CN110488044A - A method of realizing superslide between the AFM probe and graphite surface of taper needle point - Google Patents
A method of realizing superslide between the AFM probe and graphite surface of taper needle point Download PDFInfo
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- CN110488044A CN110488044A CN201910688409.XA CN201910688409A CN110488044A CN 110488044 A CN110488044 A CN 110488044A CN 201910688409 A CN201910688409 A CN 201910688409A CN 110488044 A CN110488044 A CN 110488044A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
- G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
- G01Q60/24—AFM [Atomic Force Microscopy] or apparatus therefor, e.g. AFM probes
- G01Q60/38—Probes, their manufacture, or their related instrumentation, e.g. holders
- G01Q60/42—Functionalisation
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
- G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
- G01Q60/24—AFM [Atomic Force Microscopy] or apparatus therefor, e.g. AFM probes
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
- G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
- G01Q60/24—AFM [Atomic Force Microscopy] or apparatus therefor, e.g. AFM probes
- G01Q60/26—Friction force microscopy
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
- G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
- G01Q60/24—AFM [Atomic Force Microscopy] or apparatus therefor, e.g. AFM probes
- G01Q60/38—Probes, their manufacture, or their related instrumentation, e.g. holders
Abstract
The present invention relates to a kind of construction methods of superslide between atomic force microscope probe and graphite surface for realizing taper needle point, belong to Nanotribology field.Nanolithographic is carried out to separate graphite nano plate in graphite surface by the higher probe of coefficient of elasticity, then so that graphite nano plate is wrapped in probe tip surface by friction transfer in scored areas using the lower probe of coefficient of elasticity.The secondary preparation method of superslide friction provided by the present invention is applicable not only to graphite, applies also for the materials such as molybdenum disulfide, boron nitride.The homogeneity friction pair or heterogeneous friction pair of the method for the present invention preparation have the characteristics that fast into superslide state, stability is good.
Description
Technical field
The present invention relates to Nanotribology fields, in particular to a kind of atomic force microscope for realizing taper needle point
The method of superslide between probe and graphite surface.
Background technique
Graphite is a kind of stratified material, and each layer is by sp2The carbon atom of hydridization type is constituted, and intensity is high, stability is good；
Interlayer is connected by Van der Waals force, shearing strength between layers very little, therefore the resistance very little of graphite layers sliding.Existing scholar uses at present
Spherical needle point atomic force microscope probe measurement graphite surface frictional force, coefficient of friction in 0.0003~0.003 range,
Illustrate between atomic force microscope probe needle point and graphite surface in " superslide " state.Realize the atomic force microscopy of spherical needle point
Between mirror probe and graphite surface there are two ways to superslide: first is that by chemical vapour deposition technique (CVD) in spherical needle point table
Face deposits graphene, avoids probe tip during friction testing and contacts with the direct of graphite surface, reduces friction
Power；Second is that spherical probes are rubbed repeatedly in graphite surface, the graphene clast that graphite surface breakage generates after a period of time is viscous
It is attached to spherical probes surface, friction process becomes the friction of graphene clast and graphite surface, and (i.e. the interformational sliding of graphite rubs
Wipe), therefore frictional force very little.But both methods all has some limitations.First method uses CVD deposition graphene
Cost it is too high, and obtained graphene usually contains more defect；Spherical needle point and stone of the second method because of probe
The real contact area on black surface very causes greatly footprint pressure very low, so being difficult to make the surface of graphite to wear.If
Graphite surface is not worn, and would not generate graphene nanometer sheet, is less had graphene nanometer sheet and is transferred to spherical needle point
Surface.In order to make graphite surface occur to wear and graphene nanometer sheet be made to be transferred to spherical needle surface, spherical needle point needs
Carrying out multiple and prolonged rub measurement just can make graphite surface damaged, cause conventional efficient low.
The pattern for either characterizing material still measures the frictional force of material, the most common probe tip of atomic force microscope
Radius of curvature for taper, tip is no more than 10 nanometers.It is compared with the probe of spherical needle point, the probe of taper needle point is identical
There is higher footprint pressure, it is easier to so that material surface is generated fold and abrasion, and remove from material surface under normal load
Nanometer sheet out.And the probe of taper needle point versatility in AFM experiments is high, measurement sensitivity is high, is easy to carry out
Lateral force calibration, so the probe with taper needle point is the ideal tools for studying the materials superslides such as graphite.
Someone realizes the superslide between the probe and graphite surface of taper needle point at present, and method is to make probe in graphite
Surface is rubbed for a long time, the disadvantage is that it is small probability event, this method consumption that graphene clast, which is transferred to taper needle surface,
When it is longer.
Summary of the invention
The application provides the method for superslide between the atomic force microscope probe and graphite surface of realizing taper needle point, including
Following steps:
S10. cleavage is carried out to graphite surface, obtains a clean, smooth graphite surface；
S20. one piece of smooth, without fold and not no sample area 1 of impurity is selected in the graphite surface, is by elasticity
The lower probe A of number is installed in atomic force microscope, using the surface topography of contact mode measured zone 1, from sample area 1
The scanning area of middle selection friction testing, the operating mode for adjusting atomic force microscope is side force measurement mode, described
Region 1 obtains the lateral force signal of forward and reverse both direction, to obtain the friction between probe A needle point and graphite surface
Power and coefficient of friction；
S30. the higher probe B of coefficient of elasticity is installed in atomic force microscope, selects a smooth surface again, does not have
There are fold and the not sample area 2 of impurity, the surface topography of the sample area 2 is measured under tapping-mode；
The operating mode of atomic force microscope is switched into contact mode, the probe B is by control software in sample area
2 surface of domain performs etching；It can switch to tapping-mode in etching process, again the surface topography of measured zone 2, until showing
Indentation can stop etching；
S40. the probe A used before being again changed to the probe of atomic force microscope changes atomic force microscopy
Mirror operating mode is contact mode, and probe A is scanned back and forth in scored areas；
S50. at sample surfaces selection one without indentation, without the sample area 3 of clast and smooth surface, the spy
After needle A obtains the surface topography in region 3 under contact mode, the operating mode of atomic force microscope is adjusted to side force measurement mould
Formula, is obtaining the frictional force between probe A and graphite surface under different loads, frictional force is with the slope of the change curve of load
For coefficient of friction；
S60. if measurement frictional force much smaller than step S20 frictional force and coefficient of friction less than 0.001, superslide
Friction pair is successfully prepared；Otherwise step S40, S50 is repeated, until the needle point and graphite surface of the probe A realize superslide.At it
In middle one embodiment, the coefficient of elasticity of the probe A is 3.5N/m, and the coefficient of elasticity of the probe B is 34N/m.
According to some embodiments of the present invention, in step s 30, the region 2 measures surface topography using tapping-mode,
Probe scanning range obtains the surface topography in region 2 at 50 μm of 50 μ m or more, and a side length is chosen from the region 2 and is
20 μm~30 μm of square area is as subsequent etch areas.
In one of the embodiments, during the nanolithographic, the needle point of the probe B is in the graphite table
The track of face movement is consistent with the path that user draws on control software.
According to some embodiments of the present invention, in step s 40, the etching path shape is different same of two diameters
Heart circle, the diameter range of two concentric circles are 27~28 μm.
In one of the embodiments, in step s 40, the normal direction that atomic force microscope applies the probe B needle point
Load can guarantee to keep the graphite surface damaged.
According to some embodiments of the present invention, in step s 40, the setting value in atomic force microscope control software is 8
~10nA, the corresponding probe B needle point normal load are 4000~7000nN.
The probe A and probe B is silicon probe in one of the embodiments,.
According to some embodiments of the present invention, in step S20, setting is changed in the control software of atomic force microscope
Numerical value is to change the normal load of probe A, and the lateral force signal of sample area 1 is selected in measurement under different loads, to obtain
The frictional force between the probe A needle point and graphite surface under different loads is obtained, frictional force is with load change slope of a curve
Coefficient of friction.
In one of the embodiments, in step S20, the region having a size of 600nm × 600nm is selected in zone 1
Scanning area as friction testing.
Compared with prior art, the present invention has the following technical effect that
1, it using the probe B and A of different coefficient of elasticity, performs etching respectively and friction transfer, and aobvious by transmitted electron
Micro mirror observes the surface topography of atomic force microscope probe A, B needle point, in graphite surface carries out the needle of the probe B of nanolithographic
No any transfer layer on point, it was demonstrated that nanolithographic can't be such that graphite nano plate is transferred on probe tip；And in graphite
The needle point that surface scored areas carries out the probe A of repeated multiple times friction can see clearly layer structure, present invention discover that only
The transfer of graphite nano plate can be induced by having friction process.
2, etching path shape is the different concentric circles of two diameters, so that track point of the nanometer sheet not only along indentation
Cloth, and in circular score line inside and outside, there is also more nanometer sheets, greatly improve graphite clast and are transferred to silicon
Probability on probe tip, and it is time-consuming short.
3, it is detected by Raman spectrum, graphite surface is scratched and removed by sharp keen probe tip during nanolithographic
A large amount of graphite nano plate, there is no other physical changes or chemical reactions for these graphite nano plates, with higher pure
Cleanliness, to provide good condition to the friction transfer of probe tip.
4, needle point is more than still to remain ultra low-friction after 10,000 microns in graphite surface scanning distance, this shows with this
The needle point of inventive method preparation-graphite superslide friction is secondary with good stability.
5, can greatly reduce frictional force and coefficient of friction using friction pair made from preparation method of the present invention (is friction
Power with normal load variation relation fitting a straight line slope), coefficient of friction of the probe A before abrasion mark be 0.00213, and
Coefficient of friction after abrasion mark has reached superslide state down to 0.0007, has important meaning to the research of Nanotribology
Justice.
6, the secondary preparation method of superslide provided by the present invention friction is applicable not only to graphite, apply also for molybdenum disulfide,
The materials such as boron nitride.Homogeneity friction pair or heterogeneous friction prepared by the method for the present invention is secondary to have the fast, stability into superslide state
The features such as good.
The additional aspect and advantage of the application will be set forth in part in the description, and will partially become from the following description
It obtains obviously, or recognized by the practice of the application.
Detailed description of the invention
Technical solution in ord to more clearly illustrate embodiments of the present application, below will be to needed in the embodiment attached
Figure is briefly described, it should be understood that the following drawings illustrates only some embodiments of the application, therefore is not construed as pair
The restriction of range for those of ordinary skill in the art without creative efforts, can also be according to this
A little attached drawings obtain other relevant attached drawings.
Fig. 1 is the flow chart of preparation method of the present invention.
Fig. 2 is 200 times of optical microscope images of graphite surface indentation of the present invention, and 1#~5# is test point.
Fig. 3 is the Raman spectrogram of 5 points in Fig. 2 of the present invention.
Fig. 4 is frictional force of the silicon probe of the present invention before the friction of graphite surface indentation and after friction with normal load
Variation relation figure.
Fig. 5 be silicon probe of the present invention graphite surface indentation friction before and rub after frictional force with needle point scanning away from
From variation relation figure (normal load is 422.6nN always).
Specific embodiment
To keep the purposes, technical schemes and advantages of the embodiment of the present application clearer, below in conjunction with the embodiment of the present application
In attached drawing, the technical scheme in the embodiment of the application is clearly and completely described, it is clear that described embodiment is
Some embodiments of the present application, instead of all the embodiments.The application being usually described and illustrated herein in the accompanying drawings is implemented
The component of example can be arranged and be designed with a variety of different configurations.
Therefore, the detailed description of the embodiments herein provided in the accompanying drawings is not intended to limit below claimed
Scope of the present application, but be merely representative of the selected embodiment of the application.Based on the embodiment in the application, this field is common
Technical staff's every other embodiment obtained without creative efforts belongs to the model of the application protection
It encloses.
It should also be noted that similar label and letter indicate similar terms in following attached drawing, therefore, once a certain Xiang Yi
It is defined in a attached drawing, does not then need that it is further defined and explained in subsequent attached drawing.
According to the method for superslide between a kind of atomic force microscope probe and graphite surface for realizing taper needle point of the application,
Include the following steps:
S10. 3M Scotch is usedTMAdhesive tape carries out cleavage to ZYA grades of graphite surfaces, obtain one it is clean, smooth
Graphite surface.
S20. by the optical microscopy imaging system of atomic force microscope the graphite surface select one piece it is smooth, do not have
The probe A that coefficient of elasticity is 3.5N/m is installed in atomic force microscope, then by the sample area 1 of fold and not impurity
Probe A is moved to sample area 1.Surface topography is measured using contact mode in selected region 1, probe A sweep range is wanted
It is as big as possible, preferably at 10 μm of 10 μ m or more, it may include multiple atomic steps in the surface topography map of acquisition, select it
In one piece of not no atomic steps test zone of the region as frictional force, it is preferred that scanning area having a size of 600nm ×
600nm；
Adjustment atomic force microscope operating mode is side force measurement mode, obtains probe in just selected scanning area
The lateral force signal graph of A forward and reverse both direction, to obtain frictional force between friction pair.Later in atomic force microscope
Change setting numerical value is to change the normal load of probe in control software, and the selected sample area of measurement rubs under different loads
Power is wiped, frictional force is coefficient of friction with load change slope of a curve.
S30. the probe B that coefficient of elasticity is 34N/m is installed on the probe base of atomic force microscope, with atomic force microscopy
The optical microscopy imaging of mirror is reference, changes position of the probe cantilevers beam end relative to graphite surface, selects one again
Smooth surface, without fold and the not sample area 2 of impurity.Surface shape is measured using tapping-mode in selected sample area
Looks, probe scanning range is at 50 μm of 50 μ m or more.It is 20 μm~30 μ that a side length is chosen from the surface topography obtained just now
The square area of m, it is desirable that it is as flat as possible but not necessarily whole region all on an atomic steps face.
The operating mode of atomic force microscope is switched into contact mode, probe B is in the surface topography measured for the second time
Etching path is drawn on region, the etching path shape of the present embodiment is round, and during nanolithographic, probe B needle point exists
The track of graphite surface movement is consistent with the path that user draws on control software, in order to keep graphite surface damaged, atomic force
The normal load that microscope applies probe B needle point should be as big as possible (thousands of receive ox).Specifically, in the present embodiment, atom
The probe tip normal load of force microscope is about 4000~7000nN, since probe B needle point is very sharp, so probe leaves
Kerf width be nanoscale, the optical microscopy imaging system of atomic force microscope does not observe the presence of indentation, only
The pattern for scanning sample surfaces under tapping-mode again could obtain the shape appearance figure of indentation, pass through graphite surface scored areas
Surface topography can see around indentation there are many clasts, be during nanolithographic by needle point from graphite surface removing under
Come.
S40. used coefficient of elasticity is the probe of 3.5N/m before being again changed to the probe of atomic force microscope
A, change atomic force microscope operating mode are contact mode, measure the pattern of indentation, the present embodiment leaves in graphite surface
The circle that indentation is 27 μm of diameter or so.Next by circumference it is a bit of centered on scan pattern in 1 μ m, 1 μ m or
Frictional force, as long as needle point repeatedly scans at indentation under contact mode, measuring signal can be random.The mesh of the step
Be that the graphite clast for generating probe tip with nanolithographic comes into full contact with, improve graphite clast be transferred on probe tip
Probability.
S50. at sample surfaces selection one without indentation, without the sample area 3 of clast and smooth surface, size is most
Fortunately 5 μm of 5 μ m or more.After probe A obtains surface topography under contact mode, the multiple methods of atomic steps planar survey are chosen
Frictional force under to load, frictional force are coefficient of friction with load change slope of a curve.
S60. if measurement frictional force much smaller than step S20 frictional force and coefficient of friction less than 0.001, superslide
Friction pair is successfully prepared；Otherwise step S40, S50 is repeated, until the needle point and graphite surface of the probe A realize superslide.
After nanolithographic, the pattern of graphite surface scored areas is measured by atomic force microscope, and probe is in graphite table
Apparent circular score line is left after the etching of face, destroys the original surface of graphite；Meanwhile there are many broken around indentation
Bits, according to scale may determine that the sizes of these clasts in the range of more than ten nanometers to several hundred nanometers, therefore these clasts
Referred to as " nanometer sheet ".
After completing step S10-S60, the shape appearance figure of graphite surface scored areas is obtained using scanning electron microscope,
It is observed that clast is distributed not only along the track of indentation, and there is also more in circular score line inside and outside
Clast.This is because probe tip is during scored areas rubs repeatedly, needle point has scratched the edge of indentation, exacerbates quarter
Breakage around trace produces more clasts, and part clast " pushing away " has been arrived from the farther away region in indentation track.Graphite table
There is so many observable clast in face, also greatly improves the probability that graphite clast is transferred on silicon probe needle point.
It is detected by Raman spectrum, as shown in Fig. 2, 5 test points have been selected in graphite surface scored areas, such as Fig. 3 institute
Show, may determine that this 5 spectral lines are all the spectral lines of graphite according to the wave number and shape at the peak G and the peak 2D, and there is no other materials
Characteristic peak, and the not characteristic peak of other materials, so the clast of the position 1#~4# is all graphite clast.In addition, graphite
All there is the peak D (1350cm-1) in the Raman line of clast position (1#~4#) and the spectral line without clast region (5#) does not have.The peak D
Appearance it is usually because the defect of graphite surface makes graphite expose boundary, destroy the symmetry of original lattice.And nanometer
Etching the indentation that leaves makes graphite surface boundary occur, etches the graphite nano plate of generation there is also boundary, therefore 1#~4#
Raman line there is the peak D.According to the result of Raman spectrum detection it is found that probe tip sharp keen i.e. during nanolithographic
Graphite surface is scratched to and has been removed a large amount of graphite nano plate, there is no other physical changes or chemical reactions.This says
These graphite nano plates degree of purity with higher of bright graphite surface, this is also good to provide to the friction transfer of probe tip
Good condition.
The frictional force of step S20 and S50 measurement and coefficient of friction comparison are as shown in Figure 4.By changing atomic force microscope
The setting value in software is controlled to control the normal load that probe A needle point is applied to graphite surface, the result demarcated according to probe
The variation range of normal load in experiment can be conversed between 0~1370nN.From fig. 4, it can be seen that probe A rubbed quarter
Frictional force after trace is reduced than before, and the amplitude that frictional force reduces when normal load is bigger is bigger.Coefficient of friction is to rub
Power is wiped with the fitting a straight line slope of normal load variation relation, coefficient of friction of the probe A before abrasion mark is 0.00213,
And the coefficient of friction after abrasion mark has reached superslide state down to 0.0007.
It follows that graphite nano plate makes needle point-graphite pair realize that the mechanism of superslide mainly has two o'clock: first is that graphite
Nanometer sheet prevents the rough peak of probe tip to contact with the direct of graphite surface；Second is that the graphite nano plate adhered on needle point with
Graphite surface is in non-commensurability contact condition, this is also proved to be one of the necessary condition for realizing superslide.
Transmission electron microscope can see nanoscale fine structure, and the present invention observes original by transmission electron microscope
The surface topography of sub- force microscope probe A, B needle point.It is not any on the needle point that graphite surface carries out the probe B of nanolithographic
Transfer layer, it was demonstrated that nanolithographic can't be such that graphite nano plate is transferred on probe tip；And it is carried out in graphite surface indentation
The needle point of the probe A of repeated multiple times friction can see clearly layer structure, and transfer layer has 10 layers or more, therefore only rubs
Process can just induce the transfer of graphite nano plate.
The present invention also measures probe to detect needle point-secondary stability of graphite superslide friction prepared by the above method
For frictional force with probe in the variation relation of graphite surface scanning distance, frictional force is still at no quarter between needle point and graphite surface
It is measured on the atomic steps face of trace, at constant normal load 422.6nN, before measuring needle point abrasion mark respectively
Frictional force later with scanning distance variation relation, as shown in Figure 5.Under the normal load of 422.6nN, silicon probe needle point
Small an order of magnitude before frictional force ratio after rubbed indentation, and needle point is more than 10,000 in graphite surface scanning distance
Ultra low-friction is still remain after micron, this shows that the needle point prepared with the method for the present invention-graphite superslide friction is secondary with very
Good stability.Even if in addition, do not rubbed 10,000 microns in the silicon probe needle point that scored areas is repeatedly scanned in graphite surface,
Superslide state is not entered still, this shows that the method for the present invention has the spy for making silicon needle point-graphite rapidly enter stable superslide state
Point.
The secondary preparation method of superslide friction provided by the present invention is applicable not only to graphite, applies also for molybdenum disulfide, nitrogen
Change the materials such as boron.Superslide state is fast, stability is good with entering for the homogeneity friction pair or heterogeneous friction pair of the method for the present invention preparation
The features such as.
It should be noted that in the absence of conflict, the feature in embodiment in the application can be combined with each other.
The foregoing is merely preferred embodiment of the present application, are not intended to limit this application, for the skill of this field
For art personnel, various changes and changes are possible in this application.Within the spirit and principles of this application, made any to repair
Change, equivalent replacement, improvement etc., should be included within the scope of protection of this application.
Claims (10)
1. a kind of method of superslide between atomic force microscope probe and graphite surface for realizing taper needle point, which is characterized in that
Include the following steps:
S10. cleavage is carried out to graphite surface, obtains a clean, smooth graphite surface；
S20. select one piece of smooth, without fold and not no sample area 1 of impurity in the graphite surface, by coefficient of elasticity compared with
Low probe A is installed in atomic force microscope, is selected sample area 1 as friction testing region, is adjusted atomic force microscopy
The operating mode of mirror is lateral force mode, obtains the lateral force signal of forward and reverse both direction in the sample area 1, leads to
Cross the frictional force and coefficient of friction between the lateral force signal acquisition probe A needle point in positive and negative two direction and graphite surface；
S30. the higher probe B of coefficient of elasticity is installed in atomic force microscope, selects a smooth surface again, there is no pleat
Wrinkle and the not sample area 2 of impurity, measure the surface topography of the sample area 2 under tapping-mode；By atomic force microscopy
Mirror operating mode switches to contact mode, and the probe B is performed etching on 2 surface of sample area by control software, received
Rice piece；It can switch to tapping-mode in etching process, measure the surface topography of sample area 2 again, until showing indentation i.e.
It can stop etching；
S40. the probe A used before being again changed to the probe of atomic force microscope, changes atomic force microscope
Operating mode is contact mode, and probe A is scanned back and forth in scored areas；
S50. at sample surfaces selection one without indentation, without the sample area 3 of clast and smooth surface, the probe A
Under lateral force mode, the frictional force and coefficient of friction between probe A needle point and graphite surface are obtained；
S60. if measurement frictional force much smaller than step S20 frictional force and coefficient of friction less than 0.001, superslide friction
Pair is successfully prepared；Otherwise step S40, S50 is repeated, until the needle point and graphite surface of the probe A realize superslide.
2. superslide between a kind of atomic force microscope probe and graphite surface for realizing taper needle point according to claim 1
Method, which is characterized in that the coefficient of elasticity of the probe A is 3.5 N/m, and the coefficient of elasticity of the probe B is 34N/m.
3. superslide between a kind of atomic force microscope probe and graphite surface for realizing taper needle point according to claim 1
Method, which is characterized in that in step s 30, the region 2 measures surface topography, probe scanning range using tapping-mode
At 50 μm of 50 μ m or more, obtain the surface topography of scanning range, chosen from the scanning range side length be 20 μm~
30 μm of square area is as subsequent etch areas.
4. superslide between a kind of atomic force microscope probe and graphite surface for realizing taper needle point according to claim 1
Method, which is characterized in that in step s 40, during the nanolithographic, the needle point of the probe B is in the stone
The track of black apparent motion is consistent with the path that user draws on control software.
5. superslide between a kind of atomic force microscope probe and graphite surface for realizing taper needle point according to claim 1
Method, which is characterized in that in step s 40, it is described etching path shape be arbitrary, specifically etch path shape
For the different concentric circles of two diameters, the diameter range of two concentric circles is 27~28 μm.
6. the side of superslide between the atomic force microscope probe and graphite surface according to claim 1 for realizing taper needle point
Method, which is characterized in that in step s 40, the normal load applied to the probe B needle point can guarantee to make the graphite surface
It is damaged.
7. superslide between a kind of atomic force microscope probe and graphite surface for realizing taper needle point according to claim 1
Method, which is characterized in that in step s 40, atomic force microscope control software in setting value be 8~10nA, it is corresponding
The probe B needle point normal load is 4000~7000nN.
8. superslide between a kind of atomic force microscope probe and graphite surface for realizing taper needle point according to claim 1
Method, which is characterized in that the probe A and probe B is silicon probe.
9. superslide between a kind of atomic force microscope probe and graphite surface for realizing taper needle point according to claim 1
Method, which is characterized in that in step S20, change setting numerical value is in the control software of atomic force microscope to changing
The normal load of probe A measures the lateral force signal of selected sample area 1, to obtain under different loads under different loads
Probe A needle point and graphite surface between frictional force, frictional force is coefficient of friction with load change slope of a curve.
10. surpassing between a kind of atomic force microscope probe and graphite surface for realizing taper needle point according to claim 1
Sliding method, which is characterized in that in step S20, the surface in selection region 1 having a size of 600nm × 600nm is as frictional force
The scanning area of test.
Priority Applications (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910688409.XA CN110488044B (en) | 2019-07-29 | 2019-07-29 | Method for realizing ultra-smoothness between AFM probe with conical tip and graphite surface |
| PCT/CN2019/120657 WO2021017331A1 (en) | 2019-07-29 | 2019-11-25 | Method for achieving ultra-lubricity between afm probe having conical tip and graphite surface |
| GB2202742.9A GB2601685B (en) | 2019-07-29 | 2019-11-25 | Method for Realizing Superlubricity between AFM Probe with Conical Tip and Graphite Surface |
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| CN201910688409.XA CN110488044B (en) | 2019-07-29 | 2019-07-29 | Method for realizing ultra-smoothness between AFM probe with conical tip and graphite surface |
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| CN110488044B CN110488044B (en) | 2020-09-22 |
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111717881A (en) * | 2020-05-29 | 2020-09-29 | 深圳清华大学研究院 | Preparation method of ultra-smooth sliding block |
| WO2021017331A1 (en) * | 2019-07-29 | 2021-02-04 | 清华大学 | Method for achieving ultra-lubricity between afm probe having conical tip and graphite surface |
| CN112661150A (en) * | 2020-12-28 | 2021-04-16 | 深圳清华大学研究院 | Method for manufacturing ultra-smooth graphite island with uniform thickness |
| CN114236183A (en) * | 2021-12-17 | 2022-03-25 | 湘潭大学 | Preparation method of atomic force microscope probe wrapping two-dimensional material |
| US11613806B2 (en) | 2020-08-04 | 2023-03-28 | Lanzhou Institute Of Chemical Physics, Chinese Academy Of Sciences | Method for preparing ammonium thiomolybdate-porous amorphous carbon composite superlubricity film |
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| US11613806B2 (en) | 2020-08-04 | 2023-03-28 | Lanzhou Institute Of Chemical Physics, Chinese Academy Of Sciences | Method for preparing ammonium thiomolybdate-porous amorphous carbon composite superlubricity film |
| CN112661150A (en) * | 2020-12-28 | 2021-04-16 | 深圳清华大学研究院 | Method for manufacturing ultra-smooth graphite island with uniform thickness |
| CN112661150B (en) * | 2020-12-28 | 2023-07-04 | 深圳清华大学研究院 | Method for manufacturing super-talc ink islands with uniform thickness |
| CN114236183A (en) * | 2021-12-17 | 2022-03-25 | 湘潭大学 | Preparation method of atomic force microscope probe wrapping two-dimensional material |
Also Published As
| Publication number | Publication date |
|---|---|
| GB2601685A (en) | 2022-06-08 |
| WO2021017331A1 (en) | 2021-02-04 |
| GB202202742D0 (en) | 2022-04-13 |
| GB2601685B (en) | 2023-11-01 |
| CN110488044B (en) | 2020-09-22 |
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