CN112324733A - Electro-hydraulic servo valve based on Ethercat bus - Google Patents
Electro-hydraulic servo valve based on Ethercat bus Download PDFInfo
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- CN112324733A CN112324733A CN202011189774.5A CN202011189774A CN112324733A CN 112324733 A CN112324733 A CN 112324733A CN 202011189774 A CN202011189774 A CN 202011189774A CN 112324733 A CN112324733 A CN 112324733A
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- 230000007175 bidirectional communication Effects 0.000 claims abstract description 9
- 238000012544 monitoring process Methods 0.000 claims description 10
- 238000006073 displacement reaction Methods 0.000 claims description 7
- 238000012545 processing Methods 0.000 claims description 5
- 230000006854 communication Effects 0.000 claims description 4
- 238000004891 communication Methods 0.000 claims description 4
- 238000003745 diagnosis Methods 0.000 abstract description 2
- 238000012423 maintenance Methods 0.000 abstract description 2
- 230000010354 integration Effects 0.000 abstract 1
- 238000006243 chemical reaction Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000006855 networking Effects 0.000 description 2
- 230000004044 response Effects 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 238000005272 metallurgy Methods 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
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Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
- F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
- F15B13/00—Details of servomotor systems ; Valves for servomotor systems
- F15B13/02—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
- F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
- F15B13/00—Details of servomotor systems ; Valves for servomotor systems
- F15B13/02—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors
- F15B13/06—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors for use with two or more servomotors
- F15B13/08—Assemblies of units, each for the control of a single servomotor only
- F15B13/0803—Modular units
- F15B13/0846—Electrical details
- F15B13/085—Electrical controllers
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
- F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
- F15B13/00—Details of servomotor systems ; Valves for servomotor systems
- F15B13/02—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors
- F15B13/06—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors for use with two or more servomotors
- F15B13/08—Assemblies of units, each for the control of a single servomotor only
- F15B13/0803—Modular units
- F15B13/0846—Electrical details
- F15B13/0853—Electric circuit boards
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
- F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
- F15B13/00—Details of servomotor systems ; Valves for servomotor systems
- F15B13/02—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors
- F15B13/06—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors for use with two or more servomotors
- F15B13/08—Assemblies of units, each for the control of a single servomotor only
- F15B13/0803—Modular units
- F15B13/0846—Electrical details
- F15B13/0857—Electrical connecting means, e.g. plugs, sockets
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
- F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
- F15B13/00—Details of servomotor systems ; Valves for servomotor systems
- F15B13/02—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors
- F15B13/06—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors for use with two or more servomotors
- F15B13/08—Assemblies of units, each for the control of a single servomotor only
- F15B13/0803—Modular units
- F15B13/0846—Electrical details
- F15B13/086—Sensing means, e.g. pressure sensors
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
- F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
- F15B13/00—Details of servomotor systems ; Valves for servomotor systems
- F15B13/02—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors
- F15B13/06—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors for use with two or more servomotors
- F15B13/08—Assemblies of units, each for the control of a single servomotor only
- F15B13/0803—Modular units
- F15B13/0846—Electrical details
- F15B13/0867—Data bus systems
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
- F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
- F15B21/00—Common features of fluid actuator systems; Fluid-pressure actuator systems or details thereof, not covered by any other group of this subclass
- F15B21/08—Servomotor systems incorporating electrically operated control means
- F15B21/085—Servomotor systems incorporating electrically operated control means using a data bus, e.g. "CANBUS"
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K37/00—Special means in or on valves or other cut-off apparatus for indicating or recording operation thereof, or for enabling an alarm to be given
- F16K37/0075—For recording or indicating the functioning of a valve in combination with test equipment
- F16K37/0083—For recording or indicating the functioning of a valve in combination with test equipment by measuring valve parameters
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K37/00—Special means in or on valves or other cut-off apparatus for indicating or recording operation thereof, or for enabling an alarm to be given
- F16K37/0075—For recording or indicating the functioning of a valve in combination with test equipment
- F16K37/0091—For recording or indicating the functioning of a valve in combination with test equipment by measuring fluid parameters
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- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Physics & Mathematics (AREA)
- Fluid Mechanics (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Indication Of The Valve Opening Or Closing Status (AREA)
Abstract
The invention discloses an electro-hydraulic servo valve based on an Ethercat bus, which comprises a shell, a circuit board arranged in the shell, a preposed nozzle baffle valve, a power stage slide valve and a torque motor, wherein the circuit board is arranged in the shell; the circuit board is integrated with a field Ethercat slave station controller, an MCU, a servo valve driving unit, an inlet RJ45 interface and an outlet RJ45 interface which support POE functions; the servo valve driving unit drives the front-stage nozzle baffle valve and the power-stage slide valve to move through the torque motor; the field Ethercat slave station controller is internally integrated with at least two PHY interfaces; the two PHY interfaces are in bidirectional communication connection with the Ethercat master station and the next-stage Ethercat slave station through an inlet RJ45 interface and an outlet RJ45 interface respectively. The invention has simple wiring, high integration and reliability, and also has a plurality of functions such as predictive maintenance, fault diagnosis and the like.
Description
Technical Field
The invention relates to an electro-hydraulic servo valve based on an Ethercat bus, belonging to the field of high-end hydraulic elements.
Background
The electro-hydraulic servo valve is a key element in electro-hydraulic servo control, and is a hydraulic control valve for converting a current signal into hydraulic flow or pressure. The electro-hydraulic servo valve has the advantages of fast dynamic response, high control precision, long service life and the like, and is widely applied to electro-hydraulic servo control systems in the fields of aviation, aerospace, ships, metallurgy, chemical industry and the like. The electro-hydraulic servo valve is used as a core control element of a hydraulic servo mechanism, the traditional electro-hydraulic servo valve is driven by analog current, each servo valve needs to be provided with a special driving circuit board when in use, the driving circuit board and the electro-hydraulic servo valve are usually long in distance, and in an application scene of multi-cylinder cooperation, a series of problems of difficult wiring, complex system structure, poor anti-interference capability, low informatization degree, incapability of networking monitoring and the like exist. Even though the conventional fieldbus solution can solve the above-mentioned problems, its real-time and high latency cannot meet the industrial control requirements.
Disclosure of Invention
The invention aims to overcome the defects in the prior art, provides an electro-hydraulic servo valve based on an Ethercat bus, and solves the problems of difficult wiring, insufficient monitoring capability, low real-time property, high time delay and the like in the prior art.
In order to solve the technical problems, the invention is realized by adopting the following technical scheme:
an electro-hydraulic servo valve based on an Ethercat bus comprises a shell, a circuit board arranged in the shell, a front-stage nozzle baffle valve, a power-stage slide valve and a torque motor;
the circuit board is integrated with a field Ethercat slave station controller, an MCU, a servo valve driving unit, an inlet RJ45 interface and an outlet RJ45 interface which support POE functions;
the servo valve driving unit drives the front-stage nozzle baffle valve and the power-stage slide valve to move through a torque motor;
the field Ethercat slave station controller is internally integrated with at least two PHY interfaces for processing Ethercat data frames; one PHY interface is in bidirectional communication connection with the Ethercat master station through an inlet RJ45 interface, and the other PHY interface is in bidirectional communication connection with the next-stage Ethercat slave station through an outlet RJ45 interface;
and the MCU is used for monitoring the state in the valve, realizing an Ethercat communication protocol and issuing a control instruction to the servo valve driving unit according to control information issued by the on-site Ethercat slave station controller.
Further, the MCU is in bidirectional communication connection with the field Ethercat slave station controller through an internally integrated SPI interface.
Furthermore, an analog-to-digital converter is integrated in the MCU, and the MCU realizes the collection of the state information in the valve through the analog-to-digital converter.
Furthermore, a digital-to-analog converter is integrated in the MCU, and the MCU realizes the issuing of the control instruction through the digital-to-analog converter.
Further, the housing comprises a valve main housing and a valve cover arranged on the valve main housing, the circuit board and the torque motor are arranged in the valve cover, and the pre-stage nozzle baffle valve and the power stage slide valve are arranged in the valve main housing; and the valve cover is provided with interface mounting holes matched with the inlet RJ45 interface and the outlet RJ45 interface.
Further, the valve also comprises a sensor for monitoring the state information in the valve, wherein the sensor comprises a valve core displacement sensor, a temperature sensor in the valve and a torque motor coil current sensor.
Compared with the prior art, the invention has the following beneficial effects: the on-site Ethercat slave station controller, the MCU, the servo valve driving unit, the inlet RJ45 interface supporting the POE function and the outlet RJ45 interface are integrated on the circuit board, compared with the traditional electro-hydraulic servo valve, no extra power supply, driver and controller are needed to be equipped, the electro-hydraulic servo valve completes the functions of power supply, monitoring, communication, driving and the like only through one universal network cable, the wiring distance of the electro-hydraulic servo valve is shortened, and the wiring structure is more compact, and the electro-hydraulic servo valve provided by the invention is suitable for special multi-cylinder coordination occasions, such as: a four-footed hydraulic robot, a hydraulic leveling system, etc.; the Ethercat bus has the characteristics of low delay, high response, high reliability, universal interconnectivity and the like, so that the real-time performance and the reliability of the servo valve are further ensured, and a high-performance distributed motion control system can be built at low cost;
compared with the traditional displacement sensor which outputs analog signals, the controller has higher control precision and anti-interference performance, thereby improving the control performance and stability in an applied system;
the valve core displacement sensor, the temperature sensor in the valve and the torque motor coil current sensor in the electro-hydraulic servo valve can timely acquire state information such as valve core displacement, temperature in the valve, torque motor coil current and the like in the servo valve and transmit the state information to the MCU for processing, so that self-fault diagnosis and predictive maintenance of the electro-hydraulic servo valve are realized.
Drawings
The accompanying drawings, which are included to provide a further understanding of the invention and are incorporated in and constitute a part of this application, illustrate embodiment(s) of the invention and together with the description serve to explain the invention without limiting the invention.
FIG. 1 is a schematic diagram of an electro-hydraulic servo valve based on an Ethercat bus according to an embodiment of the present invention;
FIG. 2 is a schematic structural diagram of an electro-hydraulic servo valve based on an Ethercat bus according to an embodiment of the present invention;
in the figure: 1. the valve comprises a valve core displacement sensor, 2, an in-valve temperature sensor, 3, a torque motor coil current sensor, 4, a valve cover, 5, an electro-hydraulic servo valve control circuit, 601, an inlet RJ45 interface, 602, an outlet RJ45 interface, 7, a valve main shell, 8, an interface mounting hole, 9, a torque motor, 10, a front-stage nozzle baffle valve, 11 and a power-stage slide valve.
Detailed Description
The invention is further described below with reference to the accompanying drawings. The following examples are only for illustrating the technical solutions of the present invention more clearly, and the protection scope of the present invention is not limited thereby.
In the description of the present invention, it is to be understood that the terms "center", "longitudinal", "lateral", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", and the like, indicate orientations or positional relationships based on those shown in the drawings, and are used only for convenience in describing the present invention and for simplicity in description, and do not indicate or imply that the referenced devices or elements must have a particular orientation, be constructed and operated in a particular orientation, and thus, are not to be construed as limiting the present invention. Furthermore, the terms "first", "second", etc. are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first," "second," etc. may explicitly or implicitly include one or more of that feature. In the description of the present invention, "a plurality" means two or more unless otherwise specified.
In the description of the present invention, it should be noted that, unless otherwise explicitly specified or limited, the terms "mounted," "connected," and "connected" are to be construed broadly, e.g., as meaning either a fixed connection, a removable connection, or an integral connection; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meaning of the above terms in the present invention can be understood by those of ordinary skill in the art through specific situations.
As shown in fig. 1 and 2, an electro-hydraulic servo valve based on an Ethercat bus according to an embodiment of the present invention includes a housing, a circuit board 5 disposed in the housing, a pre-stage nozzle flapper valve 10, a power stage spool valve 11, and a torque motor 9;
the circuit board is integrated with a field Ethercat slave station controller, an MCU, a servo valve driving unit, an inlet RJ45 interface 601 and an outlet RJ45 interface 602 which support POE functions; when the Ethercat main station is connected with the inlet RJ45 interface 601 of the invention through the POE function switch, the POE function can directly provide power for the circuit board 5 of the invention, and can transmit Ethercat data frames; when networking is required, the circuit board 5 of the invention can also be connected with the RJ45 interface of the next-level equipment through the outlet RJ45 interface 602, so that power is selectively provided for the next-level equipment;
the servo valve driving unit drives a front-stage nozzle flapper valve 10 and a power-stage slide valve 11 through a torque motor 9; the servo valve driving unit can realize pressure-current conversion and power conversion, so that a voltage command signal output by the MCU can be converted into a current value of a driving torque motor coil through the servo valve driving unit, and the current value drives the front-stage nozzle baffle valve 10 and the power-stage slide valve 11 to move so as to realize electro-hydraulic conversion;
the field Ethercat slave station controller is internally integrated with at least two PHY interfaces for processing Ethercat data frames; one PHY interface is in bidirectional communication connection with the Ethercat master station through an inlet RJ45 interface 601, and the other PHY interface is in bidirectional communication connection with the next-stage Ethercat slave station through an outlet RJ45 interface 602; the PHY interface is responsible for processing an Ethercat data frame, and the dual-end storage area is used for realizing data exchange between the Ethercat master station and the slave station local application;
and the MCU is used for monitoring the state in the valve, realizing an Ethercat communication protocol and issuing a control instruction to the servo valve driving unit according to control information issued by the on-site Ethercat slave station controller.
According to the Ethercat bus-based electro-hydraulic servo valve provided by the embodiment of the invention, the MCU is in bidirectional communication connection with the field Ethercat slave station controller through the SPI (serial peripheral interface) integrated inside. The MCU reads control data or transmits state information in a serial or parallel bus form through the SPI interface.
According to the Ethercat bus-based electro-hydraulic servo valve provided by the embodiment of the invention, the MCU is internally integrated with the analog-to-digital converter, and the MCU realizes the collection of state information in the valve through the analog-to-digital converter. The analog-to-digital converter receives analog signals collected by the sensor and converts the analog signals into digital signals, and the digital signals are written into a double-end storage area in the field Ethercat slave station controller through the SPI interface and are read by the Ethercat master station.
According to the Ethercat bus-based electro-hydraulic servo valve provided by the embodiment of the invention, the MCU is internally integrated with the digital-to-analog converter, and the MCU realizes the issuing of the control instruction through the digital-to-analog converter. The digital-to-analog converter receives a digital control signal of the field Ethercat slave station controller, converts the digital control signal into an analog control signal, and transmits the analog control signal to the servo valve driving unit, so that the control of the torque motor 9 is realized.
The invention provides an electro-hydraulic servo valve based on an Ethercat bus, which comprises a valve main shell 7 and a valve cover 4 arranged on the valve main shell 7, wherein a circuit board 5 and a torque motor 9 are arranged in the valve cover 4, and a front-stage nozzle flapper valve 10 and a power-stage slide valve 11 are arranged in the valve main shell 7; the valve housing 4 is provided with an interface mounting hole 8 matched with the inlet RJ45 interface 601 and the outlet RJ45 interface 602. A circuit board 5 is embedded in a valve cover 4 of a traditional electro-hydraulic servo valve, a bus type network can be constructed by only one universal network cable, and in some special multi-cylinder cooperation occasions, the wiring and the structure are more compact after the invention is adopted, for example: a four-footed hydraulic robot, a hydraulic leveling system, etc.
The Ethercat bus-based electro-hydraulic servo valve provided by the embodiment of the invention further comprises a sensor for monitoring the state information in the valve, wherein the sensor comprises a valve core displacement sensor 1, a temperature sensor 2 in the valve and a torque motor coil current sensor 3. But not limited thereto, the sensors in the embodiment may also include a flow sensor, a pressure sensor, etc. for monitoring the oil inlet amount or the oil return amount, the pressure, etc. in the valve.
The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention, and various modifications and changes may be made by those skilled in the art. Any modification, equivalent replacement, or improvement made within the principle of the present invention should be included in the protection scope of the present invention.
Claims (6)
1. The electro-hydraulic servo valve based on the Ethercat bus is characterized by comprising a shell, a circuit board (5) arranged in the shell, a front-stage nozzle baffle valve (10), a power-stage slide valve (11) and a torque motor (9);
the circuit board is integrated with a field Ethercat slave station controller, an MCU, a servo valve driving unit, an inlet RJ45 interface (601) and an outlet RJ45 interface (602) which support POE functions;
the servo valve driving unit drives a front-stage nozzle flapper valve (10) and a power-stage slide valve to move (11) through a torque motor (9);
the field Ethercat slave station controller is internally integrated with at least two PHY interfaces for processing Ethercat data frames; one PHY interface is in bidirectional communication connection with the Ethercat master station through an inlet RJ45 interface (601), and the other PHY interface is in bidirectional communication connection with the next-stage Ethercat slave station through an outlet RJ45 interface (602);
and the MCU is used for monitoring the state in the valve, realizing an Ethercat communication protocol and issuing a control instruction to the servo valve driving unit according to control information issued by the on-site Ethercat slave station controller.
2. The Ethercat bus-based electrohydraulic servo valve of claim 1, wherein said MCU is bidirectionally communicatively coupled to said field Ethercat slave station controller via an internally integrated SPI interface.
3. The Ethercat bus-based electro-hydraulic servo valve according to claim 1, wherein an analog-to-digital converter is integrated in the MCU, and the MCU acquires the state information in the valve through the analog-to-digital converter.
4. The Ethercat bus-based electro-hydraulic servo valve according to claim 1, wherein a digital-to-analog converter is integrated in the MCU, and the MCU implements the issuing of the control command through the digital-to-analog converter.
5. The Ethercat bus based electro-hydraulic servo valve according to claim 1, wherein the housing comprises a valve main housing (7) and a valve housing (4) provided on the valve main housing (7), the circuit board (5), the torque motor (9) are provided in the valve housing (4), the pre-stage nozzle flapper valve (10) and the power stage spool valve (11) are provided in the valve main housing (7); and the valve cover (4) is provided with an interface mounting hole (8) matched with the inlet RJ45 interface (601) and the outlet RJ45 interface (602).
6. The Ethercat bus-based electrohydraulic servo valve of claim 1, further comprising sensors for monitoring in-valve state information, said sensors including a spool displacement sensor (1), an in-valve temperature sensor (2), and a torque motor coil current sensor (3).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202011189774.5A CN112324733A (en) | 2020-10-30 | 2020-10-30 | Electro-hydraulic servo valve based on Ethercat bus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202011189774.5A CN112324733A (en) | 2020-10-30 | 2020-10-30 | Electro-hydraulic servo valve based on Ethercat bus |
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| Publication Number | Publication Date |
|---|---|
| CN112324733A true CN112324733A (en) | 2021-02-05 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202011189774.5A Pending CN112324733A (en) | 2020-10-30 | 2020-10-30 | Electro-hydraulic servo valve based on Ethercat bus |
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Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2008101513A1 (en) * | 2007-02-22 | 2008-08-28 | Festo Ag & Co. Kg | Interface module for controlling a valve unit |
| CN101776097A (en) * | 2009-12-09 | 2010-07-14 | 中冶南方工程技术有限公司 | Special three-way electro hydraulic servo valve for down-pressing system of rolling mill |
| CN108397446A (en) * | 2018-03-20 | 2018-08-14 | 哈尔滨理工大学 | A kind of integrated hydraulic joint of robot controller |
| CN108612712A (en) * | 2018-04-10 | 2018-10-02 | 山西大学 | The electro-hydraulic proportional flow valve and control method of active pilot stage control |
| CN108964271A (en) * | 2018-07-11 | 2018-12-07 | 无锡气动技术研究所有限公司 | Valve island based on EtherCAT communications protocol |
| CN110985468A (en) * | 2019-12-24 | 2020-04-10 | 中航工业南京伺服控制***有限公司 | Rotary directly-driven electro-hydraulic pressure servo valve of bearing type driving interface |
-
2020
- 2020-10-30 CN CN202011189774.5A patent/CN112324733A/en active Pending
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2008101513A1 (en) * | 2007-02-22 | 2008-08-28 | Festo Ag & Co. Kg | Interface module for controlling a valve unit |
| CN101776097A (en) * | 2009-12-09 | 2010-07-14 | 中冶南方工程技术有限公司 | Special three-way electro hydraulic servo valve for down-pressing system of rolling mill |
| CN108397446A (en) * | 2018-03-20 | 2018-08-14 | 哈尔滨理工大学 | A kind of integrated hydraulic joint of robot controller |
| CN108612712A (en) * | 2018-04-10 | 2018-10-02 | 山西大学 | The electro-hydraulic proportional flow valve and control method of active pilot stage control |
| CN108964271A (en) * | 2018-07-11 | 2018-12-07 | 无锡气动技术研究所有限公司 | Valve island based on EtherCAT communications protocol |
| CN110985468A (en) * | 2019-12-24 | 2020-04-10 | 中航工业南京伺服控制***有限公司 | Rotary directly-driven electro-hydraulic pressure servo valve of bearing type driving interface |
Non-Patent Citations (1)
| Title |
|---|
| 沙占友等: "《特种集成电源设计与应用》", 31 January 2007, 北京：中国电力出版社 * |
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Application publication date: 20210205 |
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