CN111801606B - 光学滤波器、照相机模块及电子设备 - Google Patents
光学滤波器、照相机模块及电子设备 Download PDFInfo
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- CN111801606B CN111801606B CN201980016421.4A CN201980016421A CN111801606B CN 111801606 B CN111801606 B CN 111801606B CN 201980016421 A CN201980016421 A CN 201980016421A CN 111801606 B CN111801606 B CN 111801606B
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- VLLMWSRANPNYQX-UHFFFAOYSA-N thiadiazole Chemical group C1=CSN=N1.C1=CSN=N1 VLLMWSRANPNYQX-UHFFFAOYSA-N 0.000 description 1
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- ZNOCGWVLWPVKAO-UHFFFAOYSA-N trimethoxy(phenyl)silane Chemical compound CO[Si](OC)(OC)C1=CC=CC=C1 ZNOCGWVLWPVKAO-UHFFFAOYSA-N 0.000 description 1
- 125000000026 trimethylsilyl group Chemical group [H]C([H])([H])[Si]([*])(C([H])([H])[H])C([H])([H])[H] 0.000 description 1
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Images
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- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09B—ORGANIC DYES OR CLOSELY-RELATED COMPOUNDS FOR PRODUCING DYES, e.g. PIGMENTS; MORDANTS; LAKES
- C09B57/00—Other synthetic dyes of known constitution
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09D—COATING COMPOSITIONS, e.g. PAINTS, VARNISHES OR LACQUERS; FILLING PASTES; CHEMICAL PAINT OR INK REMOVERS; INKS; CORRECTING FLUIDS; WOODSTAINS; PASTES OR SOLIDS FOR COLOURING OR PRINTING; USE OF MATERIALS THEREFOR
- C09D201/00—Coating compositions based on unspecified macromolecular compounds
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09D—COATING COMPOSITIONS, e.g. PAINTS, VARNISHES OR LACQUERS; FILLING PASTES; CHEMICAL PAINT OR INK REMOVERS; INKS; CORRECTING FLUIDS; WOODSTAINS; PASTES OR SOLIDS FOR COLOURING OR PRINTING; USE OF MATERIALS THEREFOR
- C09D7/00—Features of coating compositions, not provided for in group C09D5/00; Processes for incorporating ingredients in coating compositions
- C09D7/40—Additives
- C09D7/41—Organic pigments; Organic dyes
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
- G02B1/04—Optical elements characterised by the material of which they are made; Optical coatings for optical elements made of organic materials, e.g. plastics
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/20—Filters
- G02B5/22—Absorbing filters
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03B—APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FOR PROJECTING OR VIEWING THEM; APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ACCESSORIES THEREFOR
- G03B11/00—Filters or other obturators specially adapted for photographic purposes
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03B—APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FOR PROJECTING OR VIEWING THEM; APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ACCESSORIES THEREFOR
- G03B17/00—Details of cameras or camera bodies; Accessories therefor
- G03B17/02—Bodies
- G03B17/12—Bodies with means for supporting objectives, supplementary lenses, filters, masks, or turrets
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
- H04N23/00—Cameras or camera modules comprising electronic image sensors; Control thereof
- H04N23/50—Constructional details
- H04N23/55—Optical parts specially adapted for electronic image sensors; Mounting thereof
Landscapes
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- Multimedia (AREA)
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- Life Sciences & Earth Sciences (AREA)
- Materials Engineering (AREA)
- Wood Science & Technology (AREA)
- Optical Filters (AREA)
- Blocking Light For Cameras (AREA)
- Studio Devices (AREA)
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JP7059729B2 (ja) * | 2018-03-20 | 2022-04-26 | Agc株式会社 | 光学フィルタ、近赤外線吸収色素および撮像装置 |
CN114402235B (zh) * | 2019-09-11 | 2023-09-19 | Agc株式会社 | 滤光片和成像装置 |
WO2021085372A1 (ja) * | 2019-11-01 | 2021-05-06 | Jsr株式会社 | 樹脂組成物、化合物(z)、光学フィルターおよびその用途 |
CN114730028A (zh) * | 2019-11-15 | 2022-07-08 | Agc株式会社 | 滤光片和使用了该滤光片的指纹检测装置 |
JP7392412B2 (ja) * | 2019-11-15 | 2023-12-06 | Agc株式会社 | 光学フィルタ、並びにこれを用いた光学装置及び指紋検出装置 |
JP2021134350A (ja) * | 2020-02-21 | 2021-09-13 | Jsr株式会社 | 樹脂組成物、化合物(Z)、基材(i)、光学フィルターおよびその用途 |
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US20230340269A1 (en) * | 2020-10-09 | 2023-10-26 | Konica Minolta, Inc. | Near-infrared absorbing composition, near-infrared absorbing film, nearinfrared absorbing filter and image sensor for solid-state imaging elements |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2013156460A (ja) * | 2012-01-31 | 2013-08-15 | Konica Minolta Inc | 携帯情報端末用カバー部材 |
CN103608705A (zh) * | 2011-06-06 | 2014-02-26 | 旭硝子株式会社 | 滤光片、固体摄像元件、摄像装置用透镜和摄像装置 |
JP2014052431A (ja) * | 2012-09-05 | 2014-03-20 | Asahi Glass Co Ltd | 近赤外線吸収フィルタおよび固体撮像装置 |
JP2016146619A (ja) * | 2015-01-30 | 2016-08-12 | Jsr株式会社 | 固体撮像装置及び光学フィルタ |
CN106662686A (zh) * | 2015-07-28 | 2017-05-10 | Jsr株式会社 | 光学滤波器及具备光学滤波器的环境光传感器 |
CN107076895A (zh) * | 2015-04-23 | 2017-08-18 | 旭硝子株式会社 | 光学滤波器和摄像装置 |
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US5262549A (en) | 1991-05-30 | 1993-11-16 | Polaroid Corporation | Benzpyrylium dyes, and processes for their preparation and use |
JP3163813B2 (ja) | 1992-12-28 | 2001-05-08 | 日本ゼオン株式会社 | 近赤外線吸収樹脂組成物、および成形品 |
JP5489669B2 (ja) | 2008-11-28 | 2014-05-14 | Jsr株式会社 | 近赤外線カットフィルターおよび近赤外線カットフィルターを用いた装置 |
KR102056613B1 (ko) | 2012-08-23 | 2019-12-17 | 에이지씨 가부시키가이샤 | 근적외선 커트 필터 및 고체 촬상 장치 |
JP6269657B2 (ja) | 2013-04-10 | 2018-01-31 | 旭硝子株式会社 | 赤外線遮蔽フィルタ、固体撮像素子、および撮像・表示装置 |
WO2015025779A1 (ja) | 2013-08-20 | 2015-02-26 | Jsr株式会社 | 光学フィルターおよび光学フィルターを用いた装置 |
-
2019
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Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103608705A (zh) * | 2011-06-06 | 2014-02-26 | 旭硝子株式会社 | 滤光片、固体摄像元件、摄像装置用透镜和摄像装置 |
JP2013156460A (ja) * | 2012-01-31 | 2013-08-15 | Konica Minolta Inc | 携帯情報端末用カバー部材 |
JP2014052431A (ja) * | 2012-09-05 | 2014-03-20 | Asahi Glass Co Ltd | 近赤外線吸収フィルタおよび固体撮像装置 |
JP2016146619A (ja) * | 2015-01-30 | 2016-08-12 | Jsr株式会社 | 固体撮像装置及び光学フィルタ |
CN107076895A (zh) * | 2015-04-23 | 2017-08-18 | 旭硝子株式会社 | 光学滤波器和摄像装置 |
CN106662686A (zh) * | 2015-07-28 | 2017-05-10 | Jsr株式会社 | 光学滤波器及具备光学滤波器的环境光传感器 |
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WO2019168090A1 (ja) | 2019-09-06 |
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