CN111077437B - 一种辅助集成电路近场扫描仪精准定位的装置与方法 - Google Patents
一种辅助集成电路近场扫描仪精准定位的装置与方法 Download PDFInfo
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- CN111077437B CN111077437B CN202010050533.6A CN202010050533A CN111077437B CN 111077437 B CN111077437 B CN 111077437B CN 202010050533 A CN202010050533 A CN 202010050533A CN 111077437 B CN111077437 B CN 111077437B
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- 238000000034 method Methods 0.000 title claims abstract description 14
- 239000000523 sample Substances 0.000 claims abstract description 111
- 238000001514 detection method Methods 0.000 claims abstract description 8
- 238000006073 displacement reaction Methods 0.000 claims abstract description 5
- 238000012360 testing method Methods 0.000 claims description 31
- 230000005684 electric field Effects 0.000 claims description 7
- 230000003993 interaction Effects 0.000 claims 1
- 238000003384 imaging method Methods 0.000 description 4
- 230000005672 electromagnetic field Effects 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 238000013461 design Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 230000002452 interceptive effect Effects 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 238000010998 test method Methods 0.000 description 1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/2851—Testing of integrated circuits [IC]
- G01R31/2886—Features relating to contacting the IC under test, e.g. probe heads; chucks
- G01R31/2887—Features relating to contacting the IC under test, e.g. probe heads; chucks involving moving the probe head or the IC under test; docking stations
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R29/00—Arrangements for measuring or indicating electric quantities not covered by groups G01R19/00 - G01R27/00
- G01R29/08—Measuring electromagnetic field characteristics
- G01R29/0807—Measuring electromagnetic field characteristics characterised by the application
- G01R29/0814—Field measurements related to measuring influence on or from apparatus, components or humans, e.g. in ESD, EMI, EMC, EMP testing, measuring radiation leakage; detecting presence of micro- or radiowave emitters; dosimetry; testing shielding; measurements related to lightning
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R29/00—Arrangements for measuring or indicating electric quantities not covered by groups G01R19/00 - G01R27/00
- G01R29/08—Measuring electromagnetic field characteristics
- G01R29/0864—Measuring electromagnetic field characteristics characterised by constructional or functional features
- G01R29/0871—Complete apparatus or systems; circuits, e.g. receivers or amplifiers
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- General Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- General Engineering & Computer Science (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Tests Of Electronic Circuits (AREA)
- Measuring Leads Or Probes (AREA)
Abstract
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Claims (6)
Priority Applications (1)
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CN202010050533.6A CN111077437B (zh) | 2020-01-17 | 2020-01-17 | 一种辅助集成电路近场扫描仪精准定位的装置与方法 |
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CN202010050533.6A CN111077437B (zh) | 2020-01-17 | 2020-01-17 | 一种辅助集成电路近场扫描仪精准定位的装置与方法 |
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CN111077437A CN111077437A (zh) | 2020-04-28 |
CN111077437B true CN111077437B (zh) | 2022-03-18 |
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CN202010050533.6A Active CN111077437B (zh) | 2020-01-17 | 2020-01-17 | 一种辅助集成电路近场扫描仪精准定位的装置与方法 |
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Families Citing this family (2)
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CN114019343B (zh) * | 2021-09-16 | 2024-05-14 | 中国船舶重工集团公司第七0九研究所 | 一种大规模集成电路测试***的校准转接板定位装置 |
CN114217143A (zh) * | 2022-02-22 | 2022-03-22 | 天津鲲鹏信息技术有限公司 | 一种辅助集成电路近场扫描仪精准定位的装置和方法 |
Citations (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2009025284A (ja) * | 2007-07-17 | 2009-02-05 | Suss Microtec Test Systems Gmbh | プローブカードを位置決めする方法と配列装備 |
CN102305588A (zh) * | 2011-07-18 | 2012-01-04 | 苏州天准精密技术有限公司 | 一种双激光复合式影像测量*** |
CN102859414A (zh) * | 2010-02-19 | 2013-01-02 | 金佑濬 | 形成倾斜光路的光学***及其方法 |
CN103487556A (zh) * | 2013-10-07 | 2014-01-01 | 复旦大学 | 一种超导相显微*** |
CN103941106A (zh) * | 2014-04-29 | 2014-07-23 | 工业和信息化部电子第五研究所 | 电磁场近场扫描装置与扫描方法 |
CN204679246U (zh) * | 2015-01-21 | 2015-09-30 | 中国科学院上海技术物理研究所 | 双光路切换互参考高精度aotf性能测试装置 |
CN104983394A (zh) * | 2015-06-30 | 2015-10-21 | 上海博览光电仪器有限公司 | 一种裂隙灯的刀架及光源结构 |
CN105423947A (zh) * | 2015-12-10 | 2016-03-23 | 常州雷欧仪器有限公司 | 一种光学三维成像装置及其成像方法 |
CN208270841U (zh) * | 2018-06-08 | 2018-12-21 | 成都莱普科技有限公司 | 一种能360度观察的显微镜机构 |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3073268B2 (ja) * | 1991-06-28 | 2000-08-07 | 松下電器産業株式会社 | 微小変位検出方法 |
US7298480B2 (en) * | 2005-12-23 | 2007-11-20 | Ecole Polytechnique | Broadband ellipsometer / polarimeter system |
CN2916659Y (zh) * | 2006-06-19 | 2007-06-27 | 中国科学院上海光学精密机械研究所 | 模块化扫描探针显微镜 |
JP5172141B2 (ja) * | 2006-12-26 | 2013-03-27 | 株式会社ニデック | 眼軸長測定装置 |
CN103913830B (zh) * | 2014-03-16 | 2016-08-31 | 陈琳琳 | 盒式显微镜 |
KR101738257B1 (ko) * | 2015-09-11 | 2017-05-30 | 안동대학교 산학협력단 | 프로브 회전형 원자현미경의 프로브 정렬도 측정 방법 |
CN205192445U (zh) * | 2015-12-10 | 2016-04-27 | 常州雷欧仪器有限公司 | 一种光学三维成像装置 |
CN107714082A (zh) * | 2017-09-04 | 2018-02-23 | 北京航空航天大学 | 一种基于光学定位的超声探头标定装置及方法 |
CN110888220A (zh) * | 2019-11-11 | 2020-03-17 | 中国科学院上海技术物理研究所 | 一种精确调整转折反射镜安装位置的方法 |
-
2020
- 2020-01-17 CN CN202010050533.6A patent/CN111077437B/zh active Active
Patent Citations (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2009025284A (ja) * | 2007-07-17 | 2009-02-05 | Suss Microtec Test Systems Gmbh | プローブカードを位置決めする方法と配列装備 |
CN102859414A (zh) * | 2010-02-19 | 2013-01-02 | 金佑濬 | 形成倾斜光路的光学***及其方法 |
CN102305588A (zh) * | 2011-07-18 | 2012-01-04 | 苏州天准精密技术有限公司 | 一种双激光复合式影像测量*** |
CN103487556A (zh) * | 2013-10-07 | 2014-01-01 | 复旦大学 | 一种超导相显微*** |
CN103941106A (zh) * | 2014-04-29 | 2014-07-23 | 工业和信息化部电子第五研究所 | 电磁场近场扫描装置与扫描方法 |
CN204679246U (zh) * | 2015-01-21 | 2015-09-30 | 中国科学院上海技术物理研究所 | 双光路切换互参考高精度aotf性能测试装置 |
CN104983394A (zh) * | 2015-06-30 | 2015-10-21 | 上海博览光电仪器有限公司 | 一种裂隙灯的刀架及光源结构 |
CN105423947A (zh) * | 2015-12-10 | 2016-03-23 | 常州雷欧仪器有限公司 | 一种光学三维成像装置及其成像方法 |
CN208270841U (zh) * | 2018-06-08 | 2018-12-21 | 成都莱普科技有限公司 | 一种能360度观察的显微镜机构 |
Non-Patent Citations (3)
Title |
---|
Shape description of biological objects via stereo light microscopy;N.H. Kim et al;《IEEE Transactions on Systems, Man, and Cybernetics》;19900430;全文 * |
光学显微三维成像特性的实验研究;张平等;《华中科技大学学报》;20010630;全文 * |
顾书龙,张宏彬 .扫描近场光学显微镜的技术与应用.《阜阳师范学院学报(自然科学版)》.2003,20-24. * |
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