CN108278980B - Torsion angle dynamic measurement device and method based on piezoelectric deflection table - Google Patents
Torsion angle dynamic measurement device and method based on piezoelectric deflection table Download PDFInfo
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- CN108278980B CN108278980B CN201711445483.6A CN201711445483A CN108278980B CN 108278980 B CN108278980 B CN 108278980B CN 201711445483 A CN201711445483 A CN 201711445483A CN 108278980 B CN108278980 B CN 108278980B
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- G01—MEASURING; TESTING
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Abstract
The invention relates to a dynamic measuring device and method of torsion angle based on piezoelectric deflection table, the device includes two parts of reference emission light pipe and measuring light pipe; an optical fiber coupling laser A (1) is used as a point light source, linearly polarized light is formed through a polarizing film (13) on a torsion sensitive component A (2), and the linearly polarized light is converted into parallel light through a collimating objective lens (3) and irradiates a measuring light pipe; the measuring light tube receives linear polarization parallel light through the receiving objective lens (4), the polaroid of the torsion sensitive component B (6) generates angular motion through the piezoelectric deflection table (5), when the polaroid of the torsion sensitive component B (6) is consistent with the polarization direction of the linear polarization parallel light, the current output of the polarization-detecting PSD detector (11) is the maximum, and the deflection angle of the polaroid of the torsion sensitive component B (6) is the torsion angle. The invention relates to a device and a method for quickly and accurately measuring a torsion angle by combining a simplified optical-mechanical structure with a high-sensitivity electronic system.
Description
Technical Field
The invention relates to a device and a method for dynamically measuring a torsion angle based on a piezoelectric deflection table, which are applied to the measurement of a large-scale structure deformation angle and belong to the field of photoelectric measurement.
Background
In the fields of precision machining, assembly and adjustment and dynamic monitoring of large-scale long baseline structures, the deformation measuring device is used for measuring relative deformation angles in three directions of azimuth, pitching and torsion between two measuring points. Among the three deformation angles, the azimuth and the pitch angle can be obtained by means of collimation measurement, and the torsion angle is difficult to obtain.
The high-precision measurement of the torsion angle, which is currently widely used, mainly includes establishing a relative reference for measurement and measurement based on image processing. The relative reference measurement mainly comprises establishing a rigid reference equivalent to the distance between measurements, so that the equipment has large volume and high cost; the measurement means based on image processing depends on a camera and an image processing algorithm, such as moire fringe measurement, feature pattern matching and the like, and the precision and the dynamic performance of the measurement means are limited by the processing performance of a hardware platform and the complexity of the algorithm. Therefore, a measuring scheme with relatively simple structure, convenient installation and debugging and high sensitivity is needed to ensure high-precision dynamic measurement of the torsional deformation angle.
Disclosure of Invention
The invention aims to overcome the defects of the prior art and provides a torsional deformation measuring device and a torsional deformation measuring method which are used for quickly and accurately measuring a torsional angle by combining a simplified optical-mechanical structure and a high-sensitivity electronic system.
In order to achieve the purpose, the invention adopts the following technical scheme: the torsion angle dynamic measuring device based on the piezoelectric deflection table comprises a reference emission light pipe and a measuring light pipe;
the reference transmitting light pipe comprises a shell, an optical fiber coupling laser A, a torsion sensitive component A and a collimating objective lens, wherein the optical fiber coupling laser A is used as a point light source, emitted laser passes through a polarizing film A on the torsion sensitive component A to form a beam of linearly polarized light, and the linearly polarized light is converted into linearly polarized parallel light after passing through the collimating objective lens and irradiates the measuring light pipe;
the measuring light tube comprises a shell, a receiving objective lens, a piezoelectric deflection platform, a torsion sensitive component B and an analyzing PSD detector, the measuring light tube receives linear polarization parallel light through the receiving objective lens, the piezoelectric deflection platform enables a polaroid B of the torsion sensitive component B to generate angular motion, when the polarization direction of the polaroid B of the torsion sensitive component B is consistent with the polarization direction of the linear polarization parallel light, the current output of the analyzing PSD detector is maximum, and at the moment, the deflection angle of the polaroid B of the torsion sensitive component B is a torsion angle;
still include the auto-collimation measurement assembly, the auto-collimation measurement assembly includes: the beam splitter prism, the angle measurement collimating mirror, the angle measurement PSD detector and the optical fiber coupling laser B form an independent auto-collimation measuring assembly, the auto-collimation measuring assembly is used for measuring the deflection angle of an auto-collimation reflector in the torsion sensitive assembly B, a point light source sent by the optical fiber coupling laser B is turned by the beam splitter prism, then is turned by the angle measurement collimating mirror to form a beam of parallel light, irradiates the auto-collimation reflector and then returns to the angle measurement PSD detector through the angle measurement collimating mirror, and the auto-collimation reflector represents the deflection direction of the polarizing film B.
The torsion sensitive assembly A comprises a polaroid A, a leveling reflecting mirror and a mirror base; the polaroid A is used for converting light emitted by a non-polarized laser into linearly polarized light, the polaroid A is positioned between the optical fiber coupling laser A and the collimating objective lens, the specific position of the polaroid A can be adjusted according to different equipment processing and debugging requirements and laser selection, and the leveling reflector is used for assisting coordinate alignment operation when being installed. The reference emission light pipe and the measuring light pipe are designed by the same torsion sensitive assembly, and for convenience of use, the leveling reflector of the reference emission light pipe is arranged on the surface of the opposite side of the position of the mirror base shown in figure 2, and the upper auto-collimation reflector is not arranged;
the torsion sensitive component B of the measuring light tube comprises a polaroid B, a leveling reflector, an auto-collimation reflector and a lens base, wherein the polaroid B is positioned between the receiving objective lens and the polarization-detecting PSD detector.
The angle measurement PSD detector and the polarization detection PSD detector of the measuring light tube are two-dimensional PSD detectors, when the angle measurement PSD detector is arranged on the focal plane of the receiving objective, the angle measurement PSD detector can not only sense the light intensity, but also measure the direction and the pitch angle deformation angle, and when the angle measurement PSD detector is only used for measuring the torsion angle, a photoelectric receiving tube device can be used for replacing the angle measurement PSD detector and the polarization detection PSD detector;
the piezoelectric deflection platform of the measuring light pipe is a single-direction or multi-direction angle deflection platform in a piezoelectric driving mode, and the piezoelectric deflection platform only needs to deflect in a single direction.
In order to achieve the purpose, the invention also adopts the following technical scheme: the torsion angle dynamic measurement method based on the piezoelectric deflection table comprises the following steps:
providing a reference emission light pipe and a measurement light pipe, wherein the reference emission light pipe comprises a shell, an optical fiber coupling laser A, a torsion sensitive component A and a collimating objective lens; the measuring light tube comprises a shell, a receiving objective, a piezoelectric deflection table, a torsion sensitive component B and a polarization detection PSD detector;
the optical fiber coupling laser A is used as a point light source, emitted laser sequentially passes through a polarizing film A on the torsion sensitive component A to form a beam of linearly polarized light, and the linearly polarized light is converted into linearly polarized parallel light after passing through a collimating objective lens and irradiates a measuring light pipe;
receiving linearly polarized parallel light by a receiving objective lens of the measuring light pipe, and enabling a polaroid B of the torsion sensitive component B to generate angular motion through the piezoelectric polarization table, so that when the polarization direction of the polaroid B of the torsion sensitive component B is consistent with that of the linearly polarized parallel light, the current output of the polarization-detecting PSD detector is the maximum, and at the moment, the deflection angle of the polaroid B of the torsion sensitive component B is the torsion angle;
still include the auto-collimation measurement assembly, the auto-collimation measurement assembly includes: the laser emitted by the optical fiber coupling laser B is converted by the beam splitter prism, passes through the angle measurement collimating mirror and then becomes a beam of parallel light, irradiates the angle measurement collimating mirror and returns to the angle measurement PSD detector through the angle measurement collimating mirror.
The torsion sensitive assembly A comprises a polaroid A, a leveling reflecting mirror and a mirror base; the polaroid A is used for converting light emitted by a non-polarized laser into linearly polarized light, the polaroid A is positioned between the optical fiber coupling laser A and the collimating objective lens, the specific position of the polaroid A can be adjusted according to different equipment processing and debugging requirements and laser selection, and the leveling reflector is used for assisting coordinate alignment operation when being installed. Since the reference emitting light pipe and the measuring light pipe use the same torsion sensitive component design, the leveling reflector of the reference emitting light pipe is arranged on the surface opposite to the position of the mirror base shown in FIG. 2, and the upper reflector is not arranged for the convenience of use.
The torsion sensitive component B of the measuring light pipe comprises a polaroid B, and the polaroid B is positioned between the receiving objective and the polarization-detecting PSD detector.
The angle measurement PSD detector and the polarization detection PSD detector of the measuring light tube are two-dimensional PSD detectors, when the angle measurement PSD detector is arranged on the focal plane of the receiving objective, the angle measurement PSD detector can be sensitive to light intensity, can also be used for measuring direction and pitch angle deformation angles, and can be replaced by a photoelectric receiving tube device when only being used for measuring a torsion angle.
The piezoelectric deflection platform of the measuring light pipe is a single-direction or multi-direction angle deflection platform in a piezoelectric driving mode, and the piezoelectric deflection platform only needs to deflect in a single direction.
The invention has the beneficial effects that: the invention utilizes the polarization characteristic of light on the basis of the traditional collimation measurement, and uses the piezoelectric deflection table to drive the polaroid to generate angular motion, thereby changing the mode of light flux and being sensitive to the torsion angle. The simple structure is used for realizing the rapid and high-precision dynamic measurement of the torsion angle, the installation, the debugging and the operation are simple and convenient, the device is suitable for the field working environment, and the device has higher use value.
Drawings
FIG. 1 is a schematic diagram of a torsion angle dynamic measuring device based on a piezoelectric deflection table.
Fig. 2 is a schematic view of a torsion sensitive assembly a.
Fig. 3 is a schematic view of a torsion sensitive assembly B.
FIG. 4a is a schematic view of the piezoelectric deflection table being biased forward during operation.
FIG. 4b is a schematic diagram of the piezoelectric deflection table being reversely deflected during operation.
Fig. 5 is a schematic view of the measurement principle.
FIG. 6a is a schematic view of the reference emission light pipe and the measurement light pipe in terms of their shapes and installation.
FIG. 6b is a top view of the reference emitting light pipe aligned with the measurement reference plane.
FIG. 6c is a top view of the coarse positioning of the measurement light pipe.
FIG. 6d is a top view of the measurement light pipe in coordinate alignment with the reference emission light pipe.
Description of reference numerals: 1-fiber coupled laser A; 2-torsion sensitive component a; 3-a collimating objective lens; 4-a receiving objective lens; 5-a piezoelectric deflection table; 6-torsion sensitive component B; 7-a beam splitting prism; 8-angle measuring collimating mirror; 9-angle measurement PSD detector; 10-fiber coupled laser B; 11-analyzer PSD detector; 12-controlling the display; 13-polarizer a; 14-a leveling mirror; 16-a frame; 131-polarizer B; 141-a leveling mirror; 151-an autocollimation mirror; 161-a frame; 17-leveling light through holes of the reference emission light pipe; 18-leveling light through holes of the measuring light pipe; 19-mounting screws; 20-leveling screws.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention more apparent, the present invention will be described in further detail below with reference to the accompanying drawings and specific embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the invention and are not to be construed as limiting the invention.
The invention is further explained by taking oxyz as a reference to the coordinate system of the emission light tube, ox
my
mz
mTo measure the light pipe coordinate system.
As shown in FIG. 1, the torsion angle dynamic measuring device based on the piezoelectric deflection table is composed of two independent parts, namely a reference emission light pipe and a measuring light pipe. During measurement, the reference emission light pipe is arranged at a measurement point, and the measurement light pipe is arranged at another measurement point to jointly complete the measurement of the torsion angle.
The reference emission light pipe and the measurement light pipe have a common bottom surface reference, and the reference emission light pipe generates a bunch of polarized parallel light, the polarization direction of the bunch of polarized parallel light is perpendicular to the bottom surface reference of the light pipes, and a reference light source and an installation direction are provided for torsion measurement. The reference emission light pipe mainly comprises a fiber coupled laser A1, a torsion sensitive assembly A2 and a collimating objective lens 3. Wherein:
the optical fiber coupling laser A1 provides a light source for the reference emission light pipe, and because the laser is monochromatic light and has good directivity, the optical fiber coupling laser has small light-emitting drift and meets the requirement of long-distance measurement under low power. The optical fiber coupling laser is introduced by an external laser light source through optical fiber coupling, and an optical fiber head is arranged at the focal position of an optical system, so that the optical fiber coupling laser is an ideal point light source, and the power of the optical fiber coupling laser is within 1-10 mW, so that the requirement of measuring the distance of tens of meters can be met.
As shown in FIG. 2, a torsion sensitive assembly A2 for the emitting light pipe includes a polarizer A13, a leveling mirror 14, and a mirror mount 16. The polaroid A13 is used for converting laser light emitted by the unpolarized fiber coupled laser A1 into linearly polarized light, the polaroid A13 is positioned between the fiber coupled laser A1 and the collimating objective lens 3, the specific position of the polaroid A13 can be adjusted according to different equipment processing and debugging requirements and laser selection, and the leveling mirror 14 is used for assisting coordinate alignment operation when being installed. It should be noted that, since the reference emission light pipe and the measurement light pipe use the same design of the torsion sensitive assembly, that is, the torsion sensitive assembly a2 and the torsion sensitive assembly B6 are torsion sensitive assemblies of the same structure, for convenience of use, the leveling mirror 14 of the reference emission light pipe is installed on the surface of the mirror base 16 opposite to the position shown in fig. 2, and the upper mirror is not provided.
The collimator objective 3 is used for converting the laser emitted by the fiber coupled laser a1 into a beam of parallel light to irradiate the measuring light pipe.
As shown in fig. 3, the measuring light pipe is a main torsion angle measuring component, the measuring light pipe receives the parallel light of the reference emitting light pipe, the linearly polarized light obtains current signals with different intensities on the polarization-detecting PSD detector 11 by adjusting the deflection angle of the polarizer B131 of the torsion sensitive component B6, and the deflection angle of the polarizer B131 of the torsion sensitive component B6 corresponding to the peak point of the signal is the dynamic relative torsion angle between two measuring points. The measuring light pipe mainly comprises a receiving objective 4, a piezoelectric deflection table 5, a torsion sensitive component B6, a beam splitter prism 7, an angle measurement collimating mirror 8, an angle measurement PSD detector 9, an optical fiber coupling laser B10, an analyzing PSD detector 11 and a control display 12, wherein:
the receiving objective 4 is used for converging the parallel light transmitted by the reference transmitting light pipe to the analyzing and polarizing PSD detector 11.
The polarization-detecting PSD detector 11 is arranged at the focal plane position of the receiving objective 4 and is vertical to the optical axis, and the coordinate center of the photosensitive surface of the polarization-detecting PSD detector is positioned at the focal point position. When the detector works, the detector senses an output electric signal representing the intensity of an incident light spot so as to judge the moment when the incident light energy is maximum, and the coordinate position of the center of the output light spot energy is used for installing the optical axis alignment operation.
As shown in fig. 4a and 4b, the piezoelectric deflection stage 5 is a fast deflection stage implemented by piezoelectric driving in combination with a flexible hinge, and has the advantages of fast response, high angular resolution, and small size. The piezoelectric deflection stage 5 is wound around z
mThe axis (receiving the optical axis of the objective lens) moves along the direction, a deflection device corresponding to the deflection range can be selected according to the requirements of different torsion angle measurement ranges, a piezoelectric deflection table with a deflection angle of 4 degrees is selected in the embodiment, and the table top is static at x when the piezoelectric deflection table is not excited through precise adjustment
moz
mAnd in the plane, the zero position of the piezoelectric deflection platform is obtained.
The torsion sensitive component B6 is installed at the deflection head of the piezoelectric deflection table 5 and participates in the deflection of the polaroid B131 of the torsion sensitive component B6 and the reflection of the parallel light of the auto-collimation measuring component. As shown in fig. 3, the torsion sensitive assembly B6 includes a mirror mount 161, a polarizer B131, a leveling mirror 141, and a self-collimating mirror 151. Referring to FIGS. 4a and 4b, the base bottom and x are shown under static conditions
moz
mPlane-parallel, the polarization direction of the polarizer B131 of the torsion sensitive component B6 is parallel to y
mAxis, leveling normal and x of mirror 141
mAxis parallel, self-collimating mirror 151 normal and y
mThe axes are parallel, the orientation of the polarizer and the two mirrors is ensured to meet the requirement by the precise repair and adjustment of the mirror base 161, and the rear part of the polarizer B131 of the torsion sensitive assembly B6 is along the direction z
mThe round hole in the direction (namely, the optical axis of the receiving objective) is an optical channel.
The polarizer B131 of the torsion sensitive component B6 and the received linearly polarized light act together to generate a light intensity modulation effect. Under the action of the piezoelectric polarization swing table 5, when the linearly polarized light is consistent with the polarization direction of the polaroid B131 of the torsion sensitive component B6, the light flux is maximum, and when the linearly polarized light is inconsistent with the polarization direction of the polaroid B131 of the torsion sensitive component B6, the light flux is less than the maximum light flux, and the intensity is sensitive and converted into a current signal by the polarization-detecting PSD detector 11.
In the torsion sensitive element B6, since the polarization direction of the polarizer B131 is parallel to the normal direction of the self-collimating mirror 151, the deflection angle of the polarizer B131 of the torsion sensitive element B6 can be fully characterized by measuring the deflection angle of the self-collimating mirror 151.
The measurement principle is described with reference to fig. 4a, 4b and 5 (the curve of fig. 5 only uses a line graph to illustrate the time correspondence between the torsion calculation angle and the received energy, and is not an actual change law curve). In fig. 4a and 4b, at the zero position of the piezoelectric deflection table, the polarization direction of the polarizer of the reference emission light pipe is coincident with the y-axis, and the polarization direction of the polarizer of the measurement light pipe is coincident with the y-axis
mThe axes are coincident, and the torsion angle between the reference emission light pipe and the measurement light pipe is set as theta, namely y and y
mThe angle is θ, the yaw angle calculated from the spot coordinate position of the angle-measuring PSD detector 9 is r, and when t is 0, r is 0.
Within a period of deflection (i.e. 0-t)
7In range), the deflection angle of the polarizer B131 of the torsion sensitive component B6 is related to the output signal of the polarization-analyzing PSD detector 11 as follows:
0～t
1: the polarization direction of the polarizer B131 of the torsion sensitive member B6 is from the initial direction y
mDeflecting towards the positive direction, wherein r gradually increases and gradually approaches theta, the included angle between the polarization direction of the torsion sensitive component A2 and the polarization direction of the polaroid B131 of the torsion sensitive component B6 gradually decreases, the light spot energy on the polarization-detecting PSD detector 11 gradually increases, the corresponding electric signal output increases accordingly, and at t
1At the moment, when the polarizer B131 of the torsion sensitive component B6 deflects to the y direction, the included angle between the polarization directions of the two is 0, and r is θ, the output current of the analyzer PSD detector 11 reaches the maximum value;
t
1～t
2: since the polarizer B131 of the torsion sensitive component B6 continues to deflect in the positive direction, the two polarization directions are clampedWhen the angle is increased from 0 again, the energy of the light spot on the analyzer PSD detector 11 is gradually reduced, the corresponding electrical signal output is reduced, and when the yaw angle of the polarizer B131 of the torsion sensitive component B6 reaches the positive maximum value α, the yaw is stopped;
t
3～t
4: the polarization direction of the polarizer B131 of the twist sensitive component B6 starts to deflect in a negative direction, the included angle between the polarization direction of the polarizer a13 of the twist sensitive component a2 and the polarization direction of the polarizer B131 of the twist sensitive component B6 starts to gradually decrease again, and then the energy of the light spot on the polarization-detecting PSD detector 11 increases until the output reaches a maximum value when the polarization directions of the polarizer a13 of the twist sensitive component a2 and the polarizer B131 of the twist sensitive component B6 coincide with each other, and at this time, r is θ;
t
4～t
5since the polarizer B131 of the twist sensitive module B6 continues to deflect in the negative direction at this time, the included angle between the polarization direction of the polarizer a13 of the twist sensitive module a2 and the polarization direction of the polarizer B131 of the twist sensitive module B6 increases from 0, the energy of the light spot on the polarization-detecting PSD detector 11 gradually decreases, and the corresponding electrical signal output decreases accordingly until the maximum position β of negative-direction deflection.
It can be seen from the curve that the respective polarization directions of the polarizer of the measurement light pipe and the reference emission light pipe coincide twice in a deflection period, and the initial polarization directions of the two are precisely coincident, so the angle measurement value at the maximum value of the light energy sensed by the polarization-detecting PSD detector 11 is the dynamic torsion angle θ of the two measurement points.
The leveling mirror 141 in the torsion sensitive assembly B6 is used to assist in the alignment of the device coordinates by external devices when installed.
The beam splitter prism 7, the angle measurement collimating mirror 8, the angle measurement PSD detector 9 and the fiber coupled laser B10 form an independent auto-collimation measuring component, and the auto-collimation measuring component is used for measuring the deflection angle of the auto-collimation reflector 151 in the torsion sensitive component B6. As shown in fig. 1, a point light source emitted by the fiber coupled laser B10 is converted by the beam splitter prism 7, passes through the angle measurement collimator 8, becomes a beam of parallel light, irradiates the auto-collimation reflector 151, and returns to the angle measurement PSD detector 9 through the angle measurement collimator 8.
Under the zero position state of the piezoelectric deflector, a light spot received by the angle measurement PSD detector 9 is positioned at the central coordinate position of the PSD detector 9, and the deflection angle α and the PSD light spot coordinate position are in the following relation:
wherein: delta d is the distance difference between the PSD light spot coordinate position at a certain moment and the light spot coordinate position when the piezoelectric deflection table 5 is located at a zero position, and f is the focal length of the angle measurement collimating mirror 8.
The control display 12 is used for providing power supply and driving signals of the angle measurement PSD detector 9, the polarization detection PSD detector 11 and the piezoelectric deflection stage 5 and driving a laser light source, synchronously collecting the angle measurement PSD detector 9 and the polarization detection PSD detector 11, completing current signal collection corresponding to incident light intensity and angle calculation of the piezoelectric deflection stage 5, displaying results on a display screen in a graph and data mode, and transmitting the results to a far end through a data communication cable.
The installation of the torsional deformation measuring device for transmitting the reference light pipe coordinate system oxyz and measuring light pipe coordinate system ox by adjustment will be described in connection with the description of FIGS. 6 a-6 d
my
mz
mThe alignment is carried out, and the installation and adjustment are carried out under the relative static condition of the two measuring points.
FIG. 6a shows the appearance and installation size of the reference emission light pipe and the measurement light pipe, and the installation screw 19 passes through the U-shaped through hole at the lower part of the reference emission light pipe shell to be connected with the base surface screw hole to be measured so as to fix the light pipes; the adjusting screw 20 passes through the threaded hole of the reference emission light pipe shell to be in contact with the mounting base surface and is used for adjusting the posture of the reference emission light pipe. Or the installation screw is not arranged, and the posture is fixed with the installation base surface in a hard glue or magnetic absorption mode after the posture adjustment is finished. In the embodiment, after two laika 5100 theodolites are used for accurate leveling, the installation of the device is completed in an auxiliary mode, the deviation between the optical axis and the horizontal direction is within 0.5' when the pitching reading is 90 degrees after the theodolites are calibrated, and the adjustment is carried out according to the following steps.
The method comprises the following steps: first, as shown in FIG. 6b, the reference emission light pipe is placed on a measurement point mounting base. The theodolite L1 is placed in front of the objective lens at the installation position of the reference transmitting light tube, the optical axis of the theodolite is kept still as a torsion measuring reference (the reference is determined by external factors of a measured point, such as conditions of direction regulation of an external measuring coordinate system and the like), the determined direction is the z-axis direction of the reference transmitting light tube, and the azimuth angle A1 and the pitch angle E1 of the theodolite at the moment are recorded. Adjusting a visual focusing knob of a theodolite L1 to enable the outline of the reference emission light tube to be clearly imaged, adjusting a light tube leveling screw 20 and the direction of the light tube to enable a light tube objective lens to be positioned at the visual center for coarse alignment, and then visually focusing the theodolite L1 to the infinity position for collimation measurement;
step two: setting a theodolite L2 to be fixed at a 90-degree position (namely, the optical axis is in the horizontal direction) in a pitching manner, opening a self-alignment light source of a theodolite L2, aiming at a leveling reflector 14 on a torsion sensitive component A2 through a leveling light through hole 17 of a reference transmitting light pipe, repeatedly adjusting three leveling screws 20 of a reference transmitting light pipe shell and rotating the position of the shell, enabling parallel light images emitted by the reference transmitting light pipe to be formed in the center of a visual reticle of the theodolite L1, enabling the self-alignment image of the theodolite L2 to be in a pitching reading of 0 in the visual reticle, aligning the z-axis (namely the optical axis) direction of the reference light pipe with an external measuring reference at the moment, and then fixing a mounting screw 19;
step three: as shown in fig. 6c, the theodolite L1 is rotated to 180 ° + a1 in azimuth, the pitch angle is adjusted to 180 ° + E1, the optical axis direction of the theodolite L1 is still parallel to the optical axis direction in the first step, the visual focusing distance of the theodolite L1 is adjusted at this time, so that the outline of the measuring light pipe is clearly imaged, the three leveling screws 20 of the measuring light pipe are adjusted, so that the objective lens of the measuring light pipe is in the visual center, the caliber is roughly aligned, and then the theodolite L1 is removed;
step four: as shown in fig. 6d, starting the measurement light pipe polarization-detecting PSD measurement, the piezoelectric polarization table is in a zero state without deflection, moving the theodolite L2 to the front of the measurement light pipe leveling clear hole, adjusting the pitch of the theodolite L1 to 90 ° (that is, the optical axis is the horizontal direction) and fixing, turning on the autocollimation light source of the theodolite L2, aiming at the leveling clear hole 18 of the torsion sensitive component B6 through the measurement light pipe leveling clear hole 18, aligning the leveling reflector 141 on the torsion sensitive component B6, repeatedly adjusting the three leveling screws 20 of the measurement light pipe shell and rotating the shell position, reading the two-dimensional coordinate position of the light spot output by the measurement light pipe polarization-detecting PSD detector 11, so that the light spot coordinate of the polarization-detecting PSD detector 11 is located at the central position, and simultaneously making the self-alignment image of the theodolite 2 in;
step five: at this time, the coordinates of the measurement baseline are aligned by the reference emission light pipe and the measurement light pipe, the polarization directions of the polarizers in the reference emission light pipe and the measurement light pipe are basically consistent, and the measurement can be started. In order to avoid the small angle difference of the two polarization directions caused by errors in installation and adjustment, the measurement is started under the condition that the two measurement points are relatively static, and the output value of the torsion angle of the measurement light tube is used as an initial value r
0And stored in the internal memory of the control display, and the dynamic measured value of the torsion angle is r-r in the subsequent measurement
0。
The above-described embodiments of the present invention should not be construed as limiting the scope of the present invention. Any other corresponding changes and modifications made according to the technical idea of the present invention should be included in the protection scope of the claims of the present invention.
Claims (6)
1. A torsion angle dynamic measuring device based on a piezoelectric deflection table is characterized by comprising a reference emission light pipe and a measuring light pipe;
the reference transmitting light pipe comprises a shell, an optical fiber coupling laser A (1), a torsion sensitive component A (2) and a collimating objective lens (3), wherein the optical fiber coupling laser A (1) is used as a point light source, emitted laser passes through a polarizing film A (13) on the torsion sensitive component A (2) to form a beam of linearly polarized light, and the linearly polarized light is converted into linearly polarized parallel light after passing through the collimating objective lens (3) and irradiates the measuring light pipe;
the measuring light tube comprises a shell, a receiving objective lens (4), a piezoelectric deflection table (5), a torsion sensitive component B (6) and an analysis PSD detector (11), the measuring light tube receives linear polarization parallel light through the receiving objective lens (4), and the piezoelectric deflection table (5) enables a polaroid B (131) of the torsion sensitive component B (6) to generate angular motion, so that when the polarization direction of the polaroid B (131) of the torsion sensitive component B (6) is consistent with that of the linear polarization parallel light, the current output of the analysis PSD detector (11) is maximum, and at the moment, the deflection angle of the polaroid B (131) of the torsion sensitive component B (6) is a torsion angle;
still include the auto-collimation measurement assembly, the auto-collimation measurement assembly includes: the optical fiber coupling laser device comprises a light splitting prism (7), an angle measurement collimating mirror (8), an angle measurement PSD detector (9) and an optical fiber coupling laser device B (10), wherein the light splitting prism, the angle measurement collimating mirror (8), the angle measurement PSD detector (9) and the optical fiber coupling laser device B (10) form an independent auto-collimation measuring assembly, the auto-collimation measuring assembly is used for measuring the deflection angle of an auto-collimation reflector (151) in a torsion sensitive assembly B (6), laser emitted by the optical fiber coupling laser device B (10) is turned through the light splitting prism (7) and then forms a beam of parallel light after passing through the angle measurement collimating mirror (8), irradiates the auto-collimation reflector (151), and then returns to the angle measurement PSD detector (9) through the.
2. The piezoelectric wobble table based torsion angle dynamic measurement device of claim 1, wherein the torsion sensitive assembly a (2) comprises a polarizer a (13), a leveling mirror (14) and a mirror base (16); the polaroid A (13) is used for converting the light emitted by the non-polarized laser into linearly polarized light, and the polaroid A (13) is positioned between the fiber coupled laser A (1) and the collimating objective lens (3);
the torsion sensitive component B (6) of the measuring light pipe comprises a polaroid B (131), and the polaroid B (131) is positioned between the receiving objective (4) and the analyzing PSD detector (11).
3. The dynamic torsion angle measuring device based on the piezoelectric deflection table as claimed in claim 1, wherein the angle-measuring PSD detector (9) and the polarization-detecting PSD detector (11) of the measuring light pipe are two-dimensional PSD detectors, and when the angle-measuring PSD detector (9) is installed on the focal plane of the receiving objective, the device can not only sense the light intensity, but also measure the azimuth and pitch angle deformation angles;
the piezoelectric deflection platform (5) of the measuring light pipe is a single-direction or multi-direction angle deflection platform in a piezoelectric driving mode.
4. A torsion angle dynamic measurement method based on a piezoelectric deflection table is characterized by comprising the following steps:
providing a reference emission light pipe and a measurement light pipe, wherein the reference emission light pipe comprises a shell, an optical fiber coupling laser A (1), a torsion sensitive component A (2) and a collimating objective lens (3); the measuring light pipe comprises a shell, a receiving objective (4), a piezoelectric deflection table (5), a torsion sensitive component B (6) and a polarization-detecting PSD detector (11);
the optical fiber coupling laser A (1) is used as a point light source, emitted laser sequentially passes through a polarizing film A (13) on the torsion sensitive component A (2) to form a beam of linearly polarized light, and the linearly polarized light is converted into linearly polarized parallel light after passing through a collimating objective lens (3) and irradiates a measuring light pipe;
receiving linearly polarized parallel light by the measuring light pipe through the receiving objective lens (4), and enabling the polaroid B (131) of the torsion sensitive component B (6) to generate angular motion through the piezoelectric deflection table (5), so that when the polarization direction of the polaroid B (131) of the torsion sensitive component B (6) is consistent with that of the linearly polarized parallel light, the current output of the polarization-detecting PSD detector (11) is the maximum, and at the moment, the deflection angle of the polaroid B (131) of the torsion sensitive component B (6) is the torsion angle;
still include the auto-collimation measurement assembly, the auto-collimation measurement assembly includes: the optical fiber coupling laser device comprises a light splitting prism (7), an angle measurement collimating mirror (8), an angle measurement PSD detector (9) and an optical fiber coupling laser device B (10), wherein the light splitting prism, the angle measurement collimating mirror (8), the angle measurement PSD detector (9) and the optical fiber coupling laser device B (10) form an independent auto-collimation measuring assembly, the auto-collimation measuring assembly is used for measuring the deflection angle of an auto-collimation reflector (151) in a torsion sensitive assembly B (6), laser emitted by the optical fiber coupling laser device B (10) is turned through the light splitting prism (7) and then forms a beam of parallel light after passing through the angle measurement collimating mirror (8), irradiates the auto-collimation reflector (151), and then returns to the angle measurement PSD detector (9) through the.
5. The piezoelectric wobble plate based torsion angle dynamic measurement method of claim 4, wherein the torsion sensitive assembly A (2) comprises a polarizer A (13), a leveling mirror (14) and a mirror base (16); the polaroid A (13) is used for converting the light emitted by the non-polarized laser into linearly polarized light, and the polaroid A (13) is positioned between the fiber coupled laser A (1) and the collimating objective lens (3);
the torsion sensitive component B (6) of the measuring light pipe comprises a polaroid B (131), and the polaroid B (131) is positioned between the receiving objective (4) and the analyzing PSD detector (11).
6. The dynamic torsion angle measuring method based on the piezoelectric deflection table as claimed in claim 4, wherein the angle-measuring PSD detector (9) and the polarization-detecting PSD detector (11) of the measuring light pipe are two-dimensional PSD detectors, and when the angle-measuring PSD detector (9) is installed on the focal plane of the receiving objective, the angle-measuring PSD detector can not only sense the light intensity, but also measure the azimuth and the pitch angle deformation angles;
the piezoelectric deflection platform (5) of the measuring light pipe is a single-direction or multi-direction angle deflection platform in a piezoelectric driving mode.
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