CN112588722A - Dustproof device of optical system - Google Patents

Dustproof device of optical system Download PDF

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Publication number
CN112588722A
CN112588722A CN202011509184.6A CN202011509184A CN112588722A CN 112588722 A CN112588722 A CN 112588722A CN 202011509184 A CN202011509184 A CN 202011509184A CN 112588722 A CN112588722 A CN 112588722A
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CN
China
Prior art keywords
dustproof
optical system
dust
air
inner cavity
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN202011509184.6A
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Chinese (zh)
Inventor
李军
沈华明
蔡健杰
陈冬冬
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Zhuhai Radium Laser Technology Co ltd
Original Assignee
Zhuhai Radium Laser Technology Co ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Zhuhai Radium Laser Technology Co ltd filed Critical Zhuhai Radium Laser Technology Co ltd
Priority to CN202011509184.6A priority Critical patent/CN112588722A/en
Publication of CN112588722A publication Critical patent/CN112588722A/en
Pending legal-status Critical Current

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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B08CLEANING
    • B08BCLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B5/00Cleaning by methods involving the use of air flow or gas flow
    • B08B5/02Cleaning by the force of jets, e.g. blowing-out cavities

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  • Projection Apparatus (AREA)

Abstract

The invention discloses a dustproof device of an optical system, which is characterized by comprising a dustproof box, wherein a light path mounting plate for dividing an inner cavity of the dustproof box into a first inner cavity and a second inner cavity for mounting a photoelectric device is arranged in the dustproof box, a plurality of air blowing holes for communicating the first inner cavity with the second inner cavity are formed in the light path mounting plate, an air guide structure is arranged in the first inner cavity, an air inlet pipe for blowing clean air into the first inner cavity and blowing the clean air to the second inner cavity through the air blowing holes is arranged on the side wall of the dustproof box, a clean air generating device is connected to the other end of the air inlet pipe, and a plurality of air exhaust holes for exhausting the clean air in the second inner cavity are also formed in the dustproof box. The dustproof device can fill the second inner cavity with clean air, effectively remove dust on an internal optical device and discharge the dust through the exhaust hole; and prevent outside air entering through producing the malleation, make the optical device in operation quick and be in dustless state all the time, dustproof effect is showing.

Description

Dustproof device of optical system
[ technical field ] A method for producing a semiconductor device
The present invention relates to a dust-proof device for an optical system.
[ background of the invention ]
The optical system has strict requirements on dust prevention, and dust in one wire can seriously affect the precision of an optical device, but cannot be frequently disassembled for cleaning.
[ summary of the invention ]
The present invention is directed to overcome the disadvantages of the prior art, and to provide a dust-proof device for an optical system, which is configured to input clean air into the optical system to be in a positive pressure state to prevent external air from entering the optical system, thereby achieving the purpose of dust-proof.
The invention is realized by the following technical scheme:
a dust-proof device of an optical system, characterized in that: including dust-proof box 1, be equipped with in dust-proof box 1 and fall into first inner chamber and the light path mounting panel 2 that is used for installing photoelectric device's second inner chamber with dust-proof box 1 inner chamber be equipped with the gas hole 3 of the first inner chamber of a plurality of intercommunications and second inner chamber on the light path mounting panel 2 first inner chamber is equipped with gaseous water conservancy diversion structure 4 dust-proof box 1 lateral wall is equipped with and is used for blowing in clean air toward first inner chamber and blows to the intake pipe 5 of second inner chamber through gas hole 3, the other end of intake pipe 5 is connected with clean air and produces device 6.
The dust-proof device of the optical system described above is characterized in that: the gas guiding structure 4 comprises a plurality of flow guiding plates 401 dividing the first inner cavity into gas flow channels.
The dust-proof device of the optical system described above is characterized in that: the number of the air inlet pipes 5 is one.
The dust-proof device of the optical system described above is characterized in that: the two air inlet pipes 5 are oppositely arranged on two sides of the dust-proof box 1 in a staggered mode.
The dust-proof device of the optical system described above is characterized in that: the clean air generating device 6 includes an air compressor 601, and the air compressor 601 is sequentially connected with a water separator 602, an oil separator 603 and a filter screen 604 through the air inlet pipe 5.
The dust-proof device of the optical system described above is characterized in that: the diameter range of the air blowing hole 3 is 4 mm to 6 mm, and the diameter range of the air inlet pipe 5 is 35 mm to 100 mm.
The dust-proof device of the optical system described above is characterized in that: the dustproof box 1 is also provided with a plurality of exhaust holes 7 for exhausting the clean air in the second inner cavity.
The dust-proof device of the optical system described above is characterized in that: the exhaust hole 7 is arranged at the corner of the dustproof box 1.
The dust-proof device of the optical system described above is characterized in that: and the exhaust hole 7 is provided with dustproof materials.
The dust-proof device of the optical system described above is characterized in that: the dustproof material is a dustproof net or dustproof cloth.
Compared with the prior art, the invention has the following advantages:
1. the dustproof device can fill the second inner cavity with clean air, effectively remove dust on an internal optical device and discharge the dust through the exhaust hole; and prevent outside air entering through producing the malleation, make the optical device in operation quick and be in dustless state all the time, dustproof effect is showing.
[ description of the drawings ]
FIG. 1 is a perspective view of the dust box of the present invention;
FIG. 2 is a cut-away schematic view of the dust box of the present invention, with the gas directing structure not shown;
FIG. 3 is a schematic plan view of a first lumen of the present invention with arrows indicating the direction of air flow and with the blow holes located directly in front of the view;
fig. 4 is a plan block diagram of a clean air generating apparatus according to the present invention.
In the figure: 1 is a dustproof box; 2 is a light path mounting plate; 3 is a blowing hole; 4 is a gas flow guiding structure; 401 is a guide plate; 5 is an air inlet pipe; 6 is a clean air generating device; 601 is an air compressor; 602 is a water isolator; 603 is an oil separator; 604 is a filter screen; and 7 is an exhaust hole.
[ detailed description ] embodiments
The technical features of the present invention will be described in further detail with reference to the accompanying drawings so that those skilled in the art can understand the technical features.
The utility model provides an optical system's dust keeper, as shown in figure 1 and figure 2, is equipped with the light path mounting panel 2 that falls into first inner chamber and second inner chamber with dust-proof box 1 inner chamber in dust-proof box 1 be equipped with the gas hole 3 of the first inner chamber of a plurality of intercommunications and second inner chamber on the light path mounting panel 2 first inner chamber is equipped with gaseous water conservancy diversion structure 4 dust-proof box 1 lateral wall is equipped with and is used for blowing in clean air toward first inner chamber and blows to the intake pipe 5 of second inner chamber through gas hole 3, the other end of intake pipe 5 is connected with clean air and produces device 6.
Some of the air blowing holes 3 are used for installing photoelectric devices, the photoelectric devices are installed in the second inner cavity, clean air generated by the clean air generating device 6 enters the first inner cavity through the air inlet pipe 5, then is blown to the second inner cavity along the air guide structure 4 through the air blowing holes 3, positive pressure is generated in the second inner cavity, the inside of the second inner cavity is fully filled with the clean air, and dust on the photoelectric devices in the second inner cavity can be effectively removed.
The gas guide structure 4 is used for guiding the gas to flow towards one direction, so that the clean air is uniformly blown into the second inner cavity. The gas guide structure 4 may have a plurality of structures, one of the structures includes a plurality of guide plates 401 separating the first inner cavity, as shown in fig. 3, one end of each guide plate 401 is fixed on the inner wall of the first inner cavity, the first inner cavity is divided into an air flow channel by the plurality of guide plates 401, and clean air is uniformly and rapidly blown into the second inner cavity through the air blowing holes 3 along the air flow channel in one direction.
As for the dust-proof device of the optical system, the number of the air inlet pipe 5 may be one, as shown in fig. 2; the number of the air inlet pipes 5 can be two, the two air inlet pipes 5 are oppositely arranged at two sides of the dust-proof box 1 and are arranged in a staggered manner, namely, one air inlet pipe 5 is arranged above and used for blowing air to the upper multilayer air blowing holes 3, and the other air inlet pipe 5 is arranged below and used for blowing air to the lower multilayer air blowing holes 3.
Further, the thickness of first inner chamber is far less than the thickness of second inner chamber, the diameter range of gas blow hole 3 is 4 millimeters to 6 millimeters, the diameter range of intake pipe 5 is 35 millimeters to 100 millimeters.
As above mentioned optical system's dust keeper, clean air produces device 6 and includes air compressor 601, air compressor 601 passes through intake pipe 5 connects gradually water isolator 602, oil isolator 603 and filter screen 604, and water isolator 602 is arranged in keeping apart the moisture in the air, and oil isolator 603 is arranged in keeping apart the oil stain in the air, and filter screen 604 is arranged in keeping apart the tiny particle dust of air.
In the dust-proof device of the optical system, the dust-proof box 1 is preferably further provided with a plurality of air vents 7 for exhausting clean air from the second cavity. Because the air in the second inner cavity is in positive pressure, the external air cannot enter the second inner cavity through the exhaust hole 7, and the second inner cavity is completely clean air, so that the effect of isolating the second inner cavity from the outside is achieved.
As mentioned above, in the dust-proof device of the optical system, the air vent 7 is preferably disposed at a corner of the dust-proof box 1, and a dust-proof material may be further disposed on the air vent, and the dust-proof material may be a dust-proof net or a dust-proof cloth, so that when the dust-proof device is closed, external dust can be prevented from entering the second inner cavity from the air vent 7, and a complementary dust-proof function is achieved.
The dustproof device can fill the second inner cavity with clean air, effectively remove dust on the internal optical device and discharge the dust through the exhaust hole 7; and prevent outside air entering through producing the malleation, make the optical device in operation quick and be in dustless state all the time, dustproof effect is showing, easy operation. No additional cleaning of the optical system is required.
The embodiment of the present invention is described only for the preferred embodiment of the present invention, and not for the purpose of limiting the spirit and scope of the invention, and various modifications and improvements made to the technical solution of the present invention by those skilled in the art without departing from the design concept of the present invention shall fall within the protection scope of the present invention.

Claims (10)

1. A dust-proof device of an optical system, characterized in that: including dust-proof box (1), be equipped with in dust-proof box (1) and fall into first inner chamber and be used for installing photoelectric device's second inner chamber light path mounting panel (2) of dust-proof box (1) inner chamber be equipped with the hole of blowing (3) of the first inner chamber of a plurality of intercommunications and second inner chamber on light path mounting panel (2) first inner chamber () is equipped with gaseous water conservancy diversion structure (4) dust-proof box (1) lateral wall is equipped with and is used for blowing in clean air toward first inner chamber and blows intake pipe (5) to the second inner chamber through hole of blowing (3), the other end of intake pipe (5) is connected with clean air and produces device (6).
2. The dustproof device of the optical system according to claim 1, wherein: the gas flow guiding structure (4) comprises a plurality of flow guiding plates (401) which divide the first inner cavity into gas flow channels.
3. The dustproof device of the optical system according to claim 2, wherein: one air inlet pipe (5) is arranged.
4. The dustproof device of the optical system according to claim 2, wherein: the two air inlet pipes (5) are arranged oppositely and are arranged on two sides of the dust-proof box (1) in a staggered mode.
5. The dustproof device of the optical system according to claim 3 or 4, wherein: clean air generating device (6) include air compressor machine (601), air compressor machine (601) pass through intake pipe (5) have connected gradually water isolator (602), oil isolator (603) and filter screen (604).
6. The dustproof device of the optical system according to claim 3 or 4, wherein: the diameter range of the air blowing hole (3) is 4 mm to 6 mm, and the diameter range of the air inlet pipe (5) is 35 mm to 100 mm.
7. The dustproof device of the optical system according to claim 3 or 4, wherein: and a plurality of exhaust holes (7) for exhausting the clean air in the second inner cavity are also formed in the dust-proof box (1).
8. The dustproof device of the optical system according to claim 7, wherein: the exhaust holes (7) are formed in the corner of the dustproof box (1).
9. The dustproof device of the optical system according to claim 8, wherein: and the exhaust hole (7) is provided with a dustproof material.
10. The dustproof device of the optical system according to claim 9, wherein: the dustproof material is a dustproof net or dustproof cloth.
CN202011509184.6A 2020-12-18 2020-12-18 Dustproof device of optical system Pending CN112588722A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202011509184.6A CN112588722A (en) 2020-12-18 2020-12-18 Dustproof device of optical system

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202011509184.6A CN112588722A (en) 2020-12-18 2020-12-18 Dustproof device of optical system

Publications (1)

Publication Number Publication Date
CN112588722A true CN112588722A (en) 2021-04-02

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Family Applications (1)

Application Number Title Priority Date Filing Date
CN202011509184.6A Pending CN112588722A (en) 2020-12-18 2020-12-18 Dustproof device of optical system

Country Status (1)

Country Link
CN (1) CN112588722A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114987901A (en) * 2022-06-22 2022-09-02 武汉天马微电子有限公司 Flexible display screen storage device and flexible display screen device

Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWM271643U (en) * 2004-12-06 2005-08-01 Great Computer Corp Positive air pressure filtration device for use in laser engraving
CN2766237Y (en) * 2004-12-16 2006-03-22 星云电脑股份有限公司 Positive pressure dustproof case
CN201454543U (en) * 2009-07-28 2010-05-12 叶钧 Pneumatic dustless operating platform
CN108421312A (en) * 2018-03-23 2018-08-21 上海城投污水处理有限公司 Sludge drying deodorization pipeline anti-blocking device
CN109237696A (en) * 2017-05-16 2019-01-18 任福奎 Sleep air decontamination machine
CN209520179U (en) * 2019-02-19 2019-10-22 苏州毕恩思实验器材有限公司 Air purifying type vent cabinet
CN211755192U (en) * 2020-03-05 2020-10-27 凉山州良圆马铃薯种业有限责任公司 Potato test tube seedling switching is with clean workstation of vertical current
CN214391426U (en) * 2020-12-18 2021-10-15 珠海市镭通激光科技有限公司 Dustproof device of optical system

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWM271643U (en) * 2004-12-06 2005-08-01 Great Computer Corp Positive air pressure filtration device for use in laser engraving
CN2766237Y (en) * 2004-12-16 2006-03-22 星云电脑股份有限公司 Positive pressure dustproof case
CN201454543U (en) * 2009-07-28 2010-05-12 叶钧 Pneumatic dustless operating platform
CN109237696A (en) * 2017-05-16 2019-01-18 任福奎 Sleep air decontamination machine
CN108421312A (en) * 2018-03-23 2018-08-21 上海城投污水处理有限公司 Sludge drying deodorization pipeline anti-blocking device
CN209520179U (en) * 2019-02-19 2019-10-22 苏州毕恩思实验器材有限公司 Air purifying type vent cabinet
CN211755192U (en) * 2020-03-05 2020-10-27 凉山州良圆马铃薯种业有限责任公司 Potato test tube seedling switching is with clean workstation of vertical current
CN214391426U (en) * 2020-12-18 2021-10-15 珠海市镭通激光科技有限公司 Dustproof device of optical system

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114987901A (en) * 2022-06-22 2022-09-02 武汉天马微电子有限公司 Flexible display screen storage device and flexible display screen device

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