrier is provided for the flexible ultrathin baseband, and the flexible ultrathin baseband is prevented from deforming.
Claims (8)
1. The ultra-thin baseband traction device in the flexible roll-to-roll magnetron sputtering coating comprises a cavity body which is divided by a partition plate into an unreeling cavity, a coating cavity and a reeling cavity, inert gas is used as working gas, an unreeling table in the unreeling cavity continuously and respectively releases a flexible ultra-thin baseband and a flexible auxiliary baseband, a cold drum in the coating cavity drives a composite baseband formed by laminating the flexible ultra-thin baseband and the flexible auxiliary baseband to continuously move by a traction driving wheel, and a reeling table in the reeling cavity continuously and respectively reels a film and the flexible auxiliary baseband; the flexible auxiliary base band is tightly attached to the cold drum, the composite base band is movably arranged between the cold drum and a deposition cathode chamber of a magnetron sputtering device arranged around the cold drum, and the flexible auxiliary base band is characterized in that the vacuum degree of an unwinding chamber and the vacuum degree of a winding chamber are higher than that of a coating chamber; a passing window for enabling the composite base band to pass from the unreeling cavity to the film coating cavity and enabling the flexible auxiliary base band and the composite film band which is attached with the film on the flexible auxiliary base band to pass from the film coating cavity to the reeling cavity is formed in the partition board; a high-low vacuum cavity vacuum degree isolating device is arranged on the passing window, a base band composite extrusion roller used for removing a flexible auxiliary base band and gas still existing between flexible ultrathin base bands and enabling the flexible auxiliary base band and the flexible ultrathin base band to be tightly attached to form a composite base band is rotatably arranged between the passing window and the unwinding table, and a film material separation auxiliary roller used for assisting the composite film band to be separated into the flexible auxiliary base band and a film is rotatably arranged between the passing window and the winding table; the film-forming device further comprises an unreeling adjusting device arranged between the unreeling platform and the threading window and used for adjusting unreeling speed, and a reeling adjusting device arranged between the threading window and the reeling platform and used for adjusting film-forming reeling speed.
2. The ultra-thin baseband traction device in the flexible roll-to-roll magnetron sputtering coating of claim 1, which is characterized by further comprising a composite baseband guide roller and a composite film strip guide roller which are rotatably arranged in the coating cavity, wherein the composite baseband is movably arranged on the composite baseband guide roller, and the composite film strip is movably arranged on the composite film strip guide roller; the middle seam of the base band composite squeeze roller, the middle seam of the high-low vacuum cavity vacuum degree isolation device and the working bus of the composite base band guide roller are coplanar; the working bus of the composite film belt guide roll, the middle seam of the vacuum degree isolation device of the high-low vacuum cavity and the middle seam of the film material separation auxiliary roll are coplanar.
3. The ultra-thin baseband traction device in the flexible roll-to-roll magnetron sputtering coating of claim 1, wherein the unwinding table comprises a flexible ultra-thin baseband unwinding table for continuously releasing the flexible ultra-thin baseband and a flexible auxiliary baseband unwinding table for continuously releasing the flexible auxiliary baseband; the winding table comprises a film forming winding table for continuously winding and forming a film and a flexible auxiliary base band winding table for continuously winding a flexible auxiliary base band; and a composite film belt auxiliary traction roller for applying driving force or stagnation force to the film material separation auxiliary roller is rotatably arranged on the film material separation auxiliary roller.
4. The ultra-thin baseband traction device in the flexible roll-to-roll magnetron sputtering coating according to claim 1 or 3, wherein the flexible ultra-thin baseband unreeling table, the flexible auxiliary baseband unreeling table, the film forming reeling table and the flexible auxiliary baseband reeling table are all driven by a torque motor, and the torque motor is in strong electric connection with an electric cabinet arranged on the cavity; the unwinding adjusting device comprises a flexible ultrathin baseband unwinding adjusting device and a flexible auxiliary baseband unwinding adjusting device, the flexible ultrathin baseband unwinding adjusting device comprises a flexible ultrathin baseband pressure sensor which is arranged in an unwinding cavity and is in weak electric connection with an electric control box, the flexible ultrathin baseband is movably arranged on the flexible ultrathin baseband pressure sensor, the flexible auxiliary baseband unwinding adjusting device comprises a flexible auxiliary baseband pressure sensor which is arranged in the unwinding cavity and is in weak electric connection with the electric control box, and the flexible auxiliary baseband is movably arranged on the flexible auxiliary baseband pressure sensor; the traction adjusting device comprises a composite film belt pressure sensor which is arranged in the film coating cavity and is in weak current connection with the electric cabinet, and the composite film belt is movably arranged on the composite film belt pressure sensor; the winding adjusting device comprises a film forming pressure sensor which is arranged in the winding cavity and is in weak current connection with the electric cabinet, and the film forming movement is arranged on the film forming pressure sensor.
5. The ultra-thin base band traction device in the flexible roll-to-roll magnetron sputtering coating according to claim 1, wherein a glow discharge ion surface pretreatment chamber for treating the pre-deposition surface of the flexible ultra-thin base band is further arranged in the unwinding cavity; and an online monitoring chamber for monitoring the coating quality in real time is also arranged in the winding cavity.
6. The ultra-thin baseband traction device in flexible roll-to-roll magnetron sputtering coating of claim 1, wherein when the magnetron sputtering coating machine is in operation, the vacuum degree of the unwinding chamber, the surface pretreatment chamber G1, the online monitoring chamber and the winding chamber G3 is 6X10-7torr, working gas flow 0; the vacuum degree of the coating cavity G2 is 4X 10-3torr, working gas flow 500 sccm.
7. The ultra-thin baseband traction device in flexible roll-to-roll magnetron sputtering coating of claim 1, wherein the working gas is argon.
8. The ultra-thin baseband traction device in flexible roll-to-roll magnetron sputtering coating of claim 1, wherein the flexible ultra-thin baseband and the flexible auxiliary baseband are both PET.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920686229.3U CN210127269U (en) | 2019-05-14 | 2019-05-14 | Ultra-thin baseband draw gear among flexible roll-to-roll magnetron sputtering coating film |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920686229.3U CN210127269U (en) | 2019-05-14 | 2019-05-14 | Ultra-thin baseband draw gear among flexible roll-to-roll magnetron sputtering coating film |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN210127269U true CN210127269U (en) | 2020-03-06 |
Family
ID=69662299
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201920686229.3U Expired - Fee Related CN210127269U (en) | 2019-05-14 | 2019-05-14 | Ultra-thin baseband draw gear among flexible roll-to-roll magnetron sputtering coating film |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN210127269U (en) |
-
2019
- 2019-05-14 CN CN201920686229.3U patent/CN210127269U/en not_active Expired - Fee Related
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| KR101501423B1 (en) | Apparatus for winding an electrolytic metal foil and Method thereof | |
| CN101649448B (en) | Continuous surface vacuum coater of metal sheet strip | |
| CN109554680B (en) | Winding type vacuum coating machine | |
| CN109207926B (en) | Enhanced aluminum-plated film and production process thereof | |
| CN109397832A (en) | A kind of EB solidifies three layers of equipment complex and technique | |
| CN102899629A (en) | Method for double-side vacuum film formation and laminate obtainable by the method | |
| CN210127269U (en) | Ultra-thin baseband draw gear among flexible roll-to-roll magnetron sputtering coating film | |
| CN110983285A (en) | Vacuum winding coating equipment capable of simultaneously coating multiple rolls of base materials | |
| CN104775102B (en) | The vacuum coating system that volume to volume magnetic control sputtering cathode is combined with column multi-arc source | |
| CN201437551U (en) | Continuous winding coating equipment | |
| CN106784604A (en) | A kind of equipment for synthesizing composite bed on battery pole piece surface | |
| CN103046015A (en) | Reel-to-reel type high-efficiency magnetron-sputtering vacuum coating device and method | |
| CN216891198U (en) | Novel volume to volume vacuum coating equipment of vacuum container structure | |
| CN216891199U (en) | Vacuum winding coating equipment with film coating and tearing device | |
| CN216998566U (en) | Vacuum coating equipment | |
| CN109972114A (en) | Ultra-thin base band traction method in flexible roll-to-roll magnetron sputtering plating | |
| CN101649447B (en) | Continuous coiling and coating device of solar selective absorbing film | |
| CN114700416A (en) | Stripping process of ultrathin lithium foil | |
| CN216039807U (en) | Coiling coating equipment | |
| CN214390908U (en) | Lithium battery pole piece bottom coating machine capable of performing gap coating | |
| CN211444394U (en) | Lining film compounding device for vacuum aluminum-plated paper | |
| CN212640601U (en) | Flexible continuous magnetron sputtering deposition coating working chamber isolation device | |
| CN211142163U (en) | Vacuum winding coating equipment capable of simultaneously coating multiple rolls of base materials | |
| CN201857424U (en) | Novel vacuum coating machine | |
| CN211595780U (en) | Device for magnetron sputtering continuous deposition of wire surface coating |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20200306 Termination date: 20210514 |