CN106298083A - Preparation method of flexible transparent electrode - Google Patents
Preparation method of flexible transparent electrode Download PDFInfo
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- CN106298083A CN106298083A CN201610967375.4A CN201610967375A CN106298083A CN 106298083 A CN106298083 A CN 106298083A CN 201610967375 A CN201610967375 A CN 201610967375A CN 106298083 A CN106298083 A CN 106298083A
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- 238000002360 preparation method Methods 0.000 title claims abstract description 43
- 229920006254 polymer film Polymers 0.000 claims abstract description 69
- 239000000758 substrate Substances 0.000 claims abstract description 66
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 claims abstract description 62
- 229910052751 metal Inorganic materials 0.000 claims abstract description 57
- 239000002184 metal Substances 0.000 claims abstract description 57
- 238000000034 method Methods 0.000 claims abstract description 55
- 229920000642 polymer Polymers 0.000 claims abstract description 41
- 239000007788 liquid Substances 0.000 claims abstract description 36
- 238000005266 casting Methods 0.000 claims abstract description 32
- 238000000151 deposition Methods 0.000 claims abstract description 29
- 239000002904 solvent Substances 0.000 claims abstract description 25
- 239000003960 organic solvent Substances 0.000 claims abstract description 19
- 238000002156 mixing Methods 0.000 claims abstract description 3
- HEDRZPFGACZZDS-UHFFFAOYSA-N Chloroform Chemical compound ClC(Cl)Cl HEDRZPFGACZZDS-UHFFFAOYSA-N 0.000 claims description 76
- YMWUJEATGCHHMB-UHFFFAOYSA-N Dichloromethane Chemical compound ClCCl YMWUJEATGCHHMB-UHFFFAOYSA-N 0.000 claims description 39
- QGJOPFRUJISHPQ-UHFFFAOYSA-N Carbon disulfide Chemical compound S=C=S QGJOPFRUJISHPQ-UHFFFAOYSA-N 0.000 claims description 33
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 claims description 27
- 238000001035 drying Methods 0.000 claims description 21
- 229920000435 poly(dimethylsiloxane) Polymers 0.000 claims description 21
- 238000003756 stirring Methods 0.000 claims description 20
- LRHPLDYGYMQRHN-UHFFFAOYSA-N N-Butanol Chemical compound CCCCO LRHPLDYGYMQRHN-UHFFFAOYSA-N 0.000 claims description 19
- 230000008021 deposition Effects 0.000 claims description 19
- -1 polyethylene Polymers 0.000 claims description 19
- OKKJLVBELUTLKV-UHFFFAOYSA-N Methanol Chemical group OC OKKJLVBELUTLKV-UHFFFAOYSA-N 0.000 claims description 18
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims description 14
- 229910052737 gold Inorganic materials 0.000 claims description 14
- 239000010931 gold Substances 0.000 claims description 14
- 229920003229 poly(methyl methacrylate) Polymers 0.000 claims description 13
- 239000004926 polymethyl methacrylate Substances 0.000 claims description 13
- 238000002207 thermal evaporation Methods 0.000 claims description 12
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 11
- 229910052782 aluminium Inorganic materials 0.000 claims description 11
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 11
- 229910052802 copper Inorganic materials 0.000 claims description 11
- 239000010949 copper Substances 0.000 claims description 11
- 239000011521 glass Substances 0.000 claims description 11
- 229920000139 polyethylene terephthalate Polymers 0.000 claims description 11
- 239000005020 polyethylene terephthalate Substances 0.000 claims description 11
- 238000009826 distribution Methods 0.000 claims description 10
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 claims description 9
- 229910052709 silver Inorganic materials 0.000 claims description 9
- 239000004332 silver Substances 0.000 claims description 9
- KFZMGEQAYNKOFK-UHFFFAOYSA-N Isopropanol Chemical compound CC(C)O KFZMGEQAYNKOFK-UHFFFAOYSA-N 0.000 claims description 8
- 239000004793 Polystyrene Substances 0.000 claims description 8
- 229920002223 polystyrene Polymers 0.000 claims description 8
- BDERNNFJNOPAEC-UHFFFAOYSA-N propan-1-ol Chemical compound CCCO BDERNNFJNOPAEC-UHFFFAOYSA-N 0.000 claims description 8
- 238000000926 separation method Methods 0.000 claims description 7
- 230000015572 biosynthetic process Effects 0.000 claims description 6
- 238000004544 sputter deposition Methods 0.000 claims description 6
- 239000004642 Polyimide Substances 0.000 claims description 5
- 238000010438 heat treatment Methods 0.000 claims description 5
- 229920001721 polyimide Polymers 0.000 claims description 5
- 229920002799 BoPET Polymers 0.000 claims description 4
- 239000005041 Mylar™ Substances 0.000 claims description 4
- 238000007605 air drying Methods 0.000 claims description 4
- 238000004090 dissolution Methods 0.000 claims description 4
- ZXEKIIBDNHEJCQ-UHFFFAOYSA-N isobutanol Chemical compound CC(C)CO ZXEKIIBDNHEJCQ-UHFFFAOYSA-N 0.000 claims description 4
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical group [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 3
- 229920002301 cellulose acetate Polymers 0.000 claims description 3
- 230000009514 concussion Effects 0.000 claims description 3
- 238000005137 deposition process Methods 0.000 claims description 3
- 229920000747 poly(lactic acid) Polymers 0.000 claims description 3
- 239000004626 polylactic acid Substances 0.000 claims description 3
- 229910052710 silicon Inorganic materials 0.000 claims description 3
- 239000010703 silicon Substances 0.000 claims description 3
- 238000001291 vacuum drying Methods 0.000 claims description 3
- 239000004698 Polyethylene Substances 0.000 claims description 2
- 239000004743 Polypropylene Substances 0.000 claims description 2
- 229910045601 alloy Inorganic materials 0.000 claims description 2
- 239000000956 alloy Substances 0.000 claims description 2
- 229920001400 block copolymer Polymers 0.000 claims description 2
- 238000009792 diffusion process Methods 0.000 claims description 2
- 238000000605 extraction Methods 0.000 claims description 2
- 239000007791 liquid phase Substances 0.000 claims description 2
- 238000001755 magnetron sputter deposition Methods 0.000 claims description 2
- 230000001590 oxidative effect Effects 0.000 claims description 2
- 229950000845 politef Drugs 0.000 claims description 2
- 229920003223 poly(pyromellitimide-1,4-diphenyl ether) Polymers 0.000 claims description 2
- 229920000573 polyethylene Polymers 0.000 claims description 2
- 229920001155 polypropylene Polymers 0.000 claims description 2
- 238000004549 pulsed laser deposition Methods 0.000 claims description 2
- 229920002379 silicone rubber Polymers 0.000 claims description 2
- 239000004945 silicone rubber Substances 0.000 claims description 2
- 238000007711 solidification Methods 0.000 claims description 2
- 230000008023 solidification Effects 0.000 claims description 2
- 239000000020 Nitrocellulose Substances 0.000 claims 1
- 235000013870 dimethyl polysiloxane Nutrition 0.000 claims 1
- 150000002596 lactones Chemical class 0.000 claims 1
- 229920001220 nitrocellulos Polymers 0.000 claims 1
- 238000006116 polymerization reaction Methods 0.000 claims 1
- 239000012528 membrane Substances 0.000 abstract description 13
- 239000002994 raw material Substances 0.000 abstract description 5
- 238000009776 industrial production Methods 0.000 abstract 1
- 239000010408 film Substances 0.000 description 99
- 239000004205 dimethyl polysiloxane Substances 0.000 description 20
- 229960000935 dehydrated alcohol Drugs 0.000 description 7
- 229960004756 ethanol Drugs 0.000 description 7
- 238000004519 manufacturing process Methods 0.000 description 6
- 239000011248 coating agent Substances 0.000 description 4
- 238000000576 coating method Methods 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- 230000029058 respiratory gaseous exchange Effects 0.000 description 4
- 230000000052 comparative effect Effects 0.000 description 3
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- 230000005611 electricity Effects 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- 229920001610 polycaprolactone Polymers 0.000 description 3
- 239000004632 polycaprolactone Substances 0.000 description 3
- 239000010409 thin film Substances 0.000 description 3
- 206010054949 Metaplasia Diseases 0.000 description 2
- 239000004372 Polyvinyl alcohol Substances 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 2
- 229920001971 elastomer Polymers 0.000 description 2
- 239000000806 elastomer Substances 0.000 description 2
- MRNHPUHPBOKKQT-UHFFFAOYSA-N indium;tin;hydrate Chemical compound O.[In].[Sn] MRNHPUHPBOKKQT-UHFFFAOYSA-N 0.000 description 2
- 239000004615 ingredient Substances 0.000 description 2
- 238000007641 inkjet printing Methods 0.000 description 2
- 229910044991 metal oxide Inorganic materials 0.000 description 2
- 150000004706 metal oxides Chemical class 0.000 description 2
- 230000015689 metaplastic ossification Effects 0.000 description 2
- BDAGIHXWWSANSR-UHFFFAOYSA-N methanoic acid Natural products OC=O BDAGIHXWWSANSR-UHFFFAOYSA-N 0.000 description 2
- 229920006381 polylactic acid film Polymers 0.000 description 2
- 229920002451 polyvinyl alcohol Polymers 0.000 description 2
- 238000005245 sintering Methods 0.000 description 2
- 229920000144 PEDOT:PSS Polymers 0.000 description 1
- KSZVHVUMUSIKTC-UHFFFAOYSA-N acetic acid;propan-2-one Chemical compound CC(C)=O.CC(O)=O KSZVHVUMUSIKTC-UHFFFAOYSA-N 0.000 description 1
- 230000001476 alcoholic effect Effects 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- NEHMKBQYUWJMIP-UHFFFAOYSA-N chloromethane Chemical class ClC NEHMKBQYUWJMIP-UHFFFAOYSA-N 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 239000002322 conducting polymer Substances 0.000 description 1
- 229920001940 conductive polymer Polymers 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 238000006731 degradation reaction Methods 0.000 description 1
- KPUWHANPEXNPJT-UHFFFAOYSA-N disiloxane Chemical class [SiH3]O[SiH3] KPUWHANPEXNPJT-UHFFFAOYSA-N 0.000 description 1
- UHESRSKEBRADOO-UHFFFAOYSA-N ethyl carbamate;prop-2-enoic acid Chemical compound OC(=O)C=C.CCOC(N)=O UHESRSKEBRADOO-UHFFFAOYSA-N 0.000 description 1
- LYCAIKOWRPUZTN-UHFFFAOYSA-N ethylene glycol Natural products OCCO LYCAIKOWRPUZTN-UHFFFAOYSA-N 0.000 description 1
- 239000000835 fiber Substances 0.000 description 1
- 235000019253 formic acid Nutrition 0.000 description 1
- 239000003292 glue Substances 0.000 description 1
- 239000000017 hydrogel Substances 0.000 description 1
- WGCNASOHLSPBMP-UHFFFAOYSA-N hydroxyacetaldehyde Natural products OCC=O WGCNASOHLSPBMP-UHFFFAOYSA-N 0.000 description 1
- 230000001788 irregular Effects 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 238000001451 molecular beam epitaxy Methods 0.000 description 1
- 239000002070 nanowire Substances 0.000 description 1
- 238000010422 painting Methods 0.000 description 1
- 238000001259 photo etching Methods 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 229920000728 polyester Polymers 0.000 description 1
- 229920006389 polyphenyl polymer Polymers 0.000 description 1
- 239000011148 porous material Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000002344 surface layer Substances 0.000 description 1
- 238000002834 transmittance Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01B—CABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
- H01B13/00—Apparatus or processes specially adapted for manufacturing conductors or cables
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01B—CABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
- H01B5/00—Non-insulated conductors or conductive bodies characterised by their form
- H01B5/14—Non-insulated conductors or conductive bodies characterised by their form comprising conductive layers or films on insulating-supports
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Laminated Bodies (AREA)
- Physical Vapour Deposition (AREA)
- Non-Insulated Conductors (AREA)
Abstract
The invention provides a preparation method of a flexible transparent electrode, which comprises the steps of mixing a polymer, an organic solvent and an anhydrous alcohol solvent to prepare a membrane casting solution; placing the obtained casting solution on a substrate to form a liquid film, and then placing the substrate coated with the liquid film in air for curing to form a polymer film with a polygonal hole structure; depositing a metal film on the obtained polymer film to obtain a polymer film coated with the metal film; and separating the obtained metal film from the polymer film, and extracting the metal film by using the substrate to obtain the flexible transparent electrode. The flexible transparent electrode prepared by the method has high transparency and good conductivity, and the preparation method has the advantages of low raw material cost, simple and convenient operation of each step, simple process flow and contribution to industrial production.
Description
Technical field
The invention belongs to field of photoelectric technology, relate to the preparation method of a kind of electrode, particularly relate to a kind of flexible and transparent electricity
The preparation method of pole.
Background technology
Flexible and transparent conductive electrode is various electronic devices, important including touch screen, display, thin-film solar cells etc.
Ingredient.In field of photoelectric devices, in terms of industry application or basic research, either all arrive the pass of upgrading
The key moment.Currently commercially, transparency conductive electrode typically uses metal-oxide, such as tin indium oxide (ITO) thin film.But,
ITO is expensive, lacks pliability simultaneously, difficult stretching, improper is applied to flexible transparent electrode.Metal mesh structure electrode has
The advantage such as relatively low cost, excellent mechanical flexibility, higher transmitance and electric conductivity.Therefore, the most these years, based on gold
The transparency electrode research belonging to mesh-structured starts to obtain paying close attention to of some scholars.
The size of metal grill and the width of line are two very important parameters for flexible transparent electrode, and it is direct
Have influence on transparency and the electric conductivity of electrode.The method of current preparation flexible transparent electrode metal grill mainly has ink-jet to beat
The coating of print, nano wire, be full of cracks, crystal boundary photoetching etc. certainly.But these methods exist, and preparation cost is high, be not suitable for large area production
Shortcoming.Therefore considering from cost of manufacture and the usefulness of photoelectric device, researchers need to seek the skill of a kind of simple and efficient
Art means prepare metal mesh structure electrode, are beneficial to its popularization in photoelectric device industry.
CN 105280840 A discloses a kind of flexible and transparent click and preparation method thereof, and described method, by carrier
Coated polymer solution on substrate, forms polymeric film；Described polymeric film is prepared the nano metal ink of comb mesh pattern,
Metal grate electrode is formed by the high temperature anneal；Described polymeric film has the side coating of metal grate electrode thoroughly
Bright conducting resinl also dries sintering；Under described polymeric film, metal grate electrode and electrically conducting transparent glue are peeled off from carrier substrate
Come, obtain the flexible transparent electrode of correspondence.While ensureing electrode flexibility, the high conductance improving nesa coating
Rate, transmitance and bend resistance performance.But described electrode contains multilayer film, structure is complicated, and needs nanometer gold in preparation process
Belonging to ink, cost of material is high, needs through repeatedly sintering simultaneously, power consumption height, complex process.
CN 105895197A discloses a kind of flexible and transparent silver grid combination electrode and preparation method thereof, and described electrode is tied
Structure is: A/ silver grid/elastic substrates.Wherein A can be conducting polymer (PEDOT:PSS), metal-oxide semiconductor (MOS) (ZnO)
And the binary complex of these materials, substrate is elastomer, such as polyethylene terephthalate (PET), polyimides
(PI), polyvinyl alcohol (PVA), polymethyl siloxane (PDMS), urethane acrylate (PUA) and hydrogel etc..Its making side
Method is by metal grill and A material sequentially inkjet printing to elastomer substrate.Thus obtained transparency electrode is comprehensive
Can be excellent, it is embodied in sheet resistance low, light transmittance is high, flexible.But inkjet printing methods equipment is complicated, plant maintenance is stranded
Difficulty is high to ingredient requirement, it is difficult to carry out industrialized production.
Therefore, a kind of low raw-material cost of research, working condition is gentle, and technique is simple, and can side's electricity of industrialized production
Hindering little, the method for transparency high flexibility transparency electrode is particularly important.
Summary of the invention
The flexible transparent electrode produced for prior art is transparent low, and cost of material is high, and complex manufacturing is not suitable for work
The problem that industry metaplasia is produced, this application provides the preparation method of a kind of flexible transparent electrode, described method low raw-material cost, life
Producing mild condition, technique is simple, can be with industrialized production, and the electrode resistance per square produced is low and transparency good.
For reaching this purpose, the present invention by the following technical solutions:
The invention provides the preparation method of a kind of flexible transparent electrode, said method comprising the steps of:
(1) polymer, organic solvent and absolute alcohol kind solvent are mixed, prepare casting solution；
(2) casting solution that step (1) obtains is placed on substrate formation liquid film, the more described substrate being covered with liquid film is placed
Solidify in air, form the thin polymer film with polygonal hole structure；
(3) on the thin polymer film that step (2) obtains, deposit metal film, obtain depositing the polymer thin of metal film
Film；
(4) metal film that step (3) is obtained and described polymer thin membrance separation, and extract metal film with substrate, obtain
Flexible transparent electrode.
Step (2) described polygonal hole includes the equilateral or non-etc. lateral opening of tetragon, pentagon or hexagon etc..
Described preparation method prepares line width between porosity height and hole by breathing pattern method on the surface of polymer
Polygonal hole structure, according to the live width between its Kong Yukong as model, subsequently use film deposition techniques deposit on its surface
Layer of metal film.During this, the curved surface in hole is conducive to surface in deposition to separate with interior metal film so that it is can be formed
Complete metal mesh structure.
Following as currently preferred technical scheme, but the restriction of the technical scheme provided not as the present invention, pass through
Techniques below scheme, can preferably reach and realize technical purpose and the beneficial effect of the present invention.
As present invention technical scheme preferably, step (1) polymer is selected from polyimides, polycaprolactone, nitrification fibre
In dimension element, cellulose acetate, polylactic acid, polymethyl methacrylate, polystyrene and block copolymer thereof, any one, enter one
Step is preferably polymethyl methacrylate.
Preferably, step (1) described organic solvent is any in dichloromethane, chloroform, Carbon bisulfide or acetone
A kind of or the combination of at least two, described combination typical case but limiting examples have: dichloromethane and the combination of chloroform, two
Chloromethanes and the combination of the combination of the combination of Carbon bisulfide, dichloromethane and acetone, chloroform and Carbon bisulfide, chloroform
The combination of combination, Carbon bisulfide and acetone with acetone or the combination etc. of dichloromethane, chloroform and acetone, further preferably
For chloroform.
Preferably, step (1) described absolute alcohol kind solvent is selected from methanol, ethanol, normal propyl alcohol, isopropanol, n-butyl alcohol or different
Any one or the combination of at least two in butanol, described combination typical case but limiting examples have: methanol and the combination of ethanol,
Ethanol and the group of the combination of the combination of the combination of normal propyl alcohol, ethanol and isopropanol, n-butyl alcohol and isobutanol, ethanol and n-butyl alcohol
Conjunction, normal propyl alcohol and the combination of n-butyl alcohol or the combination etc. of methanol, ethanol and normal propyl alcohol, more preferably ethanol.
As currently preferred technical scheme, the method for step (1) described mixing is organic for first dissolving the polymer in
In solvent, then it is added thereto to absolute alcohol kind solvent.
Preferably, described polymer is dissolved in organic solvent, make polymer concentration in organic solvent be 40～
120mg/mL, as 40mg/mL, 50mg/mL, 60mg/mL, 70mg/mL, 80mg/mL, 85mg/mL, 90mg/mL, 95mg/mL,
100mg/mL, 105mg/mL, 110mg/mL, 115mg/mL or 120mg/mL etc., it is not limited to cited numerical value, this number
Other numerical value do not enumerated comprised in the range of value are equally applicable, and more preferably 80～120mg/mL, particularly preferably
120mg/mL。
Preferably, described absolute alcohol kind solvent and organic solvent volume are than for (5～15): 1, as 5:1,6:1,7:1,8:1,
9:1,10:1,11:1,12:1,13:1,14:1 or 15:1 etc., it is not limited to bag in cited numerical value, this numerical range
Other numerical value do not enumerated contained are equally applicable, more preferably (8～10): 1.
Preferably, any one during the method for described dissolving is concussion dissolving, stirring and dissolving, ultrasonic dissolution or heating for dissolving
Planting or the combination of at least two, described combination is typical but limiting examples has: vibration is dissolved and the combination of stirring and dissolving, stirring
Dissolve and the combination of ultrasonic dissolution, stirring and dissolving and the combination of the combination of heating for dissolving, ultrasonic dissolution and heating for dissolving or concussion
Dissolving, stirring and dissolving and the combination etc. of heating for dissolving, more preferably stirring and dissolving.
Preferably, the time of described dissolving is 10～60min, as 10min, 15min, 20min, 25min, 30min,
35min, 40min, 45min, 50min, 55min or 60min etc., it is not limited to cited numerical value, in this numerical range
Other numerical value do not enumerated comprised are equally applicable, more preferably 20～40min, particularly preferably 30min.
As currently preferred technical scheme, step (2) described substrate is selected from silicon chip, glass, gold plaque, silver strip, polyester
In thin film, Kapton, polyethylene film, polypropylene screen, silicone rubber or politef any one, further preferably
For glass.
As currently preferred technical scheme, the thickness of step (2) described liquid film is 0.1～0.3mm, as 0.1mm,
0.11mm, 0.12mm, 0.15mm, 0.18mm, 0.2mm, 0.22mm, 0.25mm, 0.28mm, 0.29mm or 0.3mm etc., but not
Being only limitted to cited numerical value, other numerical value do not enumerated comprised in this numerical range are equally applicable.
Preferably, the humidity of step (2) described air is 60～90%, such as 60%, 61%, 62%, 65%, 68%,
70%, 72%, 75%, 78%, 80%, 82%, 85%, 88%, 89% or 90% etc., it is not limited to cited number
Value, other numerical value do not enumerated comprised in this numerical range are equally applicable, and more preferably 70～80%.
Porosity and the line width of polymeric film are had a great impact by air humidity, if air humidity is less than 60% meeting
During causing organic solvent volatilization, hydrone adhesion amount reduces, and causes increasing of polymeric film line width；And humidity is more than
90% can cause merging seriously between water droplet, forms irregular pore structure and even can not get loose structure.Due to polymeric film
Line width and porosity cross the transparency of the metal film that metropolis's impact is subsequently generated, and therefore should strictly control the humidity of air.
Preferably, the hardening time of step (2) described solidification is 0.5～2h, as 0.5h, 0.6h, 0.7h, 0.8h, 0.9h,
1h, 1.2h, 1.5h, 1.8h, 1.9h or 2h etc., it is not limited to cited numerical value, comprise in this numerical range other
The numerical value do not enumerated is equally applicable, and more preferably 1～1.5h.
Preferably, the porosity of the described polymeric film that step (2) obtains is 54～81.7%, such as 54%, 56%,
58%, 60%, 65%, 70%, 75%, 76%, 78%, 80% or 81.7% etc., it is not limited to cited numerical value, should
Other numerical value do not enumerated comprised in numerical range are equally applicable.
Preferably, the main distribution of line width of the described polymeric film that step (2) obtains is 150～350nm, as
150nm, 160nm, 180nm, 200nm, 220nm, 250nm, 280nm, 300nm, 320nm, 340nm or 350nm etc., but and not only
Being limited to cited numerical value, other numerical value do not enumerated comprised in this numerical range are equally applicable.
Can the porosity of polymer film surface and the width of line be the passes of the flexible transparent electrode that prepare excellent performance
Key.The polymeric film porosity that step (2) obtains may be up to 81.7%, the main distribution of isochrone width be 150～
350nm, this structure is conducive to passing through of light, so that the transparency of electrode significantly increases, makes electrode have good simultaneously
Electric conductivity.
As currently preferred technical scheme, step (3) described metal is appointed in gold, silver, copper or aluminum and alloy thereof
Anticipating a kind of or combination of at least two, described combination typical case but limiting examples have: the combination of Jin Heyin, the group of Jin Hetong
Conjunction, the silver-colored and combination of the combination of the combination of the combination of copper, copper and aluminum, silver and aluminum, gold and aluminum or gold, silver and the combination etc. of copper.
Preferably, step (3) described painting method is selected from vapour deposition process, liquid phase method of formation, oxidizing process, diffusion method, electricity
Plating method, vacuum thermal evaporation, DC sputtering, magnetron sputtering method, radio frequency sputtering method, pulsed laser deposition or molecular beam epitaxy
In growth method any one, more preferably vacuum thermal evaporation.
As the present invention preferably technical scheme, the metal film that step (3) is obtained and described polymer thin membrance separation
Method is: has the thin polymer film of metal film to be placed in organic solvent the deposition that step (3) obtains, makes described thin polymer film
It is completely dissolved.
Preferably, described any one or at least two in dichloromethane, chloroform, Carbon bisulfide or acetone
Combination, described combination is typical but limiting examples has: dichloromethane and the combination of chloroform, dichloromethane and Carbon bisulfide
The combination of the combination of the combination of combination, dichloromethane and acetone, chloroform and Carbon bisulfide, chloroform and acetone, two
Nitric sulfid and the combination of acetone or the combination etc. of dichloromethane, chloroform and acetone.
As currently preferred technical scheme, step (4) described substrate is polydimethylsiloxane and/or to polyphenyl two
Formic acid glycol ester.
Preferably, described in step (4), extracting method is: carried from solvent by metal film from air side with described substrate
Go out, the surface of metallic film adhesion substrate.
Preferably, after step (4) described extraction metal film, the metal film sticking to substrate surface is dried.
Preferably, described drying means one in vacuum drying, heat drying, forced air drying or natural drying or
The combination of at least two, described combination is typical but limiting examples has: vacuum drying and the combination of heat drying, heat drying
Combination with forced air drying or forced air drying and the combination etc. of natural drying, more preferably natural drying.
As the present invention preferably technical scheme, said method comprising the steps of:
(1) being mixed with organic solvent by polymer, stirring and dissolving 10～60min, polymer concentration is 40～120mg/mL,
Add absolute alcohol kind solvent, prepare casting solution；
(2) casting solution that step (1) obtains is placed on substrate, forms the liquid film of 0.1～0.3mm, then be covered with described
The substrate of liquid film be positioned over humidity be 60～90% air in solidify, prepare with the polymer thin of polygonal hole structure
Film；
(3) on the thin polymer film that step (2) obtains, deposit metal film, obtain depositing the polymer thin of metal film
Film；
(4) metal film that step (3) is obtained and described polymer thin membrance separation, and extract metal film with substrate, obtain
Flexible transparent electrode.
Compared with prior art, the present invention at least has the advantages that
(1) the invention provides the preparation method of a kind of flexible transparent electrode, described method first uses breathing group method to prepare
Polymeric film, the porosity of the polymeric film obtained may be up to 81.7%, and the main distribution of line width is 150～350nm,
Therefore the metal film that metal deposit is prepared on described polymeric film, has corresponding porosity and line width equally, institute
Being up to 95% with the electrode transparency that film preparation obtains, resistance per square is less than 12 Ω/ simultaneously, has good electric conductivity.
(2) the invention provides the preparation method of a kind of flexible transparent electrode, use cheap polymer as raw material, fall
The low cost of raw material, each step operation of the most described preparation method is easy, and technological process is simple, is conducive to carrying out industry metaplasia
Produce.
Accompanying drawing explanation
Fig. 1: a kind of flow chart using breathing pattern method to prepare flexible transparent electrode；
The SEM figure of the porous polylactic acid film that Fig. 2 a: embodiment 1 prepares；
The live width scattergram of the porous polylactic acid film that Fig. 2 b: embodiment 1 prepares；
The SEM figure of the polystyrene porous membrane that Fig. 3 a: embodiment 2 prepares；
The live width scattergram of the polystyrene porous membrane that Fig. 3 b: embodiment 2 prepares；
The SEM figure of the polystyrene porous membrane that Fig. 4 a: embodiment 3 prepares；
The live width scattergram of the polystyrene porous membrane that Fig. 4 b: embodiment 3 prepares；
The SEM figure of the polymethyl methacrylate perforated membrane that Fig. 5 a: embodiment 4 prepares；
The live width scattergram of the polymethyl methacrylate perforated membrane that Fig. 5 b: embodiment 4 prepares；
The SEM figure of the polymethyl methacrylate perforated membrane that Fig. 6 a: embodiment 5 prepares；
The live width scattergram of the polymethyl methacrylate perforated membrane that Fig. 6 b: embodiment 5 prepares；
The SEM figure of the polymethyl methacrylate perforated membrane that Fig. 7 a: embodiment 6 prepares；
The live width scattergram of the polymethyl methacrylate perforated membrane that Fig. 7 b: embodiment 6 prepares；
In Fig. 1, a-polymer solution knifing step, b-breathes pattern method and prepares perforated membrane step, c-film deposition techniques
Deposition metal film step, d-immerses in solution, thin polymer film dissolving step, and e-flexible and transparent substrate is extracted molten from air side
Metal grill step in liquid, dries under f-room temperature and obtains flexible transparent electrode step.
The present invention is described in more detail below.But following example is only the simple example of the present invention, not generation
Table or restriction the scope of the present invention, protection scope of the present invention is as the criterion with claims.
Detailed description of the invention
Further illustrate technical scheme below in conjunction with the accompanying drawings and by detailed description of the invention.
For the present invention is better described, it is simple to understand technical scheme, the present invention's is typical but non-limiting
Embodiment is as follows:
Specific embodiment of the invention part provides one, the preparation method of flexible transparent electrode as shown in Figure 1, described
Method comprises the following steps:
(1) polymer, organic solvent and absolute alcohol kind solvent are mixed, prepare casting solution；
(2) casting solution that step (1) obtains is placed on substrate formation liquid film, the more described substrate being covered with liquid film is placed
Solidify in air, form the thin polymer film with polygonal hole structure；
(3) on the thin polymer film that step (2) obtains, deposit metal film, obtain depositing the polymer thin of metal film
Film；
(4) metal film that step (3) is obtained and described polymer thin membrance separation, and extract metal film with substrate, obtain
Flexible transparent electrode.
In Fig. 1, a-polymer solution knifing step, b-breathes pattern method and prepares perforated membrane step, c-film deposition techniques
Deposition metal film step, d-immerses in solution, thin polymer film dissolving step, and e-flexible and transparent substrate is extracted molten from air side
Metal grill step in liquid, dries under f-room temperature and obtains flexible transparent electrode step.
Embodiment 1
The preparation method of a kind of flexible transparent electrode, said method comprising the steps of:
(1) being mixed with chloroform by polylactic acid, stirring and dissolving 30min, polymer concentration is 80mg/mL, adds nothing
The ratio of alcoholic solvent, dehydrated alcohol and chloroform is 10:1, prepares casting solution；
(2) casting solution that step (1) obtains is placed on glass plate, forms the liquid film of 0.2mm, then be covered with liquid film by described
Substrate be positioned in the air that humidity is 75% and solidify, prepare the thin polymer film with polygonal hole structure；
(3) using vacuum thermal evaporation deposition copper film on the thin polymer film that step (2) obtains, obtaining deposition has copper film
Thin polymer film；
(4) copper film step (3) obtained is put in chloroform with described thin polymer film and is separated, thing template to be polymerized
After dissolving, extracting copper film with to polyethylene terephthalate (PET) substrate from air side, copper mold sticks to pet sheet face, will
The copper film sticking to substrate surface carries out natural drying, obtains flexible transparent electrode.
The thin polymer film preparing step (2) carries out SEM and line width distribution characterizes, and result is as shown in Figure 2.
The transparency preparing flexible transparent electrode is 75.6%, resistance per square is 36 Ω/.
Embodiment 2
The preparation method of a kind of flexible transparent electrode, said method comprising the steps of:
(1) being mixed with chloroform by polystyrene, stirring and dissolving 30min, polymer concentration is 80mg/mL, adds
The ratio of anhydrous ethanol solvent, dehydrated alcohol and chloroform is 5:1, prepares casting solution；
(2) casting solution that step (1) obtains is placed on glass plate, forms the liquid film of 0.2mm, then be covered with liquid film by described
Substrate be positioned in the air that humidity is 85% and solidify, prepare the thin polymer film with polygonal hole structure；
(3) using vacuum thermal evaporation deposited gold film on the thin polymer film that step (2) obtains, obtaining deposition has golden film
Thin polymer film；
(4) golden film step (3) obtained is put in chloroform with described thin polymer film and is separated, thing template to be polymerized
After dissolving, extracting gold film with polydimethylsiloxane (PDMS) substrate from air side, gold film sticks to PDMS surface, will adhere to
Golden film at substrate surface carries out natural drying, obtains flexible transparent electrode.
The thin polymer film preparing step (2) carries out SEM and line width distribution characterizes, and result is as shown in the figure.
The transparency preparing flexible transparent electrode is 93%, resistance per square is 8.6 Ω/.
Embodiment 3
The preparation method of a kind of flexible transparent electrode, said method comprising the steps of:
(1) being mixed with chloroform by polystyrene, stirring and dissolving 30min, polymer concentration is 120mg/mL, adds
The ratio of anhydrous ethanol solvent, dehydrated alcohol and chloroform is 5:1, prepares casting solution；
(2) casting solution that step (1) obtains is placed on glass plate, forms the liquid film of 0.2mm, then be covered with liquid film by described
Substrate be positioned in the air that humidity is 85% and solidify, prepare the thin polymer film with polygonal hole structure；
(3) using vacuum thermal evaporation deposited gold film on the thin polymer film that step (2) obtains, obtaining deposition has golden film
Thin polymer film；
(4) golden film step (3) obtained is put in chloroform with described thin polymer film and is separated, thing template to be polymerized
After dissolving, extracting gold film with polydimethylsiloxane (PDMS) substrate from air side, gold film sticks to PDMS surface, will adhere to
Golden film at substrate surface carries out natural drying, obtains flexible transparent electrode.
The thin polymer film preparing step (2) carries out SEM and line width distribution characterizes, and result is as shown in Figure 4.
The transparency preparing flexible transparent electrode is 76.4%, resistance per square is 34.6 Ω/.
Embodiment 4
The preparation method of a kind of flexible transparent electrode, said method comprising the steps of:
(1) being mixed with chloroform by polymethyl methacrylate, stirring and dissolving 30min, polymer concentration is 80mg/
ML, the ratio adding anhydrous ethanol solvent, dehydrated alcohol and chloroform is 10:1, prepares casting solution；
(2) casting solution that step (1) obtains is placed on glass plate, forms the liquid film of 0.2mm, then be covered with liquid film by described
Substrate be positioned in the air that humidity is 80% and solidify, prepare the thin polymer film with polygonal hole structure；
(3) on the thin polymer film that step (2) obtains, use vacuum thermal evaporation deposition silverskin, obtain being coated with silverskin
Thin polymer film；
(4) silverskin step (3) obtained is put in chloroform with described thin polymer film and is separated, thing template to be polymerized
After dissolving, extracting silverskin with polydimethylsiloxane (PDMS) substrate from air side, silverskin sticks to PDMS surface, will adhere to
Silver at substrate surface carries out natural drying, obtains flexible transparent electrode.
The thin polymer film preparing step (2) carries out SEM and line width distribution characterizes, and result is as shown in Figure 5.
The transparency preparing flexible transparent electrode is 95%, resistance per square is 12 Ω/.
Embodiment 5
The preparation method of a kind of flexible transparent electrode, said method comprising the steps of:
(1) being mixed with chloroform by polymethyl methacrylate, stirring and dissolving 30min, polymer concentration is 120mg/
ML, the ratio adding anhydrous ethanol solvent, dehydrated alcohol and chloroform is 15:1, prepares casting solution；
(2) casting solution that step (1) obtains is placed on glass plate, forms the liquid film of 0.2mm, then be covered with liquid film by described
Substrate be positioned in the air that humidity is 80% and solidify, prepare the thin polymer film with polygonal hole structure；
(3) using vacuum thermal evaporation deposition silverskin on the thin polymer film that step (2) obtains, obtaining deposition has silverskin
Thin polymer film；
(4) silverskin step (3) obtained is put in chloroform with described thin polymer film and is separated, thing template to be polymerized
After dissolving, extracting silverskin with polydimethylsiloxane (PDMS) substrate from air side, silverskin sticks to PDMS surface, will adhere to
Silverskin at substrate surface carries out natural drying, obtains flexible transparent electrode.
The thin polymer film preparing step (2) carries out SEM and line width distribution characterizes, and result is as shown in Figure 6.
The transparency preparing flexible transparent electrode is 89.3%, resistance per square is 18 Ω/.
Embodiment 6
The preparation method of a kind of flexible transparent electrode, said method comprising the steps of:
(1) being mixed with chloroform by polymethyl methacrylate, stirring and dissolving 30min, polymer concentration is 120mg/
ML, the ratio adding anhydrous ethanol solvent, dehydrated alcohol and chloroform is 10:1, prepares casting solution；
(2) casting solution that step (1) obtains is placed on glass plate, forms the liquid film of 0.2mm, then be covered with liquid film by described
Substrate be positioned in the air that humidity is 80% and solidify, prepare the thin polymer film with polygonal hole structure；
(3) using vacuum thermal evaporation deposition silverskin on the thin polymer film that step (2) obtains, obtaining deposition has silverskin
Thin polymer film；
(4) silverskin step (3) obtained is put in chloroform with described thin polymer film and is separated, thing template to be polymerized
After dissolving, extracting silverskin with polydimethylsiloxane (PDMS) substrate from air side, silverskin sticks to PDMS surface, will adhere to
Silverskin at substrate surface carries out natural drying, obtains flexible transparent electrode.
The thin polymer film preparing step (2) carries out SEM and line width distribution characterizes, and result is as shown in Figure 7.
The transparency preparing flexible transparent electrode is 91.8%, resistance per square is 14 Ω/.
Embodiment 7
The preparation method of a kind of flexible transparent electrode, said method comprising the steps of:
(1) being mixed with dichloromethane by polycaprolactone, stirring and dissolving 60min, polymer concentration is 90mg/mL, adds
The ratio of absolute methanol solvent, absolute methanol and chloroform is 10:1, prepares casting solution；
(2) casting solution that step (1) obtains is placed on silicon plate, forms the liquid film of 0.1mm, then by the described liquid film that is covered with
Substrate is positioned in the air that humidity is 60% and solidifies, and prepares the thin polymer film with polygonal hole structure；
(3) using vacuum thermal evaporation deposition of aluminum film on the thin polymer film that step (2) obtains, obtaining deposition has aluminum film
Thin polymer film；
(4) aluminum film step (3) obtained is put in dichloromethane with described thin polymer film and is separated, thing template to be polymerized
After dissolving, extracting aluminum film with polydimethylsiloxane (PDMS) substrate from air side, aluminum film sticks to PDMS surface, will adhere to
Aluminum film at substrate surface carries out natural drying, obtains flexible transparent electrode.
The transparency preparing flexible transparent electrode is 81.4%, resistance per square is 23.4 Ω/.
Embodiment 8
The preparation method of a kind of flexible transparent electrode, said method comprising the steps of:
(1) being mixed with Carbon bisulfide by polyimides, stirring and dissolving 10min, polymer concentration is 100mg/mL, adds
Anhydrous normal propyl alcohol solvent, the ratio of anhydrous normal propyl alcohol and chloroform is 8:1, prepares casting solution；
(2) casting solution that step (1) obtains is placed on mylar, forms the liquid film of 0.3mm, then be covered with liquid by described
The substrate of film is positioned in the air that humidity is 90% and solidifies, and prepares the thin polymer film with polygonal hole structure；
(3) on the thin polymer film that step (2) obtains, use DC sputtering deposition silverskin, obtain depositing silverskin
Thin polymer film；
(4) silverskin step (3) obtained is put in Carbon bisulfide with described thin polymer film and is separated, thing template to be polymerized
After dissolving, extracting silverskin with polyethylene terephthalate (PET) substrate from air side, silverskin sticks to pet sheet face, will
The silverskin sticking to substrate surface carries out natural drying, obtains flexible transparent electrode.
The transparency preparing flexible transparent electrode is 80.5%, resistance per square is 31.4 Ω/.
Embodiment 9
The preparation method of a kind of flexible transparent electrode, said method comprising the steps of:
(1) polycaprolactone being dissolved in chloroform, stirring and dissolving 40min, polymer concentration is 110mg/mL, adds different
The ratio of propanol solvent, isopropanol and chloroform is 12:1, prepares casting solution；
(2) casting solution that step (1) obtains is placed on mylar, forms the liquid film of 0.25mm, then be covered with described
The substrate of liquid film is positioned in the air that humidity is 75% and solidifies, and prepares the thin polymer film with polygonal hole structure；
(3) on the thin polymer film that step (2) obtains, use DC sputtering coating silverskin, obtain being coated with silverskin
Thin polymer film；
(4) silverskin step (3) obtained is put in chloroform with described thin polymer film and is separated, thing template to be polymerized
After dissolving, extracting silverskin with polyethylene terephthalate (PET) substrate from air side, silverskin sticks to pet sheet face, will
The silverskin sticking to substrate surface carries out natural drying, obtains flexible transparent electrode.
The transparency preparing flexible transparent electrode is 85.4%, resistance per square is 28.6 Ω/.
Embodiment 10
The preparation method of a kind of flexible transparent electrode, said method comprising the steps of:
(1) being mixed by cellulose acetate acetone, stirring and dissolving 50min, polymer concentration is 100mg/mL, adds anhydrous
The ratio of n-butanol solvent, dehydrated alcohol and chloroform is 12:1, prepares casting solution；
(2) casting solution that step (1) obtains is placed on mylar, forms the liquid film of 0.15mm, then be covered with described
The substrate of liquid film is positioned in the air that humidity is 90% and solidifies, and prepares the thin polymer film with polygonal hole structure；
(3) using vacuum thermal evaporation deposition silverskin on the thin polymer film that step (2) obtains, obtaining deposition has silverskin
Thin polymer film；
(4) silverskin step (3) obtained is put in acetone with described thin polymer film and is separated, and thing template to be polymerized is dissolved
After, extracting silverskin with polyethylene terephthalate (PET) substrate from air side, silverskin sticks to pet sheet face, will adhere to
Silverskin at substrate surface carries out natural drying, obtains flexible transparent electrode.
The transparency preparing flexible transparent electrode is 83.4%, resistance per square is 39 Ω/.
Comparative example 1:
A kind of preparation method of flexible transparent electrode, described method humidity of air in step (2) is in addition to 40%, its
His step is the most same as in Example 1.
The transparency preparing flexible transparent electrode is 27%, resistance per square is 53 Ω/.
Comparative example 2:
A kind of preparation method of flexible transparent electrode, described method humidity of air in step (2) is in addition to 95%, its
His step is the most same as in Example 1.
The transparency preparing flexible transparent electrode is 35%, resistance per square is 78 Ω/.
By embodiment 1-10 and comparative example 1 and 2 it can be seen that use a kind of flexible transparent electrode of present invention offer
Preparation method, by utilizing the group's of breathing case method to prepare the thin polymer film that porosity is high and line width is little, and makes based on it
For metal film, described metal film is combined formation flexible transparent electrode with flexible substrates, and the electrode transparency of preparation is high, resistance per square
Little, there is good pliability and electric conductivity.Meanwhile, air humidity is relatively big on the impact of flexible transparent electrode, air humidity
The transparency degradation of electrode less than 60% or all can be caused more than 90%.
Applicant states, the present invention illustrates the detailed construction feature of the present invention by above-described embodiment, but the present invention is also
It is not limited to above-mentioned detailed construction feature, does not i.e. mean that the present invention has to rely on above-mentioned detailed construction feature and could implement.Institute
Belonging to those skilled in the art it will be clearly understood that any improvement in the present invention, the equivalence to parts selected by the present invention is replaced
And the increase of accessory, concrete way choice etc., within the scope of all falling within protection scope of the present invention and disclosure.
The preferred embodiment of the present invention described in detail above, but, the present invention is not limited in above-mentioned embodiment
Detail, in the technology concept of the present invention, technical scheme can be carried out multiple simple variant, this
A little simple variant belong to protection scope of the present invention.
It is further to note that each the concrete technical characteristic described in above-mentioned detailed description of the invention, at not lance
In the case of shield, can be combined by any suitable means, in order to avoid unnecessary repetition, the present invention to various can
The compound mode of energy illustrates the most separately.
Additionally, combination in any can also be carried out between the various different embodiment of the present invention, as long as it is without prejudice to this
The thought of invention, it should be considered as content disclosed in this invention equally.
Claims (9)
1. the preparation method of a flexible transparent electrode, it is characterised in that said method comprising the steps of:
(1) polymer, organic solvent and absolute alcohol kind solvent are mixed, prepare casting solution；
(2) casting solution that step (1) obtains is placed on substrate formation liquid film, the more described substrate being covered with liquid film is positioned over sky
Gas solidifies, forms the thin polymer film with polygonal hole structure；
(3) on the thin polymer film that step (2) obtains, deposit metal film, obtain depositing the thin polymer film of metal film；
(4) metal film that step (3) is obtained and described polymer thin membrance separation, and extract metal film with substrate, obtain flexibility
Transparency electrode.
Preparation method the most according to claim 1, it is characterised in that step (1) described polymer is selected from polyimides, gathers oneself
Lactone, nitrocellulose, cellulose acetate, polylactic acid, polymethyl methacrylate, polystyrene and block copolymer thereof are appointed
Meaning one, more preferably polymethyl methacrylate；
Preferably, step (1) described organic solvent in dichloromethane, chloroform, Carbon bisulfide or acetone any one
Or the combination of at least two, more preferably chloroform；
Preferably, step (1) described absolute alcohol kind solvent is selected from methanol, ethanol, normal propyl alcohol, isopropanol, n-butyl alcohol or isobutanol
In any one or the combination of at least two, more preferably ethanol.
Preparation method the most according to claim 1 or claim 2, it is characterised in that the method for step (1) described mixing is first will polymerization
Thing is dissolved in organic solvent, then is added thereto to absolute alcohol kind solvent；
Preferably, described polymer is dissolved in organic solvent, and making polymer concentration in organic solvent is 40～120mg/
ML, more preferably 80～120mg/mL, particularly preferably 120mg/ml；
Preferably, described absolute alcohol kind solvent and organic solvent volume are than being (5～15): 1, more preferably (8～10): 1；
Particularly preferably 10:1；
Preferably, during the method for described dissolving is concussion dissolving, stirring and dissolving, ultrasonic dissolution or heating for dissolving any one or
The combination of at least two, more preferably stirring and dissolving；
Preferably, the time of described dissolving is 10～60min, more preferably 20～40min, particularly preferably 30min.
4. according to preparation method described in any one of claim 1-3, it is characterised in that step (2) described substrate is selected from silicon chip, glass
Glass, gold plaque, silver strip, mylar, Kapton, polyethylene film, polypropylene screen, silicone rubber or politef are appointed
Meaning one, more preferably glass.
5. preparation method described in any one of claim 1-4, it is characterised in that the thickness of step (2) described liquid film be 0.1～
0.3mm；
Preferably, the humidity of step (2) described air is 60～90%, more preferably 70%～80%；
Preferably, the hardening time of step (2) described solidification is 0.5～2h, more preferably 1～1.5h；
Preferably, the porosity of the described polymeric film that step (2) obtains is 54～81.7%；
Preferably, the main distribution of line width of the described polymeric film that step (2) obtains is 150～350nm.
6. according to preparation method described in any one of claim 1-5, it is characterised in that step (3) described metal selected from gold, silver,
Any one or the combination of at least two in copper or aluminum and alloy thereof；
Preferably, step (3) described deposition process selected from vapour deposition process, liquid phase method of formation, oxidizing process, diffusion method, galvanoplastic,
Vacuum thermal evaporation, DC sputtering, magnetron sputtering method, radio frequency sputtering method, pulsed laser deposition or molecular beam epitaxial growth
In method any one, more preferably vacuum thermal evaporation.
7. according to preparation method described in any one of claim 1-6, it is characterised in that the metal film that step (3) is obtained and institute
The method stating polymer thin membrance separation is: have the thin polymer film of metal film to be placed in organic solvent the deposition that step (3) obtains
In, make described thin polymer film be completely dissolved；
Preferably, described organic solvent in dichloromethane, chloroform, Carbon bisulfide or acetone any one or at least two
The combination planted.
8. according to preparation method described in any one of claim 1-7, it is characterised in that step (4) described substrate is poly dimethyl
Siloxanes and/or to polyethylene terephthalate；
Preferably, described in step (4), extracting method is: proposed from solvent by metal film from air side with described substrate,
The surface of metallic film adhesion substrate；
Preferably, after step (4) described extraction metal film, the metal film sticking to substrate surface is dried；
Preferably, described drying means one in vacuum drying, heat drying, forced air drying or natural drying or at least
The combination of two kinds, more preferably natural drying.
9. according to preparation method described in any one of claim 1-8, it is characterised in that said method comprising the steps of:
(1) being mixed with organic solvent by polymer, stirring and dissolving 10～60min, polymer concentration is 80～120mg/mL, then adds
Enter absolute alcohol kind solvent, prepare casting solution；
(2) casting solution step (1) obtained is as on substrate, forms the liquid film of 0.1～0.3mm, then is covered with liquid film by described
Substrate be positioned over humidity be 60～90% air in solidify, preparation has the thin polymer film of polygonal hole structure；
(3) on the thin polymer film that step (2) obtains, deposit metal film, obtain depositing the thin polymer film of metal film；
(4) metal film that step (3) is obtained and described polymer thin membrance separation, and extract metal film with substrate, obtain flexibility
Transparency electrode.
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| CN110487450A (en) * | 2019-08-23 | 2019-11-22 | 南方科技大学 | A kind of flexible touch sensation sensor and its preparation method and application |
| CN110742597A (en) * | 2019-10-23 | 2020-02-04 | 哈尔滨工业大学 | Method for preparing TPU/PDMS three-dimensional porous nerve electrode |
| CN110742597B (en) * | 2019-10-23 | 2022-04-22 | 哈尔滨工业大学 | Method for preparing TPU/PDMS three-dimensional porous nerve electrode |
| CN113061285A (en) * | 2021-02-26 | 2021-07-02 | 中国科学院深圳先进技术研究院 | Preparation method of ultrathin porous stretchable film electrode |
| WO2022179252A1 (en) * | 2021-02-26 | 2022-09-01 | 中国科学院深圳先进技术研究院 | Method for preparing ultra-thin porous stretchable thin-film electrode |
| CN113834859A (en) * | 2021-09-23 | 2021-12-24 | 广州天极电子科技股份有限公司 | Preparation method and test method of micron-sized electrode for grain boundary performance of grain boundary layer |
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