CN112005104B - 测量方法以及测量装置 - Google Patents
测量方法以及测量装置 Download PDFInfo
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- CN112005104B CN112005104B CN201980026383.0A CN201980026383A CN112005104B CN 112005104 B CN112005104 B CN 112005104B CN 201980026383 A CN201980026383 A CN 201980026383A CN 112005104 B CN112005104 B CN 112005104B
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- 238000000034 method Methods 0.000 title claims abstract description 23
- 238000003384 imaging method Methods 0.000 claims abstract description 25
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- 238000005286 illumination Methods 0.000 claims description 28
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- 238000000691 measurement method Methods 0.000 claims description 4
- 238000004519 manufacturing process Methods 0.000 abstract description 13
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
- G01N21/892—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles characterised by the flaw, defect or object feature examined
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- Engineering & Computer Science (AREA)
- Textile Engineering (AREA)
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
- Length Measuring Devices By Optical Means (AREA)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2018-087428 | 2018-04-27 | ||
JP2018087428A JP7076280B2 (ja) | 2018-04-27 | 2018-04-27 | 測定方法および測定装置 |
PCT/JP2019/009327 WO2019207973A1 (ja) | 2018-04-27 | 2019-03-08 | 画像取得方法、測定方法および画像取得装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN112005104A CN112005104A (zh) | 2020-11-27 |
CN112005104B true CN112005104B (zh) | 2024-03-12 |
Family
ID=68293843
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201980026383.0A Active CN112005104B (zh) | 2018-04-27 | 2019-03-08 | 测量方法以及测量装置 |
Country Status (4)
Country | Link |
---|---|
JP (1) | JP7076280B2 (ja) |
CN (1) | CN112005104B (ja) |
TW (1) | TWI795552B (ja) |
WO (1) | WO2019207973A1 (ja) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2022224636A1 (ja) | 2021-04-22 | 2022-10-27 | 日立造船株式会社 | 検査装置 |
Citations (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH07243819A (ja) * | 1994-02-28 | 1995-09-19 | Takiron Co Ltd | 透明樹脂板の歪み検査方法及びその装置 |
JP2007065168A (ja) * | 2005-08-30 | 2007-03-15 | Dainippon Printing Co Ltd | カラーフィルター用の基板およびその検査方法、検査装置 |
JP2007170961A (ja) * | 2005-12-21 | 2007-07-05 | Fujifilm Corp | 検査装置及び検査方法 |
CN101013093A (zh) * | 2006-02-02 | 2007-08-08 | 株式会社理光 | 表面缺陷检查装置、表面缺陷检查方法及表面缺陷检查程序 |
JP2007211092A (ja) * | 2006-02-08 | 2007-08-23 | Sekisui Chem Co Ltd | 透明フィルムの検査方法及び透明フィルム |
JP2011085520A (ja) * | 2009-10-16 | 2011-04-28 | Kaneka Corp | 欠陥判別装置、欠陥判別方法及びシート状物 |
JP2012078144A (ja) * | 2010-09-30 | 2012-04-19 | Kaneka Corp | 透明体シート状物の表面欠陥検査装置 |
CN102809567A (zh) * | 2011-06-01 | 2012-12-05 | 大日本网屏制造株式会社 | 图像获取装置,图案检查装置及图像获取方法 |
CN106104261A (zh) * | 2014-03-07 | 2016-11-09 | 新日铁住金株式会社 | 表面性状指标化装置、表面性状指标化方法以及程序 |
CN107735673A (zh) * | 2015-06-25 | 2018-02-23 | 杰富意钢铁株式会社 | 表面缺陷检测方法、表面缺陷检测装置及钢材的制造方法 |
Family Cites Families (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0723211U (ja) * | 1993-10-04 | 1995-04-25 | 三菱樹脂株式会社 | 透明プラスチック板の検査装置 |
JPH07306152A (ja) * | 1994-03-16 | 1995-11-21 | Sekisui Chem Co Ltd | 光学的歪検査装置 |
GB0307345D0 (en) | 2003-03-29 | 2003-05-07 | Pilkington Plc | Glazing inspection |
JP4841804B2 (ja) | 2003-11-18 | 2011-12-21 | 積水化学工業株式会社 | 光学フィルムの製造方法 |
JP5361268B2 (ja) * | 2008-07-18 | 2013-12-04 | 株式会社ミツトヨ | 斜入射干渉計 |
GB0914651D0 (en) | 2009-08-21 | 2009-09-30 | Pilkington Automotive D Gmbh | Heatable glazing inspection |
CN102023068A (zh) * | 2010-10-10 | 2011-04-20 | 徐建康 | 薄膜应力测量设备及其测量方法 |
JP5769572B2 (ja) * | 2011-03-30 | 2015-08-26 | 株式会社Screenホールディングス | 基板検査装置および基板検査方法 |
JP2015172565A (ja) | 2014-02-19 | 2015-10-01 | 東レ株式会社 | フィルム検査方法及びそれを用いたフィルム製造方法 |
JP6370177B2 (ja) * | 2014-09-05 | 2018-08-08 | 株式会社Screenホールディングス | 検査装置および検査方法 |
US9952037B2 (en) * | 2015-06-26 | 2018-04-24 | Glasstech, Inc. | System and method for developing three-dimensional surface information corresponding to a contoured sheet |
JP2017134958A (ja) | 2016-01-27 | 2017-08-03 | 住友電装株式会社 | バッテリ端子 |
US20190033229A1 (en) * | 2016-02-05 | 2019-01-31 | Toray Industries, Inc. | Inspection device for sheet object, and inspection method for sheet object |
-
2018
- 2018-04-27 JP JP2018087428A patent/JP7076280B2/ja active Active
-
2019
- 2019-03-08 WO PCT/JP2019/009327 patent/WO2019207973A1/ja active Application Filing
- 2019-03-08 CN CN201980026383.0A patent/CN112005104B/zh active Active
- 2019-04-12 TW TW108112807A patent/TWI795552B/zh active
Patent Citations (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH07243819A (ja) * | 1994-02-28 | 1995-09-19 | Takiron Co Ltd | 透明樹脂板の歪み検査方法及びその装置 |
JP2007065168A (ja) * | 2005-08-30 | 2007-03-15 | Dainippon Printing Co Ltd | カラーフィルター用の基板およびその検査方法、検査装置 |
JP2007170961A (ja) * | 2005-12-21 | 2007-07-05 | Fujifilm Corp | 検査装置及び検査方法 |
CN101013093A (zh) * | 2006-02-02 | 2007-08-08 | 株式会社理光 | 表面缺陷检查装置、表面缺陷检查方法及表面缺陷检查程序 |
JP2007211092A (ja) * | 2006-02-08 | 2007-08-23 | Sekisui Chem Co Ltd | 透明フィルムの検査方法及び透明フィルム |
JP2011085520A (ja) * | 2009-10-16 | 2011-04-28 | Kaneka Corp | 欠陥判別装置、欠陥判別方法及びシート状物 |
JP2012078144A (ja) * | 2010-09-30 | 2012-04-19 | Kaneka Corp | 透明体シート状物の表面欠陥検査装置 |
CN102809567A (zh) * | 2011-06-01 | 2012-12-05 | 大日本网屏制造株式会社 | 图像获取装置,图案检查装置及图像获取方法 |
CN106104261A (zh) * | 2014-03-07 | 2016-11-09 | 新日铁住金株式会社 | 表面性状指标化装置、表面性状指标化方法以及程序 |
CN107735673A (zh) * | 2015-06-25 | 2018-02-23 | 杰富意钢铁株式会社 | 表面缺陷检测方法、表面缺陷检测装置及钢材的制造方法 |
Also Published As
Publication number | Publication date |
---|---|
TWI795552B (zh) | 2023-03-11 |
JP7076280B2 (ja) | 2022-05-27 |
WO2019207973A1 (ja) | 2019-10-31 |
CN112005104A (zh) | 2020-11-27 |
TW201945977A (zh) | 2019-12-01 |
JP2019191112A (ja) | 2019-10-31 |
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