CN110567877A - Laser film internal consumption instrument and material internal consumption detection method - Google Patents
Laser film internal consumption instrument and material internal consumption detection method Download PDFInfo
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Abstract
The invention discloses a laser film internal consumption instrument which comprises a laser displacement sensor, a bottom plate, a lower cover body fixed on the bottom plate and an upper cover body matched with the lower cover body, wherein a cavity is formed among the bottom plate, the lower cover body and the upper cover body, a sample fixing assembly, an excitation electrode, a heater and a shielding cover are arranged in the cavity, an optical window corresponding to the laser displacement sensor is arranged on the lower cover body, the heater is positioned in the shielding cover, the shielding cover is used for covering the sample and the excitation electrode, a through hole is formed in the shielding cover corresponding to the laser displacement sensor, the excitation electrode faces towards the through hole, and the sample is positioned between the through hole and the excitation electrode. The laser film internal friction instrument has the advantages of high measurement precision, wide working frequency, non-contact measurement for obtaining material defect information and the like, and is very suitable for representing irradiation defects.
Description
Technical Field
The invention particularly relates to a laser film internal friction tester for detecting material defects in a non-contact manner and a method for detecting by using the laser film internal friction tester.
Background
the internal friction testing technology is an advanced nondestructive testing technology, is sensitive to the microstructure of a metal material, and is applied to microstructure research of nuclear structural material irradiation defects and nondestructive testing of material aging. The measurement of internal consumption spectrum is distinguished from other nondestructive detection methods in that the frequency range completely covers the intrinsic frequency range of the defect slow transition process, the applied stimulation signal is alternating stress (the amplitude of the applied stimulation signal is far smaller than the yield stress of a material), the reaction signal is strain, the method is suitable for any object capable of transmitting elastic stress waves, and the method is proved to be one of the most effective means for researching the defect relaxation process and microstructure change.
The internal friction refers to the ability of the material to consume kinetic energy rapidly and slowly under the condition isolated from the outside, and its physical nature is the dissipation of mechanical vibration energy caused by internal defects and atomic motion of the material, so that the microscopic defect information of the material can be reflected by measuring the internal friction and the elastic modulus change of the material under certain external conditions (such as temperature, frequency, amplitude, etc.), and the microscopic defect parameters such as defect concentration and distribution, defect diffusion activation energy, phase change dynamics, etc. are obtained, therefore, the internal friction technology is also often called as internal friction spectrum or mechanical spectrum. The measuring frequency range of the internal consumption spectrum is 0.001Hz to kHz, the intrinsic frequency range of the process of defect slow transition (such as the transition process of point defects between adjacent equilibrium positions) is completely covered, the added stimulation signal is alternating stress (the amplitude of the alternating stress is far less than the yield stress of a material), and the reaction signal is strain, so the method is suitable for any object capable of transmitting elastic stress waves and is proved to be one of the most effective nondestructive detection means for researching the defect relaxation process and microstructure change.
Currently, the internal friction measurement method mainly adopts two modes of forced vibration and free damping. When internal consumption measurement is carried out in a forced vibration mode, a sine wave signal sigma generated by the ultralow frequency signal generator is sigma-sigma0sin and omega t are amplified and sent to a driving coil to drive a swing rod attached with a permanent magnet to twist so as to enable the swing rod to perform torsional vibration according to a sine wave rule, and a strain signal can be expressed as epsilon ═ epsilon0sin (ω t- φ) is compared with the excitation sine signal to obtain the phase angle difference φ of the two signals, and the corresponding tan φ is the internal loss value Q-1。
In the free attenuation mode, the internal loss measurement principle is as follows: the computer gives a command to twist the sample to a set maximum amplitude, then the sample makes a free damping movement, and the vibration damping curve is measured. The value of δ can be calculated using the amplitudes of a plurality of vibrations under the condition that the internal loss is independent of the amplitude, i.e., the value of δ can be calculated using the relation (1). A. thenAnd An+mAre respectively nand the amplitude of the (n + m) th vibration.
Thus, from the free decay curve of the sample, according to the internal consumptionThe internal consumption value of the sample can be obtained by the calculation formula (2).
The internal friction measuring technology does not leave two measuring modes of forced vibration and free damping, and the development of the current internal friction testing equipment mainly aims at meeting the requirements of samples with different properties and shapes and sizes. Relevant researchers at home and abroad continuously explore through long-term practice, and a series of internal consumption measuring technologies with both scientificity and practicability are developed at present. The method mainly comprises an electrostatic excitation vibration method, an optical microscopic amplification detection strain amplitude, an atomic force microscope cantilever beam detection strain amplitude and the like, and the following problems exist when the technology is used for detecting the irradiation damage surface defects of the nuclear power material: (1) the capacitive sensor has insufficient measurement accuracy. The laser displacement sensor sold in the market can not be used at high and low temperatures, or the amplitude of the sample is required to be as large as possible, so that the requirement of micro-amplitude detection can not be met. (2) Changing the measurement frequency is cumbersome. In order to improve the measurement accuracy, the thin film internal friction instrument adopts a cantilever beam sample clamping mode to force the sample to vibrate at a resonance frequency to realize maximum amplitude, but the variable frequency measurement needs to change the clamping length, which cannot be realized in the single variable temperature measurement. (3) The circuit design is complex. The weak vibration of a sample under the resonance frequency is measured, the circuit design adopts a high-frequency carrier to obtain a sample vibration capacitance change signal, the interference of various distributed capacitances to the high-frequency signal is required to be considered in the circuit design, and the stability and the operability of the circuit are also reduced. (4) The temperature-changing sample deforms, so that the stable operation cannot be realized. The sample is deformed due to the temperature rise in the test process, and the excitation electrode or the collection electrode is close to the far end of the sample, so that the excitation electrode or the collection electrode can be touched to cause that the measurement cannot be carried out. The existence of the problems can potentially influence the accuracy of the quantitative data of the internal consumption physical parameters.
in the prior art, a laser thin film internal consumption instrument which can be used for measuring the elastic modulus, the elastic modulus temperature coefficient, the damping and the like of an oxide film on the surface of a fuel cladding or an ion irradiation material and for material defect detection, including defect types, concentration, evolution mechanism and other researches, does not exist.
disclosure of Invention
in view of the above, in order to overcome the defects of the prior art, the present invention aims to provide a laser thin film internal consumption instrument.
In order to achieve the purpose, the invention adopts the following technical scheme:
The utility model provides a laser film internal consumption appearance, includes laser displacement sensor, bottom plate, fixes lower cover body on the bottom plate and with cover body matched with last cover body down, form the cavity between bottom plate, lower cover body and the last cover body, be provided with the fixed subassembly of sample, arouse electrode, heater and shield cover in the cavity, set up on the lower cover body with the optical window that laser displacement sensor corresponds, the heater is located in the shield cover, the shield cover is used for covering sample and arouse the electrode, the shield cover corresponds laser displacement sensor has seted up the perforating hole, arouse the electrode orientation the perforating hole, the sample is located between perforating hole and the arouse electrode. The exciting electrode is used for driving the sample to vibrate, the sample is forced to vibrate under specific frequency by loading direct-current bias voltage and variable-frequency alternating voltage between the sample to be tested and the exciting electrode, a laser displacement sensor is used for collecting a sample vibration signal, and the waveform of the sample vibration is obtained, so that the parameters of the material such as damping, modulus and the like are obtained, and further the information of the material such as microscopic defects and the like is obtained.
Preferably, an excitation electrode moving assembly is further arranged in the cavity and comprises a sliding block, a lead screw and a motor, the lead screw is driven to move, the motor drives the lead screw to rotate, the excitation electrode is fixed on the sliding block through a fixing plate, and the motor is fixed on the bottom plate. The moving assembly drives the excitation electrode to move, so that the distance between the excitation electrode and the sample to be detected is adjusted.
more preferably, a partition board is arranged in the cavity and fixed on the bottom board through a fixing column, the shielding cover is fixed on the partition board, and a sliding groove for the fixed board to move is formed in the partition board. The exciting electrode moving assembly is positioned below the partition plate, and the shielding cover, the heater and the sample fixing assembly are positioned above the partition plate.
more preferably, an insulating ring is disposed between the excitation electrode and the fixing plate.
Preferably, the sample fixing assembly comprises a sample chuck, a support plate connected with the sample chuck and a lifting mechanism driving the support plate to move up and down, and the sample is fixed at the lower end of the sample chuck through a chuck screw. The lifting mechanism drives the supporting plate to move so as to drive the sample to be tested to move up and down, and the position of the sample to be tested is adjusted. In some embodiments, the sample chuck is further provided with a waist-round hole extending along the up-and-down direction of the sample chuck so as to adjust the position of the sample chuck fixed on the support plate.
Preferably, the heaters are uniformly distributed on the inner side of the shielding case, and the heaters extend along the axial direction of the shielding case. The heater is the bar-shaped, and it evenly distributed on the shield cover inner wall for it is more even to heat up, and for the irradiation heating, and rate of heating is fast. The shield is used to prevent heat from radiating out of the device. In some embodiments, the laser thin film internal consumption instrument can also be added with a water cooling system to control the temperature more accurately.
Preferably, the laser film internal friction instrument further comprises a lifting assembly for driving the upper cover body and the lower cover body to be separated or attached and a vacuum pump set for vacuumizing the cavity.
more preferably, the bottom plate is further provided with a vacuum valve for connecting with the vacuum pump set; and the bottom plate is also provided with a damping component. The shock absorbing assembly may be disposed under the base plate and may be disposed between the cover and the base plate.
Preferably, the laser displacement sensor is fixed on the bottom plate, and the laser displacement sensor, the optical window, the through hole and the excitation electrode are located on the same axis, so that a laser beam of the laser displacement sensor can strike a sample to be measured.
The sample to be tested is clamped and fixed in the vacuum cavity through the sample chuck, the excitation electrode is installed on the opposite side of the sample and used for driving the sample to vibrate, the heating system and the water cooling system surround the sample to provide high and low temperature environment, in order to prevent the influence of air damping on the high-frequency vibration amplitude and frequency of the sample, the vacuum machine set is used for extracting high vacuum from the vacuum cavity during testing, the whole vacuum cavity is isolated from the ground, and the interference of mechanical vibration is eliminated.
The invention also provides a detection method using the laser film internal friction instrument, which comprises the following steps:
S1, opening a vacuum cavity: releasing vacuum, and when the vacuum state in the cavity is changed into an atmospheric normal pressure state, starting the lifting assembly to push the upper cover body to move upwards and open the cavity;
S2, installing a sample: loosening a chuck screw, inserting one end of a sample to be tested into a chuck gap, then tightening the screw to clamp the sample, and adjusting the position of an excitation electrode;
S3, vibration test: applying bias voltage to the excitation electrode, controlling a laser beam of the laser displacement sensor to irradiate the surface of the sample, observing whether a vibration signal of the sample returns, and finishing the vibration test if the vibration signal exists; if no vibration signal exists, the position of the sample and the excitation electrode is determined until a vibration signal appears;
S4, closing the vacuum cavity: the lifting assembly moves the upper cover body downwards until the upper cover body is attached to the lower cover body, the cavity is closed, the vacuum valve is opened, the vacuum pump set is started to vacuumize, and the vacuum pump set is extracted 10-2High vacuum of Pa and above;
S5, setting parameters: setting parameters such as test temperature, test time, excitation amplitude, excitation frequency and the like, and starting a measurement program;
S6: and (3) testing: collecting vibration excitation signals and vibration signals, displaying vibration waveforms, calculating internal consumption and elastic modulus values, obtaining results and analyzing the results;
S7: and (3) closing the system: and (5) stopping the test program after the test is finished, adjusting the bias power supply to zero, and closing the control system.
compared with the prior art, the invention has the advantages that: the laser film internal friction instrument has the advantages of high measurement precision, wide working frequency, non-contact measurement for obtaining material defect information and the like, and is very suitable for representing irradiation defects.
drawings
In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the drawings used in the description of the embodiments will be briefly introduced below. It is obvious that the drawings in the following description are only some embodiments of the invention, and that for a person skilled in the art, other drawings can be derived from them without inventive effort.
FIG. 1 is a perspective view of a laser thin film internal friction gauge in a preferred embodiment of the present invention;
FIG. 2 is a partial perspective view of a laser thin film internal friction gauge in a preferred embodiment of the present invention;
FIG. 3 is a top view of FIG. 2;
3 FIG. 3 4 3 is 3 a 3 cross 3- 3 sectional 3 view 3 A 3- 3 A 3 of 3 FIG. 3 3 3; 3
FIG. 5 is a perspective view of the laser film inside wear gauge of FIG. 2 with the lower housing hidden;
FIG. 6 is a perspective view of the laser film inside wear gauge of FIG. 5 with the diaphragm hidden;
FIG. 7 is a perspective view of a shield and a heater in the laser thin film inside consumption meter;
FIG. 8 is a schematic view of a specimen undergoing bending under a force perpendicular to the specimen axis;
FIG. 9 is a schematic view of a specimen to be measured used in the calculation and analysis of Young's modulus in example 3;
FIG. 10 is a graph showing the results of Young's modulus and internal friction measurements of a stainless steel sheet of varying cross section in example 3;
In the drawings: the device comprises a laser displacement sensor-1, a bottom plate-2, a lower cover-3, an upper cover-4, an excitation electrode-5, a heater-6, a shielding cover-7, an optical window-8, a through hole-9, a top hole-10, a sample-11, a slide block-12, a screw rod-13, a motor-14, a partition plate-15, a fixed column-16, a chute-17, a fixed plate-18, a sample chuck-19, a support plate-20, a lifting mechanism-21, a chuck screw-22, a lifting assembly-23, a vacuum valve-24, a waist circular hole-25 and a frame-26.
Detailed Description
In order to make those skilled in the art better understand the technical solution of the present invention, the technical solution in the embodiment of the present invention will be clearly and completely described below with reference to the drawings in the embodiment of the present invention, and it is obvious that the described embodiment is only a part of the embodiment of the present invention, and not a whole embodiment. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
EXAMPLE 1 laser thin film internal abrasion tester
As shown in fig. 1-7, the laser thin film internal consumption instrument of the present embodiment includes a frame 26, a control system, a laser displacement sensor 1, a bottom plate 2, a lower cover body 3 fixed on the bottom plate 2, an upper cover body 4 matched with the lower cover body 3, a lifting assembly 23 for driving the upper cover body 4 to separate from or attach to the lower cover body 3, and a vacuum pump set for evacuating the cavity, wherein a cavity is formed between the bottom plate 2, the lower cover body 3, and the upper cover body 4, a sample 11 fixing assembly, an excitation electrode 5, a heater 6, a shielding cover 7, and a moving assembly for driving the excitation electrode 5 to move are disposed in the cavity, an optical window 8 corresponding to the laser displacement sensor 1 is disposed on the lower cover body 3, the heater 6 is disposed in the shielding cover 7, the shielding cover 7 is used for covering the sample 11 and the excitation electrode 5, the shielding cover 7 is disposed with a through hole 9 corresponding to, the excitation electrode 5 faces the through-hole 9, and the sample 11 is located between the through-hole 9 and the excitation electrode 5. A vacuum valve 24 used for being connected with a vacuum pump set is arranged on the bottom plate 2; still be provided with damper unit on the bottom plate 2, damper unit can set up under bottom plate 2 and can set up between the lower cover body 3 and bottom plate 2.
The laser displacement sensor adopting the laser Doppler effect has the advantages that the measurement precision is higher (the displacement resolution ratio can reach 0.1 nm), the sensor can be far away from the sample arrangement (the sensor is in a non-contact type and can be conventionally arranged at a position about 1m away from a sample), and the defect detection of the nuclear power material caused by irradiation is facilitated.
The excitation electrode 5 is used for driving the sample 11 to vibrate, the sample 11 is forced to vibrate under a specific frequency by loading direct-current bias voltage and variable-frequency alternating voltage between the sample 11 to be tested and the excitation electrode, the laser displacement sensor 1 is used for collecting vibration signals of the sample 11, and the vibration waveform of the sample 11 is obtained, so that parameters such as damping, modulus and the like of the material are obtained, and further the micro defect information of the material is obtained.
As shown in fig. 4 and 6, the excitation electrode moving assembly includes a slider 12, a screw 13 driving the slider 12 to move, and a motor 14 driving the screw 13 to rotate, the excitation electrode 5 is fixed on the slider 12 through a fixing plate 18, an insulating ring is disposed between the excitation electrode 5 and the fixing plate 18, and the motor 14 is fixed on the base plate 2. The moving component drives the excitation electrode 5 to move, so that the distance between the excitation electrode 5 and the sample 11 to be measured is adjusted.
As shown in fig. 4-5, a partition plate 15 is disposed in the cavity, the partition plate 15 is fixed on the bottom plate 2 through a fixing post 16, the shielding cover 7 is fixed on the partition plate 15, and a sliding slot 17 for moving a fixing plate 18 is formed in the partition plate 15. The excitation electrode moving assembly is located below the partition 15, and the shield 7, the heater 6, and the sample 11 fixing assembly are located above the partition 15.
as shown in fig. 4-6, the sample 11 fixing assembly includes a sample chuck 19, a support plate 20 connected to the sample chuck 19, and a lifting mechanism 21 for moving the support plate 20 up and down, wherein the sample 11 is fixed to the lower end of the sample chuck 19 by a chuck screw 22. The lifting mechanism 21 drives the supporting plate 20 to move so as to drive the sample 11 to be measured to move up and down, and the position of the sample 11 to be measured is adjusted. In this embodiment, the sample chuck 19 is further provided with a waist-shaped hole 25 extending along the vertical direction of the sample chuck 19 to adjust the position of the sample chuck 19 fixed on the support plate 20. The top of the shielding cover 7 is also provided with a top hole 10 for the sample chuck to penetrate through.
as shown in fig. 7, the heaters 6 are uniformly distributed inside the shield case 7, and the heaters 6 extend in the axial direction of the shield case 7. The heater 6 is rod-shaped, and it evenly distributed on shield cover 7 inner wall for the intensification is more even, and is the irradiation heating, and rate of heating is fast. The shield 7 serves to prevent heat from radiating out of the apparatus. In this embodiment, the laser thin film internal consumption instrument further includes a water cooling system to control the temperature more accurately.
The laser displacement sensor 1 is fixed on the bottom plate 2, and the laser displacement sensor 1, the optical window 8, the through hole 9 and the excitation electrode 5 are positioned on the same axis, so that a laser beam of the laser displacement sensor 1 can be irradiated on a sample 11 to be measured to measure the vibration of the sample 11.
in the embodiment, a sample 11 to be tested is clamped and fixed in a vacuum cavity through a sample chuck 19, the excitation electrodes 5 are arranged on the opposite surfaces of the sample 11 and used for driving the sample 11 to vibrate, a heating system and a water cooling system surround the periphery of the sample 11 to provide a high-temperature environment, in order to prevent air damping from influencing the high-frequency vibration amplitude and frequency of the sample 11, a vacuum unit is used for pumping high vacuum to the vacuum cavity during testing, the whole vacuum cavity is isolated from the ground, and the interference of mechanical vibration is eliminated.
The laser thin film internal friction instrument of the embodiment can be used for measuring the elastic modulus, the elastic modulus temperature coefficient, the damping and the like of the fuel cladding surface oxide film or the ion irradiation material; and (3) flaw detection of the material, including research on the types, concentrations, evolution mechanisms and the like of the flaws.
Example 2 detection method of laser thin film internal consumption instrument
the embodiment provides a method for detecting material internal friction by using the laser thin film internal friction instrument described in embodiment 1, which specifically includes the following steps:
s1, opening a vacuum cavity: and releasing vacuum, and when the vacuum state in the cavity is changed into an atmospheric normal pressure state, starting the lifting assembly to push the upper cover body to move upwards and open the cavity.
S2, installing a sample: and loosening the chuck screw, plugging one end of the sample to be tested into the chuck gap, tightening the screw to clamp the sample, and adjusting the position of the excitation electrode.
S3, vibration test: applying bias voltage to the excitation electrode, controlling a laser beam of the laser displacement sensor to irradiate the surface of the sample, observing whether a vibration signal of the sample returns, and finishing the vibration test if the vibration signal exists; and if no vibration signal exists, the position of the sample and the excitation electrode is determined until the vibration signal appears.
s4, closing the vacuum cavity: the lifting assembly moves the upper cover body downwards until the upper cover body is attached to the lower cover body, the cavity is closed, the vacuum valve is opened, the vacuum pump set is started to vacuumize, and the vacuum pump set is extracted 10-2High vacuum of Pa or above.
s5, setting parameters: and setting parameters such as test temperature, test time, vibration excitation amplitude, vibration excitation frequency and the like, and starting a measurement program.
s6: and (3) testing: and collecting vibration excitation signals and vibration signals, displaying vibration waveforms, calculating internal friction and elastic modulus values, obtaining results and analyzing the results.
S7: and (3) closing the system: and (5) stopping the test program after the test is finished, adjusting the bias power supply to zero, and closing the control system. The control system specifically comprises a displacement processor, a temperature controller, a data acquisition module, a calculation module and the like.
The test principle is basically as follows: the method comprises the steps of loading direct-current bias voltage and variable-frequency alternating voltage between a sample to be tested and an excitation electrode, forcing the sample to vibrate under specific frequency, collecting sample vibration signals by adopting a laser displacement sensor, and obtaining all waveforms of sample vibration, so that parameters such as damping and modulus of a material are obtained, and parameters such as the magnitude of heating current are controlled according to collected temperature data, and further information such as microscopic defects of the material is obtained.
EXAMPLE 3 Young's modulus calculation and analysis of test samples of laser thin film Internally Friction Instrument
The thin film internal friction tester adopts a sheet-shaped test sample, the thickness of the test sample is 50-300 mu m, the width of the test sample is 4-6mm, and the length of the test sample is 15-50 mm. Assuming that the sample is subjected to a force directed perpendicular to the sample axis, the sample is elastically bent, as shown in FIG. 8. Due to the stiffness of the test piece, the bending deformation is restored to an equilibrium state, causing vibration of the test piece in the direction perpendicular to the axis.
The material follows Hooke's law, and the equation of the transverse vibration of the sample can be expressed as follows:
In the above formula, A-the cross-sectional area of the sample; ρ -the density of the sample; E-Young's weight of the sample; i-the moment of inertia of the cross section of the sample relative to the neutral plane; g-acceleration of gravity.
solving the above formula to obtain a Young modulus calculation formula of the sheet sample:
Wherein l-the length of the sample vibration; d-the thickness of the sample; f-fundamental frequency (first order resonance frequency) of the sample vibration.
for the single-end clamped sample, the clamping head effect has certain influence on the measurement. The effect of the chuck is mainly to influence the measurement accuracy of the vibration part of the sample with the effective length of the sample besides introducing internal stress. The error analysis formula of the Young modulus can be obtained by differentiating the Young modulus calculation formula:
For a sample, the density is a constant over a certain temperature. The measurement error of the density can be ignored; the thickness is measured for many times and then averaged, and the error is very small; the measurement of the resonance frequency is converted from an electrical signal with very little error. Therefore, the measurement error of the length has the most significant influence on the measurement result.
The following two methods are used to reduce or eliminate the effect of the error of the effective length of the sample on the final measurement result:
(1) the samples with varying cross-sections were used, as shown in FIG. 9.
a) The ratio W2/W1 of the width of the specimen with the thickness of the specimen remaining unchanged
b) The width of the sample was kept constant and the ratio of the thickness was varied H2/H1.
As shown in FIG. 10, the Young's modulus of a stainless steel sheet (80 μm thick, measured in air) was measured by the variable cross-section method. With the increase of the ratio of the variable cross section, the internal loss is smaller and smaller, the Young modulus (vibration frequency) is gradually increased, and finally, the Young modulus and the vibration frequency all tend to a stable value.
(2) Using different length measurements
As the length increases, the measured young's modulus gradually increases and eventually tends towards a saturation value (true value). Because the Young modulus is smaller, the Young modulus error is smaller according to the error analysis formula.
The above embodiments are merely illustrative of the technical concept and features of the present invention, and the purpose thereof is to enable those skilled in the art to understand the content of the present invention and implement the invention, and not to limit the scope of the invention, and all equivalent changes or modifications made according to the spirit of the present invention should be covered by the scope of the present invention.
Claims (10)
1. The utility model provides a consume appearance in laser film, its characterized in that includes laser displacement sensor, bottom plate, fixes lower cover body on the bottom plate and with cover body matched with last cover body down, form the cavity between bottom plate, lower cover body and the last cover body, be provided with the fixed subassembly of sample, arouse electrode, heater and shield cover in the cavity, set up on the lower cover body with the optical window that laser displacement sensor corresponds, the heater is located in the shield cover, the shield cover is used for covering sample and arouse the electrode, the shield cover corresponds laser displacement sensor has seted up the perforating hole, arouse the electrode orientation the perforating hole, the sample is located between perforating hole and the arouse electrode.
2. The laser thin film internal consumption instrument as claimed in claim 1, wherein an excitation electrode moving assembly is further disposed in the cavity, the excitation electrode moving assembly comprises a slider, a screw rod driving the slider to move, and a motor driving the screw rod to rotate, the excitation electrode is fixed on the slider through a fixing plate, and the motor is fixed on the bottom plate.
3. The laser thin film internal friction instrument according to claim 2, wherein a partition plate is arranged in the cavity, the partition plate is fixed on the bottom plate through a fixing column, the shielding cover is fixed on the partition plate, and a sliding groove for moving the fixing plate is formed in the partition plate.
4. the laser thin film internal friction instrument as claimed in claim 2, wherein an insulating ring is disposed between said excitation electrode and said fixing plate.
5. The laser thin film internal consumption instrument as claimed in claim 1, wherein the sample fixing assembly comprises a sample chuck, a supporting plate connected with the sample chuck and a lifting mechanism driving the supporting plate to move up and down, and the sample is fixed at the lower end of the sample chuck through a chuck screw.
6. the laser thin film internal consumption instrument as claimed in claim 1, wherein the heaters are uniformly distributed on the inner side of the shielding case, and the heaters extend along the axial direction of the shielding case.
7. The laser thin film internal consumption instrument as claimed in claim 1, further comprising a lifting assembly for driving the upper cover body and the lower cover body to separate or attach, and a vacuum pump set for evacuating the cavity.
8. The laser thin film internal friction instrument according to claim 7, wherein the bottom plate is further provided with a vacuum valve for connecting with the vacuum pump set; and the bottom plate is also provided with a damping component.
9. The laser thin film internal friction instrument as claimed in claim 1, wherein said laser displacement sensor is fixed on said base plate, and said laser displacement sensor, optical window, through hole and excitation electrode are located on the same axis.
10. A method for detecting the internal consumption of a material by a laser thin film internal consumption instrument according to claim 1, which comprises the following steps:
S1, opening a vacuum cavity: releasing the vacuum, starting the lifting assembly, pushing the upper cover body to move upwards, and opening the cavity;
S2, installing a sample: loosening a chuck screw, inserting one end of a sample to be tested into a gap of a sample chuck, and then screwing the chuck screw to clamp the sample;
S3, vibration test: applying bias voltage to the excitation electrode, controlling a laser beam of the laser displacement sensor to irradiate the surface of the sample, observing whether a vibration signal of the sample returns, and finishing the vibration test if the vibration signal exists; if no vibration signal exists, the position of the sample and the excitation electrode is determined until a vibration signal appears;
S4, closing the vacuum cavity: starting the lifting assembly, moving the upper cover body downwards until the upper cover body is attached to the lower cover body, sealing the cavity, opening the vacuum valve, starting the vacuum pump set, and vacuumizing;
S5, setting parameters: setting test parameters and starting a test program;
S6: and (3) testing: collecting vibration signals, calculating internal friction and elastic modulus values, obtaining results and analyzing the results;
S7: and (3) closing the system: and (5) stopping the test program after the test is finished, adjusting the bias power supply to zero, and closing the control system.
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