CN112470302A - 掩模支撑模板、其制造方法及框架一体型掩模的制造方法 - Google Patents
掩模支撑模板、其制造方法及框架一体型掩模的制造方法 Download PDFInfo
- Publication number
- CN112470302A CN112470302A CN201980048804.XA CN201980048804A CN112470302A CN 112470302 A CN112470302 A CN 112470302A CN 201980048804 A CN201980048804 A CN 201980048804A CN 112470302 A CN112470302 A CN 112470302A
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- Prior art keywords
- mask
- frame
- template
- metal film
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Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Electroluminescent Light Sources (AREA)
Applications Claiming Priority (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR20180092948 | 2018-08-09 | ||
| KR10-2018-0092948 | 2018-08-09 | ||
| KR10-2018-0122020 | 2018-10-12 | ||
| KR1020180122020A KR101988498B1 (ko) | 2018-10-12 | 2018-10-12 | 마스크 지지 템플릿과 그의 제조 방법 및 프레임 일체형 마스크의 제조 방법 |
| PCT/KR2019/009744 WO2020032513A1 (ko) | 2018-08-09 | 2019-08-05 | 마스크 지지 템플릿과 그의 제조 방법 및 프레임 일체형 마스크의 제조 방법 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN112470302A true CN112470302A (zh) | 2021-03-09 |
Family
ID=69414943
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201980048804.XA Pending CN112470302A (zh) | 2018-08-09 | 2019-08-05 | 掩模支撑模板、其制造方法及框架一体型掩模的制造方法 |
Country Status (3)
| Country | Link |
|---|---|
| CN (1) | CN112470302A (ko) |
| TW (1) | TWI826497B (ko) |
| WO (1) | WO2020032513A1 (ko) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111224019A (zh) * | 2018-11-23 | 2020-06-02 | Tgo科技株式会社 | 掩模支撑模板和其制造方法及框架一体型掩模的制造方法 |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1534383A (zh) * | 2003-03-27 | 2004-10-06 | ����Sdi��ʽ���� | 显示装置的沉积掩模及其制造方法 |
| CN1578563A (zh) * | 2003-07-22 | 2005-02-09 | 精工爱普生株式会社 | 蒸镀掩模及制法、显示装置及制法以及具有其的电子机器 |
| US20160248011A1 (en) * | 2015-02-24 | 2016-08-25 | Samsung Display Co., Ltd. | Method of manufacturing mask |
| WO2018084448A2 (ko) * | 2016-11-03 | 2018-05-11 | 주식회사 티지오테크 | 모판, 모판의 제조 방법, 마스크의 제조 방법 및 oled 화소 증착 방법 |
| KR20180054952A (ko) * | 2016-11-14 | 2018-05-25 | 주식회사 포스코 | 증착용 마스크 제조방법, 이에 의해 제조된 증착용 마스크 및 이를 이용한 유기 발광 소자 제조방법 |
| KR20180087824A (ko) * | 2017-01-25 | 2018-08-02 | 주식회사 티지오테크 | 프레임 일체형 마스크 및 그 제조방법 |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005105328A (ja) * | 2003-09-30 | 2005-04-21 | Canon Inc | マスク構造体の製造方法およびマスク構造体ならびに蒸着装置 |
| CN102971673B (zh) * | 2010-07-09 | 2015-10-07 | 三井化学株式会社 | 防护膜组件及用于防护膜组件的掩模粘接剂 |
| KR102082784B1 (ko) * | 2014-12-11 | 2020-03-02 | 삼성디스플레이 주식회사 | 마스크 프레임 조립체, 그 제조 방법 및 유기 발광 표시 장치의 제조 방법 |
| KR102609073B1 (ko) * | 2016-11-30 | 2023-12-05 | 엘지디스플레이 주식회사 | 증착용 마스크 및 그 제조방법 |
| KR20180087537A (ko) * | 2017-01-24 | 2018-08-02 | 삼성디스플레이 주식회사 | 전기 도금 마스크, 이를 이용하여 제작된 유기발광 표시장치 및 이의 제작방법 |
| KR101988498B1 (ko) * | 2018-10-12 | 2019-06-12 | 주식회사 티지오테크 | 마스크 지지 템플릿과 그의 제조 방법 및 프레임 일체형 마스크의 제조 방법 |
-
2019
- 2019-08-02 TW TW108127575A patent/TWI826497B/zh active
- 2019-08-05 WO PCT/KR2019/009744 patent/WO2020032513A1/ko active Application Filing
- 2019-08-05 CN CN201980048804.XA patent/CN112470302A/zh active Pending
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1534383A (zh) * | 2003-03-27 | 2004-10-06 | ����Sdi��ʽ���� | 显示装置的沉积掩模及其制造方法 |
| CN1578563A (zh) * | 2003-07-22 | 2005-02-09 | 精工爱普生株式会社 | 蒸镀掩模及制法、显示装置及制法以及具有其的电子机器 |
| US20160248011A1 (en) * | 2015-02-24 | 2016-08-25 | Samsung Display Co., Ltd. | Method of manufacturing mask |
| WO2018084448A2 (ko) * | 2016-11-03 | 2018-05-11 | 주식회사 티지오테크 | 모판, 모판의 제조 방법, 마스크의 제조 방법 및 oled 화소 증착 방법 |
| KR20180054952A (ko) * | 2016-11-14 | 2018-05-25 | 주식회사 포스코 | 증착용 마스크 제조방법, 이에 의해 제조된 증착용 마스크 및 이를 이용한 유기 발광 소자 제조방법 |
| KR20180087824A (ko) * | 2017-01-25 | 2018-08-02 | 주식회사 티지오테크 | 프레임 일체형 마스크 및 그 제조방법 |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111224019A (zh) * | 2018-11-23 | 2020-06-02 | Tgo科技株式会社 | 掩模支撑模板和其制造方法及框架一体型掩模的制造方法 |
| CN111224019B (zh) * | 2018-11-23 | 2023-05-02 | Tgo科技株式会社 | 掩模支撑模板和其制造方法及掩模与框架连接体的制造方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| TW202020930A (zh) | 2020-06-01 |
| WO2020032513A1 (ko) | 2020-02-13 |
| TWI826497B (zh) | 2023-12-21 |
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