CN2849754Y - Stage for tool microscope - Google Patents
Stage for tool microscope Download PDFInfo
- Publication number
- CN2849754Y CN2849754Y CN 200520118994 CN200520118994U CN2849754Y CN 2849754 Y CN2849754 Y CN 2849754Y CN 200520118994 CN200520118994 CN 200520118994 CN 200520118994 U CN200520118994 U CN 200520118994U CN 2849754 Y CN2849754 Y CN 2849754Y
- Authority
- CN
- China
- Prior art keywords
- axis
- slide
- lead screw
- shitai county
- gear unit
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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Abstract
The utility model discloses a stage for a tool microscope, which comprises a frame stage and a stone stage, wherein the stone stage is arranged on the frame stage. The top part of the frame stage is provided with a work top which is used for placing measured objects; the top end of the stone stage is provided with an X-axis driving unit; a slide seat is driven to shift on a set of corresponding slide rails on the top surface of the stone stage by the X-axis driving unit; the slide seat is provided with an arch-shaped sliding stage which is provided with a macro lens; a Y-axis driving unit is matched on the arc sliding stage to drive the macro lens to detect the measured objects on the work top.
Description
Technical field
The utility model relates to a kind of microscope carrier structure of tool microscope, particularly a kind of with microscope headstock group on an arched door type slide unit, the tested object on the work top is carried out the facility of twin shaft to displacement detecting.
Background technology
At present, tradition is applied to the tool microscope in TFT or the testing of LCD curtain face, mainly by the frame group on a microscope carrier, has the work top that to put object to be measured on this microscope carrier, and microscope carrier is provided with two relative slide rails, strides on the slide rail to be provided with the slide unit that can carry out the front and back displacement, and surveys the ball lead screw at nearly edge place by the slide rail list, guiding slide unit shift reciprocately between corresponding two slide rails, in order to put tested object on work top carry out displacement the detection running.
Though the slide unit on the above-mentioned microscope carrier facility be the frame group between two slide rails, but it only is subjected to single drive of surveying the ball lead screw, easily makes slide unit produce the phenomenon of shake microseism when displacement, precision and quality during the influence detection.In addition, the microscopical microscope carrier excessive height of conventional tool also is to hinder the main cause that it reduces the facility vibrations.
The utility model content
The purpose of this utility model provides a kind of microscope carrier of tool microscope, and particularly can make microscope carrier be driven displacement stably, and can reduce the antenna height of microlens, and the shock-absorbing ability that can promote facility.
For achieving the above object, the utility model is taked technical scheme: a kind of microscope carrier of tool microscope, it is included in a Shitai County is set on the pallet, is slidingly equipped with a slide in Shitai County, and in this slide upload be provided with one the frame group slide unit of the arched door type of microlens is arranged; Its characteristics are: corresponding two X axis slide rails are arranged in described Shitai County, and described slide is slidedly arranged on two X axis slide rails; One X axis gear unit is provided with a ball lead screw and another is enough to drive the servo motor that the ball lead screw rotates; Described ball lead screw is set up in this Shitai County's end face, the middle position of position between two X axis slide rails, and link to each other with slide, carry out the slide displacement of X axis in order to the drive slide; Described slide unit has a Y-axis holder, its bilateral hang down respectively be provided with bogie side frame and the frame group on this slide; And have a work top between this bogie side frame, described work top is fixedly arranged on the framework at pallet top; By the composition of above-mentioned member, make the slide unit of arched door type can above work top, carry out X and Y-axis to displacement.
In the microscope carrier of above-mentioned tool microscope, end wall is provided with a plurality of damping balls around described Shitai County, and each damping ball adheres on described pallet end face, and Shitai County is held on the pallet by unsettled of damping ball.
In the microscope carrier of above-mentioned tool microscope, top, described Shitai County is provided with a groove in order to the ball lead screw of frame group X axis gear unit.
In the microscope carrier of above-mentioned tool microscope, described Y-axis holder be provided with a Y-axis to slide rail and another Y-axis to gear unit, this microlens is slidedly arranged on Y-axis on slide rail, and links to each other to gear unit with Y-axis, it accepts Y-axis to the transmission of gear unit and displacement.
In the microscope carrier of above-mentioned tool microscope, described Y-axis is to drive ball lead screw rotation by a servo motor to gear unit, with drive this microlens Y-axis on slide rail, produce Y-axis to slide displacement.
In the microscope carrier of above-mentioned tool microscope, described slide is provided with protruding rail, set up the rail chair of light projector to slide group one, and rail chair is to be clamped on the belt, accept the drive of Y-axis ball lead screw in gear unit, light projector can be produced on protruding rail and the synchronous displacement of microlens.
The utility model is owing to take above design, it has the following advantages: arched door type slide unit of the present utility model can the carrying microlens and carry out the X axis displacement above work top, and the microlens on this arched door type slide unit also can carry out Y-axis to displacement above work top, therefore has twin shaft and to the ability of displacement the tested object on the work top is detected.In addition, the utility model also is enough to shorten the configuration height h ' between damping ball and Shitai County, and significantly reduce overall height H between arched door type slide unit and the damping ball ', use and suppress the shaking force of microlens twin shaft when the displacement detecting object, and then promote its accuracy of detection and quality.
Description of drawings
Fig. 1 is a stereographic map of the present utility model, illustrate that a pallet is provided with framework, and be mounted with a work top, and this microlens can carry out the twin shaft displacement above work top.
Fig. 2 is a front elevation of the present utility model, and the configuration height h ' between its damping ball and Shitai County is described, and the overall height H between arched door type slide unit and the damping ball ', all significantly reductions.
Fig. 3 is a side of the present utility model cut-away view, and the configuration of X axis gear unit composition member is described.
Embodiment
The first Figure 1 and Figure 2 of seeing, disclosing a group has the tool microscope microscope carrier of microlens 7, mainly be that a Shitai County 2 that presents cuboid is set on a pallet 1, this Shitai County 2 has heavier weight with the stabilising arrangement body, and Shitai County's 2 end faces are put on the shelf and are provided with corresponding two X axis slide rails 22 (cooperating shown in Figure 3), utilize lock frame 23 to set up the damping ball 3 (cooperating shown in Figure 2) of a plurality of reciprocity positions simultaneously around Shitai County 2 on the distolateral wall, and make each damping ball 3 adhere on pallet 1 end face, Shitai County 2 is held on the pallet 1 by 3 unsettled in damping ball;
One X axis gear unit 5, include a ball lead screw 51 and accept 52 transmissions of a servo motor (as shown in Figure 3), this ball lead screw 51 can be set up in Shitai County's 2 end faces, perhaps be set up in the groove 21 that Shitai County 2 end face central authorities are offered, make 51 middle positions between two X axis slide rails 22 of ball lead screw, and link to each other with slide 42; Thereby make ball lead screw 51 can drive a slide 42 produces X axis on two X axis slide rails 22 displacement running, and group is established an arched door type slide unit 4 on slide 42; And the above-mentioned X axis slide rail 22 that is arranged at Shitai County's 2 end faces is provided with slide block 24, and each slide block 24 all is to be fixedly arranged on this slide 42;
This arched door type slide unit 4, by a Y-axis holder 41 bilaterals hang down respectively establish a bogie side frame 43 forms (as shown in Figures 2 and 3), and be mounted on this slide 42, especially as an arched door body by bogie side frame 43 1 ends; Wherein be provided with in this Y-axis holder 41 Y-axis to gear unit 6 and Y-axis to slide rail 60, this Y-axis also is slidingly equipped with a microlens 7 on slide rail 60; By the slide 24 that base 42 bottoms are installed with, make the arched door type slide unit 4 can be at X axis slide rail 22 top offsets; This base 42 is provided with a protruding rail 421, sets up the rail chair 44 of light projector 40 in order to sliding group one, and this rail chair 44 can be accepted Y-axis and produce synchronous displacement running to the power transmission of gear unit 6; And bilateral bogie side frame 43 is striden and is organized between the work top 10 that a glass is made, and this work top 10 is fixedly arranged on the top frame 11 of pallet 1, and can put the object to be measured (for example being TFT curtain face) of arranged on work top 10.
This Y-axis is to gear unit 6, and another is erected at ball lead screw 61 in the Y-axis holder 41 of arched door type slide unit 4 to include a servo motor 62 transmissions, in order to drive a microlens 7 Y-axis on slide rail 60, produces Y-axis to displacement operate; Simultaneously, this ball lead screw 61 also can drive the belt wheel 64 that a belt 63 is linked, by another belt 65 kinetic energy being passed to one again is located on the distolateral belt wheel 49 of above-mentioned base 42 root edges, and by this on belt wheel 49 axle center coaxial spiral gear 48 be engaged on another spiral gear 47, operate and carry out the power steering transmission, these spiral gear 47 concentric places are provided with a belt wheel 46, hub setting is distolateral above-mentioned base 42, and dispose a belt 45 to base 42 another distolateral belt wheels 461, make these belt 45 energy by back and forth transmission; Simultaneously, can be clamped on the above-mentioned rail chair 44 on this belt 45, mat makes the light projector 40 on the rail chair 44, is able to accept belt 45 and drives on protruding rail 421, and produce shuttle Y-axis to synchronous shift with microlens 7.
Composition by above-mentioned member, arched door type slide unit 4 of the present utility model can carrying microlens 7 and carry out the X axis displacement above work top 10, and the microlens 7 on this arched door type slide unit 4 also can carry out Y-axis to displacement above work top 10, therefore has twin shaft and to the ability of displacement the tested object on the work top 10 is detected.In addition, the utility model also is enough to shorten the configuration height h ' between damping ball 3 and Shitai County 2, and significantly reduce overall height H between arched door type slide unit 4 and the damping ball 3 ', use and suppress the shaking force of microlens twin shaft when the displacement detecting object, and then promote its accuracy of detection and quality.
The above only is a preferable possible embodiments of the present utility model, so the equivalence of being done according to the utility model claim scope changes such as, ought to be included within the protection domain of the present utility model.
Claims (6)
1, a kind of microscope carrier of tool microscope, it is included in a Shitai County is set on the pallet, is slidingly equipped with a slide in Shitai County, and in this slide upload be provided with one the frame group slide unit of the arched door type of microlens is arranged; It is characterized in that:
One corresponding two X axis slide rails are arranged in described Shitai County, and described slide is slidedly arranged on two X axis slide rails;
One X axis gear unit is provided with a ball lead screw and another is enough to drive the servo motor that the ball lead screw rotates; Described ball lead screw is set up in this Shitai County's end face, the middle position of position between two X axis slide rails, and link to each other with slide,
Described slide unit has a Y-axis holder, its bilateral hang down respectively be provided with bogie side frame and the frame group on this slide; And
Have a work top between this bogie side frame, described work top is fixedly arranged on the framework at pallet top.
2, the microscope carrier of tool microscope according to claim 1 is characterized in that: end wall is provided with a plurality of damping balls around described Shitai County, and each damping ball adheres on described pallet end face, and Shitai County is held on the pallet by unsettled of damping ball.
3, the microscope carrier of tool microscope according to claim 1 is characterized in that: top, described Shitai County is provided with a groove in order to the ball lead screw of frame group X axis gear unit.
4, the microscope carrier of tool microscope according to claim 1 is characterized in that: described Y-axis holder be provided with a Y-axis to slide rail and another Y-axis to gear unit, this microlens is slidedly arranged on Y-axis on slide rail, and links to each other to gear unit with Y-axis.
5, the microscope carrier of tool microscope according to claim 4 is characterized in that: described Y-axis is formed by a servo motor and by the ball lead screw that this servo motor drives to gear unit.
6, the microscope carrier of tool microscope according to claim 1 is characterized in that: described slide is provided with protruding rail, and the sliding group one of this protruding rail is set up the rail chair of light projector, and rail chair is clamped on one by on the Y-axis belt that the ball lead screw drives in gear unit.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200520118994 CN2849754Y (en) | 2005-09-15 | 2005-09-15 | Stage for tool microscope |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200520118994 CN2849754Y (en) | 2005-09-15 | 2005-09-15 | Stage for tool microscope |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN2849754Y true CN2849754Y (en) | 2006-12-20 |
Family
ID=37522238
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 200520118994 Expired - Fee Related CN2849754Y (en) | 2005-09-15 | 2005-09-15 | Stage for tool microscope |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN2849754Y (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112363310A (en) * | 2020-11-13 | 2021-02-12 | 殷跃锋 | Transmission mechanism and high-precision microscope |
-
2005
- 2005-09-15 CN CN 200520118994 patent/CN2849754Y/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112363310A (en) * | 2020-11-13 | 2021-02-12 | 殷跃锋 | Transmission mechanism and high-precision microscope |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C19 | Lapse of patent right due to non-payment of the annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |