CN110487450A - A kind of flexible touch sensation sensor and its preparation method and application - Google Patents
A kind of flexible touch sensation sensor and its preparation method and application Download PDFInfo
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Classifications
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- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
- A61B5/00—Measuring for diagnostic purposes; Identification of persons
- A61B5/02—Detecting, measuring or recording pulse, heart rate, blood pressure or blood flow; Combined pulse/heart-rate/blood pressure determination; Evaluating a cardiovascular condition not otherwise provided for, e.g. using combinations of techniques provided for in this group with electrocardiography or electroauscultation; Heart catheters for measuring blood pressure
- A61B5/0205—Simultaneously evaluating both cardiovascular conditions and different types of body conditions, e.g. heart and respiratory condition
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/14—Measuring force or stress, in general by measuring variations in capacitance or inductance of electrical elements, e.g. by measuring variations of frequency of electrical oscillators
- G01L1/142—Measuring force or stress, in general by measuring variations in capacitance or inductance of electrical elements, e.g. by measuring variations of frequency of electrical oscillators using capacitors
- G01L1/146—Measuring force or stress, in general by measuring variations in capacitance or inductance of electrical elements, e.g. by measuring variations of frequency of electrical oscillators using capacitors for measuring force distributions, e.g. using force arrays
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- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Engineering & Computer Science (AREA)
- Cardiology (AREA)
- Physiology (AREA)
- Physics & Mathematics (AREA)
- Heart & Thoracic Surgery (AREA)
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- Animal Behavior & Ethology (AREA)
- General Health & Medical Sciences (AREA)
- Public Health (AREA)
- Veterinary Medicine (AREA)
- Power Engineering (AREA)
- General Physics & Mathematics (AREA)
- Measurement Of The Respiration, Hearing Ability, Form, And Blood Characteristics Of Living Organisms (AREA)
- Measurement And Recording Of Electrical Phenomena And Electrical Characteristics Of The Living Body (AREA)
Abstract
The present invention provides a kind of flexible touch sensation sensor and its preparation method and application, including working electrode and to electrode, the working electrode includes flexible electrode and flexible pad lamella；Wherein, the flexible electrode has micro-nano structure close to the side of the flexible pad lamella, and the flexible pad lamella has through-hole.Flexible touch sensation sensor provided by the invention has softness, high sensitivity, pressure detecting limit low, and system structure is simple, at low cost, can large area array the advantages of preparing.
Description
Technical field
The invention belongs to sensor technical field, it is related to a kind of flexible touch sensation sensor and its preparation method and application.
Background technique
Bionic intelligence sensing technology plays more and more extensive effect in current informationization, intelligent society.Its
In, in human body prosthetics field, assign dermal sensation decline patient again using sensing technology with normal touch feeling function,
It rehabilitation for patient and improves its quality of life and is of great significance.Dermal sensation decline refers to skin to environmental stimuli
A kind of disturbance of perception that feeling ability reduces, such as strong pain stimulation can only cause slightly to feel even insentience.The symptom
Generally as caused by neurotrosis, it is more common in hysteria and nervous system organic disease patient, and receive skin, trunk four limbs
Etc. tissues transfer operation disabled patient.For example bionical artificial limb of existing solution still has a large amount of problems, such as machine
Tool artificial limb generally uses hard material to prepare, and quality is heavy, can not carry out a variety of deformation needed for physical activity, inconvenient for use；
In addition, commercialization artificial limb does not have perceptible feedback function at present, user lacks proprioception, phantom limb phenomenon etc. easily occurs, can not
Meet user demand.
Based on the problems of the bionical artificial limb of existing hard, researcher proposes flexible touch sensation sensor as solution.
Flexible sensor assigns sensor by using the special constructions such as elastic material or island-bridge-type and is passed with the hard such as stretching, distorting
Deformability not available for sensor can effectively improve the comfort of wearer.Flexible sensor in mechanism include condenser type,
The multiple types such as resistance-type, inductance type, photo-electric and piezoelectric type.Wherein capacitance type sensor can turn the stimulus signal of external force
The variation of capacitance is turned to, to realize sensing function.The type sensor has fast response time, and low energy consumption, and structure is simple,
The advantages such as signal-to-noise ratio is low, have a good application prospect, thus become current hotspot research field.
CN103983382A discloses a kind of Grazing condition capacitance type touch sensor, including a flexible substrates are arranged, at it
Lower surface is provided with shielded layer, and surface is provided with compliant conductive bottom crown on it and interval is looped around outside compliant conductive bottom crown
The compliant conductive top crown electrode enclosed；Inverted concave bullet is covered between compliant conductive bottom crown and compliant conductive top crown electrode
Property dielectric layer, inverted concave compliant conductive top crown is covered in elastomeric dielectric layer periphery, in the outer of compliant conductive top crown
Shroud is equipped with inverted concave flexible cover sheet.The design collects power-on and power-off pole plate lead in same flexible substrates, advantageously accounts for
The problems such as lead present in sensor array design is cumbersome, not convenient for safeguarding；But because the sensor is set using multilayered structure
There is the disadvantages of encapsulation is difficult, and preparation process is complicated in meter.CN109443607A discloses a kind of the new of simulation of human body electronic skin
Type sensory perceptual system structure, the structure include alignment layers gel based on acrylamide and lithium chloride and based on ionic liquid
BMIMBF4Polymer sensing layer gel；The alignment layers gel based on acrylamide and lithium chloride and described it is based on ionic liquid
VHB band is equipped between body BMIMBF4 polymer sensing layer gel；The patent helps to improve the positioning accuracy of sensor-based system, together
When do not increase system complexity；But the ionic gel that the sensor introduces, property is unstable, and there are bio-safety hidden danger, and
Strict requirements are packaged with to device, are unfavorable for practical application.CN107941386A discloses a kind of based on transparent organism material
Flexible force-touch sensor, sensing element and preparation method thereof, sensing element includes water conservation layer substrate and is wrapped in it
Hydrogel, the solute of the hydrogel is by sodium alginate, calcium disodium chelate and gluconic acid delta-lactone with mass ratio
2:(0.5-1.5): (0.5-1.5) is constituted, and wherein the mass concentration of sodium alginate is 2-6%；Sensor include it is successively wired or
Sensing element, measuring circuit, A/D converter circuit and the display of wireless connection；The aquogel system that the design uses is to environmental wet
Degree and temperature requirement are very high, make and use link and are required to stringent water conservation air-proof condition, while the slow of gel moisture is waved
Hair will lead to device stability reduction, and there are problems for long-time service.
Therefore, it is necessary to simple, high sensitivity of developing a kind of structure, the flexible sensing that pressure is distributed in certain area can be acquired
Device is to meet application requirement.
Summary of the invention
The purpose of the present invention is to provide a kind of flexible touch sensation sensors and its preparation method and application.It is provided by the invention
The advantages of flexible touch sensation sensor has high sensitivity, and pressure detecting limit is low, and structure is simple, high sensitivity.
In order to achieve that object of the invention, the invention adopts the following technical scheme:
In a first aspect, the present invention provides a kind of flexible touch sensation sensor, including working electrode and to electrode, the work
Electrode includes flexible electrode and flexible pad lamella.
Wherein, the flexible electrode has micro-nano structure, the flexible pad lamella close to the side of the flexible pad lamella
With through-hole.
Micro-nano structure of the present invention refer to flexible electrode surface have micro-meter scale, nanoscale it is micro-nano
Structure.
When in use, there is the flexible electrode flexible touch sensation sensor provided by the invention the side of micro-nano structure to attach
In on the flexible pad lamella, the flexible pad lamella is attached on skin, has through-hole on flexible pad lamella, and through-hole can be with
The micro-nano structure of flexible electrode is set to touch skin；Described be attached on skin another location to electrode is constituted into flexible touching simultaneously
Feel sensor.
The present invention is not defined to electrode, and any can satisfy can be used as pair of the invention to electrode requirement
Electrode uses, it should be noted that needs to meet application requirement of the invention to electrode, i.e., has excellent fitting to skin
Property, it can sufficiently be bonded on the skin；Illustratively, flexible electrical provided by the invention may be selected in the material of the invention to electrode
Pole, without flexible electrode, goldleaf or Signa Gel of micro-nano structure etc..
The present invention is based on capacitance sensing mechanism, the intrinsic ion conductor characteristic having using human body itself pastes sensor
It, can shape between skin and flexible electrode after being attached on skin (flexible pad lamella is attached at skin far from the side of flexible electrode)
At electric double layer capacitance, when the contact area between skin and flexible electrode changes, capacitance signal will change, so as to
To realize sensing function, and then the highly sensitive tactilely-perceptible of skin may be implemented.
Flexible touch sensation sensor provided by the invention has softness, high sensitivity, pressure detecting limit low, system structure letter
It is single, it is at low cost, can the preparation of large area array the advantages of, the tactilely-perceptible function of dermal sensation decline patient can be restored.
In the present invention, the micro-nano structure includes ratio of height to diameter microtrabeculae, conical structure, semiglobe or pyramid structure,
It is preferred that ratio of height to diameter microtrabeculae.
Ratio of height to diameter microtrabeculae of the present invention refers to the biggish micro- cylindrical structure of H/D numerical value, and wherein H represents cylinder height
Degree, D represent body diameter.
Preferably, the diameter of the ratio of height to diameter microtrabeculae is 5-20 μm, such as 6 μm, 10 μm, 12 μm, 16 μm, 18 μm etc., into
Preferably 10 μm of one step.
Preferably, the height of the ratio of height to diameter microtrabeculae is 10-70 μm, such as 20 μm, 30 μm, 40 μm, 50 μm, 60 μm etc.,
Further preferably 20-50 μm, still more preferably 30 μm.
Preferably, the center between the two neighboring ratio of height to diameter microtrabeculae is away from being 15-50 μm, such as 20 μm, 30 μm, 35 μ
M, 40 μm etc., further preferably 20 μm.
The preferred diameter of the present invention is 10 μm, be highly 30 μm, center is away from the ratio of height to diameter microtrabeculae for 20 μm, compared to other tools
There is the microtrabeculae of more larger ratio of height to diameter, have and be easy demoulding, is prepared into the advantages such as power height, and compared to micro- with smaller ratio of height to diameter
Column or conical structure or semiglobe etc., and have many advantages, such as to be pressurized and be easily deformed, be conducive to improve sensitivity.
Preferably, the micro-nano structure is micro-nano array structure.
The preferred micro-nano structure of the present invention is arranged at array format.
Preferably, the baseplate material of the flexible electrode is flexible high molecular material, selected from dimethyl silicone polymer and/or
Ionic gel.
Preferably, the substrate with a thickness of 30-200 μm, such as 40 μm, 50 μm, 80 μm, 100 μm, 120 μm, 150 μm,
180 μm etc., further preferred 50-100 μm, still more preferably 70 μm.
Preferably, on the flexible pad lamella, the hole density of the through-hole is 30-60%, for example, 35%, 40%,
45%, 50%, 55% etc..
If the aperture of through-hole is excessive, when being attached on skin, flexible electrode may directly contact skin, then
The meaning for just losing addition flexible gasket, if the aperture of through-hole is too small, flexible electrode possibly can not touch skin, in turn
Lose sensing function.
Similarly, if the hole density of through-hole is too small or excessive, also it is unable to reach highly sensitive detection of the invention.
Preferably, the shape of the through-hole in triangle, circle, square or regular hexagon any one or extremely
Few two kinds of combination, it is further preferably round.
Preferably, the circular diameter is 5-20mm, such as 8mm, 10mm, 12mm, 15mm, 18mm etc. is further excellent
Select 8-15mm, still more preferably 10mm.
Preferably, the flexible pad lamella is macromolecule membrane layer.
Preferably, the macromolecule membrane is selected from polycarbonate film, Kapton or poly terephthalic acid second two
In alcohol ester film any one or at least two combination.
Preferably, the flexible pad lamella with a thickness of 15-75 μm, further preferred 20-50 μm.
Preferably, the surface of the flexible electrode has conductive coating.
Preferably, the conductive coating with a thickness of 50-150nm, such as 60nm, 80nm, 100nm, 120nm, 140nm
Deng further preferred 80-120nm.
Preferably, the appointing in gold, silver, copper, carbon or conducting polymer of conductive material used in the conductive coating
It anticipates a kind of or at least two combinations, further preferably gold and/or silver.
Flexible touch sensation sensor of the invention can use any method that it can be prepared, provided by the invention as follows
Preparation method do not play the role of absolute limit to it, be only exemplary explanation.
Second aspect, it is described the present invention provides the preparation method of the flexible touch sensation sensor according to first aspect
Working electrode the preparation method is as follows:
(1) micro-nano structure is prepared on silicon plate, and the flexible electrode base of micro-nano structure is then had as template preparation
Plate；
(2) conductive layer is prepared on the outside of the substrate that step (1) obtains, obtains flexible electrode；
(3) through-hole is prepared on macromolecule membrane, obtains flexible pad lamella；
(4) there is the side of micro-nano structure to be covered on flexible pad lamella flexible electrode, obtains the working electrode.
In the flexible touch sensation sensor course of work, working electrode is attached at a certain position of skin, electrode is attached at
Skin another location, due to electrode can in the prior art to electrode, the present invention is not to the system to electrode
Preparation Method is defined.
Preferably, step (1) specifically: etch micro-nano structure on silicon plate, obtain a template, then pass through hot padding
Method prepares secondary template, then obtains the flexible electrode substrate for having micro-nano structure by reverse mould.
Reverse mould of the present invention is specifically as follows: using modes such as coatings, high molecular material being coated on secondary template
On, it is demoulded after dry, i.e., reverse mould refers to the method being transferred to micro-nano structure from mold on other macromolecule membranes.
Why the present invention selects secondary reverse mould, and even the mode of reverse mould prepares flexible electrode three times, if mainly considering
The micro-nano structure of micro-nano structure in template and flexible electrode of the invention on the contrary, and silicon plate hardness is higher, if directly adopting
Flexible electrode is prepared using a template with flexible macromolecule, it is likely that will appear since flexible macromolecule is softer, micro-nano knot
The phenomenon that structure is broken in demoulding.
Preferably, the substrate of the secondary template is selected from polycarbonate, polyimides or polyethylene terephthalate
In any one or at least two combination, preferred polycarbonate.
Preferably, the preparation method of the conductive layer is vapor deposition.
Preferably, the preparation method of the through-hole is selected from machine cuts, carbon dioxide laser cutting or infrared laser cutting
In any one or at least two combination.
The third aspect, the present invention provides a kind of flexible touch sensation sensors according to first aspect in human-computer interaction system
Application in system.
Flexible touch sensation sensor provided by the invention has high-flexibility and comfort, can be attached at skin completely, can essence
The really body surface tactile data under the measurement various movements of human body；And high sensitivity, pressure detecting limit is low, can array, precision is high, can
Large area measurement acquisition skin surface pressure distributed intelligence；Flexible touch sensation sensor provided by the invention can long periods of wear, realize
The uninterrupted continuous monitoring of vital sign is wanted to pulse, heartbeat, breathing et al. weight.
Compared with the existing technology, the invention has the following advantages:
(1) the present invention is based on capacitance sensing mechanism, the intrinsic ion conductor characteristics having using human body itself, by sensor
(flexible pad lamella is attached at skin far from the side of flexible electrode), meeting between skin and flexible electrode after attaching on skin
Electric double layer capacitance is formed, when the contact area between skin and flexible electrode changes, capacitance signal will change, thus
Sensing function may be implemented, and then the highly sensitive tactilely-perceptible of skin may be implemented.
(2) there is flexible touch sensation sensor provided by the invention softness, high sensitivity, pressure detecting to limit low, system structure
Simply, at low cost, can large area array preparation the advantages of.
Detailed description of the invention
Fig. 1 is the structural schematic diagram for the sensor that the embodiment of the present invention 1 provides.
Wherein, 1- flexible electrode；2- flexible pad lamella.
Fig. 2 is the structural schematic diagram for the flexible electrode that the embodiment of the present invention 1 provides.
Wherein, 101- substrate；102- ratio of height to diameter microtrabeculae.
Fig. 3 is the structural schematic diagram for the flexible pad lamella that the embodiment of the present invention 1 provides.
Wherein, 201- through-hole.
Fig. 4 is the scanning electron microscope (SEM) photograph for the flexible macromolecule film with micro-column structure that the embodiment of the present invention 1 provides.
Fig. 5 is the flexible macromolecule film with micro-column structure of the offer of the embodiment of the present invention 1 after compression verification
Scanning electron microscope (SEM) photograph.
Fig. 6 is the sensitivity test figure for the flexible touch sensation sensor that the embodiment of the present invention 1 provides.
Fig. 7 is the human pulse test chart that the embodiment of the present invention 1 provides.
Specific embodiment
The technical scheme of the invention is further explained by means of specific implementation.Those skilled in the art should be bright
, the described embodiments are merely helpful in understanding the present invention, should not be regarded as a specific limitation of the invention.
Embodiment 1
A kind of flexible touch sensation sensor, as shown in Figure 1, by the flexible electrode and flexible pad lamella group that have micro-nano structure
At there is flexible electrode the side of micro-nano structure to be bonded with flexible pad lamella.
As shown in Fig. 2, flexible electrode has micro-nano structure array, micro-nano structure is ratio of height to diameter microtrabeculae；As shown in figure 3, soft
Property spacer layer have circular through hole.It should be noted that size may not represent actual size in figure, only make exemplary theory
It is bright.
The preparation method is as follows:
(1) photoetching technique is utilized, the borehole structure of ratio of height to diameter is etched on silicon plate, in this, as a template, micropore
Diameter be 5 μm, depth is 10 μm, and micropore center is away from being 15 μm；Using hot press printing technology, it is with polycarbonate macromolecule membrane
Transfer materials, by transfer, prepare the secondary template with micro-column structure using a template as template；
It (2) the use of dimethyl silicone polymer is raw material, using spin coating technique, using secondary template as template, by connecting twice
Continuous reverse mould obtains the flexible macromolecule film with micro-column structure, and film substrate is with a thickness of 30 μm, and micro post diameter is 5 μm, height
It is 10 μm, microtrabeculae center is away from being 15 μm；
(3) electron beam vacuum evaporation equipment is utilized, it is golden to the obtained flexible macromolecule film vapor deposition with micro-column structure,
Obtain flexible electrode, coating film thickness 50nm；
(4) it is cut on polyethylene terephthalate macromolecule membrane using carbon dioxide laser cutting circular
Hole array structure, obtains flexible pad lamella, and spacer layer is with a thickness of 15 μm, Circularhole diameter 5mm；
(5) flexible pad lamella and flexible electrode are successively attached to skin same position, as sensitive zones；
(6) another flexible electrode that step (3) obtains is attached to skin another location as to electrode, obtains skin touching
Feel sensor.
Embodiment 2
A kind of flexible touch sensation sensor is made of, flexible electrode the flexible electrode and flexible pad lamella that have micro-nano structure
Side with micro-nano structure is bonded with flexible pad lamella.
Flexible electrode has micro-nano structure array, and micro-nano structure is ratio of height to diameter microtrabeculae；Flexible pad lamella has circular through hole.
The preparation method is as follows:
(1) photoetching technique is utilized, the borehole structure of ratio of height to diameter is etched on silicon plate, in this, as a template, micropore
Diameter be 15 μm, depth is 50 μm, and micropore center is away from being 40 μm；Using hot press printing technology, with polycarbonate macromolecule membrane
, by transfer, the secondary template with micro-column structure is prepared using a template as template for transfer materials；
It (2) the use of ionic gel is raw material, using spin coating technique, using secondary template as template, by continuous reverse mould twice,
The flexible macromolecule film with micro-column structure is obtained, for film substrate with a thickness of 50 μm, micro post diameter is 15 μm, and depth is 50 μ
M, micropore center is away from being 40 μm；
(3) electron beam vacuum evaporation equipment is utilized, it is golden to the obtained flexible macromolecule film vapor deposition with micro-column structure,
Obtain flexible electrode, coating film thickness 60nm；
(4) it is cut on polyethylene terephthalate macromolecule membrane using carbon dioxide laser cutting circular
Hole array structure, obtains flexible pad lamella, and spacer layer is with a thickness of 30 μm, Circularhole diameter 5mm；
(5) flexible pad lamella and flexible electrode are successively attached to skin same position, as sensitive zones；
(6) another flexible electrode that step (3) obtains is attached to skin another location as to electrode, obtains skin touching
Feel sensor.
Embodiment 3
A kind of flexible touch sensation sensor is made of, flexible electrode the flexible electrode and flexible pad lamella that have micro-nano structure
Side with micro-nano structure is bonded with flexible pad lamella.
Flexible electrode has micro-nano structure array, and micro-nano structure is ratio of height to diameter microtrabeculae；Flexible pad lamella has circular through hole.
The preparation method is as follows:
(1) photoetching technique is utilized, the borehole structure of ratio of height to diameter is etched on silicon plate, in this, as a template, micropore
Diameter be 20 μm, depth is 30 μm, and micropore center is away from being 50 μm；Using hot press printing technology, with polycarbonate macromolecule membrane
, by transfer, the secondary template with micro-column structure is prepared using a template as template for transfer materials；
It (2) the use of dimethyl silicone polymer is raw material, using spin coating technique, using secondary template as template, by connecting twice
Continuous reverse mould obtains the flexible macromolecule film with micro-column structure, and for film substrate with a thickness of 60 μm, micro post diameter is 20 μm, deep
Degree is 30 μm, and micropore center is away from being 50 μm；
(3) electron beam vacuum evaporation equipment is utilized, it is golden to the obtained flexible macromolecule film vapor deposition with micro-column structure,
Obtain flexible electrode, coating film thickness 80nm；
(4) circular hole array structure is cut on polycarbonate macromolecule membrane using carbon dioxide laser cutting,
Obtain flexible pad lamella, spacer layer is with a thickness of 45 μm, Circularhole diameter 10mm；
(5) flexible pad lamella and flexible electrode are successively attached to skin same position, as sensitive zones；
(6) another flexible electrode that step (3) obtains is attached to skin another location as to electrode, obtains skin touching
Feel sensor.
Embodiment 4
A kind of flexible touch sensation sensor is made of, flexible electrode the flexible electrode and flexible pad lamella that have micro-nano structure
Side with micro-nano structure is bonded with flexible pad lamella.
Flexible electrode has micro-nano structure array, and micro-nano structure is ratio of height to diameter microtrabeculae；Flexible pad lamella has circular through hole.
The preparation method is as follows:
(1) photoetching technique is utilized, the borehole structure of ratio of height to diameter is etched on silicon plate, in this, as a template, micropore
Diameter be 10 μm, depth is 30 μm, and micropore center is away from being 35 μm；Using hot press printing technology, with polycarbonate macromolecule membrane
, by transfer, the secondary template with micro-column structure is prepared using a template as template for transfer materials；
It (2) the use of dimethyl silicone polymer is raw material, using spin coating technique, using secondary template as template, by connecting twice
Continuous reverse mould obtains the flexible macromolecule film with micro-column structure, and for film substrate with a thickness of 80 μm, micro post diameter is 10 μm, deep
Degree is 30 μm, and micropore center is away from being 35 μm；
(3) electron beam vacuum evaporation equipment is utilized, it is golden to the obtained flexible macromolecule film vapor deposition with micro-column structure,
Obtain flexible electrode, coating film thickness 80nm；
(4) circular hole array structure is cut on polyimides macromolecule membrane using carbon dioxide laser cutting,
Obtain flexible pad lamella, spacer layer is with a thickness of 60 μm, Circularhole diameter 10mm；
(5) flexible pad lamella and flexible electrode are successively attached to skin same position, as sensitive zones；
(6) another flexible electrode that step (3) obtains is attached to skin another location as to electrode, obtains skin touching
Feel sensor.
Embodiment 5
A kind of flexible touch sensation sensor is made of, flexible electrode the flexible electrode and flexible pad lamella that have micro-nano structure
Side with micro-nano structure is bonded with flexible pad lamella.
Flexible electrode has micro-nano structure array, and micro-nano structure is ratio of height to diameter microtrabeculae；Flexible pad lamella has circular through hole.
The preparation method is as follows:
(1) photoetching technique is utilized, the borehole structure of ratio of height to diameter is etched on silicon plate, in this, as a template, micropore
Diameter be 5 μm, depth is 10 μm, and micropore center is away from being 30 μm；Using hot press printing technology, it is with polycarbonate macromolecule membrane
Transfer materials, by transfer, prepare the secondary template with micro-column structure using a template as template；
It (2) the use of dimethyl silicone polymer is raw material, using spin coating technique, using secondary template as template, by connecting twice
Continuous reverse mould obtains the flexible macromolecule film with micro-column structure, and film substrate is with a thickness of 80 μm, and micro post diameter is 5 μm, depth
It is 10 μm, micropore center is away from being 30 μm；
(3) electron beam vacuum evaporation equipment is utilized, it is golden to the obtained flexible macromolecule film vapor deposition with micro-column structure,
Obtain flexible electrode, coating film thickness 100nm；
(4) it is cut on polyethylene terephthalate macromolecule membrane using carbon dioxide laser cutting circular
Hole array structure, obtains flexible pad lamella, and spacer layer is with a thickness of 75 μm, Circularhole diameter 15mm；
(5) flexible pad lamella and flexible electrode are successively attached to skin same position, as sensitive zones；
(6) another flexible electrode that step (3) obtains is attached to skin another location as to electrode, obtains skin touching
Feel sensor.
Embodiment 6
A kind of flexible touch sensation sensor is made of, flexible electrode the flexible electrode and flexible pad lamella that have micro-nano structure
Side with micro-nano structure is bonded with flexible pad lamella.
Flexible electrode has micro-nano structure array, and micro-nano structure is ratio of height to diameter microtrabeculae；Flexible pad lamella has circular through hole.
The preparation method is as follows:
(1) photoetching technique is utilized, the borehole structure of ratio of height to diameter is etched on silicon plate, in this, as a template, micropore
Diameter be 20 μm, depth is 70 μm, and micropore center is away from being 50 μm；Using hot press printing technology, with polycarbonate macromolecule membrane
, by transfer, the secondary template with micro-column structure is prepared using a template as template for transfer materials；
It (2) the use of dimethyl silicone polymer is raw material, using spin coating technique, using secondary template as template, by connecting twice
Continuous reverse mould obtains the flexible macromolecule film with micro-column structure, and for film substrate with a thickness of 200 μm, micro post diameter is 20 μm, deep
Degree is 70 μm, and micropore center is away from being 50 μm；
(3) electron beam vacuum evaporation equipment is utilized, it is golden to the obtained flexible macromolecule film vapor deposition with micro-column structure,
Obtain flexible electrode, coating film thickness 150nm；
(4) it is cut on polyethylene terephthalate macromolecule membrane using carbon dioxide laser cutting circular
Hole array structure, obtains flexible pad lamella, and spacer layer is with a thickness of 60 μm, Circularhole diameter 20mm；
(5) flexible pad lamella and flexible electrode are successively attached to skin same position, as sensitive zones；
(6) skin another location is attached to as to electrode using with a thickness of the gold-foil electrode of 100nm, obtain skin tactile biography
Sensor.
Embodiment 7
A kind of flexible touch sensation sensor is made of, flexible electrode the flexible electrode and flexible pad lamella that have micro-nano structure
Side with micro-nano structure is bonded with flexible pad lamella.
Flexible electrode has micro-nano structure array, and micro-nano structure is ratio of height to diameter microtrabeculae；Flexible pad lamella has circular through hole.
The preparation method is as follows:
(1) photoetching technique is utilized, the borehole structure of ratio of height to diameter is etched on silicon plate, in this, as a template, micropore
Diameter be 10 μm, depth is 50 μm, and micropore center is away from being 40 μm；Using hot press printing technology, with polycarbonate macromolecule membrane
, by transfer, the secondary template with micro-column structure is prepared using a template as template for transfer materials；
It (2) the use of dimethyl silicone polymer is raw material, using spin coating technique, using secondary template as template, by connecting twice
Continuous reverse mould obtains the flexible macromolecule film with micro-column structure, and for film substrate with a thickness of 70 μm, micro post diameter is 10 μm, deep
Degree is 50 μm, and micropore center is away from being 40 μm；
(3) electron beam vacuum evaporation equipment is utilized, it is golden to the obtained flexible macromolecule film vapor deposition with micro-column structure,
Obtain flexible electrode, coating film thickness 100nm；
(4) it is cut on polyethylene terephthalate macromolecule membrane using carbon dioxide laser cutting circular
Hole array structure, obtains flexible pad lamella, and spacer layer is with a thickness of 75 μm, Circularhole diameter 20mm；
(5) flexible pad lamella and flexible electrode are successively attached to skin same position, as sensitive zones；
(6) skin another location is attached to as to electrode using with a thickness of the gold-foil electrode of 100nm, obtain skin tactile biography
Sensor
Embodiment 8
A kind of flexible touch sensation sensor is made of, flexible electrode the flexible electrode and flexible pad lamella that have micro-nano structure
Side with micro-nano structure is bonded with flexible pad lamella.
Flexible electrode has micro-nano structure array, and micro-nano structure is ratio of height to diameter microtrabeculae；Flexible pad lamella has circular through hole.
The preparation method is as follows:
(1) photoetching technique is utilized, the borehole structure of ratio of height to diameter is etched on silicon plate, in this, as a template, micropore
Diameter be 10 μm, depth is 50 μm, and micropore center is away from being 40 μm；Using hot press printing technology, with polycarbonate macromolecule membrane
, by transfer, the secondary template with micro-column structure is prepared using a template as template for transfer materials；
It (2) the use of dimethyl silicone polymer is raw material, using spin coating technique, using secondary template as template, by connecting twice
Continuous reverse mould obtains the flexible macromolecule film with micro-column structure, and for film substrate with a thickness of 30 μm, micro post diameter is 10 μm, deep
Degree is 50 μm, and micropore center is away from being 40 μm；
(3) electron beam vacuum evaporation equipment is utilized, it is golden to the obtained flexible macromolecule film vapor deposition with micro-column structure,
Obtain flexible electrode, coating film thickness 120nm；
(4) it is cut on polyethylene terephthalate macromolecule membrane using carbon dioxide laser cutting circular
Hole array structure, obtains flexible pad lamella, and spacer layer is with a thickness of 75 μm, Circularhole diameter 20mm；
(5) flexible pad lamella and flexible electrode are successively attached to skin same position, as sensitive zones；
(6) another flexible electrode that step (3) obtains is attached to skin another location as to electrode, obtains skin touching
Feel sensor.
Embodiment 9
A kind of flexible touch sensation sensor is made of, flexible electrode the flexible electrode and flexible pad lamella that have micro-nano structure
Side with micro-nano structure is bonded with flexible pad lamella.
Flexible electrode has micro-nano structure array, and micro-nano structure is semiglobe；Flexible pad lamella has circular through hole.
The preparation method is as follows:
(1) photoetching technique is utilized, the ball pore structure of ratio of height to diameter is etched on silicon plate, in this, as a template, partly
The diameter of ball is 10 μm, and micropore center is away from being 40 μm；It is transfer material with polycarbonate macromolecule membrane using hot press printing technology
Material, by transfer, prepares the secondary template with micro-column structure using a template as template；
It (2) the use of dimethyl silicone polymer is raw material, using spin coating technique, using secondary template as template, by connecting twice
Continuous reverse mould obtains the flexible macromolecule film with micro-column structure, and for film substrate with a thickness of 30 μm, micro post diameter is 10 μm, micro-
Hole center is away from being 40 μm；
(3) electron beam vacuum evaporation equipment is utilized, it is golden to the obtained flexible macromolecule film vapor deposition with micro-column structure,
Obtain flexible electrode, coating film thickness 120nm；
(4) it is cut on polyethylene terephthalate macromolecule membrane using carbon dioxide laser cutting circular
Hole array structure, obtains flexible pad lamella, and spacer layer is with a thickness of 75 μm, Circularhole diameter 20mm；
(5) flexible pad lamella and flexible electrode are successively attached to skin same position, as sensitive zones；
(6) another flexible electrode that step (3) obtains is attached to skin another location as to electrode, obtains skin touching
Feel sensor.
Embodiment 10
Difference with embodiment 1 is only that, in the present embodiment, the conductive material of vapor deposition is replaced with silver.
Embodiment 11
Difference with embodiment 1 is only that, in the present embodiment, the conductive material of vapor deposition is replaced with carbon.
Embodiment 12
Difference with embodiment 1 is only that, in the present embodiment, the upper borehole structure of spacer layer is replaced with equilateral three
It is angular, side length 1mm.
Comparative example 1
Difference with embodiment 1 is only that, in this comparative example, removes flexible pad lamella.
Comparative example 2
Difference with embodiment 9 is only that, in this comparative example, by the flexible electrode (having micro-nano structure) of sensitive zones
Replace with not no micro-nano structure with a thickness of replacing with the not thickness of micro-nano structure goldleaf electricity identical with flexible electrode substrate
Pole.
Comparative example 3
The difference from embodiment 1 is that flexible electrode is the polydimethylsiloxanes that golden film is deposited in surface in this comparative example
Alkane (without micro-nano structure), wherein dimethyl silicone polymer is with a thickness of 30 μm, coating film thickness 50nm.
Performance test
The sensor provided in embodiment 1-12 and comparative example 1-3 is tested for the property, the method is as follows:
(1) morphology characterization: using scanning electron microscope observation 1 step of embodiment (2) obtain with micro-column structure
Flexible macromolecule film.
Fig. 4 is the scanning electron microscope (SEM) photograph for the flexible macromolecule film with micro-column structure that embodiment 1 provides, and Fig. 5 is to implement
Scanning electron microscope (SEM) photograph of the flexible macromolecule film with micro-column structure that example 1 provides after compression verification.It can from figure
Electrode overall structure is regular out, and has good elasticity, and after overcompression, micro-column structure keeps vertical state, does not have
There is structural damage, embodies the durability of electrode.
(2) sensitivity test: apply certain pressure to sample using tensilon, while simultaneously using capacitance meter test
The variation of sample capacitance is recorded, test frequency is set as 1 × 105Then Hz calculates the sensitivity of sample.
Fig. 6 is the sensitivity test figure for the flexible touch sensation sensor that the embodiment of the present invention 1 provides, as seen from the figure, the present invention
There is provided sensor within the scope of 0-16kPa sensitivity in 1kPa-1More than, it can reach 11.8kPa-1；In the prior art
In, the sensitivity of the electrode with pyramid micro-nano structure reaches as high as 0.55kPa-1；With papillary dielectric layer micro-structure
Device sensitivity reaches as high as 1.5kPa-1；Device sensitivity with microballoon dielectric layer structure and mastoid process microelectrode structure is
0.815kPa-1；
Thus illustrate, relative to same type using micro-sphere structure electrode or micro- conical structure electrode or plate electrode
The sensitivity tool of (no micro-structure), flexible touch sensation sensor provided by the invention has a distinct increment.
(3) sensor prepared in embodiment 1 pulse test: is attached to a left side for subject person (healthy male, 25 years old)
At the radial artery of hand wrist, sensor and capacity measurement instrument LCR table are attached using conducting wire, test frequency be 1 ×
105Hz；
It may be constructed an ionistor between sensor and skin, because blood vessel pulsation causes skin to occur small
Volt causes skin to change with electrode contact surface product, and then lead to electricity to contact through flexible pad lamella with flexible electrode
Hold and changes；LCR table can record capacitance variations curve in real time, to reflect human pulse situation.
Fig. 7 is the human pulse test chart that the embodiment of the present invention 1 provides, as seen from the figure, softness haptic perception provided by the invention
Sensor can clearly reflect multiple characteristic peaks of human pulse bounce, show flexible touch sensation sensor provided by the invention
Sensitivity with higher.
The Applicant declares that the present invention is explained by the above embodiments flexible touch sensation sensor and its preparation side of the invention
Method and application, but the invention is not limited to above-mentioned processing steps, that is, do not mean that the present invention must rely on above-mentioned processing step
It could implement.It should be clear to those skilled in the art, any improvement in the present invention, to raw material selected by the present invention
Equivalence replacement and addition, the selection of concrete mode of auxiliary element etc., all fall within protection scope of the present invention and the open scope
Within.
Claims (10)
1. a kind of flexible touch sensation sensor, which is characterized in that including working electrode and to electrode, the working electrode includes flexibility
Electrode and flexible pad lamella；
Wherein, the flexible electrode has micro-nano structure close to the side of the flexible pad lamella, and the flexible pad lamella has
Through-hole.
2. flexible touch sensation sensor according to claim 1, which is characterized in that the micro-nano structure includes that ratio of height to diameter is micro-
Column, conical structure, semiglobe or pyramid structure, preferably ratio of height to diameter microtrabeculae；
Preferably, the diameter of the ratio of height to diameter microtrabeculae is 5-20 μm, further preferred 10 μm；
Preferably, the height of the ratio of height to diameter microtrabeculae is 10-70 μm, further preferred 20-50 μm, still more preferably 30 μm；
Preferably, the center between the two neighboring ratio of height to diameter microtrabeculae is away from being 15-50 μm, further preferably 20 μm；
Preferably, the micro-nano structure is micro-nano array structure.
3. flexible touch sensation sensor according to claim 1 or 2, which is characterized in that the baseplate material of the flexible electrode
For flexible high molecular material, it is selected from dimethyl silicone polymer and/or ionic gel；
Preferably, the substrate with a thickness of 30-200 μm, further preferred 50-100 μm, still more preferably 70 μm.
4. flexible touch sensation sensor described in any one of -3 according to claim 1, which is characterized in that in the flexible gasket
On layer, the hole density of the through-hole is 30-60%；
Preferably, the shape of the through-hole in triangle, circle, square or regular hexagon any one or at least two
The combination of kind, it is further preferably round；
Preferably, the circular diameter is 5-20mm, further preferred 8-15mm, still more preferably 10mm.
5. flexible touch sensation sensor described in any one of -4 according to claim 1, which is characterized in that the flexible pad lamella
For macromolecule membrane layer；
Preferably, the macromolecule membrane is selected from polycarbonate film, Kapton or polyethylene terephthalate
In film any one or at least two combination；
Preferably, the flexible pad lamella with a thickness of 15-75 μm, further preferred 20-50 μm.
6. flexible touch sensation sensor described in any one of -5 according to claim 1, which is characterized in that the flexible electrode
Surface has conductive coating；
Preferably, the conductive coating with a thickness of 50-150nm, further preferred 80-120nm；
Preferably, conductive material used in the conductive coating is any one in gold, silver, copper, carbon or conducting polymer
Kind or at least two combination, further preferably gold and/or silver.
7. the preparation method of flexible touch sensation sensor described in any one of -6 according to claim 1, which is characterized in that described
Working electrode the preparation method is as follows:
(1) micro-nano structure is prepared on silicon plate, and the flexible electrode substrate of micro-nano structure is then had as template preparation；
(2) conductive layer is prepared on the outside of the substrate that step (1) obtains, obtains flexible electrode；
(3) through-hole is prepared on macromolecule membrane, obtains flexible pad lamella；
(4) there is the side of micro-nano structure to be covered on flexible pad lamella flexible electrode, obtains the working electrode.
8. preparation method according to claim 7, which is characterized in that step (1) specifically: etch micro-nano knot on silicon plate
Structure obtains a template, then prepare secondary template by hot stamping, then is obtained by reverse mould described with micro-nano structure
Flexible electrode substrate；
Preferably, the substrate of the secondary template is in polycarbonate, polyimides or polyethylene terephthalate
Any one or at least two combination, preferred polycarbonate；
Preferably, the preparation method of the conductive layer is vapor deposition.
9. preparation method according to claim 7 or 8, which is characterized in that the preparation method of the through-hole is cut selected from machinery
Cut, carbon dioxide laser cutting or infrared laser cutting in any one or at least two combination.
10. application of the flexible touch sensation sensor described in any one of -6 in man-machine interactive system according to claim 1.
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| CN112587140A (en) * | 2020-12-09 | 2021-04-02 | 清华大学深圳国际研究生院 | Self-attaching bionic octopus sucking disc micro-nano structure dry electrode |
| CN113588140A (en) * | 2021-07-08 | 2021-11-02 | 上海交通大学 | Pressure sensor, pressure sensing array and preparation method thereof |
| CN114720026A (en) * | 2022-03-30 | 2022-07-08 | 哈尔滨工业大学 | Wide linear response range force touch sensor based on gradient composite integrated structure |
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