CN112798821A - 一种双轴压电式加速度计 - Google Patents
一种双轴压电式加速度计 Download PDFInfo
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- CN112798821A CN112798821A CN202011578920.3A CN202011578920A CN112798821A CN 112798821 A CN112798821 A CN 112798821A CN 202011578920 A CN202011578920 A CN 202011578920A CN 112798821 A CN112798821 A CN 112798821A
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- rectangular frame
- beams
- small rectangular
- accelerometer
- mass block
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- 230000001133 acceleration Effects 0.000 claims description 23
- 229910052710 silicon Inorganic materials 0.000 claims description 5
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- 238000003754 machining Methods 0.000 claims description 4
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- 229910045601 alloy Inorganic materials 0.000 claims description 3
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- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- 238000013461 design Methods 0.000 description 3
- 238000001514 detection method Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 238000011160 research Methods 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
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- 229910052737 gold Inorganic materials 0.000 description 1
- 238000004377 microelectronic Methods 0.000 description 1
- 238000005459 micromachining Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
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- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 239000002210 silicon-based material Substances 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 238000004088 simulation Methods 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/09—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by piezoelectric pick-up
- G01P15/0922—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by piezoelectric pick-up of the bending or flexing mode type
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Force Measurement Appropriate To Specific Purposes (AREA)
- Pressure Sensors (AREA)
Abstract
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Claims (6)
Priority Applications (1)
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CN202011578920.3A CN112798821B (zh) | 2020-12-28 | 2020-12-28 | 一种双轴压电式加速度计 |
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CN202011578920.3A CN112798821B (zh) | 2020-12-28 | 2020-12-28 | 一种双轴压电式加速度计 |
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CN112798821A true CN112798821A (zh) | 2021-05-14 |
CN112798821B CN112798821B (zh) | 2021-10-08 |
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Citations (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5121180A (en) * | 1991-06-21 | 1992-06-09 | Texas Instruments Incorporated | Accelerometer with central mass in support |
JPH1089968A (ja) * | 1996-09-12 | 1998-04-10 | Murata Mfg Co Ltd | 角速度センサ |
CN101034094A (zh) * | 2007-04-19 | 2007-09-12 | 中北大学 | 复合梁压阻加速度计 |
CN101118250A (zh) * | 2007-09-13 | 2008-02-06 | 中国电子科技集团公司第十三研究所 | 一种硅mems压阻式加速度传感器 |
CN201083760Y (zh) * | 2007-10-19 | 2008-07-09 | 中国电子科技集团公司第十三研究所 | 三轴集成压阻式加速度传感器 |
JP2008190892A (ja) * | 2007-02-01 | 2008-08-21 | Hitachi Metals Ltd | 加速度センサおよびそれを用いた電子機器 |
JP2010276508A (ja) * | 2009-05-29 | 2010-12-09 | Torex Semiconductor Ltd | 加速度センサー素子およびこれを有する加速度センサー |
US20110296918A1 (en) * | 2009-02-17 | 2011-12-08 | Kui Yao | Miniaturized piezoelectric accelerometers |
CN102298074A (zh) * | 2011-05-23 | 2011-12-28 | 西安交通大学 | 一种孔缝双桥式加速度传感器芯片及其制备方法 |
CN102331513A (zh) * | 2011-06-16 | 2012-01-25 | 沈阳工业大学 | 一种超薄敏感梁压阻加速度传感器 |
CN202421210U (zh) * | 2011-12-15 | 2012-09-05 | 西安威正电子科技有限公司 | 一种微机械加速度传感器 |
CN102866262A (zh) * | 2012-09-13 | 2013-01-09 | 中北大学 | 阵列式单芯片集成数字微加速度计 |
CN103941041A (zh) * | 2014-03-28 | 2014-07-23 | 武汉瑞芯科微电子技术有限公司 | 一种三框架结构的单质量块三轴mems加速度计 |
CN104062463A (zh) * | 2014-06-13 | 2014-09-24 | 浙江工业大学 | 一种压阻式加速度传感器及其制造方法 |
CN105785073A (zh) * | 2014-12-19 | 2016-07-20 | 中国科学院上海微***与信息技术研究所 | 一种压阻式加速度传感器及其制作方法 |
CN110501521A (zh) * | 2019-08-12 | 2019-11-26 | 武汉大学 | 一种压电式加速度计 |
-
2020
- 2020-12-28 CN CN202011578920.3A patent/CN112798821B/zh active Active
Patent Citations (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5121180A (en) * | 1991-06-21 | 1992-06-09 | Texas Instruments Incorporated | Accelerometer with central mass in support |
JPH1089968A (ja) * | 1996-09-12 | 1998-04-10 | Murata Mfg Co Ltd | 角速度センサ |
JP2008190892A (ja) * | 2007-02-01 | 2008-08-21 | Hitachi Metals Ltd | 加速度センサおよびそれを用いた電子機器 |
CN101034094A (zh) * | 2007-04-19 | 2007-09-12 | 中北大学 | 复合梁压阻加速度计 |
CN101118250A (zh) * | 2007-09-13 | 2008-02-06 | 中国电子科技集团公司第十三研究所 | 一种硅mems压阻式加速度传感器 |
CN201083760Y (zh) * | 2007-10-19 | 2008-07-09 | 中国电子科技集团公司第十三研究所 | 三轴集成压阻式加速度传感器 |
US20110296918A1 (en) * | 2009-02-17 | 2011-12-08 | Kui Yao | Miniaturized piezoelectric accelerometers |
JP2010276508A (ja) * | 2009-05-29 | 2010-12-09 | Torex Semiconductor Ltd | 加速度センサー素子およびこれを有する加速度センサー |
CN102298074A (zh) * | 2011-05-23 | 2011-12-28 | 西安交通大学 | 一种孔缝双桥式加速度传感器芯片及其制备方法 |
CN102331513A (zh) * | 2011-06-16 | 2012-01-25 | 沈阳工业大学 | 一种超薄敏感梁压阻加速度传感器 |
CN202421210U (zh) * | 2011-12-15 | 2012-09-05 | 西安威正电子科技有限公司 | 一种微机械加速度传感器 |
CN102866262A (zh) * | 2012-09-13 | 2013-01-09 | 中北大学 | 阵列式单芯片集成数字微加速度计 |
CN103941041A (zh) * | 2014-03-28 | 2014-07-23 | 武汉瑞芯科微电子技术有限公司 | 一种三框架结构的单质量块三轴mems加速度计 |
CN104062463A (zh) * | 2014-06-13 | 2014-09-24 | 浙江工业大学 | 一种压阻式加速度传感器及其制造方法 |
CN105785073A (zh) * | 2014-12-19 | 2016-07-20 | 中国科学院上海微***与信息技术研究所 | 一种压阻式加速度传感器及其制作方法 |
CN110501521A (zh) * | 2019-08-12 | 2019-11-26 | 武汉大学 | 一种压电式加速度计 |
Non-Patent Citations (6)
Title |
---|
LI WEI 等: "A novel sandwich capacitive accelerometer with a double-sided 16-beam-mass structure", 《MICROELECTRONIC ENGINEERING》 * |
WANG P 等: "A pizoresistive micro-accelerometer with high frequency response and low transverse effect", 《MEASUREMENT》 * |
YANG, J. 等: "A T-Shape Aluminum Nitride Thin-Film Piezoelectric MEMS Resonant Accelerometer", 《MICROELECTROMECH》 * |
张国军 等: "一种新型的压阻式硅微二维加速度计的设计", 《仪器仪表学报》 * |
李丽华 等: "压阻式微加速度计的结构优化设计", 《微计算机信息》 * |
赵源: "压阻式加速度传感器的设计与仿真", 《中国优秀硕士/博士学位论文全文数据库》 * |
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CN112798821B (zh) | 2021-10-08 |
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Effective date of registration: 20220826 Address after: No.01, 4th floor, building D7, phase 3, Wuhan Software New Town, No.9 Huacheng Avenue, Donghu New Technology Development Zone, Wuhan City, Hubei Province, 430000 Patentee after: Wuhan Minsheng New Technology Co.,Ltd. Address before: 315832 e2025, zone a, Room 401, building 1, No. 88, Meishan Qixing Road, Beilun District, Ningbo, Zhejiang Province Patentee before: Ningbo Huazhang enterprise management partnership (L.P.) |
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