CN111744732B - Vacuum spin coating device for deep hole side wall adhesion layer of glass adapter plate - Google Patents
Vacuum spin coating device for deep hole side wall adhesion layer of glass adapter plate Download PDFInfo
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- CN111744732B CN111744732B CN202010654983.6A CN202010654983A CN111744732B CN 111744732 B CN111744732 B CN 111744732B CN 202010654983 A CN202010654983 A CN 202010654983A CN 111744732 B CN111744732 B CN 111744732B
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C11/00—Component parts, details or accessories not specifically provided for in groups B05C1/00 - B05C9/00
- B05C11/02—Apparatus for spreading or distributing liquids or other fluent materials already applied to a surface ; Controlling means therefor; Control of the thickness of a coating by spreading or distributing liquids or other fluent materials already applied to the coated surface
- B05C11/08—Spreading liquid or other fluent material by manipulating the work, e.g. tilting
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C11/00—Component parts, details or accessories not specifically provided for in groups B05C1/00 - B05C9/00
- B05C11/10—Storage, supply or control of liquid or other fluent material; Recovery of excess liquid or other fluent material
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C13/00—Means for manipulating or holding work, e.g. for separate articles
- B05C13/02—Means for manipulating or holding work, e.g. for separate articles for particular articles
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D3/00—Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials
- B05D3/04—Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials by exposure to gases
- B05D3/0493—Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials by exposure to gases using vacuum
Abstract
The invention provides a vacuum spin coating device for a deep hole side wall adhesion layer of a glass adapter plate, which comprises a feeding transmission mechanism, a vacuum spin coating tank, a liquid dropping mechanism and a discharging transmission mechanism, wherein the vacuum spin coating tank comprises a rack, a fixed tank body, a movable cylinder body, a spin coating motor and a turntable; the spin coating motor is connected with a rotating shaft, the rotating shaft extends into the movable cylinder, and the rotating disc is fixedly arranged on the rotating shaft; n feeding troughs are arranged on the rotary table; a sealing end cover is arranged above the movable cylinder body and connected with a second lifting mechanism; n material pressing mechanisms are arranged on the lower surface of the sealing end cover, and each material pressing mechanism is positioned above a feeding groove; the fixed tank body is connected with a vacuum pump; the dropping mechanism comprises a liquid storage tank, a liquid outlet pipe and a dropping head, and the dropping head is arranged on the first horizontal moving mechanism. The device can realize the full-automatic vacuum spin coating process, has high production efficiency, and is favorable for realizing large-scale and batch production.
Description
Technical Field
The invention relates to the field of glass adapter plate processing equipment, in particular to a vacuum spin coating device for a deep hole side wall adhesion layer of a glass adapter plate.
Background
3D packaging is currently the most mature category of integration in the industry, stacking bare chips or individually packaged chips together primarily by packaging, and currently involves many different technologies, most of which are extensions of the existing single chip packaging technologies in three dimensions. Interposer (Interposer), also known as Interposer or Interposer, is a new type of electronic substrate that enables interconnection between fine-pitch I/O at the top die level and larger-size, large-pitch I/O at the bottom package level. The glass adapter plate is a novel adapter plate, a plurality of glass blind holes are formed in the glass adapter plate, the glass blind holes (TGVs) penetrate through a glass substrate to extend and be interconnected, vertical integration is achieved, meanwhile, the interconnection length is shortened, and therefore the size, the weight and the power consumption are reduced, and the glass adapter plate is the foundation and the core of the existing 2.5D/3D integration technology.
At present, extensive research has been carried out by various large enterprises, universities or research institutions aiming at various aspects of the TGV, and the intensive research is mainly focused on the TGV manufacturing process, the TGV-related electrical and thermal-mechanical reliability analysis and the proximity effect of the TGV and a CMOS device so as to control the cost of the TGV and improve the yield and the output. Copper TGV has gained the most widespread use and attention for its excellent electrical properties, fast fill rate and excellent process compatibility, and its typical fabrication process flow comprises the following steps: (a) etching a deep hole on a glass substrate; (b) depositing an adhesion layer on the side wall of the deep hole; (c) depositing a copper barrier layer/copper seed layer on the side wall; (d) electroplating and filling copper in the deep hole; (e) surface CMP and RDL wiring fabrication. With the commercial application of the 2.5D/3D integration technology becoming mature, the integration density of the device is higher, the integration number of the TGV is higher, the size is smaller, and the aspect ratio is higher. The size, especially the diameter, of the TGV greatly affects the electrical and mechanical reliability of the 3D interconnect and stack, and the smaller the diameter of the TGV, the shorter the delay, the less stress from the copper bump, and the smaller the corresponding KOZ (Keep-out zone). Currently, challenges with TGV processing include: deposition of an adhesion layer on the side wall of the ultra-small diameter blind hole, deposition of a uniform copper barrier layer/copper seed layer on the side wall of the ultra-small diameter blind hole and TGV research with excellent high-frequency transmission performance.
In order to solve the problem of high deposition difficulty of an adhesion layer on the side wall of a blind hole with an ultra-small diameter, the applicant develops a vacuum standing spin coating process, namely, a glass substrate is fixed on a turntable, a high polymer solution is dripped on the surface of the glass, the surface of the glass substrate is ensured to be covered by the high polymer solution, the turntable and the glass substrate are integrally transferred to an environment with the pressure lower than the atmospheric pressure, standing is carried out, the deep hole is filled with the high polymer solution, then the turntable is controlled to rotate, the redundant high polymer solution is thrown away, and the high polymer solution remained on the inner wall of the blind hole and the surface of the.
In the testing stage, the above process can be performed manually, but if mass production is to be realized, the efficiency of manual operation is obviously too low, which is not favorable for improving the production efficiency.
Disclosure of Invention
The invention aims to solve the technical problem of providing a vacuum spin coating device for a deep hole side wall adhesion layer of a glass adapter plate, which is operated automatically, improves the production efficiency and is beneficial to realizing batch and large-scale production.
The technical scheme adopted by the invention for solving the technical problems is as follows: the vacuum spin coating device for the deep hole side wall adhesion layer of the glass adapter plate comprises a feeding transmission mechanism, a vacuum spin coating tank, a liquid dropping mechanism and a discharging transmission mechanism;
the vacuum spin coating tank comprises a frame, a fixed tank body, a movable cylinder body, a spin coating motor and a turntable;
the fixed tank body and the spin coating motor are fixed on the frame, the movable cylinder body is sleeved on the upper part of the fixed tank body, and a sealing piston is arranged between the movable cylinder body and the fixed tank body; the fixed tank body is connected with a vacuum pump, and the side wall of the fixed tank body is provided with a vacuum pressure gauge;
the spin-coating motor is connected with a vertical rotating shaft, the rotating shaft penetrates through the bottom of the fixed tank body and extends into the movable tank body, and the rotary table is fixedly arranged on the rotating shaft;
n feeding grooves radially extending to the edge of the rotary table are arranged on the rotary table;
a sealing end cover used for sealing the upper port of the movable cylinder body is arranged above the movable cylinder body; the lower surface of the sealing end cover is provided with a vertical positioning shaft, a rotatable sleeve is arranged outside the positioning shaft, the outer wall of the sleeve is provided with n material pressing mechanisms, and each material pressing mechanism is positioned above a material feeding groove;
n is an integer greater than or equal to 3;
the liquid dropping mechanism comprises a liquid storage tank, the liquid storage tank is connected with a liquid outlet pipe, a liquid dropping pump is arranged on the liquid outlet pipe, a liquid dropping head is arranged at the end part of the liquid outlet pipe, and the liquid dropping head is arranged on a first horizontal moving mechanism;
the feeding transmission mechanism, the liquid dropping head and the discharging transmission mechanism are arranged around the movable barrel, and when each feeding groove of the rotary table is positioned at the material receiving station, the other two feeding grooves respectively positioned at the liquid dropping station and the discharging station exist;
the sealing end cover is connected with a second lifting mechanism; the second lifting mechanism is used for driving the sealing end cover to ascend so as to open the movable cylinder after spin coating is finished, and is used for driving the sealing end cover to descend so as to seal the movable cylinder during spin coating;
the movable cylinder is connected with a first lifting mechanism; during feeding and discharging, the first lifting mechanism is used for driving the movable cylinder to move downwards, so that the turntable is exposed outside the movable cylinder, the feeding transmission mechanism can transfer the glass substrate onto the turntable, the liquid dropping mechanism can drop glue on the glass substrate, and the discharging transmission mechanism can take away the spin-coated glass substrate; before vacuumizing, the first lifting mechanism is used for driving the movable cylinder to move upwards, and the turntable is covered with the turntable to match with the sealing end cover to seal the vacuum spin-coating tank.
Furthermore, the feeding transmission mechanism and the discharging transmission mechanism both comprise a conveying belt, a material receiving plate and a sucker;
the material receiving plate is horizontally arranged at one end of the conveying belt close to the vacuum spin coating tank, and a material conveying groove which radially extends to the edge of the material receiving plate along the rotary table is formed in the material receiving plate;
the sucking disc is positioned in the material conveying groove, the sucking disc is arranged on a second horizontal moving mechanism, and the second horizontal moving mechanism is arranged on a third lifting mechanism; the sucking disc is connected with an air suction pump through an air pipe.
Further, the third lifting mechanism is a first hydraulic cylinder with a pair of piston rods facing upwards, a mounting plate is arranged at the top of the first hydraulic cylinder, the second horizontal moving mechanism is a second hydraulic cylinder, and the axial direction of the second hydraulic cylinder is the radial direction of the rotary table.
Further, the first lifting mechanism includes a plurality of vertical third hydraulic cylinders.
Further, the first horizontal moving mechanism is a horizontally arranged fourth hydraulic cylinder.
Further, when one of the feeding grooves of the rotary disc is located at a material receiving station, the other feeding groove adjacent to the feeding groove is located at a material discharging station.
Further, the liquid dropping head is arranged vertically or obliquely.
Further, the material pressing mechanism comprises a vertical first connecting rod and an inclined second connecting rod, the top of the second connecting rod is fixedly connected with the sleeve (18), the bottom of the second connecting rod is fixedly connected with the upper end of the first connecting rod, and an annular pressing plate is arranged at the lower end of the first connecting rod.
Furthermore, a positioning groove is formed in the rotary table below each annular pressing plate.
The invention has the beneficial effects that: the processes of feeding, liquid dropping, vacuumizing, rotating of the rotary table, discharging and the like of the device are all automatically realized by equipment, all moving parts can be controlled only by through hole programs, coordination work of all the moving parts can be promoted, the whole vacuum spin coating process is completed fully automatically, the production efficiency is very high, and large-scale and batch production is favorably realized.
Drawings
FIG. 1 is a front cross-sectional schematic view of the present invention;
fig. 2 is a schematic top view with the end cap removed.
Detailed Description
The invention is further illustrated with reference to the following figures and examples.
As shown in fig. 1 and 2, the vacuum spin coating device for the deep-hole sidewall adhesion layer of the glass adapter plate is used for performing vacuum spin coating on the deep-hole sidewall adhesion layer of the glass adapter plate; comprises a feeding and conveying mechanism 100, a vacuum spin coating tank 200, a dripping mechanism 300 and a discharging and conveying mechanism 400.
The feeding and conveying mechanism 100 is used for conveying the glass substrate with the blind holes to the vacuum spin coating tank 200;
the vacuum spin coating tank 200 is used for standing and vacuum spin coating of a glass substrate;
the dropping mechanism 300 is used for dropping the high polymer solution on the surface of the glass substrate, so that the high polymer solution covers the surface of the glass substrate;
the discharging and conveying mechanism 400 is used for conveying the spin-coated glass substrate to the next processing equipment.
The vacuum spin coating tank 200 comprises a frame 1, a fixed tank body 2, a movable cylinder body 3, a spin coating motor 4 and a turntable 5;
the fixed tank body 2 and the spin coating motor 4 are fixed on the frame 1, the movable cylinder 3 is sleeved on the upper part of the fixed tank body 2, and a sealing piston 6 is arranged between the movable cylinder 3 and the fixed tank body 2; the fixed tank body 2 is connected with a vacuum pumping pump 12, and the side wall of the fixed tank body 2 is provided with a vacuum pressure gauge 13 for testing the vacuum degree.
The fixed tank body 2 and the movable cylinder body 3 are made of high-strength, pressure-resistant and corrosion-resistant materials such as stainless steel and the like, so that the production safety is ensured. The fixed tank body 2 and the movable cylinder body 3 are both circular cylinder bodies, and the sealing piston 6 can be fixed on the outer wall of the fixed tank body 2 and also can be fixed on the inner wall of the movable cylinder body 3. The sealing piston 6 can be a circular ring-shaped piston or two circular ring-shaped pistons, so that the sealing performance is ensured, and the movable cylinder 3 can slide up and down.
The spin coating motor 4 is connected with a vertical rotating shaft 8, the rotating shaft 8 penetrates through the bottom of the fixed tank body 2 and extends into the movable cylinder body 3, and the rotary disc 5 is fixedly arranged on the rotating shaft 8;
the spin coating motor 4 is used for driving the turntable 5 to rotate according to a set rotating speed, and a good sealing property should be provided between the rotating shaft 8 and the bottom plate of the fixed tank body 2.
N feeding troughs 9 radially extending to the edge of the rotary table 5 are arranged on the rotary table 5;
a sealing end cover 10 for sealing the upper port of the movable cylinder 3 is arranged above the movable cylinder 3; a vertical positioning shaft 17 is arranged on the lower surface of the sealing end cover 10, a rotatable sleeve 18 is arranged outside the positioning shaft 17, n material pressing mechanisms are arranged on the outer wall of the sleeve 18, and each material pressing mechanism is positioned above a feeding groove 9;
n is an integer greater than or equal to 3;
the movable cylinder 3 is connected with a first lifting mechanism 7; first elevating system 7 is used for the drive activity barrel 3 reciprocates, specifically, when unloading from top to bottom, the drive of first elevating system 7 activity barrel 3 removes downwards, makes carousel 5 exposes outside the activity barrel 3, feed conveying mechanism 100 can shift to the glass substrate on the carousel 5, dropping liquid mechanism 300 can drip glue on the glass substrate, ejection of compact conveying mechanism 400 can take away the glass substrate after the spin-coating is accomplished. During vacuum spin coating, the first lifting mechanism 7 drives the movable cylinder 3 to move upwards, the turntable 5 is covered, so that the vacuum spin coating can 200 is sealed by matching with the sealing end cover 10, and then the vacuum can be pumped. The first lifting mechanism 7 may be an electric shock driven screw nut pair mechanism, and preferably, the first lifting mechanism 7 includes a plurality of vertical third hydraulic cylinders, specifically, an annular support plate may be welded to the lower end of the movable cylinder 3, and the upper ends of the third hydraulic cylinders are fixedly connected to the support plate.
The feeding transmission mechanism 100 and the discharging transmission mechanism 400 both comprise a conveyor belt 19, a material receiving plate 20 and a suction cup 21;
the material receiving plate 20 is horizontally arranged at one end of the conveyor belt 19 close to the vacuum spin coating tank 200, and a material conveying groove extending to the edge of the material receiving plate 20 along the radial direction of the turntable 5 is formed in the material receiving plate 20;
the sucking disc 21 is located in the conveying chute, the sucking disc 21 is installed on a second horizontal moving mechanism 22, and the second horizontal moving mechanism 22 is installed on a third lifting mechanism 23. The suction cup 21 is connected with a suction pump 25 through an air pipe. During the material loading, evenly put a plurality of glass substrates on 19, and the one side that glass substrate set up the blind hole up, move to 19 when glass substrate the conveyer belt is close to drop when the one end of vacuum spin-coating jar 200 on the flitch 20, be located simultaneously the top of sucking disc 21, at this moment, third elevating system 23 drive 21 rebound of sucking disc makes 21 support glass substrate, starts aspirator pump 25 utilizes suction to inhale glass substrate firmly, then starts second horizontal migration mechanism 22 drives sucking disc 21 and glass substrate move extremely in the vacuum spin-coating jar 200. The suction cup 21 is connected to the suction pump 25 by a hose.
In order to ensure that the sucker 21 can place the glass substrate on the turntable 5, n feeding grooves 9 radially extending to the edge of the turntable 5 are arranged on the turntable 5, and when the sucker 21 drives the glass substrate to horizontally move, the glass substrate should be slightly higher than the upper surface of the turntable 5. When the sucking disc 21 moves to the turntable 5, the sucking disc enters the feeding groove 9, moves to a proper position along the feeding groove 9, then closes the suction pump 25, the suction force to the glass substrate disappears, the third lifting mechanism 23 drives the sucking disc 21 to move downwards, the glass substrate can be placed on the turntable 5, and the feeding is completed.
The blanking process is the reverse of the feeding process, but the principle is the same. During blanking, after the glass substrate is moved to the material receiving plate 20, a material pushing mechanism may be disposed on one side of the material receiving plate 20 to push the glass substrate onto the conveyor belt 19, and then the glass substrate is conveyed to the next process.
The end cap 10 is used to cooperate with the movable cylinder 3 to seal the vacuum spin-coating can 200, and a sealing ring may be disposed on the edge of the end cap 10 to improve the sealing performance.
The sealing end cover 10 is connected with a second lifting mechanism 11; the second lifting mechanism 11 is used for driving the sealing end cover 10 to ascend and descend, the movable cylinder 3 is sealed during spin coating, and the movable cylinder 3 is opened after the spin coating is finished. In order to ensure that the glass substrate is stably fixed on the rotating disc 5 and prevent the glass substrate from moving when the rotating disc 5 rotates at a high speed, a positioning mechanism is required to fix the glass substrate, and because an electric clamping mechanism and the like are inconvenient to increase in the vacuum spin coating tank 200, a vertical positioning shaft 17 is arranged on the lower surface of the sealing end cover 10, a rotatable sleeve 18 is arranged outside the positioning shaft 17, n pressing mechanisms are arranged on the outer wall of the sleeve 18, and each pressing mechanism is positioned above one feeding groove 9. The sleeve 18 can be mounted on the positioning shaft 17 through a thrust ball bearing or a thrust roller bearing, and when the sealing end cover 10 is matched with the movable cylinder 3, the pressing mechanism can tightly press and fix the glass substrate on the turntable 5, so that the stability of the glass substrate is ensured.
Specifically, the swaging mechanism includes a vertical first connecting rod and an inclined second connecting rod, the top of the second connecting rod is fixedly connected with the sleeve 18, the bottom of the second connecting rod is fixedly connected with the upper end of the first connecting rod, and the lower end of the first connecting rod is provided with an annular pressing plate 28. The annular pressing plate 28 is in a circular ring shape or a rectangular ring shape, and can press the edge of the glass substrate, and in addition, the annular pressing plate 28 can also be shifted to form a plurality of vertical pressing columns, and the plurality of pressing columns are pressed on the edge of the glass substrate. The lengths of the first connecting rod and the second connecting rod are proper, so that the annular pressing plate 28 can just press the glass substrate when the sealing end cover 10 is matched with the movable cylinder 3.
In order to prevent the glass substrate from slipping when the glass substrate just falls on the rotary table 5, a positioning groove 29 is arranged on the rotary table 5 below each annular pressing plate 28, and the glass substrate is directly conveyed into the positioning groove 29 by the suction cup 21, so that the glass substrate can be prevented from moving, and the position accuracy of the glass substrate is improved.
The dropping mechanism 300 comprises a liquid storage tank 14, the liquid storage tank 14 is connected with a liquid outlet pipe 15, a dropping liquid pump 27 is arranged on the liquid outlet pipe 15, a dropping liquid head 16 is arranged at the end part of the liquid outlet pipe 15, and the dropping liquid head 16 is arranged on a first horizontal moving mechanism 26. The dripper 16 is disposed vertically or obliquely. The liquid storage pot 14 is used for saving high polymer solution, drip pump 27 is used for providing power for the dropping liquid, and drive high polymer solution gets into drip head 16 and follow drip head 16 discharges, drip pump 27 adopts current small-size liquid pump to control the dropping liquid volume at every turn. The liquid outlet pipe 15 is a flexible hose and can be produced in a bending mode to adapt to the movement of the liquid dropper 16.
Feed conveying mechanism 100 drip head 16 and ejection of compact conveying mechanism 400 centers on activity barrel 3 sets up, every of carousel 5 it is located when connecing the material station to go up silo 9, has two other and is located dripping liquid station and ejection of compact station respectively go up silo 9. The turntable 5 is provided with at least 3 feeding grooves 9, so that three glass substrates can be subjected to vacuum spin coating at each time, and the efficiency is high. The feeding position of the feeding transmission mechanism 100 is a material receiving station; the position for dripping the high polymer solution and the liquid dripping station correspond to the liquid dripping mechanism 300; the position of the discharging station, i.e., the position where the glass substrate is to be removed, corresponds to the position of the discharging transfer mechanism 400. Carousel 5 every go up silo 9 when being located and connect the material station, there are two other and are located dropping liquid station and ejection of compact station respectively go up silo 9, material loading, dropping liquid and ejection of compact can go on simultaneously promptly, improve production efficiency. More preferably, when one of the feeding troughs 9 of the rotating disc 5 is located at the receiving station, the other feeding trough 9 adjacent to the feeding trough 9 is located at the discharging station. After completing vacuum spin coating of a batch, the discharging transmission mechanism 400 moves the glass substrate on the feeding groove 9 positioned on the discharging station away, the feeding groove 9 is at an empty position, the spin coating motor 4 drives the turntable 5 to rotate for 360 °/n, so that the feeding groove 9 moves to the feeding station, at this time, a new glass substrate can be transferred to the feeding groove 9, and meanwhile, the discharging transmission mechanism 400 unloads the glass substrate at the other feeding groove 9, so that the efficiency can be fully improved.
The third lifting mechanism 23, the second horizontal moving mechanism 22, and the first horizontal moving mechanism 26 may be screw-nut mechanisms driven by a motor, and preferably, the third lifting mechanism 23 is a first hydraulic cylinder with a pair of piston rods facing upward, an installation plate 24 is disposed on the top of the first hydraulic cylinder, the second horizontal moving mechanism 22 is a second hydraulic cylinder, and the axial direction of the second hydraulic cylinder is the radial direction of the turntable 5.
In conclusion, the device can realize the vacuum spin coating process of the glass substrate in a full-automatic manner, has high production efficiency and is beneficial to realizing large-scale and batch production.
The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention, and various modifications and changes may be made by those skilled in the art. Any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included in the protection scope of the present invention.
Claims (9)
1. The vacuum spin coating device for the deep-hole side wall adhesion layer of the glass adapter plate is used for performing vacuum spin coating on the deep-hole side wall adhesion layer of the glass adapter plate; the method is characterized in that: comprises a feeding transmission mechanism (100), a vacuum spin coating tank (200), a dripping mechanism (300) and a discharging transmission mechanism (400);
the vacuum spin-coating tank (200) comprises a rack (1), a fixed tank body (2), a movable cylinder body (3), a spin-coating motor (4) and a turntable (5);
the fixed tank body (2) and the spin-coating motor (4) are fixed on the rack (1), the movable cylinder body (3) is sleeved on the upper part of the fixed tank body (2), and a sealing piston (6) is arranged between the movable cylinder body (3) and the fixed tank body (2); the fixed tank body (2) is connected with a vacuum pump (12), and the side wall of the fixed tank body (2) is provided with a vacuum pressure gauge (13);
the spin-coating motor (4) is connected with a vertical rotating shaft (8), the rotating shaft (8) penetrates through the bottom of the fixed tank body (2) and extends into the movable cylinder body (3), and the rotary disc (5) is fixedly arranged on the rotating shaft (8);
n feeding troughs (9) radially extending to the edge of the rotary table (5) are arranged on the rotary table (5);
a sealing end cover (10) used for sealing the upper port of the movable cylinder (3) is arranged above the movable cylinder (3); the lower surface of the sealing end cover (10) is provided with a vertical positioning shaft (17), a rotatable sleeve (18) is arranged outside the positioning shaft (17), the outer wall of the sleeve (18) is provided with n material pressing mechanisms, and each material pressing mechanism is positioned above one material feeding groove (9);
n is an integer greater than or equal to 3;
the liquid dropping mechanism (300) comprises a liquid storage tank (14), the liquid storage tank (14) is connected with a liquid outlet pipe (15), a liquid dropping pump (27) is arranged on the liquid outlet pipe (15), a liquid dropping head (16) is arranged at the end part of the liquid outlet pipe (15), and the liquid dropping head (16) is installed on a first horizontal moving mechanism (26);
the feeding transmission mechanism (100), the liquid dropping head (16) and the discharging transmission mechanism (400) are arranged around the movable barrel (3), and when each feeding groove (9) of the rotary disc (5) is positioned at a material receiving station, the other two feeding grooves (9) are respectively positioned at a liquid dropping station and a discharging station;
the sealing end cover (10) is connected with a second lifting mechanism (11); the second lifting mechanism (11) is used for driving the sealing end cover (10) to ascend so as to open the movable cylinder (3) after spin coating is finished, and is used for driving the sealing end cover (10) to descend so as to seal the movable cylinder (3) during spin coating;
the movable cylinder (3) is connected with a first lifting mechanism (7); during feeding and discharging, the first lifting mechanism (7) is used for driving the movable cylinder (3) to move downwards, so that the turntable (5) is exposed out of the movable cylinder (3), the feeding and conveying mechanism (100) can transfer the glass substrate to the turntable (5), the dripping mechanism (300) can drip glue on the glass substrate, and the discharging and conveying mechanism (400) can take away the spin-coated glass substrate; before vacuumizing, the first lifting mechanism (7) is used for driving the movable cylinder body (3) to move upwards to cover the turntable (5) so as to be matched with the sealing end cover (10) to seal the vacuum spin-coating tank (200).
2. The vacuum spin coating apparatus for deep hole sidewall adhesion layer of glass interposer of claim 1, wherein: the feeding conveying mechanism (100) and the discharging conveying mechanism (400) respectively comprise a conveying belt (19), a material receiving plate (20) and a sucking disc (21);
the material receiving plate (20) is horizontally arranged at one end, close to the vacuum spin coating tank (200), of the conveying belt (19), and a material conveying groove extending to the edge of the material receiving plate (20) along the radial direction of the rotary table (5) is formed in the material receiving plate (20);
the sucking disc (21) is positioned in the material conveying groove, the sucking disc (21) is installed on a second horizontal moving mechanism (22), and the second horizontal moving mechanism (22) is installed on a third lifting mechanism (23); the sucking disc (21) is connected with an air suction pump (25) through an air pipe.
3. The vacuum spin coating apparatus for deep hole sidewall adhesion layer of glass interposer of claim 2, wherein: the third lifting mechanism (23) is a first hydraulic cylinder with a pair of piston rods facing upwards, a mounting plate (24) is arranged at the top of the first hydraulic cylinder, the second horizontal moving mechanism (22) is a second hydraulic cylinder, and the axial direction of the second hydraulic cylinder is the radial direction of the rotary table (5).
4. The vacuum spin coating apparatus for deep hole sidewall adhesion layer of glass interposer of claim 1, wherein: the first lifting mechanism (7) comprises a plurality of vertical third hydraulic cylinders.
5. The vacuum spin coating apparatus for deep hole sidewall adhesion layer of glass interposer of claim 1, wherein: the first horizontal moving mechanism (26) is a fourth hydraulic cylinder which is horizontally arranged.
6. The vacuum spin coating apparatus for deep hole sidewall adhesion layer of glass interposer of claim 1, wherein: when one feeding groove (9) of the rotary disc (5) is positioned at a material receiving station, the other feeding groove (9) adjacent to the feeding groove (9) is positioned at a material discharging station.
7. The vacuum spin coating apparatus for deep hole sidewall adhesion layer of glass interposer of claim 1, wherein: the liquid dropping head (16) is arranged vertically or obliquely.
8. The vacuum spin coating apparatus for deep hole sidewall adhesion layer of glass interposer of claim 1, wherein: the material pressing mechanism comprises a vertical first connecting rod and an inclined second connecting rod, the top of the second connecting rod is fixedly connected with the sleeve (18), the bottom of the second connecting rod is fixedly connected with the upper end of the first connecting rod, and an annular pressing plate (28) is arranged at the lower end of the first connecting rod.
9. The vacuum spin coating apparatus for deep hole sidewall adhesion layer of glass interposer of claim 8, wherein: and a positioning groove (29) is arranged on the rotary table (5) below each annular pressure plate (28).
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| CN202010654983.6A CN111744732B (en) | 2020-07-09 | 2020-07-09 | Vacuum spin coating device for deep hole side wall adhesion layer of glass adapter plate |
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| CN113560122A (en) * | 2021-07-06 | 2021-10-29 | 北京理工大学 | TSV-oriented eccentric spin coating integrated device |
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| CN111744732A (en) | 2020-10-09 |
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