CN110487450B - Flexible touch sensor and preparation method and application thereof - Google Patents
Flexible touch sensor and preparation method and application thereof Download PDFInfo
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- CN110487450B CN110487450B CN201910785274.9A CN201910785274A CN110487450B CN 110487450 B CN110487450 B CN 110487450B CN 201910785274 A CN201910785274 A CN 201910785274A CN 110487450 B CN110487450 B CN 110487450B
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- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
- A61B5/00—Measuring for diagnostic purposes; Identification of persons
- A61B5/02—Detecting, measuring or recording pulse, heart rate, blood pressure or blood flow; Combined pulse/heart-rate/blood pressure determination; Evaluating a cardiovascular condition not otherwise provided for, e.g. using combinations of techniques provided for in this group with electrocardiography or electroauscultation; Heart catheters for measuring blood pressure
- A61B5/0205—Simultaneously evaluating both cardiovascular conditions and different types of body conditions, e.g. heart and respiratory condition
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/14—Measuring force or stress, in general by measuring variations in capacitance or inductance of electrical elements, e.g. by measuring variations of frequency of electrical oscillators
- G01L1/142—Measuring force or stress, in general by measuring variations in capacitance or inductance of electrical elements, e.g. by measuring variations of frequency of electrical oscillators using capacitors
- G01L1/146—Measuring force or stress, in general by measuring variations in capacitance or inductance of electrical elements, e.g. by measuring variations of frequency of electrical oscillators using capacitors for measuring force distributions, e.g. using force arrays
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Abstract
The invention provides a flexible touch sensor and a preparation method and application thereof, wherein the flexible touch sensor comprises a working electrode and a counter electrode, wherein the working electrode comprises a flexible electrode and a flexible gasket layer; one side of the flexible electrode, which is close to the flexible gasket layer, is provided with a micro-nano structure, and the flexible gasket layer is provided with a through hole. The flexible touch sensor provided by the invention has the advantages of softness, high sensitivity, low pressure detection limit, simple system structure, low cost and large-area array preparation.
Description
Technical Field
The invention belongs to the technical field of sensors, and relates to a flexible touch sensor and a preparation method and application thereof.
Background
The bionic intelligent sensing technology plays an increasingly wide role in the current informatization and intelligent society. Wherein, in the field of human body reparation, the sensing technology is utilized to endow the patients with hypodermal sensation with normal tactile sensation function again, and the method has important significance for the rehabilitation of the patients and the improvement of the life quality of the patients. Hypoesthesia refers to a sensory disorder in which the skin's ability to sense external stimuli is reduced, such as intense painful stimuli, and causes little to no sensation. The symptoms are generally caused by nerve injury, and are often seen in patients suffering from hysteria and nervous system organic diseases, and in disabled patients who have undergone human tissue transplantation operations such as skin, trunk, limbs and the like. The existing solutions such as the bionic artificial limb still have a great deal of problems, for example, the mechanical artificial limb is generally made of hard materials, has heavy texture, cannot perform various deformations required by human activities, and is inconvenient to use; in addition, the current commercial artificial limb does not have a sensing feedback function, so that a user lacks proprioception, is easy to have a phantom limb phenomenon and the like, and cannot meet the user demand.
Based on many problems of the existing hard bionic artificial limb, researchers propose a flexible touch sensor as a solution. The flexible sensor is endowed with the deformation capability which is not possessed by the hard sensors such as stretching and twisting by adopting an elastic material or island-bridge type and other special structures, and the comfort of a wearer can be effectively improved. Flexible sensors include capacitive, resistive, inductive, photoelectric, and piezoelectric based mechanisms. The capacitance sensor can convert the stimulation signal of the external force into the change of the capacitance value, thereby realizing the sensing function. The sensor has the advantages of high response speed, low energy consumption, simple structure, low signal-to-noise ratio and the like, and has good application prospect, thereby becoming the current hotspot research field.
CN103983382A discloses a fully flexible capacitive touch sensor, which comprises a flexible substrate, a shielding layer disposed on the lower surface of the flexible substrate, a flexible conductive lower plate disposed on the upper surface of the flexible substrate, and a flexible conductive upper plate electrode surrounding the flexible conductive lower plate at intervals; an inverted concave elastic dielectric layer is covered between the flexible conductive lower polar plate and the flexible conductive upper polar plate, an inverted concave flexible conductive upper polar plate is covered on the periphery of the elastic dielectric layer, and an inverted concave flexible protective layer is covered on the periphery of the flexible conductive upper polar plate. The design bundles the leads of the upper and lower electrode plates on the same flexible substrate, which is beneficial to solving the problems of complicated leads, difficult maintenance and the like existing in the design of the sensor array; however, the sensor adopts a multi-layer structure design, and has the defects of difficult packaging, complex preparation process and the like. CN109443607A discloses a novel sensing system structure of human bionic electronic skin, which comprises positioning layer gel based on acrylamide and lithium chloride and BMIMBF based on ionic liquid4A polymeric sensing layer gel; a VHB (VHB) belt is arranged between the positioning layer gel based on the acrylamide and the lithium chloride and the sensing layer gel based on the ionic liquid BMIMBF4 polymer; the method is beneficial to improving the positioning accuracy of the sensing system, and meanwhile, the complexity of the system is not increased; however, the ionic gel introduced by the sensor is unstable in property, has biological safety hazards, has strict requirements on device packaging, and is not beneficial to practical application. CN107941386A discloses a flexible force touch sensor based on transparent biomaterial, a sensitive element and a preparation method thereof, wherein the sensitive element comprises a water-retaining layer substrate and hydrogel wrapped in the water-retaining layer substrate, the solute of the hydrogel is composed of sodium alginate, disodium calcium ethylene diamine tetraacetate and gluconic acid delta-lactone according to the mass ratio of 2 (0.5-1.5) to (0.5-1.5), wherein the sodium alginateThe mass concentration of (A) is 2-6%; the sensor comprises a sensitive element, a measuring circuit, an AD conversion circuit and a display which are connected in sequence in a wired or wireless way; the hydrogel system adopted by the design has high requirements on environment humidity and temperature, strict water-retention sealing elements are required in preparation and use links, and meanwhile, the slow volatilization of gel moisture can cause the stability of the elements to be reduced, so that the problems exist in long-term use.
Therefore, a flexible sensor which has a simple structure and high sensitivity and can acquire pressure distribution in a certain area needs to be developed to meet application requirements.
Disclosure of Invention
The invention aims to provide a flexible touch sensor and a preparation method and application thereof. The flexible touch sensor provided by the invention has the advantages of high sensitivity, low pressure detection limit, simple structure and high sensitivity.
In order to achieve the purpose, the invention adopts the following technical scheme:
in a first aspect, the present invention provides a flexible tactile sensor comprising a working electrode and a counter electrode, the working electrode comprising a flexible electrode and a flexible spacer layer.
One side of the flexible electrode, which is close to the flexible gasket layer, is provided with a micro-nano structure, and the flexible gasket layer is provided with a through hole.
The micro-nano structure refers to a micro-nano structure with micron and nanometer scales on the surface of a flexible electrode.
When the flexible touch sensor is used, one side of the flexible electrode with the micro-nano structure is attached to the flexible gasket layer, the flexible gasket layer is attached to the skin, and the flexible gasket layer is provided with the through hole which can enable the micro-nano structure of the flexible electrode to contact the skin; and simultaneously, the pair of electrodes is attached to the other position of the skin to form the flexible touch sensor.
The counter electrode is not limited, and any counter electrode which can meet the requirements of the counter electrode can be used as the counter electrode of the invention, and the counter electrode needs to meet the application requirements of the invention, namely, the counter electrode has excellent fitting property on skin and can be fully fitted on the skin; for example, the material of the counter electrode provided by the invention can be selected from the flexible electrode provided by the invention, the flexible electrode without a micro-nano structure, a gold foil, a conductive gel and the like.
Based on a capacitance sensing mechanism, after the sensor is attached to the skin (one side of the flexible gasket layer, which is far away from the flexible electrode, is attached to the skin) by utilizing the intrinsic ion conductor characteristic of the human body, an electric double layer capacitor is formed between the skin and the flexible electrode, and when the contact area between the skin and the flexible electrode is changed, a capacitance signal is changed, so that a sensing function can be realized, and further high-sensitivity touch sensing of the skin can be realized.
The flexible touch sensor provided by the invention has the advantages of softness, high sensitivity, low pressure detection limit, simple system structure, low cost and large-area array preparation, and can recover the touch perception function of patients with skin deterioration.
In the invention, the micro-nano structure comprises a height-diameter ratio micro-column, a conical structure, a hemispherical structure or a pyramid structure, and the height-diameter ratio micro-column is preferably selected.
The height-diameter ratio micro-column refers to a micro-cylinder structure with a larger H/D value, wherein H represents the height of the cylinder, and D represents the diameter of the cylinder.
Preferably, the height to diameter ratio microcolumn has a diameter of 5 to 20 μm, for example, 6 μm, 10 μm, 12 μm, 16 μm, 18 μm, etc., and more preferably 10 μm.
Preferably, the height to diameter ratio of the height of the microcolumn is 10 to 70 μm, for example, 20 μm, 30 μm, 40 μm, 50 μm, 60 μm, etc., more preferably 20 to 50 μm, and still more preferably 30 μm.
Preferably, the center-to-center distance between two adjacent micro columns with the aspect ratio is 15-50 μm, such as 20 μm, 30 μm, 35 μm, 40 μm, and the like, and more preferably 20 μm.
The invention preferably selects the height-diameter ratio microcolumn with the diameter of 10 mu m, the height of 30 mu m and the center distance of 20 mu m, compared with other microcolumns with larger height-diameter ratio, the invention has the advantages of easy demoulding, high preparation success rate and the like, and compared with microcolumns with smaller height-diameter ratio, conical structures or hemispherical structures and the like, the invention also has the advantages of easy deformation under pressure, benefit for improving the sensitivity and the like.
Preferably, the micro-nano structure is a micro-nano array structure.
According to the invention, micro-nano structures are preferably arranged in an array form.
Preferably, the substrate material of the flexible electrode is a flexible polymer material selected from polydimethylsiloxane and/or ionic gel.
Preferably, the substrate has a thickness of 30 to 200. mu.m, such as 40. mu.m, 50. mu.m, 80. mu.m, 100. mu.m, 120. mu.m, 150. mu.m, 180. mu.m, etc., more preferably 50 to 100. mu.m, still more preferably 70 μm.
Preferably, the hole density of the through holes on the flexible gasket layer is 30-60%, such as 35%, 40%, 45%, 50%, 55%, etc.
If the aperture of the through hole is too large, the flexible electrode may directly contact the skin when the through hole is attached to the skin, so that the significance of adding the flexible gasket is lost, and if the aperture of the through hole is too small, the flexible electrode may not contact the skin, so that the sensing function is lost.
Similarly, if the hole density of the through holes is too small or too large, the high sensitivity detection of the present invention cannot be achieved.
Preferably, the shape of the through hole is selected from any one or a combination of at least two of a triangle, a circle, a square or a regular hexagon, and further preferably a circle.
Preferably, the diameter of the circle is 5-20mm, such as 8mm, 10mm, 12mm, 15mm, 18mm, etc., further preferably 8-15mm, still further preferably 10 mm.
Preferably, the flexible gasket layer is a polymer film layer.
Preferably, the polymer film is selected from any one of polycarbonate film, polyimide film or polyethylene terephthalate film or a combination of at least two of the polycarbonate film, the polyimide film and the polyethylene terephthalate film.
Preferably, the thickness of the flexible gasket layer is 15-75 μm, more preferably 20-50 μm.
Preferably, the surface of the flexible electrode has a conductive plating.
Preferably, the thickness of the conductive plating layer is 50 to 150nm, such as 60nm, 80nm, 100nm, 120nm, 140nm, etc., and more preferably 80 to 120 nm.
Preferably, the conductive material used for the conductive plating layer is selected from any one or a combination of at least two of gold, silver, copper, carbon, or a conductive polymer, and further preferably gold and/or silver.
The flexible touch sensor of the present invention can be made by any method that can be used to make it, and the following methods are not intended to be limiting and are merely exemplary illustrations.
In a second aspect, the present invention provides a method for manufacturing a flexible tactile sensor according to the first aspect, wherein the method for manufacturing the working electrode comprises the following steps:
(1) preparing a micro-nano structure on a silicon plate, and then preparing a flexible electrode substrate with the micro-nano structure by taking the micro-nano structure as a template;
(2) preparing a conducting layer on the outer side of the substrate obtained in the step (1) to obtain a flexible electrode;
(3) preparing a through hole on the polymer film to obtain a flexible gasket layer;
(4) and attaching one side of the flexible electrode with the micro-nano structure on a flexible gasket layer to obtain the working electrode.
In the working process of the flexible touch sensor, the working electrode is attached to one position of the skin, the counter electrode is attached to the other position of the skin, and the counter electrode in the prior art can be used, so that the preparation method of the counter electrode is not limited.
Preferably, step (1) is specifically: etching the micro-nano structure on the silicon plate to obtain a primary template, then preparing a secondary template through a hot stamping method, and then obtaining the flexible electrode substrate with the micro-nano structure through reverse molding.
The reverse mold of the invention can be specifically as follows: and coating the high polymer material on a secondary template by adopting a coating mode and the like, drying and then demolding, namely, a reverse mold refers to a method for transferring the micro-nano structure from a mold to other high polymer films.
According to the invention, a secondary die-reversing mode or even a tertiary die-reversing mode is selected to prepare the flexible electrode, and mainly the problem that if the micro-nano structure in the primary template is opposite to the micro-nano structure of the flexible electrode, and the hardness of a silicon plate is higher, if the flexible electrode is prepared by directly adopting flexible polymers and utilizing the primary template, the phenomenon that the micro-nano structure is broken when the flexible polymers are demolded can occur due to the fact that the flexible polymers are softer.
Preferably, the substrate of the secondary template is selected from any one of polycarbonate, polyimide or polyethylene terephthalate or a combination of at least two of the same, preferably polycarbonate.
Preferably, the preparation method of the conductive layer is evaporation.
Preferably, the through hole is prepared by any one or a combination of at least two of mechanical cutting, carbon dioxide laser cutting or infrared laser cutting.
In a third aspect, the invention provides a use of a flexible tactile sensor according to the first aspect in a human-computer interaction system.
The flexible touch sensor provided by the invention has high flexibility and comfortableness, can be completely attached to the skin, and can accurately measure the body surface touch information of a human body under various movements; the sensitivity is high, the pressure detection limit is low, the array is realized, the precision is high, and the large-area measurement and collection of the skin surface pressure distribution information can be realized; the flexible touch sensor provided by the invention can be worn for a long time, and can realize continuous monitoring on vital signs of the body weight of people such as pulse, heartbeat, respiration and the like.
Compared with the prior art, the invention has the following beneficial effects:
(1) based on a capacitance sensing mechanism, after the sensor is attached to the skin (one side of the flexible gasket layer, which is far away from the flexible electrode, is attached to the skin) by utilizing the intrinsic ion conductor characteristic of the human body, an electric double layer capacitor is formed between the skin and the flexible electrode, and when the contact area between the skin and the flexible electrode is changed, a capacitance signal is changed, so that a sensing function can be realized, and further high-sensitivity touch sensing of the skin can be realized.
(2) The flexible touch sensor provided by the invention has the advantages of softness, high sensitivity, low pressure detection limit, simple system structure, low cost and large-area array preparation.
Drawings
Fig. 1 is a schematic structural diagram of a sensor provided in embodiment 1 of the present invention.
Wherein, 1-flexible electrode; 2-flexible gasket layer.
Fig. 2 is a schematic structural diagram of a flexible electrode provided in embodiment 1 of the present invention.
101-a substrate; 102-height-diameter ratio micro-column.
Fig. 3 is a schematic structural diagram of a flexible gasket layer provided in embodiment 1 of the present invention.
Therein, 201-a via.
Fig. 4 is a scanning electron microscope image of the flexible polymer film with the micro-pillar structure provided in embodiment 1 of the present invention.
Fig. 5 is a scanning electron microscope image of the flexible polymer film with the micro-pillar structure provided in embodiment 1 of the present invention after a compression test.
Fig. 6 is a sensitivity test chart of the flexible tactile sensor provided in embodiment 1 of the present invention.
Fig. 7 is a human pulse test chart provided in embodiment 1 of the present invention.
Detailed Description
The technical solution of the present invention is further explained by the following embodiments. It should be understood by those skilled in the art that the examples are only for the understanding of the present invention and should not be construed as the specific limitations of the present invention.
Example 1
A flexible touch sensor is composed of a flexible electrode with a micro-nano structure and a flexible gasket layer, wherein one side of the flexible electrode with the micro-nano structure is attached to the flexible gasket layer, as shown in figure 1.
As shown in fig. 2, the flexible electrode has a micro-nano structure array, and the micro-nano structure is a high-diameter ratio micro-column; as shown in fig. 3, the flexible gasket layer has a circular through hole. It should be noted that the sizes in the drawings may not represent actual sizes, and are merely exemplary.
The preparation method comprises the following steps:
(1) etching a round hole structure with a height-diameter ratio on a silicon plate by utilizing a photoetching technology, and taking the round hole structure as a primary template, wherein the diameter of each micropore is 5 micrometers, the depth of each micropore is 10 micrometers, and the center distance of each micropore is 15 micrometers; preparing a secondary template with a micro-column structure by using a hot stamping technology, taking a polycarbonate high-molecular film as a transfer printing material and a primary template as a template through transfer printing;
(2) using polydimethylsiloxane as a raw material, using a spin coating technology, using a secondary template as a template, and performing continuous reverse molding twice to obtain a flexible polymer film with a micro-column structure, wherein the thickness of a film substrate is 30 micrometers, the diameter of a micro-column is 5 micrometers, the height of the micro-column is 10 micrometers, and the center distance of the micro-column is 15 micrometers;
(3) performing gold evaporation on the obtained flexible polymer film with the micro-column structure by using electron beam vacuum evaporation equipment to obtain a flexible electrode, wherein the thickness of a coating film is 50 nm;
(4) cutting a circular hole array structure on a polyethylene glycol terephthalate high polymer film by using carbon dioxide laser to obtain a flexible gasket layer, wherein the thickness of the gasket layer is 15 micrometers, and the diameter of a circular hole is 5 mm;
(5) the flexible gasket layer and the flexible electrode are sequentially attached to the same position of the skin to serve as a sensing area;
(6) and (4) attaching the other flexible electrode obtained in the step (3) to the other position of the skin to be used as a counter electrode, so as to obtain the skin touch sensor.
Example 2
A flexible touch sensor is composed of a flexible electrode with a micro-nano structure and a flexible gasket layer, wherein one side of the flexible electrode with the micro-nano structure is attached to the flexible gasket layer.
The flexible electrode is provided with a micro-nano structure array, and the micro-nano structure is a high-diameter ratio micro-column; the flexible gasket layer has a circular through hole.
The preparation method comprises the following steps:
(1) etching a round hole structure with a height-diameter ratio on a silicon plate by utilizing a photoetching technology, and taking the round hole structure as a primary template, wherein the diameter of each micropore is 15 micrometers, the depth of each micropore is 50 micrometers, and the center distance of each micropore is 40 micrometers; preparing a secondary template with a micro-column structure by using a hot stamping technology, taking a polycarbonate high-molecular film as a transfer printing material and a primary template as a template through transfer printing;
(2) the method comprises the following steps of (1) using ion gel as a raw material, utilizing a spin coating technology, using a secondary template as a template, and performing continuous reverse molding twice to obtain a flexible polymer film with a micro-column structure, wherein the thickness of a film substrate is 50 mu m, the diameter of the micro-column is 15 mu m, the depth of the micro-column is 50 mu m, and the center distance of micro-pores is 40 mu m;
(3) performing gold evaporation on the obtained flexible polymer film with the micro-column structure by using electron beam vacuum evaporation equipment to obtain a flexible electrode, wherein the thickness of a coating film is 60 nm;
(4) cutting a circular hole array structure on a polyethylene glycol terephthalate high polymer film by using carbon dioxide laser to obtain a flexible gasket layer, wherein the thickness of the gasket layer is 30 micrometers, and the diameter of a circular hole is 5 mm;
(5) the flexible gasket layer and the flexible electrode are sequentially attached to the same position of the skin to serve as a sensing area;
(6) and (4) attaching the other flexible electrode obtained in the step (3) to the other position of the skin to be used as a counter electrode, so as to obtain the skin touch sensor.
Example 3
A flexible touch sensor is composed of a flexible electrode with a micro-nano structure and a flexible gasket layer, wherein one side of the flexible electrode with the micro-nano structure is attached to the flexible gasket layer.
The flexible electrode is provided with a micro-nano structure array, and the micro-nano structure is a high-diameter ratio micro-column; the flexible gasket layer has a circular through hole.
The preparation method comprises the following steps:
(1) etching a round hole structure with the height-diameter ratio on a silicon plate by utilizing a photoetching technology, and taking the round hole structure as a primary template, wherein the diameter of each micropore is 20 micrometers, the depth of each micropore is 30 micrometers, and the center distance of each micropore is 50 micrometers; preparing a secondary template with a micro-column structure by using a hot stamping technology, taking a polycarbonate high-molecular film as a transfer printing material and a primary template as a template through transfer printing;
(2) using polydimethylsiloxane as a raw material, using a spin coating technology, using a secondary template as a template, and performing continuous reverse molding twice to obtain a flexible polymer film with a micro-pillar structure, wherein the thickness of a film substrate is 60 micrometers, the diameter of the micro-pillar is 20 micrometers, the depth of the micro-pillar is 30 micrometers, and the center distance of micro-holes is 50 micrometers;
(3) performing gold evaporation on the obtained flexible polymer film with the micro-column structure by using electron beam vacuum evaporation equipment to obtain a flexible electrode, wherein the thickness of a coating film is 80 nm;
(4) cutting a circular hole array structure on a polycarbonate polymer film by using carbon dioxide laser cutting to obtain a flexible gasket layer, wherein the thickness of the gasket layer is 45 mu m, and the diameter of a circular hole is 10 mm;
(5) the flexible gasket layer and the flexible electrode are sequentially attached to the same position of the skin to serve as a sensing area;
(6) and (4) attaching the other flexible electrode obtained in the step (3) to the other position of the skin to be used as a counter electrode, so as to obtain the skin touch sensor.
Example 4
A flexible touch sensor is composed of a flexible electrode with a micro-nano structure and a flexible gasket layer, wherein one side of the flexible electrode with the micro-nano structure is attached to the flexible gasket layer.
The flexible electrode is provided with a micro-nano structure array, and the micro-nano structure is a high-diameter ratio micro-column; the flexible gasket layer has a circular through hole.
The preparation method comprises the following steps:
(1) etching a round hole structure with the height-diameter ratio on a silicon plate by utilizing a photoetching technology, and taking the round hole structure as a primary template, wherein the diameter of each micropore is 10 micrometers, the depth of each micropore is 30 micrometers, and the center distance of each micropore is 35 micrometers; preparing a secondary template with a micro-column structure by using a hot stamping technology, taking a polycarbonate high-molecular film as a transfer printing material and a primary template as a template through transfer printing;
(2) using polydimethylsiloxane as a raw material, using a spin coating technology, using a secondary template as a template, and performing continuous reverse molding twice to obtain a flexible polymer film with a micro-pillar structure, wherein the thickness of a film substrate is 80 micrometers, the diameter of the micro-pillar is 10 micrometers, the depth of the micro-pillar is 30 micrometers, and the center distance of micro-holes is 35 micrometers;
(3) performing gold evaporation on the obtained flexible polymer film with the micro-column structure by using electron beam vacuum evaporation equipment to obtain a flexible electrode, wherein the thickness of a coating film is 80 nm;
(4) cutting a circular hole array structure on the polyimide polymer film by utilizing carbon dioxide laser cutting to obtain a flexible gasket layer, wherein the thickness of the gasket layer is 60 micrometers, and the diameter of a circular hole is 10 mm;
(5) the flexible gasket layer and the flexible electrode are sequentially attached to the same position of the skin to serve as a sensing area;
(6) and (4) attaching the other flexible electrode obtained in the step (3) to the other position of the skin to be used as a counter electrode, so as to obtain the skin touch sensor.
Example 5
A flexible touch sensor is composed of a flexible electrode with a micro-nano structure and a flexible gasket layer, wherein one side of the flexible electrode with the micro-nano structure is attached to the flexible gasket layer.
The flexible electrode is provided with a micro-nano structure array, and the micro-nano structure is a high-diameter ratio micro-column; the flexible gasket layer has a circular through hole.
The preparation method comprises the following steps:
(1) etching a round hole structure with the height-diameter ratio on a silicon plate by utilizing a photoetching technology, and taking the round hole structure as a primary template, wherein the diameter of each micropore is 5 micrometers, the depth of each micropore is 10 micrometers, and the center distance of each micropore is 30 micrometers; preparing a secondary template with a micro-column structure by using a hot stamping technology, taking a polycarbonate high-molecular film as a transfer printing material and a primary template as a template through transfer printing;
(2) using polydimethylsiloxane as a raw material, using a spin coating technology, using a secondary template as a template, and performing continuous reverse molding twice to obtain a flexible polymer film with a micro-pillar structure, wherein the thickness of a film substrate is 80 micrometers, the diameter of the micro-pillar is 5 micrometers, the depth of the micro-pillar is 10 micrometers, and the center distance of micro-holes is 30 micrometers;
(3) performing gold evaporation on the obtained flexible polymer film with the micro-column structure by using electron beam vacuum evaporation equipment to obtain a flexible electrode, wherein the thickness of a coating film is 100 nm;
(4) cutting a circular hole array structure on a polyethylene glycol terephthalate high polymer film by using carbon dioxide laser to obtain a flexible gasket layer, wherein the thickness of the gasket layer is 75 micrometers, and the diameter of a circular hole is 15 mm;
(5) the flexible gasket layer and the flexible electrode are sequentially attached to the same position of the skin to serve as a sensing area;
(6) and (4) attaching the other flexible electrode obtained in the step (3) to the other position of the skin to be used as a counter electrode, so as to obtain the skin touch sensor.
Example 6
A flexible touch sensor is composed of a flexible electrode with a micro-nano structure and a flexible gasket layer, wherein one side of the flexible electrode with the micro-nano structure is attached to the flexible gasket layer.
The flexible electrode is provided with a micro-nano structure array, and the micro-nano structure is a high-diameter ratio micro-column; the flexible gasket layer has a circular through hole.
The preparation method comprises the following steps:
(1) etching a round hole structure with the height-diameter ratio on a silicon plate by utilizing a photoetching technology, and taking the round hole structure as a primary template, wherein the diameter of each micropore is 20 micrometers, the depth of each micropore is 70 micrometers, and the center distance of each micropore is 50 micrometers; preparing a secondary template with a micro-column structure by using a hot stamping technology, taking a polycarbonate high-molecular film as a transfer printing material and a primary template as a template through transfer printing;
(2) using polydimethylsiloxane as a raw material, using a spin coating technology, using a secondary template as a template, and performing continuous reverse molding twice to obtain a flexible polymer film with a micro-pillar structure, wherein the thickness of a film substrate is 200 mu m, the diameter of the micro-pillar is 20 mu m, the depth of the micro-pillar is 70 mu m, and the center distance of micro-holes is 50 mu m;
(3) performing gold evaporation on the obtained flexible polymer film with the micro-column structure by using electron beam vacuum evaporation equipment to obtain a flexible electrode, wherein the thickness of a coating film is 150 nm;
(4) cutting a circular hole array structure on a polyethylene glycol terephthalate high polymer film by using carbon dioxide laser to obtain a flexible gasket layer, wherein the thickness of the gasket layer is 60 micrometers, and the diameter of a circular hole is 20 mm;
(5) the flexible gasket layer and the flexible electrode are sequentially attached to the same position of the skin to serve as a sensing area;
(6) a gold foil electrode with a thickness of 100nm was attached to the other position of the skin as a counter electrode to obtain a skin touch sensor.
Example 7
A flexible touch sensor is composed of a flexible electrode with a micro-nano structure and a flexible gasket layer, wherein one side of the flexible electrode with the micro-nano structure is attached to the flexible gasket layer.
The flexible electrode is provided with a micro-nano structure array, and the micro-nano structure is a high-diameter ratio micro-column; the flexible gasket layer has a circular through hole.
The preparation method comprises the following steps:
(1) etching a round hole structure with the height-diameter ratio on a silicon plate by utilizing a photoetching technology, and taking the round hole structure as a primary template, wherein the diameter of each micropore is 10 micrometers, the depth of each micropore is 50 micrometers, and the center distance of each micropore is 40 micrometers; preparing a secondary template with a micro-column structure by using a hot stamping technology, taking a polycarbonate high-molecular film as a transfer printing material and a primary template as a template through transfer printing;
(2) using polydimethylsiloxane as a raw material, using a spin coating technology, using a secondary template as a template, and performing continuous reverse molding twice to obtain a flexible polymer film with a micro-pillar structure, wherein the thickness of a film substrate is 70 micrometers, the diameter of the micro-pillar is 10 micrometers, the depth of the micro-pillar is 50 micrometers, and the center distance of micro-holes is 40 micrometers;
(3) performing gold evaporation on the obtained flexible polymer film with the micro-column structure by using electron beam vacuum evaporation equipment to obtain a flexible electrode, wherein the thickness of a coating film is 100 nm;
(4) cutting a circular hole array structure on a polyethylene glycol terephthalate high polymer film by using carbon dioxide laser to obtain a flexible gasket layer, wherein the thickness of the gasket layer is 75 micrometers, and the diameter of a circular hole is 20 mm;
(5) the flexible gasket layer and the flexible electrode are sequentially attached to the same position of the skin to serve as a sensing area;
(6) attaching gold foil electrode with thickness of 100nm to another position of skin as counter electrode to obtain skin touch sensor
Example 8
A flexible touch sensor is composed of a flexible electrode with a micro-nano structure and a flexible gasket layer, wherein one side of the flexible electrode with the micro-nano structure is attached to the flexible gasket layer.
The flexible electrode is provided with a micro-nano structure array, and the micro-nano structure is a high-diameter ratio micro-column; the flexible gasket layer has a circular through hole.
The preparation method comprises the following steps:
(1) etching a round hole structure with the height-diameter ratio on a silicon plate by utilizing a photoetching technology, and taking the round hole structure as a primary template, wherein the diameter of each micropore is 10 micrometers, the depth of each micropore is 50 micrometers, and the center distance of each micropore is 40 micrometers; preparing a secondary template with a micro-column structure by using a hot stamping technology, taking a polycarbonate high-molecular film as a transfer printing material and a primary template as a template through transfer printing;
(2) using polydimethylsiloxane as a raw material, using a spin coating technology, using a secondary template as a template, and performing continuous reverse molding twice to obtain a flexible polymer film with a micro-pillar structure, wherein the thickness of a film substrate is 30 micrometers, the diameter of the micro-pillar is 10 micrometers, the depth of the micro-pillar is 50 micrometers, and the center distance of micro-holes is 40 micrometers;
(3) performing gold evaporation on the obtained flexible polymer film with the micro-column structure by using electron beam vacuum evaporation equipment to obtain a flexible electrode, wherein the thickness of a coating film is 120 nm;
(4) cutting a circular hole array structure on a polyethylene glycol terephthalate high polymer film by using carbon dioxide laser to obtain a flexible gasket layer, wherein the thickness of the gasket layer is 75 micrometers, and the diameter of a circular hole is 20 mm;
(5) the flexible gasket layer and the flexible electrode are sequentially attached to the same position of the skin to serve as a sensing area;
(6) and (4) attaching the other flexible electrode obtained in the step (3) to the other position of the skin to be used as a counter electrode, so as to obtain the skin touch sensor.
Example 9
A flexible touch sensor is composed of a flexible electrode with a micro-nano structure and a flexible gasket layer, wherein one side of the flexible electrode with the micro-nano structure is attached to the flexible gasket layer.
The flexible electrode is provided with a micro-nano structure array, and the micro-nano structure is a hemispherical structure; the flexible gasket layer has a circular through hole.
The preparation method comprises the following steps:
(1) etching a round ball hole structure with a height-diameter ratio on a silicon plate by utilizing a photoetching technology, wherein the round ball hole structure is used as a primary template, the diameter of a hemispherical hole is 10 micrometers, and the center distance of micropores is 40 micrometers; preparing a secondary template with a micro-column structure by using a hot stamping technology, taking a polycarbonate high-molecular film as a transfer printing material and a primary template as a template through transfer printing;
(2) using polydimethylsiloxane as a raw material, using a spin coating technology, using a secondary template as a template, and performing continuous reverse molding twice to obtain a flexible polymer film with a micro-column structure, wherein the thickness of a film substrate is 30 micrometers, the diameter of the micro-column is 10 micrometers, and the center distance of micropores is 40 micrometers;
(3) performing gold evaporation on the obtained flexible polymer film with the micro-column structure by using electron beam vacuum evaporation equipment to obtain a flexible electrode, wherein the thickness of a coating film is 120 nm;
(4) cutting a circular hole array structure on a polyethylene glycol terephthalate high polymer film by using carbon dioxide laser to obtain a flexible gasket layer, wherein the thickness of the gasket layer is 75 micrometers, and the diameter of a circular hole is 20 mm;
(5) the flexible gasket layer and the flexible electrode are sequentially attached to the same position of the skin to serve as a sensing area;
(6) and (4) attaching the other flexible electrode obtained in the step (3) to the other position of the skin to be used as a counter electrode, so as to obtain the skin touch sensor.
Example 10
The only difference from embodiment 1 is that in this embodiment, the evaporated conductive material is replaced with silver.
Example 11
The only difference from embodiment 1 is that in this embodiment, the evaporated conductive material is replaced with carbon.
Example 12
The only difference from example 1 is that in this example the circular hole pattern on the shim layer is replaced by an equilateral triangle with a side length of 1 mm.
Comparative example 1
The only difference from example 1 is that in this comparative example, the flexible gasket layer was removed.
Comparative example 2
Only the difference from example 9 is that in this comparative example, the flexible electrode (with micro-nano structure) of the sensing region is replaced with a gold foil electrode having the same thickness as the flexible electrode substrate without micro-nano structure instead of having the micro-nano structure.
Comparative example 3
The difference from example 1 is that in this comparative example, the flexible electrode is polydimethylsiloxane (without micro-nano structure) with a gold film evaporated on the surface, wherein the thickness of the polydimethylsiloxane is 30 μm, and the thickness of the coating film is 50 nm.
Performance testing
The sensors provided in examples 1-12 and comparative examples 1-3 were tested for performance by the following method:
(1) and (3) morphology characterization: the flexible polymer film having a microcolumn structure obtained in step (2) of example 1 was observed with a scanning electron microscope.
Fig. 4 is a scanning electron microscope image of the flexible polymer film with the micro-pillar structure provided in example 1, and fig. 5 is a scanning electron microscope image of the flexible polymer film with the micro-pillar structure provided in example 1 after a compression test. The figure shows that the electrode is regular in overall structure and has good elasticity, after the electrode is compressed, the micro-column structure is kept in a vertical state, no structural damage occurs, and the durability of the electrode is reflected.
(2) And (3) testing the sensitivity: applying a certain pressure to the sample by using a universal tensile machine, simultaneously testing and recording the change of the sample capacitance value by using a capacitance meter, wherein the testing frequency is set to be 1 multiplied by 105Hz, and then the sensitivity of the sample is calculated.
FIG. 6 is a sensitivity test chart of the flexible touch sensor provided in embodiment 1 of the present invention, and it can be seen that the sensor provided by the present invention has a sensitivity of 1kPa in the range of 0 to 16kPa-1Above, the maximum can reach 11.8kPa-1(ii) a In the prior art, the sensitivity of the electrode with the pyramid micro-nano structure can reach 0.55kPa at most-1(ii) a The sensitivity of the device with the mastoid dielectric layer microstructure can reach 1.5kPa at most-1(ii) a The sensitivity of the device with the microsphere dielectric layer structure and the mastoid microelectrode structure is 0.815kPa-1；
Therefore, compared with the same type of electrodes adopting a microsphere structure or a micro-cone structure or a flat plate electrode (without a microstructure), the sensitivity of the flexible touch sensor provided by the invention is greatly improved.
(3) And (3) pulse testing: the sensor prepared in example 1 was attached to the radial artery of the left wrist of a human subject (healthy male, 25 years old), and the sensor was connected to a capacitance measuring instrument LCR meter using a wire at a measuring frequency of 1 × 105Hz；
An ion capacitor can be formed between the sensor and the skin, and the skin is slightly fluctuated due to the pulsation of blood vessels, so that the skin is contacted with the flexible electrode through the flexible gasket layer, the contact area between the skin and the electrode is changed, and the capacitance is changed; the LCR meter can record the capacitance change curve in real time so as to reflect the pulse condition of a human body.
Fig. 7 is a human pulse test chart provided in embodiment 1 of the present invention, which shows that the flexible tactile sensor provided in the present invention can clearly reflect a plurality of characteristic peaks of human pulse beating, which indicates that the flexible tactile sensor provided in the present invention has a higher sensitivity.
The applicant states that the present invention is illustrated by the above embodiments of the flexible tactile sensor and the method for making and using the same, but the present invention is not limited to the above process steps, i.e. it does not mean that the present invention must rely on the above process steps to be carried out. It will be apparent to those skilled in the art that any modification of the present invention, equivalent substitutions of selected materials and additions of auxiliary components, selection of specific modes and the like, which are within the scope and disclosure of the present invention, are contemplated by the present invention.
Claims (32)
1. A flexible tactile sensor comprising a working electrode and a counter electrode, the working electrode comprising a flexible electrode and a flexible spacer layer;
one side of the flexible electrode, which is close to the flexible gasket layer, is provided with a micro-nano structure, and the flexible gasket layer is provided with a through hole;
the micro-nano structure is a high-diameter ratio micro-column with the same specification;
the diameter of the height-diameter ratio micro-column is 5-20 μm, and the height of the micro-column is 10-70 μm; the center distance between two adjacent micro columns with the height-diameter ratio is 15-50 mu m.
2. The flexible tactile sensor according to claim 1, wherein the height to diameter ratio micro-pillars have a diameter of 10 μm.
3. The flexible tactile sensor according to claim 2, wherein the height to diameter ratio micro-pillars have a height of 20 to 50 μm.
4. The flexible tactile sensor according to claim 3, wherein the height to diameter ratio micro-pillars have a height of 30 μm.
5. The flexible tactile sensor according to claim 1, wherein a center-to-center distance between two adjacent micro pillars has a height-to-diameter ratio of 20 μm.
6. The flexible tactile sensor according to claim 1, wherein the micro-nano structure is a micro-nano array structure.
7. The flexible tactile sensor according to claim 1, wherein the substrate material of the flexible electrode is a flexible polymer material selected from polydimethylsiloxane and/or ionogel.
8. The flexible tactile sensor of claim 7, wherein the substrate has a thickness of 30-200 μm.
9. The flexible tactile sensor of claim 8, wherein the substrate has a thickness of 50-100 μ ι η.
10. The flexible tactile sensor of claim 9, wherein the substrate has a thickness of 70 μ ι η.
11. The flexible tactile sensor of claim 1, wherein the through holes have a hole density of 30% -60% on the flexible gasket layer.
12. The flexible tactile sensor according to claim 1, wherein the shape of the through hole is selected from any one or a combination of at least two of a triangle, a circle, a square, or a regular hexagon.
13. The flexible tactile sensor of claim 12, wherein the through-hole is circular in shape.
14. The flexible tactile sensor of claim 13, wherein the circle has a diameter of 5-20 mm.
15. The flexible tactile sensor of claim 14, wherein the circle has a diameter of 8-15 mm.
16. The flexible tactile sensor of claim 15, wherein the circle has a diameter of 10 mm.
17. The flexible tactile sensor of claim 1, wherein the flexible gasket layer is a polymeric film layer.
18. The flexible tactile sensor according to claim 17, wherein the polymer film is selected from any one of a polycarbonate film, a polyimide film, and a polyethylene terephthalate film, or a combination of at least two thereof.
19. The flexible tactile sensor of claim 1, wherein the flexible gasket layer has a thickness of 15-75 μ ι η.
20. The flexible tactile sensor of claim 19, wherein the flexible gasket layer has a thickness of 20-50 μ ι η.
21. The flexible tactile sensor of claim 1, wherein the surface of the flexible electrode has a conductive plating.
22. The flexible tactile sensor of claim 21, wherein the conductive plating has a thickness of 50-150 nm.
23. The flexible tactile sensor of claim 22, wherein the conductive plating has a thickness of 80-120 nm.
24. The flexible tactile sensor of claim 21, wherein the conductive plating is made of a conductive material selected from any one or a combination of at least two of gold, silver, copper, carbon, or a conductive polymer.
25. The flexible tactile sensor of claim 24, wherein the conductive plating is made of a conductive material selected from gold and/or silver.
26. The method of manufacturing a flexible tactile sensor according to any one of claims 1 to 25, wherein the working electrode is manufactured as follows:
(1) preparing a micro-nano structure on a silicon plate, and then preparing a flexible electrode substrate with the micro-nano structure by taking the micro-nano structure as a template;
(2) preparing a conducting layer on the outer side of the substrate obtained in the step (1) to obtain a flexible electrode;
(3) preparing a through hole on the polymer film to obtain a flexible gasket layer;
(4) and attaching one side of the flexible electrode with the micro-nano structure on a flexible gasket layer to obtain the working electrode.
27. The preparation method according to claim 26, wherein the step (1) is specifically: etching the micro-nano structure on the silicon plate to obtain a primary template, then preparing a secondary template through a hot stamping method, and then obtaining the flexible electrode substrate with the micro-nano structure through reverse molding.
28. The method according to claim 27, wherein the substrate of the secondary template is selected from any one of polycarbonate, polyimide or polyethylene terephthalate or a combination of at least two of the same.
29. The method of claim 28, wherein the substrate of the secondary template is polycarbonate.
30. The method according to claim 26, wherein the conductive layer is formed by evaporation.
31. The method of claim 26, wherein the through-hole is formed by any one or a combination of at least two of mechanical cutting, carbon dioxide laser cutting, and infrared laser cutting.
32. Use of a flexible tactile sensor according to any one of claims 1-25 in a human-computer interaction system.
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| CN112587140B (en) * | 2020-12-09 | 2023-03-21 | 清华大学深圳国际研究生院 | Self-attaching bionic octopus sucking disc micro-nano structure dry electrode |
| CN113588140B (en) * | 2021-07-08 | 2022-12-09 | 上海交通大学 | Pressure sensor, pressure sensing array and preparation method thereof |
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