CN110487450B - Flexible touch sensor and preparation method and application thereof - Google Patents
Flexible touch sensor and preparation method and application thereof Download PDFInfo
- Publication number
- CN110487450B CN110487450B CN201910785274.9A CN201910785274A CN110487450B CN 110487450 B CN110487450 B CN 110487450B CN 201910785274 A CN201910785274 A CN 201910785274A CN 110487450 B CN110487450 B CN 110487450B
- Authority
- CN
- China
- Prior art keywords
- flexible
- micro
- tactile sensor
- electrode
- gasket layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 238000002360 preparation method Methods 0.000 title claims abstract description 24
- 239000002086 nanomaterial Substances 0.000 claims abstract description 70
- 239000000758 substrate Substances 0.000 claims description 32
- 229920005570 flexible polymer Polymers 0.000 claims description 28
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 claims description 22
- 238000000034 method Methods 0.000 claims description 19
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims description 18
- -1 polydimethylsiloxane Polymers 0.000 claims description 17
- 229920006254 polymer film Polymers 0.000 claims description 15
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 14
- 229910052737 gold Inorganic materials 0.000 claims description 14
- 239000010931 gold Substances 0.000 claims description 14
- 239000000463 material Substances 0.000 claims description 14
- 229920000515 polycarbonate Polymers 0.000 claims description 14
- 239000004417 polycarbonate Substances 0.000 claims description 14
- 229910052710 silicon Inorganic materials 0.000 claims description 14
- 239000010703 silicon Substances 0.000 claims description 14
- 230000002441 reversible effect Effects 0.000 claims description 13
- 239000004205 dimethyl polysiloxane Substances 0.000 claims description 12
- 229920000435 poly(dimethylsiloxane) Polymers 0.000 claims description 12
- 239000001569 carbon dioxide Substances 0.000 claims description 11
- 229910002092 carbon dioxide Inorganic materials 0.000 claims description 11
- 238000005520 cutting process Methods 0.000 claims description 11
- 238000005530 etching Methods 0.000 claims description 11
- 238000001704 evaporation Methods 0.000 claims description 11
- 230000008020 evaporation Effects 0.000 claims description 11
- 238000000465 moulding Methods 0.000 claims description 11
- 238000007747 plating Methods 0.000 claims description 8
- 238000003698 laser cutting Methods 0.000 claims description 6
- 229920001721 polyimide Polymers 0.000 claims description 6
- 239000004020 conductor Substances 0.000 claims description 5
- 229920000139 polyethylene terephthalate Polymers 0.000 claims description 5
- 239000005020 polyethylene terephthalate Substances 0.000 claims description 5
- 229910052709 silver Inorganic materials 0.000 claims description 5
- 239000004332 silver Substances 0.000 claims description 5
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 3
- 239000004642 Polyimide Substances 0.000 claims description 3
- 229910052799 carbon Inorganic materials 0.000 claims description 3
- 238000004519 manufacturing process Methods 0.000 claims description 3
- 229920006289 polycarbonate film Polymers 0.000 claims description 3
- 239000002861 polymer material Substances 0.000 claims description 3
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 2
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 claims description 2
- 229920001940 conductive polymer Polymers 0.000 claims description 2
- 229910052802 copper Inorganic materials 0.000 claims description 2
- 239000010949 copper Substances 0.000 claims description 2
- 230000003993 interaction Effects 0.000 claims description 2
- 125000006850 spacer group Chemical group 0.000 claims description 2
- 230000035945 sensitivity Effects 0.000 abstract description 19
- 230000008901 benefit Effects 0.000 abstract description 8
- 238000001514 detection method Methods 0.000 abstract description 6
- 239000010410 layer Substances 0.000 description 91
- 238000005516 engineering process Methods 0.000 description 29
- 238000010023 transfer printing Methods 0.000 description 18
- 239000011248 coating agent Substances 0.000 description 12
- 238000000576 coating method Methods 0.000 description 12
- 238000010894 electron beam technology Methods 0.000 description 9
- 239000000499 gel Substances 0.000 description 9
- 239000002120 nanofilm Substances 0.000 description 9
- 238000001259 photo etching Methods 0.000 description 9
- 239000002994 raw material Substances 0.000 description 9
- 238000004528 spin coating Methods 0.000 description 9
- 238000012360 testing method Methods 0.000 description 9
- 238000007738 vacuum evaporation Methods 0.000 description 9
- 239000002202 Polyethylene glycol Substances 0.000 description 7
- 230000000052 comparative effect Effects 0.000 description 7
- 230000006870 function Effects 0.000 description 7
- 229920001223 polyethylene glycol Polymers 0.000 description 7
- KKEYFWRCBNTPAC-UHFFFAOYSA-L terephthalate(2-) Chemical compound [O-]C(=O)C1=CC=C(C([O-])=O)C=C1 KKEYFWRCBNTPAC-UHFFFAOYSA-L 0.000 description 7
- 210000003414 extremity Anatomy 0.000 description 5
- 230000009286 beneficial effect Effects 0.000 description 4
- 238000013461 design Methods 0.000 description 4
- KWGKDLIKAYFUFQ-UHFFFAOYSA-M lithium chloride Chemical compound [Li+].[Cl-] KWGKDLIKAYFUFQ-UHFFFAOYSA-M 0.000 description 4
- 238000001000 micrograph Methods 0.000 description 4
- 239000011664 nicotinic acid Substances 0.000 description 4
- 239000003990 capacitor Substances 0.000 description 3
- 230000008859 change Effects 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 239000000017 hydrogel Substances 0.000 description 3
- 230000007246 mechanism Effects 0.000 description 3
- 230000035807 sensation Effects 0.000 description 3
- HRPVXLWXLXDGHG-UHFFFAOYSA-N Acrylamide Chemical compound NC(=O)C=C HRPVXLWXLXDGHG-UHFFFAOYSA-N 0.000 description 2
- 238000012669 compression test Methods 0.000 description 2
- 238000009826 distribution Methods 0.000 description 2
- 239000010416 ion conductor Substances 0.000 description 2
- 239000002608 ionic liquid Substances 0.000 description 2
- 150000002500 ions Chemical class 0.000 description 2
- 210000001595 mastoid Anatomy 0.000 description 2
- 239000004005 microsphere Substances 0.000 description 2
- 238000004806 packaging method and process Methods 0.000 description 2
- IXPNQXFRVYWDDI-UHFFFAOYSA-N 1-methyl-2,4-dioxo-1,3-diazinane-5-carboximidamide Chemical compound CN1CC(C(N)=N)C(=O)NC1=O IXPNQXFRVYWDDI-UHFFFAOYSA-N 0.000 description 1
- 229910014201 BMIMBF4 Inorganic materials 0.000 description 1
- PHOQVHQSTUBQQK-SQOUGZDYSA-N D-glucono-1,5-lactone Chemical compound OC[C@H]1OC(=O)[C@H](O)[C@@H](O)[C@@H]1O PHOQVHQSTUBQQK-SQOUGZDYSA-N 0.000 description 1
- SHWNNYZBHZIQQV-UHFFFAOYSA-J EDTA monocalcium diisodium salt Chemical compound [Na+].[Na+].[Ca+2].[O-]C(=O)CN(CC([O-])=O)CCN(CC([O-])=O)CC([O-])=O SHWNNYZBHZIQQV-UHFFFAOYSA-J 0.000 description 1
- 206010016807 Fluid retention Diseases 0.000 description 1
- 208000004044 Hypesthesia Diseases 0.000 description 1
- 208000004356 Hysteria Diseases 0.000 description 1
- DGAQECJNVWCQMB-PUAWFVPOSA-M Ilexoside XXIX Chemical compound C[C@@H]1CC[C@@]2(CC[C@@]3(C(=CC[C@H]4[C@]3(CC[C@@H]5[C@@]4(CC[C@@H](C5(C)C)OS(=O)(=O)[O-])C)C)[C@@H]2[C@]1(C)O)C)C(=O)O[C@H]6[C@@H]([C@H]([C@@H]([C@H](O6)CO)O)O)O.[Na+] DGAQECJNVWCQMB-PUAWFVPOSA-M 0.000 description 1
- 208000028389 Nerve injury Diseases 0.000 description 1
- 208000004983 Phantom Limb Diseases 0.000 description 1
- 208000020764 Sensation disease Diseases 0.000 description 1
- 238000007792 addition Methods 0.000 description 1
- 238000010009 beating Methods 0.000 description 1
- 239000012620 biological material Substances 0.000 description 1
- 210000004204 blood vessel Anatomy 0.000 description 1
- 230000037396 body weight Effects 0.000 description 1
- 238000012512 characterization method Methods 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 208000012839 conversion disease Diseases 0.000 description 1
- 230000006378 damage Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 201000010099 disease Diseases 0.000 description 1
- 208000037265 diseases, disorders, signs and symptoms Diseases 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000013013 elastic material Substances 0.000 description 1
- 238000005265 energy consumption Methods 0.000 description 1
- 208000034783 hypoesthesia Diseases 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 230000001939 inductive effect Effects 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 230000008764 nerve damage Effects 0.000 description 1
- 210000000653 nervous system Anatomy 0.000 description 1
- 230000008447 perception Effects 0.000 description 1
- 229920000642 polymer Polymers 0.000 description 1
- 239000011148 porous material Substances 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 230000009023 proprioceptive sensation Effects 0.000 description 1
- 239000011241 protective layer Substances 0.000 description 1
- 230000010349 pulsation Effects 0.000 description 1
- 210000002321 radial artery Anatomy 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 230000029058 respiratory gaseous exchange Effects 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 229910052708 sodium Inorganic materials 0.000 description 1
- 239000011734 sodium Substances 0.000 description 1
- 235000010413 sodium alginate Nutrition 0.000 description 1
- 229940005550 sodium alginate Drugs 0.000 description 1
- 239000000661 sodium alginate Substances 0.000 description 1
- 230000000638 stimulation Effects 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 208000024891 symptom Diseases 0.000 description 1
- 210000001519 tissue Anatomy 0.000 description 1
- 238000002054 transplantation Methods 0.000 description 1
- 210000000707 wrist Anatomy 0.000 description 1
Images
Classifications
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
- A61B5/00—Measuring for diagnostic purposes; Identification of persons
- A61B5/02—Detecting, measuring or recording pulse, heart rate, blood pressure or blood flow; Combined pulse/heart-rate/blood pressure determination; Evaluating a cardiovascular condition not otherwise provided for, e.g. using combinations of techniques provided for in this group with electrocardiography or electroauscultation; Heart catheters for measuring blood pressure
- A61B5/0205—Simultaneously evaluating both cardiovascular conditions and different types of body conditions, e.g. heart and respiratory condition
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/14—Measuring force or stress, in general by measuring variations in capacitance or inductance of electrical elements, e.g. by measuring variations of frequency of electrical oscillators
- G01L1/142—Measuring force or stress, in general by measuring variations in capacitance or inductance of electrical elements, e.g. by measuring variations of frequency of electrical oscillators using capacitors
- G01L1/146—Measuring force or stress, in general by measuring variations in capacitance or inductance of electrical elements, e.g. by measuring variations of frequency of electrical oscillators using capacitors for measuring force distributions, e.g. using force arrays
Landscapes
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Physiology (AREA)
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Cardiology (AREA)
- Pathology (AREA)
- Medical Informatics (AREA)
- General Physics & Mathematics (AREA)
- Biophysics (AREA)
- Power Engineering (AREA)
- Biomedical Technology (AREA)
- Heart & Thoracic Surgery (AREA)
- Pulmonology (AREA)
- Molecular Biology (AREA)
- Surgery (AREA)
- Animal Behavior & Ethology (AREA)
- General Health & Medical Sciences (AREA)
- Public Health (AREA)
- Veterinary Medicine (AREA)
- Measurement And Recording Of Electrical Phenomena And Electrical Characteristics Of The Living Body (AREA)
- Measurement Of The Respiration, Hearing Ability, Form, And Blood Characteristics Of Living Organisms (AREA)
Abstract
Description
Claims (32)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201910785274.9A CN110487450B (en) | 2019-08-23 | 2019-08-23 | Flexible touch sensor and preparation method and application thereof |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201910785274.9A CN110487450B (en) | 2019-08-23 | 2019-08-23 | Flexible touch sensor and preparation method and application thereof |
Publications (2)
Publication Number | Publication Date |
---|---|
CN110487450A CN110487450A (en) | 2019-11-22 |
CN110487450B true CN110487450B (en) | 2021-09-07 |
Family
ID=68553360
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201910785274.9A Active CN110487450B (en) | 2019-08-23 | 2019-08-23 | Flexible touch sensor and preparation method and application thereof |
Country Status (1)
Country | Link |
---|---|
CN (1) | CN110487450B (en) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN111238545B (en) * | 2020-01-17 | 2021-10-12 | 腾讯科技(深圳)有限公司 | Sensor, intelligent device, sensing method and storage medium |
CN112587140B (en) * | 2020-12-09 | 2023-03-21 | 清华大学深圳国际研究生院 | Self-attaching bionic octopus sucking disc micro-nano structure dry electrode |
CN113588140B (en) * | 2021-07-08 | 2022-12-09 | 上海交通大学 | Pressure sensor, pressure sensing array and preparation method thereof |
CN114720026A (en) * | 2022-03-30 | 2022-07-08 | 哈尔滨工业大学 | Wide linear response range force touch sensor based on gradient composite integrated structure |
Citations (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101776495A (en) * | 2010-03-12 | 2010-07-14 | 浙江大学 | Micro/nano fiber structure-based touch sensor and preparation method thereof |
CN103983382A (en) * | 2014-06-04 | 2014-08-13 | 合肥工业大学 | All-flexible capacitive tactile sensor |
CN104555883A (en) * | 2013-10-24 | 2015-04-29 | 中国科学院苏州纳米技术与纳米仿生研究所 | Electronic skin and production method thereof |
CN105865667A (en) * | 2016-05-19 | 2016-08-17 | 北京印刷学院 | Capacitive flexible pressure sensor based on microstructural dielectric layers and preparation method of capacitive flexible pressure sensor |
CN106298083A (en) * | 2016-10-31 | 2017-01-04 | 南方科技大学 | Preparation method of flexible transparent electrode |
CN106706176A (en) * | 2016-11-23 | 2017-05-24 | 浙江大学 | Capacitive touch sensor having patterned microstructure array |
CN106802200A (en) * | 2017-02-23 | 2017-06-06 | 北京航空航天大学 | A kind of flexible vector tactile and slip sense compound sensor |
CN106813811A (en) * | 2017-01-20 | 2017-06-09 | 南京大学 | A kind of high sensitivity capacitor type pliable pressure sensor |
CN107329436A (en) * | 2017-08-10 | 2017-11-07 | 苏州大学 | Flexible touch sensation sensor and robotic handling systems |
CN108369464A (en) * | 2015-10-05 | 2018-08-03 | 阿莫绿色技术有限公司 | Touch pressure sensing device further |
CN108827501A (en) * | 2018-07-18 | 2018-11-16 | 南方科技大学 | Tactile sensor and preparation method thereof |
CN208998966U (en) * | 2018-06-07 | 2019-06-18 | 河北工业大学 | A kind of capacitance type touch sensor based on zero Poisson's ratio structure |
CN110118621A (en) * | 2018-02-06 | 2019-08-13 | 中国科学院深圳先进技术研究院 | A kind of selfreparing pliable pressure sensor and preparation method thereof |
-
2019
- 2019-08-23 CN CN201910785274.9A patent/CN110487450B/en active Active
Patent Citations (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101776495A (en) * | 2010-03-12 | 2010-07-14 | 浙江大学 | Micro/nano fiber structure-based touch sensor and preparation method thereof |
CN104555883A (en) * | 2013-10-24 | 2015-04-29 | 中国科学院苏州纳米技术与纳米仿生研究所 | Electronic skin and production method thereof |
CN103983382A (en) * | 2014-06-04 | 2014-08-13 | 合肥工业大学 | All-flexible capacitive tactile sensor |
CN108369464A (en) * | 2015-10-05 | 2018-08-03 | 阿莫绿色技术有限公司 | Touch pressure sensing device further |
CN105865667A (en) * | 2016-05-19 | 2016-08-17 | 北京印刷学院 | Capacitive flexible pressure sensor based on microstructural dielectric layers and preparation method of capacitive flexible pressure sensor |
CN106298083A (en) * | 2016-10-31 | 2017-01-04 | 南方科技大学 | Preparation method of flexible transparent electrode |
CN106706176A (en) * | 2016-11-23 | 2017-05-24 | 浙江大学 | Capacitive touch sensor having patterned microstructure array |
CN106813811A (en) * | 2017-01-20 | 2017-06-09 | 南京大学 | A kind of high sensitivity capacitor type pliable pressure sensor |
CN106802200A (en) * | 2017-02-23 | 2017-06-06 | 北京航空航天大学 | A kind of flexible vector tactile and slip sense compound sensor |
CN107329436A (en) * | 2017-08-10 | 2017-11-07 | 苏州大学 | Flexible touch sensation sensor and robotic handling systems |
CN110118621A (en) * | 2018-02-06 | 2019-08-13 | 中国科学院深圳先进技术研究院 | A kind of selfreparing pliable pressure sensor and preparation method thereof |
CN208998966U (en) * | 2018-06-07 | 2019-06-18 | 河北工业大学 | A kind of capacitance type touch sensor based on zero Poisson's ratio structure |
CN108827501A (en) * | 2018-07-18 | 2018-11-16 | 南方科技大学 | Tactile sensor and preparation method thereof |
Also Published As
Publication number | Publication date |
---|---|
CN110487450A (en) | 2019-11-22 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
CN110487450B (en) | Flexible touch sensor and preparation method and application thereof | |
Shen | Recent advances of flexible sensors for biomedical applications | |
Kim et al. | Printing flexible and hybrid electronics for human skin and eye‐interfaced health monitoring systems | |
Liu et al. | Lab-on-skin: a review of flexible and stretchable electronics for wearable health monitoring | |
Yao et al. | Nanomaterial‐enabled wearable sensors for healthcare | |
Yang et al. | Non-invasive flexible and stretchable wearable sensors with nano-based enhancement for chronic disease care | |
CN108553102B (en) | Flexible stretchable multichannel convex surface muscle electrode and preparation method thereof | |
Niu et al. | Surface bioelectric dry Electrodes: A review | |
Lo et al. | Stretchable sponge electrodes for long-term and motion-artifact-tolerant recording of high-quality electrophysiologic signals | |
Du et al. | Biocompatible and breathable all-fiber-based piezoresistive sensor with high sensitivity for human physiological movements monitoring | |
Yao et al. | Flexible bioelectronics for physiological signals sensing and disease treatment | |
Dos Santos et al. | Transduction mechanisms, micro-structuring techniques, and applications of electronic skin pressure sensors: a review of recent advances | |
CN205691269U (en) | The height soft elastic electron skin measured for contact pressure | |
Deng et al. | Smart wearable systems for health monitoring | |
KR102206105B1 (en) | Sensor patch | |
CN111829698A (en) | Double-layer touch sensor based on bionic mechanism | |
CN210990263U (en) | Intelligent wearable assembly of self-powered flexible electrode and intelligent wearable system | |
Xi et al. | Piezoelectric wearable atrial fibrillation prediction wristband enabled by machine learning and hydrogel affinity | |
Chowdhury et al. | Monitoring and analysis of cardiovascular pulse waveforms using flexible capacitive and piezoresistive pressure sensors and machine learning perspective | |
Jin et al. | Smart materials for wearable healthcare devices | |
Zhao et al. | Development of flexible electronic biosensors for healthcare engineering | |
Rachim et al. | A scalable laser‐centric fabrication of an epidermal cardiopulmonary patch | |
Kim et al. | Emerging Bio‐Interfacing Wearable Devices for Signal Monitoring: Overview of the Mechanisms and Diverse Sensor Designs to Target Distinct Physiological Bio‐Parameters | |
Li et al. | E-Tattoos: Toward Functional but Imperceptible Interfacing with Human Skin | |
Yao et al. | Recent advances in materials, designs and applications of skin electronics |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
PB01 | Publication | ||
PB01 | Publication | ||
SE01 | Entry into force of request for substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
EE01 | Entry into force of recordation of patent licensing contract | ||
EE01 | Entry into force of recordation of patent licensing contract |
Application publication date: 20191122 Assignee: Shenzhen Churou Technology Co.,Ltd. Assignor: Southern University of Science and Technology Contract record no.: X2021980002164 Denomination of invention: A flexible tactile sensor and its preparation method and Application License type: Exclusive License Record date: 20210326 |
|
GR01 | Patent grant | ||
GR01 | Patent grant | ||
EC01 | Cancellation of recordation of patent licensing contract | ||
EC01 | Cancellation of recordation of patent licensing contract |
Assignee: Shenzhen Churou Technology Co.,Ltd. Assignor: Southern University of Science and Technology Contract record no.: X2021980002164 Date of cancellation: 20230804 |