CN112363310A - Transmission mechanism and high-precision microscope - Google Patents
Transmission mechanism and high-precision microscope Download PDFInfo
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- CN112363310A CN112363310A CN202011264958.3A CN202011264958A CN112363310A CN 112363310 A CN112363310 A CN 112363310A CN 202011264958 A CN202011264958 A CN 202011264958A CN 112363310 A CN112363310 A CN 112363310A
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B21/00—Microscopes
- G02B21/24—Base structure
- G02B21/26—Stages; Adjusting means therefor
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Abstract
The invention relates to a transmission mechanism and a high-precision microscope. It includes: the device comprises a transmission mechanism, a driving device and a platform assembly. The driving device comprises a first rail, a moving platform and a driving assembly, the moving platform is installed on the first rail through a sliding block, the driving assembly is used for driving the moving platform to move along the first rail, the platform assembly comprises a second rail and a platform, the second rail is arranged in parallel with the first rail, the platform is installed on the second rail through the sliding block, a first piece of a transmission mechanism is installed on the platform, a sixth piece of the transmission mechanism is installed on the moving platform, and a first shaft, a second shaft and a third shaft of the transmission mechanism are respectively parallel to the second rail. The transmission mechanism comprises a plurality of kinematic pairs, and transmits the driving force in the target direction through each kinematic pair and isolates other driving forces. Thereby effectively avoiding the vibration of the platform in the Z direction.
Description
Technical Field
The invention relates to the field of high-precision transmission, in particular to a transmission mechanism and a high-precision microscope.
Background
Conventional high-precision microscopes require the movement of the stage in the X-direction or the Y-direction on a horizontal plane to be as smooth as possible, i.e., to generate as little Z-direction vibration as possible, since Z-direction vibration affects the clarity of the observation of the object. Wherein the Z direction is a direction perpendicular to the horizontal plane.
Although some shock absorption measures are applied to the traditional high-precision microscope, the shock absorption measures have undesirable effects.
Disclosure of Invention
Based on this, a transmission mechanism is provided. When the transmission mechanism is used, the vibration in the Z direction can be obviously eliminated.
A transmission mechanism comprising:
a first body, a second body, a third body, a fourth body, a fifth body and a sixth body,
one end of the first piece body is pivoted with one end of the second piece body through a first shaft, the other end of the second piece body is pivoted with one end of the third piece body through a second shaft, the other end of the third piece body is pivoted with one end of the fourth piece body through a third shaft, the other end of the fourth piece body is pivoted with one end of the fifth piece body through a fourth shaft, the fifth piece body is arranged in the sixth piece body, and the fifth piece body is pivoted with the sixth piece body through a fifth shaft,
the axial of the first shaft, the axial of the second shaft and the axial of the third shaft are parallel to each other, the axial of the fourth shaft is perpendicular to the axial of the third shaft, the fifth shaft is perpendicular to the fourth shaft, and the fifth shaft is perpendicular to the third shaft.
According to the transmission mechanism, through the mutual matching and movement of the first element body, the second element body, the third element body, the fourth element body, the fifth element body and the sixth element body, the driving force in the target direction can be transmitted to the platform, so that the platform is driven to move along the rail, and other driving forces can be isolated, namely other driving forces only drive the transmission mechanism to generate corresponding movement and cannot be transmitted to the platform, and the platform cannot be vibrated.
In one embodiment, the second body and the third body form an included angle therebetween.
In one embodiment, the transmission mechanism has a position such that an axial direction of the first shaft, an axial direction of the second shaft, and an axial direction of the third shaft are parallel to the X direction, an axial direction of the fourth shaft is parallel to the Y direction, and an axial direction of the fifth shaft is parallel to the Z direction.
In one embodiment, the first body is horizontally disposed, and an included angle is formed between the first body and the second body.
In one embodiment, an included angle is formed between the fourth body and the third body, and a gap is formed between the fourth body and the sixth body.
In one embodiment, the sixth body is provided with a receiving hole, and the fifth body is located in the receiving hole.
A high-precision microscope comprising the transmission mechanism, the high-precision microscope further comprising: a driving device and a platform component, wherein the driving device is arranged on the platform component,
the driving device comprises a first track, a mobile station and a driving component, the mobile station is arranged on the first track through a sliding block, the driving component is used for driving the mobile station to move along the first track,
the platform assembly comprises a second track and a platform, the second track is arranged in parallel with the first track, the platform is arranged on the second track through a sliding block,
the first body is mounted on the platform, the sixth body is mounted on the mobile station, and the first shaft, the second shaft, and the third shaft are parallel to the second rail, respectively.
In one embodiment, the mobile station is provided with a first positioning block and a second positioning block, the sixth body is arranged between the first positioning block and the second positioning block, a gap is arranged between the bottom of the sixth body and the mobile platform, a cushion pad is arranged between the sixth body and the first positioning block, a cushion pad is arranged between the sixth body and the second positioning block, and the sixth body is clamped and positioned by the first positioning block and the second positioning block.
In one embodiment, the driving assembly comprises a driving motor, a gear and a rack, the gear is connected with the driving motor, the gear is meshed with the rack, and the rack is installed on the mobile station.
In one embodiment, the platform surface is provided with a strip-shaped groove, and the first member is located in the strip-shaped groove.
A transmission mechanism comprises a plurality of kinematic pairs, and the transmission mechanism transmits driving force in a target direction through each kinematic pair and isolates other driving force.
Drawings
Fig. 1 is a schematic view of a transmission mechanism of an embodiment of the present invention.
Fig. 2 is an exploded view of the drive mechanism of the embodiment of the present invention.
Fig. 3 is a schematic diagram of a high precision microscope of an embodiment of the present invention.
Fig. 4 is a schematic view of the transmission mechanism and the driving device according to the embodiment of the invention.
Wherein:
110. a first body 120, a second body 130, and a third body
140. A fourth body 150, a fifth body 160, a sixth body 161, and a receiving hole
210. First shaft 220, second shaft 230, third shaft
240. Fourth shaft 250, fifth shaft
310. Drive motor 320, gear 330, rack
340. Mobile station 350, first track 360, platform 361 and strip-shaped groove
370. A second track 380, a first positioning block 390, a second positioning block
Detailed Description
In order to make the aforementioned objects, features and advantages of the present invention comprehensible, embodiments accompanied with figures are described in detail below. In the following description, numerous specific details are set forth in order to provide a thorough understanding of the present invention. This invention may, however, be embodied in many different forms and should not be construed as limited to the embodiments set forth herein.
It will be understood that when an element is referred to as being "secured to" another element, it can be directly on the other element or intervening elements may also be present. When an element is referred to as being "connected" to another element, it can be directly connected to the other element or intervening elements may also be present.
Unless defined otherwise, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention belongs. The terminology used in the description of the invention herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention.
As shown in fig. 1 and 2, an embodiment of the present invention provides a transmission mechanism including: the first body 110, the second body 120, the third body 130, the fourth body 140, the fifth body 150 and the sixth body 160.
One end of the first body 110 is pivotally connected to one end of the second body 120 via a first shaft 210, the other end of the second body 120 is pivotally connected to one end of the third body 130 via a second shaft 220, the other end of the third body 130 is pivotally connected to one end of the fourth body 140 via a third shaft 230, the other end of the fourth body 140 is pivotally connected to one end of the fifth body 150 via a fourth shaft 240, the fifth body 150 is disposed inside the sixth body 160, the fifth body 150 is pivotally connected to the sixth body 160 via a fifth shaft 250,
the axial direction of the first shaft 210, the axial direction of the second shaft 220, and the axial direction of the third shaft 230 are parallel to each other, the axial direction of the fourth shaft 240 is perpendicular to the axial direction of the third shaft 230, the fifth shaft 250 is perpendicular to the fourth shaft 240, and the fifth shaft 250 is perpendicular to the third shaft 230.
Specifically, the first body 110 is a block body, and the block body may be provided with a screw hole. The screw holes are used to secure the block to the platform 360 via mounting screws. One end of the block body is provided with a shaft hole, and the shaft hole is used for installing the first shaft 210.
The second body 120 is a block body, and two ends of the block body are respectively provided with a shaft hole. The axial directions of the two shaft holes are parallel to each other. The shaft hole at one end is used for mounting the first shaft 210, and the shaft hole at the other end is used for mounting the second shaft 220.
The third body 130 is a block body, and two ends of the block body are respectively provided with an axle hole. The axial directions of the two shaft holes are parallel to each other. The shaft hole at one end is used for mounting the second shaft 220, and the shaft hole at the other end is used for mounting the third shaft 230.
The fourth body 140 is a block body, and two ends of the block body are respectively provided with an axle hole. The axial directions of the two shaft holes are mutually vertical. The shaft hole at one end is used to mount the third shaft 230, and the shaft hole at the other end is used to mount the fourth shaft 240.
The fifth body 150 is a block body, and two shaft holes perpendicular to each other are respectively formed on the block body. One for mounting the fourth shaft 240 and the other for mounting the fifth shaft 250.
The sixth body 160 is a block body, a receiving hole 161 is formed on the block body, the fifth body 150 is located in the receiving hole 161, and the receiving hole 161 may be a through hole. Two ends of the block body are respectively provided with a shaft hole, and the shaft holes are used for installing a fifth shaft 250.
In the above conventional mechanism, the first body 110, the first shaft 210 and the second body 120 form a kinematic pair. The second body 120, the second shaft 220 and the third body 130 form a kinematic pair. The third body 130, the third shaft 230 and the fourth body 140 form a kinematic pair. The fourth body 140, the fourth shaft 240 and the fifth body 150 form a kinematic pair. The fifth body 150, the fifth shaft 250 and the sixth body 160 form a kinematic pair.
The transmission mechanism of the invention transmits the driving force in the target direction through each kinematic pair and isolates other driving forces.
The target direction is one of the horizontal moving directions of the platform 360 of the microscope, and the driving force in the direction can be transmitted to the platform 360 through the transmission mechanism, so that the platform 360 can move along the direction. And, the driving force of other directions is isolated by the transmission mechanism, so that the vibration of the platform 360 can be effectively avoided.
It will be appreciated that the six-piece body and five-shaft multiple drive train are only one preferred embodiment of the drive mechanism of the present invention. The invention can also adopt other forms to form a plurality of transmission pairs so as to achieve the aim of isolating the driving force in other directions.
In this embodiment, the second body 120 and the third body 130 form an included angle therebetween. The angle facilitates relative movement between the second body 120 and the third body 130.
In the present embodiment, as shown in fig. 1 and 2, the transmission mechanism has a position such that the axial direction of the first shaft 210, the axial direction of the second shaft 220, and the axial direction of the third shaft 230 are parallel to the X direction, the axial direction of the fourth shaft 240 is parallel to the Y direction, and the axial direction of the fifth shaft 250 is parallel to the Z direction.
It should be noted that the transmission mechanism has a position where the transmission mechanism is mounted on the microscope. The Z direction is a direction in which the stage 360 of the microscope is likely to vibrate, and the Z direction is generally perpendicular to the stage 360.
Specifically, when the conventional mechanism is applied to a high-precision microscope, the axial direction of the first shaft 210, the axial direction of the second shaft 220, and the axial direction of the third shaft 230 are parallel to a target transmission direction, which is a direction in which the stage 360 of the microscope moves horizontally. Accordingly, the X direction is the target drive direction.
In this embodiment, the first body 110 is horizontally disposed, and an included angle is formed between the first body 110 and the second body 120. The included angle can be set according to actual conditions.
In this embodiment, an included angle is formed between the fourth body 140 and the third body 130, and a gap is formed between the fourth body 140 and the sixth body 160. The included angle can be set according to actual conditions.
Specifically, the fourth body 140 is angularly rotatable via a fourth shaft 240, and the sixth body 160 is angularly rotatable via a fifth shaft 250.
It should be noted that the above-mentioned transmission mechanism can be used not only in the field of high-precision microscopes, but also in various mobile platforms that require high-precision control.
As shown in fig. 3 and 4, embodiments of the present invention also provide a high precision microscope. It includes above-mentioned drive mechanism, the high accuracy microscope still includes: a drive device and a platform assembly.
The driving device comprises a first rail 350, a moving table 340 and a driving assembly, wherein the moving table 340 is mounted on the first rail 350 through a sliding block, and the driving assembly is used for driving the moving table 340 to move along the first rail 350.
The platform assembly includes a second rail 370 and a platform 360, the second rail 370 is disposed in parallel with the first rail 350, and the platform 360 is mounted on the second rail 370 by a slider.
The first body 110 is mounted on the platform 360, the sixth body 160 is mounted on the movable stage 340, and the first axis 210, the second axis 220, and the third axis 230 are respectively parallel to the second rail 370.
The driving assembly drives the moving table 340 to move along the first track 350, and the movement of the driving table causes the sixth body 160 of the transmission mechanism to move therewith. The movement of the sixth body 160 drives the first body 110 to move therewith, and further drives the platform 360 to move along the second track 370.
During the transmission, the driving components and the moving stage 340 may generate unnecessary driving forces, which are isolated by the transmission mechanism. The transmission mechanism transmits the driving force actually used to urge the platform 360 to move along the second rail 370 to the platform 360. The principle of the isolation is realized by the micro-motion of the transmission mechanism.
In this embodiment, the mobile platform 340 is provided with a first positioning block 380 and a second positioning block 390, the sixth body 160 is disposed between the first positioning block 380 and the second positioning block 390, a gap is disposed between the bottom of the sixth body 160 and the mobile platform 360, a cushion pad is disposed between the sixth body 160 and the first positioning block 380, a cushion pad is disposed between the sixth body 160 and the second positioning block 390, and the sixth body 160 is clamped and positioned by the first positioning block 380 and the second positioning block 390.
Specifically, the first positioning block 380 and the second positioning block 390 may be marble blocks. The cushion pad may be made of a material having a certain elasticity.
In this embodiment, the driving assembly includes a driving motor 310, a gear 320 and a rack 330, the gear 320 is connected to the driving motor 310, the gear 320 is engaged with the rack 330, and the rack 330 is mounted on the moving stage 340. The driving motor 310 can drive the gear 320 to rotate, and the gear 320 drives the rack 330 to move, which in turn can drive the mobile station 340 to move.
In this embodiment, the surface of the platform 360 is provided with a strip-shaped groove, and the first body 110 is located in the strip-shaped groove 361.
The technical features of the embodiments described above may be arbitrarily combined, and for the sake of brevity, all possible combinations of the technical features in the embodiments described above are not described, but should be considered as being within the scope of the present specification as long as there is no contradiction between the combinations of the technical features.
The above-mentioned embodiments only express several embodiments of the present invention, and the description thereof is more specific and detailed, but not construed as limiting the scope of the invention. It should be noted that, for a person skilled in the art, several variations and modifications can be made without departing from the inventive concept, which falls within the scope of the present invention. Therefore, the protection scope of the present patent shall be subject to the appended claims.
Claims (10)
1. A transmission mechanism, comprising:
a first body, a second body, a third body, a fourth body, a fifth body and a sixth body,
one end of the first piece body is pivoted with one end of the second piece body through a first shaft, the other end of the second piece body is pivoted with one end of the third piece body through a second shaft, the other end of the third piece body is pivoted with one end of the fourth piece body through a third shaft, the other end of the fourth piece body is pivoted with one end of the fifth piece body through a fourth shaft, the fifth piece body is arranged in the sixth piece body, and the fifth piece body is pivoted with the sixth piece body through a fifth shaft,
the axial of the first shaft, the axial of the second shaft and the axial of the third shaft are parallel to each other, the axial of the fourth shaft is perpendicular to the axial of the third shaft, the fifth shaft is perpendicular to the fourth shaft, and the fifth shaft is perpendicular to the third shaft.
2. The transmission mechanism as claimed in claim 1, wherein the second body is angled relative to the third body.
3. The transmission mechanism according to claim 1, wherein the transmission mechanism has a position such that an axial direction of the first shaft, an axial direction of the second shaft, and an axial direction of the third shaft are parallel to the X direction, an axial direction of the fourth shaft is parallel to the Y direction, and an axial direction of the fifth shaft is parallel to the Z direction.
4. The transmission mechanism as claimed in claim 1, wherein the first body is disposed horizontally, and the first body is disposed at an angle to the second body.
5. The transmission mechanism as claimed in claim 1, wherein the fourth body is disposed at an angle to the third body, and a gap is provided between the fourth body and the sixth body.
6. The transmission mechanism as claimed in claim 1, wherein the sixth body defines a receiving cavity, and the fifth body is disposed in the receiving cavity.
7. A high-precision microscope comprising the transmission mechanism of any one of claims 1 to 6, the high-precision microscope further comprising: a driving device and a platform component, wherein the driving device is arranged on the platform component,
the driving device comprises a first track, a mobile station and a driving component, the mobile station is arranged on the first track through a sliding block, the driving component is used for driving the mobile station to move along the first track,
the platform assembly comprises a second track and a platform, the second track is arranged in parallel with the first track, the platform is arranged on the second track through a sliding block,
the first body is mounted on the platform, the sixth body is mounted on the mobile station, and the first shaft, the second shaft, and the third shaft are parallel to the second rail, respectively.
8. The microscope of claim 7, wherein the movable stage is provided with a first positioning block and a second positioning block, the sixth body is disposed between the first positioning block and the second positioning block, a gap is provided between the bottom of the sixth body and the movable stage, a cushion pad is disposed between the sixth body and the first positioning block, a cushion pad is disposed between the sixth body and the second positioning block, and the sixth body is clamped and positioned by the first positioning block and the second positioning block.
9. The high precision microscope of claim 7, wherein the drive assembly comprises a drive motor, a gear and a rack, the gear is connected with the drive motor, the gear is meshed with the rack, and the rack is mounted on the moving stage.
10. A transmission mechanism is characterized by comprising a plurality of kinematic pairs, wherein the transmission mechanism transmits the driving force in the target direction through each kinematic pair and isolates other driving forces.
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| CN202011264958.3A CN112363310B (en) | 2020-11-13 | 2020-11-13 | Transmission mechanism and high-precision microscope |
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| CN202011264958.3A CN112363310B (en) | 2020-11-13 | 2020-11-13 | Transmission mechanism and high-precision microscope |
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| CN112363310A true CN112363310A (en) | 2021-02-12 |
| CN112363310B CN112363310B (en) | 2022-04-15 |
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