CN113560122A - TSV-oriented eccentric spin coating integrated device - Google Patents
TSV-oriented eccentric spin coating integrated device Download PDFInfo
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- CN113560122A CN113560122A CN202110760044.4A CN202110760044A CN113560122A CN 113560122 A CN113560122 A CN 113560122A CN 202110760044 A CN202110760044 A CN 202110760044A CN 113560122 A CN113560122 A CN 113560122A
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C5/00—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work
- B05C5/002—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the work consisting of separate articles
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C11/00—Component parts, details or accessories not specifically provided for in groups B05C1/00 - B05C9/00
- B05C11/10—Storage, supply or control of liquid or other fluent material; Recovery of excess liquid or other fluent material
- B05C11/1002—Means for controlling supply, i.e. flow or pressure, of liquid or other fluent material to the applying apparatus, e.g. valves
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C13/00—Means for manipulating or holding work, e.g. for separate articles
- B05C13/02—Means for manipulating or holding work, e.g. for separate articles for particular articles
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C15/00—Enclosures for apparatus; Booths
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C21/00—Accessories or implements for use in connection with applying liquids or other fluent materials to surfaces, not provided for in groups B05C1/00 - B05C19/00
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C9/00—Apparatus or plant for applying liquid or other fluent material to surfaces by means not covered by any preceding group, or in which the means of applying the liquid or other fluent material is not important
- B05C9/08—Apparatus or plant for applying liquid or other fluent material to surfaces by means not covered by any preceding group, or in which the means of applying the liquid or other fluent material is not important for applying liquid or other fluent material and performing an auxiliary operation
- B05C9/14—Apparatus or plant for applying liquid or other fluent material to surfaces by means not covered by any preceding group, or in which the means of applying the liquid or other fluent material is not important for applying liquid or other fluent material and performing an auxiliary operation the auxiliary operation involving heating or cooling
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
- H01L21/76898—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics formed through a semiconductor substrate
Abstract
The invention discloses a TSV (through silicon via) -oriented eccentric spin-coating integrated device, which is characterized in that an interlayer is arranged in a vacuum sealing box; the eccentric spin coating device comprises an eccentric rotary table and at least one pluggable tray; the eccentric turntable can be rotatably supported at the bottom of the vacuum sealing box around a vertical axis; the pluggable tray is clamped at the top of the eccentric turntable and can be eccentrically arranged relative to the eccentric turntable; the adjustable glue dripping pipe is positioned at the top of the eccentric turntable; the protective device is arranged on the top of the interlayer and is shielded around the eccentric turntable; the conveying device is positioned in the interlayer; the heating devices correspond to the conveying devices one by one and are positioned at the bottom of the conveying devices. The spin coating integrated device can complete different process steps in the same vacuum sealing box, and a sample wafer does not need to be transferred back and forth, so that the process complexity is greatly reduced, the process time is shortened, and the pollution of the sample is avoided.
Description
Technical Field
The invention relates to the technical field of microelectronics, in particular to a TSV (through silicon via) -oriented eccentric spin-coating integrated device.
Background
In the past decades, the scale of integrated circuits has been continuously developed following moore's law, and when the size of transistors is reduced to tens of nanometers or even to a few nanometers, and the feature size approaches the physical limit, it becomes very difficult to increase the integration level of integrated circuits by reducing the size of transistors.
The key technology of three-dimensional integration is Through-Silicon-Via (TSV) manufacturing, and the TSV realization depends on the processes of deep hole etching of a substrate, deep hole side wall deposition of a dielectric layer/a diffusion barrier layer/an adhesion layer/a seed layer, deep hole internal electroplating filling, surface copper chemical mechanical polishing and the like.
In order to ensure effective electrical insulation between the metal conductor and the substrate, the leakage current between the two needs to be minimized, which requires that the insulating dielectric layer must be able to achieve uniform coverage on the TSV sidewall in addition to having excellent insulating properties. Typically, the deposition of the insulating dielectric layer of the three-dimensional vertical interconnect structure is achieved by a thermal oxidation process or a Chemical Vapor Deposition (CVD) process that is compatible with a Complementary Metal Oxide Semiconductor (CMOS) process. In recent years, compared with traditional silicon dioxide, the high molecular polymer has the advantages of smaller relative dielectric constant, lower Young modulus, low cost and the like, and a uniform insulating dielectric layer can be formed on the side wall of the TSV through simple process modes such as spin coating and the like, so that the TSV has better electrical, mechanical and thermal properties, and more domestic and foreign researchers concentrate on using a low dielectric material to prepare a three-dimensional vertical interconnection structure insulating layer.
At present, the scheme of preparing the insulating medium layer with the three-dimensional vertical interconnection structure by using a high molecular polymer material adopts the traditional process equipment device, namely, a corresponding device is used in each step, such as a vacuum oven for heating, a concentric spin coater for spin coating and the like. The schemes require the sample to be transferred back and forth among a plurality of devices, so that the process complexity is high, the process time is long, the production efficiency is low, and the sample is very easy to be polluted in the transferring process.
Disclosure of Invention
In view of the above, the invention provides an eccentric spin-coating integrated device facing to a TSV, which can complete different process steps in the same vacuum sealing box without transferring a sample back and forth, thereby greatly reducing the process complexity, shortening the process time and avoiding the pollution of the sample.
The invention adopts the following specific technical scheme:
an eccentric spin-coating integrated device facing TSV comprises a vacuum sealing box, and an adjustable glue dripping pipe, a protection device, an eccentric spin-coating device, a conveying device and a heating device which are arranged in the vacuum sealing box;
the vacuum sealing box is internally provided with a chamber, the top of the vacuum sealing box is provided with an opening, a vacuum pressure gauge and a chamber cover for closing the opening, and the middle part of the chamber is provided with an interlayer;
the eccentric spin coating device comprises an eccentric rotary table and at least one pluggable tray; the eccentric rotary table can be rotatably supported at the bottom of the vacuum sealing box around a vertical axis; the pluggable tray is clamped at the top of the eccentric rotary table and can be eccentrically arranged relative to the eccentric rotary table;
the adjustable glue dripping pipe is positioned at the top of the eccentric turntable and is used for dripping glue to a workpiece at the top of the pluggable tray;
the protective device is arranged on the top of the interlayer and is shielded around the eccentric turntable;
the conveying device is positioned in the interlayer and used for conveying the workpieces between the pluggable tray and the heating device;
the heating devices correspond to the conveying devices one to one, are positioned at the bottoms of the conveying devices and are used for heating the workpieces.
Furthermore, a plurality of comb tooth structures are arranged at the top of the eccentric rotary table;
the bottom of the pluggable tray is provided with comb teeth which can be matched with the comb tooth structures in a plugging mode, and different eccentric positions can be obtained by plugging the comb teeth at different comb tooth structures.
Further, the bottom of the eccentric turntable is supported on the vacuum sealing box through a telescopic adjusting rotating shaft.
Furthermore, an air guide channel is arranged in the telescopic adjusting rotating shaft;
the eccentric turntable is provided with a plurality of vent holes communicated with the air guide channel and a sealing plug for blocking the vent holes;
the center position of the pluggable tray is provided with an air guide hole penetrating through the thickness of the pluggable tray, the top surface of the pluggable tray is provided with an air guide groove communicated with the air guide hole, and the air guide groove is used for adsorbing the workpiece;
when the pluggable tray is clamped at the top of the eccentric turntable, the air guide hole is communicated with one of the air holes.
Still further, the transfer device is a transfer arm that is liftable along a side wall of the vacuum seal box and is retractable in a horizontal direction.
Still further, the heating device is a heating table provided with a plurality of retractable support columns capable of extending out of the top surface thereof.
Furthermore, a vacuum connecting pipe for communicating the chamber and the vacuum pump is arranged at the top of the vacuum sealing box;
and a vacuum control valve is arranged in the vacuum connecting pipe on the outer side of the vacuum sealing box.
Furthermore, the side wall of the vacuum seal box is provided with an air inlet pipe for communicating the chamber with a nitrogen source;
and an air inlet control valve is arranged in the air inlet pipe on the outer side of the vacuum seal box.
Furthermore, one end of the adjustable glue dripping pipe extends out of the vacuum seal box, and a glue dripping pipe control valve is installed at the extending end of the adjustable glue dripping pipe.
Further, the protection device is an annular isolation plate placed on the top of the interlayer;
the axis line of the annular isolation plate extends along the vertical direction, and a spin coating space of the eccentric spin coating device is formed inside the annular isolation plate.
Has the advantages that:
1. the eccentric spin-coating integrated device is provided with an adjustable glue dripping tube, a protective device, an eccentric spin-coating device, a conveying device and a heating device in a vacuum sealing box, a sample can be dripped through the adjustable glue dripping tube, eccentric spin-coating of the sample can be realized through the eccentric spin-coating device, the sample coated with glue can be heated and cured through the heating device, and the sample can be transferred between the eccentric rotary table and the heating device through the conveying device, so that the eccentric spin-coating integrated device can sequentially complete a plurality of process steps such as glue dripping, vacuum treatment, spin coating, heating and curing and the like in the vacuum sealing box, the pollution of the sample caused by back-and-forth transfer is avoided, the process complexity is reduced, and the process time is shortened;
2. the pluggable tray is clamped at the top of the eccentric turntable and can be eccentrically arranged relative to the eccentric turntable, so that the pluggable tray can be plugged at different positions of the eccentric turntable through the plugging and matching comb tooth structure and the comb teeth to obtain different centrifugal forces so as to realize eccentric spin coating, the thickness of an insulating medium layer at the bottom of the TSV is reduced through the centrifugal forces, and the thickness uniformity of the insulating medium layer on the side wall of the TSV is improved;
3. because the protective device is shielded around the eccentric turntable, the protective device can receive glue solutions such as high molecular polymers thrown from the sample in the spin coating process, and the glue solutions can be prevented from polluting the inner cavity of the cavity vacuum seal box;
4. the vacuum connection pipe arranged at the top of the vacuum sealing box can be used for vacuumizing the vacuum sealing strength so as to realize vacuum treatment on the sample;
5. through setting up in the intake pipe and the nitrogen gas source intercommunication of vacuum seal box lateral wall, can guarantee the air circumstance among the sample processing for vacuum seal box internal filling nitrogen gas, avoid the glue solution to be polluted.
Drawings
FIG. 1 is a schematic structural diagram of an eccentric spin-coating integrated apparatus according to an embodiment of the present invention;
FIG. 2 is a schematic view of the working state of a sample heated and solidified by an eccentric spin-coating integrated device;
FIG. 3 is a schematic structural view of the eccentric turntable in FIG. 1;
FIG. 4 is a schematic structural view of the pluggable tray of FIG. 1;
fig. 5 is a top view of the pluggable tray of fig. 1.
Wherein, 1-a vacuum sealing box; 2, an air inlet pipe; 3-an air inlet control valve; 4-vacuum connecting pipe; 5-a vacuum control valve; 6-vacuum pressure gauge; 7-chamber lid; 8-a glue dripping pipe control valve; 9-adjustable drip hose; 10-a guard; 11-a pluggable tray; 11-1-gas-guide hole; 11-2-air guide groove; 11-3-comb teeth; 12-a comb tooth structure; 12-1-vent; 13-an eccentricable turntable; 14-a transfer device; 15-a retractable support post; 16-a heating station; 17-an interlayer; 18-a telescopic adjustable shaft; 19-sample.
Detailed Description
The invention is described in detail below by way of example with reference to the accompanying drawings.
As shown in fig. 1 and fig. 2, an embodiment of the present invention provides an eccentric spin-coating integrated device facing to TSV, which includes a vacuum sealing box 1, and an adjustable glue dripping tube 9, a protective device 10, an eccentric spin-coating device, a conveying device 14, and a heating device, which are disposed in the vacuum sealing box 1;
the vacuum sealing box 1 is internally provided with a chamber, the top of the chamber is provided with an opening, a vacuum pressure gauge 6 and a chamber cover 7 for closing the opening, and the middle part of the chamber is provided with an interlayer 17;
the eccentric spin coating device comprises an eccentric rotary table 13 and at least one pluggable tray 11; the eccentric rotary table 13 is rotatably supported on the bottom of the vacuum seal box 1 around a vertical axis; the bottom of the eccentric turntable 13 is supported on the vacuum sealing box 1 through a telescopic adjusting rotating shaft 18; the pluggable tray 11 is clamped at the top of the eccentric rotary table 13 and can be eccentrically arranged relative to the eccentric rotary table 13; as shown in fig. 3 and 4, the top of the eccentric turntable 13 is provided with a plurality of comb tooth structures 12, and the plurality of comb tooth structures 12 may form a linear arrangement structure shown in fig. 3 or a cross arrangement structure; the bottom of the pluggable tray 11 is provided with comb teeth 11-3 which can be in plug fit with the comb tooth structures 12, and different eccentric positions can be obtained by plugging the comb teeth 11-3 at different comb tooth structures 12; the bottom of the pluggable tray 11 shown in the structure of fig. 4 is provided with four comb teeth 11-3 distributed in a matrix manner, and the four comb teeth 11-3 are in plug-in fit with a comb tooth structure 12 at the top of an eccentric rotary table 13, so that the eccentric rotary table 13 can be stably and firmly fixed at the top of the eccentric rotary table 13, and the pluggable tray 11 can be ensured to stably and eccentrically rotate in the rotating process of the eccentric rotary table 13, so that a sample 19 adsorbed at the top of the pluggable tray 11 can be eccentrically spin-coated;
the adjustable glue dripping tube 9 is positioned at the top of the eccentric rotary table 13 and is used for dripping glue to a workpiece at the top of the pluggable tray 11; as shown in the structure of fig. 1 and 2, one end of the adjustable drip hose 9 extends out of the vacuum seal box 1, and a drip hose control valve 8 is arranged at the extended end of the adjustable drip hose 9;
the protective device 10 is arranged on the top of the interlayer 17 and is shielded around the eccentric rotary table 13; the guard 10 may be an annular spacer plate placed on top of the interlayer 17; the axial lead of the annular isolation plate extends along the vertical direction, and a spin coating space of the eccentric spin coating device is formed inside the annular isolation plate;
a transfer device 14 is located within the interlayer 17 for transferring workpieces between the pluggable tray 11 and the heating device; the conveying device 14 can lift along the side wall of the vacuum sealing box 1 and can stretch along the horizontal direction;
the heating devices correspond to the conveying devices 14 one by one and are positioned at the bottom of the conveying devices 14 and used for heating the workpieces; the heating means may be a heating stage 16, and the heating stage 16 is provided with a plurality of retractable support posts 15 capable of extending above its top surface.
The eccentric spin-coating integrated device is characterized in that an adjustable glue dripping tube 9, a protection device 10, an eccentric spin-coating device, a conveying device 14 and a heating device are arranged in a vacuum sealing box 1, glue dripping can be performed on a sample 19 through the adjustable glue dripping tube 9, eccentric spin-coating of the sample 19 can be realized through the eccentric spin-coating device, the glued sample 19 can be heated and cured through the heating device, and the transfer of the sample 19 between an eccentric rotary table 13 and the heating device is realized through the conveying device 14, so that the eccentric spin-coating integrated device can sequentially complete a plurality of process steps such as glue dripping, vacuum treatment, spin coating, heating and curing and the like in the vacuum sealing box 1, the pollution of the sample 19 caused by back-and-forth transfer is avoided, the process complexity is reduced, and the process time is shortened;
the pluggable tray 11 can be detachably clamped at the top of the eccentric rotary table 13, and the pluggable tray 11 can be plugged at different positions of the eccentric rotary table 13 through the plugging and matching comb structures 12 and the comb teeth 11-3 to obtain different centrifugal forces so as to realize eccentric spin coating, reduce the thickness of an insulating medium layer at the bottom of the TSV and increase the thickness uniformity of the insulating medium layer on the side wall of the TSV;
because the protective device 10 is shielded around the eccentric rotary table 13, the protective device 10 can receive the glue solution such as high molecular polymer thrown off from the sample 19 in the spin coating process, and the glue solution is prevented from polluting the inner cavity of the vacuum chamber sealing box 1.
In one embodiment, the retractable adjustment shaft 18 has an air guide channel (not shown); the eccentrically rotatable table 13 is provided with a plurality of ventilation holes 12-1 communicating with the air guide passage and a sealing plug (not shown in the drawings) for blocking the plurality of ventilation holes 12-1; the center position of the pluggable tray 11 is provided with an air guide hole 11-1 penetrating through the thickness of the pluggable tray, the top surface of the pluggable tray 11 is provided with an air guide groove 11-2 communicated with the air guide hole 11-1, and the air guide groove 11-2 is used for adsorbing a workpiece; when the pluggable tray 11 is clamped at the top of the eccentric rotary table 13, the air guide hole 11-1 is communicated with one air vent 12-1, and the other air vents 12-1 are plugged through sealing plugs, so that the adsorption effect of the pluggable tray 11 is improved.
In order to realize a vacuum environment in the vacuum sealed box 1, as shown in the structure of fig. 1 and 2, a vacuum connecting pipe 4 for communicating the chamber and the vacuum pump is arranged at the top of the vacuum sealed box 1; a vacuum control valve 5 is installed in the vacuum connection pipe 4 outside the vacuum hermetic container 1. The vacuum connection pipe 4 arranged at the top of the vacuum sealing box 1 can vacuumize the vacuum seal to realize the vacuum treatment of the sample 19.
Furthermore, the side wall of the vacuum seal box 1 is provided with an air inlet pipe 2 for communicating the chamber and a nitrogen source; an intake control valve 3 is installed in the intake pipe 2 outside the vacuum hermetic chamber 1. Through setting up in the intake pipe 2 and the nitrogen gas source intercommunication of vacuum seal case 1 lateral wall, can be for filling nitrogen gas in vacuum seal case 1, guarantee the air circumstance in the 19 processing courses of sample, avoid the glue solution to be polluted.
The specific working process of the eccentric spin-coating integrated device is as follows:
firstly, placing a sample 19 with etched TSV on a pluggable tray 11, then closing a chamber cover 7, and at the moment, closing a vacuum control valve 5, an air inlet control valve 3 and a rubber dropping tube control valve 8 of a vacuum connecting tube 4;
secondly, the rubber dripping tube control valve 8 is opened, and rubber dripping is carried out on the sample 19, such as: dropping high molecular polymers, wherein all the high molecular polymers can completely cover the sample 19 through the adjustable dropping hose 9, and then closing the dropping hose control valve 8;
then, the sample 19 is subjected to vacuum treatment and eccentric spin coating; opening a vacuum control valve 5 of a vacuum connecting pipe 4, vacuumizing a cavity of a vacuum seal box 1, observing the pressure condition in the cavity in real time by referring to a vacuum pressure gauge 6, and observing a large amount of bubbles on a sample 19 in the whole vacuumizing process, and then slowly disappearing; after the vacuum treatment is finished, closing the vacuum control valve 5; opening the air inlet control valve 3, introducing nitrogen into the chamber until the normal pressure is recovered, and closing the air inlet control valve 3; opening an external air pump, enabling an air guide channel in a telescopic adjusting rotating shaft, an air vent 12-1 of an eccentric rotary table 13, an air guide hole 11-1 of a pluggable tray 11 and an air guide groove 11-2 to be in a communicated state, adsorbing a sample 19 on the pluggable tray 11, setting the rotating speed of the eccentric rotary table 13, carrying out spin coating on the sample 19, throwing out a high-molecular polymer on the sample 19 in the spin coating process, falling onto an annular isolation plate to prevent the sample from polluting a cavity, and closing the external air pump after the spin coating process is finished;
then, after the spin coating is finished, the telescopic adjusting rotating shaft 18 is adjusted to enable the eccentric rotary table 13 to descend to a position which is flush with the telescopic lifting conveying device 14, at the moment, the conveying device 14 extends out to lift the sample 19, then contracts into the interlayer 17, descends and transfers the sample 19 to the telescopic supporting column 15 on the heating table 16; setting the temperature of the heating table 16, enabling the telescopic supporting column 15 to be contracted into the heating table 16, enabling the sample 19 to be in complete contact with the heating table 16, heating and curing the sample 19, and filling nitrogen into the cavity in the whole process;
finally, after the heating and curing, the heating table 16 stops heating, the telescopic supporting columns 15 extend out, the sample 19 is lifted, the telescopic lifting conveying arms are adjusted to transfer the cured sample 19 to the outside of the interlayer 17, and the chamber cover 7 is opened to take out the sample 19; meanwhile, the annular isolation plate can be taken out, and the high molecular polymer which is thrown out due to spin coating and attached to the annular isolation plate is cleaned.
And ending the whole process of depositing the insulating medium layer on the side wall of the TSV. The whole process can be carried out in the vacuum sealing box 1, so that the pollution of the sample 19 is avoided, the process complexity is reduced, the process time is shortened, and the process effect is ensured.
In summary, the above description is only a preferred embodiment of the present invention, and is not intended to limit the scope of the present invention. Any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included in the protection scope of the present invention.
Claims (10)
1. The eccentric spin coating integrated device facing the TSV is characterized by comprising a vacuum sealing box (1), and an adjustable glue dripping pipe (9), a protection device (10), an eccentric spin coating device, a conveying device (14) and a heating device which are arranged in the vacuum sealing box (1);
the vacuum sealing box (1) is internally provided with a chamber, the top of the vacuum sealing box is provided with an opening, a vacuum pressure gauge (6) and a chamber cover (7) for closing the opening, and the middle part of the chamber is provided with an interlayer (17);
the eccentric spin coating device comprises an eccentric rotary table (13) and at least one pluggable tray (11); the eccentric rotary table (13) can be rotatably supported at the bottom of the vacuum sealing box (1) around a vertical axis; the pluggable tray (11) is clamped at the top of the eccentric rotary table (13) and can be eccentrically arranged relative to the eccentric rotary table (13);
the adjustable glue dripping tube (9) is positioned at the top of the eccentric rotary table (13) and is used for dripping glue to a sample (19) at the top of the pluggable tray (11);
the protective device (10) is arranged on the top of the interlayer (17) and is shielded around the eccentric rotary table (13);
said transfer means (14) being located within said sandwich (17) for handling said sample (19) between said pluggable tray (11) and said heating means;
the heating devices correspond to the conveying devices (14) one by one and are positioned at the bottom of the conveying devices (14) and used for heating the samples (19).
2. The eccentric spin-coating integrated apparatus according to claim 1, wherein the top of the eccentric turntable (13) is provided with a plurality of comb structures (12);
the bottom of the pluggable tray (11) is provided with comb teeth (11-3) which can be in plug-in fit with the comb tooth structures (12), and different eccentric positions can be obtained by plugging the comb teeth (11-3) at different comb tooth structures (12).
3. The eccentric spin-coating integrated apparatus according to claim 2, wherein the bottom of the eccentric turntable (13) is supported to the vacuum sealing chamber (1) by a telescopic adjusting shaft (18).
4. The eccentric spin-coating integrated apparatus according to claim 3, wherein the retractable adjustment shaft (18) has an air guide channel therein;
the eccentric rotary table (13) is provided with a plurality of vent holes (12-1) communicated with the air guide channel and sealing plugs for blocking the vent holes;
an air guide hole (11-1) penetrating through the thickness of the pluggable tray (11) is formed in the center of the pluggable tray, an air guide groove (11-2) communicated with the air guide hole (11-1) is formed in the top surface of the pluggable tray (11), and the air guide groove (11-2) is used for adsorbing the sample (19);
when the pluggable tray (11) is clamped at the top of the eccentric rotary table (13), the air guide hole (11-1) is communicated with one air vent hole (12-1).
5. The eccentric spin-coating integrated apparatus according to any one of claims 1 to 4, wherein the transfer device (14) is a transfer arm that can be lifted and lowered along the side wall of the vacuum sealing chamber (1) and is retractable in the horizontal direction.
6. Integrated eccentric spin-coating apparatus according to any one of claims 1 to 4, wherein the heating means is a heating table (16) provided with a plurality of retractable support columns (15) able to extend above its top surface.
7. The eccentric spin-coating integrated apparatus according to any one of claims 1 to 4, wherein the top of the vacuum sealing box (1) is provided with a vacuum connection pipe (4) for communicating the chamber and a vacuum pump;
and a vacuum control valve (5) is arranged in the vacuum connecting pipe (4) at the outer side of the vacuum sealing box (1).
8. The eccentric spin-coating integrated apparatus according to any one of claims 1 to 4, wherein the side wall of the vacuum hermetic chamber (1) is provided with an inlet pipe (2) for communicating the chamber with a nitrogen gas source;
an air inlet control valve (3) is arranged in the air inlet pipe (2) on the outer side of the vacuum seal box (1).
9. The eccentric spin-coating integrated apparatus according to any one of claims 1 to 4, wherein one end of the adjustable drip tube (9) extends out of the vacuum sealing box (1), and a drip tube control valve (8) is installed at the extended end of the adjustable drip tube (9).
10. The eccentrical spin-coating integrated device according to any of claims 1 to 4, characterized in that the shielding device (10) is an annular spacer plate placed on top of the interlayer (17);
the axis line of the annular isolation plate extends along the vertical direction, and a spin coating space of the eccentric spin coating device is formed inside the annular isolation plate.
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| Application Number | Priority Date | Filing Date | Title |
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| CN202110760044.4A CN113560122A (en) | 2021-07-06 | 2021-07-06 | TSV-oriented eccentric spin coating integrated device |
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| Application Number | Priority Date | Filing Date | Title |
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| CN202110760044.4A CN113560122A (en) | 2021-07-06 | 2021-07-06 | TSV-oriented eccentric spin coating integrated device |
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| CN113560122A true CN113560122A (en) | 2021-10-29 |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114904730A (en) * | 2022-03-21 | 2022-08-16 | 中国电子科技集团公司第十一研究所 | Small-size substrate gluing plate and small-size substrate gluing device |
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| CN213583727U (en) * | 2020-10-17 | 2021-06-29 | 山东科技大学 | Conveyer with vacuum adsorption structure |
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| CN114904730A (en) * | 2022-03-21 | 2022-08-16 | 中国电子科技集团公司第十一研究所 | Small-size substrate gluing plate and small-size substrate gluing device |
| CN114904730B (en) * | 2022-03-21 | 2023-03-03 | 中国电子科技集团公司第十一研究所 | Small-size substrate gluing disc and small-size substrate gluing device |
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Application publication date: 20211029 |