CN103137532A - Coplanar three-axis positioning device - Google Patents
Coplanar three-axis positioning device Download PDFInfo
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- CN103137532A CN103137532A CN2011104512132A CN201110451213A CN103137532A CN 103137532 A CN103137532 A CN 103137532A CN 2011104512132 A CN2011104512132 A CN 2011104512132A CN 201110451213 A CN201110451213 A CN 201110451213A CN 103137532 A CN103137532 A CN 103137532A
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- 230000000740 bleeding effect Effects 0.000 claims description 14
- 230000007246 mechanism Effects 0.000 claims description 13
- 238000005259 measurement Methods 0.000 claims description 10
- 230000003287 optical effect Effects 0.000 claims description 3
- 238000006073 displacement reaction Methods 0.000 description 11
- 238000000034 method Methods 0.000 description 8
- 238000010586 diagram Methods 0.000 description 7
- 238000005516 engineering process Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- 238000012545 processing Methods 0.000 description 3
- 240000007594 Oryza sativa Species 0.000 description 1
- 235000007164 Oryza sativa Nutrition 0.000 description 1
- 230000001133 acceleration Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000005538 encapsulation Methods 0.000 description 1
- 238000007667 floating Methods 0.000 description 1
- 239000010687 lubricating oil Substances 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 230000005622 photoelectricity Effects 0.000 description 1
- 238000012827 research and development Methods 0.000 description 1
- 235000009566 rice Nutrition 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000004575 stone Substances 0.000 description 1
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Abstract
The invention relates to a coplanar three-axis positioning device, which comprises a fixed platform, a first driving module, two second driving modules and a positioning module, wherein the positioning module comprises a positioning platform, a first driving shaft and two second driving shafts. The first driving module and the two second driving modules drive the first driving shaft and the two second driving shafts to drive the positioning platform bearing a workpiece to move in a first direction, a second direction or a third direction on the same plane so as to position the position of the workpiece. The coplanar triaxial positioning device has the advantages of simple structure, small volume and easy modularization, and the positioning precision of the coplanar triaxial positioning device reaches the submicron level.
Description
Technical field
The present invention relates to a kind of positioner, referred to especially a kind ofly can make in same plane the sub-micron grade positioner of first direction (X-axis), second direction (Y-axis) or third direction (θ axle) motion.
Background technology
How the research and development of rice science and technology is quite remarkable in recent years, and the technical fields such as many high-tech industries such as semiconductor, information, electronics, communication, photoelectricity, its processing and manufacturing technology are towards the future development of ultraminiaturization and precise treatment.Therefore, for micron or even how the precision positioning device demand of meter level also significantly increase, and the precision of the aligning of precision positioning device location could reach standard, is also that the success or failure of related industry processing procedure quality are crucial.
For this reason, aforementioned high-tech industry for precision and the yield that makes its product meets standard, can utilize a precisely locating platform to carry out precision positioning to the workpiece of wanting to process in the procedure for producing that carries out accurate encapsulation technology usually.And at present precisely locating platform is mainly to have X, Y direction straight line location, and θ direction of principal axis rotation positioning function, so as to reaching, workpiece is carried out the effect that the high-accuracy adjustment of Three Degree Of Freedom is located, and be widely used in the precision positioning purposes of high-tech industry procedure for producing.
No. the 201102273rd, above-mentioned precisely locating platform such as TaiWan, China " alignment tool ", this alignment tool are to possess to have: base; Be configured in the top platform that is used for keeping having the workpiece that moving load is applied to it of the top position of aforementioned base; By the guiding element that can slide in two directions of quadrature and be located at the requisite number purpose supporter with X, Y, θ three degree of freedom that the swivel bearing on aforementioned guiding element consists of; And at least three driver elements that consist of at this supporter outfit one axial straight-line motion mechanism; Wherein, aforementioned supporter and aforementioned driver element are that the configuration with the shape that staggers along reporting to the leadship after accomplishing a task of the moving direction of aforementioned moving load is provided between aforementioned base and aforementioned top platform, and the driving direction quadrature in X-Y plane that makes driving direction that the straight-line motion mechanism of two driver elements among aforementioned each driver element drives, drives with the straight-line motion mechanism of remaining driver element.Allow workpiece in X, Y, θ three direction of principal axis displacements and carry out precision positioning though this patent can reach, the complex structure of this patent, the slide rail combination that it need to use multilayer causes processing cost to promote, and it is large that overall volume becomes, and easily produce accumulated error.Moreover the structure of this patent there is no real rotating shaft, must produce interference by the asymmetric movement of three axles, then is caused in rotary movingly by interference, causes whole mechanical resistance larger.
Separately in " stage apparatus and the exposure device " of No. the I247201st, TaiWan, China, this stage apparatus be one have can be on a fixed disk surface under discontiguous situation the stage apparatus of a mobile movable part, it is characterized by this fixed disk and comprise a body part that is consisted of by stone material and the surface element that pottery is arranged due to surperficial meltallizing, this movable part has one first movable part and one second movable part, and in this first movable part and this second movable part relative with this surface element to part be to be formed with separately a ceramic part.The shortcoming of this patent is that this stage apparatus does not have spinfunction, if need spinfunction one rotating shaft must be installed again on this stage apparatus.Then the X-axis displacement platform of this patent is arranged on the Y-axis displacement platform, when the weight of carrying workpiece is heavier, and the impact that can produce inertia inertia under the state of locating at a high speed.
In order to solve the above problems, the invention provides a kind of copline three axle positioners, it can do X, Y, the axial motion of θ three on same plane, and its positioning accuracy reaches sub-micron grade.And the simple in structure and easy modularization of copline three axle positioners, the driver module of each direction of motion is storehouse mutually not, makes whole volume slimming, and has larger displacement range.
Summary of the invention
Purpose of the present invention, be to provide a kind of copline three axle positioners, it can do in same plane the motion of a first direction (X-axis), a second direction (Y-axis) or a third direction (θ axle), to locate the position of a workpiece, the positioning accuracy of these copline three axle positioners can reach sub-micron grade.
Purpose of the present invention is to provide a kind of copline three axle positioners, its simple in structure and easy modularization, and the driver module of each direction of motion is storehouse mutually not, makes whole volume slimming, and has larger displacement range.
Technical scheme of the present invention: a kind of copline three axle positioners, it is to comprise:
One fixed platform, have a first side and two second sides, this two second side is corresponding, and and quadrature adjacent with the two ends of this first side respectively, this fixed platform is provided with one first driver module and 2 second driver modules, this first drive module setting is in this first side, and this two driver module is arranged at respectively this two second side; And
One location module is to comprise:
One locating platform is positioned on this fixed platform, and has one first side and 2 second sides, and this first side is to this first side that should fixed platform, and this 2 second side is to this two second side that should fixed platform;
One first driving shaft, one end are arranged at this first side of this locating platform, and its other end is slidedly arranged on this first driver module; And
2 second driving shafts, one end are arranged at respectively this 2 second side of this locating platform, and its other end is slidedly arranged on respectively this second driver module, and this 2 second driving shaft is mutually vertical with this first driving shaft;
Wherein this locating platform is carrying one workpiece, this first driver module and this 2 second driver module drive this first driving shaft and this 2 second driving shaft, drive this locating platform and do the motion of a first direction, a second direction or a third direction on same plane, to locate this workpiece.
In the present invention, wherein this first driver module is to comprise:
One slide rail is arranged at this first side of this fixed platform;
One sliding part is slidedly arranged on this slide rail;
One bearing is arranged at this sliding part, and establishes for this first driving shaft cunning; And
One drive unit drives this sliding part and slides on this slide rail, and drives this first driving shaft, and this first driving shaft slides on this bearing and/or drives this bearing rotary in this sliding part.
In the present invention, wherein this second driver module is to comprise:
One slide rail is arranged at this second side of this fixed platform;
One sliding part is slidedly arranged on this slide rail;
One bearing is arranged at this sliding part, and establishes for this second driving shaft cunning; And
One drive unit drives this sliding part and slides on this slide rail, and drives this second driving shaft, and this second driving shaft slides on this bearing and/or drives this bearing rotary in this sliding part.
In the present invention, wherein this drive unit is a motor or a piezoelectric.
In the present invention, more comprise:
One measurement mechanism is arranged at a side of this slide rail, and to measure the position of this sliding part, wherein this measurement mechanism is an optical ruler.
In the present invention, more comprise:
One rotating shaft is arranged between this sliding part and this bearing; And
One swivel bearing arranges this rotating shaft, and between this sliding part and this bearing.
In the present invention, wherein this locating platform more is provided with:
The plural number channeling, be arranged at that this locating platform contacts with this workpiece surperficial and to downward-extension, and do not pass the surface that this locating platform contacts with this fixed platform; And
At least one bleeding point is arranged at a side of this locating platform, and is communicated with those channelings, and the gas in those channelings is to discharge from this bleeding point, and this workpiece is adsorbed on this locating platform.
In the present invention, wherein this locating platform more is provided with:
The plural number channeling, be arranged at that this locating platform contacts with this fixed platform surperficial also extends upward, and do not pass the surface that this locating platform contacts with this workpiece; And
At least one air inlet is arranged at a side of this locating platform, and is communicated with those channelings, and this air inlet provides a gas to those channelings, and this locating platform is floated on above this fixed platform.
In the present invention, wherein this locating platform more is provided with:
Plural number the first channeling, be arranged at that this locating platform contacts with this workpiece surperficial and to downward-extension, and do not pass the surface that this locating platform contacts with this fixed platform;
At least one bleeding point is arranged at a side of this locating platform, and is communicated with those first channelings, and one first gas in those first channelings is to discharge from this bleeding point, and this workpiece is adsorbed on this locating platform;
Plural number the second channeling, be arranged at that this locating platform contacts with this fixed platform surperficial also extends upward, and do not pass the surface that this locating platform contacts with this workpiece; And
At least one air inlet is arranged at a side of this locating platform, and is communicated with those second channelings, and this air inlet provides one second gas to those the second channelings, and this locating platform is floated on above this fixed platform.
In the present invention, more comprise:
One reinforced structure comprises two connecting rods, and this two connecting rod is connected between this first driving shaft and this 2 second driving shaft.
In the present invention, wherein this reinforced structure more comprises:
Three contiguous blocks are arranged at respectively this first driving shaft and this 2 second drivings the tip of the axis, and this connecting rod connects this adjacent two contiguous block.
The beneficial effect that the present invention has: the invention provides a kind of copline three axle positioners, copline three axle positioners utilize the first driving shaft and 2 second driving shafts to drive locating platform and move, locating platform can be done in same plane the motion of first direction, second direction or third direction, and the positioning accuracy of copline three axle positioners can reach sub-micron grade.Then copline three axle positioners of the present invention simple in structure and easily assembling and modularization, the driver module of each direction of motion be storehouse mutually not, makes the volume slimming of integral body, and has larger displacement range.
Description of drawings
Fig. 1 is the stereogram of the first embodiment of the present invention;
Fig. 2 is that first of the first embodiment of the present invention is used state diagram;
Fig. 3 is that second of the first embodiment of the present invention is used state diagram;
Fig. 4 is that the 3rd of the first embodiment of the present invention is used state diagram;
Fig. 5 is sliding part and the bearing constitutional diagram of the first embodiment of the present invention;
Fig. 6 is the schematic diagram of the locating platform of the second embodiment of the present invention;
Fig. 7 is the schematic diagram of the locating platform of the third embodiment of the present invention; And
Fig. 8 is the stereogram of the fourth embodiment of the present invention.
[figure number is to as directed]
1 copline three axle positioner 10 fixed platforms
101 102 second sides, first sides
12 first driver module 121 slide rails
122 sliding part 123 bearings
125 measurement mechanism 126 rotating shafts
127 swivel bearing 14 second driver modules
141 slide rail 142 sliding parts
143 bearing 145 measurement mechanisms
16 locating module 161 locating platforms
1,611 first 1,612 second sides, sides
1613 first surface 16,131 first channelings
16132 bleeding point 1614 second surfaces
16,141 second channeling 16142 air inlets
162 first driving shaft 163 second driving shafts
18 reinforced structure 181 contiguous blocks
182 connecting rods
Embodiment
Further understand and understanding for making architectural feature of the present invention and the effect reached are had, coordinate detailed explanation in order to preferred embodiment and accompanying drawing, be described as follows:
See also Fig. 1, it is the stereogram of first embodiment of the invention; As shown in the figure, the present embodiment is to provide a kind of copline three axle positioners 1, it mainly can be in the motion of making a first direction (moving along X-axis), a second direction (moving along y-axis shift) or a third direction (rotating) on same plane centered by Z axis, and then the precision of copline three axle positioners 1 reaches sub-micron grade.Copline three axle positioners 1 are to comprise a fixed platform 10, one first driver module 12,2 second driver modules 14 and a location module 16.Fixed platform 10 is to have a first side 101 and two second sides 102, and first side 101 is positioned at a side of fixed platform 10, and two second sides 102 lay respectively at the both sides of fixed platform 10 and mutually corresponding.Two second sides 102 are adjacent with the two ends of first side 101 respectively, and are positioned at the homonymy of first side 101, and respectively with first side 101 quadratures.
The first driver module 12 is arranged at first side 101, two second driver modules 14 and is arranged at respectively corresponding second side 102.Then locating module 16 is connected with the first driver module 12 and 2 second driver modules 14, and is positioned at the top of fixed platform 10.Locating module 16 is to comprise a locating platform 161, one first driving shaft 162 and 2 second driving shafts 163, locating platform 161 comprises one first side 1611 and 2 second sides 1612, two second sides 102 of first side 101, the two second corresponding fixed platforms 10 in side 1612 of the first corresponding fixed platform 10 in side 1611.One end of the first driving shaft 162 is arranged at the first side 1611 of locating platform 161, and its other end is slidedly arranged on the first driver module 12.One end of the second driving shaft 163 is arranged at the second side 1612 of locating platform 161, and its other end is slidedly arranged on the second driver module 14.Wherein the first driving shaft 162 is mutually vertical with 2 second driving shafts 163.
The copline three axle positioners 1 of the present embodiment can be used for locating the position of a workpiece, first workpiece is placed on locating platform 161, the first drive unit 12 and 2 second drive units 14 drive the first driving shaft 162 and 2 second driving shafts 163, the first driving shaft 162 and 2 second driving shafts 163 drive the motion that locating platform 161 is made first direction, second direction or third direction, workpiece sees through locating platform 161 and moves, and then the position of positioning workpieces.See also Fig. 2, when only having the first driver module 12 to drive the first driving shaft 162, the first driving shaft 162 drives the motion that locating platform 161 is made first direction (along X-direction).Separately consult Fig. 3, when only having 2 second driver modules 14 to drive 2 the second driving shafts 163, the displacement that 2 second driver modules 14 drive 2 second driving shafts 163 is identical, and 2 second driving shafts 163 drive the motion that locating platform 161 is made second direction (along Y direction); Consult again Fig. 4, when the first driver module 12 and 2 second driver modules 14 drive the first driving shaft 162 and 2 second driving shafts 163 simultaneously, and the displacement of 2 second driver modules 14 driving 2 second driving shafts 163 is not simultaneously, and the first driving shaft 162 and 2 second driving shafts 163 drive the motion that locating platforms 161 are done third direction (rotating along Z-direction).
From the above, the copline three axle positioners 1 of the present embodiment can be done the motion of first direction, second direction or third direction on same plane.And the copline three axle positioners 1 of the present embodiment simple in structure and easily assembling and modularization, the driver module of each direction of motion is storehouse mutually not, makes the volume slimming of integral body, and has larger displacement range.In addition, the copline three axle positioners 1 of the present embodiment carry out third direction (along Z-direction) when rotating, and its pivot is not limited to the central point of its locating platform, thereby increase the convenience of workpiece location.
Hold above-mentioned, consult again Fig. 1, the first driver module 12 and 2 second driver modules 14 drive the first driving shaft 162 and 2 second driving shaft 163, the first driving shafts 162 and 2 second driving shafts 163 and drive the motion that locating platform 161 is made first direction, second direction or third direction.The first driver module 12 and the second driver module 14 are to comprise respectively a slide rail 121,141, one sliding part 122,142, one bearing 123,143 and one drive unit (not illustrating).The structure of the first driver module 12 is identical with the structure of the second driver module 14, only explains with the first driver module 12 in this.The slide rail 121 of the first driver module 12 is arranged at the first side 101 of fixed platform 10, sliding part 122 is slidedly arranged on slide rail 121, bearing 123 is articulated in sliding part 122, bearing 123 rotates on sliding part 122, the first driving shaft 162 is slidedly arranged on bearing 123, the first driving shafts 162 and slides in bearing 123.Drive unit connects sliding part 122, and drives sliding part 122 and slides on slide rail 121, and also driving bearing 123 moves along slide rail 121 simultaneously, and then drives the first driving shaft 162, the first driving shafts 162 drive locating platforms 161 that are slidedly arranged on bearing 123.Slidably in bearing 123, or band dynamic bearing 123 rotates on sliding part 122 the first driving shaft 162 in moving process.
Consult again Fig. 2, when sliding part 122 driven devices that only have the first driver module 12 drive and move to the left, sliding part 122 drives the first driving shaft 162 that is slidedly arranged on bearing 123 and moves to the left, the first driving shaft 162 drives locating platform 161 and also moves to the left, 2 second driving shafts 163 that the are positioned at locating platform 161 both sides platform 161 that is positioned drives and moves to the left, and 2 second driving shafts 163 slide in corresponding bearing 143.Consult again Fig. 3, when sliding part 142 driven devices that only have each the second driver module 14 drive and move up, two sliding parts 142 drive 2 second driving shafts 163 that are articulated in two bearings 143 and move up, the amount of movement of two sliding parts 142 of the present embodiment is identical, so 2 second driving shafts 163 are level in moving process.2 second driving shafts 163 drive locating platforms 161 and also move up, and the first driving shaft 162 that the is positioned at locating platform 161 1 sides platform 161 that is positioned drives and moves up, and namely the first driving shaft 162 slides in the bearing 123 of correspondence.
Consult again Fig. 4, this figure discloses and drives the motion that locating platform 161 is done third direction (rotating along Z-direction), sliding part 122 driven devices of the first driver module 12 drive and are moved to the left, sliding part 122 drives the first driving shaft 162 that is slidedly arranged on bearing 123 and is moved to the left, and the first driving shaft 162 drives locating platform 161 and is moved to the left.Side by side, sliding part 142 driven devices of 2 second driver modules 14 drive and move down, the amount of movement of two sliding parts 142 of the present embodiment is different, be positioned at the amount of movement of sliding part 142 in locating platform 161 left sides less than the amount of movement of the sliding part 142 that is positioned at locating platform 161 right sides, two sliding parts 142 drive respectively the second corresponding driving shaft 163,2 second driving shafts 163 must be a straight line in moving process, so 2 second driving shafts 163 drive respectively corresponding bearing 143 and rotate, and then locating platform 161 is turned clockwise.Then the first driving shaft 162 must be mutually vertical with 2 second driving shafts 163, when locating platform 161 is driven and does third direction motion (namely rotating along Z-direction) by 2 second driving shafts 163, the first driving shaft 162 drives corresponding bearing 123 and rotates, and is mutually vertical with 2 second driving shafts 163 to keep.
The drive unit of the present embodiment uses linear motor, thus utilize the characteristic of linear motor, for example: the characteristic of high accuracy, high acceleration, high servo response, so that the positioning accuracy of copline three axle positioners 1 reaches sub-micron grade.Certainly drive unit can use motor or the piezoelectric of other kinds, and its Main Basis user's demand is replaced, and repeats no more in this.The first driver module 12 and 2 second driver modules 14 comprise more respectively a measurement mechanism 125,145, measurement mechanism 125,145 is positioned at a side of slide rail, to measure sliding part 122,142 position, the measurement mechanism 125 of the present embodiment, 145 is an optical ruler, also can use other measurement mechanisms, repeat no more in this.
The bearing 123, the 143rd of the present embodiment uses linear gas thrust bearing, but make the first driving shaft 162 and 2 second driving shaft 163 linear slide in the bearing 123,143 of correspondence, and use gas thrust bearing can make the first driving shaft 162 and the high-speed high precision movement that reaches of 2 second driving shafts 163, effectively promote the positioning accuracy of copline three axle positioners 1, then the more general bearing of the loss of gas thrust bearing is little, so reduce the maintenance cost of copline three axle positioners 1.See also Fig. 5, the present embodiment is take the first driver module 12 as example, and a rotating shaft 126 more is set between sliding part 122 and bearing 123, and rotating shaft 126 1 ends are fixed in sliding part 122, its other end is articulated in bearing 123, and bearing 123 can be rotated on sliding part 122.For bearing 123 can be rotated on sliding part 122 swimmingly, a swivel bearing 127 can more be set on rotating shaft 126, swivel bearing 127 is between sliding part 122 and bearing 123, so that bearing 123 can rotate swimmingly in sliding part 122.Certain the second driver module 14 also can comprise rotating shaft and swivel bearing, repeats no more in this.
Seeing also Fig. 6, is the schematic diagram of the locating platform of the second embodiment of the present invention.As shown in the figure, the locating platform 161 of the present embodiment has a first surface 1613 and a second surface 1614, and first surface 1613 is corresponding with second surface 1614, and first surface 1613 is carrying workpiece.The first surface 1613 of locating platform 161 is to be provided with plural the first channeling 16131, and those first channelings 16131 are 1614 extensions from first surface 1613 to second surface, but do not pass second surface 1614.Then the side in locating platform 161 is provided with a bleeding point 16132, and bleeding point 16132 is communicated with those first channelings 16131.Bleeding point 16132 can connect an air extractor (not illustrating), one first gas of 1613 of workpiece and first surfaces is extracted out from bleeding point 16132, make workpiece be adsorbed on the first surface 1613 of locating platform 161 fully, so effectively fixation workpiece is on locating platform 161.
See also Fig. 1, Fig. 7, hold above-mentionedly, the present embodiment more arranges plural the second channeling 16141 on the second surface 1614 of locating platform 161, and those second channelings 16141 are 1613 to extend from second surface 1614 to first surface, but do not pass first surface 1613.One side of locating platform 161 more is provided with an air inlet 16142, and air inlet 16142 is to be communicated with those second channelings 16141.Air inlet 16142 connects an inlet duct, to provide one second gas to enter to those the second channelings 16141 from air inlet 16142, the second gas exerts that discharges from those second channelings 16141 produces reaction force in fixed platform 10, make locating platform 161 form an air floating platform, and float on fixed platform 10, to reduce the frictional force of 10 of locating platform 161 and fixed platforms, and the translational speed of increase locating platform 161, and then the service speed of lifting copline three axle positioners.The locating platform 161 of the present embodiment can omit the setting of those first channelings and bleeding point, repeats no more in this.In addition, the present embodiment only provides a kind of mode that reduces the frictional force between locating platform and fixed platform, other modes are also arranged, for instance, channeling and air inlet can be arranged at fixed platform, or can also can reach above-mentioned effect in fixed platform and 161 coating lubricating oil of locating platform, repeat no more in this.
Seeing also Fig. 8, is the stereogram of the fourth embodiment of the present invention.as shown in the figure, the present embodiment is different from above-described embodiment to be, the copline three axle positioners 1 of the present embodiment more comprise a reinforced structure 18, reinforced structure 18 is to comprise three contiguous blocks 181 and two connecting rods 182, the end of the first driving shaft 162 and 2 second driving shafts 163 is respectively equipped with contiguous block 181, one connecting rod 182 connects the contiguous block 181 and the contiguous block 181 that is positioned at the first driving shaft 162 ends that is positioned at locating platform 161 left sides, another connecting rod 182 connects the contiguous block 181 and the contiguous block 181 that is positioned at the first driving shaft 162 ends that is positioned at locating platform 161 right sides.And reinforced structure 18 mainly can disperse the stress of the first driving shaft 162 or the second driving shaft 163 and locating platform 161 junctions, and the displacement swimmingly of drive locating platform 161, for instance, the first driver module 12 drives the first driving shaft 162, the first driving shaft 162 is in order to move locating platform 161, so the first driving shaft 162 increases with the stress of locating platform 161 junctions, reinforced structure 18 disperses the stress of the first driving shafts and locating platform 161 junctions, and drive 2 second driving shafts 163 and move, and then drive locating platform 161 and move.
In sum, the invention provides a kind of copline three axle positioners, copline three axle positioners utilize the first driving shaft and 2 second driving shafts to drive locating platform and move, locating platform can be done in same plane the motion of first direction, second direction or third direction, and the positioning accuracy of copline three axle positioners can reach sub-micron grade.Then copline three axle positioners of the present invention simple in structure and easily assembling and modularization, the driver module of each direction of motion be storehouse mutually not, makes the volume slimming of integral body, and has larger displacement range.
In sum, it is only preferred embodiment of the present invention, be not to limit scope of the invention process, all equalizations of doing according to the described shape of claim scope of the present invention, structure, feature and spirit change and modify, and all should be included in claim scope of the present invention.
Claims (11)
1. copline three axle positioners, is characterized in that, it is to comprise:
One fixed platform, have a first side and two second sides, this two second side is corresponding, and and quadrature adjacent with the two ends of this first side respectively, this fixed platform is provided with one first driver module and 2 second driver modules, this first drive module setting is in this first side, and this two driver module is arranged at respectively this two second side; And
One location module is to comprise:
One locating platform is positioned on this fixed platform, and has one first side and 2 second sides, and this first side is to this first side that should fixed platform, and this 2 second side is to this two second side that should fixed platform;
One first driving shaft, one end are arranged at this first side of this locating platform, and its other end is slidedly arranged on this first driver module; And
2 second driving shafts, one end are arranged at respectively this 2 second side of this locating platform, and its other end is slidedly arranged on respectively this second driver module, and this 2 second driving shaft is mutually vertical with this first driving shaft;
Wherein this locating platform is carrying one workpiece, this first driver module and this 2 second driver module drive this first driving shaft and this 2 second driving shaft, drive this locating platform and do the motion of a first direction, a second direction or a third direction on same plane, to locate this workpiece.
2. copline three axle positioners as claimed in claim 1, is characterized in that, wherein this first driver module is to comprise:
One slide rail is arranged at this first side of this fixed platform;
One sliding part is slidedly arranged on this slide rail;
One bearing is arranged at this sliding part, and establishes for this first driving shaft cunning; And
One drive unit drives this sliding part and slides on this slide rail, and drives this first driving shaft, and this first driving shaft slides on this bearing and/or drives this bearing rotary in this sliding part.
3. copline three axle positioners as claimed in claim 1, is characterized in that, wherein this second driver module is to comprise:
One slide rail is arranged at this second side of this fixed platform;
One sliding part is slidedly arranged on this slide rail;
One bearing is arranged at this sliding part, and establishes for this second driving shaft cunning; And
One drive unit drives this sliding part and slides on this slide rail, and drives this second driving shaft, and this second driving shaft slides on this bearing and/or drives this bearing rotary in this sliding part.
4. copline three axle positioners as claimed in claim 2 or claim 3, is characterized in that, wherein this drive unit is a motor or a piezoelectric.
5. copline three axle positioners as claimed in claim 2 or claim 3, is characterized in that, more comprises:
One measurement mechanism is arranged at a side of this slide rail, and to measure the position of this sliding part, wherein this measurement mechanism is an optical ruler.
6. copline three axle positioners as claimed in claim 2 or claim 3, is characterized in that, more comprises:
One rotating shaft is arranged between this sliding part and this bearing; And
One swivel bearing arranges this rotating shaft, and between this sliding part and this bearing.
7. copline three axle positioners as claimed in claim 1, is characterized in that, wherein this locating platform more is provided with:
The plural number channeling, be arranged at that this locating platform contacts with this workpiece surperficial and to downward-extension, and do not pass the surface that this locating platform contacts with this fixed platform; And
At least one bleeding point is arranged at a side of this locating platform, and is communicated with those channelings, and the gas in those channelings is to discharge from this bleeding point, and this workpiece is adsorbed on this locating platform.
8. copline three axle positioners as claimed in claim 1, is characterized in that, wherein this locating platform more is provided with:
The plural number channeling, be arranged at that this locating platform contacts with this fixed platform surperficial also extends upward, and do not pass the surface that this locating platform contacts with this workpiece; And
At least one air inlet is arranged at a side of this locating platform, and is communicated with those channelings, and this air inlet provides a gas to those channelings, and this locating platform is floated on above this fixed platform.
9. copline three axle positioners as claimed in claim 1, is characterized in that, wherein this locating platform more is provided with:
Plural number the first channeling, be arranged at that this locating platform contacts with this workpiece surperficial and to downward-extension, and do not pass the surface that this locating platform contacts with this fixed platform;
At least one bleeding point is arranged at a side of this locating platform, and is communicated with those first channelings, and one first gas in those first channelings is to discharge from this bleeding point, and this workpiece is adsorbed on this locating platform;
Plural number the second channeling, be arranged at that this locating platform contacts with this fixed platform surperficial also extends upward, and do not pass the surface that this locating platform contacts with this workpiece; And
At least one air inlet is arranged at a side of this locating platform, and is communicated with those second channelings, and this air inlet provides one second gas to those the second channelings, and this locating platform is floated on above this fixed platform.
10. as claim 1,2 or 3 described copline three axle positioners, it is characterized in that, more comprise:
One reinforced structure comprises two connecting rods, and this two connecting rod is connected between this first driving shaft and this 2 second driving shaft.
11. copline three axle positioners as claimed in claim 10 is characterized in that, wherein this reinforced structure more comprises:
Three contiguous blocks are arranged at respectively this first driving shaft and this 2 second drivings the tip of the axis, and this connecting rod connects this adjacent two contiguous block.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| TW100142664 | 2011-11-22 | ||
| TW100142664A TW201321120A (en) | 2011-11-22 | 2011-11-22 | Coplanar tri-axial positioning device |
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| Publication Number | Publication Date |
|---|---|
| CN103137532A true CN103137532A (en) | 2013-06-05 |
| CN103137532B CN103137532B (en) | 2015-10-21 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201110451213.2A Active CN103137532B (en) | 2011-11-22 | 2011-12-23 | Coplanar three-axis positioning device |
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| Country | Link |
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| CN (1) | CN103137532B (en) |
| TW (1) | TW201321120A (en) |
Cited By (1)
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| CN113691098A (en) * | 2021-08-09 | 2021-11-23 | 中南大学 | Coplanar motion device driven by single-side linear motor for packaging optoelectronic device |
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| TW201509587A (en) * | 2013-09-05 | 2015-03-16 | yuan-long Lai | Multi-axis machining |
| TWI487593B (en) * | 2013-12-30 | 2015-06-11 | 中原大學 | Three axis on one surface designed oblique-driven platform |
| TWI725500B (en) * | 2019-07-31 | 2021-04-21 | 和碩聯合科技股份有限公司 | Torque testing equipment and positioning seat provided therein |
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Also Published As
| Publication number | Publication date |
|---|---|
| CN103137532B (en) | 2015-10-21 |
| TWI455789B (en) | 2014-10-11 |
| TW201321120A (en) | 2013-06-01 |
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