CN214391426U

CN214391426U - Dustproof device of optical system

Info

Publication number: CN214391426U
Application number: CN202023089841.4U
Authority: CN
Inventors: 李军; 沈华明; 蔡健杰; 陈冬冬
Original assignee: Zhuhai Radium Laser Technology Co ltd
Current assignee: Zhuhai Radium Laser Technology Co ltd
Priority date: 2020-12-18
Filing date: 2020-12-18
Publication date: 2021-10-15
Anticipated expiration: 2030-12-18

Abstract

The utility model discloses an optical system's dust keeper, its technical scheme's main points are including the dust-proof box, be equipped with the light path mounting panel that falls into first inner chamber and the second inner chamber that is used for installing photoelectric device with the dust-proof box inner chamber in the dust-proof box, be equipped with the gas hole of the first inner chamber of a plurality of intercommunications and second inner chamber on the light path mounting panel, be equipped with gaseous water conservancy diversion structure at first inner chamber, be equipped with at dust-proof box lateral wall and be used for blowing in clean air toward first inner chamber and blow to the intake pipe of second inner chamber through the gas hole, the other end of intake pipe is connected with clean air and produces the device, still be equipped with the exhaust hole that the clean air of a plurality of confession second inner chamber discharged on the dust-proof box. The dustproof device of the utility model can fill the second inner cavity with clean air, effectively remove dust on the internal optical device and discharge the dust through the exhaust hole; and prevent outside air entering through producing the malleation, make the optical device in operation quick and be in dustless state all the time, dustproof effect is showing.

Description

Dustproof device of optical system

[ technical field ] A method for producing a semiconductor device

The utility model relates to an optical system's dust keeper.

[ background of the invention ]

The optical system has strict requirements on dust prevention, and dust in one wire can seriously affect the precision of an optical device, but cannot be frequently disassembled for cleaning.

[ Utility model ] content

The utility model aims at overcoming the not enough of prior art, providing an optical system's dust keeper, this dust keeper is past to be malleation state at optical system input clean air messenger and prevents that the external air from getting into in order to reach dirt-proof purpose.

The utility model discloses a realize through following technical scheme:

a dust-proof device of an optical system, characterized in that: including dust-proof box 1, be equipped with in dust-proof box 1 and fall into first inner chamber and the light path mounting panel 2 that is used for installing photoelectric device's second inner chamber with dust-proof box 1 inner chamber be equipped with the gas hole 3 of the first inner chamber of a plurality of intercommunications and second inner chamber on the light path mounting panel 2 first inner chamber is equipped with gaseous water conservancy diversion structure 4 dust-proof box 1 lateral wall is equipped with and is used for blowing in clean air toward first inner chamber and blows to the intake pipe 5 of second inner chamber through gas hole 3, the other end of intake pipe 5 is connected with clean air and produces device 6.

The dust-proof device of the optical system described above is characterized in that: the gas guiding structure 4 comprises a plurality of flow guiding plates 401 dividing the first inner cavity into gas flow channels.

The dust-proof device of the optical system described above is characterized in that: the number of the air inlet pipes 5 is one.

The dust-proof device of the optical system described above is characterized in that: the two air inlet pipes 5 are oppositely arranged on two sides of the dust-proof box 1 in a staggered mode.

The dust-proof device of the optical system described above is characterized in that: the clean air generating device 6 includes an air compressor 601, and the air compressor 601 is sequentially connected with a water separator 602, an oil separator 603 and a filter screen 604 through the air inlet pipe 5.

The dust-proof device of the optical system described above is characterized in that: the diameter range of the air blowing hole 3 is 4 mm to 6 mm, and the diameter range of the air inlet pipe 5 is 35 mm to 100 mm.

The dust-proof device of the optical system described above is characterized in that: the dustproof box 1 is also provided with a plurality of exhaust holes 7 for exhausting the clean air in the second inner cavity.

The dust-proof device of the optical system described above is characterized in that: the exhaust hole 7 is arranged at the corner of the dustproof box 1.

The dust-proof device of the optical system described above is characterized in that: and the exhaust hole 7 is provided with dustproof materials.

The dust-proof device of the optical system described above is characterized in that: the dustproof material is a dustproof net or dustproof cloth.

Compared with the prior art, the utility model discloses there is following advantage:

1. the dustproof device of the utility model can fill the second inner cavity with clean air, effectively remove dust on the internal optical device and discharge the dust through the exhaust hole; and prevent outside air entering through producing the malleation, make the optical device in operation quick and be in dustless state all the time, dustproof effect is showing.

[ description of the drawings ]

Fig. 1 is a schematic perspective view of the dust-proof box of the present invention;

FIG. 2 is a sectional view of the dust-proof box of the present invention, in which the gas guiding structure is not shown;

fig. 3 is a schematic plan view of the first inner chamber of the present invention, in which arrows represent the direction of air flow, and the air blowing holes are located right in front of the view;

fig. 4 is a plan block diagram of the clean air generating apparatus of the present invention.

In the figure: 1 is a dustproof box; 2 is a light path mounting plate; 3 is a blowing hole; 4 is a gas flow guiding structure; 401 is a guide plate; 5 is an air inlet pipe; 6 is a clean air generating device; 601 is an air compressor; 602 is a water isolator; 603 is an oil separator; 604 is a filter screen; and 7 is an exhaust hole.

[ detailed description ] embodiments

The technical features of the present invention will be described in further detail below with reference to the accompanying drawings so that those skilled in the art can understand the technical features.

The utility model provides an optical system's dust keeper, as shown in figure 1 and figure 2, is equipped with the light path mounting panel 2 that falls into first inner chamber and second inner chamber with dust-proof box 1 inner chamber in dust-proof box 1 be equipped with the gas hole 3 of the first inner chamber of a plurality of intercommunications and second inner chamber on the light path mounting panel 2 first inner chamber is equipped with gaseous water conservancy diversion structure 4 dust-proof box 1 lateral wall is equipped with and is used for blowing in clean air toward first inner chamber and blows to the intake pipe 5 of second inner chamber through gas hole 3, the other end of intake pipe 5 is connected with clean air and produces device 6.

Some of the air blowing holes 3 are used for installing photoelectric devices, the photoelectric devices are installed in the second inner cavity, clean air generated by the clean air generating device 6 enters the first inner cavity through the air inlet pipe 5, then is blown to the second inner cavity along the air guide structure 4 through the air blowing holes 3, positive pressure is generated in the second inner cavity, the inside of the second inner cavity is fully filled with the clean air, and dust on the photoelectric devices in the second inner cavity can be effectively removed.

The gas guide structure 4 is used for guiding the gas to flow towards one direction, so that the clean air is uniformly blown into the second inner cavity. The gas guide structure 4 may have a plurality of structures, one of the structures includes a plurality of guide plates 401 separating the first inner cavity, as shown in fig. 3, one end of each guide plate 401 is fixed on the inner wall of the first inner cavity, the first inner cavity is divided into an air flow channel by the plurality of guide plates 401, and clean air is uniformly and rapidly blown into the second inner cavity through the air blowing holes 3 along the air flow channel in one direction.

As for the dust-proof device of the optical system, the number of the air inlet pipe 5 may be one, as shown in fig. 2; the number of the air inlet pipes 5 can be two, the two air inlet pipes 5 are oppositely arranged at two sides of the dust-proof box 1 and are arranged in a staggered manner, namely, one air inlet pipe 5 is arranged above and used for blowing air to the upper multilayer air blowing holes 3, and the other air inlet pipe 5 is arranged below and used for blowing air to the lower multilayer air blowing holes 3.

Further, the thickness of first inner chamber is far less than the thickness of second inner chamber, the diameter range of gas blow hole 3 is 4 millimeters to 6 millimeters, the diameter range of intake pipe 5 is 35 millimeters to 100 millimeters.

As above mentioned optical system's dust keeper, clean air produces device 6 and includes air compressor 601, air compressor 601 passes through intake pipe 5 connects gradually water isolator 602, oil isolator 603 and filter screen 604, and water isolator 602 is arranged in keeping apart the moisture in the air, and oil isolator 603 is arranged in keeping apart the oil stain in the air, and filter screen 604 is arranged in keeping apart the tiny particle dust of air.

In the dust-proof device of the optical system, the dust-proof box 1 is preferably further provided with a plurality of air vents 7 for exhausting clean air from the second cavity. Because the air in the second inner cavity is in positive pressure, the external air cannot enter the second inner cavity through the exhaust hole 7, and the second inner cavity is completely clean air, so that the effect of isolating the second inner cavity from the outside is achieved.

As mentioned above, in the dust-proof device of the optical system, the air vent 7 is preferably disposed at a corner of the dust-proof box 1, and a dust-proof material may be further disposed on the air vent, and the dust-proof material may be a dust-proof net or a dust-proof cloth, so that when the dust-proof device is closed, external dust can be prevented from entering the second inner cavity from the air vent 7, and a complementary dust-proof function is achieved.

The dustproof device can fill the second inner cavity with clean air, effectively remove dust on the internal optical device and discharge the dust through the exhaust hole 7; and prevent outside air entering through producing the malleation, make the optical device in operation quick and be in dustless state all the time, dustproof effect is showing, easy operation. No additional cleaning of the optical system is required.

The embodiment of the utility model is only right the description that the preferred embodiment of the utility model goes on, not to injecing utility model design and scope, not departing from the utility model discloses under the prerequisite of design idea, engineering technical staff is right in the art the technical scheme of the utility model make various variants and improvements, all should fall into the protection scope of the utility model.

Claims

1. A dust-proof device of an optical system, characterized in that: including dust-proof box (1), be equipped with in dust-proof box (1) and fall into first inner chamber and be used for installing photoelectric device's second inner chamber light path mounting panel (2) with dust-proof box (1) inner chamber be equipped with the hole of blowing (3) of the first inner chamber of a plurality of intercommunications and second inner chamber on light path mounting panel (2) first inner chamber is equipped with gaseous water conservancy diversion structure (4) dust-proof box (1) lateral wall is equipped with and is used for blowing in clean air toward first inner chamber and blows intake pipe (5) to the second inner chamber through hole of blowing (3), the other end of intake pipe (5) is connected with clean air and produces device (6).

2. The dustproof device of the optical system according to claim 1, wherein: the gas flow guiding structure (4) comprises a plurality of flow guiding plates (401) which divide the first inner cavity into gas flow channels.

3. The dustproof device of the optical system according to claim 2, wherein: one air inlet pipe (5) is arranged.

4. The dustproof device of the optical system according to claim 2, wherein: the two air inlet pipes (5) are arranged oppositely and are arranged on two sides of the dust-proof box (1) in a staggered mode.

5. The dustproof device of the optical system according to claim 3 or 4, wherein: clean air generating device (6) include air compressor machine (601), air compressor machine (601) pass through intake pipe (5) have connected gradually water isolator (602), oil isolator (603) and filter screen (604).

6. The dustproof device of the optical system according to claim 3 or 4, wherein: the diameter range of the air blowing hole (3) is 4 mm to 6 mm, and the diameter range of the air inlet pipe (5) is 35 mm to 100 mm.

7. The dustproof device of the optical system according to claim 3 or 4, wherein: and a plurality of exhaust holes (7) for exhausting the clean air in the second inner cavity are also formed in the dust-proof box (1).

8. The dustproof device of the optical system according to claim 7, wherein: the exhaust holes (7) are formed in the corner of the dustproof box (1).

9. The dustproof device of the optical system according to claim 8, wherein: and the exhaust hole (7) is provided with a dustproof material.

10. The dustproof device of the optical system according to claim 9, wherein: the dustproof material is a dustproof net or dustproof cloth.